Flange, flanged joint, vacuum and / or reaction chamber, and system for thermal laser epitaxy
Patent Information
- Application Number
- EP2024732210
- Authority / Receiving Office
- EP · EP
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2023-06-07
- Filing Date
- 2024-06-06
- Publication Date
- 2026-02-25
AI Technical Summary
Existing vacuum and/or reaction chambers face challenges in maintaining high tightness during and after heating processes, such as bake-out, due to material limitations like steel, which can lead to thermal damage and contamination from ambient air.
A flange made of aluminum alloy with a circumferential and flat sealing surface and a cutting edge, featuring a 110° angle between the sealing surface and the inner side surface of the cutting edge, along with a rounded connecting edge, ensures high tightness and resistance to thermal expansion, and optionally coated with industrial carbon black for improved lubrication.
The flange design maintains high sealing efficacy before, during, and after heating processes, reducing the risk of thermal damage and contamination, while allowing for efficient access to the chamber interior.
Smart Images
Figure EP2024065638_12122024_PF_FP_ABST
Abstract
Description
[0001] Flange, flange connection, vacuum and / or reaction chamber and system for thermal laser epitaxy
[0002] The invention relates to a flange made of an aluminum alloy, wherein the flange is arranged or can be arranged in a sealed manner at an opening in a chamber wall of a vacuum and / or reaction chamber, wherein the flange further has a circumferential and flat sealing surface for sealing the opening of the vacuum and / or reaction chamber from the environment, to which a cutting edge for a cutting seal is connected.Furthermore, the invention relates to a flange connection comprising a first flange element, a second flange element, a sealing ring and a clamping device, wherein the first flange element and the second flange element each have a cutting edge for a cutting seal, wherein the sealing ring consists of a softer material than the cutting edges and can be arranged between the first flange element and the second flange element, and in order to seal the flange connection, the first flange element and the second flange element can be pressed against one another by the clamping device, so that the cutting edge of the first flange element and the cutting edge of the second flange element press into the sealing ring from opposite sides.The invention further relates to a vacuum and / or reaction chamber with a chamber wall and an opening in the chamber wall, wherein the vacuum and / or reaction chamber further comprises such a flange for the opening, wherein the flange is arranged in a sealed manner at the opening. The invention further relates to a system for thermal laser epitaxy (TLE) with at least one such vacuum and / or reaction chamber, wherein the vacuum and / or reaction chamber has a chamber wall with one or more openings, at each of which a flange is arranged. Vacuum and / or reaction chambers are widely used in modern technology, for example to provide a space or volume that is sealed off from the environment.A controllable reaction atmosphere can then be provided, in particular, in these vacuum and / or reaction chambers, whereby properties of the reaction atmosphere, such as composition and pressure, can be adjusted as desired over a wide range.
[0003] A material often used for such vacuum and / or reaction chambers is steel. However, for some applications, steel has proven to be less than the best choice, for example, when high thermal conductivity of the vacuum and / or reaction chamber material is advantageous. One example of such an application is thermal laser epitaxy (TLE), in which source material provided in the volume of the vacuum and / or reaction chamber is thermally evaporated and / or sublimated using high-intensity laser radiation below the plasma threshold. The evaporated and / or sublimated material is usually used to deposit a high-purity layer on a substrate, in other words, to vapor-deposit the substrate.
[0004] If the laser beam hits the chamber wall of the vacuum and / or reaction chamber, accidentally or, for example, after reflection from the source material, this can result in high energy input into the material of the vacuum and / or reaction chamber. By using a material with a high thermal conductivity compared to steel, local heating of the chamber wall and even physical damage can be avoided or at least significantly reduced. Suitable materials include aluminum alloys. At the same time, it is necessary to allow access to the interior of the vacuum and / or reaction chamber, in the above example in particular for coupling the laser beam and for providing the source material and the substrate to be vapor deposited.Flanges or flange connections are suitable means for allowing the necessary access to the interior of the vacuum and / or reaction chamber at openings in the chamber wall, while simultaneously sealing these openings from the environment. Since these flanges or flange connections, as part of the vacuum and / or reaction chamber, could also be accidentally hit by laser radiation, they can preferably also be made of an aluminum alloy.
[0005] As already explained above, high-purity layers can be evaporated onto a substrate in a TLE system. To achieve this, the reaction atmosphere inside the vacuum and / or reaction chamber must also meet the highest standards. This can be achieved, among other things, by heating the vacuum and / or reaction chamber prior to evaporation in a so-called bake-out process. This requires a sealed flange to be highly airtight before, during, and especially after this heating process, as otherwise ambient air can re-enter the vacuum and / or reaction chamber.
[0006] In summary, based on known vacuum and / or reaction chambers and flanges or flange connections, the object is to create an improved flange, an improved flange connection, an improved vacuum and / or reaction chamber, and an improved TLE system that are further developed compared to the prior art. In particular, the object of the present invention is to create an improved flange, an improved flange connection, an improved vacuum and / or reaction chamber, and an improved TLE system in which a high, preferably extremely high, tightness of the flange is ensured or remains ensured before, during, and after heating during a bake-out process.
