Substrate processing apparatus

Abstract

To improve the stability of holding of a substrate while suppressing the adhesion of a processing liquid to the lower surface of a substrate.SOLUTION: A substrate processing apparatus transmits gas between a lower surface 92 of a substrate 9 and a base surface 210 of a base portion 21 to form an airflow 93 radially outward, and causes the Bernoulli effect to generate a pressure drop in a space between the substrate 9 and the base portion 21. A second surface 212 of the base surface 210 faces upward as it goes radially outward. A third surface 213 extends downward as it goes radially outward from the outer peripheral edge of the second surface 212. The fourth surface 214 is an annular surface that is continuous with the lower edge of the third surface 213. The fourth surface 214 extends radially outward from the outer peripheral edge of the substrate 9 in the radial direction. Thereby, adhesion of a processing liquid to the lower surface 92 of the substrate 9 can be suppressed, and the stability of holding the substrate 9 can also be improved.SELECTED DRAWING: Figure 5

Description

Technical field

[0001] The present invention relates to a substrate processing apparatus for processing a substrate. [Background technology]

[0002] Conventionally, in the manufacturing process of semiconductor substrates (hereinafter simply referred to as "substrates"), various treatments are performed on the substrates. For example, liquid processing is performed on the substrate by rotating a substrate held by a substrate holding unit in a horizontal state and supplying a processing liquid to the surface of the rotating substrate.

[0003] In the wet etching apparatus of Patent Document 1, high pressure gas is supplied between the substrate and the support body located below the substrate as a substrate holding part that holds the substrate, and negative pressure caused by the gas flowing along the lower surface of the substrate is generated. A Bernoulli chuck is used to attract the substrate toward the support. The gas is supplied to the space between the substrate and the support from an annular nozzle formed on the upper surface of the support below the outer periphery of the substrate. The support body is provided with an annular gas discharge portion that extends from the annular nozzle to a radially outer side of the outer peripheral edge of the substrate and is spaced downward from the substrate. An annular gas exhaust flow path extending radially outward and downward from the annular nozzle is provided below the gas exhaust section.

[0004] In this wet etching apparatus, the etching liquid supplied to the upper surface of the substrate flows around from the outer peripheral edge of the substrate to the lower surface side, filling the gap between the peripheral edge of the lower surface of the substrate and the upper surface of the gas discharge part of the support. As a result, the etching process is performed on the peripheral portion of the lower surface of the substrate. The etching solution that has entered the lower surface of the substrate is discharged radially outward through the gas discharge channel. Further, the gas supplied between the substrate and the support from the annular nozzle is also discharged radially outward through the gas discharge channel. [Prior art documents] [Patent document]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 2009-142818 [Summary of the invention] [Problem to be solved by the invention]

[0006] By the way, in liquid processing for a substrate, unlike the etching process of Patent Document 1, there are cases where it is necessary to prevent the processing liquid supplied to the upper surface of the substrate from going around to the lower surface of the substrate. However, when the substrate is held by a Bernoulli chuck as in Patent Document 1, the negative pressure generated between the substrate and the support sucks the processing liquid, etc., which is supplied to the top surface of the substrate and flows down from the outer periphery of the substrate. There is a risk of it getting around to the bottom surface of the board.

[0007] On the other hand, if the flow rate of the gas supplied between the substrate and the support is increased to prevent the processing liquid from going around to the bottom surface of the substrate, the gas will push the substrate up and the stability of substrate holding by the Bernoulli chuck will be reduced. may decrease.

[0008] The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to improve the stability of holding a substrate while suppressing the adhesion of a processing liquid to the lower surface of the substrate. [Means to solve the problem]

[0009] The invention according to claim 1 is a substrate processing apparatus for processing a substrate, which comprises: a substrate holding section that holds the substrate in a horizontal state; and a substrate that rotates the substrate holding section about a central axis pointing in an up-down direction. The substrate holder includes a rotation mechanism and a processing liquid supply unit that supplies a processing liquid to the upper surface of the substrate, and the substrate holding unit is configured to face the lower surface of the substrate and extend radially outward from the outer peripheral edge of the substrate. a base portion having an extending base surface; a plurality of support pins arranged circumferentially on the base surface, protruding upward from the base surface, and contacting an outer peripheral portion of the lower surface of the substrate; and the substrate. A gas is sent between the lower surface of the substrate and the base surface of the base portion to form a radially outward airflow, and a pressure drop is created in the space between the substrate and the base portion due to the Bernoulli effect. the base surface includes a first surface that is a horizontal circular surface vertically facing the center of the substrate, and an outer peripheral edge of the first surface below the substrate. a second surface on which the plurality of support pins are arranged, and a second surface on which the plurality of support pins are arranged, and a second surface on which the plurality of support pins are arranged; a third surface that is an annular surface that is continuous with the outer peripheral edge of the second surface, and that extends vertically downward from the outer peripheral edge of the second surface, or that extends downward as it goes radially outward; and a fourth surface that is an annular surface that is continuous with the lower end edge of the third surface and that extends radially outward from the outer peripheral edge of the substrate, is provided with a circumferential gas outlet that is provided on the boundary between the first surface and the second surface or on the first surface and sends gas radially outward.

[0010] The invention according to claim 2 is the substrate processing apparatus according to claim 1, wherein the fourth surface extends at the same position in the vertical direction as the lower edge of the third surface, or As it goes radially outward from the lower end edge of the third surface, it goes downward.

[0011] The invention according to claim 3 is the substrate processing apparatus according to claim 1 or 2, wherein the base surface has an annular shape that extends downward as it goes radially outward from the outer peripheral edge of the fourth surface. It further comprises a fifth side.

[0012] The invention according to claim 4 is the substrate processing apparatus according to any one of claims 1 to 3, wherein the third surface faces radially outward from the outer peripheral edge of the second surface. It is a curved surface that is convex downward in the radial direction and convex upward in the radial direction.

[0013] The invention according to claim 5 is the substrate processing apparatus according to any one of claims 1 to 4, wherein the third surface is located at the outer peripheral edge of the second surface below the substrate. Continuous.

[0014] The invention according to claim 6 is the substrate processing apparatus according to claim 5, wherein a distance in a radial direction between a boundary between the second surface and the third surface and the outer peripheral edge of the substrate is provided. is 0.5 mm or more and 2.0 mm or less.

[0015] The invention according to claim 7 is the substrate processing apparatus according to any one of claims 1 to 6, wherein a boundary between the second surface and the third surface and the lower surface of the substrate The distance between them in the vertical direction is 0.6 mm or more and 1.0 mm or less.

[0016] The invention according to claim 8 is the substrate processing apparatus according to any one of claims 1 to 7, wherein the second surface is formed at a predetermined inclination angle from the outer peripheral edge of the first surface. The second surface is an inclined surface facing outward and upward in the radial direction, and the inclination angle of the second surface is 15° or less.

