X-ray measurement arrangement for examining test objects by means of x-ray radiation and method for examining test objects by means of x-ray radiation

Abstract

The invention relates to an X-ray measurement arrangement (1) for examining test objects (20) by means of X-ray radiation, comprising a rotatable receiving device (2), an X-ray examination device (3) having at least one X-ray source (4) and at least one X-ray detector (5), wherein the at least one X-ray source (4) and the at least one X-ray detector (5) are arranged on the rotatable receiving device (2), and at least one positioning device (7), which is configured to arrange at least one predetermined region of interest (20-1) of a test object (20) in a detection area (8) of the X-ray examination device (3) on an axis of rotation (9) of the rotatable receiving device (2), between the at least one X-ray source (4) and the at least one X-ray detector (5) and to hold it there during the examination. The invention also relates to a method for examining test objects (20) by means of X-ray radiation.

Description

[0001] X-ray measuring arrangement for examining test objects using X-rays and method for examining test objects using X-rays

[0002] The invention relates to an X-ray measuring arrangement for examining test objects by means of X-ray radiation and a method for examining test objects by means of X-ray radiation.

[0003] In the field of industrial metrology, it is well known to subject test objects, especially workpieces, to a quality inspection after production using non-invasive examination methods in order to detect deviations from desired properties. In particular, X-rays can be used for this purpose to capture radiographic images of the test object. If the test object is irradiated from different directions, the internal structure (object volume) of the test object can be calculated (reconstructed) using computed tomography.

[0004] State-of-the-art industrial computed tomography (CT) scanners are known. These are typically designed in such a way that the X-ray source and X-ray detector are stationary during the acquisition of the radiographic images, while the test object to be measured is arranged on a turntable and rotated by means of the turntable (e.g., computed tomography scanners of the VoluMax series from Carl Zeiss AG, https: / / www.zeiss.de / messtechnik / produkte / systeme / computertomographie / volumax.html). Such computed tomography scanners can be integrated into a production line, with a robotic arm, for example, loading the test objects through a loading door and arranging them on the turntable. A disadvantage of this type of computed tomography scanner is that, even if short CT scan times in the range of 1-2 seconds are possible, a significant portion (typically approximately 10 to 20 seconds) is required for loading, opening and closing the door, and positioning a region of interest (RIO).The region of interest (ROI) of the test object is required in the beam path or on the turntable. The region of interest can include part or the entire test object.

[0005] Gantry systems (see, for example, EP 1 646 316 B1) or C-arm systems (see, for example, US 7 170 972 B2) are known from the medical field of application. In these systems, the X-ray source and X-ray detector rotate about a structurally defined axis of rotation, and the measurement object (in the medical case, the patient) is placed on a stationary table at the appropriate point in the beam path and remains motionless during the measurement. A major disadvantage of these systems is that access to the measuring area (detection range) is severely restricted. For example, in gantry systems, the maximum diameter of the objects to be measured is limited by the central opening.

[0006] The invention is based on the object of improving an X-ray measuring system for examining test objects using X-rays and a method for examining test objects using X-rays. In particular, the aim is to enable the shortest possible cycle time when examining the test objects.

[0007] The object is achieved according to the invention by an X-ray measuring arrangement having the features of patent claim 1 and a method having the features of patent claim 15. Advantageous embodiments of the invention emerge from the subclaims.

[0008] One of the basic ideas of the invention is to arrange an X-ray examination device with at least one X-ray source and at least one X-ray detector on a rotatable receiving device. The rotatable receiving device can in principle be of any shape; preferably, the rotatable receiving device has the shape of a rotatable disk or a rotatable bar. The X-ray examination device is arranged on the rotatable receiving device in such a way that the axis of rotation of the rotatable receiving device and thus in particular a center of rotation runs through the beam path. In a receiving device designed as a rotatable disk, the beam path between the at least one X-ray source and the at least one X-ray detector runs in particular parallel to a plane of the rotatable disk with respect to a central propagation direction.In other words, an active detector surface of the at least one X-ray detector is positioned, in particular, perpendicular to the plane of the rotatable disk. A test object arranged on the rotational axis between the at least one X-ray source and the at least one X-ray detector can therefore be irradiated by the X-ray examination device. By rotating the rotatable receiving device, the X-ray examination device is also rotated about the rotational axis, so that a test object arranged on the rotational axis, in particular in the rotational center, in a detection area between the at least one X-ray source and the at least one X-ray detector, can be detected from different irradiation directions.Furthermore, at least one positioning device is provided, which is configured to position at least one predetermined region of interest of a test object in the detection range of the X-ray examination device on a rotational axis of the rotatable recording device between the at least one X-ray source and the at least one X-ray detector and to hold it there during the examination. The examined region of interest is held by the positioning device, in particular, in the rotational center of the X-ray examination device, thus enabling the acquisition of radiographic images from different directions. This allows the region of interest to be examined, in particular, using computed tomography.

[0009] In particular, an X-ray measuring arrangement for examining test objects using X-rays is provided, comprising a rotatable receiving device, an X-ray examination device with at least one X-ray source and at least one X-ray detector, wherein the at least one X-ray source and the at least one X-ray detector are arranged on the rotatable receiving device, and at least one positioning device which is configured to arrange at least one predetermined region of interest of a test object in a detection area of ​​the X-ray examination device on an axis of rotation of the rotatable receiving device between the at least one X-ray source and the at least one X-ray detector and to hold it there during the examination.

