MICROELECTROMECHANICAL (MEMS) VIBRATION SENSOR WITH A SEGMENTED CARRIER PLATE
Patent Information
- Authority / Receiving Office
- DE · DE
- Patent Type
- Patents
- Current Assignee / Owner
- INFINEON TECHNOLOGIES AG
- Filing Date
- 2022-06-10
- Publication Date
- 2026-04-15
AI Technical Summary
Existing MEMS vibration sensors lack sensitivity to low-frequency sound waves and vibrations, and there is a need for improved methods to accurately detect three-dimensional acceleration without orientation dependence.
A MEMS vibration sensor design featuring a segmented backplate and an inertial mass attached to a membrane, which generates multiple output signals processed by an ASIC to determine X, Y, and Z-axis accelerations and vibrations, allowing for enhanced sensitivity and orientation-independent detection.
The sensor achieves improved sensitivity to low-frequency sound waves and vibrations, and can accurately detect three-dimensional accelerations regardless of its orientation, reducing distortion and enhancing signal processing capabilities.