Barrel manufacturing method and probe

Abstract

To allow for suppressing the inclination of a plunger relative to a center axis of a probe.SOLUTION: A probe 100 provided herein comprises a second plunger 120 and a barrel 140. The barrel 140 is provided with an opening 146a for allowing at least a portion of the second plunger 120 to protrude therefrom. An inner surface of the opening 146a is substantially parallel to an axial direction of the second plunger 120.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a probe. [Background technology]

[0002] In recent years, various probes have been developed. The probe includes a barrel and a plunger. The barrel has a locking portion that locks the probe. The locking portion has an opening through which at least a portion of the plunger protrudes. For example, in the probe described in Patent Document 1, the locking portion is formed by crimping one end of the barrel. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-43100 Summary of the Invention [Problem to be solved by the invention]

[0004] For example, as described in Patent Document 1, the locking portion may be formed by crimping. In this case, the inner surface of the opening provided in the locking portion may be inclined with respect to the central axis of the probe. Therefore, the plunger is likely to be inclined with respect to the central axis of the probe.

[0005] One example of an object of the present invention is to suppress tilt of the plunger relative to the central axis of the probe. Other objects of the present invention will become apparent from the description of this specification. [Means for solving the problem]

[0006] One aspect of the present invention is A plunger; a barrel having an opening through which at least a portion of the plunger projects; Equipped with The probe has an inner surface of the opening that is substantially parallel to the axial direction of the plunger. [Effects of the Invention]

[0007] According to the above aspect of the present invention, it is possible to suppress tilt of the plunger relative to the central axis of the probe. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 2 is a cross-sectional view of a probe head according to an embodiment. [Figure 2] FIG. 2 is a cross-sectional view of a portion of a probe according to an embodiment. [Figure 3] FIG. 10 is a cross-sectional view of a barrel according to a comparative example. [Figure 4] 5A to 5C are diagrams for explaining a method for manufacturing a barrel according to an embodiment. [Figure 5] 5A to 5C are diagrams for explaining a method for manufacturing a barrel according to an embodiment. [Figure 6] 5A to 5C are diagrams for explaining a method for manufacturing a barrel according to an embodiment. [Figure 7] 5A to 5C are diagrams for explaining a method for manufacturing a barrel according to an embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all the drawings, similar components are designated by similar reference numerals, and the description thereof will be omitted as appropriate.

[0010] In this specification, ordinal numbers such as "first," "second," and "third" are used merely to distinguish between similarly named configurations, unless otherwise specified, and do not imply any particular characteristics (e.g., order or importance) of the configurations.

[0011] Fig. 1 is a cross-sectional view of a probe head 10 according to an embodiment. Fig. 2 is a cross-sectional view of a portion of a probe 100 according to an embodiment. In the example shown in Fig. 1, an object under test 20 and a test substrate 30 are electrically connected via the probe head 10. For the sake of explanation, an imaginary line IL indicating the central axis of the probe 100 is depicted by a dashed line in Figs. 1 and 2.

[0012] In Figures 1 and 2, the arrows marked with "+Z" indicate the direction from the side where the test substrate 30 is located to the side where the test object 20 is located. Specifically, in the embodiment, the arrows marked with "+Z" indicate the direction from below to above in the vertical direction. The arrows marked with "-Z" indicate the direction from the side where the test object 20 is located to the side where the test substrate 30 is located. Specifically, in the embodiment, the arrows marked with "-Z" indicate the direction from above to below in the vertical direction. Hereinafter, the direction perpendicular to the vertical direction will be referred to as the horizontal direction as necessary.

[0013] The probe head 10 will be described with reference to FIG. 1 and, if necessary, FIG.

[0014] The probe head 10 includes a probe 100 and an insulating support 200. The probe 100 includes a first plunger 110, a second plunger 120, a coil spring 130, and a barrel 140. The insulating support 200 includes a lower insulating support 210 and an upper insulating support 220. At least a portion of the insulating support 200 may be made of metal, or at least a portion of the surface of an insulator may be covered with metal.