[0010] Furthermore, in particular, a method for examining test objects by means of X-ray radiation is provided, wherein an X-ray measuring arrangement according to one of the embodiments described in this disclosure is used, wherein at least one predetermined region of interest of a test object is arranged by means of the at least one positioning device in the detection area of ​​the X-ray examination device on the axis of rotation of the rotatable recording device between the at least one X-ray source and the at least one X-ray detector and is held there during a detection of at least one radiographic image by means of the at least one positioning device.

[0011] One advantage of the X-ray measuring arrangement is the possibility of achieving short cycle times, which in particular improves the inline examination and / or testing of workpieces in a production line. This is made possible in particular by the fact that an arrangement on a turntable is no longer necessary, since the at least one positioning device arranges a region of interest of the test object in the detection area and holds it in position there even during the acquisition of the radiographic images. The acquisition of radiographic images from different directions is then carried out by rotating the rotatable recording device (e.g. the rotatable disk or the rotatable beam), whereby the X-ray examination device is rotated about the axis of rotation and thus about the region of interest arranged there.

[0012] Furthermore, the disclosed X-ray measuring arrangement advantageously also allows the examination of regions of interest of large test objects. If, for example, in the case of large batteries or battery cells, opposite corners are to be examined as respective regions of interest (ROI) (first ROI 1, then ROI 2), the battery must be moved such that ROI 1 and then ROI 2 are positioned at the center of rotation. To ensure good irradiation of the corner of the battery, it must be irradiated at an angle. Even with battery dimensions of, for example, approximately 500 mm x 150 mm x 50 mm and a tilt angle of 45°, this is easily possible with the disclosed X-ray measuring arrangement, whereas a gantry system would require a very large central opening and thus a large distance between the X-ray source and the X-ray detector (>1000 mm). This would result in fewer photons hitting the X-ray detector than with an optimal shorter distance (e.g.B. approx. 400 mm), so that short measurement times would no longer be possible with a gantry system, especially because the number of photons hitting the X-ray detector is proportional to the square of the distance between the X-ray source and the X-ray detector.

[0013] The rotatable mounting device is accessible, in particular, from at least one side on which the X-ray examination device is arranged. The rotatable mounting device can, in particular, be designed as a rotatable disk. The rotatable disk is, in particular, a circular disk, i.e., an outer contour is, in particular, circular. In principle, however, the rotatable disk does not have to be circular; in particular, an outer contour of the rotatable disk can also have another suitable shape. The rotatable disk can, in particular, also be referred to as a (flat) plate.

[0014] The X-ray measuring system is specifically an X-ray measuring system used in industrial metrology. A typical application of the X-ray measuring system is quality control of test objects at the end of a production line. The test objects are typically similar, with the same inspection task always being performed for a large number of test objects. In principle, however, the X-ray measuring system can also be used to examine different test objects. The test objects are, in particular, workpieces.

[0015] The X-ray measuring system is configured, in particular, to perform a computed tomography measurement. For this purpose, the X-ray measuring system forms, in particular, a computed tomography scanner. The X-ray measuring system, in particular the X-ray examination device, also has, in particular, a control device with which the computed tomography analysis is performed. In particular, the control device is configured to reconstruct and provide an object volume from radiographic images acquired from different directions.

[0016] The test objects are arranged by means of the at least one positioning device, in particular, from a direction that essentially coincides with the axis of rotation. In particular, it is provided that the at least one positioning device is arranged relative to the rotatable holding device in such a way that the test objects can be arranged and removed from / in a direction perpendicular to an accessible side surface of the rotatable holding device, in the case of a rotatable disk, perpendicular to the (accessible) plane, or perpendicular to a mean propagation direction of a beam path of the X-ray examination device. The test objects can be, for example, batteries or battery cells. The test objects, in particular the batteries or battery cells, are in particular elongated test objects, for example with an aspect ratio in the range of 50:15:5.For example, a battery or a battery cell can have dimensions in the range of 500 mm x 150 mm x 50 mm.

[0017] In particular, at least one drive is provided for rotating the rotatable mounting device. For example, the rotatable mounting device may be a circular disk with an externally or laterally toothed ring on its outer circumference, into which a pinion connected to the drive engages. The drive may, for example, be an electric motor.

[0018] Electrical connections for the power supply and / or signal lines can be configured in a suitable manner depending on the specific embodiment. For example, sliding contacts can be provided so that the rotatable mounting device can rotate without limitation. However, if a limitation of the angular range through which the rotatable mounting device can rotate is provided (e.g., in the range of at least 180°), the electrical connections and / or signal lines can also be designed as wired connections.

