Bracket for position detection sensor of substrate transfer arm

Abstract

This item is a bracket for fixing a position detection sensor that detects the positional deviation of a substrate in a substrate transport arm used in semiconductor manufacturing equipment such as a coating and developing apparatus (equipment for performing coating, developing, heat treatment, etc. on substrates such as semiconductor wafers.) A substrate transport arm using this item can be equipped with a temperature measurement substrate and a data logger, allowing automatic temperature measurement of the heat treatment module in the coating and developing apparatus.

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