[0015] The first plunger 110 is biased in a direction away from the second plunger 120 by a coil spring 130 shown in Fig. 2. Specifically, the first plunger 110 is biased upward. Therefore, the upper end of the first plunger 110 can come into contact with the electrode 22 of the test object 20 while the first plunger 110 is biased upward.

[0016] The second plunger 120 is biased in a direction away from the first plunger 110 by a coil spring 130 shown in Fig. 2. Specifically, the second plunger 120 is biased downward. Therefore, the lower end of the second plunger 120 can come into contact with the pad 32 of the test board 30 while the second plunger 120 is biased downward.

[0017] The barrel 140 extends substantially parallel to the vertical direction. A first plunger 110 is provided at the upper end of the barrel 140. A second plunger 120 is provided at the lower end of the barrel 140. A coil spring 130 shown in FIG. 2 is provided inside the barrel 140.

[0018] The lower insulating support 210 and the upper insulating support 220 overlap in the vertical direction. The lower insulating support 210 is located below the upper insulating support 220. The lower insulating support 210 is, for example, a pin plate. The upper insulating support 220 is located above the lower insulating support 210. The upper insulating support 220 is, for example, a pin block. The lower insulating support 210 and the upper insulating support 220 support the barrel 140. Specifically, the barrel 140 is inserted into a through hole 202 provided in the lower insulating support 210 and the upper insulating support 220.

[0019] Next, the barrel 140 will be described in detail with reference to Fig. 2. The barrel 140 has a tube portion 142 and a locking portion 144.

[0020] A tube hole 142a is provided in the tube portion 142. The tube hole 142a vertically penetrates at least a portion of the tube portion 142. The horizontal diameter of the tube hole 142a is approximately constant regardless of the position of the tube hole 142a in the vertical direction.

[0021] The locking portion 144 is provided at the lower end of the tube portion 142. As will be described in detail later, the locking portion 144 locks the second plunger 120. This prevents the second plunger 120 from slipping out of the barrel 140 downward.

[0022] A tapered hole 144a is provided in the locking portion 144. The tapered hole 144a penetrates at least a portion of the locking portion 144 in the vertical direction. The upper end of the tapered hole 144a communicates with the lower end of the tube hole 142a. The horizontal diameter of the upper end of the tapered hole 144a is approximately equal to the horizontal diameter of the lower end of the tube hole 142a. The horizontal diameter of the tapered hole 144a decreases downward.

[0023] An opening 146a is provided on the lower end surface of the locking portion 144. The opening 146a of the locking portion 144 opens downward. The upper end of the opening 146a is connected to the lower end of the tapered hole 144a. The horizontal diameter of the upper end of the opening 146a is approximately equal to the horizontal diameter of the lower end of the tapered hole 144a. The horizontal diameter of the opening 146a is approximately constant regardless of the position of the opening 146a in the vertical direction. That is, the inner surface of the opening 146a is approximately parallel to the imaginary line IL. In the cross section shown in FIG. 2, the inner surfaces on both horizontal sides of the opening 146a are visible. In the cross section shown in FIG. 2, the inner surfaces on both horizontal sides of the opening 146a are approximately parallel to each other.

[0024] 4 to 7, the tube hole 142a, the tapered hole 144a, and the opening 146a are formed by cutting. Similarly, at least a portion of the outer surface of the barrel 140 is also formed by cutting.

[0025] Next, the second plunger 120 and the coil spring 130 will be described with reference to Fig. 2. The second plunger 120 has a flange portion 122, a tapered portion 124, and a pillar portion 126.

[0026] The coil spring 130 is disposed inside the tube hole 142a. The flange portion 122 is located below the lower end of the coil spring 130. The horizontal diameter of the flange portion 122 is substantially constant regardless of the position of the flange portion 122 in the vertical direction. The horizontal diameter of the flange portion 122 is less than the horizontal diameter of the tube hole 142a. Therefore, the flange portion 122 is able to slide vertically inside the tube hole 142a.