[0019] In one embodiment, it is provided that the at least one X-ray source and / or the at least one X-ray detector are movable along a linear axis running perpendicular to the axis of rotation of the rotatable scanning device. In particular, the linear axis runs in the radial direction. This allows a distance between the at least one X-ray source and the at least one X-ray detector to be changed. This allows increased flexibility in setting a magnification, which is not possible with gantry systems and C-arm systems. The movable at least one X-ray source and the movable at least one X-ray detector allow a magnification and / or a resolution of the region of interest of the test object to be adjusted flexibly and as required. In particular, at least one drive is provided with which the at least one X-ray source and the at least one X-ray detector can be moved along the linear axis.Such a drive can be, for example, a linear motor or a spindle drive. If the rotatable receiving device is designed as a rotatable disk, it is particularly provided that the at least one X-ray source and the at least one X-ray detector are movable along a linear axis extending radially to the rotatable disk.

[0020] In one embodiment, the rotatable mounting device is arranged such that its rotational axis runs horizontally. This allows for horizontal loading and unloading of test objects into the detection area of ​​the X-ray examination device, which is particularly advantageous for integrating the examination of test objects into a production line. A horizontal rotational axis can also include a tolerance range.

[0021] In one embodiment, the rotatable mounting device is designed such that it has no limitations with regard to its angle of rotation around the axis of rotation. This enables, in particular, full rotation, covering an angular range of at least 360° when capturing radiographic images. If the rotatable mounting device can be continuously rotated, this protects drives and gears (teeth, gearwheels, etc.) because acceleration and deceleration when changing test objects can be eliminated. The rotatable mounting device is then rotated without stopping during all measurements. Electrical connections and / or signal lines are then formed, in particular, by means of sliding contacts.

[0022] In one embodiment, the X-ray measuring arrangement comprises at least two independently operating positioning devices and feed and removal devices assigned to each of the at least two positioning devices for feeding and removing test objects to be examined. This makes it possible to reduce the period during which the X-ray examination device is unused, since the test objects can be arranged alternately by the at least two positioning devices. While one of the positioning devices removes an already examined test object from the detection area and transfers it to the removal device, another of the positioning devices can already arrange another test object in the detection area and hold it there. Removal and feed devices can also be assigned jointly to the at least two positioning devices.In one embodiment, the at least one positioning device comprises a robot arm. This allows for particularly high flexibility, since switching to different regions of interest and / or test objects is particularly easy, in particular without mechanical retooling or reconfiguration. A robot arm is, in particular, a multi-jointed robot arm with multiple translational and / or rotational degrees of freedom.

[0023] In one embodiment, the at least one positioning device comprises a positioning carousel. Such a positioning carousel has a plurality of holders and / or compartments. Test objects are arranged at least in or on some of the holders and / or compartments. By rotating the positioning carousel, a region of interest of one of the test objects can be arranged in the detection area on the rotation axis. It can be provided that the holders and / or the compartments have at least one positioning device. For example, it can be provided that a turntable is provided on each holder and / or each of the compartments, with which the test object can be rotated in order, for example, to be able to arrange a plurality of regions of interest of each test object in the detection area.

[0024] In one embodiment, the X-ray measuring arrangement has a second linear axis arranged perpendicular to a direction of the axis of rotation and perpendicular to the direction of the linear axis, on which second linear axis the at least one X-ray detector of the X-ray examination device can be displaced. The second linear axis runs in particular parallel to an active detector surface of the at least one X-ray detector. As a result, the at least one X-ray detector can be displaced in a direction perpendicular to the axis of rotation. This enables in particular so-called “half-beam scans”, in which an active detector surface of the X-ray detector is not arranged centrally to the axis of rotation, but in which the axis of rotation is shifted in the direction of the edge of the active detector surface or a region of a test object corresponding to the axis of rotation is imaged shifted towards the edge.In conjunction with a 360° rotation, this makes it possible to increase the measurement volume as if the active detector surface were up to twice as large. One embodiment provides for the X-ray measuring arrangement to have at least one third linear axis running parallel to the axis of rotation, on which axis the at least one X-ray source and / or the at least one X-ray detector can be moved. This makes it possible to move the beam path along the axis of rotation. When using a positioning carousel, this enables, for example, the examination of test objects of different sizes. The course of the beam path can then be flexibly adjusted via the at least one third linear axis running parallel to the axis of rotation by moving the beam path parallel to the axis of rotation. Furthermore, a larger volume can also be measured step by step in this way.In particular, at least one drive is provided with which the at least one X-ray source and the at least one X-ray detector can be moved along the third linear axis running parallel to the rotation axis. Such a drive can be, for example, a linear motor or a spindle drive. The movement of the at least one X-ray source and / or the at least one X-ray detector can generally occur jointly, i.e., in a mechanically coupled manner, or separately, i.e., separately from one another.

[0025] In one embodiment, it is provided that a drive for moving the at least one X-ray source and the at least one X-ray detector along the linear axis running perpendicular to the axis of rotation of the rotatable holding device is arranged outside the rotatable holding device. As a result, the drive does not have to be moved on the rotatable holding device when it is rotated, thus reducing complexity and saving costs. Since the same testing task is usually always carried out on similar test objects, retooling or moving will only rarely be necessary. If this is the case, however, the drive arranged outside the rotatable holding device is used for this purpose. For this purpose, suitable (coupling) elements are provided, for example, via which the drive can be coupled to and decoupled from the linear axis.

