Compact traverse robot

Abstract

An example of a preferred embodiment of the apparatus includes a spindle platform, a traverse platform configured to move in a first direction, an elevation system coupled to the spindle platform and the traverse platform, and a movable arm connected to the spindle platform. The movable arm has a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link. The apparatus further includes a first actuator connected to the spindle platform and configured to rotate the first link, and a second actuator disposed on the movable arm and configured to rotate the second link. The first actuator extends from the spindle platform to the first link and occupies the combined thickness of the spindle platform and the first link.

Description

[Technical field]

[0001] The exemplary, non-limiting embodiments described herein generally relate to a vertically compact traverse robot that may be utilized in applications such as material handling vacuum environmental systems.

[0002] A material processing robot includes a robot arm coupled to a drive and capable of moving along a track or rail system. The robot arm may include an upper link, a lower link on the upper link, and an end effector on the lower link. The end effector may be configured to handle a payload in a material processing operation. The drive includes a spindle assembly coupled to the robot arm, a Z-axis mechanism for moving the spindle assembly up and down in a Z direction (vertical direction), and one or more coaxially stacked motors. The robot arm is capable of positioning and operating in a vacuum environment and the drive is capable of positioning in an atmospheric environment. Bellows may be used to contain the vacuum environment in the space in which the robot arm operates. The spindle assembly, the Z-axis mechanism for vertical movement of the spindle assembly, and / or the coaxially stacked motors generally require significant depth and volume in the vacuum chamber in which the robot operates. Abstract

[0003] According to one view, the device is Spindle platform and; a traverse platform configured to move in a first direction; an elevation system coupled to the spindle platform and the traverse platform, the elevation system configured to move the spindle platform between a folded position and an extended position in a second direction perpendicular to the first direction; at least one movable arm connected to the spindle platform, the at least one movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; at least one first actuator connected to the spindle platform and configured to cause the first link to pivot; and at least one second actuator disposed on the at least one movable arm and configured to cause the second link to pivot; Equipped with. The first actuator extends from the spindle platform to the first link and occupies a combined thickness of the spindle platform and the first link.

[0004] In another view, the method is providing a traverse platform configured to move in a first direction; Providing a spindle platform; providing an elevation system coupled to the spindle platform and the traverse platform, the elevation system configured to move the spindle platform between a folded position and an extended position in a second direction perpendicular to the first direction; providing at least one movable arm connected to the spindle platform, the at least one movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; providing at least one first actuator connected to the spindle platform and configured to cause the first link to pivot; and providing at least one second actuator disposed on the at least one movable arm and configured to cause the second link to pivot; Includes. The first actuator extends from the spindle platform to the first link and occupies a combined thickness of the spindle platform and the first link.

[0005] Viewed another way, an apparatus includes at least one processor and at least one non-volatile memory storing computer program instructions that, when executed by the at least one processor, cause the apparatus to: moving the traverse platform in a first direction; activating an elevation system coupled to the traverse platform and the spindle platform to move the spindle platform in a second direction perpendicular to the first direction between a folded position and an extended position; actuating at least one movable arm connected to the spindle platform, the at least one movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; actuating at least one first actuator means connected to said spindle platform and configured to cause pivoting of said first link and at least one second actuator means disposed on said at least one movable arm and configured to cause pivoting of said second link; The present invention is configured to perform the following steps. The first actuator means extends from the spindle platform to the first link and occupies a combined thickness of the spindle platform and the first link.

[0006] In another view, the device is a traverse platform configured to move in a first direction; a spindle platform having a first actuator and a first control coupled to the first actuator; at least one movable arm connected to the spindle platform, the at least one movable arm having a first link connected to the first actuator and at least one second link connected to the first link, the second link having at least one second actuator and controlled by a second controller of the at least one movable arm, the at least one first actuator configured to cause pivoting of the first link and the at least one second actuator configured to cause pivoting of the second link; an elevation system coupled to the spindle platform and the traverse platform, the elevation system being configured to move the spindle platform between a folded position and an extended position in a second direction perpendicular to the first direction, the elevation system having a third actuator on the traverse platform and a third control connected to the third actuator; Equipped with. The first actuator extends from the spindle platform to the first link and occupies a combined thickness of the spindle platform and the first link. [Brief description of the drawings]

[0007] The above aspects and other features are explained below with reference to the accompanying drawings.

[0008] [Figure 0] 0A-0C are schematic diagrams showing the exterior appearance of some of the existing vacuum environment material handling traverse robots.

[0009] [Figure 1A] 1 is a schematic diagram of a traverse robot with a controller.

[0010] [Figure 1B] 1B(1)-1B(3) are schematic diagrams of various external views of the robot of FIG. 1A.

[0011] [Figure 1C] 1C(1) and 1C(2) are schematic diagrams showing the internal components of the robot of FIG. 1A.

[0012] [Figure 2A] 1 is a schematic diagram showing the position of a controller relative to the motors of a traverse robot. [Figure 2B] 1 is a schematic diagram showing the position of a controller relative to the motors of a traverse robot. [Figure 2C] 1 is a schematic diagram showing the position of a controller relative to the motors of a traverse robot. [Figure 2D] 1 is a schematic diagram showing the position of a controller relative to the motors of a traverse robot.