[0007] The above object is achieved by the independent claims. In particular, the object is achieved by a flange according to claim 1, by a flange connection according to claim 13, by a vacuum and / or reaction chamber according to claim 16 and by a TLE system according to claim 19. Further features emerge from the subclaims, the description and the drawings. Features and advantages described with regard to the flange according to the invention also apply with regard to a flange connection according to the invention, with regard to a vacuum and / or reaction chamber according to the invention or with regard to a TLE system according to the invention and vice versa, insofar as technically reasonable and possible.
[0008] According to a first aspect of the invention, the object is achieved by a flange made of an aluminum alloy, wherein the flange is arranged or can be arranged in a sealed manner at an opening in a chamber wall of a vacuum and / or reaction chamber, wherein the flange further has a circumferential and flat sealing surface for sealing the opening of the vacuum and / or reaction chamber from the environment, to which a cutting edge for a cutting seal is connected, wherein an inner side surface of the cutting edge adjacent to the sealing surface encloses an angle of 1 10° with the sealing surface.
[0009] The material for the flange according to the invention comprises an aluminum alloy. Compared to steel, the vast majority of possible aluminum alloys exhibit higher thermal conductivity. Aluminum alloys can be selected with many different properties, with particularly hard, heat-stable, and low-outgassing aluminum alloy variants being preferred for use as flanges for vacuum and / or reaction chambers.
[0010] The flange according to the invention is intended for use on or with a vacuum and / or reaction chamber, in particular a vacuum and / or reaction chamber of a TLE system. For this purpose, the flange according to the invention can be arranged at an opening in a chamber wall of the vacuum and / or reaction chamber. During this arrangement, particular attention must be paid to a tight transition between the material of the chamber wall and the material of the flange. A material-to-material connection of the flange to the vacuum and / or reaction chamber by welding has proven particularly suitable in this case. Alternatively, the flange can also be formed integrally with the vacuum and / or reaction chamber from the outset and manufactured monolithically with it, for example by a machining process.
[0011] The flange arranged at the opening of the vacuum and / or reaction chamber thus essentially extends this opening, often perpendicular to the chamber wall. In order to maintain the sealability of the interior of the vacuum and / or reaction chamber against the environment, it is therefore necessary to also equip the flange with a means of sealed closure. According to the invention, this is achieved by providing a sealing surface which is provided on the flange circumferentially around the opening in the chamber wall, which is essentially extended by the flange. The sealing surface is generally flat, with a normal to this plane of the sealing surface preferably oriented transversely, in particular at right angles, to the opening. Overall, the flange according to the invention is prepared for a cutting seal. This is reflected in particular in the fact that a cutting edge for this cutting seal is arranged outwards adjacent to the sealing surface.In cutting seals, the flange and the corresponding counterpart, often also a flange or a cover, usually have such sealing surfaces and cutting edges, between which a sealing ring, usually made of a softer metal, is inserted. The cutting edges press into the sealing ring, essentially resulting in the sealing effect of the cutting seal. Cutting seals can, for example, withstand particularly low pressures of up to 10 bar. -12 hPa inside the vacuum and / or reaction chamber.
[0012] Essential to the invention is that an inner side surface of the cutting edge adjacent to the sealing surface encloses an angle of 1 10° with the sealing surface. Angle specifications in this application always refer to the specified angle and a range around this angle that can be achieved with reasonable accuracy during manufacture of the flange. For cutting seals in accordance with the ISO 3669:2020(E) standard, values of up to 92° are possible for this angle. Due to the flatter transition from the flat sealing surface to the inner side surface of the cutting edge, a higher force is required for the flange according to the invention than for the standardized flange to achieve the same sealing effect. This can be explained by the fact that with a small included angle and thus a steeper transition between the sealing surface and the inner side surface of the cutting edge, the cutting edge presses more easily into the sealing ring even with smaller forces.However, this can easily be compensated by increasing the sealing force.
[0013] At the same time, however, it has been found that the flatter design of the transition between the sealing surface and the inner side surface according to the invention maintains its high level of tightness even when the vacuum and / or reaction chamber heats up, particularly during a bake-out process. This is presumably due to a higher proportion of elastic energy stored here by the compression of the seal and contrasts with the behavior of cutting seals with steeper transitions between the sealing surface and the cutting edge, as required by the above-mentioned standard.
[0014] In summary, the flange according to the invention thus provides a possibility of closing an opening in a wall of a vacuum and / or reaction chamber, in particular a vacuum and / or reaction chamber of a TLE system, in such a way that a high degree of tightness of the flange is achieved before, during and after heating in the course of a bake-out process.
[0015] Furthermore, the flange according to the invention can be made of an aluminum alloy. In this embodiment, the flange is thus made entirely of the aluminum alloy and contains no other materials. The above-described advantages of using an aluminum alloy as the material for the flange according to the invention can thus be realized even better, particularly across the entire flange.
[0016] Furthermore, the flange according to the invention can be characterized in that an outer side surface of the cutting edge adjoins the inner side surface, wherein the inner side surface and the outer side surface enclose an angle of 90°. In other words, the outer side surface is inclined by 20° relative to the sealing surface. An angle of 90° at the tip of the cutting edge has proven particularly suitable for creating a cutting edge that presses sufficiently into a correspondingly existing sealing ring, despite the flatter transition from the sealing surface to the inner side surface. The tightness that can be provided according to the invention before, during, and after a heating process can thus be made even better.
