Vacuum pump

Abstract

A vacuum pump, in particular a turbomolecular pump, comprises a pump housing with a housing section for receiving pump-active components of the vacuum pump and with a flange section spanning a mounting plane, which is provided for connecting the vacuum pump to a receiver and which is preferably formed in one piece, wherein the housing section and the flange section are formed as separate components, wherein the housing section comprises a support section, and wherein the flange section comprises a coupling section that can be coupled to the receiver and a mounting section connected to the support section, which is formed without openings at least in one direction perpendicular to the mounting plane.

Description

[0001] The invention relates to a vacuum pump, in particular a turbomolecular pump.

[0002] Publication EP 3 051 138 B1 discloses a vacuum pump according to the preamble of claim 1. Publications EP 3 730 802 A1, US 2008 / 309071 A1, US 2005 / 029417 A1 and EP 1 795 757 B1 disclose related vacuum pumps.

[0003] Vacuum pumps are used to create a (high) vacuum in a vacuum chamber of a recipient. For this purpose, an inlet side of the vacuum pump must be connected to the vacuum chamber of the recipient. Conventional pump housings have a molded flange designed for connecting the vacuum pump to the recipient.

[0004] The implementation of pump assemblies can be complex and space-consuming, especially when customer-specific requirements must be met. For example, the pump may need to be as compact and lightweight as possible to enable or at least facilitate its integration into a customer's existing setup. Furthermore, the flanges to be connected may have different diameters and therefore cannot be directly mounted on top of each other, while the customer desires a compact design.

[0005] Furthermore, the pump, and especially the pump housing, should ideally be as robust as possible to ensure a long service life and increased pump safety. At the same time, however, it is desirable that the vacuum pump be easy to manufacture, easy to maintain, and highly economical.

[0006] Accordingly, one object of the present invention is to provide a flexibly deployable, compact, lightweight, robust and economical vacuum pump.

[0007] This problem is solved according to the invention by the features of claim 1.

[0008] According to the invention, the problem is solved by a vacuum pump, in particular a turbomolecular pump, comprising a pump housing with a housing section for receiving pump-active components of the vacuum pump and with a flange section spanning a mounting plane, which is provided for connecting the vacuum pump to a receiver and which is preferably formed in one piece. The housing section and the flange section of the pump housing of the vacuum pump according to the invention are designed as separate components, wherein the housing section comprises a support section and the flange section comprises a coupling section that can be coupled to the receiver and a mounting section connected to the support section, which is designed without openings in at least one direction perpendicular to the mounting plane.

[0009] In other words, the flange section, viewed in an axial direction of the vacuum pump, does not have a through hole or bore connecting the two opposite sides of the flange section. The central pump inlet of the vacuum pump, defined by the preferably annular flange section, is not to be understood as a through-hole according to the invention. Nor is a through-hole meant to be a groove or recess extending into the flange section and terminating inside the flange section.

[0010] In particular, the flange section is ring-shaped with a preferably circular outer and / or inner contour.

[0011] The multi-part, and in particular two-part, design of the pump housing allows the flange section to be easily and quickly mounted and detached from the pump housing. This, in turn, enables simple assembly of the pump housing as well as easy maintenance of the flange section and / or the pump's active components, without having to disassemble the entire pump housing. Furthermore, this design allows the flange section to be replaced as needed and adapted to the dimensions of a receiver connection.

[0012] By connecting the support section of the housing section to the mounting section of the flange section, and by ensuring that the mounting section is free of openings in at least one direction perpendicular to the mounting plane, maximum optimization of the pump housing space and high stability can be achieved. In particular, this allows connecting elements such as screws or welds, which attach the flange section to the housing section, to be positioned so that they do not protrude radially beyond the coupling section of the flange section, thus keeping the pump exceptionally slim.

[0013] According to one embodiment, the flange section and the housing section can be made of different metals to save weight and / or costs. In particular, the housing section is made of aluminum and / or the flange section of stainless steel.

[0014] The fastening section can comprise a base to which the coupling section is attached and which is preferably designed without openings, wherein the fastening section includes an extension section projecting from the base. The extension section preferably extends perpendicular to the fastening plane.

[0015] According to another embodiment, the mounting section can include a recess formed in the base for at least partially receiving the support section. This makes the pump housing particularly robust.

[0016] For easy assembly of the pump housing, the fastening section and the support section each include at least one connecting means for centering the connection of the flange section and the housing section, the connecting means being designed to be complementary.

[0017] The fasteners include conical coupling surfaces.

[0018] Additionally, the connecting elements can include cylindrical coupling surfaces.

[0019] The fasteners of the fastening section can be arranged on an outside side of the fastening section or facing the outside side of the fastening section. Advantageously, fasteners are arranged on the extension section.