[0013] [Diagram 3] 3A and 3B are schematic diagrams of the internal spatial connections of components within a robot.

[0014] [Figure 4A] 4A(1)-4A(3) are schematic diagrams of various states of the robot relative to its spindle platform and arm. [Figure 4B] 4B(1)-4B(3) are schematic diagrams of various states of the robot relative to its spindle platform and arm.

[0015] [Diagram 5] 5A and 5B are schematic diagrams of the robot showing the overlap of components when the spindle platform is lowered.

[0016] [Figure 6] FIG. 1 is a schematic diagram of an alternative exemplary robot embodiment having a counterbalance function.

[0017] [Figure 7A]1 is a schematic diagram of an alternative exemplary embodiment of a lifting mechanism for a robot. [Figure 7B] 1 is a schematic diagram of an alternative exemplary embodiment of a lifting mechanism for a robot. [Figure 7C] 1 is a schematic diagram of an alternative exemplary embodiment of a lifting mechanism for a robot.

[0018] [Figure 7D] 7D(1) and 7D(2) are schematic diagrams of an exemplary robot in which the spindle platform is supported by linear bearings and actuated by a ball screw drive.

[0019] [Figure 7E] FIG. 1 is a schematic diagram of an exemplary robot in which actuation motors are located on the arms of the robot.

[0020] [Figure 7F] 7F(1) and 7F(2) are schematic diagrams showing an example of a robot that does not have a lifting mechanism.

[0021] [Figure 7G(1)(2)] 1 is a schematic diagram of an exemplary robot showing a comparison of structures. [Figure 7G(3)(4)] 1 is a schematic diagram of an exemplary robot showing a comparison of structures.

[0022] [Figure 8] 1 is a schematic diagram of a robotic arm having an upper arm and two forearms. Detailed Description of the Embodiments

[0023] Although various features will be described with reference to exemplary embodiments shown in the drawings, it should be understood that these features can be embodied in many alternative forms of embodiment, and that any suitable size, shape or type of elements and materials can be employed.

[0024] Referring to Figures 0A-0C, an example of an existing vacuum environment material processing traverse robot is generally shown at 10, hereinafter referred to as "robot 10". Robot 10 comprises a robot arm 12 coupled to a drive unit 14. Robot arm 12 is disposed and operable in a vacuum environment, and drive unit 14 is disposed in an atmospheric environment. As shown, robot arm 12 has an upper link 16, two lower links 18, and two end effectors 20, one on each of the lower links 18. Drive unit 14 comprises a spindle assembly 24 coupled to robot arm 12, a Z-axis mechanism 26 (such as a ball screw) for moving spindle assembly 24 up and down, thereby providing vertical actuation of robot arm 12 in the Z direction, and one or more coaxially stacked motors 28. A bellows 30 may be used to contain the vacuum environment of the space in which robot arm 12 operates. The robot 10 may move in an X direction (indicated by arrow X in FIG. 0A) along a track 34 or rail. The robot 10 may move along two tracks 34 or rails, as shown in FIG. 0B. In the folded state, the upper end effector 20 may completely cover the lower end effector 20, as shown in FIG. 0C.

[0025] One object of the present invention is to reduce the vertical space occupied by a robot and, consequently, the depth and volume of the vacuum chamber in which the robot operates.

[0026] An exemplary embodiment of a traversing robot according to the present invention is depicted diagrammatically in Figures 1A-1C(2), hereinafter referred to as "robot 100." Figure 1A is a side view of robot 100 having control system 106. Additional views of robot 100 are provided in Figures 1B(1)-1B(3), and example layouts of internal components of robot 100 are depicted diagrammatically in Figures 1C(1) and 1C(2).

[0027] As shown in FIG. 1A, the robot 100 may be supported by a stationary base 108 and may include a linear guidance and actuation system 110, a traverse platform 112, a lifting mechanism 114, a spindle platform 116, a robotic arm 120, and a control system 106.

[0028] The stationary base 108 may be a structure configured to support the robot 100. By way of example, the stationary base 108 may be a plate or frame having a length along the travel direction of the robot 100 (e.g., the X direction along the X axis), a floor or wall of a vacuum chamber, or any other suitable structure capable of supporting the robot 100.

[0029] The linear guide and actuation system 110 may include a linear guide structure and a linear actuator system configured to enable travel of the traverse platform 112 relative to the stationary base 108 (eg, in a direction along the X-axis in FIG. 1A).

[0030] As shown diagrammatically in the example of FIG. 1A, the linear guide structure may be formed by a linear bearing structure. By way of example, the linear bearing structure may comprise one or more linear bearing rails 124 mounted to the stationary base 108 and one or more linear bearing blocks 126 mounted to the traverse platform 112. The linear guide portion of the linear guide and actuation system 110 may comprise a shield system configured to prevent contact with the linear bearing rails 124, to prevent debris from contaminating the linear bearing blocks 126 (or other linear bearing(s)), and to prevent particulates from migrating off the linear bearing blocks 126 (or other linear bearing(s).

[0031] Alternatively, the linear guide structure may be a wheel and rail system, a cable or belt suspension system, a magnetic support system, or any other suitable structure configured to constrain movement of the traverse platform 112 relative to the fixed base 108.

