LIGHT SOURCE COMPRISING A RESONANT CAVITY WITH DISTRIBUTED FEEDBACK AND METHOD FOR MANUFACTURING SUCH A LIGHT SOURCE

Abstract

LIGHT SOURCE COMPRISING A STACK OF LAYERS ON A HIGH OPTICAL INDEX SUBSTRATE AND METHOD FOR MANUFACTURING SUCH A LIGHT SOURCE One aspect of the invention relates to a distributed feedback light source (101) comprising a stack of layers (103) extending parallel to a substrate (102), the source (101) also comprising a first metal layer (111) extending between the substrate (102) and the stack (103). Figure to be published with the abstract: figure 1

Description

Title of the invention: LIGHT SOURCE COMPRISING A RESONANT CAVITY WITH DISTRIBUTED FEEDBACK AND METHOD FOR MANUFACTURING SUCH A LIGHT SOURCE TECHNICAL FIELD OF THE INVENTION

[0001] The technical field of the invention is that of the integration of a light source, for example of the laser type, comprising a resonant cavity with distributed feedback known as "DFB" for "Distributed feedback" in English. TECHNOLOGICAL BACKGROUND OF THE INVENTION

[0002] Light sources that can be integrated on substrates, such as distributed feedback sources, have multiple applications, such as the photoacoustic detection of chemical compounds. In order to take advantage of the benefits offered by several distinct technologies, it is sought to integrate light sources manufactured using a particular technology on a substrate not derived from this technology. This is referred to as “hybrid” integration or “hybrid” sources. For example, the integration of light sources made from so-called “IILV” materials on a silicon semiconductor substrate is cited.

[0003] IILV materials are semiconductor alloys comprising a semiconductor material belonging to group III (column 13 of the periodic table of elements) and a semiconductor material belonging to group V (column 15 of the periodic table of elements). Frequent IILV alloys include, for example, ITnP, ITnAs, GaAs, GaN, InSb or their alloys. Light sources, called "IILV", are good candidates for emitting radiation in a wide spectral range, such as the mid and far infrared. These sources, however, have strong integration constraints, particularly when they must be integrated into the silicon substrate.

[0004] A distributed feedback light source, whether of the IILV type or not, comprises a cavity formed by a stack of layers comprising a so-called "active" or "amplifying" region and two semiconductor layers called "cladding" in English. The active region is configured to emit an electromagnetic field, by spontaneous and / or stimulated emission. The cladding layers are adjacent to the active region and arranged on either side thereof to confine certain modes of the electromagnetic field, called "guided modes". A diffraction grating makes it possible to apply a feedback to the magnetic field to establish the guided modes. In order to effectively confine the guided mode(s), the cladding layers Cladding layers have optical indices strictly lower than the average optical index of the active region. For example, when the active region is composed of a multilayer of InGaAs / AlInAs or InAlAs / AlGalnAs, the cladding layers are then made of InP.

[0005] A III-V light source, the stack of layers of which is directly arranged on an Si substrate, can suffer high optical losses, which are a handicap for its use. Indeed, silicon has an optical index higher than that of III-V materials, such as InP, and therefore higher than the cladding layers of the stack. Thus, without any special arrangement and when the penetration of the guided mode into the cladding layers is significant (for example in the mid and far infrared), said guided mode can couple to the Si substrate and reduce the effectiveness of the confinement offered by the cladding layers.

[0006] In order to overcome this problem, it is proposed that the cladding layer separating the active region from the Si substrate, called the lower cladding layer, be relatively thick. It thus makes it possible to compensate for the penetration depth of the guided mode in the cladding layers and reduce the coupling of the guided mode with the Si substrate. For a guided mode having a wavelength of 4.5 pm, the thickness of the lower cladding layer must reach at least 3.5 pm. This represents an additional constraint on the integration of the source and also a significant cost in terms of raw material. For a guided mode having a wavelength greater than 10 pm (far infrared), the thickness of the lower cladding layer should be greater than 8 pm, which further complicates the integration of III-V light sources on silicon.

[0007] A solution proposed by the document [Coutard, JG, Brun, M., Fournier, M. et al. “Volume Fabrication of Quantum Cascade Lasers on 200 mm-CMOS pilot line”. Sci Rep 10, 6185 (2020)] consists of inserting a low optical index layer between the lower cladding layer of the stack of layers and the Si substrate. Said low index layer acts as a barrier to the propagation of the guided mode in the Si substrate and makes it possible to reduce the thickness of the lower cladding layer. This low index layer is, for example, made of oxide or nitride. If the decoupling between the III-V source and the Si substrate is effective for a guided mode having a wavelength less than 4 pm, the observation is different when the guided mode has a longer wavelength. Indeed, oxides or nitrides induce high losses when the wavelength of the guided mode is greater than 4 pm, which greatly limits the spectral range of the source.

[0008] There is therefore a need to reduce the size of a distributed feedback light source, integrated on a substrate having a high optical index, whatever the spectral range considered. Summary of the invention

[0009] The invention makes it possible to solve, at least in part, the aforementioned problems.

[0010] More particularly, the invention relates to a light source comprising: a substrate extending parallel to a plane; a distributed feedback resonant cavity (also called a “distributed feedback resonant cavity” or “DFB” for “Distributed Feedback” in English), configured so that at least one stationary mode of an electromagnetic field, called a “resonant guided mode”, is established parallel to the substrate, said resonant cavity comprising a stack of: a first confinement layer, called the “lower confinement layer”, extending parallel to the substrate; an active layer, configured to generate said electromagnetic field, said active layer, extending over the lower confinement layer; a second containment layer, called the “upper containment layer”, extending over the active layer.

[0011] The light source is remarkable in that the resonant cavity comprises a metal layer, called the "lower metal layer", extending parallel to the substrate, between the substrate and the stack of layers and in that the lower confinement layer extends against the lower metal layer.

[0012] By "parallel" or "parallel" to a plane or direction and respectively "perpendicular" or "perpendicularly" to a plane or direction, we mean parallel to the plane or direction to within 20° (i.e. with an angle relative to this plane or this direction included in [-20°; +20°]), or even 10° near, and respectively perpendicular to the plane or to the direction to 20° near (that is to say with an angle relative to this plane or this direction included in [70°; 110°]), or even 10° near.