[0026] In one embodiment, the X-ray measuring arrangement comprises at least one wireless communication interface arranged on the rotatable receiving device, which is configured to provide radiographic images acquired by the at least one X-ray detector and / or an evaluation result (e.g., an object volume reconstructed from acquired radiographic images). This enables fast data transmission, particularly to the X-ray detector, whereby sliding contacts for signal lines can be omitted. The communication interface can, for example, conform to the WiFi 6 standard (IEEE 802.11ax), enabling data rates of up to 5 Gbit / s.It can also be provided that at least parts of a control device of the X-ray measuring arrangement and / or the X-ray examination device are arranged on the rotatable receiving device and communicate by means of the wireless communication interface, for example with an external operating unit or a remote control.

[0027] In one embodiment, the at least one X-ray source is a microfocus X-ray source. This allows for high resolution when capturing the radiographic images. A microfocus X-ray source is, in particular, an X-ray source in which an effective region where X-rays are generated has a diameter between 2 and 100 pm.

[0028] In one embodiment, the at least one X-ray source comprises a monoblock X-ray tube. This offers the advantage that large-diameter high-voltage cables do not need to be carried during rotation of the rotating recording device. However, a power supply via a slip ring and sliding contacts is sufficient. In a monoblock X-ray tube, a high-voltage generator is already integrated into the X-ray tube.

[0029] In one embodiment, the at least one X-ray detector is designed as a direct-conversion X-ray detector. This makes it possible to omit a scintillation layer. The speed at which the at least one X-ray detector can be read out can thereby be increased, so that overall measurement time can be reduced. This subsequently enables a reduction in the cycle time with which test objects can be examined. A direct-conversion X-ray detector can, for example, be a photon-counting X-ray detector that uses CdTe as the active material. Such an X-ray detector can be read out at a readout rate of >1000 images per second, so that motion blur can be reduced during measurements with continuous rotation of the rotatable recording device and the X-ray examination device.

[0030] In one embodiment, it is provided that the at least one X-ray source and / or the at least one X-ray detector has fluid cooling. This can improve the performance of the at least one X-ray source and / or the at least one X-ray detector, since X-ray radiation with greater brilliance can be generated and / or detector noise can be reduced. The fluid cooling can use water or oil, for example, as a media. A cooling circuit is in particular arranged entirely on the rotatable disk. For example, with water cooling, the cooling medium can primarily be used to distribute local heat inputs over a larger area. The cooling medium can then be efficiently cooled elsewhere if passive cooling by simply pumping through the cooling circuit is not sufficient.

[0031] In one embodiment, the X-ray measuring arrangement comprises at least one doorless radiation lock. This eliminates the time required for opening and closing a door of the radiation lock, during which radiographic images cannot be captured. Furthermore, wear and tear caused by constant and rapid opening and closing of the door is also eliminated. In particular, the doorless radiation lock is designed so that no primary X-ray radiation can pass through the doorless radiation lock and that scattered radiation is attenuated sufficiently that no radiation is detectable outside the radiation lock. The doorless radiation lock operates in particular with (relatively offset) viewing panels that form a type of channel through which the X-ray radiation cannot pass, but through which the test objects can be fed in and out.In this way, the loading and unloading of test objects can be decoupled from the operation of the X-ray examination device. Cycle times can thus be reduced.

[0032] In one embodiment, the X-ray examination device comprises multiple X-ray sources and multiple X-ray detectors. This allows the time required for a measurement to be reduced. In particular, this allows a reduction in cycle time. The respective beam paths are arranged offset around the rotation axis, so that multiple radiation directions can be detected simultaneously.

[0033] In one embodiment, it is provided that the X-ray measuring arrangement has at least one collimator and / or at least one aperture element and / or at least one filter element, which is / are configured to limit X-ray radiation emanating from the at least one X-ray source to an active detector surface of the at least one X-ray detector.

[0034] In one embodiment of the method, a predetermined final section of an arrangement trajectory runs along the rotation axis of the rotatable receiving device during the arrangement of the at least one predetermined region of interest of the test object in the detection area. This can prevent a collision with the at least one X-ray source and / or the at least one X-ray detector, particularly if the rotatable receiving device rotates during the arrangement process, for example, if the rotatable receiving device rotates continuously.

[0035] In a further embodiment of the method, at least two independently operating positioning devices are used, each with feed and removal devices assigned to the at least two positioning devices for feeding and removing test objects to be examined, in order to arrange the at least one predetermined region of interest of the test objects in the detection area, wherein the at least two positioning devices are used alternately. As a result, a measuring time can be increased relative to a cycle time. In particular, a time in which no test object can be measured can be reduced. Overall, this can further reduce the cycle time of the examination per test object. The at least two positioning devices are, in particular, robot arms.

[0036] The invention will be explained in more detail below using preferred embodiments with reference to the figures. Figure 1 shows a schematic representation of an embodiment of the X-ray measuring arrangement for examining test objects using X-rays;

[0037] Fig. 2 is a schematic representation to illustrate a rotational movement of the rotatable receiving device and a movement along the linear axis perpendicular to the axis of rotation or radially extending;

[0038] Fig. 3 is a schematic representation of a further embodiment of the X-ray measuring arrangement for examining test objects by means of X-ray radiation;

[0039] Fig. 4 is a schematic diagram illustrating further linear axes;

[0040] Fig. 5 is a schematic flow diagram of an embodiment of the method for examining test objects using X-rays.