[0032] As shown diagrammatically in the examples of FIG. 1C(1) and FIG. 1C(2), the linear actuator system may have one or more linear actuators and one or more position sensors 111. Although the position sensor 111 is shown as being on the traverse platform 112, it should be understood that the position sensor 111 may be anywhere on or within the linear guide actuation system 110. The linear actuator of the linear actuator system may have a stationary part that may be attached to the stationary base 108 and a moving part that may be attached to the traverse platform 112. The linear actuator may be a linear motor 130, such as a permanent magnet motor. The moving part may consist of a forcer having a coil 132 (e.g., a moving coil structure) on the bottom surface of the traverse platform 112, and the stationary part may be formed by a magnet track 134 on the stationary base 108. In a moving magnet structure, the moving part may consist of a magnet plate on the traverse platform 112, and the stationary part may be formed by a track on the stationary base 108 with the coil 132 formed thereon.

[0033] Alternatively, the linear actuator may be based on any other suitable structure capable of generating a force between the stationary base 108 and the traverse platform 112 substantially in the desired direction of travel of the robot 100, for example, based on a belt drive, band drive, cable drive, ball screw, or lead screw.

[0034] The linear actuator position sensor 111 may be configured to measure the position of the traverse platform 112 along the desired direction of travel (along the X-axis). By way of example, the position sensor 111 may be a position encoder, such as an optical, magnetic, inductive, or capacitive position encoder, a laser interferometer, or any other suitable device capable of directly or indirectly (in the case of a belt drive, band drive, cable drive, ball screw, lead screw, etc.) measuring the position of the traverse platform 112 along the desired direction of travel.

[0035] Measurements from the position sensor 111 may be used by the control system 106 to control a linear actuator (e.g., linear motor 130) to achieve a desired movement of the traverse platform 112 relative to the fixed base 108 along a desired travel direction of the robot 100 (direction along the X-axis) and a desired stopping position.

[0036] The lift mechanism 114 may have one or more lift links 136 configured to move the spindle platform 116 relative to the traverse platform 112 in a vertical direction (or, more precisely, in a manner that includes a vertical motion component) and to stabilize the angular orientation of the spindle platform 116 relative to the traverse platform 112 (e.g., to keep the spindle platform 116 substantially horizontal). For example, in accordance with FIGS. 1A, 1B(1), and 1C(1), the lift links 136 may have a parallelogram configuration actuated by a lift mechanism motor 140, which may be a rotation drive. The rotation drive (or other lift mechanism motor 140) may comprise a rotation motor and a rotation sensor. Control of the movement of the spindle platform 116 (e.g., to keep the spindle platform 116 substantially horizontal) may be implemented using the control system 106.

[0037] In general, each of the one or more lift links 136 of the lift mechanism 114 may have one or more links, joints (rotary or another suitable type), and / or pulley structures utilizing belts, bands, or cables. The one or more lift links 136 may be actuated by one or more rotary motors, linear motors, struts, or any other suitable actuation means.

[0038] As depicted in the examples of Figures 1A, 1B(1), 1B(2), and 1C(1), one or more lift links 136 of the lift mechanism 114 may be located on one or both sides of the traverse platform 112. Figure 1B(2) shows an example where a lift link 136 is located on both sides of the traverse platform 112. As another example, one or more lift links 136 may be located on one or both sides of the traverse platform 112. Alternatively, one or more lift links 136 may be located in any suitable location on the traverse platform 112.

[0039] The spindle platform 116 may carry the robot arm 120 and one or more motors configured to drive or actuate the robot arm 120 or a portion of the robot arm 120. As an example, as depicted diagrammatically in FIG. 1C(1), a first link 142 (upper arm) of the robot arm 120 may be coupled to the spindle platform 116 via a revolute joint, a stator 144 of a motor (Motor T) may be attached to the spindle platform 116, and a rotor 146 of the motor (Motor T) may be attached to the first link 142 of the robot arm 120. The motor (Motor T) may conveniently extend up to and / or into the first link 142 of the robot arm 120, utilizing the combined thickness (height) of the spindle platform 116 and the first link 142 of the robot arm 120. Alternatively, a stator 144 of the motor (Motor T) may be attached to the first link 142 of the robotic arm 120, and a rotor 146 of the motor (Motor T) may be attached to the spindle platform 116. Although Motor T is shown in FIG. 1C(1) with an internal rotor configuration, Motor T may also be with an external rotor configuration or may be of any suitable type.

[0040] Referring to the example of FIG. 1B(1), the robot arm 120 may have a first link 142 (upper arm), two forearms (forearm A 150 and forearm B 152), and two wrist links (wrist link A 154 and wrist link B 156), each of which may carry one or more end effectors 160, each of which may be configured to accept a payload. Each of the forearms 150, 152 may be coupled to the first link 142 via a revolute joint (elbow joint A 164 and elbow joint B 166). Two motors (motor A and motor B shown in FIG. 1C(1)) may be attached to the first link 142, each of which is coupled to one of the two forearms 150, 152. Each of the wrist links 154, 156 may be coupled to one of the forearms 150, 152 via a revolute joint (wrist joint A 170 and wrist joint B 172). The robotic arm 120 may further include two belt drives, band drives, or cable drives configured to constrain the angle of one of the wrist links 154, 156. (Band drives A, B are shown in FIG. 1C(1) for the forearms 150, 152, respectively.) The belt drives, band drives, or cable drives may employ circular and / or non-circular pulleys, as described in U.S. Patent Nos. 9,149,936, 9,840,004, 9,889,557, and 10,224,232, which are incorporated by reference in their entireties.

