Photoelectric conversion device and photoelectric conversion system

Abstract

To provide a photoelectric conversion device having an avalanche diode capable of ensuring reliability.SOLUTION: A first electrode to which a first voltage is supplied from outside of the photoelectric conversion device is provided in a first multilayer wiring layer or a second multilayer wiring layer. The first electrode is not electrically connected to a second semiconductor layer.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a structure of a photoelectric conversion device and a photoelectric conversion system. [Background technology]

[0002] There is known a photoelectric conversion device capable of detecting weak light at the single photon level by utilizing avalanche (electron avalanche) multiplication. Patent Document 1 discloses a photoelectric conversion device in which a sensor chip on which a plurality of pixels are arranged and a circuit chip on which a circuit for performing signal processing is formed are both electrically connected in a stacked structure. It is disclosed that avalanche diodes in which electric charges undergo avalanche multiplication are used for the pixels in the sensor chip of this photoelectric conversion device. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] US Patent Application Publication No. 2017 / 0186798 Summary of the Invention [Problem to be solved by the invention]

[0004] In Patent Document 1, no consideration is given to wiring for supplying a high voltage for driving the stacked avalanche diode, and the reliability of the photoelectric conversion device is not sufficiently ensured. [Means for solving the problem]

[0005] The photoelectric conversion device of the present invention comprises a first chip having a first semiconductor layer having an avalanche diode and a first multilayer wiring layer, a second chip having a second semiconductor layer having a signal processing unit that processes a signal from the avalanche diode and a second multilayer wiring layer, wherein the first chip and the second chip are stacked, a first voltage and a second voltage are supplied to the avalanche diode, a third voltage is supplied to the signal processing unit, a potential difference between the first voltage and the third voltage is greater than a potential difference between the second voltage and the third voltage, a first electrode to which the first voltage is supplied from outside the photoelectric conversion device is provided in the first multilayer wiring layer or the second multilayer wiring layer, and the first electrode is not electrically connected to the second semiconductor layer. Effect of the Invention

[0006] According to the photoelectric conversion device of the present invention, it is possible to provide a photoelectric conversion device having an avalanche diode capable of ensuring reliability. [Brief description of the drawings]

[0007] [Figure 1] 1 is a schematic diagram of a photoelectric conversion device, a pixel chip, and a circuit chip according to a first embodiment. [Diagram 2] 1 is a block diagram of a pixel according to a first embodiment. [Diagram 3] 1 is a cross-sectional view of a photoelectric conversion device according to a first embodiment. [Figure 4] 1 is a plan view of a photoelectric conversion device according to a first embodiment. [Diagram 5] FIG. 4 is a cross-sectional view of a photoelectric conversion device according to a second embodiment. [Figure 6] FIG. 11 is a cross-sectional view of a photoelectric conversion device according to a third embodiment. [Figure 7] FIG. 11 is a plan view of a photoelectric conversion device according to a third embodiment. [Figure 8] FIG. 11 is a cross-sectional view of a photoelectric conversion device according to a fourth embodiment. [Figure 9] FIG. 11 is a plan view of a photoelectric conversion device according to a fourth embodiment. [Figure 10] FIG. 11 is a cross-sectional view of a photoelectric conversion device according to a fifth embodiment. [Figure 11] FIG. 13 is a plan view of a photoelectric conversion device according to a fifth embodiment. [Figure 12] FIG. 13 is a cross-sectional view of a photoelectric conversion device according to a sixth embodiment. [Figure 13] FIG. 13 is a block diagram showing a schematic configuration of a seventh embodiment. [Figure 14] FIG. 13 is a schematic diagram of a photoelectric conversion system and a moving object according to an eighth embodiment. [Figure 15] FIG. 13 is a flowchart showing the operation of the photoelectric conversion system according to the eighth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] A photoelectric conversion device according to an embodiment of the present invention will be described. Since the common symbols in each embodiment indicate the same members or members having the same functions and effects, the description may be omitted. In addition, the configurations described in each embodiment can be mutually replaced with the configurations described in other embodiments.

