Flat head units for heavy load alignment

Abstract

To provide electronic device fabrication, and more specifically, flat head units for heavy load alignment.SOLUTION: A mask frame support unit includes a case, a protruding body extending below the case, and a station having a flat head disposed above the case. The protruding body includes a tapered region and a cylindrical region. The tapered region includes a first end having a first diameter coupled to the case, and includes a second end having a second diameter opposite the first end. The second diameter is less than the first diameter, and the tapered region is coupled to the cylindrical region at the second end. The case houses a number of components including an upper receiving plate in contact with the station, a lower receiving plate disposed underneath the upper receiving plate, a flat head unit movement support mechanism disposed between the lower receiving plate and the body, and a centering component.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001]

[0001] This specification generally relates to the manufacture of electronic devices. More specifically, this specification relates to a flat head unit for heavy load alignment.

Background Art

[0002]

[0002] An electronic device manufacturing apparatus may include a plurality of chambers such as a process chamber and a load lock chamber. Such an electronic device manufacturing apparatus may employ a robot device in a transfer chamber configured to transfer a substrate between the plurality of chambers. In some embodiments, a plurality of substrates are transferred together.

Summary of the Invention

[0003]

[0003] The following is a simplified summary of the present disclosure to provide a basic understanding of some aspects of the present disclosure. This summary is not an extensive overview of the present disclosure. Nor does it identify key or critical elements of the present disclosure, nor does it delineate any scope of any implementation of the present disclosure or any scope of the claims. Its sole purpose is to present some concepts of the present disclosure in a simplified form as a prelude to the more detailed description that follows.

[0004]

[0004] According to an embodiment, a mask frame support unit is provided. The mask frame support unit includes a case, a projection extending downward from the case, and a station having a flat head positioned above the case. The projection includes a tapered region and a cylindrical region. The tapered region includes a first end having a first diameter coupled to the case, and a second end having a second diameter opposite the first end. The second diameter is smaller than the first diameter, and the tapered region is coupled to the cylindrical region at the second end. The case houses several components, including an upper support plate in contact with the station, a lower support plate positioned below the upper support plate, a flat head unit movement support mechanism positioned between the lower support plate and the body, and a centering component.

[0005]

[0005] According to another embodiment, an apparatus is provided. The apparatus includes a mask frame, an alignment shaft including a hollow cylinder having an opening, and a plurality of mask frame support units including a flat head unit. The flat head unit includes a case, a projection extending downward from the case and integrated with the alignment shaft through an opening, and a station having a flat head positioned above the case. The case houses a plurality of components including an upper support plate in contact with the station, a lower support plate positioned below the upper support plate, a flat head unit movement support mechanism positioned between the lower support plate and the body, and a centering component.

[0006]

[0006] Another embodiment provides a method for forming a mask frame support unit. This method includes inserting an upper support plate and a lower support plate into a case, forming a centering component within the case, fixing a projection to the bottom of the case, and fixing a station having a flat head to the top of the case. The projection includes a tapered region and a cylindrical region. The tapered region includes a first end having a first diameter coupled to the case, and a second end having a second diameter opposite the first end. The second diameter is smaller than the first diameter, and the tapered region is coupled to the cylindrical region at the second end.

[0007]

[0007] The aspects and implementations of this disclosure are intended to be illustrative examples of the aspects and implementations, not limiting them, and will be better understood from the detailed description and accompanying drawings described below. [Brief explanation of the drawing]

[0008] [Figure 1] This is a perspective view of a device including a flathead unit according to several embodiments. [Figure 2] This is a cross-sectional view of a device including a flathead unit according to several embodiments. [Figure 3] This is a schematic diagram of a flathead unit according to several embodiments. [Figure 4A] This is a cross-sectional view of a flathead unit according to several embodiments. [Figure 4B] This is a cross-sectional view of the flathead unit shown in Figure 4A after it has been moved from the neutral position to the offset position, according to several embodiments. [Figure 5A] This figure shows an example of a process flow for forming a flathead unit according to several embodiments. [Figure 5B] This figure shows an example of a process flow for forming a flathead unit according to several embodiments. [Figure 5C] This figure shows an example of a process flow for forming a flathead unit according to several embodiments. [Figure 5D] This figure shows an example of a process flow for forming a flathead unit according to several embodiments. [Figure 5E] This figure shows an example of a process flow for forming a flathead unit according to several embodiments. [Figure 5F] This figure shows an example of a process flow for forming a flathead unit according to several embodiments. [Figure 5G] This figure shows an example of a process flow for forming a flathead unit according to several embodiments. [Figure 5H] This figure shows an example of a process flow for forming a flathead unit according to several embodiments. [Figure 6] This is a flowchart illustrating a method for forming an apparatus including a flathead unit according to several embodiments. [Figure 7A] This is a top view of a mask alignment system according to several embodiments. [Figure 7B] This is a top view of a mask alignment system according to several embodiments. [Figure 7C] This is a top view of a mask alignment system according to several embodiments. [Modes for carrying out the invention]