[0041] The traverse platform 112, spindle platform 116, and robot arm 120 may include features configured to remove heat generated by the motors and other active components attached thereto. As an example, the robot arm 120 and spindle platform 116 may include one or more surfaces (planar, cylindrical, or any suitable shape) that face each other and allow heat to be transferred from the robot arm 120 to the spindle platform 116 through radiation mechanisms, or conduction and convection mechanisms if residual gas is present. Similarly, the traverse platform 112 and spindle platform 116 may include surfaces configured to remove heat from the robot arm 120 using radiation, or conduction and convection if residual gas is present.

[0042] The control system 106 of the robot 100 can receive external inputs, for example from a user or host system, read the positions of the individual axes of motion (motors) from position encoders (not shown for simplicity), process that information, and apply voltages to the motors to achieve a desired movement and / or position.

[0043] In an example embodiment, the actuators (motors) in the robot 100 may be controlled by a control module(s) located proximate to each actuator, as illustrated, for example, in FIG. 2A . One or more actuators (e.g., motor T) located on the spindle platform 116 may be controlled by a controller or control system or one or more control modules 200 attached to or located on the spindle platform 116. One or more actuators (e.g., lift mechanism motor 140) of the lift mechanism 114 may be controlled by a controller or one or more control modules 210 located on (or in) the traverse platform 112. One or more actuators in the robot arm 120 may be controlled by a controller or one or more control modules 218 in the robot arm 120. The control modules 200, 210, 218 may be connected to a master controller 220, for example, via a communication network 212. To cooperate The master controller 220 may be located on the traverse platform 112, and the master controller 220 and the control module 210 of the lifting mechanism 114, which may be in communication with a host communication system 228, may be separate devices or may be combined into a single integrated device. Alternatively, as depicted diagrammatically in FIG. 2B, the master controller 220 may be located outside of the traverse platform 112 and may remain stationary relative to the stationary base 108. In either configuration, the master controller 220 may have one or more processors 222 and one or more memories 224 having program instructions configured to perform operations as described herein.

[0044] In another exemplary embodiment, the encoder signals 238 and motor lines may be provided to a centralized controller 240, as shown diagrammatically in Figures 2C and 2D. The centralized controller 240 may be within the traverse platform 112 or may be external to the traverse platform 112 (and may be immobile relative to the stationary base 108). Alternatively, any combination of the configurations of Figures 2A-2D may be used. The centralized controller 240 may have one or more processors 242 and one or more memories 244 with program instructions configured to perform operations as described herein.

[0045] 2C and 2D, motor S refers to the actuator of the linear actuator system, and motor Z refers to the actuator of the lift mechanism 114. Control modules are indicated at 200, 210, and 218.

[0046] The lifting mechanism 114 and robot arm 120 may include configurations for providing power, transmitting electrical signals, and circulating fluids (gas and / or liquid) within the robot 100. These configurations may be required for the control system (power supply and electrical signal transmission) and to enhance heat removal (fluid circulation). An exemplary configuration that may support power supply, signal transmission, and / or fluid circulation between components coupled by a revolute joint is depicted diagrammatically at 300 in FIG. 3A and is referred to as "configuration 300."

[0047] 3A, bellows 304 may be utilized to connect interior spaces of components joined by rotary joint 306 and may provide a passageway 308 for one or more cables and / or one or more hoses. Shape guide 310 may be used to restrain the one or more cables and / or one or more hoses and prevent the one or more cables and / or one or more hoses from rubbing against bellows 304 and other components.

[0048] In the exemplary configuration 300 of Figure 3A, the interior space of the bellows 304 may be at substantially the same pressure as the interior space of the robotic component to which it connects, which may be higher than the pressure of the external vacuum environment. Alternatively, to increase the stability of the bellows 304, a configuration may be employed in which a low pressure environment is inside the bellows 304, as shown diagrammatically in Figure 3B, in which the bellows 304 is shown in a compressed state.

[0049] Other exemplary configurations that may assist in power supply, signal transmission, and / or fluid circulation through a rotary joint are described in U.S. Pat. No. 10,569,430, the entirety of which is incorporated herein by reference.

[0050] Additional configurations may be used to transmit power and communication signals between the stationary base of the robot 100 and the traverse platform 112. For example, a service loop, inductive coupling, capacitive coupling, optical communication link, or radio frequency communication system may be employed for this purpose.

[0051] The robot 100 can travel along the stationary base 108, raise the spindle platform 116, rotate the robot arm 120, and extend each end effector of the robot arm 120, as shown diagrammatically in FIGS. 4A(1)-4A(3) and 4B(1)-4B(3). As an example, FIGS. 4A(1)-4A(3) depict one possible state of the robot 100 relative to the stationary base 108. In this state, the spindle platform 116 is lowered and both end effectors 160 are retracted. As another example, FIGS. 4B(1)-4B(3) depict another possible state of the robot 100 relative to the stationary base 108. In this state, the spindle platform 116 is raised and one of the end effectors 160 is extended.