[0009] [First embodiment] 1(A) is a diagram showing the configuration of a stacked photoelectric conversion device according to an embodiment of the present invention. The photoelectric conversion device 1010 is configured by stacking and electrically connecting two chips, a sensor chip 11 and a circuit chip 21.

[0010] The sensor chip 11 has a pixel region 12 arranged thereon, and the circuit chip 21 has a circuit region 22 arranged thereon for processing signals detected in the pixel region 12 .

[0011] 1(B) is a layout diagram of the sensor chip 11. Pixels 100 each having a photoelectric conversion unit 101 that converts light into an electrical signal are arranged two-dimensionally to form a pixel region 12. The pixels 100 are typically pixels for forming an image, but when used for TOF (Time of Flight), they do not necessarily need to form an image. In other words, the pixels 100 may be pixels for measuring the time at which light arrives and the amount of light.

[0012] Fig. 1(C) is a configuration diagram of the circuit chip 21. It has a signal processing unit 102 that processes charges photoelectrically converted by the photoelectric conversion unit 101 in Fig. 1(B), a control pulse generating unit 109, a horizontal scanning circuit unit 104, a signal line 107, and a vertical scanning circuit unit 103.

[0013] The photoelectric conversion unit 101 in FIG. 1B and the signal processing unit 102 in FIG. 1C are electrically connected via a connection wiring provided for each pixel.

[0014] The vertical scanning circuit unit 103 receives a control pulse supplied from a control pulse generating unit 109 and supplies the control pulse to each pixel. The vertical scanning circuit unit 103 uses logic circuits such as a shift register and an address decoder.

[0015] The signal output from the photoelectric conversion unit 101 of each pixel is processed by the signal processing unit 102. The signal processing unit 102 is provided with a counter and a memory, and the digital signal is held in the memory.

[0016] The horizontal scanning circuit unit 104 inputs a control pulse for sequentially selecting each column to the signal processing unit 102 in order to read out the signal from the memory of each pixel in which the digital signal is held.

[0017] A signal is output to the signal line 107 and the signal line 105 from the signal processing unit 102 of the pixel selected by the vertical scanning circuit unit 103 for the selected column.

[0018] The signal output to the signal line 105 is output via an output circuit 108 to a recording unit or a signal processing unit outside the photoelectric conversion device 1010 .

[0019] 1B, the pixels 100 in the pixel region 12 may be arranged one-dimensionally. The vertical scanning circuit unit 103 and the horizontal scanning circuit unit 104 may be arranged for each region by dividing the circuit region 22 into a plurality of regions. The function of the signal processing unit 102 does not necessarily need to be provided for each pixel 100. For example, one signal processing unit 102 may be shared by a plurality of pixels 100, and signal processing may be performed sequentially.

[0020] Fig. 2 is an example of a block diagram including the equivalent circuits of Fig. 1(B) and Fig. 1(C). In Fig. 2, a photoelectric conversion unit 101 having a photodiode 201 is provided on a sensor chip 11, and other members are provided on a circuit chip 21.

[0021] The photodiode 201 generates a pair of charges according to the incident light by photoelectric conversion. A voltage VL (first voltage) is supplied to the anode of the photodiode 201. A voltage VH (second voltage) higher than the voltage VL supplied to the anode is supplied to the cathode of the photodiode 201. Although not shown, the voltage VH (second voltage) is also supplied to a circuit provided in the circuit chip 21. A reverse bias voltage is supplied to the anode and cathode of the photodiode 201 so that the photodiode 201 becomes an avalanche diode. By supplying such a voltage, avalanche multiplication of charges generated by the incident light occurs, and an avalanche current is generated. When a reverse bias voltage is supplied and the potential difference between the anode and the cathode is larger than the breakdown voltage, the avalanche diode operates in Geiger mode. For example, the voltage VL (first voltage) is −30V and the voltage VH (second voltage) is 1.1V.

