Furnace for substrate processing equipment

JP1731672SActive Publication Date: 2025-12-15KOKUSAI DENKI KK
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Patent Information

Application Number
JP2022005266D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2022-03-15
Publication Date
2025-12-15
Estimated Expiration
2047-03-15

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Abstract

The present invention relates to a furnace used in a substrate processing apparatus for heat-treating substrates. The furnace body has slits on the front and rear sides to avoid gas supply and exhaust sections provided in a processing vessel.
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