System and associated method for moving a support plate in a processing environment

Abstract

A support system (100) for generating movement of a support plate (102) configured, in use, to support a workpiece to be moved to a predetermined position in space relative to a known default position, the system comprising: a plurality of support assemblies (200) each configured for free movement in and free rotation about all axes (XYZ) and connected to the support plate (102) for translating movement to the support plate (102) in several of six degrees of freedom, based on the predetermined position; one or more motion units (108a-f) each associated with each of the plurality of support assemblies (200);a controller configured to drive one or more of the motion units (108a-f) to cause the support plate (102) to move to the predetermined position, the number of motion units (108a-f) configured to be driven being equal to the number of degrees of freedom required by the motion to move the support plate (102) to the predetermined position. Figure for abstract: Fig. 1;

Description

Title of the invention: System and associated method for moving a support plate in a processing environment Technical field of the invention

[0001] The present invention relates to a system and an associated method for moving a support plate in a processing environment, for example in a processing environment for the manufacture of electronic devices. Technical background

[0002] The manufacture of electronic devices involves many processing steps and requires moving components from one processing step to another or placing the electronic device in a particular location for a particular tool. This is particularly interesting when handling semiconductor wafers and the like.

[0003] In a typical manufacturing environment, a wafer undergoes a number of different processing steps in order to form the final wafer and all of its associated components. This requires the movement of the wafer within the manufacturing environment and, at all times, precise knowledge of the position and orientation of the wafer within the manufacturing environment. Furthermore, these environments are controlled and any human intervention must be limited. Therefore, automatic systems with a support or platform are used to move and locate the wafer within the manufacturing environment.

[0004] To achieve the required level of accuracy, the wafer must be able to be moved by the robot with six degrees of freedom. Such robots exist, but they have performance issues in certain situations. In addition, until now, robots are bulky and have a large footprint relative to the size of the wafer. Moving one or more robots in a manufacturing environment is therefore a challenge. For some movements, it is common to have multiple robots or robots stacked high to ensure that all 6 degrees of freedom are taken into account. This leads to additional disadvantages.

[0005] There is therefore a need to find a better way to support and move a wafer or similar object in a manufacturing environment that overcomes at least some of the problems associated with previous robots and systems.

[0006] It is necessary to overcome at least some of the disadvantages of known and prior support robots. Summary of the invention

[0007] The present invention relates to a support system for generating movement of a support plate configured, in use, to carry a workpiece to be moved to a predetermined position in space relative to a known default position, the system comprising:

[0008] a plurality of support assemblies each configured for free movement along each of the three axes (XYZ) and free rotation about all of the axes (XYZ) and connected to the support plate to translate movement to the support plate in at least one of six degrees of freedom, based on the predetermined position;

[0009] one or more movement units each associated with each of the plurality of support assemblies;

[0010] a controller configured to drive one or more of the motion units to cause the support plate to move to the predetermined position, the number of motion units configured to be driven being equal to the number of degrees of freedom required by the motion to move the support plate to the predetermined position.

[0011] According to at least one embodiment of the invention, the support system comprises three support assemblies connected to the support plate.

[0012] According to at least one embodiment of the invention, each support assembly comprises two movement units configured to drive movement along two different axes.

[0013] According to at least one embodiment of the invention, the support assemblies each comprise two movement units connected to each other by a joint having six degrees of freedom.

[0014] According to at least one embodiment of the invention, the support assemblies each comprise a first movement unit imparting a movement along a Z axis relative to the default position and a second movement unit imparting a movement in a plane of the support plate relative to the default position.

[0015] According to at least one embodiment of the invention, the first movement unit is located in a leg of the support system, which leg is configured to modify the height of the system relative to the default position.

[0016] According to at least one embodiment of the invention, the second movement unit is located in a coupling in the plane of the support plate of the support system, and which is configured to change the position in the plane of the support plate of the system relative to the default position.

[0017] According to at least one embodiment of the invention, the coupling comprises two orthogonal parts, a first coupling extending in one direction in the plane of the support plate and a second coupling extending in a direction of the plane of the support plate and wherein the first coupling is connected to the second coupling and the coupling is located below the support plate.

[0018] According to at least one embodiment of the invention, the support system further comprises a circular support plate attached to the plurality of support assemblies on a circumference thereof.

[0019] According to at least one embodiment of the invention, the support assemblies of the plurality of support assemblies are located equidistantly around the circumference.