[0027] The tapered portion 124 is provided at the lower end of the flange portion 122. The horizontal diameter of the upper end of the tapered portion 124 is approximately equal to the horizontal diameter of the lower end of the flange portion 122. The horizontal diameter of the tapered portion 124 decreases downward. The diameter of the upper end of the tapered portion 124 is equal to or greater than the diameter of the lower end of the tapered hole 144a. The diameter of the lower end of the tapered portion 124 is smaller than the diameter of the lower end of the tapered hole 144a. Therefore, when the second plunger 120 is biased downward by the coil spring 130, at least a portion of the outer surface of the tapered portion 124 comes into contact with the inner surface of the tapered hole 144a. This prevents the tapered portion 124 from slipping downward through the opening 146a. This allows the locking portion 144 to lock the tapered portion 124.

[0028] The pillar portion 126 is provided at the lower end of the tapered portion 124. The pillar portion 126 extends in the vertical direction. The horizontal diameter of the upper end of the pillar portion 126 is approximately equal to the horizontal diameter of the lower end of the tapered portion 124. The horizontal diameter of the pillar portion 126 is approximately constant regardless of the position of the pillar portion 126 in the vertical direction, except for the lower end of the pillar portion 126. The lower end of the pillar portion 126 is rounded. However, the shape of the lower end of the pillar portion 126 is not limited to this example. The horizontal diameter of the pillar portion 126 is less than the horizontal diameter of the opening 146a. As a result, the locking portion 144 causes the pillar portion 126 to protrude approximately parallel to the vertical direction from the opening 146a.

[0029] 3 is a cross-sectional view of a barrel 140K according to a comparative embodiment. The barrel 140K according to the comparative embodiment is similar to the barrel 140 according to the embodiment, except for the following points.

[0030] The barrel 140K according to the comparative embodiment has a tube portion 142K and a locking portion 144K. The tube portion 142K according to the comparative embodiment has a tube hole 142aK. The locking portion 144K according to the comparative embodiment has a tapered hole 144aK. An opening 146aK is provided in the lower end surface of the locking portion 144K according to the comparative embodiment. The locking portion 144K according to the comparative embodiment is formed by crimping the lower end of the barrel 140K. Therefore, the inner surface of the opening 146aK according to the comparative embodiment is inclined with respect to the imaginary line IL. Specifically, the horizontal diameter of the opening 146aK according to the comparative embodiment increases downward.

[0031] The barrel 140 according to the embodiment and the barrel 140K according to the comparative embodiment will be compared.

[0032] In the comparative embodiment, the inner surface of the opening 146aK is inclined with respect to the axial direction of the second plunger 120. In the comparative embodiment, the axial direction of the second plunger 120 is approximately parallel to the imaginary line IL. In contrast, in the embodiment, the inner surface of the opening 146a is approximately parallel to the axial direction of the second plunger 120. In the embodiment, the axial direction of the second plunger 120 is approximately parallel to the imaginary line IL. Therefore, in the embodiment, compared to the comparative embodiment, the inner surface of the opening 146a makes it easier to align the column portion 126 approximately parallel to the imaginary line IL. Therefore, in the embodiment, compared to the comparative embodiment, it is possible to suppress inclination of the second plunger 120 with respect to the central axis of the probe 100.

[0033] Furthermore, in the embodiment, compared to the comparative embodiment, even if the vertical length of the flange portion 122 is shortened, the column portion 126 is more easily aligned substantially parallel to the imaginary line IL. That is, when the vertical length of the flange portion 122 is equal to or greater than a certain value, the outer surface of the flange portion 122 comes into contact with the inner surface of the tube hole 142a, thereby aligning the column portion 126 substantially parallel to the imaginary line IL. In the embodiment, as described above, the inner surface of the opening 146a, which is substantially parallel to the imaginary line IL, makes it easier to align the column portion 126 substantially parallel to the imaginary line IL. Therefore, the vertical length of the flange portion 122 in the embodiment can be shorter than the vertical length of the flange portion 122 in the comparative embodiment. Therefore, in the embodiment, the vertical length of the space for arranging the coil spring 130 inside the tube hole 142a can be longer than in the comparative embodiment.

