Method of manufacturing a micro-injector valve for a liquid or gas chromatography device

Abstract

The invention relates to a method for manufacturing a micro-injector valve for a liquid or gas chromatography device, comprising: the liquid phase deposition of a polymer layer (20) on a lower face (11) of a support substrate (10), a first partial crosslinking treatment of the polymer layer (20), the etching of the support substrate (10) to expose a free area (21) of the polymer layer (20), the assembly of the support substrate (10) and a fluid distributor (300) comprising a cavity comprising a seat (39) configured to receive the membrane and at least one micro-duct (53A, 53B) in fluid connection via the cavity to form a fluid passage, said assembly being carried out via the polymer layer (20), such that the free area (21) of the polymer layer (20) forms a membrane having two free opposite surfaces (23, 24), such that,when an actuating force is applied to the membrane, the membrane comes into contact with the seat (39) to close at least one micro-duct (53A, 53B), a bonding zone (25) of the polymer layer in integral contact with the support substrate (10) and with the distributor (300) forms an adhesive sealing interface between the support substrate (10) and the distributor (300), a second treatment comprising a continuation of the crosslinking of the polymer layer (20) making it possible to seal the first face of the bonding zone (25) with the distributor (300). Figure for the abstract: Fig 2A,

Description

Title of the invention: Method for manufacturing a micro-injector valve for a liquid or gas chromatography device Technical field

[0001] The present invention relates generally to the field of liquid or gas chromatography. More particularly, it proposes a method for manufacturing a micro-injector valve for a liquid or gas chromatography device. State of the art

[0002] A measuring chain for analyzing a liquid or gas by liquid or gas chromatography comprises an injector, at least one separation column, and at least one detector. It also comprises elements ensuring the interface between said components.

[0003] Recently, compact analysis systems have been developed that can be transported or easily integrated into existing analysis facilities. Micro-injectors have been developed to inject a defined volume of a fluid into the separation column of such a device. Such a fluid can be a gas or a liquid to be analyzed.

[0004] Such a micro-injector is typically made up of a set of two-state type valves, i.e. each valve can adopt a closed state which cuts off the flow of fluid therethrough or an open state which allows the flow of fluid. A set of several valves are interconnected to form an injector. [Fig.l] illustrates a set of nine valves VI to V9 connected by fluid connections to form a ten-way micro-injector. Other numbers of ways and configurations of fluid connections are possible. The opening and closing of the valves are controlled by a microprocessor.

[0005] In order to obtain a narrow injection peak allowing for accurate chromatography analysis, it is necessary to minimize the volumes of the fluid interconnections between the valves with the exception of the fluid trapping volume containing the sample to be analyzed. For this purpose, it is known to use microvalves with pneumatic or piezoelectric actuation. In the case of pneumatic actuation, one or more electronically controlled valves drive a pressurized fluid to deflect a flexible membrane which is often an elastic polymer such as polyimide.

[0006] This membrane is typically in the form of a film bonded between a glass substrate and a silicon substrate comprising the valve seat and fluid connections. The membrane may be bonded using an adhesive film, a multilayer film allowing sealing by thermocompression, an epoxy glue or sealing by sintered glass or welding. Fixing the membrane by bonding using an adhesive film is for example described in document US 6896 238 B2. Sealing by welding or sintered glass is described in document US 4869282 A.

[0007] However, such bonding requires precise localization of the adhesive film between the glass and silicon substrates. This localization is achieved by the use of a mask, which complicates the assembly of the valve.

[0008] Furthermore, such bonding of the membrane requires the application of two adhesive layers and two alignment steps during valve assembly.

[0009] As some applications require valves to be held in the closed state for extended periods, the diaphragm is pushed onto the valve seat during these phases of use. However, the operating temperature of the microinjector often induces adhesive properties in the diaphragm material, resulting in sticking ("stiction") of the diaphragm surface to the valve seat. When such sticking begins to occur, the valve no longer functions properly.

[0010] Therefore, it is necessary to prevent the connection between the valve seat and the membrane. Document US 6896 238 B2 proposes a treatment of the membrane by one or more thin metal layers. However, such a treatment makes the manufacture of the injector more complex, adding a deposition by one or more deposition steps and the use of one or more additional masks.