[0020] Additionally or alternatively, the connecting means of the fastening section can be arranged on an inside side of the fastening section or face the inside of the fastening section.

[0021] According to one embodiment, the connecting means have complementary threaded sections, so that the flange section can simply be screwed onto the housing section.

[0022] According to another embodiment, the flange section can be attached to the housing section by means of at least one screw. This ensures easy maintenance of the vacuum pump.

[0023] For easy access, the at least one screw can extend from an outer to an inner surface of the housing. For better protection against external influences, the at least one screw can also extend from the inner to the outer surface of the housing. Advantageously, the at least one screw extends in a direction perpendicular to the respective coupling surfaces and / or at an angle to a longitudinal axis of the vacuum pump.

[0024] Additionally or alternatively, the flange section can be attached to the housing section by means of at least one weld, which connects the support section and the mounting section on the inside and / or outside of the pump. This makes the pump housing particularly robust and durable.

[0025] The weld can be formed on an end face of the extension section and / or on an end face of the support section. Additionally or alternatively, the weld can be formed at an opening in the recess of the base or an opening in the recess of the support section.

[0026] For improved maintainability and versatility of the pump, the flange section can be attached to the housing section by means of a bayonet connection, wherein the connecting means comprise at least one locking stud and at least one bayonet groove. In particular, a plurality of locking studs and bayonet grooves are provided, distributed circumferentially around the housing section and the flange section.

[0027] An unclaimed method for mounting the pump housing comprises the following steps: Pre-machining of the flange section and / or the housing section, in particular the mounting section and / or the support section; joining the flange section to the housing section, preferably by means of the connecting means, so that the flange section sits centered on the housing section; joining the flange section and the housing section to form the pump housing, in particular by means of a screw connection, a weld connection and / or a bayonet connection; and optionally: finishing of the assembled pump housing, in particular the connection points.

[0028] The invention is described below by way of example with reference to advantageous embodiments and the accompanying figures. These show, schematically: Fig. 1 a perspective view of a turbomolecular pump, Fig. 2 a view of the underside of the turbomolecular pump of Fig. 1 , Fig. 3 a cross-section of the turbomolecular pump along the in Fig. 2 Section line AA shown, Fig. 4 a cross-sectional view of the turbomolecular pump along the in Fig. 2 Section line BB, Fig. 5 shows a cross-sectional view of the turbomolecular pump along the line shown in Fig. 2 Section line CC shown, Fig. 6A, 6B, 7A cross-sectional views of a part of a pump housing of a vacuum pump according to various embodiments of the invention, Fig. 7B, 7C, 8 cross-sectional views of a part of a pump housing of a vacuum pump according to various non-inventive embodiments, Fig. 9A a side view of a pump housing of a vacuum pump in a non-assembled state according to a further, non-inventive embodiment, and Fig. 9 legs top view of a part of the in Fig. 9A shown pump housing.

[0029] The in Fig. 1 The turbomolecular pump 111 shown comprises a pump inlet 115 surrounded by an inlet flange 113, to which a receiver (not shown) can be connected in a manner known per se. The gas from the receiver can be drawn out of the receiver via the pump inlet 115 and conveyed through the pump to a pump outlet 117, to which a backing pump, such as a rotary vane pump, can be connected.

[0030] The inlet flange 113 forms a Fig. 1 The upper end of the housing 119 of the vacuum pump 111. The housing 119 comprises a lower part 121, to which an electronics housing 123 is attached laterally. The electronics housing 123 contains electrical and / or electronic components of the vacuum pump 111, e.g., for operating an electric motor 125 located in the vacuum pump (see also Fig. 3 The electronics housing 123 has several connections 127 for accessories. In addition, a data interface 129, e.g. according to the RS485 standard, and a power supply connection 131 are located on the electronics housing 123.

[0031] There are also turbomolecular pumps that do not have such an attached electronics housing, but are connected to external drive electronics.

[0032] The housing 119 of the turbomolecular pump 111 has a flood inlet 133, in particular in the form of a flood valve, through which the vacuum pump 111 can be flooded. In the area of ​​the lower part 121, a purge gas connection 135, also referred to as a purge gas connection, is also arranged, through which purge gas can be supplied to protect the electric motor 125 (see e.g. Fig. 3 The gas pumped by the pump can be introduced into the motor compartment 137, in which the electric motor 125 is housed in the vacuum pump 111. Two coolant connections 139 are also arranged in the lower part 121, one of which serves as an inlet and the other as an outlet for coolant that can be directed into the vacuum pump for cooling purposes. Other existing turbomolecular vacuum pumps (not shown) are operated exclusively with air cooling.