[0020] According to at least one embodiment of the invention, the support assemblies of the plurality of support assemblies are located on the circumference of the support plate and a first and a second support assemblies are separated by a 90° angle. For example, it is possible to measure the different movements of which the position of the support plate is the result.

[0021] According to at least one embodiment of the invention, the support system further comprises at least one sensor for measuring the movement of the support plate.

[0022] According to at least one embodiment of the invention, at least one sensor comprises means for measuring at least one movement of at least one part of the support system and the support system comprises means for calculating a position of the support plate as a function of the movement(s) measured.

[0023] Indeed, for example, the sensors measuring the position of the support plate are most of the time indirect. Managing the movements of the motors by measuring the resulting position at the support plate is quite difficult. The present invention therefore makes it possible to manage at least some of the different displacements or movements, for example, by measuring the position of the different movement units (or actuators) and deducing by calculation the position of the support plate.

[0024] According to at least one embodiment of the invention, the support system further comprises a spring configured to support a weight of the support plate before, during or after movement of the support plate.

[0025] in a Z direction.

[0026] According to at least one of its embodiments, the invention also relates to a method of moving a support plate in a support system according to any one of the preceding claims, the support plate being configured, in use, to carry a part to be moved to a predetermined position in space relative to a known default position, the method comprising the following steps:

[0027] moving one or more support assemblies each of which is configured for a free movement in and free rotation about all axes (XYZ) and which is connected to the support plate to impart movement to the support plate in at least one degree of freedom among six degrees of freedom, based on the predetermined position, by driving one or more movement units to cause the support plate to move to the predetermined position; further comprising driving a number of movement units to move the support plate to the predetermined position. Brief description of the figures

[0028] Other characteristics and advantages of the invention will appear during the reading of the detailed description which follows for the understanding of which reference will be made to the appended drawings in which:

[0029] [Fig. 1] is a simplified diagram of a support platform for a workpiece to be processed (or "processer") according to one aspect of the present invention;

[0030] [Fig.2] is a schematic top view of the support platform of [Fig.l] showing the relative positions of the support legs and the platform movement motor according to one aspect of the invention;

[0031] [Fig.3a] and [Fig.3b] represent respectively the first and second couplers of figures 1 and 2;

[0032] [Fig.4] is a schematic diagram showing alternative relative positions of the legs of the support platform in accordance with one aspect of the invention;

[0033] [Fig.5] is a technical drawing of the support platform of [Fig.l] in accordance with one aspect of the invention. Detailed description of the invention

[0034] Various aspects of various embodiments of fluid detectors according to the invention are described in more detail below, with reference to the accompanying drawings.

[0035] Various aspects of various embodiments of a system and an associated method for moving a carrier plate in a processing environment, for example in a processing environment for manufacturing electronic devices according to the invention are described in more detail below, with reference to the accompanying drawings.

[0036] The present invention relates to a system for moving a platform in an electronic manufacturing environment, for example to place a wafer in a processing position for one or more steps of a wafer or chip manufacturing process. The system is referred to herein as a system or robot because it includes a robotic component that can move from one position to another automatically based on instructions. The instructions may be given by a user directly or through a computer interface and / or instructions, as appropriate. The different types of instructions will be discussed in more detail below. The system may also be used in a wafer or other manufacturing method and the various steps of the method may be facilitated by the system through appropriate instructions.

[0037] The support system 100 is shown in three dimensions (3D) in [Fig.l]. The system 100 includes a plate or platform 102 for supporting or transporting a workpiece (not shown) from one position to another for different stages of processing the workpiece or for any other use.

[0038] The support platform is generally circular in shape with a center point C and a radius r. The support platform may have any other shape, size or orientation required for different uses. The precise size and shape of the platform are known by the system, so that the relative movements thereof can be programmed and executed.

[0039] In the present invention, the workpiece to be processed / handled is one or more electronic devices, for example in the form of a semiconductor wafer. The semiconductor wafer comprises, for example, a plurality of chips or similar elements arranged in an array. The array comprises a number of rows and columns of chips or the like arranged at a distance from each other in a known plane and at a known distance. The array may be centered on the center point C and have a diameter slightly smaller than that of the support plate 102. The workpiece is fixed to the platform in use by a fixing interface adapted to the platform and the workpiece or a tool for holding a workpiece. The position of the workpiece must be known precisely at each stage of processing so that the necessary processing steps are in accordance with a predetermined plan for the manufacture of the workpiece.The position of the part is directly related to the support platform 102 and can be determined by the system as described below.