[0011] Another post-treatment to avoid such sticking is described in the document “Micro-fabricated membrane gas valves with a non-stiction coating deposited by C4F8 / Ar plasma” Shannon et al., J. Micromech. Microeng. 18 (2008) 095015 (9pp).

[0012] Improvements are also expected in terms of ease of assembly, manufacturing cost and tightness of the injector seal. Statement of the invention

[0013] An object of the invention is to design a method for manufacturing a micro-injector valve that is easy to implement and automate. One objective is in particular to facilitate the alignment and sealing of the fluid passages during assembly of the valve and to allow precise actuation of the membrane during use of the micro-injector.

[0014] To this end, the invention proposes a method for manufacturing a micro-injector valve for a liquid or gas chromatography device, comprising the following steps: • the liquid phase deposition of a polymer layer on a lower face of a support substrate, • a first partial crosslinking treatment of the polymer layer, • etching the support substrate to expose a free area of ​​the layer of polymer, • the assembly of the support substrate and a fluid distributor comprising a cavity comprising a seat configured to receive the membrane, and at least one micro-conduit in fluidic connection via the cavity to form a fluid passage,

[0015] said assembly being carried out by means of the polymer layer, so that - the free area of ​​the polymer layer forms a membrane having two free opposing surfaces, so that, when an actuating force is applied to the membrane, the membrane comes into contact with the seat to close at least one micro-duct, and - a bonding zone of the polymer layer in solid contact with the support substrate and with the distributor forms an adhesive sealing interface between the support substrate and the distributor, • a second treatment comprising continued crosslinking of the polymer layer to seal the first face of the bonding area with the distributor.

[0016] The partial crosslinking of the polymer layer makes it possible to directly use the adhesive properties of this layer to bond the membrane in a watertight manner between a support substrate and a distributor comprising the valve seat and fluid connections.

[0017] Polymers are used because of their elasticity and compatibility with structuring by photolithography. In addition, polymers in liquid form before polymerization can easily be deposited by centrifugation.

[0018] In a particularly advantageous manner, the method further comprises a step of etching the support substrate and the polymer layer to produce at least one fluid passage before the assembly of the support substrate and the fluid distributor, at least one micro-conduit of the distributor being adapted to communicate with said fluid passage, the assembly being carried out so that each fluid passage is aligned with a micro-conduit to form a respective fluid passage between the support substrate and the distributor.

[0019] The bonding zone of the polymer layer is advantageously in integral contact with a bonding zone of the lower face of the support substrate and with a bonding zone of the upper face of the distributor.

[0020] According to a preferred embodiment, the polymer is a polyimide. A particular advantage of polyimides is their resistance to high temperatures and their inert nature to a large number of chemicals.

[0021] The partial crosslinking step may comprise a first annealing at a temperature between 80°C and 150°C.

[0022] In some embodiments, the partial crosslinking step comprises an ultraviolet radiation irradiation step and / or a second annealing step.

[0023] In some embodiments, the step of depositing the polymer layer comprises depositing an additional functional layer, such as a layer of metal, polycrystalline silicon, or a piezoelectric material, said additional functional layer being arranged on a face of the polymer layer or inside the polymer layer.

[0024] According to a preferred embodiment, the support substrate is made of silicon.

[0025] The etching step may comprise plasma etching.

[0026] In some embodiments, the step of crosslinking the polymer layer comprises a step of vacuuming and / or compressing the valve in a press and / or annealing.

[0027] The method may further comprise a step of aligning the fluid passage with a micro-duct inlet arranged in the upper face of the fluid distributor.

[0028] Advantageously, the method further comprises a step of assembling the fluid distributor by welding a glass substrate to the lower face of a microfluidic circuit.

[0029] The invention also relates to a micro-injector valve for a liquid chromatography device or, produced according to the method as described above, and comprising: • a support substrate having an upper face and a lower face, • a fluid distributor comprising a cavity comprising a seat and at least two micro-conduits in fluid connection via the cavity to form a fluid passage, and • a polymer layer, advantageously made of polyimide, a bonding zone of the polymer layer, advantageously made of polyimide, forming an adhesive interface between the lower face of the support substrate and an upper face of the distributor (300) and a free zone of the polymer layer, advantageously made of polyimide, forming a membrane having two free faces facing the cavity, so that, when an actuation force is applied to the membrane, the membrane comes into contact with the seat and closes at least one micro-duct so as to interrupt the passage of fluid.