[0033] The lower side 141 of the vacuum pump can serve as a base, allowing the vacuum pump 111 to be operated standing upright on its underside 141. Alternatively, the vacuum pump 111 can be attached to a receiver via the inlet flange 113 and thus operated in a suspended position. Furthermore, the vacuum pump 111 can be designed to operate even when oriented differently than described. Fig. 1 As shown. It is also possible to implement embodiments of the vacuum pump in which the underside 141 can be arranged facing sideways or upwards instead of downwards. In principle, any angle is possible.

[0034] Other existing turbomolecular vacuum pumps (not shown), which are particularly larger than the pump shown here, cannot be operated in a standing position.

[0035] On the underside 141, which is in Fig. 2 As shown, various screws 143 are arranged, by means of which components of the vacuum pump, not further specified here, are fastened to one another. For example, a bearing cover 145 is attached to the underside 141.

[0036] Mounting holes 147 are also arranged on the underside 141, via which the pump 111 can be attached to a support surface, for example. This is not possible with other existing turbomolecular vacuum pumps (not shown), which are particularly larger than the pump shown here.

[0037] In the Figuren 2 bis 5 A coolant line 148 is shown, in which the coolant introduced and removed via the coolant connections 139 can circulate.

[0038] Like the sectional views of the Figuren 3 bis 5 As shown, the vacuum pump comprises several process gas pumping stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.

[0039] A rotor 149 is arranged in the housing 119, which has a rotor shaft 153 rotatable about a rotation axis 151.

[0040] The turbomolecular pump 111 comprises several turbomolecular pump stages connected in series to provide pumping action. These stages have several radial rotor disks 155 attached to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119. Each rotor disk 155 and an adjacent stator disk 157 form a turbomolecular pump stage. The stator disks 157 are held at a desired axial distance from each other by spacer rings 159.

[0041] The vacuum pump also includes Holweck pump stages arranged radially within one another and connected in series to effectively pump the pump. Other turbomolecular vacuum pumps exist (not shown) that do not have Holweck pump stages.

[0042] The rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylindrical Holweck rotor sleeves 163, 165 attached to and supported by the rotor hub 161, which are oriented coaxially to the axis of rotation 151 and nested one inside the other in the radial direction. Furthermore, two cylindrical Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and nested one inside the other in the radial direction.

[0043] The pump-active surfaces of the Holweck pump stages are formed by the outer surfaces, i.e., the radial inner and / or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169. The radial inner surface of the outer Holweck stator sleeve 167 faces the radial outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171, and together they form the first Holweck pump stage following the turbomolecular pumps. The radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169, forming a radial Holweck gap 173, and together they form a second Holweck pump stage. The radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165, forming a radial Holweck gap 175, and together they form the third Holweck pumping stage.

[0044] At the lower end of the Holweck rotor sleeve 163, a radially extending channel can be provided, through which the radially outer Holweck slot 171 is connected to the central Holweck slot 173. Furthermore, a radially extending channel can be provided at the upper end of the inner Holweck stator sleeve 169, through which the central Holweck slot 173 is connected to the radially inner Holweck slot 175. This connects the nested Holweck pump stages in series. A connecting channel 179 to the outlet 117 can also be provided at the lower end of the radially inner Holweck rotor sleeve 165.

[0045] The aforementioned pump-active surfaces of the Holweck stator sleeves 167, 169 each have several Holweck grooves spiraling around the axis of rotation 151 in the axial direction, while the opposite outer surfaces of the Holweck rotor sleeves 163, 165 are smooth and drive the gas forward in the Holweck grooves for the operation of the vacuum pump 111.

[0046] For the rotatable mounting of the rotor shaft 153, a rolling bearing 181 is provided in the area of ​​the pump outlet 117 and a permanent magnet bearing 183 is provided in the area of ​​the pump inlet 115.

[0047] In the area of ​​the rolling bearing 181, a conical injection nut 185 with an outer diameter increasing towards the rolling bearing 181 is provided on the rotor shaft 153. The injection nut 185 is in sliding contact with at least one wiper of a fluid reservoir. In other existing turbomolecular vacuum pumps (not shown), an injection screw may be provided instead of an injection nut. Since different designs are thus possible, the term "injection tip" is also used in this context.

[0048] The operating fluid reservoir comprises several stacked absorbent discs 187, which are impregnated with an operating fluid for the rolling bearing 181, e.g. with a lubricant.

[0049] During operation of the vacuum pump 111, the operating fluid is transferred by capillary action from the fluid reservoir via the wiper to the rotating injection nut 185 and, as a result of centrifugal force, is conveyed along the injection nut 185 in the direction of the increasing outer diameter of the injection nut 185 towards the rolling bearing 181, where it performs, for example, a lubricating function. The rolling bearing 181 and the fluid reservoir are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.