[0052] A feature of the exemplary embodiment of FIG. 1A is that the motors and other components of the robot 100 may be vertically nested or overlapped, i.e., sharing substantially the same vertical space, particularly when the spindle platform 116 is in a lowered, collapsed position as illustrated in FIGS. 5A and 5B. As illustrated in FIG. 5A, when the spindle platform 116 is collapsed relative to the traverse platform 112, or even when the robot arm 120 is in a retracted position, a portion of the motor T may protrude into the first link 142 of the robot arm 120. This reduces the vertical space occupied by the robot 100, and therefore the depth and volume of the vacuum chamber in which the robot 100 may operate. Additionally, at least motors A and B may be nested with the motor T in a folded position to further reduce the vertical space occupied by the robot 100.

[0053] An alternative exemplary embodiment of a traverse robot 100 according to the present invention is depicted diagrammatically in FIGS. 6-8.

[0054] The lift mechanism 114 may include a counterbalance feature, such as a counterweight or spring (e.g., a coil spring or a torsion spring), to reduce the torque or force on the lift mechanism 114 actuator (motor). An exemplary embodiment having a counterbalance feature utilizing a tensioned coil spring 600 is depicted diagrammatically in Figure 6. Alternatively, any other suitable counterbalance feature may be used.

[0055] An exemplary alternative lifting mechanism is depicted diagrammatically in FIG. 7A and hereafter referred to as "lifting mechanism 714." The lifting mechanism 714 may include a link 716, which may be coupled to the traverse platform 112 and the spindle platform 116 by revolute joints 720 and 722, respectively. The lifting mechanism 714 may further include an actuator or motor 730 configured to drive a band 732 (or belt or cable). In this example, the actuator or motor 730 is driven to maintain the same angular orientation of the spindle platform 116 relative to the traverse platform 112. For example, the actuator or motor 730 is driven to maintain the spindle platform 116 substantially horizontal. In this configuration, a first pulley 734 may be attached to the traverse platform 112 and a second pulley 736 may be attached to the spindle platform 116, as shown.

[0056] 7A , link 716 may be actuated by a rotational motor RM attached to the traverse platform 112. When the rotational motor RM actuates link 716 to rotate relative to the traverse platform 112, the spindle platform 116 changes elevation relative to the traverse platform 112. Alternatively, the rotational motor RM may be attached to the spindle platform 116. As another alternative, a linear motor, strut, or any other suitable actuation means may be used to actuate link 716 of the lifting mechanism 714.

[0057] Another exemplary alternative lifting mechanism is shown diagrammatically at 750 in FIG. The lifting mechanism 750 may comprise a linkage that may be comprised of a first link 754 and a second link 756. The first link 754 may be coupled to the traverse platform 112 by a first revolute joint 760, the second link 756 may be coupled to the first link 754 by a second revolute joint 762, and the spindle platform 116 may be coupled to the second link 756 by a third revolute joint 764. The linkage of the lifting mechanism 750 may further comprise two belt drives, band drives, or cable drives configured to maintain an angular orientation of the spindle platform 116 relative to the traverse platform 112 unchanged. These may be configured, for example, to keep the spindle platform 116 substantially horizontal.

[0058] As shown in FIG. 7B, a first belt drive, band drive, or cable drive may be located inboard of the first link 754 and connect a first pulley 770 attached to the traverse platform 112 and a second pulley 772 attached to the second link 756. The diameter of the first pulley 770 attached to the traverse platform 112 may be twice the diameter of the second pulley 772 attached to the second link 756. A second belt drive, band drive, or cable drive may be located inboard of the second link 756 and connect the second pulley 772 to a third pulley 774 on the spindle platform 116. The diameter of the third pulley 774 may be approximately twice the diameter of the second pulley 772 and may be the same or similar to the diameter of the first pulley 770.

[0059] 7B , a first link 754 of the lifting mechanism 750 link may be actuated by a rotational motor RM in or on the traverse platform 112. In this configuration, when the rotational motor RM actuates the first link 754 such that the first link 754 rotates relative to the traverse platform 112, the spindle platform 116 moves vertically relative to the traverse platform 112. Alternatively, a linear motor, strut, or any other suitable actuation means may be used to actuate the lifting mechanism 750.

[0060] Although the example lift mechanism 750 of FIG. 7B is shown with two links of equal joint-to-joint length and circular pulleys, the two links may be of unequal joint-to-joint length and some or all of the pulleys may be non-circular. Alternatively, any suitable number of links and pulley types may be used. The connection defined by the first link 754 and the second link 756 may be located on one or both sides of the traverse platform 112 and coupled to one or both sides of the spindle platform 116.

[0061] 7C , one or more connections defined by first link 754 and second link 756 of lifting mechanism 750 may be disposed on a front and / or rear surface of traverse platform 112 and coupled to a front and / or rear surface (rather than a side surface) of spindle platform 116. Alternatively, first link 754 and second link 756 of lifting mechanism 750 may be disposed at any suitable location between traverse platform 112 and spindle platform 116.