[0013] The lower metal layer replaces the oxide or nitride layer described by the paper [Coutard, JG, Brun, M., Fournier, M. et al. “Volume Fabrication of Quantum Cascade Lasers on 200 mm-CMOS pilot line”. Sci Rep 10, 6185 (2020)] and discussed above. The lower metal layer does not have the absorption problems of the oxide or nitride layers.

[0014] The presence of the lower metal layer prevents the transmission of resonant guided modes to the substrate. It thus improves the confinement of the guided modes. resonants in the stack. Thus, even if the substrate has a higher optical index than the effective index seen by the resonant guided modes in the cavity, the lower metal layer prevents the transmission of the modes to the substrate. The lower metal layer therefore allows the source to be integrated on a substrate with a high optical index, for example silicon.

[0015] The propagation of the resonant guided mode in the substrate, i.e. outside the cavity, induces high optical losses. The lower metal layer, by its metallic nature, can also induce optical losses, in particular by the absorption of a portion of the radiation. However, the optical losses due to the lower metal layer are lower than the optical losses in the substrate. The lower confinement layer can therefore be thinned compared to a source of the prior art having a relatively thick confinement layer. The source according to the invention can therefore be integrated on a substrate having a high index while having a reduced footprint.

[0016] The interaction of the resonant guided mode with the lower metal layer takes place over a wide spectral range. More precisely, the refractive indices of metals, such as that of gold, exhibit a very high imaginary part (for example, greater than 10 for gold), increasing significantly with the wavelength. This has the effect of very drastically limiting the penetration of the optical mode into the metal layer. The penetration length of an infrared mode in gold is, for example, less than 100 nm. Consequently, any propagation in the substrate is prohibited. Thus, the thickness of the lower metal layer varies little, if at all, over a wide spectral range of resonant guided modes. The thickness of the lower metal layer can therefore be constant for a wide spectral range. The vertical size of the source (i.e., measured perpendicular to the substrate) varies little, if at all, for a wide spectral range.

[0017] It was not obvious for the person skilled in the art to replace the oxide layer described by the document [Coutard, JG, Brun, M., Fournier, M. et al. “Volume Fabrication of Quantum Cascade Lasers on 200 mm-CMOS pilot line”. Sci Rep 10, 6185 (2020)] with the lower metal layer and deposit the first lower confinement layer against this lower metal layer. Indeed, due to the wave nature of the resonant guided modes in a DFB cavity, all the constituent elements of the source are entangled. Confinement therefore results from multiple correlations between the constituent elements of the source. As proof, the dimensioning of an infrared optical source generally involves a numerical calculation step, the only one capable of determining the effect of a modification of one of the constituent elements of the source.Perturbative reasoning (i.e. considering the constituent elements of the source as decorrelated from each other) does not allow the effect of a modification of one of the elements on the resonant guided modes to be determined. Therefore, the sole mobilization of the general knowledge of the person skilled in the art could not have allowed him to anticipate the effect of the permutation of the oxide layer of the aforementioned document by a metallic layer. It would not have been . example not expected that the lower metal layer would allow to improve the bulk of the source while reducing the optical losses of the resonant guided modes.

[0018] The lower metal layer can also be used as an electrical contact (in other words as an electrode) to carry out the injection of charge carriers into the stack in order to stimulate the generation of resonant guided modes.

[0019] The lower metal layer also allows the heat released by the stack to be dissipated more efficiently to the outside. Indeed, metals are good thermal conductors. The lower metal layer in contact with the stack allows heat transfer by conduction from the stack to a cold point (such as the substrate or a heat sink). The efficiency of a light source depends strongly on the temperature of the latter. The lower metal layer therefore makes it possible to improve the efficiency of the source.

[0020] By optical index, we also mean refractive index. By effective optical index, we mean the optical index seen by the resonant guided mode in the stack.

[0021] Advantageously, the stack of layers has a height, measured perpendicular to the substrate, the stack of layers further comprising a first side, extending perpendicular to the substrate over at least part of the height of the stack of layers and extending parallel to a first direction parallel to the substrate called the “propagation direction”, the stack of layers having, on its first side, a first diffraction grating configured to apply a distributed counter-reaction on said at least one resonant guided mode.

[0022] The first diffraction grating makes it possible to carry out the distributed feedback on the resonant guided modes and thus select at least one resonant guided mode in the resonant cavity.

[0023] Forming the diffraction grating on one side of the stack instead of on the stack allows the total thickness of the source to be further reduced. Indeed, positioning a diffraction grating on or under the stack of layers requires depositing a sufficient thickness of material to etch the diffraction grating. Depending on the etching depth of the grating or the optical indices of the materials making up the grating, this thickness could prove significant.

[0024] Advantageously, the first side extends over a height of the upper confinement layer, over a height of the active layer and at least over a portion of a height of the lower confinement layer. The first side may also extend over the entire height of the lower confinement layer.

[0025] Advantageously, the stack of layers has a width, measured perpendicular to the direction of propagation, the first diffraction grating being formed so that the width of the stack of layers varies periodically as a function from a position along the direction of propagation.

[0026] The diffraction grating therefore has a series of slits or trenches extending perpendicular to the substrate and forming, along the direction of propagation, a diffraction grating. When the diffraction grating is positioned on one side, each slit or trench can be dug (towards the center of the stack) as deep as desired. It is therefore possible to adjust the coupling of the diffraction grating with the resonant guided modes without increasing the height of the source. Slits extending perpendicular to the substrate are also simpler to etch.

[0027] The formation of lateral diffraction gratings also makes it possible to manufacture several different sources on the same substrate and / or during the same manufacturing step. The sources may in particular have gratings having different coupling strengths. The formation of lateral diffraction gratings makes it possible to etch, in the same step, corrugations (or structuring) of different depths (the depth of a corrugation for a lateral grating being measured parallel to the substrate). Conversely, the formation of a grating on or under the stack (for example as carried out in the aforementioned document [Coutard 2020]) requires the formation of gratings having the same corrugation depths (the depth being measured perpendicular to the substrate) and therefore the same coupling strengths for all the sources.

[0028] Advantageously, the first diffraction grating has a first length, measured along the propagation direction, and, for at least one resonant guided mode of the resonant cavity, a first coupling force with said resonant guided mode, the product of the first coupling force for said at least one resonant guided mode with the first length of the diffraction grating being between 1 and 2.5.