[0050] The permanent magnet bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, each containing a ring stack of several axially stacked permanent magnet rings 195, 197. The ring magnets 195, 197 face each other, forming a radial bearing gap 199, with the rotor-side ring magnets 195 arranged radially outside and the stator-side ring magnets 197 radially inside. The magnetic field present in the bearing gap 199 induces magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be radially supported. The rotor-side ring magnets 195 are supported by a support section 201 of the rotor shaft 153, which radially surrounds the ring magnets 195 on the outside.The stator-side ring magnets 197 are supported by a stator-side support section 203, which extends through the ring magnets 197 and is suspended from radial struts 205 of the housing 119. Parallel to the axis of rotation 151, the rotor-side ring magnets 195 are fixed by a cover element 207 coupled to the support section 201. The stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a retaining ring 209 connected to the support section 203 and a retaining ring 211 also connected to the support section 203. A disc spring 213 may also be provided between the retaining ring 211 and the ring magnets 197.

[0051] Within the magnetic bearing, an emergency or catch bearing 215 is provided, which runs freely without contact during normal operation of the vacuum pump 111 and only engages when there is excessive radial deflection of the rotor 149 relative to the stator, in order to form a radial stop for the rotor 149 and thus prevent a collision between the rotor-side and stator-side structures. The catch bearing 215 is designed as an unlubricated rolling bearing and forms a radial gap with the rotor 149 and / or the stator, which causes the catch bearing 215 to be disengaged during normal pump operation. The radial deflection at which the catch bearing 215 engages is dimensioned to be large enough so that the catch bearing 215 does not engage during normal operation of the vacuum pump, and simultaneously small enough to prevent a collision between the rotor-side and stator-side structures under all circumstances.

[0052] The vacuum pump 111 comprises the electric motor 125 for rotating the rotor 149. The armature of the electric motor 125 is formed by the rotor 149, whose rotor shaft 153 extends through the motor stator 217. A permanent magnet arrangement can be arranged radially on the outside or embedded in the section of the rotor shaft 153 extending through the motor stator 217. A space 219 is arranged between the motor stator 217 and the section of the rotor 149 extending through the motor stator 217. This space comprises a radial motor gap through which the motor stator 217 and the permanent magnet arrangement can magnetically influence each other to transmit the drive torque.

[0053] The motor stator 217 is fixed in the housing within the motor compartment 137 provided for the electric motor 125. A purge gas, also known as a sealing gas, which can be, for example, air or nitrogen, can enter the motor compartment 137 via the purge gas connection 135. This purge gas protects the electric motor 125 from process gas, e.g., from corrosive components of the process gas. The motor compartment 137 can also be evacuated via the pump outlet 117, meaning that the vacuum pressure in the motor compartment 137 is at least approximately equal to that produced by the backing pump connected to the pump outlet 117.

[0054] Between the rotor hub 161 and a wall 221 bounding the engine compartment 137, a so-called labyrinth seal 223, which is known per se, can also be provided, in particular to achieve a better seal of the engine compartment 217 against the radially outside Holweck pump stages.

[0055] The Fig. 6A Figure 1 shows a portion of a pump housing in the area of ​​the pump inlet of a vacuum pump according to an embodiment of the invention. In contrast to the previously described conventional vacuum pump, the pump housing according to the invention comprises a housing section 12 and a flange section 10 mounted thereon; that is, the housing section 12 and the flange section 10 are designed as separate components.

[0056] Housing section 12 is designed to accommodate pump-active components of the vacuum pump. These pump-active components include, for example, the electric motor 125, the rotor 149, the rotor shaft 153, and the like (see Figure 1). Fig. 1 bis 5 The housing section 12 preferably has a cylindrical basic shape that defines an axial direction 42 along a longitudinal axis of the vacuum pump. The housing section 12 also includes a support section 16 for connecting it to the flange section 10.

[0057] The preferably annular flange section 10 defines the pump inlet of the vacuum pump (not shown) and has a mounting section 14 with a base 36 and a coupling section 18 extending radially outwards from the mounting section 14. The coupling section 18 is provided for connecting the pump inlet to a port of a receiver. The flange section 10 defines a mounting plane 44 whose normal is parallel to the axial direction 42, i.e., the mounting plane 44 is perpendicular to the axial direction 42.

[0058] The flange section 10 and the housing section 12 are preferably made of a durable metal such as stainless steel or aluminum. To reduce the weight of the pump, the housing section 12 can be made of aluminum. The flange section 10 can be made of stainless steel to provide the necessary stability for mounting the pump. To further reduce the complexity of the pump, the flange section 10 and / or the housing section 12 can each be formed as a single piece.

[0059] The base 36 of the mounting section 14 is designed without any openings in the axial direction 42. In other words, the mounting section 14 has no axial bore or the like connecting the two opposite sides of the base 36. Furthermore, the base 36 has no recess or groove on the pump inlet side.