[0030] Particularly advantageously, the fluid distributor comprises a silicon substrate in which the cavity and the micro-ducts are formed, and a glass substrate forming the lower face of the distributor, said glass substrate being bonded to the lower face of the silicon substrate in a fluid-tight manner.

[0031] In some embodiments, the valve further comprises: • at least one first fluid passage formed by at least two microducts in fluidic connection via the cavity, said first fluid passage being adapted to establish a fluidic connection between the fluid distributor and a device for supplying fluid to be analyzed, and • at least one second fluid passage adapted to establish a fluid connection between the membrane and a pneumatic device configured to actuate the membrane between a closed position in which the membrane seals the first fluid passage in a fluid-tight manner, and an open position in which the first fluid passage is open.

[0032] In some embodiments, the first and second fluid passages are arranged in a first face of the valve.

[0033] The valve may further comprise a third fluid passage for establishing a fluid connection between the fluid distributor and a chromatography column, said third opening being arranged in a second face of the valve opposite the first face.

[0034] Another object of the invention relates to a micro-injector for a liquid or gas chromatography device, comprising a plurality of valves as described above interconnected, at least one inlet for a carrier gas, at least one inlet for a fluid to be analyzed, at least one fluid outlet for injecting a sample of the fluid to be analyzed carried by the carrier gas in a chromatography column, a device for actuating the valves, and a microprocessor configured to control the actuation of the respective valves.

[0035] In some embodiments, the valve actuating device is a pneumatic device, the micro-injector further comprising at least one gas inlet configured to supply a valve actuating gas to said pneumatic device.

[0036] The invention finally relates to a liquid or gas chromatography device, comprising a liquid or gas chromatography column, a micro-injector as described above configured to inject a sample of fluid to be analyzed into an inlet of the chromatography column and a detector. comprising an inlet adapted to be fluidically connected to an outlet of the chromatography column. Brief description of the figures

[0037] Other characteristics and advantages of the invention will emerge from the detailed description which follows, with reference to the appended drawings, in which:

[0038] [Fig.l] is a schematic top view of a set of valves and conduits in an injector.

[0039] [Fig.2A] is a schematic sectional view of a valve according to the invention.

[0040] [Fig.2B] is a schematic view of a detail of the valve of [Fig.2A].

[0041] [Fig. 3] is a schematic view of a silicon substrate intended to form the upper portion.

[0042] Figures 4A to 4D illustrate the steps of manufacturing the upper portion of the valve.

[0043] [Fig.5] is a schematic view of the upper portion of the valve.

[0044] Figures 6A and 6B illustrate the manufacturing steps of the distributor.

[0045] [Fig.7] is a perspective view of the distributor.

[0046] [Fig.8] is a schematic view of a gas distributor.

[0047] [Fig.9] is a schematic view of the valve before the assembly step.

[0048] [Fig. 10] is a perspective view of the valve after assembly. Detailed description of embodiments

[0049] For the sake of clarity and simplification we use a bottom-up orientation as shown in [Fig.2A] in which the valve is positioned so that the membrane is arranged above the fluid conduits it is intended to close.

[0050] Thus, the terms “front”, “rear”, “top”, “upper”, “bottom”, and “lower” will serve the description without limiting the invention.

[0051] A valve according to the invention comprises an upper portion comprising a polymer layer forming a membrane, and a lower portion comprising a seat formed in a fluid distributor. Such a fluid may be a gas or a liquid to be analyzed. During manufacturing, the polymer layer is deposited in the liquid phase. This deposition technique makes it possible to deposit the polymer layer over the entire surface of the upper portion. Thus, a bonding zone of the polymer layer forms an adhesive interface between the two upper and lower portions of the valve, and a free zone of the polymer layer is intended to form the membrane of the valve. The polymer layer is crosslinked in two stages. The separation of these two crosslinking stages makes it possible to confer functions different to the different areas of the membrane depending on their position within the valve.

[0052] [Fig.2A] is a schematic view of a valve according to the invention. The valve is intended for use in a micro-injector for a liquid or gas chromatography device. The valve comprises an upper portion 100 comprising a polymer layer 20 forming the membrane of the valve, and a lower portion comprising a distributor 300 forming the seat of the valve. The upper portion 100 is rigidly secured to the distributor 300 via the polymer layer 20. Micro-conduits 51, 53A, 53B allow the passage of a fluid inside the valve.