[0062] 7D(1) and 7D(2), a simplified cross-sectional view of an exemplary embodiment robot 700 having a robot arm 702 is shown. The exemplary robot 700 may utilize one or more linear bearings and a linear actuation system. In the exemplary robot 700, a spindle platform 766 may be supported by one or more linear bearings 768 and a linear actuator. The linear actuator may be a forcer / coil structure or the like on a rail or track system such as rail 769, as in the previous example. The spindle platform 766 may be moved up and down, for example, by a suitable Z-axis mechanism 26 (e.g., ball screw drive, lead screw, band drive, belt drive, cable drive, linear motor, or any other suitable actuation means). As shown, a bellows 776 may also be utilized to accommodate a vacuum environment while allowing the spindle platform 766 to move up and down. The height of the robot 700 can be reduced compared to other embodiments disclosed herein by relocating the motor M that actuates the upper arm 778 to the robot arm 702, as shown diagrammatically in FIG. 7E.

[0063] An exemplary embodiment of a traverse robot according to the present invention without a lift mechanism is depicted diagrammatically in Figures 7F(1) and 7F(2) and is hereinafter referred to as "robot 780." Robot 780 comprises a robot arm 782 mounted directly to a base 784. Robot arm 782 utilizes one or more linear bearings 768 configured to slide along rails 769 (or tracks). Robot 780 also includes a linear actuation system, similar to the previous exemplary embodiment.

[0064] A comparison of selected exemplary embodiments with robots representing the existing technology is provided in Figures 7G(1), 7G(2), 7G(3), and 7G(4). Figure 7G(1) shows a simplified cross-sectional view of robot 10 representing the existing technology, and Figure 7G(2) shows an exemplary embodiment of a traverse robot 800 in which two motors M are relocated to a robot arm 802. Figure 7G(3) illustrates an exemplary embodiment, e.g., robot 100, with a lifting mechanism based on the aforementioned joints. Figure 7G(4) illustrates an exemplary embodiment, e.g., robot 780, without a lifting mechanism.

[0065] Although a single spindle platform supported by a single lift mechanism is shown as some of the exemplary embodiments above, there may be multiple spindle platforms and lift mechanisms. There may also be embodiments that do not have a lift mechanism.

[0066] An exemplary alternative robot is depicted diagrammatically at 1000 in FIG. 8, hereafter referred to as "robot 1000". The robot 1000 is supported by a stationary base 108 and may include a linear guide and actuation system 110, a traverse platform 112, a lifting mechanism 114, a spindle platform 116, and a control system 106, similar to the previous embodiments. An arm 1012 is attached to the spindle platform 116, the arm 1012 having an upper arm 1014 and two forearms 1016, each carrying an end effector, the forearms 1016 being coupled to the upper arm 1014 via a coaxial revolute joint (referred to as elbow joint 1020). The upper arm 1014 may house two motors (motor A and motor B), each configured to actuate one of the two forearms 1016. Although FIG. 8 shows motors A and B in a configuration with external rotors, motors A and B may also be in an internal rotor configuration. Alternatively, any suitable motor configuration, type and design may be used.

[0067] It should be noted that the bearings, bearing configurations, and bearing locations shown in the figures described herein are for illustration purposes only, and the purpose is to convey how the individual parts may generally be constrained relative to one another. Any suitable bearings, bearing configurations, and bearing locations may be used.

[0068] Although a communication network has been described as the means of communication between the various components of the control system, any other suitable means of communication between the master controller and the control modules may be utilized, such as a wireless network or a point-to-point bus.

[0069] The features described herein may be used in conjunction with the features described in U.S. patent application Ser. Nos. 16 / 788,993, 16 / 788,973, and 15 / 294,099, which are incorporated by reference in their entireties.

[0070] In an exemplary embodiment, the apparatus comprises: Spindle platform and; a traverse platform configured to move in a first direction; an elevation system coupled to the spindle platform and the traverse platform, the elevation system configured to move the spindle platform between a folded position and an extended position in a second direction perpendicular to the first direction; at least one movable arm connected to the spindle platform, the at least one movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; at least one first actuator connected to the spindle platform and configured to cause the first link to pivot; and at least one second actuator disposed on the at least one movable arm and configured to cause the second link to pivot; Equipped with. The first actuator extends from the spindle platform to the first link and occupies a combined thickness of the spindle platform and the first link.

[0071] The at least one first actuator and the at least one second actuator may be configured to vertically overlap. The first actuator may be configured to nest with the second actuator. The apparatus may further comprise a linear guide system on the traverse platform. In that case, the linear guide system is configured to constrain the movement of the traverse platform in a linear direction. The linear guide system may comprise at least one linear bearing on the traverse platform, the at least one linear bearing configured to engage a rail and slide on the rail. The apparatus may further comprise a linear actuation system provided on the traverse platform. In that case, the linear actuation system is configured to move the traverse platform in a linear direction. The linear actuation system may comprise a linear actuator and at least one position sensor. The linear actuator may comprise a permanent magnet motor having at least one coil, where the at least one coil is configured to magnetically engage a track. The at least one position sensor may be disposed on the traverse platform and may be configured to be controlled along a linear direction using a control means. The lifting system may comprise at least one linkage extending between the traverse platform and the spindle platform and rotatable relative to the spindle platform. The at least one linkage may be rotatable on the traverse platform using a rotary actuator. The rotary actuator may be controllable with a control means to maintain the spindle platform in a substantially horizontal position relative to the traverse platform. The lifting system may further comprise a counterbalance spring.