[0017] The flange according to the invention can also be further developed such that the inner side surface and the outer side surface adjoin one another with a rounded connecting edge, wherein the radius of the rounding of the connecting edge is between 0.1 mm and 0.2 mm, preferably 0.2 mm. If the connecting edge of the two side surfaces of the cutting edge is too sharp, it can happen that the cutting edge plastically deforms the material of the corresponding sealing ring too strongly, resulting in too little elastic deformation remaining in the connection to elastically, i.e. reversibly, absorb any deformations that may occur during and after the heating process due to different thermal expansion, and thus maintain the sealing effect.By using a rounded connecting edge with a radius of curvature between 0.1 mm and 0.2 mm, preferably 0.2 mm, this insufficient amount of elastic deformation can be avoided or at least significantly reduced.
[0018] Furthermore, the flange according to the invention can be designed such that the inner side surface and / or the outer side surface of the cutting edge surround the opening in a conical manner. Especially for circular openings, it is advantageous to provide the flange and in particular the elements provided for the cutting seal on the flange with rotational symmetry. This can be achieved particularly easily by conically shaped side surfaces of the cutting edge. Conical in the sense of the invention means that the side surfaces are designed as the outer surface of a respective truncated cone, with the truncated cone assumed for the inner side surface pointing inwards with the end of the smaller diameter, i.e. in the direction of the rest of the flange. Conversely, the truncated cone assumed for the outer side surface points outwards, i.e. away from the flange.
[0019] According to a further embodiment of the flange according to the invention, it can be characterized in that carbon black is applied at least partially to the cutting edge. Carbon black is essentially pure carbon and has lubricating properties without posing a risk of outgassing, which is associated with, for example, common greases and oils. By applying carbon black to the cutting edge, undesirable tensions between the flange and the corresponding sealing ring, which are often caused by unavoidable tilting of these components against each other, can be counteracted. For application, the carbon black can preferably be suspended in high-purity propanol, which then evaporates after application. This ensures particularly uniform application of the carbon black.
[0020] Furthermore, the flange according to the invention can be further developed such that the carbon black is applied to the outer side surface and the inner side surface is free of carbon black. According to the geometry of the flange according to the invention, the inner side surface of the cutting edge is closer to the opening in the chamber wall of the vacuum and / or reaction chamber, and correspondingly the outer side surface is further away from this. By applying the carbon black only to the outer side surface of the cutting edge, the above-described advantages with regard to improved lubrication between the flange and the sealing ring can be achieved, particularly during deformation during the sealing process, and at the same time the risk of contamination of the interior of the vacuum and / or reaction chamber with carbon black can be significantly reduced.
[0021] In the flange according to the invention, it can also be further provided that the aluminum alloy used for the flange has a zinc content of 0.15% or less, preferably 0.10% or less. Some components of aluminum alloys, and zinc is particularly noteworthy here, are unsuitable for use in high and ultra-high vacuum applications because they are highly reactive and, in particular, have a high vapor pressure. When the vacuum and / or reaction chamber is pumped out, these components would outgas from the alloy and thus prevent or at least significantly delay the achievement of the desired vacuum. By limiting the zinc content of the aluminum alloy used to 0.15% or less, in particular 0.10% or less, this disadvantage, at least with regard to zinc, can be reduced to such an extent that it is no longer decisive.
[0022] According to a further embodiment of the flange according to the invention, it can be characterized in that the aluminum alloy used for the flange has a Brinell hardness of 100 HBW or greater. The hardness of the flange according to the invention is particularly crucial for its durability, in other words for the time intervals at which maintenance intervals can be planned. Furthermore, the hardness has a decisive influence, in particular, on the stability of the cutting edge of the cutting seal, which, as explained above, also consists of the aluminum alloy when the flange is preferably made entirely of this alloy. A Brinell hardness of 100 HBW or greater has proven preferable in order to ensure particularly good durability of the entire flange and, in particular, to ensure high stability of the cutting edge.
[0023] In addition, the Brinell hardness of 100 HBW or greater has the advantage of reducing the likelihood or severity of accidental damage to the cutting edge when handling such flanges and assembling the resulting vacuum chambers or reaction chambers.
[0024] Furthermore, in the flange according to the invention it can be provided that the aluminum alloy used for the flange is suitable for use at temperatures of 140° C or higher, preferably 200° C or higher. As already explained several times above, in particular when used in a TLE system, the vacuum and / or reaction chamber with the flange according to the invention is usually subjected to heating in the course of a bake-out process. Such baking processes can take place over a longer period of time, usually several days, depending on the application. The suitability of the aluminum alloy used for the flange at temperatures of 140° C or higher, preferably 200° C or higher, has proven sufficient to withstand the necessary heating processes unscathed.
