GUI for data configuration
JP1825349SActive Publication Date: 2026-04-24TOKYO ELECTRON LTD
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Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Designs
- Current Assignee / Owner
- TOKYO ELECTRON LTD
- Filing Date
- 2025-08-27
- Publication Date
- 2026-04-24
Smart Images

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Abstract
This GUI is for a semiconductor device data analysis tool and is used to set the color and line type of sensor information displayed in charts (graphs). In the section in the center right of the display screen, when setting the sensor information to be displayed in the chart, select the color and line type to be displayed in the chart for the desired sensor information from the "Sensor Name" displayed in the list. Pressing the "Save Sensor" button in the upper left of the display screen will save the selected settings, and pressing the "Load Sensor" button in the upper right of the display screen will load the saved settings and reflect them in the chart.
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