[0009]

[0016] Electronic device processing systems may include vision alignment technology that allows manufacturers to reduce production costs by reducing or eliminating photolithography and / or etching systems. For example, a conventional vision system may include several ball transfer units (BTUs) positioned on a vision shaft to provide support for a mask during the vision alignment process. More specifically, each BTU includes a ball (e.g., a ceramic ball in a housing) on ​​which the mask frame rests, supporting the weight of the mask frame while allowing some movement of the mask frame. However, because the contact points, i.e., the contact surface area, between the mask frame and the balls of the BTU are small, concentrated pressure at the contact points can cause undesirable deformations (e.g., dents) or marks (e.g., scratches) to form on the mask frame, especially if the mask frame placed on the BTU is heavy enough.

[0010]

[0017] Aspects of this disclosure and their implementations address these and other shortcomings of existing technologies by providing flathead units for providing (heavy) load alignment. For example, the flathead units described herein may be used to provide load alignment while reducing or eliminating the occurrence of load deformation (e.g., dents) or marking (e.g., scratches). More specifically, the flathead units described herein can provide a larger contact point or increased contact surface area with the load, such as a mask frame, enabling the reduction or elimination of deformation (e.g., local deformation). The flathead units described herein may further support a free range of motion of the load in the XY plane. For example, the flathead units described herein may be designed to move, for example, about 7.5 millimeters (mm) from the center in any XY direction. To achieve such movement, the flathead units described herein may include a flathead movement support mechanism for supporting the load and enabling the movement of the unit. For example, the flathead units described herein may be embodied as a flathead ball (FHB) unit including a set of balls arranged in a ball retainer. The flathead unit described herein may further include a centering component or centering mechanism that can return the flathead unit to its center when there is no load on it. For example, the centering component may include a set of tension springs.

[0011]

[0018] For the sake of simplification and illustrative purposes, the embodiments described herein refer to embodiments in which the flathead unit is embodied as having a circular surface. However, the surface of the flathead unit described herein may have any suitable shape dimensions for providing the load alignment according to the embodiments described herein. Other examples of suitable shape dimensions for the surface of the flathead unit include elliptical, polygonal (e.g., quadrilateral, hexagonal, octagonal), etc.

[0012]

[0019] In some embodiments, the flathead unit may be implemented as a mask frame support unit within an apparatus including a mask frame. In the above embodiments, the flathead unit can support the weight of the mask sheet placed thereon, thereby reducing or eliminating the occurrence of mask deformation (e.g., dents). For example, several flathead units may be utilized within a vision system, each flathead unit associated with a corresponding shaft (e.g., an idle vision shaft). Exemplarily, the flathead units described herein may be implemented within an electronic device processing system including a thin-film encapsulation (TFE) system. The TFE system may be used to form a thin-film barrier during the processing of an electronic device (e.g., an organic light-emitting diode (OLED) device). For example, the TFE system can be used to enable the formation of a flexible organic light-emitting diode (OLED) device having a thin-film barrier as a substrate material (as opposed to other materials such as glass), thereby reducing costs and enabling lighter and thinner OLED displays. The TFE system may be, for example, a TFE chemical vapor deposition (CVD) (TFE CVD) system (e.g., a TFE plasma CVD (TFE PECVD) system).

[0013]

[0020] Aspects and implementations of the present disclosure provide technical advantages over other approaches. For example, as described above, the flat head unit described herein can prevent deformation and marking, and can reduce or eliminate contact stress problems that may exist in BTUs and other similar units. Further, the flat head unit described herein can enable movement of the mask frame that may be required during alignment of the mask frame. The life cycle of the flat head unit described herein can be longer than that of other units, such as a BTU under the same load and test conditions. For example, the flat head unit described herein can be designed for a load of, for example, about 100 kilograms (kg) at a temperature of, for example, about 80°C. Thus, when implemented as a mask frame support unit, the flat head unit described herein can provide improved mask frame and / or vision alignment accuracy compared to other units, such as a BTU.