[0053] By “micro-conduit” is meant a conduit whose cross-section is less than or equal to 500 pm x 500 pm, and by “microfluidic passage” is meant a fluid passage formed by one or more micro-conduits.

[0054] The upper portion 100 comprises a support substrate 10 and the polymer layer 20. The support substrate 10 has a lower face 11 on which the polymer layer 20 is arranged, and an upper face 12 which corresponds to the outer face of the valve. In an illustrative and non-limiting manner, the support substrate has a thickness of between 0.2 mm and 2 mm. The support substrate 10 is made of a rigid material that is inert with respect to the fluids to be analyzed, typically glass or silicon. In certain embodiments, the support substrate may be a silicon-on-insulator (SOI) type substrate, titanium, sapphire or a material compatible with microelectronic processes.

[0055] The polymer layer 20 is made of a flexible and elastic material, exhibiting sufficient resistance to the temperatures used during a chromatography analysis, and inert with respect to the fluids to be analyzed. The polymer is suitable for liquid phase deposition. Preferably, the polymer is photosensitive in order to allow it to be structured by photolithography. Typically, the polymer layer is made of a polyimide, preferably a photosensitive polyimide in order to etch structures in this layer by a photolithography process. In certain cases, the polymer may be a photosensitive composition such as a composition of the SU-8 type, or a polymer based on Benzocyclobutene (BCB).

[0056] A bonding zone 25 of the polymer layer 20 forms an adhesive interface between a bonding zone 17 of the lower face 11 of the support substrate 10 and a bonding zone 37 of the upper face of the distributor 300. The adhesive interface may be a single surface, or be composed of several distinct parts of the polymer layer 20.

[0057] A free zone of the polymer layer forms a membrane 21 having two free faces 23, 24. An outer free face 23 is oriented towards the outer face of the valve, and an inner free face 24 is oriented towards the distributor 300. Typically, on its outer face, the membrane 21 is entirely framed by an area of ​​the support substrate 10.

[0058] In some embodiments, the polymer layer comprises an additional functional layer, for example a layer of metal, polycrystalline silicon, or a piezoelectric material. Such an additional layer may be arranged on one of the faces of the polymer layer or within the polymer layer which is therefore composed of two superimposed polymer layers. Such additional layers may be used to add functionalities to the valve membrane, for example to achieve actuation of the membrane or to determine the actuation or efficiency of the valve.

[0059] The distributor 300 comprises a structured substrate 30 comprising a cavity 35 and micro-ducts 53A, 53B, and a substrate 40 forming the lower face of the distributor 300.

[0060] The structured substrate 30 is bonded to the substrate 40 forming the lower face of the distributor 300 in a fluid-tight manner. The substrate 40 forming the lower face of the distributor 300 is made of a rigid, inert, fluid-tight material, typically glass. The structured substrate 30 is typically made of silicon or another material allowing the formation of the structures by an etching process.

[0061] With reference to [Fig.2B], the structured substrate 30 comprises a cavity 35 arranged on the upper face of the distributor 300 and facing the membrane 21. The structured substrate 30 further comprises a seat 39 arranged facing the membrane 21. The seat 39 is configured to receive the membrane 21 when an actuating force is applied to the membrane 21. In the absence of an actuating force, the distance d between the membrane 21 and the seat 39 allows the passage of a fluid. The distance d in the absence of an actuating force is typically between 10 μm and 50 μm.

[0062] With reference to [Fig.2A], the structured substrate 30 further comprises at least two micro-ducts 53A, 53B in fluid communication with the exterior of the valve via the micro-ducts 51 arranged in the upper portion 100 of the valve. The micro-ducts 53A, 53B are in fluid communication with each other via the cavity 35. When an actuating force is applied to the membrane 21, the membrane 21 comes into contact with the seat 39 and closes at least one micro-duct 53A, 53B. Thus, the passage of fluid between the micro-ducts 53A and 53B is interrupted.