[0025] According to a first alternative embodiment, the aluminum alloy used for the flange according to the invention can further be an AI5xxx alloy. AI5xxx alloys are characterized by medium to high strengths and, in particular, high corrosion resistance. They are also easy to weld and can be easily cold formed, i.e., processed by rolling and forging. Overall, these AI5xxx alloys, for example the standardized alloy EN AW-5083, represent good materials for manufacturing a flange according to the invention. In particular, flanges that are to be integrally connected to a vacuum and / or reaction chamber by welding can preferably comprise or consist of such an AL5xxx alloy.
[0026] In a second alternative embodiment, the flange according to the invention can be characterized in that the aluminum alloy used for the flange has the following components in addition to aluminum:
[0027] Si: maximum 0.30% Fe: maximum 0.40% Cu: 5.8% - 6.8% Mn: 0.20% - 0.40% Mg: maximum 0.10% Cr: maximum 0.05% Zn: maximum 0.10% Ti: 0.02% - 0.10% Other components: maximum 0.15%, of which individual components maximum 0.05%.
[0028] Such an aluminum alloy is marketed, for example, by Bikar Metalle under the brand name Formodal® BM-400. This aluminum alloy is characterized by its special composition, particularly in that it combines the advantageous properties already highlighted above. It has a maximum zinc content of 0.10%, a Brinell hardness of 130 HBW, and is suitable for long-term use at temperatures up to 200°C. All of the advantages associated with these properties can thus be achieved by using this aluminum alloy as a component of the flange according to the invention. An aluminum alloy as listed above is therefore a particularly suitable aluminum alloy for manufacturing a flange according to the invention, or preferably even completely from it, or even complete vacuum and / or reaction chambers.
[0029] According to a second aspect of the invention, the object is achieved by a flange connection comprising a first flange element, a second flange element, a sealing ring and a clamping device, wherein the first flange element and the second flange element each have a cutting edge for a cutting seal, wherein the sealing ring consists of a softer material than the cutting edges and can be arranged between the first flange element and the second flange element, and in order to seal the flange connection, the first flange element and the second flange element can be pressed against one another by the clamping device, so that the cutting edge of the first flange element and the cutting edge of the second flange element press into the sealing ring from opposite sides.The flange connection according to the invention is characterized in that the first flange element and / or the second flange element is designed as a flange according to the first aspect of the invention.
[0030] The flange connection according to the second aspect of the invention comprises at least one, preferably two, flanges according to the first aspect of the invention as flange elements. All features and advantages described in detail above with reference to a flange according to the first aspect of the invention can thus also be achieved by a flange connection according to the second aspect of the invention.
[0031] To assemble the flange connection according to the invention, the softer sealing ring is inserted between the flange elements, and then these are pressed together by the clamping device. For example, screws can be used as clamping devices that pass through existing holes in the flange elements. Alternatively or additionally, other clamping devices are also conceivable, such as circumferential chain elements or tensioning belts.
[0032] The clamping device generates such strong forces that the cutting edges press into the sealing ring from opposite sides. To achieve this, the sealing ring material is selected to be softer than the material of the cutting edges, preferably than the material of the entire flange elements. This enables a particularly good seal, which also allows for the creation of a high vacuum in the vacuum and / or reaction chamber.
[0033] In particular, if both flange elements are designed as flanges according to the first aspect, a sealed connection between these vacuum and / or reaction chambers can be established by arranging or arranging the flanges at openings of the respective vacuum and / or reaction chambers. The use of aluminum alloys for the flange elements particularly favors use in a TLE system.
[0034] Furthermore, by designing the flange elements as flanges according to the invention, and thus in particular those sections which are used for forming the cutting seal, such as the sealing surfaces and the cutting edge, a particularly good temperature resistance of the seal of the flange connection can be enabled, in particular, for example, with regard to the behavior during a bake-out process.
[0035] Furthermore, in the flange connection according to the invention, it can be provided that the sealing ring is made of an aluminum alloy, preferably EN AW-1050A. As described above, at least one, preferably both flange elements are made of an aluminum alloy. By using an aluminum alloy as the material for the sealing ring, it can be ensured that the expansion behavior of the components involved in the cutting seal, in particular the two flange elements and the sealing ring, is the same or at least very similar. This can enable a consistently high level of sealing even under large temperature changes. The aluminum alloy designated by the standard number EN AW-1050A has proven to be particularly suitable as a material for sealing rings because, in contrast to many other aluminum alloys, it is softer.
[0036] Furthermore, the flange connection according to the invention can be characterized in that the first flange element is designed as a flange according to the first aspect of the invention, and wherein the second flange element is designed as a cover which is designed analogously to a flange according to the first aspect of the invention. A flange according to the first aspect of the invention is arranged in a sealed manner at an opening in a chamber wall of a vacuum and / or reaction chamber or can at least be arranged at such an opening. A cover, on the other hand, is a component which is provided for the sealed covering and closing of that end of a flange which carries the cutting seal. For this purpose, the cover likewise has the necessary components for the cutting seal, in particular a circumferential sealing surface and a cutting edge, but there is a continuous material plate between them.When used in a flange connection according to the invention, the flange according to the invention, which forms the first flange element, is thus closed by the cover, which forms the second flange element, and sealed by the correspondingly formed cutting seal.
[0037] A “continuous material plate” within the meaning of the invention includes, in particular, material plates in which sealed elements, such as windows or feedthroughs, in particular for electrical connections or for fluids, are arranged.