[0017] The invention according to claim 9 is the substrate processing apparatus according to any one of claims 1 to 8, wherein the length of the second surface in the radial direction is 10 mm or more.

[0018] The invention according to claim 10 is the substrate processing apparatus according to any one of claims 1 to 9, wherein the distance in the vertical direction between the first surface and the lower surface of the substrate is 0.6. mm or more and 1.5 mm or less.

Effect of the invention

[0019] According to the present invention, it is possible to improve the stability of holding the substrate while suppressing the adhesion of the processing liquid to the lower surface of the substrate. [Brief explanation of the drawing]

[0020]

Figure 1

Figure 2

[0021] FIG. 1 is a schematic plan view showing the layout of a substrate processing system 10 including a substrate processing apparatus according to one embodiment of the present invention. The substrate processing system 10 is a system that processes a semiconductor substrate 9 (hereinafter simply referred to as "substrate 9"). Substrate processing system 10 includes an indexer block 101 and a processing block 102 coupled to indexer block 101.

[0022] The indexer block 101 includes a carrier holding section 104, an indexer robot 105, and an IR moving mechanism 106. The carrier holding unit 104 holds a plurality of carriers 107 that can accommodate a plurality of substrates 9. A plurality of carriers 107 (for example, FOUPs) are held in carrier holding section 104 in a state where they are arranged in a predetermined carrier arrangement direction. The IR moving mechanism 106 moves the indexer robot 105 in the carrier arrangement direction. The indexer robot 105 performs an unloading operation for unloading the substrate 9 from the carrier 107, and an unloading operation for loading the substrate 9 into the carrier 107 held by the carrier holding section 104. The substrate 9 is transported in a horizontal position by the indexer robot 105.

[0023] The processing block 102 includes a plurality of (for example, four or more) processing units 108 that process the substrate 9 and a center robot 109. The plurality of processing units 108 are arranged so as to surround the central robot 109 in plan view. The plurality of processing units 108 perform various processing on the substrate 9. The substrate processing apparatus described below is one of the plurality of processing units 108. The center robot 109 performs a loading operation for loading the substrate 9 into the processing unit 108 and an unloading operation for loading the substrate 9 from the processing unit 108. Further, the center robot 109 transports the substrate 9 between the plurality of processing units 108. The substrate 9 is transported in a horizontal position by the central robot 109. The center robot 109 receives the substrate 9 from the indexer robot 105 and also passes the substrate 9 to the indexer robot 105.

[0024] FIG. 2 is a side view showing the configuration of the substrate processing apparatus 1. In FIG. 2, a part of the configuration of the substrate processing apparatus 1 is depicted in cross section. The substrate processing apparatus 1 is a single-wafer type apparatus that processes substrates 9 one by one. The substrate processing apparatus 1 supplies a processing liquid to a substrate 9 and performs liquid processing. In the liquid treatment, for example, foreign matter attached to the substrate 9 is removed (ie, cleaned) in a treatment before being carried into the substrate processing apparatus 1. The foreign matter is, for example, a residue remaining on the surface of the substrate 9 during a grinding process for the substrate 9. In the following description, the upper side and lower side in FIG. 2 are also simply referred to as "upper side" and "lower side."

[0025] The substrate processing apparatus 1 includes a substrate holding section 2, a substrate rotation mechanism 33, a cup section 4, a processing liquid supply section 51, a processing section moving mechanism 52, and a chamber 11. The substrate holding section 2, the substrate rotation mechanism 33, the cup section 4, the processing liquid supply section 51, and the like are housed in the internal space of the chamber 11. The canopy of the chamber 11 is provided with an airflow forming section 12 that supplies gas to the internal space and forms an airflow flowing downward (so-called downflow). As the airflow forming section 12, for example, an FFU (fan filter unit) is used. Note that in the reference measurement value, an airflow forming unit 12 other than the FFU may be provided.

[0026] The substrate holding section 2 and the substrate rotation mechanism 33 are each part of a spin chuck that holds and rotates the substantially disk-shaped substrate 9. The substrate holding section 2 holds the horizontal substrate 9 from below. The substrate holding unit 2 is a Bernoulli chuck that attracts and holds the substrate 9 using the Bernoulli effect. The substrate 9 is, for example, a substantially disk-shaped substrate with a diameter of 300 mm.

[0027] FIG. 3 is a plan view showing the substrate holding section 2. As shown in FIG. FIG. 4 is a cross-sectional view of the substrate holding part 2 taken along the line IV-IV in FIG. In FIG. 4, the substrate 9 held by the substrate holder 2 is indicated by a chain double-dashed line. As shown in FIGS. 3 and 4, the substrate holding section 2 includes a base section 21, a plurality of support pins 22, and a gas supply section .

[0028] The base portion 21 is a substantially disk-shaped member centered on a central axis J1 that faces in the vertical direction. The substrate 9 is arranged above the base part 21 and spaced apart from the base part 21. The upper main surface 210 (hereinafter also referred to as "base surface 210") of the base portion 21 is located at a position spaced downward from the lower main surface (hereinafter also referred to as "lower surface 92") of the substrate 9. , are vertically opposed to the lower surface 92 of the substrate 9. The diameter of the base portion 21 is larger than the diameter of the substrate 9, and the base surface 210 extends radially outward from the outer peripheral edge of the substrate 9 over the entire circumference.

[0029] The plurality of support pins 22 are arranged on the base surface 210 of the base portion 21 while being spaced apart from each other in a circumferential direction (hereinafter also simply referred to as the "circumferential direction") centered on the central axis J1. The plurality of support pins 22 are arranged on the same circumference centered on the central axis J1. For example, the plurality of support pins 22 are arranged at approximately equal angular intervals in the circumferential direction. In the example shown in FIG. 3, the number of the plurality of support pins 22 is thirty. The plurality of support pins 22 are protrusions that protrude upward from the base surface 210. The shape of each support pin 22 is, for example, approximately hemispherical. The plurality of support pins 22 are fixed to the base portion 21 and do not move relative to the base portion 21. The board holder 2 holds the board 9 in a substantially horizontal state without contacting the center of the bottom surface 92 of the board 9 by bringing the plurality of support pins 22 into contact with the outer periphery of the bottom surface 92 of the board 9 from below. and hold it.

[0030] The gas supply section 23 includes a plurality of gas outlet ports 232 provided on the base surface 210 of the base section 21. The plurality of gas outlet ports 232 are arranged at positions that overlap with the substrate 9 in a plan view and are spaced apart downward from the lower surface 92 of the substrate 9. The plurality of gas delivery ports 232 are arranged on the same circumference centered on the center axis J1 at positions radially outward from the center axis J1 while being spaced apart from each other in the circumferential direction. The number of gas delivery ports 232 is, for example, 150. The plurality of gas delivery ports 232 are arranged in a circumferential manner below the outer circumferential portion of the substrate 9 on the radially inner side than the plurality of support pins 22 .