[0014]

[0021] FIG. 1 is a perspective view of an apparatus 100 according to some embodiments. In some embodiments, the apparatus 100 is included within a vision system of a thin film encapsulation (TFE) system. However, the above embodiments should not be considered limiting, and the apparatus 100 can be implemented within any suitable system according to the embodiments described herein.

[0015]

[0022] As shown, the apparatus 100 includes a flat head unit ("unit") 110, a susceptor body 120, and an alignment shaft 130. More specifically, as described in further detail herein, the unit 110 can be integrated or fitted to the alignment shaft 130 through an opening of the alignment shaft 130. According to the embodiments described herein, any suitable mechanism can be used to integrate the unit 100 to the alignment shaft 130.

[0016]

[0023] As will be described in more detail below with reference to Figure 2, unit 110 can provide support for a mask frame. That is, unit 110 can be implemented as a mask frame support unit. For example, unit 110 may be a TFE mask frame support unit. As will be described in more detail below in this specification, unit 110 has a shape and dimensions designed to support the weight of a mask, including the mask frame and mask sheet, in a manner that reduces contact stress and thus reduces or eliminates mask deformation. For example, in this exemplary embodiment, unit 110 has a circular surface. Further details regarding unit 110 will be described below with reference to Figure 2.

[0017]

[0024] Figure 2 is a cross-sectional view of the apparatus 200 according to several embodiments. The apparatus 200 includes an alignment shaft 210 and a flathead unit ("unit") integrated with or fitted to the alignment shaft 210. For example, the alignment shaft 210 may be the idle vision shaft of a vision system. The unit 220 includes a projection ("body") 222, a case 224, and a station 226.

[0018]

[0025] As will be described in more detail herein, the body 222 includes a tapered region and a cylindrical region. The tapered region includes a first end having a first diameter coupled to the case 224 and a second end having a second diameter opposite the first end. The second diameter is smaller than the first diameter, and the tapered region is coupled to the cylindrical region at the second end.

[0019]

[0026] As will be described in more detail herein, the case 230 houses several components, including an upper support plate that contacts the station, a lower support plate positioned below the upper support plate, a flathead unit movement support mechanism positioned between the lower support plate and the main body, and a centering component.

[0020]

[0027] In this exemplary embodiment, the case 230 is a circular case, and the station 240 has a circular flat head. The station 240 can move substantially freely around its center (e.g., XY movement) by components formed within the case 230, as will be described in more detail below with reference to Figures 4A and 4B. Furthermore, as shown, one end of the mask frame 250 is positioned on the station 240. The apparatus 200 may include one or more other units (not shown) for supporting the mask frame 250. Further details regarding the units will be described below with reference to Figures 3 and 4.

[0021]

[0028] Figure 3 is a schematic diagram showing the dimensions of a flathead unit ("unit") 300 according to several embodiments. As shown, the unit 300 includes a projection ("body") 310, a case 320, and a station 330 having a lower part 332 and an upper part 334. The body 310 may be integrated into or fitted into an opening in a shaft including a hollow cylinder. In some embodiments, the shaft is an alignment shaft of the vision system for mask frame alignment.

[0022]

[0029] More specifically, the body 310 may include a cylindrical region 312 and a tapered region 314. The tapered region 314 includes a first end 317-1 having a first diameter and coupled to the case 320, and a second end 317-2 having a second diameter opposite the first end. The second diameter is smaller than the first diameter. The tapered region 314 is coupled to the cylindrical region 312 at the second end 317-2.

[0023]

[0030] Station 330 may be a movable station that can move substantially freely around a central point. In this exemplary embodiment, case 320 is a circular case and station 330 has a circular flat head.

[0024]

[0031] The distance "L1" from the left outer edge of the lower part 332 to the left outer edge of the case 320 may be, for example, about 7 millimeters (mm) to about 8 mm. More specifically, L1 may be, for example, about 7.5 mm.

[0025]

[0032] Similarly, the distance "L2" from the right outer edge of the lower part 332 to the right outer edge of the case 320 may be, for example, about 7 mm to about 8 mm. More specifically, L2 may be, for example, about 7.5 mm.

[0026]

[0033] The distance "L3" between the left and right outer edges of the lower section 332 (which also corresponds to the length of the lower section 332 and the length of the station 330) may be, for example, approximately 52 mm to approximately 60 mm. More specifically, L3 may be, for example, approximately 56 mm.

[0027]

[0034] The length "L4" of the upper part 334 may be, for example, approximately 35 mm to approximately 45 mm. More specifically, L4 may be, for example, approximately 39 mm.

