seal

JP1806653SActive Publication Date: 2025-08-21LAM RES CORP
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Patent Information

Application Number
JP2024026774D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Priority Date
2024-06-26
Filing Date
2024-12-25
Publication Date
2025-08-21
Estimated Expiration
2049-12-25

Smart Images

  • Figure 0001806653000001
    Figure 0001806653000001
  • Figure 0001806653000002
    Figure 0001806653000002
  • Figure 0001806653000003
    Figure 0001806653000003
Patent Text Reader

Abstract

The article according to the present application (hereinafter referred to as "the article") is, for example, a seal disposed between a base and an edge ring in a semiconductor processing apparatus.
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