[0041] Figure 1 shows a schematic representation of an embodiment of the X-ray measuring arrangement 1 for examining test objects 20 using X-ray radiation. The X-ray measuring arrangement 1 comprises a rotatable receiving device 2, an X-ray examination device 3 with at least one X-ray source 4, and at least one X-ray detector 5. The rotatable receiving device 2 is designed as a rotatable disk, in particular a circular disk.

[0042] The at least one X-ray source 4 and the at least one X-ray detector 5 are arranged on the rotatable recording device 2, wherein the at least one X-ray source 4 and the at least one X-ray detector 5 are movable along a linear axis 6 extending perpendicular to the rotational axis 9 of the rotatable recording device 2. In particular, the at least one X-ray source 4 and the at least one X-ray detector 5 are movable along a linear axis 6 extending radially to the rotatable disk 2.

[0043] Furthermore, the X-ray measuring arrangement 1 comprises at least one positioning device 7, which is designed to arrange at least one predetermined region of interest 20-1 of a test object 20 in a detection area 8 of the X-ray examination device 3 on a rotation axis 9 of the rotatable recording device 2 between the at least one X-ray source 4 and the at least one X-ray detector 5 and to hold it there during the examination.

[0044] In the embodiment shown, the X-ray examination device 3 has an X-ray source 4 and an X-ray detector 5. The X-ray source 4 and the X-ray detector 5 are each arranged on carriages 10, 11, which are guided on the rotatable receiving device 2 via two common rails 12. Each of the carriages 10, 11 is connected to its own drive 14, wherein the drives 14 are designed in particular as spindle drives. This allows the two carriages 10, 11 with the X-ray source 3 and the X-ray detector 4 to be moved separately and independently of one another. The embodiment of the arrangement shown is selected as an example; in principle, the X-ray source 4 and the X-ray detector 5 can also be arranged on the rotatable receiving device 2 by other means.

[0045] In the embodiment shown, the positioning device 7 comprises a positioning carousel 15 with six holders 16 for test objects 20. In particular, it can be provided that the holders 16 can be rotated about a rotation axis in order to be able to rotate a test object 20 arranged on the holders 16 and in this way to bring the at least one region of interest 20-1 of a test object 20 into a position suitable for measurement.

[0046] In the embodiment shown, a toothed ring 17 is arranged on an outer circumference of the rotatable holding device 2, which is designed as a rotatable circular disk. A pinion (not shown) of a drive 18, for example an electric motor, engages this toothed ring 17 and can thereby rotate the rotatable holding device 2 about the axis of rotation 9. As a result, the X-ray examination device 3 can be rotated about a region of interest 20-1 of the test object 20, which region of interest 20-1 is arranged in the detection area on the axis of rotation 9, so that radiographic images of the region of interest 20-1 can be acquired from different directions. A rotational movement of the rotatable holding device 2 about the axis of rotation 9 is illustrated schematically in Fig. 2. Fig.2 further illustrates a movement of the X-ray source 4 and the X-ray detector 5 along the linear axis 6 running perpendicular to the axis of rotation 9 of the rotatable removal device 2, in particular along the radially running linear axis 6.

[0047] The rotatable receiving device 2, designed as a rotatable disk, comprises, in the embodiment shown, in particular, a circular base plate 19. The circular base plate 19 is, in particular, rotatably mounted on a holding device 21, for example, via a shaft and a pivot bearing. The holding device 21 is arranged on a base 22. The axis of rotation 9 runs, in particular, horizontally during use, with a plane of the rotatable disk extending vertically. This enables the horizontal feeding and removal of test objects 20 into the detection area 8.

[0048] An evaluation of acquired radiographic images is carried out in a conventional manner by the X-ray measuring system 1. In particular, computed tomography measurements can be performed with the X-ray measuring system 1. A control device configured for this purpose is not shown for reasons of clarity, but is configured in a conventional manner, particularly for control and evaluation.

[0049] In the embodiment shown, the test objects 20 are examined in such a way that regions of interest 20-1 of the test objects 20, in particular corners of batteries or battery cells, are arranged one after the other in the detection area 8 on the rotation axis 9 between the X-ray source 4 and the X-ray detector 5 by rotating the positioning carousel 15 and are held there during a measurement. During the measurement, radiographic images are acquired, in particular, over an angular range of at least 180°, preferably over an angular range of at least 360°, by rotating the rotatable recording device 2 around the region of interest 20-1. It can be provided that several regions of interest 20-1 are measured for each test object 20.For this purpose, the holders 16 of the positioning carousel 15 can each be rotated so that the test objects 20 can be rotated and a different region of interest 20-1 can be arranged in the detection area 8 on the rotation axis 9 between the X-ray source 4 and the X-ray detector 5. Drives (not shown) suitable for the respective application can be provided to rotate the holders 16. The X-ray measuring arrangement 1 can be used in particular in a production line for quality control. Test objects 20 that have not yet been examined can then be fed to the positioning carousel 16 on the side facing away from the rotatable receiving device 2, and test objects 20 that have already been examined can be removed.

