Cleaning brushes for semiconductor manufacturing equipment

Abstract

This item is a brush used in semiconductor manufacturing equipment to remove deposits (particles, etc.) from the back surface of a substrate that have an adverse effect on the exposure of the substrate, etc. This item has a cleaning part on its outer periphery. This item can remove deposits from the back surface of a substrate by pressing strongly against the back surface of the substrate and rotating with the cleaning part in contact with the substrate. This item has a large hole in the base part, which makes it easy to remove the cleaning solution used during cleaning and prevents the cleaning solution from accumulating in the center.

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