[0028]

[0035] The height "L5" of station 330 may be, for example, approximately 10 mm to approximately 16 mm. More specifically, L5 may be, for example, approximately 13 mm.

[0029]

[0036] The height "L6" of the upper part 334 may be, for example, approximately 0.5 mm to approximately 4 mm. More specifically, L6 may be, for example, approximately 2 mm. Therefore, the height (L5-L6) of the lower part 332 may be, for example, approximately 9.5 mm to approximately 12 mm, more specifically, approximately 11 mm.

[0030]

[0037] The length "L7" of case 320 may be, for example, approximately 65 mm to approximately 75 mm. More specifically, L7 may be, for example, approximately 70 mm.

[0031]

[0038] The combined height "L8" of case 320 and station 330 may be, for example, approximately 44 mm to approximately 52 mm. More specifically, L8 may be, for example, approximately 47.75 mm. Therefore, the height of case 220 (L8-L5) may be, for example, approximately 34 mm to approximately 36 mm, and more specifically, for example, approximately 34.75 mm.

[0032]

[0039] The height "L9" of the tapered region 314 may be, for example, approximately 12 mm to approximately 22 mm. More specifically, L9 may be, for example, approximately 17.1 mm.

[0033]

[0040] The height "L10" of the cylindrical region 312 may be, for example, approximately 18 mm to approximately 28 mm. More specifically, L10 may be, for example, approximately 23 mm. Therefore, the height of the main body 310 (L9 + L10) may be, for example, approximately 30 mm to approximately 50 mm, and more specifically, for example, approximately 40.1 mm. Therefore, the total height of the unit 300 (L8 + L9 + L10) may be, for example, approximately 74 mm to approximately 102 mm, and more specifically, for example, approximately 87.85 mm.

[0034]

[0041] As further illustrated, the cylindrical region 312 includes multiple edges, including edge 316. For example, the dimensions of edge 316 may include, for example, a length of about 17 mm to about 27 mm and a width of, for example, about 1 mm to about 4 mm. More specifically, the dimensions of edge 316 may include, for example, a length of about 22 mm and a width of, for example, about 2.5 mm.

[0035]

[0042] As further illustrated, the tapered region 314 includes a first upper edge 318-1 and a second upper edge 318-2. The angle "A" between the first upper edge 318-1 and the second upper edge 318-2 may be, for example, about 80° to about 100°. More specifically, A may be, for example, about 90°.

[0036]

[0043] The length "L11" of the body 310, measured between the contact point of the first upper edge 318-1 to the case 320 and the contact point of the second upper edge 318-2 to the case 320, may be, for example, about 31.2 mm to about 41.2 mm. More specifically, L11 may be, for example, about 36.2 mm.

[0037]

[0044] Figure 4A is a cross-sectional view of a flathead unit ("unit") 400 according to several embodiments. In this exemplary example, the unit 400 is embodied as a flathead ball (FHB) unit in which the flathead unit movement support mechanism includes a set of balls. However, such embodiments should not be considered limiting.

[0038]

[0045] As shown in the figure, unit 400 includes a projection ("body") 1, a case 2, and a station 4. As will be described in more detail below, station 4 has a flat head that moves substantially freely around a center (e.g., XY movement). In this exemplary embodiment, case 2 is a circular case and station 4 has a circular flat head. Body 1 may be integrated into or fitted into an opening in a shaft including a hollow cylinder. In some embodiments, the shaft is an alignment shaft of the vision system for mask frame alignment.

[0039]

[0046] Case 2 houses several components. For example, Case 2 houses a lower support plate 3, a station 4, a ball retainer 5, a central structure 6, a spring-loaded flange 7, an upper support plate 8, a first screw 9, several second screws (not visible in cross-section) including screw 10, several third screws including screw 11, several balls including ball 12, and several tension springs including tension spring 13. More specifically, the second screws may include two screws, the third screws may include three screws, the balls may include nine balls, and the tension springs may include three tension springs.

[0040]

[0047] Station 4 is attached to the upper support plate 8 and the lower support plate 3 with a second screw, including screw 10. The lower support plate 3 may be located in a pocket within the upper support plate during assembly. The first screw 9 is inserted through the plates 3, 8 and the central structure 6, securing the plates 3, 8 within the unit 400.