[0029] The coupling strength can be seen as a constant proportional to a contrast of the effective indices seen by the resonant guided modes interacting with the diffraction grating. The contrast is usually defined as a difference in effective indices of said resonant guided mode in etched and non-etched areas of the grating. The coupling strength K is for example calculated by

[0030] K -Z

[0031] where 2 is the wavelength of the resonant guided mode considered. The different effective indices seen by the resonant guided modes depend on the shape of the etched and non-etched areas, the depth of the etched areas relative to the non-etched areas, as well as their duty cycle.

[0032] Keep a product of the length with the coupling force between 1 and 2.5 allows to obtain an efficient resonant cavity. The first network thus has sufficient strength to apply a distributed counterreaction on the electromagnetic fields in the stack.

[0033] Advantageously, the stack of layers comprises a second side, opposite the first side, and extending over at least part of the height of the stack of layers, the stack of layers having, on its second side, a second diffraction grating configured to apply a distributed feedback on said at least one resonant guided mode, the first diffraction grating having a first pitch and the second diffraction grating having a second pitch equal to the first pitch.

[0034] By "the second step equal to the first step", we mean that the second is equal to the first step to within 20%, or even 10%.

[0035] The second grating thus makes it possible to reinforce the counter-reaction distributed in the resonant cavity. It also offers the same advantages of size and ease of manufacture as the first diffraction grating.

[0036] Preferably, the second side extends over the height of the upper confinement layer, over the height of the active layer and at least over a portion of the height of the lower confinement layer. The second side may also extend over the entire height of the lower confinement layer.

[0037]

[0038] Advantageously, the second diffraction grating has a second length and a second coupling strength with said at least one resonant guided mode, the product of the second coupling strength with the second length also being between 1 and 2.5.

[0039] Advantageously, the stack of layers has a first face, called the “lower face” and a second face, called the “upper face”, opposite the lower face, the lower metal layer extending against the lower face of the stack of layers.

[0040] Advantageously, the stack of layers having, on its upper face, a third diffraction grating configured to apply a distributed feedback on said at least one resonant guided mode. The third diffraction grating makes it possible to further reinforce the distributed feedback.

[0041] Advantageously, the third diffraction grating has a third pitch equal to the first pitch. Thus, the counter-reaction is reinforced.

[0042] Advantageously, the lower confinement layer has a first thickness, measured perpendicular to the substrate, for which the optical losses of at least one resonant guided mode of the stack are a function of the first thickness according to an asymptotic regime.

[0043] A portion of the resonant guided mode in the cavity may be absorbed by the lower metal layer due to the metallic character of the latter. Increasing the first thickness of the lower confinement layer makes it possible to reduce the absorption level in the metal layer. The trend in the evolution of optical losses as a function of the first thickness makes it possible to determine a thickness corresponding to acceptable optical losses. A criterion for selecting the first thickness is, for example, the asymptotic regime of optical losses. In the asymptotic regime, the first thickness increases more quickly than the losses are reduced. The first is therefore, in this regime, sufficiently thick.

[0044] Advantageously, the resonant cavity also comprises an additional metal layer, called the “upper metal layer”, extending against the upper face of the stack, the second upper confinement layer having a second thickness, measured perpendicular to the substrate, for which the optical losses of at least one resonant guided mode of the stack are a function of the second thickness according to an asymptotic regime.

[0045] The upper metal layer offers several advantages. For example, it allows, with the lower metal layer, the injection of charge carriers to stimulate the emission of photons by the stack (and in this case by an active layer). Thus, it is not necessary to resort to interstitial, conductive and transparent layers (with selected guided modes), inserted into the stack to carry out a transfer of the electrical contacts. The manufacture of the stack is facilitated and the injection of the carriers is standardized.

[0046] The presence of the upper metal layer can also block the transmission of the guided modes out of the cavity, in the same way as the lower metal layer (and in the presence of a medium with a high optical index). However, it has the disadvantage of inducing losses due to its metallic nature. However, the selection of a second thickness of the upper confinement layer as a function of the loss evolution regime as a function of the second thickness makes it possible to obtain a source with acceptable losses and a reasonable thickness.

[0047] Advantageously, the lower metal layer is made from Au, Ag or Ti.

[0048] The invention also relates to a method of manufacturing a light source comprising the steps of: • provide a first substrate having a first face; • provide a second substrate having a second face; • metallize the first face of the first substrate so as to form a first metallic underlayer extending over the first face of the first substrate; • metallize the second face of the second substrate so as to form a second metallic underlayer extending over the second face of the second substrate; • transferring the second metal sub-layer of the second substrate onto the first metal sub-layer of the first substrate so that the first and second metal sub-layers form a metal layer, called the “lower metal layer”, extending parallel to the first substrate; • forming a distributed feedback resonant cavity configured so that at least one stationary mode of an electromagnetic field, called “resonant guided mode”, is established parallel to the first substrate, the formation of the resonant cavity comprising the steps of: • etching the second substrate so as to form a first confinement layer, called the “lower confinement layer”, extending parallel to the first substrate and against the lower metal layer; • forming an active layer, configured to generate said electromagnetic field, said active layer extending over the lower confinement layer; and • form a second confinement layer, called the “upper confinement layer”, extending over the active layer.

[0049] This method makes it possible to manufacture a light source according to the invention which can take advantage of a metal / metal transfer of two substrates made from different materials, for example Si and III-V material.

[0050] Advantageously, the method comprises a step of determining a first thickness for the lower confinement layer, for which the optical losses of at least one resonant guided mode of the resonant cavity are a function of this first thickness according to an asymptotic regime, the step of etching the second substrate being carried out so that the resulting lower confinement layer has the first determined thickness.

[0051] Advantageously, the method comprises a step of determining a second thickness for the upper confinement layer, for which the optical losses of at least one resonant guided mode of the resonant cavity are a function of this second thickness according to an asymptotic regime, the step of forming the upper confinement layer being carried out so that the resulting upper confinement layer has the second determined thickness.

[0052] Advantageously, the step of determining the second thickness is carried out before the step of determining the first thickness. This makes it possible to carry out a optimization of the first thickness by considering a second thickness already optimal. From the determination of the first thickness is not disturbed by a second non-optimized thickness.

[0053] Advantageously, the method comprises etching the stack of layers so that said stack of layers, having a height measured perpendicular to the first substrate, comprises a first side, extending perpendicular to the first substrate over at least part of the height of the stack of layers and extending parallel to a first direction parallel to the first substrate called the “propagation direction”, the etching of the stack of layers being carried out so that the stack of layers has, on its first side, a first diffraction grating configured to apply a distributed counter-reaction on said at least one resonant guided mode.