[0038] A lid designed analogously to a flange according to the first aspect of the invention is to be understood within the meaning of the invention in such a way that all features not associated with the opening of the vacuum and / or reaction chamber, i.e., in particular, the material used and the design and treatment of the cutting edge, can also be implemented in the lid. With regard to sealing, particularly at high temperatures such as during a bake-out process, a flange connection with a lid can thus provide the same features and advantages as a flange connection with two flanges according to the invention.
[0039] According to a third aspect of the invention, the object is achieved by a vacuum and / or reaction chamber with a chamber wall and an opening in the chamber wall, wherein the vacuum and / or reaction chamber further comprises a flange for the opening, wherein the flange is arranged in a sealed manner at the opening, wherein the flange is designed according to the first aspect of the invention. All features and advantages that have been described in detail above with reference to a flange according to the first aspect of the invention can thus also be made possible by a vacuum and / or reaction chamber according to the third aspect of the invention.
[0040] In particular, it can also be provided that the flange of the vacuum and / or reaction chamber is part of a flange connection according to the invention according to the second aspect of the invention.
[0041] In particular, the vacuum and / or reaction chamber according to the invention can be characterized in that the vacuum and / or reaction chamber and the flange are manufactured in one piece and monolithically. In other words, the vacuum and / or reaction chamber and the flange are already arranged next to one another during production and do not need to be fixed to one another. One possibility, for example, is production using a machining process, in particular milling, from a common metal block. This enables a particularly stable and, in particular, particularly tight arrangement of the flange on the vacuum and / or reaction chamber.
[0042] Furthermore, in the vacuum and / or reaction chamber according to the invention, it can also be provided that the vacuum and / or reaction chamber has two or more openings in the chamber wall, at each of which a flange according to the first aspect of the invention is arranged. In this way, the features and advantages described with reference to a flange according to the invention according to the first aspect of the invention can be made possible at a plurality of openings in the chamber wall of the vacuum and / or reaction chamber. Preferably, the vacuum and / or reaction chamber has such a flange according to the invention according to the first aspect of the invention at each of its openings in the chamber wall. Further preferably, in this embodiment, the vacuum and / or reaction chamber can also be manufactured in one piece and monolithically with the flanges according to the invention present.
[0043] According to a fourth aspect of the invention, the object is achieved by a system for thermal laser epitaxy (TLE) with at least one vacuum and / or reaction chamber, wherein the vacuum and / or reaction chamber has a chamber wall with one or more openings, at each of which a flange is arranged, wherein the vacuum and / or reaction chamber is designed according to the third aspect of the invention. The vacuum and / or reaction chamber according to the third aspect of the invention has one or more flanges according to the first aspect of the invention, which in turn can be parts of inventive flange connections according to the second aspect of the invention.All features and advantages that have been described in detail above with reference to a vacuum and / or reaction chamber according to the third aspect of the invention, with reference to a flange according to the first aspect of the invention or with reference to a flange connection according to the second aspect of the invention can thus also be made possible by a TLE system according to the fourth aspect of the invention.
[0044] The invention is described below with reference to the figures. The figures show in detail:
[0045] Fig. 1 A sectional view of a part of a flange according to the invention,
[0046] Fig. 2 A TLE system according to the invention with a vacuum and / or reaction chamber according to the invention, and
[0047] Fig. 3 Two flange connections according to the invention. Fig. 1 shows a partial view of a section through a possible embodiment of a flange 10 according to the invention. According to the invention, the flange can be arranged or is already arranged at an opening 104 in a chamber wall 102 of a vacuum and / or reaction chamber 100 (see Fig. 2).
[0048] To seal the opening 104, the flange 10 according to the invention has provisions for providing a cutting seal 40. In particular, a sealing surface 20 is provided, which circumferentially surrounds the opening 104. A cutting edge 30 is provided for the actual cutting seal 40, which adjoins the sealing surface 20 radially on the outside. As shown, the sealing surface 20 and an inner side surface 32, indicated by an extended line for clarity, form an angle of 90°+20°, i.e., 1 10°. This configuration enables consistent sealing even when the vacuum and / or reaction chamber 100, and thus the flange 10, are heated, for example, during a bake-out process.
[0049] Another component of the cutting edge 30 is the outer side surface 34, which, as shown, can preferably be oriented at an angle of 20° with respect to the plane of the sealing surface 20. The angle between the inner side surface 32 and the outer side surface 34 is thus 90°. Particularly in the case of a circular opening 104, the two side surfaces 32, 34 are preferably conically shaped. Their connecting edge 36 is further preferably rounded, in particular with a radius of the corresponding rounding 38 between 0.1 mm and 0.2 mm.
[0050] Carbon black can also be applied to the cutting edge 30, preferably exclusively to the outer side surface 34 of the cutting edge 30, in order to avoid or at least significantly reduce unnecessary and undesirable mechanical stresses between the flange 10 and a sealing ring used as a sealing material.
[0051] The flange 10 according to the invention comprises an aluminum alloy as its material and is preferably made of this alloy. An example of a possible aluminum alloy is an Al 5xxx alloy, which, for example, has particularly good welding properties.