[0040] The ability to accurately know the position of the workpiece and move it to a new position for the next processing step or for any other use relies on accurate knowledge of the position of the workpiece at a given time. To achieve this, the position of the workpiece is known in 6 degrees of freedom and the movements of the support plate 102 are also based on the programming of the movement in these 6 degrees of freedom and by conventional position tracking devices.

[0041] It is assumed that the platform 102 is in a known plane. For example, in an XY plane parallel to the ground. The XY plane comprises an X direction (or longitudinal direction) and a Y direction (or lateral direction). The X and Y directions are part of a coordinate system S (or XYZ) which is illustrated in [Fig.l], but which is understood to apply to all other figures although it is not shown. This coordinate system S comprises the X and Y directions forming the XY plane and the Z (or vertical) direction which is orthogonal to said XY plane. The system 100 is designed to be able to move the plate 102 in at least part of the 6 degrees of freedom. The 6 degrees of freedom comprise a translation Xi along the X direction; a rotation 0X around the X direction; a translation Yi along the Y direction; a rotation 0Y around the Y direction; a translation Zi along the Z direction; and a rotation 0Z around the Z direction.

[0042] The coordinate system may include different nomenclatures or diagrams, as will be understood by those skilled in the art.

[0043] In the illustrated system there are three legs 104(a), 104(b) and 104(c) and these are spaced apart in a triangular orientation, each leg being substantially 120° from the other two, measured in the XY plane and the same distance from the center point C between the legs 104. This is illustrated in more detail in Figures 3a and 3b and an alternative is illustrated in [Fig.4] for other angular values. The system 100 is intended to be carried or supported by a robot from which the legs 104 extend. The legs 104 extend from the robot through a support structure 106 which ensures that the legs (104) do not move relative to the support plate 102 other than by the action of one or more motors 108a-c associated with each leg 104. At the top of each leg 104 is a ball-and-socket joint 110.In the illustrated example, the top of the leg 104 includes a spherical end 112 that is configured to engage a respective cup 114 connected to the base of the plate 102. Each cup 114 is connected to the base of the support plate via several connectors. Other types of joints could also be used, provided that they provide flexibility through the three rotations.

[0044] A first coupling 116 is oriented in the plane of the support plate 102 and perpendicular to a radius r of a circle centered on C. The first coupling 116 is fixed to the base of the support plate 102 on the edge of its circumference. A second connector 118 is coupled to the first connector 116 and to the joint 110. The second connector 118 is perpendicular to the first connector 116 and extends along the radius r of the circle in the same plane of the support plate 102.

[0045] The robot comprises at least one movement unit or motor 108d-f which allows the support plate 102 to be moved from one position to another in one or more of the 6 degrees of freedom.

[0046] A first connector 116 is oriented in the XY plane and in line with the 60° position of the angle between the respective legs, so that if they are extended towards the center C, they meet. A second connector 118 connects the first connector 116 to the base of the support plate 102 and is oriented perpendicular to the axis of the first connection and in the same XY plane.

[0047] The robot comprises at least one motion unit or motor 108 which enables the robot to move from one position to another in one or more of the 6 degrees of freedom.

[0048] In one example, each leg may include a motor 108a, 108b, 108c above the end 120 closest to the robot. Each of these motors may move the respective leg in a positive or negative Z direction or axis. In order to move the platform 102 in the X and Y directions, three additional motors are associated with the connectors 116 and 118 and are capable of moving the support platform relative to the respective legs in the X and Y directions. In one aspect, the three motors 108d-f are associated with the connectors 116 and 118 and are capable of moving the support platform relative to the respective legs in the X, Y, and theta Z directions respectively.

[0049] The respective motors 108 generate movement in at least one of the X,Y,Z directions or rotation about at least one of the X,Y,Z axes. In some systems 100, there may be one motor for each type of movement, for example each of the 6 degrees of freedom, or there may be fewer motors where the same motor is used for more than one movement in different degrees of freedom.

[0050] At any time or step of a process, the current position of the part is known. For a given manufacturing process, the next step of the process is determined. Based on this step, a required position for the next required position of the part is determined. Depending on the difference between the known (current) position and the required (next) position, a series of movements of the support plate 102 is required. The motor(s) associated with the support plate 102 are then programmed to perform the required movements in at least one of the 6 degrees of freedom in order to position the part in the required position.