[0054] Advantageously, the method comprises a step of conformal deposition of a first insulating layer against the first side of the stack of layers and a step of conformal deposition of an additional metal layer on the first insulating layer. BRIEF DESCRIPTION OF THE FIGURES

[0055] The invention and its various applications will be better understood upon reading the following description and examining the accompanying figures. The figures are presented for information purposes only and in no way limit the invention. Unless otherwise specified, the same element appearing in different figures has a single reference.

[0056] [Fig.l] and [Fig.2] show a first embodiment of a light source according to the invention.

[0057] [Fig.3] presents a first result of a modal analysis carried out from a light source according to the invention.

[0058] [Fig.4] and [Fig.5] present second and third results of a modal analysis carried out from a light source according to the invention.

[0059] [Fig.6] shows a step of a manufacturing method according to the invention making it possible to manufacture the light source of Figures 1 and 2. DETAILED DESCRIPTION

[0060] Figures 1 and 2 schematically represent a first embodiment of a light source 101 according to the invention. They also show an orthonormal reference frame {X; Y; Z}. [Fig. 1] represents a sectional view in a plane {Y; Z] while [Fig. 2] represents a sectional view in a plane {X; Y}.

[0061] The light source 101 comprises a substrate 102, a resonant cavity 120.

[0062] The substrate 102 extending parallel to a plane {X; Y}. [Fig.l] does not represent than a portion of the substrate 102. The latter may be massive, it may have very large dimensions compared to the other elements of the source 101. The substrate 102 is for example made of silicon.

[0063] The resonant cavity 120 is, for example, a laser source cavity or an electroluminescent source cavity. The cavity 120 is advantageously configured to produce an emission of a light beam in a wavelength range between 0.8 pm and 20 pm, including the near infrared and a portion of the mid-infrared. The cavity 120 is said to be “frontal emission”. That is to say that the emission is produced by a lateral surface of the cavity 120, oriented in the present case in a first direction X also called “propagation direction”.

[0064] In the embodiment of [Fig.l], the cavity 120 has a ridge shape, called a “ridge” in English, stretching along the propagation direction X. In other words, it has a high aspect ratio with a length, measured along X, of between 20 pm and 1000 pm, or even between 100 pm and 5000 pm, and a width, measured along a second direction Y, parallel to the propagation direction X, of between 5 pm and 100 pm, and preferably between 5 pm and 20 pm. The cavity 120 may have a height, measured along a third direction Z, of between 2 pm and 20 pm, and preferably between 2 pm and 10 pm.

[0065] The cavity 120 is configured to emit an electromagnetic field and confine this electromagnetic field in one or more stationary modes also called “resonant guided modes” (which will be called indifferently “guided modes” or “resonant modes”). These may be guided modes, such as those observable in a laser source. The cavity is particular in that each guided mode is parallel to the plane {X; Y] (i.e. parallel to the substrate 102). By mode parallel to the plane, it is meant that the field has, exclusively: • a polarization of the electric field perpendicular to the plane {X; Y]; or • a polarization of the magnetic field perpendicular to the plane {X; Y}.

[0066] In other words, the electromagnetic field includes for example: • a polarization of the electric field normal to the substrate 102 (i.e. parallel to the Z direction) and a polarization of the magnetic field parallel to the substrate 102; or • a polarization of the electric field parallel to the substrate 102 and a polarization of the magnetic field normal to the substrate 102.

[0067] The cavity 120 implements a distributed feedback to allow the establishment of resonant modes. In this case it comprises two lateral diffraction gratings 201, 202 (discussed below) to achieve the distributed feedback on the electromagnetic field.

[0068] Unless otherwise stated, only one guided mode of the field in the cavity 120 will be considered, in order to simplify the description of the invention. The teachings apply, however, to each guided mode when the cavity 120 is configured to present a plurality of modes.

[0069] In the embodiment of [Fig.l], the cavity 120 comprises a stack 103 of layers, each layer extending parallel to the substrate 102. The stack 103 comprises for example an active layer 104, which is also called an “active region” or “amplifier region”. The active layer 104 is configured to emit the electromagnetic field. The stack 103 also comprises a first confinement layer 105, called the "lower confinement layer" or "lower cladding layer", extending between the active region 104 and the substrate 102. The active layer 104 rests on the inner confinement layer 105. The stack 103 also comprises a second confinement layer 106, called the "upper confinement layer" or "upper cladding layers", resting on the active region 104. The terms "lower" and "upper" are considered relative to the orientation of [Fig.l].The active layer 110 separates the two confinement layers 105, 106. The three layers 104, 105, 106 thus form a vertical stack of layers, each layer 104, 105, 106 extending parallel to the substrate 102. Said stack 103 is delimited by a flank extending perpendicular to the substrate 102. Said flank comprises in particular two surfaces 107, 108 forming a first side 107 and a second side 108. The two sides 107, 108 are opposite each other. The first side 107 is in this case oriented along -Y and the second side 108 is oriented along +Y.

[0070] The confinement layers 105, 106 make it possible to contribute to the confinement of the electromagnetic field in the cavity 120, in particular in the direction Z, normal to the substrate 102. In this way, the electromagnetic field remains mainly localized at the level of the active layer 104 and makes it possible, for example, to promote the stimulated emission of the active layer 104. For this, the confinement layers 105, 106 are, for example, configured to have optical indices nt05, ni06 strictly lower than an average optical index ni04 of the active layer 104. By average optical index rat04 of the active layer 104, we mean an optical index taking into account the indices of the layers or sub-layers making up the active layer 104.

[0071] The confinement layers 105, 106 are for example made of an IILV alloy such as InP.

[0072] The active layer 104 can be configured so that the emission of the electromagnetic field is at least spontaneous and preferably spontaneous and stimulated. This latter case allows operation in laser mode of the source 101. The emission can be based on inter-band emission also called “interband cascade emission” in English. It can be preferentially based on inter-sub-band emission also called “quantum cascade emission” or “quantum cascade emission” emission" in English. To enable quantum cascade emission, the active layer 104 comprises, for example, a stack of sub-layers made of III-V material, forming a succession of quantum wells and potential barriers. The stack of sub-layers extends, for example, parallel to the substrate. The active layer 104 comprises, for example, a multi-layer of InGaAs / AlInAs or InAlAs / AlGalnAs.

