Process Chamber Manifold
JP1790474SActive Publication Date: 2025-02-04APPLIED MATERIALS INC
Patent Information
- Application Number
- JP2024014883D
- Authority / Receiving Office
- JP · JP
- Patent Type
- Designs
- Current Assignee / Owner
- Priority Date
- 2024-01-19
- Filing Date
- 2024-07-19
- Publication Date
- 2025-02-04
- Estimated Expiration
- 2049-07-19
Smart Images
Figure 0001790474000001 
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Abstract
This article is attached, for example, to the top cover of a process chamber in an assembled state with a process chamber mixer inserted therein, and is used to mix multiple gases flowing in from the outside within the central bore of the process chamber mixer and deliver the mixed gas to the process chamber below.
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Citation Information
Cited By
Process chamber manifold
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