[0051] A controller (not shown) is used to determine the movements and positioning of the part or platform for the first step of the process and for each of the successive steps. The process may consist of a plurality of steps, each taking place at a specific location, possibly using a specific tool. The specific location is known in space by a set of coordinates relative to a neutral point located somewhere in the processing environment. For example, the rest position of an empty platform is defined as a home position in which all coordinates of the 6 degrees of freedom are known to be zero. Thereafter, each step of the process takes place at a predetermined position and orientation, defined by the coordinates of the default position.The controller commands the motors to move as needed to orient the platform or part at each successive set of coordinates. for the processing to be performed. It should be noted that after each process step, the part size may have changed due to the previous process step, which is taken into account when determining the next required position. For example, during a deposition step, the wafer thickness may change and the next processing step adapts to this change. The controller determines such a change and calculates the required position for the next step accordingly.

[0052] It will be appreciated that the controller is part of a computer system having a processor, memory, and a set of other input and output mechanisms. One mechanism of interest involves measurements of the movement of the support platform and the intended movements that are required for the next step. The system includes a number of sensors that measure the amount of movement of the support platform or plate 102 in each of the degrees of freedom. Typical sensors include linear optical sensors that can determine the displacement of each leg and the displacement of the motors associated with the first and second couplings 116 and 118. Other measurements may be used, and other types of sensors may be used to measure these and other parameters. The controller may be operated through a list of executable codes stored in memory and managed by the processor.The processor can thus provide instructions to the motors to move the support plate at each step in a sequence of steps. In addition, the controller, as previously discussed, knows a base or neutral position from which all measurements are calculated.

[0053] The manner in which the movement of the platform is generated will now be described in more detail with reference to [Fig. 2]. The support plate is supported by three support assemblies 200. Where each support assembly 200 is configured to movably attach the support plate 102 to the legs 104 (not shown in [Fig. 2]) via a combination of elements. The movable nature of the combined support assemblies is expected to add up to 6 degrees of freedom where 6 degrees of freedom are required. In the illustrated example, the elements include the joint 110 (not shown as such), the first connectors 116 and the second connectors 118. In some examples, there are as many motor directions as there are degrees of freedom.

[0054] It should be noted that there may be more support assemblies than those shown, in which case the support assemblies may not include motors and may simply be free to move. For example, there may be a fourth support that does not have a motor and is freely movable in all axes.

[0055] As shown in [Fig.l], the legs 104 are each equipped with a motor 108a-c and each is controlled to move independently relative to the support 106 in which the motors 108a-c are located. The illustrated orientation of the system means that the motors 108a-c move the support plate in the Z direction (up and down). Since each motor 108a-c operates independently, the position of the joint 110 and thus of the support plate 102 can be moved by different amounts, in different directions or even not moved at all. The combination of these movements results in an associated movement of the support plate 102. Thanks to the three motors 108a-c, the support plate 102 can be moved to any height in the Z axis or Theta X or Theta Y rotation of the system. The exact movement of each leg 104 is determined by the controller in order to position the workpiece used at the precise location required.The exact motion imparted by the 108a-c motors is determined by the controller and generated in combination with other motions in the XY plane, as described below.

[0056] Each first connector 116 is attached to and below the support plate 102, and each second connector 118 is connected between the first connector 116 and the joint 110. The system comprises the three support structures 200 located at equal distances around the edge of the support plate, i.e. at an angle of 120° to each other.

[0057] Referring to [Fig.3a], each first connector 116 extends tangentially along the circumference of the circle having center C, as previously described. Each first connector 116 includes an elongate guide 300 traversed by an elongate support rod 302 sliding connection. The elongate guide includes a connection 301 which connects the first connector 116 to the second connector 118. At each end of the elongate rod 302, there are respective upwardly curved portions 304a and 304b which both extend toward a support rod 306 which is fixed to the base 308 of the support plate 102. Within the guide 300 is a motor 108 which, when operated, moves the elongate rod 302 within and relative to the elongate guide 300. Any movement of the elongated rod 302 relative to the guide 300 causes an associated movement of the support plate 102 and therefore of the workpiece.Any movement will result in movement in at least one degree of freedom of the system.