[0050] It can be provided that the rotatable receiving device 2 is designed in such a way that it has no limitations with regard to a rotation angle around the rotation axis 9. Electrical connections and / or wired signal lines are then realized in particular via sliding contacts.

[0051] Fig. 3 shows a further embodiment of the X-ray measuring arrangement 1. This embodiment is fundamentally designed like the embodiment shown in Fig. 1. The same reference numerals in Fig. 3 denote the same features and terms as in the preceding Figs. 1 to 2. In this embodiment, the X-ray measuring arrangement 1 comprises at least two independently operating positioning devices 7 and, associated with each of the at least two positioning devices 7, feed and discharge devices 23 for feeding and discharging test objects 20 to be examined. The feed and discharge devices 23 comprise a total of four conveyor belts. The positioning devices 7 each comprise a robot arm 24, in particular a multi-jointed robot arm 24.The robot arms 24 are configured to grip test objects 20, in particular batteries or battery cells, fed by means of the feed and removal devices 23 and to position a predetermined region of interest 20-1 of the gripped test object 20 in the detection area 8 on the rotation axis 9 between the X-ray source 4 and the X-ray detector 5. After the examination, i.e., after the radiographic images for reconstructing a tomographic object volume have been acquired, the robot arm 24 returns the examined test object 20 to the feed and removal devices 23. The robot arms 24 operate alternately so that the X-ray examination device 3 can be optimally utilized in terms of time. It can be provided that rotation of the rotatable receiving device 2 is continuous, even when no radiographic images are currently being acquired.This prevents repeated acceleration and deceleration of the rotatable holding device 2 and thus increased wear on the bearing and the drive, etc. Fig. 4 shows part of a further embodiment of the X-ray measuring arrangement 1. This embodiment is basically designed like the embodiments already described above. The same reference numerals in Fig. 4 denote the same features and terms as in the preceding Figures 1 to 3. In this embodiment, it is provided that the X-ray examination arrangement 1 has a second linear axis 25 arranged perpendicular to a direction of the axis of rotation 9 and perpendicular to the direction of the linear axis 6, on which the at least one X-ray detector 5 of the X-ray examination device 3 can be displaced.A movement along the second linear axis 25 can be carried out, for example, by means of a suitable drive (not shown), for example by means of a linear motor or a spindle drive.

[0052] Fig. 4 further illustrates a further embodiment. In this embodiment, the X-ray measuring arrangement 1 has at least one third linear axis 26 running parallel to the rotation axis 9, along which the X-ray source 4 and / or the X-ray detector 5 can be displaced. Movement along the third linear axis 26 can be achieved, for example, by means of a suitable drive (not shown), for example, a linear motor or a spindle drive.

[0053] It can be provided that a drive for moving the at least one X-ray source 4 and the at least one X-ray detector 5 along the linear axis 6 extending perpendicular to the rotational axis 9 of the rotatable receiving device 2 (and in particular radially) is arranged outside the rotatable receiving device 2. Coupling means (not shown) are then provided with which a mechanical connection to the drive can be established when a movement along the axis is necessary.

[0054] It can be provided that the X-ray measuring arrangement 1 has at least one wireless communication interface (not shown) arranged on the rotatable receiving device 2, which is configured to provide radiographic images acquired by the at least one X-ray detector 5. Sliding contacts for signal lines are then unnecessary. It can be provided that the at least one X-ray source 4 is a microfocus X-ray source.

[0055] It can be provided that the at least one X-ray source 4 comprises a monoblock X-ray tube.

[0056] It can be provided that the at least one X-ray detector 5 is designed as a direct conversion X-ray detector. The at least one X-ray detector 5 can, for example, comprise CdTe as the active material.

[0057] It can be provided that the at least one X-ray source 4 and / or the at least one X-ray detector 5 have a fluid cooling system (not shown). Elements of the fluid cooling system are then arranged in particular on the rotatable receiving device 2 and are moved along with it during rotation.

[0058] It can be provided that the X-ray measuring arrangement 1 comprises at least one doorless radiation lock 27. This is illustrated schematically using the embodiment shown in Fig. 3. The doorless radiation lock 27 comprises, in particular, a plurality of viewing panels 28 (impermeable to the X-ray radiation used), which are arranged such that there is no direct line of sight from an external area 30 to the at least one X-ray source 4, so that primary radiation from the at least one X-ray source 4 cannot escape to the outside and secondary or scattered radiation in the external area 30 is no longer detectable.

[0059] It can be provided that the X-ray examination device 3 has several X-ray sources 4 and several X-ray detectors 5. The respective beam paths are then arranged offset by a differential angle around the rotation axis 9, so that radiographic images of the test object 20 can be acquired simultaneously from several different directions.

[0060] It can be provided that the X-ray measuring arrangement 1 has at least one collimator (not shown) and / or at least one aperture element (not shown) and / or at least one filter element (not shown), which is / are designed to limit X-ray radiation emanating from the at least one X-ray source 4 to an active detector surface of the at least one X-ray detector 5.