[0031] The plurality of gas outlet ports 232 are connected to a gas supply source (not shown) via a gas flow path 231 provided inside the base portion 21. Gas is delivered from each gas delivery port 232 radially outward and upward (that is, diagonally upward). The shape of the gas delivery port 232 when viewed along the gas delivery direction from the gas delivery port 232 is, for example, approximately circular. The shape of the gas outlet 232 may be varied in various ways. Furthermore, the arrangement and number of gas delivery ports 232 may be varied in various ways.

[0032] The gas supply section 23 further includes a central gas outlet 234 provided at the center of the base surface 210. The central gas outlet 234 is, for example, one outlet that is spaced downward from the lower surface 92 of the substrate 9 at a position overlapping the central axis J1 in a plan view. The central gas outlet 234 is connected to the above-mentioned gas supply source via a gas passage 233 provided inside the base portion 21. From the central gas outlet 234, gas is sent out substantially vertically upward (that is, along the central axis J1). The shape of the central gas outlet 234 when viewed along the gas delivery direction from the central gas outlet 234 is, for example, approximately circular. The shape of the central gas outlet 234 may vary. Furthermore, the arrangement and number of central gas outlet ports 234 may be varied in various ways.

[0033] In the gas supply section 23, the space between the central gas outlet 234 and the plurality of gas outlet ports 232 and the lower surface 92 of the substrate 9 and the base surface 210 of the base section 21 (hereinafter also referred to as "lower space 90"). Gas is delivered to The gas is, for example, an inert gas such as nitrogen gas, or air. The gas is, for example, a high pressure gas or a compressed gas. Gas delivered from the central gas outlet 234 and the plurality of gas outlet ports 232 flows radially outward in the lower space 90. As a result, an airflow is formed in the lower space 90 from the radially central part (hereinafter also simply referred to as the "center part") radially outward, and a pressure drop occurs in the lower space 90 due to the Bernoulli effect caused by the airflow. . As a result, the substrate 9 is attracted to the substrate holding section 2. In other words, the atmospheric pressure in the lower space 90 becomes lower than the atmospheric pressure above the substrate 9 (that is, becomes negative pressure), and the substrate 9 is pressed against the plurality of support pins 22 of the substrate holding part 2 due to the difference in atmospheric pressure between the upper and lower sides. and its position is fixed (i.e., held).

[0034] When the substrate 9 is held by the substrate holder 2, the base portion 21, the central gas outlet 234, and the plurality of gas outlets 232 are spaced downward from the substrate 9 and are not in contact with the substrate 9. . Note that when the substrate 9 is not attracted to the substrate holder 2, the substrate 9 can be easily separated upward from the plurality of support pins 22, and when it is in contact with the plurality of support pins 22. It is also possible to move substantially horizontally (ie, slide laterally on the plurality of support pins 22).

[0035] In the substrate holding section 2, a plurality of lift pins and a plurality of centering pins (not shown) are provided on the base surface 210 of the base section 21. The plurality of lift pins and the plurality of centering pins are located radially outward from the plurality of support pins 22. The plurality of lift pins transfer the substrate 9 to and from the plurality of support pins 22 when carrying the substrate 9 into and out of the substrate processing apparatus 1. The plurality of centering pins adjust the horizontal position of the substrate 9 by horizontally pushing the outer peripheral edge of the substrate 9 placed on the plurality of support pins 22 and not attracted.

[0036] As shown in FIG. 2, the substrate rotation mechanism 33 is arranged below the substrate holder 2. As shown in FIG. The substrate rotation mechanism 33 rotates the substrate 9 together with the substrate holder 2 about the central axis J1. The substrate rotation mechanism 33 includes a shaft 331 and a motor 332. The shaft 331 is a substantially cylindrical member centered on the central axis J1. The shaft 331 extends in the vertical direction and is connected to the center portion of the lower surface of the base portion 21 of the substrate holding portion 2. Motor 332 is an electric rotary motor that rotates shaft 331. When the motor 332 rotates the shaft 331, the base portion 21 connected to the shaft 331 is also rotated. Note that the substrate rotation mechanism 33 may include a motor having another structure (for example, a hollow motor, etc.).

[0037] The cup portion 4 includes an annular cup 41 centered on the central axis J1. The cup 41 is arranged around the entire circumference of the substrate 9 and the substrate holder 2, and covers the sides of the substrate 9 and the substrate holder 2. The cup 41 is a liquid receiving container that receives liquid such as a processing liquid that scatters toward the surroundings from the rotating substrate 9. The cup 41 remains stationary in the circumferential direction and does not rotate, regardless of whether the substrate holder 2 rotates or stands still. A drain port (not shown) is provided at the bottom of the cup 41 to drain the processing liquid etc. received by the cup 41 to the outside of the chamber 11.

[0038] The cup 41 is moved in the vertical direction by a lifting mechanism (not shown). The elevating mechanism includes, for example, an electric linear motor, an air cylinder, or a ball screw and an electric rotary motor. The cup portion 4 may include a plurality of cups 41 stacked in the radial direction. When the cup section 4 includes a plurality of cups 41, the plurality of cups 41 can be independently moved in the vertical direction, and the plurality of cups 41 can be switched according to the type of processing liquid splashed from the substrate 9. Used to receive processing liquid.

[0039] The processing liquid supply unit 51 supplies a processing liquid (for example, a cleaning liquid) to the upper surface 91 of the substrate 9. The processing liquid supply section 51 includes an upper nozzle 511 that discharges the processing liquid toward the upper surface 91 of the substrate 9. The upper nozzle 511 is, for example, a two-fluid nozzle that mixes a processing liquid and a gas and sprays the processing liquid toward the upper surface 91 of the substrate 9. In the processing liquid supply section 51, the processing liquid is pulverized by colliding with a high-speed flow of gas, and the atomized state is sprayed onto the upper surface 91 of the substrate 9 at high speed. As a result, the upper surface 91 of the substrate 9 is physically cleaned, and foreign matter adhering to the upper surface 91 of the substrate 9 is removed. The processing liquid may be, for example, DIW or CO 2 It's water. The gas is, for example, an inert gas such as nitrogen gas, or air. The gas is, for example, a high pressure gas or a compressed gas.

[0040] The processing section moving mechanism 52 is a swinging mechanism that swings the upper nozzle 511 of the processing liquid supply section 51 substantially horizontally in the space above the substrate 9. The processing unit moving mechanism 52 includes an arm 521 and an arm rotation mechanism 522. Arm 521 is a rod-shaped member that extends substantially horizontally. The upper nozzle 511 is fixed to one end of the arm 521, and the other end is connected to an arm rotation mechanism 522 located outside the cup portion 4 in the radial direction. The arm rotation mechanism 522 rotates the arm 521 in a substantially horizontal direction about a rotation axis extending in the vertical direction.