[0073] The different layers 104, 105, 106 of the cavity 120 have different optical indices. However, each guided mode in the cavity 120 can have an effective optical index neff which can have a different value from the optical indices of the layers of the stack 103 considered independently of each other. This difference is notably due to the geometry of the different layers. This is the reason why the effective optical index of the guided mode is considered. The effective optical index weff can be determined numerically. An estimate of the effective optical index neff can be determined from the average optical index in the stack 103. It is however preferable to take into account all the elements making it possible to achieve confinement of the electric field in the cavity 120, such as the geometry (thickness and / or width) of the stack 103 and / or the presence of reflective layers.

[0074] The substrate 102 has an optical index ni02. When Weff > ^102, the guided mode of the cavity 120 is not likely to couple with the substrate 102. The substrate 102 participates in the confinement of the guided modes in the cavity 120. On the other hand, when neff < ^102, the guided mode in the cavity 120 is likely to couple with the substrate 102, inducing optical losses and reducing the efficiency of the source 101.

[0075] The source 101 comprises the insertion of a first metal layer 111, called the “lower metal layer”, between the substrate 102 and the stack of layers 103. The lower metal layer 111 extends parallel to the substrate 102 and the first confinement layer 105 extends against this lower metal layer 111. The lower metal layer 111 can extend away from the substrate 102 or extend against the latter. The interaction of the guided modes in the cavity 120 with the surface of the lower metal layer 111 maintains the guided modes in the cavity 120. In this way, the transmission of the guided modes to the substrate 102 is inhibited and the efficiency of the source 1 is preserved, even if the substrate 102 shows a strong optical index allowing it to couple with the guided modes in the cavity 120.

[0076] In the embodiment of [Fig. 1], the lower metal layer 111 extends against the substrate 102. The stack 103 rests, by its first confinement layer 105, against the lower metal layer 111. The lower metal layer 111 extends over the substrate 102, under the stack 103 and beyond the stack 103. The lower metal layer may be made of gold, silver or titanium. It has a thickness, measured perpendicular to the substrate 102, of between greater than or equal to X / 10 where X is the wavelength of the guided world considered. Considering a wavelength range X of between 0.8 pm and 20 pm, the thickness of the lower metal layer 111 is for example between 80 nm and 2 pm.

[0077] The cavity 120 also comprises a first insulating layer 115 and a second insulating layer 117 extending against, respectively, the first and second sides 107, 108 of the stack 103. The insulating layers preferably have optical indices lower than the effective optical index in the cavity. Thus, these layers provide confinement by index contrast. These insulating layers 115, 117 are, for example, made of silicon nitride SiN.

[0078] The cavity 120 also comprises a second metal layer 112 and a third metal layer 113. In the embodiment of [Fig.l], the second and third metal layers 112, 113 extend perpendicular to the substrate 102 and parallel to the first and second sides 107, 108 of the stack 103, respectively. The second metal layer 112 extends against the first insulating layer 115, covering the first side 107. The third metal layer 113 extends against the second insulating layer 117, covering the second side 108.

[0079] The second and third layers 112, 113 make it possible to laterally confine the guided modes or improve the lateral confinement offered by the index contrast of the insulating layers 145, 117.

[0080] The first and second insulating layers 115, 117 make it possible to electrically insulate the stack 103 from the second and third metal layers 112, 113. Indeed, the injection of charge carriers, making it possible to stimulate the emission of an electromagnetic field, is preferably carried out in a direction perpendicular to the substrate. Thus, the insulating layers 115, 117 make it possible to avoid a short circuit of the active layer 104 and in particular of the various sub-layers which may compose this active layer 104.

[0081] In the embodiment, the second and third metal layers 112, 113 are electrically connected to the lower metal layer 111 with which they are in direct contact. This connection makes it possible to fix the electrical potential of the second and third metal layers 112, 113.

[0082] The stack 103 comprises two faces 109, 110, opposite one another: a first face 109, called the “lower face”; and a second face 110, called the “upper face”. The lower face 109 of the stack corresponds to the face of the first confinement layer 105 in contact with the lower metal layer 111.

[0083] The cavity 120 comprises a fourth metal layer 118 also called "additional metal layer" or "upper metal layer" extending against the upper face 110 of the stack 103. Thus, the stack 103 is sandwiched between two metal layers 111, 118 which can act as electrodes. These electrodes make it possible to apply an electric field to the stack 103 making it possible to assist the generation of photons in the cavity 120 and more specifically not the active region 104.

[0084] In order to be able to apply a field between the lower and upper metal layers 111, 118, said metal layers 111, 118 are electrically insulated from each other. In the embodiment of [Fig.l], the lateral metal layers 112, 113 are electrically connected to the lower metal layer 111. The upper metal layer 118 is therefore insulated from the lateral metal layers 112, 113. In particular, in the embodiment of [Fig.l], the first and second insulating layers 115, 117 extend vertically, beyond the stack 103 to cover edges of the fourth metal layer 118.

[0085] Alternatively, the side metal layers 112, 113 could be electrically connected to the top metal layer 118 and insulated from the bottom metal layer 111. Still alternatively, the side metal layers 112, 113 could be connected to a different metal layer 111, 118. Still alternatively, the side metal layers 112, 113 could be insulated from the top and bottom metal layers 111, 118.

[0086] The second, third and fourth metal layers 112, 113, 118 may be made from gold, silver or titanium or from different metal materials.

[0087] In order to activate the spontaneous emission of the active layer 104, the confinement layers 105, 106 can be doped, promoting the conduction of the electric current through the active layer 104.

[0088] The cavity 120 of figures 1 and 2 implements a distributed feedback of the resonant modes, called “DFB” for “distributed feedback” in English. In a DFB cavity, the resonant guided modes are established in response to the action of a diffraction grating extending over one face of said cavity. In the case of the cavity 120 of figures 1 and 2, the stack 103 has lateral corrugations at its first and second sides 107, 108. The shape and period of these corrugations as well as the index contrast (between the stack and the insulating layers 115, 117 in this case) form first and second diffraction gratings 201, 202, called “lateral diffraction gratings”. In this way, the guided modes in the cavity 120 can interact with these lateral diffraction gratings.

[0089] In the example of [Fig.2], the lateral diffraction gratings 201, 202 are formed by periodic trenches, extending perpendicular to the substrate 102 (therefore along the Z direction), dug in the stack 103 along the Y direction. These trenches form a periodic corrugation at the sides of the stack 103. The trenches are distributed along the propagation direction X. They are arranged, for the first and second lateral networks 201, 202, according to, respectively, first and second constant pitches P201, P202, measured along the propagation direction X. In this way, each guided mode is established parallel to the substrate 102 and mainly along the length of the cavity 120, in other words along the propagation direction X in Figures 1 and 2.