[0041]

[0048] The balls are used to support the load of the mask placed on the unit 400 and to support the movement of the unit 400, and the ball retainer 5 is used to ensure the position of each ball in all situations. The spacing of the balls allows the load placed on the unit 400 to be distributed almost evenly. More specifically, each set of balls is placed in the respective region between each tension spring in case 2, as will be further described below with reference to Figures 5A to 5H. For example, if the balls include nine balls and the tension springs include three springs, the first set of three balls may be placed in a first region (e.g., a sector) defined between the first and second tension springs, the second set of three balls may be placed in a second region defined between the second and third tension springs, and the third set of three balls may be placed in a third region defined between the third and first tension springs. Therefore, in this exemplary embodiment, unit 400 is a flathead ball (FHB) unit, and the flathead unit movement support mechanism includes a set of balls.

[0042]

[0049] The tension springs are part of a centering component or centering mechanism that returns station 4 to the center when no load is applied to unit 400, as shown in Figure 4A. For example, as will be described in more detail below with reference to Figures 5A to 5H, each tension spring may have one end attached to the centering ring of the central structure 6 using a spring flange 7, and the other end attached to case 2. For example, if there are three tension springs, each of the three tension springs may be positioned at an angle of approximately 120° to each other. Further details regarding the configuration of the tension springs within unit 400 will be described below with reference to Figures 5A to 5H.

[0043]

[0050] In this exemplary embodiment, the centering component is implemented using a tension spring. However, the above embodiment should not be considered limiting. For example, a magnetic-based mechanism could be used instead of a tension spring to return station 4 to the center when no load is applied to unit 400.

[0044]

[0051] Case 2 is connected to the main body 1 using a plurality of third screws, including screw 11. The main body 1 may have suitable screw features to easily replace unit 400 with other mask frame support units (e.g., BTUs).

[0045]

[0052] The components of unit 400 may be formed from any suitable material(s) according to the embodiments described herein. For example, components 1, 3, and 4 may be formed from a suitable ceramic material, as an example. In some embodiments, the ceramic material may be aluminum oxide or alumina (Al2O3). However, the above embodiments should not be considered limiting.

[0046]

[0053] Components 2 and 5-11 may be formed from an alloy or other suitable material. In some embodiments, the alloy is an aluminum (Al) alloy. For example, the Al alloy may be a 6061Al alloy (e.g., a 6061-T6Al alloy).

[0047]

[0054] The plurality of balls, including ball 12, may be formed from any suitable material according to the embodiments described herein. For example, the plurality of balls may be formed from a ceramic material. In some embodiments, the plurality of balls may be formed from zirconium dioxide or zirconia (ZrO2). Each of the plurality of balls may have a diameter of, for example, about 4 mm to about 8.5 mm. More specifically, each of the plurality of balls may have a diameter of, for example, about 6.35 mm (or 0.25 inches). Further details regarding the configuration of the plurality of balls will be described below with reference to Figures 5A to 5H.

[0048]

[0055] Multiple tension springs can be formed from a suitable material (e.g., an alloy) that has excellent mechanical strength, especially at high temperatures, and high resistance to corrosion and / or oxidation. In some embodiments, multiple tension springs can be formed from a suitable nickel alloy. An example of a suitable nickel alloy is a nickel-molybdenum alloy. For example, multiple tension springs can be formed from a suitable nickel-molybdenum-chromium alloy. The above nickel-molybdenum-chromium alloy may contain a small amount of tungsten to obtain additional corrosion resistance.

[0049]

[0056] The first screw 9, the second screw including screw 10, and the third screw including screw 11 may each have any suitable dimensions according to the embodiments described herein. For example, the first screw 9 may have a diameter of, for example, about 2.5 mm to about 3.5 mm and a length of, for example, about 16 mm to about 20 mm (e.g., an M3 × 18 mm screw), the second screw 10 may have a diameter of, for example, about 3.5 mm to about 4.5 mm and a length of, for example, about 13 mm to about 17 mm (e.g., an M4 × 15 mm screw), and the third screw 11 may have a diameter of, for example, about 2.5 mm to about 3.5 mm and a length of, for example, about 4 mm to about 8 mm (e.g., an M3 × 6 mm screw).

[0050]

[0057] The first screw 9, the second screw including screw 10, and the third screw including screw 11 may be formed from any suitable material according to the embodiment described herein. An example of a suitable material is anodized aluminum. However, other equally suitable materials are possible.

[0051]

[0058] In Figure 4A, the unit 400 is in a neutral position where the center positions of the station 4, lower support plate 3, upper support plate 8, etc., indicated by line A-A', lie almost exactly on the same line as the center position of the main body 1, indicated by line B-B'. However, as will be described later with reference to Figure 4B, line A-A' can move away from the center position (for example, in any XY direction) depending on the load placed on the unit 400.