[0041] The processing unit moving mechanism 52 moves the upper nozzle 511, which discharges processing liquid onto the rotating substrate 9, to a first position vertically facing the center of the upper surface 91 of the substrate 9, and to a position further than the first position. It is moved back and forth between a second position located on the outside in the radial direction. Preferably, the second position faces the outer peripheral portion of the upper surface 91 of the substrate 9 in the vertical direction. As a result, the above-described physical cleaning process is performed over substantially the entire upper surface 91 of the substrate 9. When the cleaning process is completed, the processing section moving mechanism 52 moves the upper nozzle 511 of the processing liquid supply section 51 from the space above the substrate 9 to a retracted position radially outside the outer peripheral edge of the substrate 9. The arm rotation mechanism 522 of the processing unit moving mechanism 52 includes, for example, an electric rotary motor. The processing unit moving mechanism 52 may have other structures.

[0042] As illustrated in FIG. 4, the base surface 210 of the base portion 21 extends radially outward from the central axis J1 substantially horizontally, and below the outer periphery of the substrate 9, extends radially outward and upward. It becomes an inclined surface. The base surface 210 is a horizontal surface that extends radially outward from the plurality of support pins 22 and extends substantially horizontally from a position radially outward from the outer peripheral edge of the substrate 9 in plan view. The base surface 210 extends radially outward and downward from the radially outer end of the horizontal surface.

[0043] As shown in FIGS. 3 and 4, the base surface 210 includes a first surface 211, a second surface 212, a third surface 213, a fourth surface 214, and a fifth surface 215. The first surface 211, the second surface 212, the third surface 213, the fourth surface 214, and the fifth surface 215 are continuous in this order radially outward from the central axis J1. The first surface 211 is a generally circular surface that extends approximately horizontally (that is, approximately perpendicularly to the central axis J1) about the central axis J1. The first surface 211 faces the center portion of the substrate 9 in the vertical direction.

[0044] The second surface 212 is a substantially annular surface extending radially outward from the substantially circumferential outer peripheral edge of the first surface 211 below the substrate 9. The outer peripheral edge of the first surface 211 (ie, the boundary between the first surface 211 and the second surface 212) overlaps the substrate 9 in a plan view. In the following description, "below the substrate 9" means a position that overlaps the substrate 9 in plan view and is lower than the lower surface 92 of the substrate 9 in the vertical direction. The second surface 212 is an inclined surface that slopes upward as it goes radially outward from the outer peripheral edge of the first surface 211. In the example shown in FIG. 4, the entire second surface 212 is located below the lower surface 92 of the substrate 9 in the vertical direction. The vertical cross section of the second surface 212 is substantially linear, and the inclination angle (acute angle) of the second surface 212 with respect to the horizontal direction is substantially constant. In other words, the second surface 212 is a flat inclined surface that extends upward in the radial direction from the outer peripheral edge of the first surface 211 at a predetermined inclination angle. Note that the second surface 212 may be, for example, a curved surface that is convex inward and upward in the radial direction.

[0045] On the second surface 212, the plurality of support pins 22 described above are arranged. The plurality of support pins 22 are located radially inward from the substantially circumferential outer peripheral edge of the second surface 212 (that is, the upper edge of the second surface 212), and protrude upward from the second surface 212. . Furthermore, the plurality of gas delivery ports 232 described above are provided on the boundary between the second surface 212 and the first surface 211, or on the first surface 211 on the radially inner side of the boundary.

[0046] The third surface 213 is a substantially annular surface that is continuous with the outer peripheral edge of the second surface 212 below the lower surface 92 of the substrate 9 in the vertical direction. In the example shown in FIG. 4, the outer peripheral edge of the second surface 212 (ie, the boundary between the second surface 212 and the third surface 213) overlaps the substrate 9 in plan view. In other words, the third surface 213 is continuous with the outer peripheral edge of the second surface 212 below the substrate 9. The third surface 213 is an inclined surface that slopes downward as it goes radially outward from the outer peripheral edge of the second surface 212. The third surface 213 is, for example, a curved surface that is convex radially outward and upward. That is, the inclination angle (acute angle) of the third surface 213 with respect to the horizontal direction increases as it goes radially outward. The third surface 213 is, for example, a part of the outer surface of a substantially toric body centered on the central axis J1.

[0047] Note that the third surface 213 may be a flat inclined surface with a substantially constant inclination angle, or may be a curved surface that is convex inward and downward in the radial direction. Further, the third surface 213 may be a surface extending substantially vertically downward from the outer peripheral edge of the second surface 212. In this case, the third surface 213 is a substantially cylindrical surface centered on the central axis J1.

[0048] The fourth surface 214 is a substantially annular surface that extends radially outward from the substantially circumferential lower end edge of the third surface 213. In the example shown in FIG. 4, the fourth surface 214 extends from the lower edge of the third surface 213 approximately horizontally. In other words, the fourth surface 214 is a horizontal surface that extends approximately perpendicularly to the central axis J1 at approximately the same position in the vertical direction as the lower edge of the third surface 213. The lower edge of the third surface 213 (ie, the boundary between the third surface 213 and the fourth surface 214) is located radially outward from the outer peripheral edge of the substrate 9. Therefore, the entire fourth surface 214 is located radially outward from the outer peripheral edge of the substrate 9. Note that when the third surface 213 is an inclined surface that extends radially outward and downward from the outer peripheral edge of the second surface 212, the boundary between the third surface 213 and the fourth surface 214 is the same as that of the third surface 213. It is also the outer periphery.

[0049] In the base surface 210, the fourth surface 214 may be an inclined surface that extends downward from the lower end edge of the third surface 213 as it goes radially outward. Furthermore, the boundary between the third surface 213 and the fourth surface 214 may be located at approximately the same position in the radial direction as the outer peripheral edge of the substrate 9. In this case, the inner circumferential edge of the fourth surface 214 overlaps the outer circumferential edge of the substrate 9 in plan view, and the portion other than the inner circumferential edge of the substrate 9 is located radially outward from the outer circumferential edge of the substrate 9, and Does not overlap with 9. In the base surface 210, the boundary between the third surface 213 and the fourth surface 214 may be located radially inward from the outer peripheral edge of the substrate 9. In this case, the inner periphery of the fourth surface 214 overlaps the outer periphery of the substrate 9 in plan view, and the parts other than the inner periphery of the substrate 9 are located radially outward from the outer periphery of the substrate 9, and It does not overlap with the substrate 9 at this point.

[0050] The fifth surface 215 is a substantially annular surface that extends radially outward from the substantially circumferential outer peripheral edge of the fourth surface 214. The outer peripheral edge of the fourth surface 214 (ie, the boundary between the fourth surface 214 and the fifth surface 215) is located radially outward than the outer peripheral edge of the substrate 9. The fifth surface 215 is an inclined surface that slopes downward as it goes radially outward from the outer peripheral edge of the fourth surface 214. In the example shown in FIG. 4, the vertical cross section of the fifth surface 215 is approximately linear, and the inclination angle (acute angle) of the fifth surface 215 with respect to the horizontal direction is approximately constant. Note that the fifth surface 215 may be, for example, a curved surface that is convex radially outward and upward.