[0034] In the comparative example, in the cross section shown in FIG. 3, the angle between the direction connecting the upper and lower ends of the inner surface of the tapered hole 144aK and the direction connecting the lower and upper ends of the inner surface of the opening 146aK is approximately right-angled. This is because, as described above, the locking portion 144K according to the comparative example is formed by crimping the lower end of the barrel 140K. In contrast, in the embodiment, in the cross section shown in FIG. 2, the angle between the direction connecting the upper and lower ends of the inner surface of the tapered hole 144a and the direction connecting the lower and upper ends of the inner surface of the opening 146a is obtuse. Therefore, in the embodiment, wear of the tapered portion 124 due to the angle between the lower end of the inner surface of the tapered hole 144a and the upper end of the inner surface of the opening 146a can be suppressed compared to the comparative example.

[0035] 4 to 7 are diagrams for explaining a manufacturing method of the barrel 140 according to the embodiment.

[0036] The barrel 140 according to this embodiment is manufactured as follows. In the following description using Figures 4 to 7, the direction approximately parallel to the imaginary line IL will be referred to as the axial direction, as necessary. In the following description using Figures 4 to 7, the direction approximately perpendicular to the imaginary line IL will be referred to as the radial direction, as necessary.

[0037] First, a workpiece 140W is prepared as shown in Fig. 4. The workpiece 140W is, for example, a metal.

[0038] Next, as shown in FIG. 5, while the workpiece 140W is rotated around the imaginary line IL, a small-diameter drill 42 is passed through the workpiece 140W in the axial direction. The small-diameter drill 42 has a small-diameter shank 42a and a small-diameter tip 42b. The radial diameter of the small-diameter shank 42a is substantially constant regardless of the position in the axial direction of the small-diameter shank 42a. The small-diameter tip 42b is provided at the tip of the small-diameter shank 42a. The radial diameter of the small-diameter tip 42b decreases toward the tip of the small-diameter tip 42b. The small-diameter tip 42b penetrates the workpiece 140W in the axial direction. Therefore, a small-diameter hole 146aW is formed by cutting the small-diameter shank 42a. Therefore, the radial diameter of the small-diameter hole 146aW is substantially equal to the radial diameter of the small-diameter shank 42a.

[0039] Next, as shown in FIG. 6, while the workpiece 140W is rotated around the imaginary line IL, the large-diameter drill 44 is passed through the small-diameter hole 146aW in the axial direction. The large-diameter drill 44 has a large-diameter shank 44a and a large-diameter tip 44b. The radial diameter of the large-diameter shank 44a is substantially constant regardless of the position in the axial direction of the large-diameter shank 44a. The radial diameter of the large-diameter shank 44a is larger than the radial diameter of the small-diameter shank 42a. The large-diameter tip 44b is provided at the tip of the large-diameter shank 44a. The radial diameter of the large-diameter tip 44b decreases toward the tip of the large-diameter drill 44. The large-diameter tip 44b axially penetrates the workpiece 140W except for the tip of the small-diameter hole 146aW.

[0040] In the example shown in Figure 6, the large diameter hole 142aW is formed by cutting the large diameter shaft portion 44a, excluding the tip of the small diameter hole 146aW. Therefore, the radial diameter of the large diameter hole 142aW is approximately equal to the radial diameter of the large diameter shaft portion 44a. The large diameter hole 142aW is a hole that becomes the tube hole 142a. Therefore, the radial diameter of the tube hole 142a can be controlled by the radial diameter of the large diameter shaft portion 44a.

[0041] In the example shown in FIG. 6 , the tapered hole 144a is formed by cutting the large-diameter tip portion 44b. The inclination of the inner surface of the tapered hole 144a relative to the imaginary line IL is approximately equal to the inclination of the outer surface of the large-diameter tip portion 44b relative to the imaginary line IL. That is, the inclination of the inner surface of the tapered hole 144a relative to the imaginary line IL can be controlled by the inclination of the outer surface of the large-diameter tip portion 44b relative to the imaginary line IL. Therefore, in the embodiment, the inclination of the inner surface of the tapered hole 144a relative to the imaginary line IL can be adjusted with high precision compared to the comparative embodiment, where the locking portion 144K is formed by crimping the tip of the barrel 140K. Therefore, in the embodiment, the inclination of the inner surface of the tapered hole 144a relative to the imaginary line IL is more easily aligned with the inclination of the outer surface of the tapered portion 124 relative to the imaginary line IL compared to the comparative embodiment. Therefore, in the embodiment, the inclination of the post portion 126 relative to the imaginary line IL can be suppressed compared to the comparative embodiment.