[0022] The quench element 202 is connected to a power supply that supplies a voltage VH and the photodiode 201. The quench element 202 has a function of converting a change in avalanche current occurring in the photodiode 201 into a voltage signal. The quench element 202 functions as a load circuit (quench circuit) during signal multiplication by avalanche multiplication, and has a function of suppressing the voltage supplied to the photodiode 201 and suppressing the avalanche multiplication (quench operation). The photodiode 201 provided in the sensor chip 11 and the quench element 202 provided in the circuit chip 21 are electrically connected via a connection wiring provided for each pixel.

[0023] The signal processing unit 102 includes a waveform shaping unit 203, a counter circuit 209, and a selection circuit 206. In this specification, the signal processing unit 102 may include any one of the waveform shaping unit 203, the counter circuit 209, and the selection circuit 206. For example, the counter circuit 209 is also a part of the signal processing unit 102.

[0024] The waveform shaping unit 203 shapes the potential change of the cathode of the photodiode 201 obtained when a photon is detected, and outputs a pulse signal. For example, an inverter circuit is used as the waveform shaping unit 203. In Fig. 2, an example in which one inverter is used as the waveform shaping unit 203 is shown, but a circuit in which a plurality of inverters are connected in series may be used, or another circuit having a waveform shaping effect may be used.

[0025] The counter circuit 209 counts the pulse signals output from the waveform shaping unit 203. When the counter circuit 209 is, for example, an N-bit counter (N: positive integer), it can count up to about 2 to the power of N pulse signals generated by a single photon. The counted signals are held as detected signals. Furthermore, when a control pulse pRES is supplied via the drive line 207, the signal held in the counter circuit 209 is reset.

[0026] A control pulse pSEL is supplied to the selection circuit 206 from the vertical scanning circuit unit 103 in Fig. 1(C) via a drive line 208 in Fig. 2 (not shown in Fig. 1(C)), and switches between electrical connection and non-connection between the counter circuit 209 and the signal line 107. The selection circuit 206 includes, for example, a buffer circuit for outputting a signal.

[0027] The electrical connection may be switched by disposing a switch such as a transistor between the quench element 202 and the photodiode 201 or between the photoelectric conversion unit 101 and the signal processing unit 102. Similarly, the supply of the voltage VH or the voltage VL supplied to the photoelectric conversion unit 101 may be electrically switched using a switch such as a transistor.

[0028] In the pixel region 12 in which a plurality of pixels are arranged in a matrix, a captured image may be obtained by a rolling shutter operation in which the count of the counter circuit 209 is reset row by row, and the signals held in the counter circuit 209 are output row by row. Alternatively, a captured image may be obtained by a global electronic shutter operation in which the counts of the counter circuits 209 of all pixel rows are reset simultaneously, and the signals held in the counter circuit 209 are output row by row. When performing the global electronic shutter operation, it is preferable to provide a means for switching between a case where the counter circuit 209 counts and a case where it does not. The switching means is, for example, the switch described above.

[0029] In this embodiment, a configuration using the counter circuit 209 has been shown. However, instead of the counter circuit 209, a photoelectric conversion device 1010 may be configured to acquire the pulse detection timing using a time-to-digital converter (hereinafter, TDC) and a memory. In this case, the generation timing of the pulse signal output from the waveform shaping unit 203 is converted into a digital signal by the TDC. To measure the timing of the pulse signal, a control pulse pREF (reference signal) is supplied to the TDC from the vertical scanning circuit unit 103 in FIG. 1C via a driving line. The TDC acquires, as a digital signal, a signal obtained by converting the input timing of the signal output from each pixel via the waveform shaping unit 203 into a relative time based on the control pulse pREF.

[0030] (Cross-sectional view of the photoelectric conversion device according to the present embodiment: FIG. 3) 3 is a cross-sectional view of the photoelectric conversion device of this embodiment. This embodiment has a structure in which a first chip 301 and a second chip 401 are stacked and electrically connected.

[0031] (Configuration of first chip 301) A pixel region 521 is arranged on the first chip 301. A circuit region 531 that processes signals detected in the pixel region 521 is arranged on the second chip 401. The first chip 301 and the second chip 401 correspond to the sensor chip 11 and the circuit chip 21 in FIG. 1(A), respectively.