[0058] Similarly, [Fig. 3b] relates to each second coupling 118. Each second coupling 118 includes an elongated guide 310 with an elongated support rod 312 extending therethrough. The elongated guide is attached to the first coupler 116 via the connector 311. At each end of the elongated rod 312 are respective downwardly curved portions 314a and 314b which both extend toward a support rod 316 which is attached to the joint 110. The guide 310 does not include a motor, but is free to move by the movement of the three motors 108d-f in the first couplings 116 which, in operation, move the elongated rod 302 within and relative to the elongated guide 300. Since the second coupling is free to move, any movement imparted by other motors in the system will generate an associated movement of the support plate 102 relative to the second coupling 118 of each support assembly 200. Any movement made by the first coupling 116 or the second coupling 118 in dependence on movements induced by other motors will result in movement of the support plate 102 in at least one degree of freedom of the system. As shown in the figures, there are 6 motors each of which is associated with translational movement in at least one of the 6 degrees of freedom of the support plate and associated workpiece in use. With six motors 108a-f, the full range of motion in the 6 degrees of freedom is possible.

[0059] In the illustrated arrangement, there is one motor for each degree of freedom, but it is also possible to have fewer motors and a motion translation mechanism to generate the individual movements of the legs 104 or the coupling 116. In this case, a multi-degree of freedom motor or the like may be placed centrally, for example between the legs, and, via a translation system, transmit the drive necessary to move each of the legs as required. It will be understood that it is possible to further adapt the number, nature and location of the motors as long as movement is possible in the degrees of freedom required for the robot's needs.

[0060] As shown in [Fig.2], there are three support assemblies 200. Each support assembly is placed equidistantly around the circumference of the support plate and has the same angle relative to the center point. [Fig.4] shows another arrangement of the support assemblies 200 in which two are at right angles to each other and the other is located at a point equidistant from the other two around the circumference. This means that the angular separation is not equal. Two assemblies are at right angles to each other and the third is located at 135° from the other two. This arrangement has some additional advantages. By having two motors at right angles, the motion produced by the motors is more consistent, especially in the XY direction where the fact that two motors 108e and 108f are at right angles, the XY motion is simplified.There is therefore less risk of the movements being in stages and the movement of the support plate 102 is more regular than in certain other orientations of the support assemblies. It should be noted that Figures 2 and 4 relate to two examples of positioning of the support assemblies and that others could be used without departing from the invention.

[0061] [Fig. 5] shows a technical diagram of the system of [Fig. 1]. The motors, legs and support assemblies are not visible as they are enclosed for protection. [Fig. 5] is included to show another advantageous feature of the present invention. Between each support of the system or robot is a spring 500. The function of the spring assembly 500 which may be of the wire wound, magnetic, gas type, is to compensate for some of the load of the support plate and thus limit the load on the legs 104. This is useful because it means that the total load of the support plate 102, which may be several kilograms, is not borne solely by the legs 104. Thus, the motors are less stressed by the weight of the support plate 102 once the movement has been carried out for a determined duration.In another example, the spring 500 is extended or retracted by known amounts after the leg has moved to take the load after a leg has completed its movement. In either case, the spring can be disengaged whenever necessary to allow further movement. In another option, the Z-motion is completed and the spring is extended within a certain tolerance, anticipating further movement in the XY plane.

[0062] It will be appreciated that the movement of the motors may occur in parallel or in sequence, as the case may be.

[0063] The system is capable of moving a part to a predetermined position on the support plate with very little possible deviation from the desired location. Typically, deviations do not exceed 3 mm or 0.5°. This fits well with the requirements needed to operate in the given environment and use case.

[0064] The system is shown with a fully supported support plate 102 movable in 6 degrees of freedom with a stacked configuration of couplers at the top of the legs, all within the circumference of the support plate 102. Therefore, the footprint of the robot is limited by the support plate 102. This means that there is no more space required in the XY plane than the size of the support plate. The height of the system or robot is limited to some extent by the height of the legs and, if the legs are fixed, their size is a known minimum. It will be appreciated that telescopic legs can reduce the overall height of the system and can also be used to aid movement in the Z axis. The motors 18a-c can act to extend or compress the leg if the leg is telescopic in nature.

[0065] The above invention describes a situation for use in a wafer or chip-related device manufacturing process. It also applies to any other robot-controlled environment, subject to the necessary adaptations. to different uses. For example, a support system capable of carrying an optical, mechanical or other device, in order to carry out measurements, treatments, etc.

[0066] The various examples described are intended to include variations and more or less other features which will be apparent from the scope of the appended claims.

[0067] The above description includes various use cases, which are given only as examples, and many other uses can be envisaged.

