Vacuum chamber and vacuum system

GB2624388BActive Publication Date: 2025-02-05EDWARDS LTD
View PDF 3 Cites 0 Cited by

Patent Information

Application Number
GB2022017034
Authority / Receiving Office
GB · GB
Patent Type
Patents
Current Assignee / Owner
Filing Date
2022-11-15
Publication Date
2025-02-05
Estimated Expiration
2042-11-15

Smart Images

  • Figure 00000001_0000
    Figure 00000001_0000
  • Figure 00000002_0000
    Figure 00000002_0000
Patent Text Reader

Abstract

A vacuum chamber 10, particularly an ultra-high vacuum (UHV) or extreme-high vacuum (XHV) vacuum chamber, comprises a housing 12 and a tube 16 connected to the housing. The tube is preferably for conn
Need to check novelty before this filing date? Find Prior Art

Citation Information

Patent Citations

  • CVD device with a process chamber housing that can be removed as a module from the reactor housing

    DE102016101003A1

  • Apparatus for selective gas injection and extraction

    WO2014066123A1

  • Instrument comprising a vacuum chamber

    WO2021175994A1