[0061] Fig. 5 shows a schematic flow diagram of an embodiment of the method for examining test objects using X-rays. In this embodiment, the method is carried out, for example, using an X-ray measuring arrangement according to the embodiment shown in Fig. 3, i.e., positioning devices comprising two robot arms are used. Method steps 100-103 are carried out by the first positioning device, method steps 200-203 by the X-ray examination device and the rotatable recording device, and method steps 300-303 by the second positioning device, wherein the sequences are synchronized with one another, as can be seen from the flow diagram and the following description. Within the scope of the method, the test objects are examined and / or measured, in particular using computed tomography, and for this purpose are x-rayed from different directions.

[0062] In a method step 100, the first robot arm grasps a test object, in particular a battery or battery cell, from one of the feed or discharge devices.

[0063] In a method step 101, a predetermined region of interest of the gripped test object, in particular a corner of the battery or battery cell, is arranged in the detection range of the X-ray examination device on the axis of rotation between the X-ray source and the X-ray detector. It can be provided that a predetermined final section of an arrangement trajectory when arranging the at least one predetermined region of interest of the test object in the detection range runs along the axis of rotation of the rotatable receiving device in order to avoid a collision with the X-ray source and the X-ray detector. In parallel, a rotation of the rotatable receiving device is started or the rotatable receiving device is rotated continuously, i.e., without a pause.

[0064] In a method step 200, the test object's region of interest is measured, with the measurement starting when a predetermined angular velocity of the rotatable holding device is reached. In a method step 102, the test object is repositioned by the first robot arm so that another predetermined region of interest of the test object, in particular an opposite corner of the battery or battery cell, is arranged in the detection zone on the rotation axis between the X-ray source and the X-ray detector. In particular, for this purpose, the test object is removed from the detection zone along the rotation axis, repositioned, and then brought back into the detection zone along the rotation axis with the further predetermined region of interest. In parallel, the rotatable holding device can be accelerated again, or a rotational movement can be maintained.

[0065] In a method step 201, the further specified region of interest is measured in an analogous manner.

[0066] In a method step 103, the test object is removed from the detection area again, in particular along the rotation axis, and transferred to the feeding and removal device.

[0067] In parallel, in a method step 300, the second robot arm grasps a further test object, in particular a further battery or battery cell, from one of the feed or removal devices and moves the grasped further test object into the vicinity of the detection area without hindering the first robot arm and waits there.

[0068] If the detection area is free after method step 103, then in a method step 301, a predetermined region of interest of the grasped further test object, in particular a corner of the further battery or battery cell, is arranged in the detection area on the axis of rotation between the X-ray source and the X-ray detector. It can also be provided that a predetermined final section of an arrangement trajectory when arranging the at least one predetermined region of interest of the further test object in the detection area runs along the axis of rotation of the rotatable holding device in order to avoid a collision with the X-ray source and the X-ray detector. In parallel, a rotation of the rotatable holding device is started or the rotatable holding device is rotated continuously, i.e., without a pause.In a method step 202, the predetermined region of interest of the further test object is measured, wherein the measurement is started when a predetermined angular velocity of the rotatable recording device is reached.

[0069] In a method step 302, the additional test object is repositioned by the second robot arm so that another predetermined region of interest of the additional test object, in particular an opposite corner of the additional battery or battery cell, is arranged in the detection zone on the rotation axis between the X-ray source and the X-ray detector. In particular, the additional test object is removed from the detection zone along the rotation axis, repositioned, and then brought back into the detection zone along the rotation axis with the additional predetermined region of interest. In parallel, the rotatable support device can be accelerated again or a rotational movement can be maintained.

[0070] In a method step 203, the further predetermined region of interest is measured in an analogous manner.

[0071] In a method step 303, the further test object is removed from the detection area again, in particular along the rotation axis, and transferred to the feeding and removal device.

[0072] The procedure is then repeated for further test objects, with the positioning device always alternating when arranging and holding the test objects.

[0073] In principle, further positioning devices can be provided, whereby the process basically takes place in an analogous manner.

[0074] In one embodiment, it is provided that the method steps 200 to 203 are carried out in a different order: In particular, if, for example, the movement (method steps 102 or 302) for changing the region of interest takes longer than the changing of the test objects by the two positioning devices, it can be provided that after method step 200, method step 202 is first carried out and, in parallel, the repositioning (method step 102) is carried out, followed by method step 201 and, in parallel, method steps 302 and 103.An examination is then carried out for two test objects, each with two regions of interest, in particular in the following order: Examination of a first region of interest of the first test object, examination of a first region of interest of the second test object, examination of a second region of interest of the first test object, and examination of a second region of interest of the second test object. The procedure is carried out analogously for additional test objects and additional regions of interest.