[0051] FIG. 5 is an enlarged view of the vicinity of the outer circumference of the base portion 21. As shown in FIG. Since FIG. 5 is a longitudinal cross-sectional view of the base portion 21 at a position where the support pins 22 are not arranged, the support pins 22 are drawn with chain double-dashed lines in FIG. In the substrate processing apparatus 1, as described above, the gas sent out from the central gas outlet 234 (see FIG. 4) and the plurality of gas outlet ports 232 causes the gas to flow from the radially central portion to the radially outward in the lower space 90. A directed airflow is formed. Then, a pressure drop occurs in the lower space 90 due to the Bernoulli effect caused by the airflow, and the substrate 9 is attracted to the substrate holding part 2. In FIG. 5, the airflow is conceptually indicated by an arrow labeled 93. In the substrate processing apparatus 1, when the substrate 9 is rotated by the substrate rotation mechanism 33 (see FIG. 2), the speed of the airflow 93 is increased by centrifugal force. In other words, while the substrate 9 is rotating, the flow rate of gas radially outward in the lower space 90 increases. In this embodiment, the rotation speed of the substrate 9 is, for example, 200 rpm to 1500 rpm. The flow rate of gas supplied to the lower space 90 from the central gas outlet 234 and the plurality of gas outlet ports 232 is, for example, 270 L / min to 300 L / min.

[0052] Further, in the substrate processing apparatus 1, the gas on the upper surface 91 of the substrate 9 moves radially outward due to the centrifugal force caused by the rotation of the substrate 9. As a result, an airflow is formed on the upper surface 91 of the substrate 9 from the radially central portion to the radially outward direction. In FIG. 5, the airflow is conceptually indicated by an arrow labeled 94. The airflow 94 flowing radially outward along the upper surface 91 of the substrate 9 is caused to flow along the base surface 210 due to the Coanda effect generated between the substrate 9 and the base surface 210 on the radially outer side of the outer peripheral edge of the substrate 9. Flows radially outward and downward. As a result, a downward force acts on a portion near the outer periphery of the substrate 9, and the outer periphery of the substrate 9 is pressed against the plurality of support pins 22. As a result, the stability of holding the substrate 9 by the substrate holder 2 is improved. In other words, in the substrate processing apparatus 1, the substrate 9 is firmly held by the substrate holder 2 due to the Bernoulli effect caused by the airflow 93 and the Coanda effect caused by the airflow 94.

[0053] In the substrate processing apparatus 1, as described above, the processing liquid supplied onto the upper surface 91 of the substrate 9 moves radially outward due to the centrifugal force caused by the rotation of the substrate 9, and flows from the outer periphery of the substrate 9 in the radial direction. Scatter outward. The processing liquid near the outer periphery of the substrate 9 is subjected to a force directed toward the lower surface 92 of the substrate 9 due to the negative pressure caused by the Bernoulli effect described above. On the other hand, the processing liquid near the outer periphery of the substrate 9 is radially outward and downward from the outer periphery of the substrate 9 due to the airflow 94 flowing from the outer periphery of the substrate 9 along the base surface 210 due to the above-mentioned Coanda effect. There is also a force to move towards. This prevents the processing liquid on the upper surface 91 of the substrate 9 from flowing around and adhering to the lower surface 92 of the substrate 9.

[0054] In the substrate holding section 2, as described above, the second surface 212 of the base section 21 is an inclined surface that slopes upward as it goes radially outward below the outer circumference of the substrate 9. As a result, the vertical height (hereinafter also simply referred to as "height") of the lower space 90 is gradually decreased below the outer peripheral portion of the substrate 9, and the speed of the airflow 93 is increased. As a result, the attraction force of the substrate 9 due to the Bernoulli effect (that is, the force that presses the substrate 9 against the plurality of support pins 22 due to the Bernoulli effect) can be increased. In addition, since it is possible to secure a relatively large vertical distance between the first surface 211 and the lower surface 92 of the substrate 9, gas is sent out from the central gas outlet 234 (see FIG. 4) and the plurality of gas outlet ports 232. The substrate 9 can be prevented from being pushed upward by the gas.

[0055] In the substrate holder 2, by providing the third surface 213 that extends downward from the outer peripheral edge of the second surface 212, the force that presses the substrate 9 against the plurality of support pins 22 can be increased by the Coanda effect. As a result, the stability of holding the substrate 9 can be improved. Furthermore, the air flow 94 caused by the Coanda effect can guide the processing liquid on the upper surface 91 of the substrate 9 downward from the outer periphery, so that the processing liquid flows around the lower surface 92 (that is, from the outer periphery of the substrate 9 to the (inward movement) can be suppressed.

[0056] In the substrate holding part 2, by providing the fourth surface 214 that spreads radially outward from the outer periphery of the third surface 213, the airflow 94 directed downward from the outer periphery of the substrate 9 is prevented in the radial direction due to the Coanda effect. guided outward. Thereby, it is possible to further prevent the processing liquid on the upper surface 91 of the substrate 9 from going around and adhering to the lower surface 92 of the substrate 9. Furthermore, since the fourth surface 214 does not extend above the lower edge of the third surface 213, an airflow 94 directed radially outward and downward from the outer peripheral edge of the substrate 9 is preferably formed. Thereby, the stability of holding the substrate 9 can be further improved. Note that from the viewpoint of improving the stability of holding the substrate 9, it is preferable that no annular structure or the like protruding upward is provided on the fourth surface 214.

[0057] In the substrate holder 2, a fifth surface 215 is further provided that extends downward from the outer peripheral edge of the fourth surface 214 in a radial direction outward. Airflow 93 is guided diagonally downward. Thereby, it is possible to suppress the occurrence of turbulent flow due to collision (that is, merging) between the airflow 93 and the airflow 94 directed radially outward and downward from the outer peripheral edge of the substrate 9. As a result, downward pressing of the outer peripheral portion of the substrate 9 due to the Coanda effect can be suitably realized, and the stability of holding the substrate 9 can be further improved.

[0058] As shown in FIG. 6, in the substrate holder 2, the boundary between the second surface 212 and the third surface 213 located below the substrate 9 (that is, the inner peripheral edge of the third surface 213) and the outer peripheral edge of the substrate 9 Letting L1 be the distance in the radial direction between the two, the distance L1 is preferably 0.5 mm or more and 2.0 mm or less. Since the distance L1 is 0.5 mm or more, the airflow 93 (see FIG. 5) that has passed through the boundary between the second surface 212 and the third surface 213 in a radial outward direction is It is possible to suppress the direction from moving outward and upward. This makes it possible to prevent the airflow 93 and the airflow 94 due to the Coanda effect (see FIG. 5) from colliding near the outer peripheral edge of the substrate 9 and generating turbulence. As a result, downward pressing of the outer peripheral portion of the substrate 9 due to the Coanda effect can be suitably realized, and the stability of holding the substrate 9 can be further improved. On the other hand, by setting the distance L1 to 2.0 mm or less, the adsorption force due to the Bernoulli effect can be suitably applied to the vicinity of the outer peripheral edge of the substrate 9. As a result, the stability of holding the substrate 9 can be further improved.