[0090] The lateral corrugations of [Fig.2] have, in top view, straight shapes, similar to teeth dug into the stack 103. The shape of the corrugations may be different provided that it has periodic patterns. It may be undulations or triangles. However, from the point of view of manufacturing these corrugations, it may be easier to engrave straight teeth into the sides of the stack 103.

[0091] In the example of [Fig.2], the insulating layers 115, 117 extend against the sides 107, 108 of the stack 103 and in particular in a conformal manner against the lateral corrugations. Similarly, the lateral metal layers 112, 113 extend in a conformal manner against the insulating layers 115, 117. Since the diffraction gratings 201, 202 are partly formed thanks to the index contrast with the stack 103, the insulating layers can be deposited differently. For example, in a variant, the insulating layers 115, 117 can be deposited in a non-conformal manner against the lateral corrugations so as to erase the corrugations. In this case the metal layers 112, 113 then extend against the insulating layers 115, 117 in a planar manner.

[0092] The first and second steps P201, P202 of the two lateral networks 201, 202 are preferably equal, for example to within 10%, or even 5%. Thus, they constructively reinforce the counter-reaction exerted on the modes in the cavity 120.

[0093] The stack 103 may also comprise a third diffraction grating on its upper face 110. It may have, in the same way as the first and second lateral gratings 201, 202, a periodic corrugation formed of trenches distributed along the propagation direction X, with a third constant pitch, preferably equal to the first pitch P201 of the first lateral grating 201. The trenches of the third grating, however, extend along a different direction, for example along the Y direction (they may be obtained by partial etching of the stack 103 along the -Z direction).

[0094] In addition, the stack 103 may also comprise an additional diffraction grating at its lower face 109, on the same principle as explained above.

[0095] It is however advantageous for the cavity 120 to comprise only the lateral diffraction gratings 201, 202. Indeed, the latter make it possible to obtain a feedback distributed over the guided modes, while maintaining a restricted vertical size. Indeed, it is not necessary to have a thick layer on (or under) the stack 103 to carry out an etching making it possible to obtain a diffraction grating. In addition, the formation of a lateral grating is simple to implement. It can be carried out by anisotropic etching of the sides 107, 108 of the stack 103. It is also easy to form lateral gratings having different pitches (and therefore different orders) within the same stack 103 or for different stacks 103 of the same set of stacks 103 (for example manufactured in the same step).

[0096] The lateral networks 201, 202, as illustrated schematically in [Fig.2], have a length L201, L202, measured in the Z direction, equal to 20% of the length of the stack 103. The networks 201, 202 are produced by etching slots in the stack 103.

[0097] In the example of [Fig.2], the stack 103 has a width W, measured perpendicular to the propagation direction Z, varying between two extreme widths W0 and W1. The difference between these two extreme widths corresponds to the depth D201, D202 of the corrugations (in this case the trenches), measured along the direction Y.

[0098] A coupling force K20t, K202 can be defined for each lateral grating 201, 202. This coupling force is proportional to the interaction of each guided mode in the stack 103 with the diffraction gratings 201, 202. Each guided mode interacts with a total coupling force K corresponding to the sum of the coupling forces of the cavity 120.

[0099] The coupling strengths K20i, ^202 of the lateral gratings are proportional to the contrasts Ah2qi, ^202 of the effective indices seen by the guided modes for each lateral grating 201, 202. The contrasts ^201, ^202 are a function of the difference in effective indices seen by the guided modes in etched areas of the grating (therefore for example the indices of the insulating layers 115, 117) and non-etched areas of the grating. They also depend on the depth D201, D202 and the duty cycles of the trenches forming the diffraction gratings 201, 202. For example, up to a certain limit, the deeper the slits, the greater the contrasts ^201, ^202-

[0100] The coupling strengths ^201, ^202 of the lateral networks can be calculated by

[0101] — 2 ^201 ; ... _ 2-^202 ^201- j k202 ~ /

[0102] where X is the wavelength of the guided mode i considered.

[0103] Keep a product of length L201, L202 with a coupling strength K20i, k202 such that

[0104] L201xk201g[1;2,5]

[0105] L202 x a-202 g [1; 2.5]

[0106] makes it possible to obtain an efficient source 1, with a total counter-reaction sufficient for the establishment of guided modes while limiting the absorption of the modes by the networks 201, 202.

[0107] The lateral networks 201, 202 have preferably equal pitches P201, P202, in order to achieve a distributed feedback on the same guided modes. However, it is not obligatory for the depths D201, D202 or the lengths L201, L202 of the networks 201, 202 to be equal. The lengths of the lateral networks 201, 202 are however advantageously equal to the length, measured along the propagation direction X, of the cavity 120. In this way, it is not necessary to form deep slots, thus limiting the attenuation of the modes by the networks 201, 202.

[0108] In an alternative embodiment, the lower confinement layer 105 may have a different shape, notably comprising a portion, called a “pedestal”, extending laterally beyond the active region 104. The lower confinement layer 105 comprises, for example, first and second sub-layers, each extending parallel to the substrate 102 and one on top of the other. The first sub-layer is in contact with the active region 104. It extends, for example, in the vertical extension (i.e. perpendicular to the substrate 102) of the active region 104. It may be delimited by a flank, common to the flank delimiting the active region 104.

[0109] The second sub-layer forms the pedestal. It extends against the lower metal layer 111. The first sub-layer extends against the second sub-layer. The second sub-layer extends under the active region 104 and extends laterally beyond the active region 104. The second sub-layer extends for example against the entire lower metal layer 111.

[0110] In this embodiment, the first side 107 of the stack 103 extends only over a certain height (measured perpendicular to the substrate 102) of the stack 103. In particular, it extends over the entire height of the active region 104 and the entire height of the upper confinement layer 106. The first side 107, on the other hand, extends only against a portion of the height of the lower confinement layer 105, in particular over the entire height of the first sub-layer of the lower confinement layer 105. In the same way, in this embodiment, the second side 108 of the stack 103 extends only over the height of the active region 104, the height of the upper confinement layer 106 and the height of the first sub-layer of the lower confinement layer 105.