[0052] Other preferred properties of the aluminum alloy used include a zinc content of less than 0.15%, a Brinell hardness of 100 HBW or greater, and suitability for long-term use at temperatures up to 140°C or higher. An aluminum alloy that offers all of these properties is Formodal® BM-400 from Bikar Metalle.
[0053] Fig. 2 shows a vacuum and / or reaction chamber 100 as used in a TLE system 200. Clearly visible are several flanges 10, each formed integrally and monolithically with the vacuum and / or reaction chamber 100. The flanges 10, in turn, are partially components of flange connections 50 according to the invention. A laser system 202 is flanged to one of the flanges 10, and a gas system 204 is flanged to another flange 10. By using the flanges 10 according to the invention, increased safety against accidental damage caused by unintentionally impinging radiation from the laser of the laser system 202 can be provided, particularly due to the higher thermal conductivity compared to steel. At the same time, the shape of the cutting seal 40 of the flanges 10 according to the invention enables improved sealing before, during, and after heating processes, for example for bake-out processes.The purity of the atmosphere present in the vacuum and / or reaction chamber 100, which is crucial for the quality of the vapor deposition generated in the TLE system 200, can thereby be improved. Fig. 3 shows two possible embodiments of flange connections 50 according to the invention, each comprising two flange elements 52, 54. In the left column, designated "A" in Fig. 3, both flange elements 52, 54 are designed as flanges 10 according to the invention (cf. Fig. 1). In the right column, designated "B" in Fig. 3, the first flange element 52 is also designed as a flange 10 according to the invention, while the second flange element 54 is designed as a cover 56. A schematic exploded view of both types of flange connections 50 is shown in the top row, and the respective flange connection 50 is shown closed in the bottom row.
[0054] In the following, the flange connections 50 shown in “A” and “B” are described together, with the differences between the two designs being discussed.
[0055] As already explained above, a flange connection 50 according to the invention comprises two flange elements 52, 54, each having a cutting edge 30 for a cutting seal 40. In particular, at least one of the two flange elements 52, 54, preferably both, is designed as a flange 10 according to the invention.
[0056] However, even if only one of the two flange elements 52, 54 is designed as a flange 10 according to the invention, in all embodiments of the flange connection 50 according to the invention the corresponding flange elements 52, 54 are nevertheless designed such that they together form an effective cutting seal 40.
[0057] If, as shown in "B," a cover 56 is used as the second flange element 54, it can preferably be designed analogously to a flange 10 according to the invention. "Analogously designed" within the meaning of the invention means, in particular, that all features that are not associated with the opening 104 of the vacuum and / or reaction chamber 100 (cf. Fig. 2), i.e., in particular, the material used for the cover 56 and the design and treatment of its cutting edge 30, can also be implemented in the cover 56.
[0058] In this case, the flange 10 used as the first flange element 52 and the cover 56 used as the second flange element 54 are particularly preferably made of the same aluminum alloy; in particular, both components are made of this aluminum alloy. Furthermore, the components of these two flange elements 52, 54 required for the cutting seal 40, in particular the cutting edges 30, are identical in terms of their shape and pretreatment.
[0059] A flange connection 50 according to the invention represents a connection between two flange elements 52, 54 that is sealed by a cutting seal 40. For this purpose, as already described, the necessary components, in particular cutting edges 30 but also correspondingly present sealing surfaces 20 (cf. Fig. 1), are provided on the flange elements 52, 54. A sealing ring 60 is inserted between the flange elements 52, 54 and is made of a softer material at least than the two cutting edges 30 of the flange elements 52, 56, see in particular the upper row of Fig. 3. Preferably, the sealing ring 60, like the two flange elements 52, 54, is made of an aluminum alloy, in particular, for example, from EN AW-1050A. To close the flange connection 50, the two flange elements 52, 54 are pressed together by a clamping device 70, with the cutting edges 30 pressing into the sealing ring 60. This is shown in the bottom row of Fig. 3.
[0060] The flange connection 50 shown in “A” can provide a sealed connection between two vacuum and / or reaction chambers 100, since the two flanges 10 according to the invention used as flange elements 52, 54 are already arranged at openings 104 of these vacuum and / or reaction chambers 100 or at least can be arranged at them.
[0061] Alternatively, a sealed closure of a vacuum and / or reaction chamber 100 can be provided by the flange connection 50 shown in “B”. A
[0062] Cover 56 is placed as a second flange element 54 sealed by the cutting seal 40.
[0063] Furthermore, the present invention relates to the following numbered embodiments:
[0064] 1. Flange (10) made of an aluminum alloy, wherein the flange (10) is arranged or can be arranged in a sealed manner at an opening (104) in a chamber wall (102) of a vacuum and / or reaction chamber (100), wherein the flange (10) further has a circumferential and flat sealing surface (20) for sealing the opening (104) of the vacuum and / or reaction chamber (100) from the environment, to which a cutting edge (30) for a cutting seal (40) is connected.
[0065] 2. Flange (10) according to embodiment 1, wherein an inner side surface (32) of the cutting edge (30) adjacent to the sealing surface (20) encloses an angle of 1 10° with the sealing surface (20).