[0060] The mounting section 14 of the flange section 10 has an extension section 38 projecting from the base 36, which extends substantially perpendicular to the mounting plane 44, i.e., parallel to the axial direction 42. In the illustrated embodiment, the extension section 38 has a conical coupling surface 20b and an adjoining cylindrical coupling surface 24b on its inner surface 28. The coupling surfaces 20b and 24b of the mounting section 14 face an outer surface 52 of the support section 16. In the illustrated embodiment, a section of the inner surface 28 of the extension section 38 forms a section of the inner surface of the pump housing, and a section of the outer surface 52 of the support section 16 forms a section of the outer surface of the pump housing.

[0061] The support section 16 of the housing section 12 accordingly has a conical coupling surface 20a and an adjoining cylindrical coupling surface 24a on its outer surface. That is, the coupling surfaces 20a and 24a of the support section 16 face an inner side of the mounting section 14. The conical coupling surfaces 20a and 20b have the same inclination with respect to the axial direction 42, while the cylindrical coupling surfaces 24a and 24b extend parallel to the axial direction 42.

[0062] Adjoining the cylindrical coupling surface 24b of the mounting section 14 is an annular surface 46b, which defines an end face of the extension section 38 and extends parallel to the mounting plane 44. Correspondingly, opposite the conical coupling surface 20a of the support section 16, an annular surface 46a adjoins the cylindrical coupling surface 24a, also extending parallel to the mounting plane 44. The height of the cylindrical coupling surface 24a of the support section 16 is less than the height of the cylindrical coupling surface 24b of the mounting section 14, so that in an assembled state of the pump housing, the annular surfaces 46a and 46b form a gap 48 to compensate for manufacturing tolerances.

[0063] In the illustrated embodiment, the respective coupling surfaces 20a and 20b, as well as 24a and 24b, are pressed together by means of several screws 22, so that the connection between the flange section 10 and the housing section 12 is tight. The flange section 10 is centered with respect to the housing section 12 by a stop formed by the cylindrical coupling surfaces 20a, 20b. In other words, centering is achieved via a centering collar formed by the cylindrical and conical coupling surfaces 20a, 20b, 24a, 24b. The screws 22 extend from the inside of the housing to the outside of the housing in a direction that is perpendicular to the conical coupling surfaces 20a, 20b but oblique to the longitudinal axis of the vacuum pump, i.e., oblique to the axial direction 42 or oblique to the mounting plane 44.

[0064] The screws 22 are preferably arranged equidistantly in the direction of rotation. For example, two, three, four, five, or more screws are provided. Furthermore, it is understood that at least the extension section 38 has corresponding internal threads that engage with the respective screws 22. One or more of the screws 22 can also be a special screw with a degassing hole. Furthermore, an additional O-ring can be provided for sealing, for example, in the gap 48 (see also Fig. 6B ).

[0065] This design of the connection between flange section 10 and housing section 12 results in a particularly compact or slim pump housing, as no section of the screws 22 or sections 14, 16 extends beyond the coupling section 18. Furthermore, flange section 10 can be replaced easily and quickly, making the pump highly versatile. At the same time, the pump housing exhibits particularly high stability in the area of ​​the connection between flange section 10 and housing section 12, especially in the radial direction. This prevents fragments or similar debris from escaping, for example, if a pump-active component is damaged during operation. This, in turn, increases the pump's safety. Additionally, the interaction of the complementary surfaces 20a, 20b, 24a, 24b and the gap 48 facilitates vacuum-tight assembly of flange section 10.

[0066] The one in Fig. 6B The embodiment shown according to the invention differs from the one shown in Fig. 6A This is shown essentially by the fact that the coupling surfaces 20b and 24b of the mounting section 14 face an inner side of the support section 16. Similarly, the coupling surfaces 20a and 24a of the support section 16 face an outer side of the mounting section 14, and the screws 22 extend from the inside of the housing to the outside of the housing.

[0067] According to another embodiment, not shown, the screws 22 do not extend perpendicularly to the conical coupling surfaces 20a, 20b, but perpendicularly to the cylindrical coupling surfaces 24a, 24b.

[0068] Furthermore, a configuration is possible in which some screws 22 extend from the inside of the housing to the outside of the housing and the remaining screws 22 extend from the outside of the housing to the inside of the housing, for example half of the screws 22 in each case.

[0069] The Fig. 7A Figure 1 shows a portion of a pump housing in the area of ​​the pump inlet of a vacuum pump according to a further embodiment of the invention. The mounting section 14 of the flange section 10 has an annular surface 46a to which an extension section 38 is attached. The extension section 38 has a cylindrical coupling surface 24a that extends substantially perpendicularly from the base 36 of the mounting section 14, i.e., in the axial direction 42. The extension section 38 further has a conical coupling surface 24b that adjoins the cylindrical coupling surface 24a and defines an end face of the extension section 38.