[0111] Figure 3 shows a result of a modal analysis carried out by finite elements allowing the depths D201, D202 of the diffraction gratings 201, 202 to be adjusted to obtain a predefined total coupling force K. Figure 3 shows more particularly the result of a parametric study of the effective index n^î seen by a guided mode TM00 (polarization perpendicular to the substrate 102) in a stack 103 according to the invention but without corrugation on these sides (i.e. with flat sides), and as a function of the width W of the stack 103 (constant over the entire length of the stack, without pedestal).

[0112] The modal analysis is carried out by considering a complex effective index neiï, that is to say comprising a real part and an imaginary part. The imaginary part accounts for the optical losses of the guided mode in the cavity 120.

[0113] Figure 3 shows the evolution of the real part of the effective index Re(neff) seen by the guided mode as the width W of the stack 103 increases. This evolution makes it possible to determine, for two distinct widths WA and WB, an associated index contrast Aweff (B ~ ^a) - Since the coupling strength with the lateral networks 201, 202 depends on the index contrast Aweff, it is possible, thanks to this parametric study, to determine the depths D201, D202 (for example equal to (WB - WA) / 2) of the first and second lateral networks 201, 202. The widths WA and WB correspond to the extreme widths W0 and W1 of the stack 103 of figure 2. For example, considering WA = 8 pm and WB = 9.5 pm, the sum of the depths making it possible to achieve a desired coupling strength k = 2 Aneff / 2 is for example

[0114] 0201 + D202=WB-WA = 1.5 pm

[0115] Each lateral network 201, 202 can thus have, for the desired coupling force *, a depth D201, D202 of 0.75 pm.

[0116] Figures 4 and 5 show results of two parametric studies of the real parts Re(?îeff) and imaginary parts of the effective index seen by the guided mode in an optical cavity 120 according to the invention. The parametric studies are carried out as a function of, respectively, the thickness T106 of the upper confinement layer 106 ([Fig.4]) and the thickness T105 of the lower confinement layer 105 ([Fig.5]).

[0117] The imaginary part Im(neff) accounts for the optical losses of the guided mode in the cavity 120. It corresponds in particular to the coupling of the guided mode with the upper metal layer 118 (for figure 4) and the lower metal layer 111 (for figure 5). The higher the imaginary part, the greater the optical losses. important.

[0118] The optical losses (and therefore the imaginary part Im(H ff) of the effective index) decrease monotonically with the thicknesses T105, T106. It is therefore necessary to increase the thickness T105, T106 of the confinement layers 105, 106 for reduce optical losses. At low thicknesses T105, T106, the decrease in losses can be rapid. However, there is a thickness from which losses do not decrease more rapidly than an asymptotic regime. When this regime is reached, the reduction in optical losses is at the expense of a significant thickening of the confinement layers. It is therefore wise to identify the thickness T105, T106 from which the asymptotic regime is reached. Thus, the selection of a thickness T105, T106 allowing an asymptotic reduction in losses represents a good compromise between reduced thickness and acceptable losses.

[0119] Note that as the thicknesses T105, T106 of the confinement layers 105, 106 increase, the real part of the effective index also reaches an asymptotic regime towards a fixed value of the effective index.

[0120] [Fig.6] schematically shows a step in the manufacture of a light source 1 according to the invention. The manufacture is carried out from two substrates 601, 604. The first substrate 601 will form the substrate 102 on which the stack 103 of the light source 1 extends. It is for example made of silicon. The first substrate 601 has a first face 602.

[0121] The second substrate 604 will form the first confinement layer 105 of the stack 103. It is for example made of InP. It comprises a second face 605.

[0122] In this embodiment, the first and second substrates 601, 604 have first and second optical indices n60i, Zï604 such that ^60 i > / z604-Thus, the first substrate 601 is likely to induce optical losses by transmission of the guided modes.

[0123] The manufacture of the source 1 comprises a step of metallization of the first and second faces 602, 605 of the first and second substrates 601, 604, forming first and second metallic sub-layers 603, 606. The transfer of the metallized faces 602, 605 against each other is carried out so as to bond the second substrate 604 to the first substrate 601.

[0124] The two metal sub-layers 603, 606 form a first and single metal layer 111 extending between the two substrates 601, 604. This first metal layer 111 is intended to form the lower metal layer 111 of the source 1, separating the stack 103 from the silicon substrate 102.

[0125] The manufacture of the source 1 may comprise a subsequent step of forming a layer stack from the two bonded substrates 601, 604. The formation comprises for example an etching of the second substrate 604 so as to form the lower confinement layer 105 of the stack 103, extending against the lower metal layer 111. The etching is for example carried out through a hard mask, with a stop on the lower metal layer 111. The active region 104 and the upper confinement layer 106 may be deposited on the layer of lower confinement layer 105. Alternatively, before the delimitation of the lower confinement layer 105, layers intended to form the active region 104 and the upper confinement layer 106 are deposited on the second substrate 604. Thus, the delimitation of the lower confinement layer 105 in the second substrate 604 delimits at the same time the active region 104 and the upper confinement layer 106.

[0126] This delimitation (of the lower and upper confinement layers 105, 106 and of the active region 104) is preferably carried out so that the final stack 103 comprises at least one corrugation on one of its sides 107, 108. This corrugation makes it possible to form the diffraction grating 201 making it possible to apply a counter-reaction on a resonant mode. The corrugation is for example obtained through an etching mask having a crenellated edge.

[0127] The method advantageously comprises the conformal deposition of the insulating layers 115, 117 on the sides of the stack 103 and in particular against the lateral corrugation(s). The method also advantageously comprises the conformal deposition of the lateral metal layers 112, 113 against the insulating layers 115, 117.

[0128] The optical indices of the layers forming the stack 103 may be chosen so that at least one stationary mode of an electromagnetic field in the stack has an effective optical index zzeff. The resulting stack extends over a first metal layer 111, the latter making it possible to limit the propagation of the guided modes towards the first substrate 601, even if the latter has a higher optical index than the effective optical index / zeff seen by the guided modes.

[0129] The thicknesses T105, T106 of the first and second confinement layers 105, 106 are preferably determined so that the optical losses associated with at least one of the guided modes of the stack 103 decrease according to an asymptotic regime. The steps of forming the first and second confinement layers 105, 106 are then carried out so that these layers 105, 106 have the determined thicknesses. These thicknesses T105, T106 are preferably calculated by means of parametric analyses as illustrated by FIGS. 4 and 5.