[0042] In the example shown in FIG. 6 , the tip of the small-diameter hole 146aW that is not penetrated by the large-diameter tip portion 44b remains as the opening 146a. That is, the opening 146a is formed by cutting the small-diameter shaft portion 42a. Therefore, in the embodiment, the inner surface of the opening 146a can be aligned in a direction substantially parallel to the imaginary line IL. Also, in the embodiment, the radial diameter of the opening 146a can be controlled by the radial diameter of the small-diameter shaft portion 42a. Therefore, in the embodiment, the radial diameter of the opening 146a can be adjusted with high precision compared to the comparative embodiment, in which the locking portion 144K is formed by crimping the tip of the barrel 140K. Therefore, in the embodiment, the inclination of the post portion 126 with respect to the imaginary line IL can be suppressed compared to the comparative embodiment.

[0043] Next, as shown in FIG. 7, while the workpiece 140W is rotated around the imaginary line IL, the tip of the blade 46 is pressed against the outer surface of the workpiece 140W to cut the outer surface of the workpiece 140W. Specifically, the outer surface of the workpiece 140W, excluding the tip of the workpiece 140W, is cut in a direction approximately parallel to the imaginary line IL. This forms an outer surface around the axial direction of the tube hole 142a of the tube portion 142. At the tip of the workpiece 140W, the outer surface of the workpiece 140W is cut obliquely with respect to the imaginary line IL. This forms an outer surface around the axial direction of the tapered hole 144a and opening 146a of the locking portion 144. In the embodiment, compared to the comparative example in which the locking portion 144K is formed by crimping the tip of the barrel 140K, the shape of the outer surface of the radial periphery of the tapered hole 144a and opening 146a of the locking portion 144 can be adjusted with high precision, so that even when a large number of barrels 140 are manufactured, the shape of the outer surface of the radial periphery of the tapered hole 144a and opening 146a of the locking portion 144 can be made approximately the same.

[0044] The method for manufacturing the barrel 140 is not limited to the above-described method.

[0045] For example, in the above-described method, the small diameter drill 42, the large diameter drill 44, or the blade 46 is pressed against the workpiece 140W while the workpiece 140W is rotated around the imaginary line IL. However, the small diameter drill 42, the large diameter drill 44, or the blade 46 may be rotated around the imaginary line IL and pressed against the workpiece 140W.

[0046] In the embodiment, the small diameter drill 42 is pressed against the solid workpiece 140W to form the small diameter hole 146aW. However, the workpiece 140W may be prepared with the small diameter hole 146aW already formed therein. In this case, the large diameter hole 142aW is formed by pressing the large diameter drill 44 against the workpiece 140W without using the small diameter drill 42.

[0047] In the embodiment, the small diameter holes 146aW and the large diameter holes 142aW are formed, and then the outer surface of the workpiece 140W is machined. However, the small diameter holes 146aW and the large diameter holes 142aW may be formed after the outer surface of the workpiece 140W is machined.

[0048] Although the embodiments of the present invention have been described above with reference to the drawings, these are merely examples of the present invention, and various other configurations can also be adopted.

[0049] For example, in the embodiment, the structure of the locking portion that locks the second plunger has been described. However, the structure of the locking portion that locks the second plunger can also be applied to the locking portion that locks the first plunger.