[0070] The support section 16 of the housing section 12 has a conical coupling surface 20a, to which an annular surface 46b adjoins. The annular surfaces 46a, 46b extend parallel to the mounting plane 44. The cylindrical coupling surfaces 24a, 24b extend perpendicular to the mounting plane 44, i.e., parallel to the axial direction 42, and have substantially the same height. The conical coupling surfaces 20a, 20b have substantially the same inclination with respect to the axial direction 42.

[0071] The flange section 10 is attached to the housing section 12 by means of several welds 40a, 40b, wherein a weld 40a on the inside of the pump is formed on an end face of the extension section 38 and a weld 40b on the outside of the pump is formed on an end face of the support section 16. The annular surfaces 46a, 46b and the cylindrical and conical coupling surfaces 20a, 20b, 24a, 24b are in vacuum-tight contact with each other, wherein the centering of the flange section 10 with respect to the housing section 12 during assembly is achieved by a stop formed by the cylindrical coupling surfaces 20a, 20b.

[0072] In the present example, the pump-side weld 40a is located on a radially inner edge of the annular surfaces 46a, 46b, and the pump-side weld 40b is located on a radially outer edge of the conical coupling surfaces 20a, 20b. The conical coupling surface 20a of the support section 16 is slightly larger than the conical coupling surface 20b of the mounting section 14, so that an outer portion of the conical coupling surface 20b of the mounting section 14 can be used to form the pump-side weld 40b.

[0073] This embodiment also offers the advantage that the diameter of the pump is defined by the diameter of the coupling section 18. Furthermore, the welds 40a and 40b provide an additional sealing function and make the pump housing even more robust overall.

[0074] The one in Fig. 7B The embodiment shown, which is not according to the invention, differs from the one shown in Fig. 7A This is shown essentially by the fact that the extension section 38 has a second annular surface 46c instead of a conical coupling surface, which defines an end face of the extension section 38. Furthermore, the height of the cylindrical coupling surface 24a of the support section 16 is slightly greater than the height of the cylindrical coupling surface 24b of the mounting section 14. Accordingly, the weld 40b on the pump's outer side is formed on the end face of the extension section 38 and at a point where the end face 46c of the extension section 38 meets the cylindrical coupling surface 24a of the support section 16. The difference in height between the cylindrical coupling surfaces 24a and 24b allows for the weld 40b to be formed.

[0075] However, the radial positions of the support and fastening sections 14, 16 can also be reversed. That is, the ones in the Fig. 7A and 7B The extension sections 38 shown can also be arranged on the inside of the pump instead of on the outside, so that the weld 40a formed on the front face 46a of the support section 16 is arranged on the outside of the pump and the weld 40b formed on the front face 20b, 46c of the fastening section 14 is arranged on the inside of the pump.

[0076] The one in Fig. 7C The embodiment shown, which is not according to the invention, differs from those shown in Fig. 7A and 7B This is shown essentially by the fact that the fastening section 14 has a recess or groove 34 instead of an extension section 38, which receives an end section of the support section 16. That is, the flange section 10 is placed onto the housing section 12 and fixed by means of welds 40a, 40b.

[0077] The cylindrical coupling surfaces 24a of the support section 16 preferably interact with the side surfaces of the recess 34, and the annular surface 46a of the support section 16 interacts with a bottom surface of the recess. In particular, the width of the recess 34 corresponds essentially to the width of the end section of the support section 16, so that the centering of the flange section 10 occurs automatically when the support section 16 is inserted into the recess 34. The welds 40a and 40b serve not only to fix the components in place but also to compensate for manufacturing tolerances.

[0078] The recess 34 can be formed in the end face of the support section 16 instead of in the base 36 of the fastening section 14. Accordingly, the fastening section 14 can have a complementary extension section 38 that fits into the recess 34 of the support section 16.

[0079] Furthermore, the number and / or position of the welds 40a, 40b can be varied as required (this also applies to the embodiments described above). For example, the flange section 10 can be attached to the housing section 12 by means of only one weld 40a, 40b formed on the inside or outside of the pump.

[0080] At the in Fig. 8 In the illustrated, non-inventive embodiment, the fastening section 14 has an annular surface 46b extending parallel to the fastening plane 44. An extension section 38 adjoins the annular surface 46b, extending from the base 36 substantially perpendicular to the fastening plane 44. On its inner side, from the base 36 to the end face, the extension section 38 has a first cylindrical coupling surface 24e and an adjoining conical surface 50b, to which a second cylindrical coupling surface 24b is attached. The coupling surfaces 24e and 24b of the fastening section 14 face an outer side of the support section 16. The base 36 of the fastening section 14 is formed without openings in the axial direction 42.