[0032] First chip 301 is composed of semiconductor layer 311 (first semiconductor layer) and wiring layer 312 (first wiring layer). In the following description, the light incident surface of first chip 301 is referred to as surface 313 (first surface), and the surface opposite surface 313 is referred to as surface 314 (second surface).

[0033] A first semiconductor region 321 of a first conductivity type and a second semiconductor region 322 of a second conductivity type are arranged on a semiconductor layer 311 of a first chip 301. The first semiconductor region 321 and the second semiconductor region 322 form a PN junction to form an avalanche diode 324.

[0034] Here, the semiconductor region in which the charge pairs generated in the photoelectric conversion unit are used as signal charges as the majority carriers is called the first conductivity type semiconductor region. Also, the semiconductor region in which the charge not used as signal charges is used as the majority carrier is called the second conductivity type semiconductor region. For example, when electrons are used as signal charges, the first conductivity type semiconductor region is made of an n-type semiconductor, and the second conductivity type semiconductor region is made of a p-type semiconductor. When holes are used as signal charges, the opposite is true. In this embodiment, the description will be given assuming that electrons are used as signal charges.

[0035] A third semiconductor region 323 of the first or second conductivity type is disposed at both ends of the first semiconductor region 321 in order to reduce electric field concentration. In this case, the impurity concentration of the third semiconductor region 323 is set lower than the impurity concentration of the first semiconductor region 321. For example, when the impurity concentration of the first semiconductor region 321 is 6.0×10 18 [atms / cm3] or more, the impurity concentration of the third semiconductor region 323 is 1.0×10 16 [atms / cm3] or more, 1.0×10 18 [atms / cm3] or less.

[0036] A fourth semiconductor region 325 of the second conductivity type is arranged in a region closer to the surface 313 than the second semiconductor region 322. Furthermore, a fifth semiconductor region 326 of the second conductivity type is arranged between adjacent pixels as an inter-pixel isolation region, and a sixth semiconductor region 327 of the second conductivity type is arranged in a region closer to the surface 313 than the fourth semiconductor region 325.

[0037] Here, the impurity concentration of the fifth semiconductor region 326 and the sixth semiconductor region 327 is set to be higher than the impurity concentration of the fourth semiconductor region 325. This allows the charges photoelectrically converted in the fourth semiconductor region 325 to be collected in the avalanche diode 324 and avalanche amplified without leaking into adjacent pixels.

[0038] A pinning film 341 is disposed on the interface on the surface 313 side of the first chip 301 to suppress dark current generated at the chip interface.

[0039] A multilayer wiring layer 331 (first multilayer wiring layer) is disposed on the wiring layer 312 of the first chip 301. This multilayer wiring layer 331 is, for example, a wiring layer that applies an anode potential to the avalanche diode 324, or a wiring layer that applies a cathode potential to the avalanche diode 324. A signal detected by the avalanche diode 324 is sent to the second chip 401 via the multilayer wiring layer 331 and a joint 332 (first joint).

[0040] A pad electrode 511 (first electrode) is provided at the bottom of the pad opening 501 (first opening). The pad opening 501 is an opening that exposes the pad electrode 511 in order to electrically connect the pad electrode 511 to an external power supply. The bottom of the pad opening 501 is provided between the surface 313 (first surface) and the surface 314 (second surface) of the first chip 301. A voltage required to cause avalanche multiplication at the junction between the first semiconductor region 321 of the first conductivity type and the second semiconductor region 322 of the second conductivity type is applied to the pad electrode 511 (first electrode) via wire bonding. When the top layer of the multilayer wiring layer 331 is the pad electrode 511, the top layer of the multilayer wiring layer 331 may be made of aluminum wiring, and the other wiring layers may be made of copper wiring.

[0041] A trench oxide film 541 is disposed on the semiconductor layer 311. A semiconductor chip having various circuits and pixels needs to protect the elements from moisture and ions that invade from the atmosphere surrounding the semiconductor chip. Therefore, in order to protect the elements from moisture and ions that invade from the pad opening 501 and the like, a trench oxide film 541 is disposed on the semiconductor layer 311 around the pad opening 501. In addition, a trench oxide film 541 is also disposed on the semiconductor layer 311 around pad openings 502 and 503, which will be described later. In order to improve moisture resistance, metal wiring may be disposed instead of or in addition to the trench oxide film. This metal wiring can protect the elements from moisture and ions that invade the wiring layer.