[0059] In the substrate holder 2, the distance L2 in the vertical direction between the boundary between the second surface 212 and the third surface 213 and the lower surface 92 of the substrate 9 is preferably 0.6 mm or more and 1.0 mm or less. By setting the distance L2 to 0.6 mm or more, it is possible to suppress the speed of the airflow 93 passing through the boundary between the second surface 212 and the third surface 213 radially outward from becoming excessive. Thereby, it is possible to suppress the occurrence of turbulence caused by collision between the airflow 93 and the airflow 94 due to the Coanda effect near the outer peripheral edge of the substrate 9. As a result, downward pressing of the outer peripheral portion of the substrate 9 due to the Coanda effect can be suitably realized, and the stability of holding the substrate 9 can be further improved. On the other hand, by setting the distance L2 to 1.0 mm or less, it is possible to suppress a decrease in the speed of the airflow 93 below the outer circumferential portion of the substrate 9, and to suppress the attraction force of the substrate 9 due to the Bernoulli effect from becoming too small. Further, it is possible to suitably suppress the processing liquid near the outer peripheral edge of the substrate 9 from flowing around to the lower surface 92 of the substrate 9 due to the negative pressure caused by the Bernoulli effect. As a result, adhesion of the processing liquid to the lower surface 92 of the substrate 9 can be further suppressed.

[0060] In the substrate holder 2, the above-mentioned inclination angle θ of the second surface 212 is preferably 15° or less. Thereby, excessive pressure rise in the lower space 90 near the plurality of support pins 22 can be suppressed. As a result, the adsorption of the substrate 9 due to the Bernoulli effect is prevented from being inhibited by the above-described excessive pressure rise, and the stability of holding the substrate 9 can be further improved. Note that when the second surface 212 is a curved surface that is convex inward and upward in the radial direction, the above-mentioned inclination angle θ is such that the second surface 212 This is the angle (acute angle) formed by a virtual straight line connecting the inner and outer peripheral edges of the rim and a straight line extending in the horizontal direction. The lower limit of the inclination angle θ of the second surface 212 is not particularly limited, but realistically, the inclination angle θ is 10° or more.

[0061] In the substrate holder 2, the radial length L3 of the second surface 212 (that is, the shortest distance in the radial direction between the inner circumferential edge and the outer circumferential edge of the second surface 212) is preferably 10 mm or more. Thereby, the velocity of the airflow 93 can be increased below the outer peripheral portion of the substrate 9 without making the inclination angle θ of the second surface 212 excessively large. As a result, the adsorption force of the substrate 9 due to the Bernoulli effect can be suitably increased, and the stability of holding the substrate 9 can be further improved. Although the upper limit of the radial length L3 of the second surface 212 is not particularly limited, realistically, the length L3 is 20 mm or less.

[0062] In the substrate holder 2, the distance L4 in the vertical direction between the first surface 211 and the lower surface 92 of the substrate 9 is preferably 0.6 mm or more and 1.5 mm or less. By setting the distance L4 to 0.6 mm or more, it is possible to suppress the substrate 9 from being pushed upward by the gas sent out from the central gas outlet 234 (see FIG. 4) and the plurality of gas outlet ports 232. . Further, by setting the distance L4 to 1.5 mm or less, it is possible to suppress a decrease in the speed of the airflow 93 below the substrate 9, and to suppress the attraction force of the substrate 9 due to the Bernoulli effect from becoming too small. As a result, the stability of holding the substrate 9 can be further improved.

[0063] In the substrate holder 2, the height L5 of the third surface 213 in the vertical direction (that is, the distance in the vertical direction between the upper edge and the lower edge of the third surface 213) is preferably 1 mm or more. Thereby, the Coanda effect can be strengthened and the stability of holding the substrate 9 can be further improved. Although the upper limit of the height L5 of the third surface 213 is not particularly limited, realistically, the height L5 is 10 mm or less.

[0064] As described above, the substrate processing apparatus 1 that processes the substrate 9 includes the substrate holding section 2, the substrate rotation mechanism 33, and the processing liquid supply section 5. The substrate holding section 2 holds the substrate 9 in a horizontal state. The substrate rotation mechanism 33 rotates the substrate holder 2 about a central axis J1 that faces in the vertical direction. The processing liquid supply unit 5 supplies a processing liquid to the upper surface 91 of the substrate 9. The substrate holding section 2 includes a base section 21, a plurality of support pins 22, and a gas supply section 23. The base portion 21 faces the lower surface 92 of the substrate 9. The base portion 21 has a base surface 210 extending radially outward from the outer peripheral edge of the substrate 9. The plurality of support pins 22 are arranged on the base surface 210 in the circumferential direction. The plurality of support pins 22 protrude upward from the base surface 210 and contact the outer periphery of the lower surface 92 of the substrate 9. The gas supply section 23 sends gas between the lower surface 92 of the substrate 9 and the base surface 210 of the base section 21 to form an airflow 93 radially outward, and the Bernoulli effect causes the substrate 9 and the base section 21 to (i.e., the lower space 90).

[0065] The base surface 210 includes a first surface 211, a second surface 212, a third surface 213, and a fourth surface 214. The first surface 211 is a horizontal circular surface that faces the center portion of the substrate 9 in the vertical direction. The second surface 212 is an annular surface extending radially outward from the outer peripheral edge of the first surface 211 below the substrate 9. The second surface 212 faces upward as it goes radially outward. On the second surface 212, the plurality of support pins 22 described above are arranged. The third surface 213 is an annular surface that is continuous with the outer peripheral edge of the second surface 212 below the lower surface 92 of the substrate 9. The third surface 213 extends vertically downward from the outer peripheral edge of the second surface 212. Alternatively, the third surface 213 extends downward as it goes radially outward from the outer peripheral edge of the second surface 212. The fourth surface 214 is an annular surface that is continuous with the lower edge of the third surface 213. The fourth surface 214 extends radially outward from the outer peripheral edge of the substrate 9 in the radial direction. The gas supply section 23 includes a circumferential gas outlet 232 that is provided on the boundary between the first surface 211 and the second surface 212 or in the first surface 211 and that transmits gas radially outward. .

[0066] In the substrate processing apparatus 1, as described above, the Bernoulli effect caused by the airflow 93 and the airflow 94 caused by the Coanda effect can suppress the adhesion of the processing liquid to the lower surface 92 of the substrate 9, and hold the substrate 9. It is also possible to improve the stability of

[0067] In the substrate processing apparatus 1, the fourth surface 214 spreads at the same position in the vertical direction as the lower edge of the third surface 213, or extends downward as it goes radially outward from the lower edge of the third surface 213. It is preferable. Thereby, as described above, the airflow 94 directed downward from the outer peripheral edge of the substrate 9 due to the Coanda effect is suitably guided radially outward. As a result, adhesion of the processing liquid to the lower surface 92 of the substrate 9 can be further suppressed, and the stability of holding the substrate 9 can also be further improved.