[0063] In the embodiment of Figures 2A and 2B, the microfluidic passages are arranged on the outer face of the valve. In other embodiments, additional conduits may be arranged on the upper face, a side face and / or on the lower face of the valve. For example, a first passage formed by two micro-conduits may establish a fluidic connection between the distributor of fluid and a device for supplying fluid to be analyzed. A second fluid passage may be present to establish a fluid connection between the membrane and a pneumatic device configured to actuate the membrane. Such a pneumatic device may apply an actuating force to the membrane to place the membrane in a closed position in contact with the seat. In this closed position, the membrane seals the first fluid passage tightly. When the pneumatic device releases the actuating force, the membrane returns to an open position, thereby opening the first fluid passage.

[0064] The valve may comprise a third fluid passage for establishing a fluid connection between the fluid distributor and a chromatography column. In this case, it is advantageous to arrange the openings of the first and second fluid passages on an outer face of the valve, and the opening of the third fluid passage on an inner face opposite the outer face of the valve.

[0065] We will now describe the method of manufacturing a valve according to the invention. Production of the upper portion of the valve

[0066] With reference to [Fig. 3], a support substrate 10 is provided having a

[0067] lower face 11 intended to form the lower face carrying the membrane, and a face 12 intended to form the upper face which corresponds to an external face of the valve, opposite the lower face 11. A layer of polymer 20 in liquid phase is deposited, with reference to [Fig. 4A], on the lower face 11 of the support substrate 10. During deposition, the substrate is oriented upside down with respect to the orientation in which the valve is presented, that is to say the lower face 11 is oriented upwards to facilitate the deposition in liquid phase. Such a deposition in liquid phase is typically carried out by centrifugation in order to obtain a thin layer suitable for forming an easily deformable membrane.

[0068] Annealing of the deposited polymer layer 20 is then carried out. By way of illustration and not limitation, this annealing can be carried out at a temperature of between 80°C and 150°C for a duration of between 1 and 20 minutes. A first step of structuring by photolithography of the partially crosslinked polymer layer is then carried out, with reference to [Fig.4B], to form micro-conduits 51 passing through said polymer layer. This step notably comprises the use of a mask M defining the position of the micro-conduits and the application of radiation, for example ultraviolet radiation UV through said mask. The energy of the ultraviolet radiation is typically between 300 and 900 mJ / cm2.

[0069] The partial crosslinking treatment of the deposited polymer layer 20 is continued by a heat treatment, typically at a temperature between 30 °C and 150 °C for a period of between 10 and 60 minutes. After this step, the polymer layer 20 is sufficiently solidified and chemically stable to form a membrane. Simultaneously, the polymer layer remains sufficiently soft and sticky to allow the support substrate to be bonded to the distributor in a subsequent step.

[0070] If the polymer layer includes other functional layers, the functional layers may be deposited after the polymer layer is deposed. In some cases (not shown), a second polymer layer is deposited to complete the membrane.

[0071] With reference to [Fig.4C], a second structuring step by photolithography, in particular photographic development, then makes it possible to etch the polymer layer 20 in the areas irradiated in the first structuring step illustrated in [Fig.4B]. Such development makes it possible to remove the polymer in the areas irradiated by ultraviolet radiation in order to produce the openings intended to form micro-conduits 51 to obtain the microfluidic passages of the valve.

[0072] In the following step, with reference to [Fig.4D], a partial etching is carried out to remove a first part 13 of the support substrate 10. With reference to [Fig.5], a free zone 21 of the polymer layer 20 is thus exposed, so that said free zone 21 has two free faces 23, 24. The etching can be carried out by localized machining by a plasma. The free zone is intended to form the membrane 21 of the valve. The bonding zone 25 in which the polymer layer 20 is in contact with the support substrate 10 is intended to form an adhesive layer during assembly of the valve. Realization of the distributor

[0073] To form the distributor, a distribution substrate 30 is used, with reference to [Fig. 6A], for housing the microducts for the circulation of the fluid within the valve. Typically, the distribution substrate 30 is made of silicon. The thickness of the distribution substrate 30 is typically between 0.2 and 2 mm. With reference to [Fig. 6B], a structuring is carried out by several photolithography and / or plasma etching steps. By these steps, the cavity 35 and the seat 39 of the valve, the fluid accesses and the microfluidic passages 53A, 53B are produced. The cavity 35 and the seat 39 are produced, typically by successive plasma etching steps, on an upper face of the distribution substrate 30, said upper face being intended to be opposite the membrane after assembly of the valve.Some microfluidic passages 53A, 53B are through passages between the upper face and a lower face of the distribution substrate 30 and can be produced by etching from the upper face and / or the lower face of the substrate. Other microfluidic passages 53A, 53B are through passages between the cavity and the lower face of the . distribution substrate 30 and are produced by etching from the lower face of the substrate. Microfluidic passages 53A, 53B are also produced on the lower face of the distribution substrate 30 which may be in fluidic connection with one or more through passages.