[0042] (Configuration of second chip 401) Second chip 401 has semiconductor layer 411 (second semiconductor layer) and wiring layer 412 (second wiring layer). In the following description, second chip 401 will be described with the side facing first chip 301 as surface 414 (third surface) and the surface opposite surface 414 as surface 413 (fourth surface).

[0043] A circuit for processing a signal sent from the first chip 301 is disposed in the semiconductor layer 411 of the second chip 401. Specifically, a well region 422, a gate electrode 423, and a source-drain region 424 are disposed to form one MOS transistor 425. An example of the MOS transistor 425 disposed in the second chip 401 is a quench element. The quench element corresponds to the element 202 in FIG. 2, and functions as a load circuit when the photoelectrically converted charge is avalanche multiplied. It has a function of performing a quenching operation that suppresses the avalanche multiplication by suppressing the voltage supplied to the avalanche diode 324.

[0044] Between adjacent MOS transistors, an element isolation region 421 is disposed. Examples of the element isolation region 421 include local oxidation of silicon (LOCOS) and shallow trench isolation (STI).

[0045] A joint 432 (second joint) arranged on wiring layer 412 of second chip 401 comes into contact with joint 332 (first joint) of first chip 301, and serves to transmit the output of avalanche diode 324 of first chip 301 to second chip 401. This joint is a metal wiring such as a copper wiring.

[0046] A multilayer wiring layer 431 (second multilayer wiring layer) is disposed on the wiring layer 412 of the second chip 401. This multilayer wiring layer 431 is, for example, wiring for transmitting a signal sent from the first chip 301 to a processing circuit of the second chip 401, and power supply wiring and ground wiring for driving the signal processing unit 102 mounted on the second chip 401.

[0047] A ground region 441 is disposed in the semiconductor layer 411 of the second chip 401. A voltage of ground potential (ground voltage; third voltage) is supplied to the ground region 441 through a pad electrode 513 (third electrode) disposed at the bottom of a pad opening 503 (third opening). The bottom of the pad opening 503 is provided between a surface 414 (third surface) and a surface 413 (fourth surface) of the second chip 401. The third voltage is, for example, 0 V. Note that in FIG. 3, the voltage applied from the pad electrode 513 (third electrode) is supplied to the ground region 41, but the ground region 411 does not necessarily have to be provided. In this case, the voltage applied from the pad electrode 513 (third electrode) is directly supplied to other circuit elements.

[0048] A predetermined potential is supplied to the drain electrode of the MOS transistor 425 arranged in the second chip 401 through a pad electrode 512 (second electrode) arranged at the bottom of the pad opening 502 (second opening). The bottom of the pad opening 502 is provided between the surface 414 (third surface) and the surface 413 (fourth surface) of the second chip 401. As described above, the MOS transistor 425 is, for example, a quench element that functions as a load circuit during signal multiplication by avalanche multiplication. In this case, the predetermined potential is, for example, a voltage VH (second voltage) of 1.1 V. The voltage VL (first voltage) is, for example, -30 V, so the potential difference between the voltage VL (first voltage) and the voltage VH (second voltage) is greater than the potential difference between the voltage VH (second voltage) and the voltage of the ground potential (third voltage). Moreover, the potential difference between the voltage VL (first voltage) and the voltage of the ground potential (third voltage) is larger than the potential difference between the voltage VH (second voltage) and the voltage of the ground potential (third voltage).

[0049] Fig. 4(A) shows a plan view of the dashed line AA' in Fig. 3. The plan view refers to the arrangement when the photoelectric conversion device 1010 is viewed from a direction perpendicular to the main surface of the semiconductor layer 311 or 411 (the normal direction to the main surface). When viewed from above, overlapping members can be seen through.