[0072] In another exemplary embodiment, a method includes providing a traverse platform configured to move in a first direction; Providing a spindle platform; providing an elevation system coupled to the spindle platform and the traverse platform, the elevation system configured to move the spindle platform between a folded position and an extended position in a second direction perpendicular to the first direction; providing at least one movable arm connected to the spindle platform, the at least one movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; providing at least one first actuator connected to the spindle platform and configured to cause the first link to pivot; and providing at least one second actuator disposed on the at least one movable arm and configured to cause the second link to pivot; Includes. The first actuator extends from the spindle platform to the first link and occupies a combined thickness of the spindle platform and the first link.

[0073] The at least one first actuator and the at least one second actuator may be configured to vertically overlap. The method may include providing a linear guide system on the traverse platform, where the linear guide system is configured to constrain movement of the traverse platform in a linear direction. The method may include providing a linear actuation system disposed on the traverse platform, where the linear actuation system is configured to move the traverse platform in a linear direction. The method may include controlling movement of the traverse platform in a first direction using a position sensor and a control means. The method may further include controlling movement of the spindle platform in a second direction using a control means.

[0074] In another exemplary embodiment, an apparatus includes at least one processor and at least one non-volatile memory storing computer program instructions that, when executed by the at least one processor, cause the apparatus to: moving the traverse platform in a first direction; activating an elevation system coupled to the traverse platform and the spindle platform to move the spindle platform in a second direction perpendicular to the first direction between a folded position and an extended position; manipulating at least one movable arm connected to the spindle platform, the at least one movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; actuating at least one first actuator means connected to said spindle platform and configured to cause pivoting of said first link and at least one second actuator means disposed on said at least one movable arm and configured to cause pivoting of said second link; The present invention is configured to perform the following steps. The first actuator means extends from the spindle platform to the first link and occupies a combined thickness of the spindle platform and the first link.

[0075] The apparatus may be further adapted to nest the first actuator means and the second actuator means. Moving the traverse platform in the first direction may include using a linear drive system to move the traverse platform along a rail. Using a linear drive system to move the traverse platform along a rail may include operating a permanent magnet motor having a coil arranged along a magnet track. The apparatus may further include using at least one processor and at least one non-transitory memory in conjunction with a position sensor on the traverse platform to sense a position of the traverse platform. The apparatus may further comprise using the at least one processor and the at least one non-transitory memory in conjunction with a lifting system to level the spindle platform relative to the traverse platform.

[0076] In another exemplary embodiment, an apparatus includes a traverse platform configured to move in a first direction; a spindle platform having a first actuator and a first control coupled to the first actuator; at least one movable arm connected to the spindle platform, the at least one movable arm having a first link connected to the first actuator and at least one second link connected to the first link, the second link having at least one second actuator and controlled by a second controller of the at least one movable arm, the at least one first actuator configured to cause pivoting of the first link and the at least one second actuator configured to cause pivoting of the second link; an elevation system coupled to the spindle platform and the traverse platform, the elevation system being configured to move the spindle platform between a folded position and an extended position in a second direction perpendicular to the first direction, the elevation system having a third actuator on the traverse platform and a third control connected to the third actuator; Equipped with. The first actuator extends from the spindle platform to the first link and occupies a combined thickness of the spindle platform and the first link.

[0077] The first actuator may be nested with the at least one second actuator. The first controller, the second controller, and the third controller are controlled by a master controller via a communication network. To cooperate The apparatus may further include a system of magnets and coils configured to move the traverse platform in the first direction. The master control may be disposed on the traverse platform. The master control may be disposed external to the traverse platform. The traverse platform may be configured to move in a first direction along a system of linear bearings and rails. The apparatus may further include a system of magnets and coils configured to move the traverse platform in the first direction.

[0078] It should also be understood that the above description is merely an example. Various variations and modifications may occur to those skilled in the art. For example, features from the various embodiments described above may be selectively combined to form new embodiments. This application is therefore intended to embrace all such variations, modifications, and variations that fall within the scope of the appended claims.

Claims

1. a spindle platform; a traverse platform configured to move in a first direction; an elevator system coupled to the spindle platform and the traverse platform, the elevator system configured to move the spindle platform between a collapsed position and an extended position in a second direction perpendicular to the first direction; at least one movable arm connected to the spindle platform, the at least one movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; at least one first actuator connected to the spindle platform and configured to cause the first link to pivot; and at least one second actuator disposed on the at least one movable arm and configured to cause the second link to pivot; wherein the first actuator extends from the spindle platform to the first link and occupies a combined thickness of the spindle platform and the first link.

2. The apparatus of claim 1 , wherein the at least one first actuator and the at least one second actuator are configured to vertically overlap.

3. The apparatus of claim 1 , wherein the first actuator is configured to nest with the second actuator.

4. The apparatus of claim 1 , further comprising a linear guide system on the traverse platform, the linear guide system configured to constrain movement of the traverse platform in a linear direction.

5. The apparatus of claim 4 , wherein the linear guide system comprises at least one linear bearing on the traverse platform, the at least one linear bearing configured to engage a rail and slide on the rail.