[0068] It will be appreciated that there are numerous variations of the features described above which are included within the scope of the appended claims. List of reference signs

[0069] 100 Support system

[0070] 102 Support plate

[0071] 104(a), 104(b) and 104(c) Legs

[0072] 106 Support structure

[0073] 108, (108a-f) Engines

[0074] 110 Articulation

[0075] 112 Spherical end

[0076] 114 Cup

[0077] 116 First coupling

[0078] 118 Second coupling

[0079] 200 Support Sets

[0080] 300 Extended guide

[0081] 301 Connection

[0082] 302 End of the elongated rod

[0083] 304a and 304b Curved parts

[0084] 306 Support rod

[0085] 308 Base

[0086] 310 Extended guide

[0087] 311 Connection

[0088] 312 End of the elongated rod

[0089] 314a and 314b Curved parts

[0090] 316 Support rod

[0091] 318 Base

[0092] 500 Spring

Claims

Claims

1. A support system (100) for generating movement of a support plate (102) configured, in use, to support a workpiece to be moved to a predetermined position in space relative to a known default position, the system comprising: a plurality of support assemblies (200) each configured for free movement along each of three axes (XYZ) and free rotation about all axes (XYZ) and connected to the support plate (102) for translating movement to the support plate (102) in at least one of six degrees of freedom, based on the predetermined position; one or more motion units (108a-f) each associated with each of the plurality of support assemblies (200);a controller configured to drive one or more of the motion units (108a-f) to cause the support plate (102) to move to the predetermined position, the number of motion units (108a-f) configured to be driven being equal to the number of degrees of freedom required by the motion to move the support plate (102) to the predetermined position.;

2. Support system (100) according to claim 1, characterized in that it comprises three support assemblies (200) connected to the support plate (102).

3. A support system (100) according to claim 1 or claim 2, characterized in that each support assembly (200) comprises two movement units (108a-f) configured to drive movement along two different axes.

4. Support system (100) according to any one of the preceding claims, characterized in that the support assemblies (200) each comprise two movement units (108a-f) connected to each other by a joint (110, 112, 114) having six degrees of freedom.

5. A support system (100) according to any preceding claim, characterized in that the support assemblies (200) each comprise a first movement unit (108a-c) imparting movement along a Z axis relative to the default position and a second movement unit (108d-f) imparting movement in a plane of the support plate (102) relative to the default position. default.

6. Support system (100) according to claim 5, characterized in that the first movement unit (108a-c) is located in a leg (104) of the support system, which leg (104) is configured to change the height of the system relative to the default position.

7. Support system (100) according to claim 5 or claim 6, characterized in that the second movement unit (108d-f) is located in a coupling in the plane of the support plate (102) of the support system, and which is configured to change the position in the plane of the support plate of the system relative to the default position.

8. A support system (100) according to claim 7, characterized in that the coupling comprises two orthogonal parts, a first coupling (116) extending in a direction in the plane of the support plate (102) and a second coupling (118) extending in a direction of the plane of the support plate (102) and wherein the first coupling (116) is connected to the second coupling (118) and the coupling is located below the support plate (102).

9. A support system (100) according to any preceding claim, characterized in that the system further comprises a circular support plate (102) attached to the plurality of support assemblies (200) around a circumference thereof.

10. A support system (100) according to claim 9, characterized in that the support assemblies of the plurality of support assemblies (200) are located equidistantly around the circumference.

11. A support system (100) according to claim 9, characterized in that the support assemblies of the plurality of support assemblies are located on the circumference of the support plate and a first and a second support assemblies are separated by a 90° angle.

12. Support system (100) according to any one of the preceding claims, characterized in that it further comprises at least one sensor for measuring the movement of the support plate (102).

13. Support system (100) according to claim 12, characterized in that at least one sensor comprises means for measuring at least one movement of at least one part of the support system and in that the support system comprises means for calculating a position of the support plate (102) as a function of the measured movement(s).

14. A support system (100) according to any one of claims previous, characterized in that it further comprises a spring (500) configured to support a weight of the support plate (102) before, during or after movement of the support plate in a Z direction.

15. A method of moving a support plate in a support system (100) according to any preceding claim, the support plate (102) being configured, in use, to carry a part to be moved to a predetermined position in space relative to a known default position, the method comprising the steps of: moving one or more support assemblies (200) each of which is configured for free movement in and free rotation about all axes (XYZ) and which is connected to the support plate (102) to impart movement to the support plate (102) in at least one of six degrees of freedom, based on the predetermined position, by driving one or more movement units (108a-f) to cause the support plate (102) to move to the predetermined position; further comprising driving a number of movement units (108a-f) to move the support plate (102) to the predetermined position.

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