[0075] List of reference symbols

[0076] 1 X-ray measuring arrangement

[0077] 2 rotating mounting devices

[0078] 3 X-ray examination device

[0079] 4 X-ray source

[0080] 5 X-ray detector

[0081] 6 (first) linear axis

[0082] 7 Positioning device

[0083] 8 Detection range

[0084] 9 axis of rotation

[0085] 10 sleds

[0086] 11 sleds

[0087] 12 rail

[0088] 14 Drive

[0089] 15 Positioning carousel

[0090] 16 holders

[0091] 17 Toothed ring

[0092] 18 Drive

[0093] 19 (circular) base plate

[0094] 20 test object

[0095] 20-1 Region of interest

[0096] 21 Holding device

[0097] 22 base sockets

[0098] 23 Feed and discharge device

[0099] 24 robot arm

[0100] 25 second linear axis (perpendicular to the direction of the rotation axis)

[0101] 26 third linear axis (parallel to the rotation axis)

[0102] 27 doorless radiation lock

[0103] 28 Screen

[0104] 30 outdoor area

[0105] 100-103 Process steps (first positioning device)

[0106] 200-203 Process steps (X-ray examination device)

[0107] 300-303 Process steps (second positioning device)

Claims

Patent claims 1. X-ray measuring arrangement (1) for examining test objects (20) using X-ray radiation, comprising: a rotatable receiving device (2), an X-ray examination device (3) with at least one X-ray source (4) and at least one X-ray detector (5), wherein the at least one X-ray source (4) and the at least one X-ray detector (5) are arranged on the rotatable receiving device (2), and at least one positioning device (7) which is designed to arrange at least one predetermined region of interest (20-1) of a test object (20) in a detection area (8) of the X-ray examination device (3) on an axis of rotation (9) of the rotatable receiving device (2) between the at least one X-ray source (4) and the at least one X-ray detector (5) and to hold it there during the examination.

2. X-ray measuring arrangement according to claim 1, characterized in that the at least one X-ray source (4) and / or the at least one X-ray detector (5) are movable along a linear axis (6) running perpendicular to the axis of rotation (9) of the rotatable removal device (2).

3. X-ray measuring arrangement (1) according to claim 1 or 2, characterized in that the rotatable receiving device (2) is arranged such that the axis of rotation (9) of the rotatable receiving device (2) runs horizontally.

4. X-ray measuring arrangement (1) according to one of the preceding claims, characterized in that the rotatable receiving device (2) is designed such that it has no limitations with regard to an angle of rotation about the axis of rotation (9).

5. X-ray measuring arrangement (1) according to one of the preceding claims, characterized by at least two independently operating positioning devices (7) and each of the at least two positioning devices (7) respectively associated feed and Discharge devices (23) for supplying and removing test objects to be examined. X-ray measuring arrangement (1) according to one of the preceding claims, characterized in that the at least one positioning device (7) comprises a robot arm (24). X-ray measuring arrangement (1) according to one of the preceding claims, characterized in that the at least one positioning device (7) comprises a positioning carousel (15). X-ray measuring arrangement (1) according to one of the preceding claims, characterized by a second linear axis (25) arranged perpendicular to a direction of the axis of rotation (9) and perpendicular to the direction of the linear axis (6), on which the at least one X-ray detector (4) of the X-ray examination device (3) can be displaced.X-ray measuring arrangement (1) according to one of the preceding claims, characterized by at least one third linear axis (26) running parallel to the axis of rotation (9), on which the at least one X-ray source (4) and / or the at least one X-ray detector (5) can be displaced. X-ray measuring arrangement (1) according to one of claims 2 to 9, characterized in that a drive (14) for moving the at least one X-ray source (4) and / or the at least one X-ray detector (5) along the linear axis (6) running perpendicular to the axis of rotation (9) of the rotatable receiving device (2) is arranged outside the rotatable receiving device (2). X-ray measuring arrangement (1) according to one of the preceding claims, characterized by at least one wireless communication interface arranged on the rotatable receiving device (2), which is configured to provide radiographic images acquired by means of the at least one X-ray detector (5).X-ray measuring arrangement (1) according to one of the preceding claims, characterized by at least one doorless radiation lock (27). X-ray measuring arrangement (1) according to one of the preceding claims, characterized in that the X-ray examination device (3) has a plurality of X-ray sources (4) and a plurality of X-ray detectors (5). X-ray measuring arrangement (1) according to one of the preceding claims, characterized by at least one collimator and / or at least one diaphragm element and / or at least one filter element, which is / are configured to limit X-ray radiation emanating from the at least one X-ray source (4) to an active detector surface of the at least one X-ray detector (5).A method for examining test objects (20) using X-rays, wherein an X-ray measuring arrangement (1) according to one of claims 1 to 14 is used, wherein at least one predetermined region of interest (20-1) of a test object (20) is arranged by means of the at least one positioning device (7) in the detection range (8) of the X-ray examination device (3) on the axis of rotation (9) of the rotatable recording device (2) between the at least one X-ray source (4) and the at least one X-ray detector (5) and is held there during the acquisition of at least one radiographic image by means of the at least one positioning device (7). The method according to claim 15, characterized in that a predetermined last section of an arrangement trajectory runs along the axis of rotation (9) of the rotatable recording device (2) when arranging the at least one predetermined region of interest (20-1) of the test object (20) in the detection range (8).Method according to claim 15 or 16, characterized in that at least two independently operating positioning devices (7) are provided with feed and unloading devices respectively assigned to each of the at least two positioning devices (7). Discharge devices (23) are used for supplying and removing test objects (20) to be examined in order to arrange the at least one predetermined region of interest (20-1) of the test objects (20) in the detection area (8), wherein the at least two positioning devices (7) are used alternately.

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