[0081] The support section 16 of the housing section 12 accordingly has an annular surface 46a that extends parallel to the mounting plane 44 and forms an end face of the support section 16. The support section 16 further has on its outer surface a first cylindrical coupling surface 24c and an adjoining conical surface 50a, to which a second cylindrical coupling surface 26a is attached. That is, the coupling surfaces 24c and 24a of the support section 16 face an inner side of the mounting section 14. The conical surfaces 50a and 50b have the same inclination with respect to the axial direction 42, while the cylindrical coupling surfaces 24a to 24e extend parallel to the axial direction 42.

[0082] The cylindrical coupling surfaces 24a, 24b of the support and fastening section 14, 16 each have complementary threaded sections 26a, 26b that are in threaded engagement with each other. That is, the flange section 10 is screwed onto the housing section 12 up to an axial position at which the annular surface 46b of the fastening section 14 abuts the end face or the annular surface 46a of the support section 16.

[0083] At this position, the conical surfaces 50a, 50b of the support section 16 and the mounting section 14 form a gap 48 to compensate for manufacturing tolerances, since the cylindrical coupling surface 24c of the support section 16 is larger than the cylindrical coupling surface 24 of the mounting section 14. For this purpose, the cylindrical coupling surfaces 24c and 24e at the base 36 additionally form a clearance fit at this position. Optionally, an O-ring can be provided for additional sealing, for example, at the interface between the annular surfaces 46a, 46b. This design of the connection between the flange and housing sections 10, 12 is particularly user-friendly.

[0084] Similarly, it is also possible to choose the geometric ratios so that the conical surfaces 50a, 50b of the support section 16 come into contact and a gap remains between the ring-shaped surfaces 46a, 46b, into which an O-ring is inserted (optional).

[0085] During the Fig. 9A and 9B In the illustrated, non-inventive embodiment, a plurality of locking lugs 30 are formed on an inner surface 28 of the extension section 38, and an equal number of complementary bayonet slots 32 are formed in the support section 16. For example, two, three, four, or more locking lugs 30 and bayonet slots 32 are provided. The lugs 30 and slots 32 are arranged distributed in a circumferential direction of the housing section 12 and the flange section 10, preferably equidistantly.

[0086] This means that the flange section 10 is attached to the housing section 12 by means of a bayonet connection. During assembly, the flange section 10 is first brought into an axial position in which the locking lugs 30 engage in the bayonet slots 32 (see arrow in Fig. 9A The flange section 10 is then rotated until it reaches a stop where the locking lugs 30 abut one end of the bayonet slots 32. During this process, the flange section 10 is successively lowered onto the housing section 12. This design of the pump housing is particularly economical and user-friendly.

[0087] Alternatively, the locking lugs 30 can also be located on an outside of the carrying section 16 and the bayonet groove 32 in the extension section 38.

[0088] It is understood that the screws 22, the threaded elements 26a, 26b, the welds 40a, 40b and the bayonet connection can be combined as required. For example, the flange section 10 can be combined with the housing section 12 according to one of the combinations referred to in the Fig. 6A , 6B and 8The described embodiments are screwed together and additionally fixed to the housing section 12 by means of one or more welds 40a, 40b. Similarly, the bayonet connection can also be reinforced by means of one or more welds 40a, 40b. Furthermore, configurations are possible in which the flange section 10 is connected to the housing section 12 according to one of the embodiments described with reference to the Fig. 7A bis 7C described embodiments are welded and additionally fixed by means of screws 22 and / or threaded sections 26a, 26b formed on the cylindrical coupling surfaces 24a, 24b. Bezugszeichenliste:

[0089] 10 Flange section 12 Housing section 14 Mounting section 16 Support section 18 Coupling section 20a, 20b Conical coupling surfaces 22 Threaded element 24a to 24e Cylindrical coupling surfaces 26a, 26b Threaded sections 28 Inside of extension section 30 Locking stud 32 Bayonet slots 34 Recess / groove 36 Base of mounting section 38 Extension section of mounting section 40a, 40b Weld 42 Axial direction 44 Mounting plane 46a, 46b, 46c Ring-shaped surfaces 48 Gap 50a, 50b Conical surfaces 52 Outside of support section 111 Turbomolecular pump 113 Inlet flange 115 Pump inlet 117 Pump outlet 119 Housing 121 Lower part 123 Electronics housing 125 Electric motor 127 Accessory connection 129 Data interface 131 Power supply connection 133 Flood inlet 135 Sealing gas connection 137 Motor compartment 139 Coolant connection 141 Lower side 143 Screw 145 Bearing cover 147 Mounting hole 148 Coolant line 149 Rotor 151 Rotation shaft 153 Rotor shaft 155 Rotor disc 157 Stator disc159 Spacer ring 161 Rotor hub 163 Holweck rotor sleeve 165 Holweck rotor sleeve 167 Holweck stator sleeve 169 Holweck stator sleeve 171 Holweck gap 173 Holweck gap 175 Holweck gap 179 Connecting channel 181 Rolling bearing 183 Permanent magnet bearing 185 Injection nut 187 Washer 189 Insert 191 Rotor-side bearing half 193 Stator-side bearing half 195 Ring magnet 197 Ring magnet 199 Bearing gap 201 Support section 203 Support section 205 Radial strut 207 Cover element 209 Support ring 211 Mounting ring 213 Disc spring 215 Emergency or catch bearing 217 Motor stator 219 Gap 221Wall 223Labyrinth seal