[0068] In the substrate processing apparatus 1, it is preferable that the base surface 210 further includes an annular fifth surface 215 that extends downward in the radial direction from the outer peripheral edge of the fourth surface 214. Thereby, as described above, the Coanda effect can be strengthened and the stability of holding the substrate 9 can be further improved.

[0069] As described above, the third surface 213 is a curved surface that extends downward from the outer peripheral edge of the second surface 212 as it goes radially outward and convexes outward and upward in the radial direction. preferable. Thereby, the Coanda effect can be strengthened and the stability of holding the substrate 9 can be further improved.

[0070] 7A to 7C are diagrams obtained by CFD (Computational Fluid Dynamics) simulation of the gas flow when the shape of the third surface 213 is changed. 7A to 7C show the flow of gas near the outer periphery of the substrate 9. FIG. The CFD simulation was performed using Ansys Fluent manufactured by Ansys, with the rotation speed of the substrate 9 being 1500 rpm and the gas supply flow rate from the gas supply unit 23 (see FIG. 4) to the lower space 90 being 300 L / min. Note that in FIGS. 7A to 7C, the shape of the second surface 212 is slightly different from the above example, but the tendency of the CFD simulation results is not significantly different.

[0071] In FIG. 7A, the third surface 213 is a curved surface that expands radially outward and downward from the outer peripheral edge of the second surface 212 and is convex radially outward and upward. The inclination angle of the third surface 213 with respect to the horizontal direction (i.e., in the longitudinal section of the substrate holder 2 passing through the central axis J1, the angle of inclination between the virtual straight line connecting the inner and outer edges of the third surface 213 and the horizontal direction) The angle (acute angle) formed with the straight line is approximately 50°. In FIG. 7B, the third surface 213 is a flat inclined surface that extends radially outward and downward from the outer peripheral edge of the second surface 212. The angle of inclination of the third surface 213 with respect to the horizontal direction is approximately 45°. The inclination angle of the third surface 213 shown in FIGS. 7A and 7B is preferably 30° or more from the viewpoint of suitably producing the above-mentioned Coanda effect. In FIG. 7C, the third surface 213 is a cylindrical surface that extends vertically downward from the outer peripheral edge of the second surface 212. In FIG.

[0072] As shown in FIGS. 7A to 7C, when the third surface 213 is the above-mentioned curved surface (corresponding to FIG. 7A), the substrate It can be seen that the gas flow from above 9 to the outside in the radial direction is most concave downward, indicating that the above-mentioned Coanda effect is the largest. The holding force (i.e., adsorption force) that acts on the substrate 9 when the third surface 213 is the above-mentioned curved surface is the same as when the third surface 213 is the above-mentioned inclined surface or the above-mentioned cylindrical surface (corresponding to FIG. 7B or 7C). ) was approximately 1% to 2% larger than the holding force.

[0073] In the substrate processing apparatus 1, it is preferable that the third surface 213 is continuous with the outer peripheral edge of the second surface 212 below the substrate 9. As a result, the airflow 93 (see FIG. 5) that passes through the boundary between the second surface 212 and the third surface 213 radially outward, and the Coanda effect causes the airflow 93 to flow radially outward and downward from the outer peripheral edge of the substrate 9. It is possible to suppress the generation of turbulent flow due to collision of the airflow 94 (see FIG. 5) toward the substrate 9 near the outer peripheral edge of the substrate 9. Therefore, downward pressing of the outer peripheral portion of the substrate 9 due to the Coanda effect can be suitably realized, and the stability of holding the substrate 9 can be further improved.

[0074] 8A to 8C are diagrams obtained by CFD simulation of the gas flow when the positional relationship between the boundary between the second surface 212 and the third surface 213 and the outer peripheral edge of the substrate 9 is changed. In FIGS. 8A to 8C, the CFD simulation showing the gas flow near the outer circumference of the substrate 9 is performed using Ansys Fluent manufactured by Ansys, with the rotation speed of the substrate 9 being 1000 rpm, and flowing from the gas supply section 23 to the lower space 90. The gas supply flow rate was set to 300 L / min. Note that in FIGS. 8A to 8C, the shapes of the second surface 212 and the third surface 213 are slightly different from the above example, but the trends of the CFD simulation results are not significantly different.

[0075] In FIG. 8A, the boundary between the second surface 212 and the third surface 213 is located below the substrate 9, and the distance L1 described above (i.e., between the boundary between the second surface 212 and the third surface 213 and the outside of the substrate 9). The distance from the periphery in the radial direction) is 0.5 mm. In FIG. 8B, the boundary between the second surface 212 and the third surface 213 is located below the substrate 9, and the distance L1 is 3.5 mm. In FIG. 8C, the boundary between the second surface 212 and the third surface 213 is not located below the substrate 9, but is located radially outward from the outer peripheral edge of the substrate 9. The boundary between the second surface 212 and the third surface 213 is located 3.0 mm radially outward from the position shown in FIG. 8A.

[0076] As shown in FIG. 8C, if the boundary between the second surface 212 and the third surface 213 is not located below the substrate 9, near the outer periphery of the substrate 9 (i.e., radially outside the outer periphery of the substrate 9) At this point, the flow of gas from above the substrate 9 toward the outside in the radial direction and the flow of gas from below the substrate 9 toward the outside in the radial direction collide, resulting in turbulent flow. On the other hand, as shown in FIGS. 8A and 8B, when the boundary between the second surface 212 and the third surface 213 is located below the substrate 9, a radius from above the substrate 9 is placed near the outer periphery of the substrate 9. Collision between the gas flow directed outward in the direction and the gas flow directed outward in the radial direction from below the substrate 9 is suppressed. As a result, downward pressing of the outer periphery of the substrate 9 by the Coanda effect is suitably realized, and stability in holding the substrate 9 is improved. The holding force (i.e., adsorption force) that acts on the substrate 9 when the boundary between the second surface 212 and the third surface 213 is located below the substrate 9 is It was approximately 7% to 8% larger than the holding force without it.

[0077] Furthermore, as shown in Figures 8A and 8B, if the distance L1 is 0.5 mm or more and 2.0 mm or less (corresponding to Figure 8A), or if the distance L1 is greater than 2.0 mm (corresponding to Figure 8B) Compared to this, the gas flow from above the substrate 9 toward the outside in the radial direction is greatly depressed downward near the outer peripheral edge of the substrate 9. Therefore, it can be seen that when the distance L1 is 0.5 mm or more and 2.0 mm or less, the above-mentioned Coanda effect increases and the stability of holding the substrate 9 improves.

[0078] Various modifications can be made to the substrate processing apparatus 1 described above.

