Precursor vessel nozzle

JP1791687SActive Publication Date: 2025-02-20ASM IP HLDG BV
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Patent Information

Application Number
JP2024015952D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Priority Date
2024-02-05
Filing Date
2024-08-01
Publication Date
2025-02-20
Estimated Expiration
2049-08-01

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Abstract

The article is a nozzle that is attached to an inlet of a lid of a precursor vessel for semiconductor manufacturing. The article is attached to the bottom of the lid and is positioned inside the vessel. The article allows for a specific flow pattern into the vessel.
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