Claims

1. A vacuum pump, in particular a turbomolecular pump, comprising a pump housing having a housing section (12) for receiving pump-active components of the vacuum pump and having a flange section (10) which spans a fastening plane (44), which is provided for connecting the vacuum pump to a recipient and which is preferably formed in one piece, wherein the housing section (12) and the flange section (10) are configured as separate components, wherein the housing section (12) comprises a carrier section (16), wherein the flange section (10) comprises a coupling section (18) which can be coupled to the recipient and a fastening section (14) which is connected to the carrier section (16) and which is formed free of apertures at least in a direction (42) perpendicular to the fastening plane (44), characterized in that the fastening section (14) and the carrier section (16) each comprise at least one connection means for the centered connection of the flange section (10) and the housing section (12), wherein the connection means are of complementary design and comprise conical coupling surfaces (20a, 20b).

2. A vacuum pump according to claim 1, wherein the flange section (10) and the housing section (12) are composed of different metals, in particular wherein the housing section (12) is composed of aluminum and / or the flange section (10) is composed of stainless steel.

3. A vacuum pump according to claim 1 or 2, wherein the fastening section (14) comprises a base (36) which is adjoined by the coupling section (18) and which is preferably formed free of apertures, wherein the fastening section (14) comprises an extension section (38) which projects from the base (36) and which in particular extends substantially perpendicular to the fastening plane (44).

4. A vacuum pump according to at least one of the claims 1 to 3, wherein the fastening section (14) comprises a base (36) which is adjoined by the coupling section (18) and which is preferably formed free of apertures, wherein the fastening section (14) comprises a recess (34), which is formed in the base (36), for at least sectionally receiving the carrier section (16).

5. A vacuum pump according to at least one of the preceding claims, wherein the connection means comprise cylindrical coupling surfaces (24a, 24b, 24c, 24d, 24e).

6. A vacuum pump according to at least one of the preceding claims, wherein the connection means of the fastening section (14) are arranged at an outer side of the fastening section (14) or face the outer side of the fastening section (14), in particular wherein the connection means are arranged at the extension section (38).

7. A vacuum pump according to at least one of the preceding claims, wherein the connection means of the fastening section (14) are arranged at an inner side of the fastening section (14) or face the inner side of the fastening section (14).

8. A vacuum pump according to at least one of the preceding claims, wherein the connection means have complementary threaded sections (26a, 26b).

9. A vacuum pump according to at least one of the preceding claims, wherein the flange section (10) is fastened to the housing section (12) by means of least one screw (22).

10. A vacuum pump according to claim 9, wherein the at least one screw (22) extends from an outer housing side towards an inner housing side or wherein the at least one screw (22) extends from the inner housing side towards the outer housing side, in particular wherein the at least one screw (22) extends in a direction which is perpendicular to the respective coupling surfaces (20a, 20b, 24a, 24b, 24c, 24d, 24e) and / or wherein the at least one screw (22) extends obliquely to a longitudinal axis of the vacuum pump.

11. A vacuum pump according to at least one of the preceding claims, wherein the flange section (10) is fastened to the housing section (12) by means of at least one weld seam (40a, 40b) which connects the carrier section (16) and the fastening section (14) to one another at an inner pump side and / or at an outer pump side.

12. A vacuum pump according to claim 11, wherein the weld seam (40a, 40b) is formed at an end face of the extension section (38) and / or at an end face of the carrier section (16), and / or wherein the weld seam (40a, 40b) is formed at an opening of the recess (34) of the base (36) or at an opening of the recess of the carrier section (16).

13. A vacuum pump according to at least one of the preceding claims, wherein the flange section (10) is fastened to the housing section (12) by means of a bayonet connection, wherein the connection means comprise at least one locking connector (30) and at least one bayonet groove (32), in particular wherein a plurality of locking connectors (30) and bayonet grooves (32) arranged distributed in the peripheral direction of the housing section (12) and the flange section (10) are provided.

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