[0066] 3. Flange (10) according to one of embodiments 1 or 2, wherein the flange (10) consists of the aluminum alloy.
[0067] 4. Flange (10) according to one of the preceding embodiments, wherein an outer side surface (34) of the cutting edge (30) adjoins the inner side surface (32), wherein the inner side surface (32) and the outer side surface (34) enclose an angle of 90°.
[0068] 5. Flange (10) according to embodiment 4, wherein the inner side surface (32) and the outer side surface (34) adjoin one another with a rounded connecting edge (36), wherein a radius of a rounding (38) of the connecting edge (36) is between 0.1 mm and 0.2 mm, preferably 0.2 mm.
[0069] 6. Flange (10) according to one of the preceding embodiments, wherein the inner side surface (32) and / or the outer side surface (34) of the cutting edge (30) surround the opening (104) in a conical manner.
[0070] 7. Flange (10) according to one of the preceding embodiments, wherein industrial carbon black is at least partially applied to the cutting edge (30).
[0071] 8. Flange (10) according to embodiment 7, wherein the carbon black is applied to the outer side surface (34) and the inner side surface (32) is free of carbon black.
[0072] 9. Flange (10) according to one of the preceding embodiments, wherein the aluminum alloy used for the flange (10) has a zinc content of 0.15% or less, preferably 0.10% or less.
[0073] 10. Flange (10) according to one of the preceding embodiments, wherein the aluminum alloy used for the flange (10) has a Brinell hardness of 100 HBW or greater.
[0074] 11. Flange (10) according to one of the preceding embodiments, wherein the aluminum alloy used for the flange (10) is suitable for use at temperatures of 140°C or higher, preferably 200°C or higher.
[0075] 12. Flange (10) according to one of the preceding embodiments, wherein the aluminum alloy used for the flange (10) is an AI5xxx alloy.
[0076] 13. Flange (10) according to one of the preceding embodiments 1 to 11, wherein the aluminum alloy used for the flange (10) comprises the following components in addition to aluminum:
[0077] - Si: maximum 0.30%
[0078] - Fe: maximum 0.40%
[0079] - Cu: 5.8% - 6.8%
[0080] - Mn: 0.20% - 0.40%
[0081] - Mg: maximum 0.10%
[0082] - Cr: maximum 0.05%
[0083] - Zn: maximum 0.10%
[0084] - Ti: 0.02% - 0.10%
[0085] - Other components: maximum 0.15%, of which individual components maximum 0.05%. Flange connection (50), comprising a first flange element (52), a second flange element (54), a sealing ring (60) and a clamping device (70), wherein the first flange element (52) and the second flange element (54) each have a cutting edge (30) for a cutting seal (40), wherein the sealing ring (60) consists of a softer material than the cutting edges (30) and can be arranged between the first flange element (52) and the second flange element (54), and to seal the flange connection (50), the first flange element (52) and the second flange element (54) can be pressed against each other by the clamping device (70), so that the cutting edge (30) of the first flange element (52) and the cutting edge (30) of the second flange element (54) can be inserted into the sealing ring from opposite sides. (60) press,wherein the first flange element (52) and / or the second flange element (54) is designed as a flange (10) according to one of embodiments 1 to 13. 15. Flange connection (50) according to embodiment 14, wherein the sealing ring (60) consists of an aluminum alloy, preferably EN AW-1050A.
[0086] 16. Flange connection (50) according to embodiment 14 or 15, wherein the first flange element (52) is designed as a flange (10) according to one of embodiments 1 to 12, and wherein the second flange element (54) is designed as a cover (56) which is designed analogously to a flange (10) according to one of embodiments 1 to 12.
[0087] 17. Vacuum and / or reaction chamber (100) with a chamber wall (102) and an opening (104) in the chamber wall (102), wherein the vacuum and / or reaction chamber (100) further comprises a flange (10) for the opening (104), wherein the flange (10) is arranged in a sealed manner at the opening (104), wherein the flange (10) is designed according to one of embodiments 1 to 13.
[0088] 18. Vacuum and / or reaction chamber (100) according to embodiment 17, wherein the vacuum and / or reaction chamber (100) and the flange (10) are manufactured in one piece and monolithically.
[0089] 19. Vacuum and / or reaction chamber (100) according to embodiment 17 or 18, wherein the vacuum and / or reaction chamber (100) has two or more openings (104) in the chamber wall (102), at each of which a flange (10) according to one of embodiments 1 to 12 is arranged.
[0090] 20. System (200) for thermal laser epitaxy (TLE) with at least one vacuum and / or reaction chamber (100), wherein the vacuum and / or reaction chamber (100) has a chamber wall (102) with one or more openings (104) at each of which a flange (10) is arranged, wherein the vacuum and / or reaction chamber (100) is designed according to one of embodiments 17 to 19.