[0050] 4(A), in a pixel region 521, junctions 332 for sending signals generated in each pixel to a second chip 401 are two-dimensionally arranged. That is, the multiple junctions 332 are arranged in both a first direction 550 (row direction) and a second direction 560 (column direction) perpendicular to the first direction 550. Outside the pixel region 521, multiple pad electrodes 511, 512, and 513 are arranged.

[0051] In the second direction 560 (column direction), the length of each of the pad electrodes 511, 512, and 513 is greater than the length of the joint 332. That is, one pad electrode is provided corresponding to the joints 332 provided in multiple rows (two rows in FIG. 4(A)). This is because the potential supplied from each pad electrode can be configured to be supplied commonly to pixels in multiple rows. Also, if one pad electrode were provided corresponding to one row, it would be necessary to provide a pad electrode for each pixel pitch, which is unsuitable for miniaturization.

[0052] 4A, the length of each of the pad electrodes 511, 512, and 513 in the first direction 550 (row direction) is also greater than the length of the bonding portion 332. As a result, the area of ​​each of the pad electrodes 511, 512, and 513 is greater than the area of ​​the bonding portion 332.

[0053] Furthermore, in FIG. 4A, one pad electrode is not provided for all the rows of junctions 332, but one pad electrode is provided for a predetermined number of rows of junctions 332 that are less than all the rows. In this embodiment, since the pixel section includes an avalanche diode, an avalanche current flows through the pad electrode that applies a potential to the pixel. If one pad electrode were provided for all the rows, there is a possibility that the current would exceed the limit of the allowable current that can be passed through one pad electrode. Therefore, one pad electrode is provided for the junctions of a predetermined number of rows that is not all the rows.

[0054] In addition, FIG. 4(A) shows an example in which the length of the pad electrode is longer than the length of the joint in both the first direction 550 and the second direction 560, but the pitch may be increased by making the length longer in either one of the directions.

[0055] Furthermore, although one pad electrode is provided for multiple rows in FIG. 4A, it may be configured such that one pad electrode is provided for multiple columns.

[0056] Furthermore, in FIG. 4(A), the pad electrode 511 is concentrated on the right side of the pixel region, and the pad electrodes 512 and 513 are concentrated on the left side of the pixel region. On the other hand, as shown in FIG. 4(B), a unit consisting of the pad electrodes 511, 512, and 513 may be disposed on each of the right and left sides of the pixel region. For example, the avalanche-multiplied charges (electrons and holes) of each pixel are collected by the pad electrode 512 and the holes are collected by the pad electrode 511. For example, in FIG. 4(A), if electrons and holes are generated from the upper left pixel of the pixel region, the electrons are immediately collected by the pad electrode 512 disposed on the left side, but the holes are collected by the pad electrode 511 disposed on the right side after a certain time has passed. In this case, especially for the holes, the avalanche charges are accumulated for each pixel until they are collected by the pad electrode 511 disposed on the right side, which causes a voltage drop. On the other hand, in Fig. 4(B), since the pad electrodes 511 and 512 are arranged on both the right and left sides, both the avalanche-multiplied electrons and holes are collected in a short time, and the voltage drop described above is unlikely to occur. The arrangement shown in Fig. 4(B) has the advantage of being able to suppress the occurrence of shading.

[0057] A voltage VH (second voltage) is supplied to the first semiconductor region 321 of the first conductivity type of the avalanche diode 324 arranged in the first chip 301 from a pad electrode 512. This voltage supply is provided via a MOS transistor 425, a multilayer wiring layer 431 of the second chip, a junction 432 of the second chip, a junction 332 of the first chip, and a multilayer wiring layer 331 of the first chip. A voltage VL (first voltage) is supplied to the second semiconductor region 322 of the second conductivity type via a pad electrode 511, a multilayer wiring layer 331, a fifth semiconductor region 326 of the second conductivity type, and a fourth semiconductor region 325 of the second conductivity type arranged in the first chip. The voltage difference between the voltage VL (first voltage) and the voltage VH (second voltage) is set to be a sufficient electric field that causes avalanche multiplication at the junction between the first semiconductor region 321 of the first conductivity type and the second semiconductor region 322 of the second conductivity type. The necessary voltage difference is, for example, 6V or more, and in the above example, 31.1V has been described.