[0052]

[0059] Figure 4B is another cross-sectional view of unit 400 after it has moved from the neutral position shown in Figure 4A to the offset position. More specifically, in this illustrated example, line A-A' has moved to the right by a maximum distance "L" relative to line B-B'. In other embodiments, line A-A' may move to the left by a maximum distance L relative to line B-B', and in other embodiments, line A-A' may move "forward" or "backward" (e.g., toward or away from the page) by a maximum distance L relative to line B-B'. Thus, line A-A' may move away from line B-B' by a distance L in any suitable XY direction. When the load on unit 400 is removed, a centering component including a plurality of tension springs may return unit 400 from the offset position shown in Figure 4B to the neutral position shown in Figure 4A. That is, the centering component may automatically realign line A-A' to line B-B'.

[0053]

[0060] The maximum distance L is defined by the dimensions of the unit 400, as described in more detail above with reference to Figure 3. For example, in some embodiments, the maximum distance L is approximately 7.5 mm from the center position, so that the unit 400 can move up to approximately 7.5 mm from the center position in any XY direction.

[0054]

[0061] Figures 5A to 5H show process flows for manufacturing a flathead unit 500 according to several embodiments. The flathead unit 500 may be a mask frame support unit for supporting a mask frame. In this exemplary embodiment, the flathead unit 500 is a flathead ball (FHB) unit. However, the above embodiments should not be considered limiting.

[0055]

[0062] Figure 5A is a bottom view showing the flathead unit 500 including the case 502. The upper support plate 504 is inserted into the area 503 defined within the upper part of the case 502. The case 502 and the upper support plate 504 are the same as the case and upper support plate described above with reference to the drawings 4A to 4B.

[0056]

[0063] Figure 5B shows the insertion of the upper receiving plate 504, the insertion of the lower receiving plate 506 into the upper receiving plate 504, and the ball retainer 508 placed on the upper receiving plate 506. The lower receiving plate 506 and the ball retainer 508 are the same as the lower receiving plate and ball retainer described above with reference to Figures 4A to 4B.

[0057]

[0064] Figure 5C shows the arrangement of the ball retainer 508 on the upper receiving plate 506, the arrangement of the set of tension springs including the tension springs 510 between each gap of the ball retainer 508, and the centering ring 512 positioned in the region 509 defined by the ball retainer 508. The set of tension springs including the tension springs 510 and the centering ring 512 are the same as the set of tension springs and centering ring described above with reference to Figures 4A to 4B.

[0058]

[0065] Figure 5D shows the attachment of a centering ring 512 to each tension spring in a set of tension springs within region 509, and a center pin 514 positioned within the centering ring 512 to form a centering component or mechanism. The centering component is similar to the centering component described above with reference to Figures 4A to 4B.

[0059]

[0066] Figure 5E is a top view showing a flathead unit 500, with a bolt or screw 518 positioned through a hole 519 located in the upper part of the case 502 to secure the center pin 514. The screw 518 is similar to the first screw described above with reference to Figures 4A-4B.

[0060]

[0067] Figure 5F returns to the bottom view of the flathead unit 500 and shows a set of balls, including balls 520, each inserted into the respective locations of the ball retainer 508. In this exemplary embodiment, the set of balls includes nine balls. As further illustrated, the end of the screw 518 may be visible to and coplanar with respect to the center pin 514. The set of balls, including ball 520, is similar to the set of balls described above with reference to Figures 4A-4B.

[0061]

[0068] Figure 5G shows a projection ("body") 522 fixed to the bottom of the case 502 via a plurality of bolts or screws, including bolts or screws 524. The body 522 and the plurality of bolts or screws, including bolts or screws 524, are similar to the body and the plurality of third screws described above with reference to Figures 4A to 4B. As illustrated, the body 522 includes a tapered region 523 and a cylindrical region 525.

[0062]

[0069] Figure 5H is a top view showing the flathead unit 500, with station 526 fixed to the top of case 502 by screws including screw 528. Station 526 is similar to station, and the screws including screw 528 are similar to the multiple second screws described above with reference to Figures 4A-4B.

[0063]

[0070] The body 522 may be integrated into or fitted into an opening within a hollow cylinder. In some embodiments, the hollow cylinder is an alignment shaft of a vision system for mask frame alignment. In this exemplary embodiment, the cylindrical region 525 is designed to have threads so that the body 522 may be integrated into the hollow cylinder (e.g., “screwed into” the hollow cylinder) using a threaded locking mechanism. However, the body 522 may be integrated into the hollow cylinder by the embodiments described herein using any suitable integration mechanism.