[0074] [Fig.7] illustrates the arrangement of the cavity 35, the seat 39 and the micro-ducts 53A, 53B in perspective. The seat may comprise a central portion 39A and / or several pads 39B distributed in the cavity 35. With reference to [Fig.8], the structured silicon substrate 30 is then welded to a glass substrate 40 to form the lower face of the valve. For example, the substrate may be welded to the glass substrate by anodic sealing. The glass substrate 40 has a thickness which is typically between 0.2 and 2 mm. The fluid passages 53A, 53B are thus closed on the lower face of the distribution substrate 30, with the exception of any fluid inlets and / or outlets and the associated fluid connections. Valve assembly

[0075] With reference to [Fig.9], the upper portion 100 and the distributor 300 are assembled, so that the membrane 21 is positioned opposite the seat 39 and the microducts 51 of the upper portion 100 are aligned with the microducts 53A, 53B of the distributor 300. The alignment can be carried out by hand using an optical device such as a microscope, or by a dedicated alignment machine.

[0076] The bonding zone 25 of the polymer layer 20 is intended to form an adhesive interface between a bonding zone 17 of the lower face 11 of the support substrate 10, and a bonding zone 37 of the upper face of the distributor 300. During assembly, this bonding zone 25 of the polymer layer is brought into contact with the bonding zone 37 of the distributor in order to achieve bonding with the upper portion 100. Then, the upper portion 100 and the distributor 300 are kept in contact by applying a pressing force using a press. In an illustrative and non-limiting manner, the pressing force is between 2N and 30kN and the duration of the compression is between 5 minutes and 5 hours.

[0077] When the alignment and the contacting are finalized, the crosslinking of the polymer layer 20 is continued to bond the upper portion 100 to the distributor 300. In an illustrative and non-limiting manner, the crosslinking is continued by thermocompression. During this step, the support substrate and the distributor aligned and in contact can be placed in a vacuum chamber in which the pressure is for example between 1x108 mBar and 1 bar. The assembled upper and lower portions are heated to a temperature which is for example between 30°C and 400°C.

[0078] After crosslinking, the associated portions are cooled to reach a temperature for example between 20°C and 80°C. With reference to [Fig. 10], the upper portion 100 and the distributor 300 are sealed and the valve is finalized.

[0079] At this stage, the polymer layer has lost the adhesive properties that it exhibited in its partially crosslinked state. The crosslinked bonding zone 25 forms a tight bond between the respective surfaces of the support substrate and the distributor. The polymer layer simultaneously allows the production of the valve membrane and the bonding of the upper portion to the distributor.

[0080] In some embodiments, other substrates or materials may be deposited on the surface or on one or more interfaces of the valve being manufactured. For example, metals, polycrystalline silicon, or piezoelectric materials may be deposited on the surface or between two successively deposited polymer layers. Using the valve

[0081] After assembling the valve, an inlet of a microfluidic passage can be connected to a device for supplying fluid to be analyzed, and the outlet of the same microfluidic passage can be connected to an analysis device, in particular a liquid or gas chromatography column. Because the microfluidic passage comprises at least two conduits in fluidic connection via the cavity, the microfluidic passage can be opened or closed by actuating the membrane formed by the polymer layer.

[0082] For opening and closing the valve, a dedicated pneumatic device can be used for actuating the membrane. In this case, in addition to microfluidic conduits forming a passage through the cavity, the valve comprises at least a second fluid passage for establishing a fluid connection between the membrane and the pneumatic device. This fluid passage comprises an inlet intended to be connected to the pneumatic device, and an outlet in fluid connection with the membrane.

[0083] The pneumatic device is used to apply pneumatic pressure to the membrane. The membrane can thus be pressed against the distributor seat to close the microfluidic passage. When the pneumatic pressure decreases, the membrane returns to its original position and opens the microfluidic passage. Alternatively, pressure can be applied to the membrane by another technique, for example a piezoelectric device.