[0091] Reference symbol
[0092] 10 Flange
[0093] 12 holes
[0094] 20 Sealing surface
[0095] 30 cutting edge
[0096] 32 Inner side surface
[0097] 34 Outer side surface
[0098] 36 connecting edge
[0099] 38 rounding
[0100] 40 Cutting seal
[0101] 50 flange connection
[0102] 52 first flange element
[0103] 54 second flange element
[0104] 56 lids
[0105] 60 sealing ring
[0106] 70 clamping device
[0107] 100 vacuum and / or reaction chamber
[0108] 102 Chamber wall
[0109] 104 Opening
[0110] 200 TLE System 202 Laser System
[0111] 204 Gas system
Claims
Claims 1. Flange (10) made of an aluminum alloy, wherein the flange (10) is arranged or can be arranged in a sealed manner at an opening (104) in a chamber wall (102) of a vacuum and / or reaction chamber (100), wherein the flange (10) further has a circumferential and flat sealing surface (20) for sealing the opening (104) of the vacuum and / or reaction chamber (100) from the environment, to which a cutting edge (30) for a cutting seal (40) is connected, wherein an inner side surface (32) of the cutting edge (30) adjacent to the sealing surface (20) encloses an angle of 110° with the sealing surface (20), wherein the flange (10) is made of the aluminum alloy.
2. Flange (10) according to claim 1, wherein an outer side surface (34) of the cutting edge (30) adjoins the inner side surface (32), the inner side surface (32) and the outer side surface (34) enclosing an angle of 90°.
3. Flange (10) according to claim 2, wherein the inner side surface (32) and the outer side surface (34) adjoin one another with a rounded connecting edge (36), wherein a radius of a rounding (38) of the connecting edge (36) is between 0.1 mm and 0.2 mm, preferably 0.2 mm.
4. Flange (10) according to one of the preceding claims, wherein the inner side surface (32) and / or the outer side surface (34) of the cutting edge (30) surround the opening (104) in a conical manner.
5. Flange (10) according to one of the preceding claims, wherein carbon black is at least partially applied to the cutting edge (30).
6. Flange (10) according to claim 5, wherein the carbon black is applied to the outer side surface (34) and the inner side surface (32) is free of carbon black.
7. Flange (10) according to one of the preceding claims, wherein the aluminum alloy used for the flange (10) has a zinc content of 0.15% or less, preferably 0.10% or less.
8. Flange (10) according to one of the preceding claims, wherein the aluminum alloy used for the flange (10) has a Brinell hardness of 100 HBW or greater.
9. Flange (10) according to one of the preceding claims, wherein the aluminum alloy used for the flange (10) is suitable for use at temperatures of 140°C or higher, preferably 200°C or higher.
10. Flange (10) according to one of the preceding claims, wherein the aluminum alloy used for the flange (10) is an AI5xxx alloy.
11. Flange (10) according to one of the preceding claims 1 to 9, wherein the aluminum alloy used for the flange (10) comprises, in addition to aluminum, the following components: - Si: maximum 0.30% - Fe: maximum 0.40% - Cu: 5.8% - 6.8% - Mn: 0.20% - 0.40% - Mg: maximum 0.10% - Cr: maximum 0.05% - Zn: maximum 0.10% - Ti: 0.02% - 0.10% - Other ingredients: maximum 0.15%, of which individual ingredients maximum 0.05% 12. Flange connection (50), comprising a first flange element (52), a second flange element (54), a sealing ring (60) and a clamping device (70), wherein the first flange element (52) and the second flange element (54) each have a cutting edge (30) for a cutting seal (40), wherein the sealing ring (60) consists of a softer material than the cutting edges (30) and can be arranged between the first flange element (52) and the second flange element (54), and for sealing the flange connection (50), the first flange element (52) and the second flange element (54) can be pressed against one another by the clamping device (70), so that the cutting edge (30) of the first flange element (52) and the cutting edge (30) of the second flange element (54) press into the sealing ring (60) from opposite sides, wherein the first flange element (52) and / or the second Flange element (54) is designed as a flange (10) according to one of claims 1 to 11.
13. Flange connection (50) according to claim 12, wherein the sealing ring (60) consists of an aluminum alloy, preferably EN AW-1050A.
14. Flange connection (50) according to claim 12 or 13, wherein the first flange element (52) is designed as a flange (10) according to one of claims 1 to 12, and wherein the second flange element (54) is designed as a cover (56) which is designed analogously to a flange (10) according to one of claims 1 to 12.
15. Vacuum and / or reaction chamber (100) with a chamber wall (102) and an opening (104) in the chamber wall (102), wherein the vacuum and / or reaction chamber (100) further comprises a flange (10) for the opening (104), wherein the flange (10) is arranged in a sealed manner at the opening (104), wherein the flange (10) is designed according to one of claims 1 to 11.
16. Vacuum and / or reaction chamber (100) according to claim 15, wherein the vacuum and / or reaction chamber (100) and the flange (10) are manufactured in one piece and monolithically.
17. Vacuum and / or reaction chamber (100) according to claim 15 or 16, wherein the vacuum and / or reaction chamber (100) has two or more openings (104) in the chamber wall (102), at each of which a flange (10) according to one of claims 1 to 12 is arranged.
18. System (200) for thermal laser epitaxy (TLE) with at least one vacuum and / or reaction chamber (100), wherein the vacuum and / or reaction chamber (100) has a chamber wall (102) with one or more openings (104) at each of which a flange (10) is arranged, wherein the vacuum and / or reaction chamber (100) is designed according to one of claims 15 to 17.