[0064]

[0071] Figure 6 is a flowchart illustrating a method 600 for integrating a mask frame support unit within a mask alignment system according to several embodiments. For example, the unit assembly is similar to the unit described above with reference to Figures 2 to 5.

[0065]

[0072] In block 602, a mask frame support unit having a flat head is formed. In some embodiments, the mask frame support unit is a flat head ball (FHB) unit. For example, the mask frame support unit may be formed according to the process flow described above with reference to Figures 5A to 5H.

[0066]

[0073] In block 604, a mask frame support unit is installed within the mask alignment system. Installing the mask frame support unit may include integrating the protrusions of the mask frame support unit into the opening of the alignment shaft, which includes a hollow cylinder. More specifically, the alignment shaft may be an idle vision shaft.

[0067]

[0074] In block 606, the mask frame is positioned on the mask frame support unit. The mask frame support unit can support the weight of the mask frame while reducing or eliminating dents or other deformations. The mask frame support unit may include a centering component or mechanism to allow movement of the mask frame. For example, when removing the mask, the centering component can re-center the flathead unit.

[0068]

[0075] Further details regarding method 600, including the flathead unit and mask frame, are described above with reference to Figures 1 to 5.

[0069]

[0076] Figures 7A to 7C are top views of a mask alignment system 700 according to several embodiments. For example, 700 may include a vision system.

[0070]

[0077] Figure 7A shows an overview of the system 700. As shown, the system 700 includes a chamber body 710, a plurality of flathead units 720-1 to 720-6, a plurality of ball transfer units (BTUs) 730-1 and 730-2, and a mask frame 740 arranged on the plurality of flathead units 720-1 to 720-6 and the plurality of BTUs 730-1 and 730-2. Although six flathead units and two BTUs are shown, any suitable number of flathead units and / or BTUs may be used according to the embodiments described herein. In some embodiments, the plurality of flathead units 720-1 to 720-6 include flathead ball (FHB) units. Regions 750 corresponding to flathead unit 720-1 and region 760 corresponding to BTU 730-1 are also shown. Patterned mask sheets can be used to cover areas of a substrate, for example, during a coating process.

[0071]

[0078] Figure 7B is an enlarged view showing system 700 corresponding to region 750 shown in Figure 7A. Figure 7C is an enlarged view showing system 700 corresponding to region 760 shown in Figure 7B.

[0072]

[0079] The preceding description includes numerous specific details, such as examples of particular systems, components, and methods, to facilitate a better understanding of several embodiments of the present invention. However, it will be apparent to those skilled in the art that at least some embodiments of the present invention can be implemented without these specific details. In other examples, well-known components or methods are not described in detail or are presented in simple block diagram form, so as not to unnecessarily obscure the invention. Accordingly, the specific details described are merely illustrative. Specific implementations may differ from these exemplary details and may still be considered within the scope of the present invention.

[0073]

[0080] Throughout this specification, any reference to “one embodiment” or “a particular embodiment” means that a specific feature, structure, or characteristic described in relation to an embodiment is included in at least one embodiment. Therefore, not all occurrences of phrases such as “in one embodiment” or “in a particular embodiment” throughout this specification necessarily refer to the same embodiment. Furthermore, the term “or” is intended to mean inclusive, rather than exclusive. Where the terms “about” or “approximately” are used in this specification, it is intended that the presented nominal values ​​have an accuracy of ±10%.

[0074]

[0081] Although the steps of the methods described herein have been shown and described in a specific order, the order of the steps of each method may be modified so that certain steps can be performed in reverse order, or certain steps can be performed at least partially concurrently with other steps. In another embodiment, the instructions for separate steps or sub-steps may be in an intermittent and / or alternating form.

[0075]

[0082] It should be understood that the above description is for illustrative purposes only and not limiting. Many other implementations will become apparent to those skilled in the art by reading and understanding the above description. While this disclosure describes specific embodiments, it should be recognized that the systems and methods of this disclosure are not limited to the embodiments described herein and can be implemented with modifications within the scope of the appended claims. Therefore, this specification and the drawings are to be considered illustrative, not limiting. Accordingly, the scope of this disclosure should be determined by referring to the appended claims and together with the scope of all equivalents to which the above claims are entitled.