Claims

Claims

1. Light source (101) comprising: - a substrate (102) extending parallel to a plane; - a distributed feedback resonant cavity (120), configured so that at least one stationary mode of an electromagnetic field, called "resonant guided mode", is established parallel to the substrate (102), said resonant cavity comprising a stack (103) of: - a first confinement layer (105), called "lower confinement layer", extending parallel to the substrate (102); - an active layer (104), configured to generate said electromagnetic field, said active layer (140) extending on the lower confinement layer (105);- a second confinement layer (106), called the "upper confinement layer", extending over the active layer (104), the source being characterized in that the resonant cavity (120) comprises a metal layer (111), called the "lower metal layer", extending parallel to the substrate (102), between the substrate (102) and the stack of layers (103) and in that the lower confinement layer (105) extends against the lower metal layer (111).;

2. Source (101) according to the preceding claim, in which the stack of layers (103) has a height, measured perpendicular to the substrate, the stack of layers (103) further comprising a first side (107), extending perpendicular to the substrate (102) over at least part of the height of the stack of layers and extending parallel to a first direction (X) parallel to the substrate (102) called the "propagation direction", the stack of layers (103) having, on its first side (107), a first diffraction grating (201) configured to apply a distributed counter-reaction on said at least one resonant guided mode.

3. Source (101) according to the preceding claim, in which the stack of layers (103) has a width (W0, Wl), measured perpendicular to the propagation direction (X), the first diffraction grating (201) being formed such that the width (W0, Wl) of the stack of layers varies periodically depending on a position along the propagation direction (X).

4. Source (101) according to one of the two preceding claims, in which the first diffraction grating (201) has a first length (L201), measured along the propagation direction (X), and, for at least one resonant guided mode of the resonant cavity (120), a first coupling force with said resonant guided mode, the product of the first coupling force for said at least one resonant guided mode with the first length (L201) of the diffraction grating being between 1 and 2.

5.

5. Source (101) according to one of the three preceding claims, wherein the stack of layers (103) comprises a second side (108), opposite the first side, and extending over at least a portion of the height of the stack of layers, the stack of layers (103) having, on its second side (108), a second diffraction grating (201) configured to apply a distributed feedback on said at least one resonant guided mode, the first diffraction grating (201) having a first pitch (P201) and the second diffraction grating (202) having a second pitch (P202) equal to the first pitch (P201).

6. Source (1) according to one of claims 2, 3 or 4, wherein the stack of layers (103) has a first face (109), called the "lower face" and a second face (110), called the "upper face", opposite the lower face (109), the lower metal layer (111) extending against the lower face (109) of the stack of layers (103), the stack of layers (103) having, on its upper face (110), a third diffraction grating configured to apply a distributed counter-reaction on said at least one resonant guided mode, the first diffraction grating (201) having a first pitch (P201) and the third diffraction grating having a third pitch equal to the first pitch (P201).

7. Source (1) according to one of the preceding claims, in which the lower confinement layer (105) has a first thickness (T105), measured perpendicular to the substrate (102), for which the optical losses of at least one resonant guided mode of the stack (103) are a function of the first thickness (T 105) according to a regime asyniptotic.

8. Source (101) according to one of the three preceding claims, wherein the stack of layers (103) has a lower face (109) and an upper face (110) opposite the lower face (109), the lower metal layer (111) extending against the lower face (109), the resonant cavity (120) also comprising an additional metal layer (118), called the "upper metal layer", extending against the upper face (110) of the stack (103), the upper confinement layer (106) having a second thickness (T106), measured perpendicular to the substrate (102), for which the optical losses of at least one resonant guided mode of the stack (103) are a function of the second thickness (T 106) according to an asymptotic regime.

9. Source (101) according to one of the preceding claims, in which the lower metal layer (111) is made from Au, Ag or Ti.

10. A method of manufacturing a light source comprising the steps of - providing a first substrate (601) having a first face (602); - providing a second substrate (604) having a second face (605); - metallizing the first face (602) of the first substrate (601) so as to form a first metal sub-layer (603) extending over the first face (602) of the first substrate (601); - metallizing the second face (605) of the second substrate (604) so ​​as to form a second metal sub-layer (606) extending over the second face (605) of the second substrate (604); - transferring the second metal sub-layer (606) of the second substrate (604) onto the first metal sub-layer (603) of the first substrate (601) so that the first and second metal sub-layers (603, 606) form a metal layer (111), called the “lower metal layer”, extending parallel to the first substrate (601);- forming a distributed feedback resonant cavity (120) configured so that at least one stationary mode of a field; electromagnetic field, called "resonant guided mode", is established parallel to the first substrate (602), the formation of the resonant cavity (120) comprising the steps of: - etching the second substrate (604) so ​​as to form a first confinement layer (105), called "lower confinement layer", extending parallel to the first substrate (601) and against the lower metal layer (111; - forming an active layer (104), configured to generate said electromagnetic field, said active layer, extending over the lower confinement layer (105; and - forming a second confinement layer (106), called "upper confinement layer", extending over the active layer (104),

11. Manufacturing method according to the preceding claim, comprising a step of determining a first thickness (T105) for the lower confinement layer (105), for which the optical losses of at least one resonant guided mode of the resonant cavity (120) are a function of this first thickness (T 105) according to an asymptotic regime, the step of etching the second substrate (604) being carried out so that the resulting lower confinement layer (105) has the first determined thickness (T105).

12. Manufacturing method according to one of the two preceding claims, comprising a step of determining a second thickness (T106) for the upper confinement layer (106), for which the optical losses of at least one resonant guided mode of the resonant cavity (120) are a function of this second thickness (T 106) according to an asymptotic regime, the step of forming the upper confinement layer (106) being carried out so that the resulting upper confinement layer (106) has the determined second thickness (T 106).

13. Manufacturing method according to one of the three preceding claims, comprising etching the stack of layers (103) so that said stack of layers (103), having a height measured perpendicular to the first substrate (601), comprises a first side (107), extending perpendicular to the first substrate (601) over at least part of the height of the stack of layers and extending parallel to a first direction parallel to the first substrate (601) called the “propagation direction” (X), the etching of the stack of layers (103) being carried out so that the stack of layers (103) has, on its first side (107), a first diffraction grating (201) configured to apply a distributed counter-reaction on said at least one resonant guided mode.

14. Manufacturing method according to the preceding claim, comprising a step of conformal deposition of a first insulating layer (115) against the first side (107) of the stack of layers (103) and a step of conformal deposition of an additional metal layer (112) on the first insulating layer (115).

Images