6. The apparatus of claim 1 , further comprising a linear actuation system disposed on the traverse platform, the linear actuation system configured to move the traverse platform in a linear direction.

7. The apparatus of claim 6 , wherein the linear actuation system comprises a linear actuator and at least one position sensor.

8. The apparatus of claim 7 , wherein the linear actuator comprises a permanent magnet motor having at least one coil, the at least one coil configured to magnetically engage a track.

9. The apparatus of claim 7 , wherein the at least one position sensor is disposed on the traverse platform and configured to be controlled along a linear direction using a control means.

10. 2. The apparatus of claim 1, wherein the lifting system includes at least one linkage extending between the traverse platform and the spindle platform and rotatable relative to the traverse platform and the spindle platform.

11. The apparatus of claim 10 , wherein the at least one linkage is pivotable on the traverse platform using a rotary actuator.

12. 12. The apparatus of claim 11, wherein the rotary actuator is controllable using a control means to maintain the spindle platform in a substantially horizontal position relative to the traverse platform.

13. The apparatus of claim 1 , wherein the lifting system further comprises a counterbalance spring.

14. providing a traverse platform configured to move in a first direction; providing a spindle platform; providing an elevator system coupled to the spindle platform and the traverse platform, the elevator system configured to move the spindle platform between a collapsed position and an extended position in a second direction perpendicular to the first direction; providing at least one movable arm connected to the spindle platform, the at least one movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; providing at least one first actuator connected to the spindle platform and configured to cause the first link to pivot; and providing at least one second actuator disposed on the at least one movable arm and configured to cause the second link to pivot; wherein the first actuator extends from the spindle platform to the first link and occupies a combined thickness of the spindle platform and the first link.

15. The method of claim 14 , wherein the at least one first actuator and the at least one second actuator are configured to vertically overlap.

16. The method of claim 14 , including providing a linear guide system on the traverse platform, the linear guide system configured to constrain movement of the traverse platform in a linear direction.

17. The method of claim 14 , comprising providing a linear actuation system mounted on the traverse platform, the linear actuation system configured to move the traverse platform in a linear direction.

18. 15. The method of claim 14, including controlling movement of the traverse platform in a first direction using a position sensor and control means.

19. The method of claim 14 further comprising controlling the movement of the spindle platform in a second direction using a control means.

20. 1. An apparatus comprising at least one processor and at least one non-volatile memory storing computer program instructions, the computer program instructions, when executed by the at least one processor, causing the apparatus to: moving the traverse platform in a first direction; actuating an elevator system coupled to the traverse platform and the spindle platform to move the spindle platform in a second direction perpendicular to the first direction between a collapsed position and an extended position; manipulating at least one movable arm connected to the spindle platform, the at least one movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; activating at least one first actuator means connected to the spindle platform and configured to cause rotation of the first link and at least one second actuator means disposed on the at least one movable arm and configured to cause rotation of the second link; wherein said first actuator means extends from said spindle platform to said first link and occupies a combined thickness of said spindle platform and said first link.

21. 21. The apparatus of claim 20, wherein said first actuator means and said second actuator means are adapted to be nested.

22. 21. The apparatus of claim 20, wherein moving the traverse platform in the first direction includes using a linear drive system to move the traverse platform along a rail.

23. 21. The apparatus of claim 20, wherein using a linear drive system to move the traverse platform along rails includes operating a permanent magnet motor having coils arranged along a magnet track.

24. 21. The apparatus of claim 20, further comprising using the at least one processor and the at least one non-transitory memory in conjunction with a position sensor on the traverse platform to sense a position of the traverse platform.

25. 21. The apparatus of claim 20, further comprising using the at least one processor and the at least one non-transitory memory in conjunction with an elevation system to level the spindle platform relative to the traverse platform.

26. a traverse platform configured to move in a first direction; a spindle platform having a first actuator and a first control connected to the first actuator; at least one movable arm connected to the spindle platform, the at least one movable arm having a first link connected to the first actuator and at least one second link connected to the first link, the second link having at least one second actuator and controlled by a second controller of the at least one movable arm, the at least one first actuator configured to cause rotation of the first link and the at least one second actuator configured to cause rotation of the second link; an elevator system coupled to the spindle platform and the traverse platform, the elevator system being configured to move the spindle platform between a folded position and an extended position in a second direction perpendicular to the first direction, the elevator system including a third actuator on the traverse platform and a third control connected to the third actuator; wherein the first actuator extends from the spindle platform to the first link and occupies a combined thickness of the spindle platform and the first link.

27. 27. The apparatus of claim 26, wherein the first actuator is nested within the second actuator.

28. 27. The apparatus of claim 26, wherein the first control unit, the second control unit, and the third control unit are coordinated over a communications network by a master control unit.

29. 30. The apparatus of claim 28, wherein the master control is located on the traverse platform.

30. 30. The apparatus of claim 28, wherein the master control is located external to the traverse platform.

31. 27. The apparatus of claim 26, wherein the traverse platform is configured to move in a first direction along a system of linear bearings and rails.

32. 32. The apparatus of claim 31, further comprising a magnet and coil system configured to move the traverse platform in the first direction.

Images