Claims

1. A mask frame support unit, Case and a protrusion extending downwardly from the case, the protrusion including a tapered region and a cylindrical region, the tapered region including a first end coupled to the case and having a first diameter, and a second end opposite the first end and having a second diameter, the second diameter being smaller than the first diameter, the tapered region coupled to the cylindrical region at the second end; a station having a flat head disposed above the case; Equipped with The case is an upper receiving plate contacting the station; a lower support plate disposed below the upper support plate; a flat head unit movement support mechanism disposed between the lower receiving plate and the protrusion; Centering parts and A mask frame support unit that houses multiple components including:

2. The mask frame support unit according to claim 1 , wherein the flat head movement support mechanism includes a set of balls disposed in a ball retainer.

3. 2. The mask frame support unit of claim 1, wherein the centering components include a set of tension springs, each having a first end attached to the case and a second end attached to a centering ring.

4. 2. The mask frame support unit according to claim 1, wherein the case is a circular case and the flat head is a circular flat head.

5. The mask frame support unit according to claim 1 , wherein the centering component centers the station in a neutral position in response to removal of a load placed on the station.

6. the protrusion has a height of about 30 mm to about 50 mm and a length of about 31.2 mm to about 41.2 mm; the case has a height of about 34 mm to about 36 mm and a length of about 65 mm to about 75 mm; 10. The mask frame support unit of claim 1, wherein the station has a height of about 10 mm to about 16 mm and a length of about 52 mm to about 60 mm.

7. the protrusion has a height of about 40.1 mm and a length of about 36.2 mm; The case has a height of about 34.75 mm and a length of about 70 mm; 7. The mask frame support unit of claim 6, wherein the station has a height of about 13 mm and a length of about 56 mm.

8. 1. A system comprising: Mask frame and an alignment shaft including a hollow cylinder having an opening; A plurality of mask frame support units including a flat head unit; The flat head unit comprises: Case and a protrusion extending downward from the case and integrated with the alignment shaft through the opening; a station having a flat head disposed above the case; Including, The case is an upper receiving plate contacting the station; a lower support plate disposed below the upper support plate; a flat head unit movement support mechanism disposed between the lower receiving plate and the protrusion; Centering parts and A system containing a plurality of components including:

9. The system of claim 8 , wherein the flat head movement support mechanism includes a set of balls disposed in a ball retainer.

10. 9. The system of claim 8, wherein the centering piece includes a set of tension springs each having a first end attached to the case and a second end attached to a centering ring.

11. 9. The system of claim 8, wherein the case is a circular case and the flat head is a circular flat head.

12. The system of claim 8 , wherein the plurality of mask frame support units includes six flat head support units and two ball transfer units.

13. 9. The system of claim 8, wherein the centering component centers the station in a neutral position in response to removal of the mask frame from the station.

14. the protrusion has a height of about 30 mm to about 50 mm and a length of about 31.2 mm to about 41.2 mm; the case has a height of about 34 mm to about 36 mm and a length of about 65 mm to about 75 mm; 9. The system of claim 8, wherein the station has a height of about 10 mm to about 16 mm and a length of about 52 mm to about 60 mm.

15. the protrusion includes a tapered region and a cylindrical region; the tapered region includes a first end coupled to the case and having a first diameter, and a second end opposite the first end and having a second diameter; the second diameter is smaller than the first diameter; The system of claim 8 , wherein the tapered region is joined to the cylindrical region at the second end.

16. 1. A method of forming a mask frame support unit, comprising: Inserting an upper receiving plate and a lower receiving plate into the case; forming a centering piece within the case; fixing a protrusion to the bottom of the case, the protrusion including a tapered region and a cylindrical region, the tapered region including a first end having a first diameter coupled to the case and a second end opposite the first end having a second diameter, the second diameter being smaller than the first diameter, the tapered region coupled to the cylindrical region at the second end; Fixing a station having a flat head to the top of the case; A method comprising:

17. forming the centering piece disposing a set of tension springs on the lower backing plate; attaching the set of tension springs to a centering ring; 17. The method of claim 16, comprising:

18. disposing a ball retainer including a plurality of ball positions on the upper backing plate, wherein each tension spring of the set of tension springs is disposed between a respective gap of the ball retainer; inserting a ball into each of the plurality of ball locations; 20. The method of claim 17, further comprising:

19. The method of claim 16 further comprising forming a center pin in the centering ring.

20. 17. The method of claim 16, further comprising installing a flat head unit in a mask alignment system including a mask frame, wherein installing the flat head unit comprises integrating the protrusion with an alignment shaft.

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