[0084] When the membrane is pressed against the distributor seat, no sticking effect appears between the membrane surface and the valve seat due to the complete crosslinking of the membrane. There is no need to apply an additional anti-stiction treatment to the membrane or the seat.

[0085] The arrangement of the microfluidic conduits can be designed according to the use of the valve and the design of the microinjector in which the valve can be integrated. For example, the inlet of one or more microfluidic passages passing through the cavity, and the inlet of the fluid passage for the connection of the pneumatic device can be arranged on an upper face of the valve. When such a valve is used for a microinjector for a chromatography analysis, an inlet of the microfluidic passage can be connected to a fluid supply device providing the fluid to be analyzed, and / or a device providing a carrier gas. Thus, all the fluid connections to the outside of the chromatography device are arranged on the same face of the valve. The valve can further comprise a third fluid passage for establishing a fluid connection between the fluid distributor and a chromatography column.In this case, the valve can be designed so that the opening of said third fluid passage is arranged on a lower face of the valve opposite the upper face. The lower face of the valve can thus comprise one or more fluid connections towards the interior of the chromatography device. In an illustrative and non-limiting manner, the upper face can be formed by the support substrate 10 and the outer free face 23 of the membrane, and the lower face can be the face formed by the glass substrate 40. Micro-injector.

[0086] One or more valves according to the invention may be used for the manufacture of a micro-injector for a chromatography analysis. For example, several valves may be assembled in an electronic circuit. The inlets and outlets are connected according to the application. For example, a first inlet is connected to a source of fluid to be analyzed and a second inlet is connected to a source of carrier gas. One or more outlets may be connected to one or more chromatography columns, for example to an analytical chromatography column and a respective outlet to a pre-column and / or a reference column. One or more inlets and outlets may also be used to interconnect several respective valves, as illustrated in [Fig.l]. Some valves may be used to manage flows during cleaning of the chromatography device.A control device may be connected to the chromatography device to control a valve or set of valves via software. Such software controls the opening and closing parameters of each valve, such as the duration and / or force of actuation and / or the order of actuation of each respective valve in a set of valves.

[0087] Such an assembly can be integrated into a liquid or gas chromatography device comprising one or more chromatography columns and a detector.

[0088]

[0089]

[0090] References US 6896 238 B2 US 4869 282 A Micro-fabricated membrane gas valves with a non-stiction coating deposited by C4F8 / Ar plasma » Shannon et al., J. Micromech. Microeng. 18 (2008) 095015 (9pp)

Claims

Claims

1. A method of manufacturing a micro-injector valve for a liquid or gas chromatography device, comprising the following steps: • the liquid phase deposition of a polymer layer (20) on a lower face (11) of a support substrate (10), • a first partial crosslinking treatment of the polymer layer (20), • etching the support substrate (10) to expose a free area (21) of the polymer layer (20), • the assembly of the support substrate (10) and a fluid distributor (300) comprising a cavity comprising a seat (39) configured to receive the membrane, and at least one micro-conduit (53A, 53B) in fluid connection via the cavity to form a fluid passage, said assembly being carried out by means of the polymer layer (20), so that - the free zone (21) of the polymer layer (20) forms a membrane having two free opposite surfaces (23, 24), so that, when an actuating force is applied to the membrane, the membrane comes into contact with the seat (39) to close at least one micro-duct (53A, 53B), - a bonding zone (25) of the polymer layer is in integral contact with a bonding zone (17) of the lower face (11) of the support substrate (10) and with a bonding zone (37) of the upper face of the distributor (300), said bonding zone (25) of the polymer layer forming an adhesive sealing interface between the support substrate (10) and the distributor (300), • a second treatment comprising a continuation of the crosslinking of the polymer layer (20) making it possible to seal the first face of the bonding zone (25) with the distributor (300).

2. The method of claim 1, further comprising a step of etching the support substrate (10) and the polymer layer (20) to provide at least one fluid passage (51, 52) before assembling the support substrate and the fluid distributor, at least one micro-duct (53A, 53B) of the distributor (300) being adapted to communicate with a fluid passage (51, 52), the assembly being performed such that each fluid passage (51, 52) is aligned with a micro-duct (53A, 53B) to form a respective fluid passage between the support substrate (10) and the distributor (300).