[0079] For example, the number and shape of the support pins 22 are not limited to the above example, and may be changed in various ways. Further, the number, shape, and arrangement of the gas delivery ports 232 are not limited to the above example, and may be changed in various ways. For example, instead of the plurality of gas outlet ports 232, one substantially annular gas outlet centering on the central axis J1 may be provided on the base surface 210.

[0080] In the substrate holding section 2, the shape and dimensions of the base surface 210 are not limited to the above example, and may be changed in various ways. For example, the distance L4 in the vertical direction between the first surface 211 and the lower surface 92 of the substrate 9 may be less than 0.6 mm or larger than 1.5 mm. Furthermore, the distance L2 in the vertical direction between the boundary between the second surface 212 and the third surface 213 and the lower surface 92 of the substrate 9 may be less than 0.6 mm or larger than 1.0 mm. The distance L1 in the radial direction between the boundary between the second surface 212 and the third surface 213 and the outer peripheral edge of the substrate 9 may be less than 0.5 mm or larger than 2.0 mm.

[0081] In the substrate holder 2, the radial length L3 of the second surface 212 may be less than 10 mm. Further, the inclination angle θ of the second surface 212 may be larger than 15°. The second surface 212 does not necessarily have to be sloped over the entire area from the inner circumferential edge to the outer circumferential edge; for example, a portion of the second surface 212 near the outer circumferential edge is a horizontal plane substantially perpendicular to the central axis J1. There may be. In this case, a plurality of support pins 22 may be arranged on the horizontal plane.

[0082] In the substrate holder 2, the third surface 213 may be continuous with the outer periphery of the second surface 212 on the radially outer side than the outer periphery of the substrate 9.

[0083] In the substrate holder 2, the fourth surface 214 may widen upward as it goes radially outward from the lower end edge of the third surface 213. Furthermore, the base surface 210 does not need to include the fifth surface 215.

[0084] In the above example, the substrate 9 processed by the substrate processing apparatus 1 was described as having a substantially uniform thickness in the vertical direction over substantially the entire surface, but the present invention is not limited to this. For example, the substrate 9 may be a substrate in which the outer peripheral portion is thicker than the region inside the outer peripheral portion (hereinafter also referred to as the “main portion”). The upper surface 91 of the substrate 9 is, for example, recessed downward in the main portion relative to the outer peripheral portion. The substrate 9 is formed, for example, by grinding (ie, grinding) a portion corresponding to the main portion of a substrate having a substantially uniform thickness.

[0085] In addition to semiconductor substrates, the substrate processing apparatus 1 processes glass substrates used in flat panel displays such as liquid crystal display devices or organic EL (Electro Luminescence) display devices, or other display devices. It may also be used for processing glass substrates. Further, the above-described substrate processing apparatus 1 may be used to process optical disk substrates, magnetic disk substrates, magneto-optical disk substrates, photomask substrates, ceramic substrates, solar cell substrates, and the like.

[0086] The configurations of the above embodiment and each modification may be combined as appropriate unless mutually contradictory. [Explanation of symbols]

[0087] 1 Substrate processing equipment 2 Board holding part 5 Processing liquid supply section 9 board 21 Base part 22 Support pin 23 Gas supply section 33 Substrate rotation mechanism 51 Processing liquid supply section 90 Downward space 91 Top surface (of the board) 92 Bottom surface (of the board) 210 Base surface 211 Page 1 212 2nd page 213 Page 3 214 Page 4 215 Page 5 232 Gas outlet J1 center axis

Claims

1. A substrate processing apparatus for processing a substrate, a substrate holder that holds the substrate in a horizontal state; a substrate rotation mechanism that rotates the substrate holder about a central axis facing in the vertical direction; a processing liquid supply unit that supplies a processing liquid to the upper surface of the substrate; Equipped with The substrate holder includes: a base portion having a base surface facing a lower surface of the substrate and extending radially outward from an outer peripheral edge of the substrate; a plurality of support pins arranged in a circumferential direction on the base surface, protruding upward from the base surface, and contacting an outer periphery of the lower surface of the substrate; a gas supply unit that supplies gas between the lower surface of the substrate and the base surface of the base unit to form an airflow that flows radially outward, thereby causing a pressure drop in a space between the substrate and the base unit by the Bernoulli effect; Equipped with The base surface is a first surface that is a horizontal circular surface that faces a central portion of the substrate in the up-down direction; a second surface that is an annular surface that extends radially outward from an outer circumferential edge of the first surface below the substrate, that extends radially outward and upward, and on which the plurality of support pins are arranged; a third surface that is an annular surface that is continuous with the outer peripheral edge of the second surface below the lower surface of the substrate and that extends vertically downward from the outer peripheral edge of the second surface or that extends downward as it extends radially outward; a fourth surface that is an annular surface that is continuous with the lower edge of the third surface and that extends radially outward beyond the outer circumferential edge of the substrate; Equipped with The substrate processing apparatus is characterized in that the gas supply unit has a circular gas outlet provided on the boundary between the first surface and the second surface or on the first surface, which delivers gas radially outward.

2. The substrate processing apparatus according to claim 1 , A substrate processing apparatus characterized in that the fourth surface extends at the same vertical position as the lower edge of the third surface, or extends downward as it extends radially outward from the lower edge of the third surface.

3. 3. The substrate processing apparatus according to claim 1, The substrate processing apparatus according to claim 1, wherein the base surface further includes a fifth surface having an annular shape that extends downward from an outer circumferential edge of the fourth surface toward the outside in the radial direction.

4. 4. The substrate processing apparatus according to claim 1, The substrate processing apparatus is characterized in that the third surface is a curved surface that extends downward as it extends radially outward from the outer peripheral edge of the second surface, and that is convex radially outward and upward.

5. 5. The substrate processing apparatus according to claim 1, The substrate processing apparatus according to claim 1, wherein the third surface is continuous with the outer periphery of the second surface below the substrate.

6. 6. The substrate processing apparatus according to claim 5, 10. The substrate processing apparatus according to claim 9, wherein the radial distance between the boundary between the second surface and the third surface and the outer periphery of the substrate is 0.5 mm or more and 2.0 mm or less.

7. 7. The substrate processing apparatus according to claim 1, 10. The substrate processing apparatus according to claim 1, wherein the distance in the vertical direction between the boundary between the second surface and the third surface and the lower surface of the substrate is 0.6 mm or more and 1.0 mm or less.

8. 8. The substrate processing apparatus according to claim 1, the second surface is an inclined surface extending radially outward and upward from the outer circumferential edge of the first surface at a predetermined inclination angle, The substrate processing apparatus according to claim 1, wherein the inclination angle of the second surface is 15° or less.

9. 9. The substrate processing apparatus according to claim 1, The substrate processing apparatus is characterized in that the radial length of the second surface is 10 mm or more.

10. 10. The substrate processing apparatus according to claim 1, 10. The substrate processing apparatus according to claim 9, wherein the distance in the vertical direction between the first surface and the lower surface of the substrate is 0.6 mm or more and 1.5 mm or less.

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