[0050] According to the present specification, the following aspects are provided. (Aspect 1) Aspect 1 is A plunger; a barrel having an opening through which at least a portion of the plunger projects; Equipped with The probe has an inner surface of the opening that is substantially parallel to the axial direction of the plunger. According to the first aspect, the inner surface of the opening makes it easier to align the plunger substantially parallel to the central axis of the probe, compared to when the inner surface of the opening is inclined relative to the axial direction of the plunger. Therefore, in the first aspect, it is possible to suppress the inclination of the plunger relative to the central axis of the probe, compared to when the inner surface of the opening is inclined relative to the axial direction of the plunger. (Aspect 2) Aspect 2 is 2. The probe according to aspect 1, wherein at least a portion of the outer surface of the barrel is formed by cutting. According to aspect 2, compared to when the locking portion is formed by crimping the tip of the barrel, the shape of the outer surface of the barrel can be adjusted with high precision, and even when a large number of barrels are manufactured, the shapes of the outer surfaces of the barrels can be made approximately the same. (Aspect 3) Aspect 3 is 3. The probe according to aspect 1 or 2, wherein the opening is formed by cutting. According to the third aspect, the diameter of the opening can be adjusted with higher precision than when the locking portion is formed by crimping the tip of the barrel. Therefore, according to the second aspect, the inclination of the plunger relative to the central axis of the probe can be suppressed compared to when the locking portion is formed by crimping the tip of the barrel. (Aspect 4) a tapered hole communicating with the opening is provided in the barrel; The probe according to any one of Aspects 1 to 3, wherein the tapered hole is formed by cutting. According to the fourth aspect, the inclination of the tapered hole with respect to the central axis of the probe can be adjusted with higher precision than when the locking portion is formed by crimping the tip of the barrel. Therefore, in the third aspect, the inclination of the plunger with respect to the central axis of the probe can be suppressed compared to when the locking portion is formed by crimping the tip of the barrel. (Aspect 5) Aspect 5 is A step of forming a second hole having a diameter larger than the diameter of a predetermined first hole in a workpiece, In the method for manufacturing a barrel, in the step of forming the second hole, the second hole penetrates the workpiece except for the tip of the first hole. According to the fifth aspect, the diameter of the opening provided in the locking portion can be adjusted with high precision compared to when the locking portion is formed by crimping the tip of the barrel. (Aspect 6) Aspect 6 is A method for manufacturing a barrel according to aspect 5 further includes forming the first hole in the workpiece. According to the sixth aspect, the diameter of the tip of the first hole can be adjusted with high precision compared to when the locking portion is formed by crimping the tip of the barrel. (Aspect 7) Aspect 7 is A method for manufacturing a barrel according to aspect 5 or 6, further comprising the step of machining at least a portion of an outer surface of the workpiece around the first hole and the second hole. According to the seventh aspect, the shape of the outer surface around the first hole and the second hole of the workpiece can be adjusted with high precision compared to when the locking portion is formed by crimping the tip of the barrel. [Explanation of symbols]

[0051] 10 Probe Head 20 Inspection object 22 electrodes 30 Inspection board 32 pads 42 Small diameter drill 42a Small diameter shaft part 42b Small diameter tip 44 Large diameter drill 44a Large diameter shaft 44b Large diameter tip 46 Blades 100 probes 110 First plunger 120 Second plunger 122 flange 124 Tapered section 126 Column section 130 Coil spring 140,140K barrels 140W work 142,142K Tube section 142a, 142aK Tube hole 142aW large diameter hole 144,144K Locking part 144a, 144aK Tapered hole 146a,146aK aperture 146aW small diameter hole 200 Insulating support 202 Through hole 210 Lower insulating support 220 Upper insulating support IL Virtual Line

Claims

1. A method for manufacturing a barrel that is a part of a probe, comprising the steps of: forming a first hole in a workpiece by cutting; and forming a second hole in the workpiece by cutting, the second hole being coaxial with the first hole and having a diameter larger than that of the first hole. A method for manufacturing a barrel, in which, in the process of forming the second hole, the second hole penetrates the workpiece except for the tip of the first hole, thereby forming a barrel with a tapered hole without using crimping processing.

2. A method for manufacturing a barrel as described in claim 1, further comprising a step of machining at least a portion of the outer surface surrounding the first hole and the second hole of the workpiece.

3. A plunger; a barrel that houses the plunger; Equipped with The barrel has an opening through which a portion of the plunger projects, The probe has an inner side of the opening that is provided with a machined surface that is generally parallel to the axial direction of the plunger.

4. The barrel has a tapered surface communicating with the machined surface provided inside the opening, The probe according to claim 3 , wherein the tapered surface is a machined surface.

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