3. A method according to claim 1 or claim 2, wherein the polymer is a polyimide.

4. The method of claim 3, wherein the partial crosslinking step comprises a first annealing at a temperature between 80°C and 150°C.

5. A method according to any one of claims 1 to 4, wherein the partial crosslinking step comprises a step of irradiation with ultraviolet radiation and / or a second annealing step.

6. A method according to any one of claims 1 to 5, wherein the step of depositing the polymer layer (20) comprises depositing an additional functional layer, such as a layer of metal, polycrystalline silicon, or a piezoelectric material, said additional functional layer being arranged on one face of the polymer layer or inside the polymer layer.

7. A method according to any one of claims 1 to 6, wherein the support substrate (10) is made of silicon.

8. A method according to any one of claims 1 to 7, wherein the etching step comprises plasma etching.

9. A method according to any one of claims 1 to 8, wherein the step of crosslinking the polymer layer comprises a step of vacuuming and / or compressing the valve in a press and / or annealing.

10. The method of claim 9, further comprising a step of aligning the fluid passage (51) with a microduct inlet (53A, 53B) arranged in the upper face of the fluid distributor (300).

11. A method according to any one of claims 1 to 10, further comprising a step of assembling the fluid distributor (300) by welding a glass substrate (40) to the underside of a microfluidic circuit.

12. Valve for micro-injector for a liquid or gas chromatography device, produced according to the method according to any one of claims 1 to 11, and comprising: • a support substrate (10) having an upper face and a lower face, • a fluid distributor (300) comprising a cavity comprising a seat and at least two micro-conduits in fluidic connection via the cavity to form a fluid passage, and • a polymer layer, advantageously made of polyimide (20), comprising: • a bonding zone (25) in integral contact with a bonding zone (17) of the lower face (11) of the support substrate (10) and with a bonding zone (37) of the upper face of the distributor (300) so that the bonding zone (25) of the polymer layer forms an adhesive interface between the lower face of the support substrate and the upper face of the distributor (300),and • a free zone (21) of the polymer layer, advantageously made of polyimide, forming a membrane having two free faces facing the cavity, so that, when an actuating force is applied to the membrane, the membrane comes into contact with the seat and closes at least one micro-conduit so as to interrupt the passage of fluid.,

13. A microinjector valve according to claim 12, wherein the fluid distributor (300) comprises a silicon substrate (30) in which the cavity and microconduits are formed, and a glass substrate (40) forming the underside of the distributor, said glass substrate being bonded to the underside of the silicon substrate (30) in a fluid-tight manner.

14. A micro-injector valve according to one of claims 12 to 13, further comprising: • at least one first fluid passage formed by at least two micro-conduits in fluidic connection via the cavity, said first fluid passage being adapted to establish a fluidic connection between the fluid distributor and a device for supplying fluid to be analyzed, and • at least one second fluid passage adapted to establish a fluidic connection between the membrane and a pneumatic device configured to actuate the membrane between a closed position in which the membrane seals the first fluid passage in a fluid-tight manner, and an open position in which the first fluid passage is open.

15. A microinjector valve according to claim 14, wherein the first and second fluid passages are arranged in a first face of the valve.

16. A microinjector valve according to claim 15, further comprising a third fluid passage for establishing a fluid connection between the fluid distributor and a chromatography column, said third opening being arranged in a second face of the valve opposite the first face.

17. Micro-injector for liquid or gas chromatography device, comprising a plurality of valves according to any one of claims 12 to 16 interconnected, at least one inlet of a carrier gas, at least one inlet of a fluid to be analyzed, at least one fluid outlet for injecting a sample of the fluid to be analyzed carried by the carrier gas in a chromatography column, a device for actuating the valves, and a microprocessor configured to control the actuation of the respective valves.

18. The micro-injector of claim 17, wherein the valve actuating device is a pneumatic device, the micro-injector further comprising at least one gas inlet configured to supply a valve actuating gas to said pneumatic device.

19. A liquid or gas chromatography device, comprising a liquid or gas chromatography column, a micro-injector according to claim 17 or claim 18 configured to inject a fluid sample to be analyzed into an inlet of the chromatography column and a detector comprising an inlet adapted to be fluidically connected to an outlet of the chromatography column.

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