[0058] Incidentally, in the circuit region 531 of the second chip, fine transistors with a low driving voltage need to be arranged in order to increase the integration degree of the processing circuit. On the other hand, the voltage VL (first voltage) applied to the pad electrode 511 is a voltage required only for the first chip 301 in which the avalanche photodiode is provided, and does not need to be supplied to the circuit region 531 of the second chip. Therefore, in this embodiment, the pad electrode 511 is configured not to be electrically connected to the semiconductor layer 411 of the second chip 401. Specifically, the wiring electrically connected to the pad electrode 511 is configured not to cross the boundary of the joint surface between the first chip 301 and the second chip 401. This makes it possible to suppress a decrease in reliability of the circuit region 531 of the second chip.

[0059] Moreover, the potential applied to the pad electrode 512 is supplied to various processing circuits arranged on the second chip 401 in addition to being supplied to the MOS transistor 425. When the number of functions required of the processing circuits increases and the number of elements mounted on the second chip 401 increases, high speed may become an issue. In this case, it is preferable to supply a potential to the pad electrode 512 by arranging it on the second chip 401 as shown in FIG. 3, rather than arranging the pad electrode 512 on the first chip 301 and supplying the potential via a joint. This configuration can reduce the propagation delay due to wiring, and therefore it is possible to operate the various processing circuits arranged on the second chip 401 at a higher speed.

[0060] Moreover, pad electrode 511 arranged on first chip 301 is arranged on a wiring layer at the same height as the top-layer wiring of multilayer wiring layer 331 of first chip 301. Pad electrodes 512, 513 arranged on second chip 401 are arranged on a wiring layer at the same height as the top-layer wiring of multilayer wiring layer 431 of the second chip. Note that in this specification, multilayer wiring layers 331, 431 do not include joints 332, 432. This reduces the step between pad electrodes arranged on first chip 301 and second chip 401, making it easier to perform the etching process when opening pads. Furthermore, this configuration makes it easier to form wire bonding at the pad openings.

[0061] [Second embodiment] 5 is a cross-sectional view of a photoelectric conversion device according to the second embodiment. The difference from the first embodiment is that pad electrodes 512, 513 are arranged on the first chip 301, and a potential is supplied to the second chip via bonding portions 333, 433. Descriptions of the same members as in the first embodiment will be omitted.

[0062] As shown in FIG. 3, in the first embodiment, the pad opening 501 and the pad openings 502 and 503 have different depths, so that it is necessary to apply optimal etching conditions and wire bonding conditions for each pad opening depth. On the other hand, in the second embodiment shown in FIG. 5, the pad electrodes 511, 512, and 513 are formed in the first chip 301. That is, the bottoms of the pad openings 501, 502, and 503 are provided between the surface 313 (first surface) and the surface 314 (second surface) of the first chip 301. According to this configuration, it is possible to make the depths of the pad openings 501, 502, and 503 uniform, compared to the first embodiment. Therefore, it is not necessary to optimize the etching conditions and wire bonding conditions for forming the pad openings for each pad.

[0063] It is desirable that the pad electrodes 511, 512, and 513 are provided in the same wiring layer of the multilayer wiring layer 331 of the first chip 301. Specifically, in Fig. 5, the pad electrodes 511, 512, and 513 are provided in the uppermost layer of the multilayer wiring layer 331. This makes the pad opening depths the same, so that the etching conditions for forming the pad openings and the conditions for forming the wire bonding can be the same, and these can be formed in the same process.

[0064] 5, pad electrodes 512, 513 and junction 333 are connected by a plurality of via plugs. That is, one pad electrode and one junction are connected by a plurality of via plugs. Similarly, wiring provided in the uppermost layer of multilayer wiring layer 431 provided in second chip 401 and junction 433 are connected by a plurality of via plugs. This can reduce electrical resistance and suppress signal propagation delay.

[0065] Incidentally, as described in the first embodiment, among the voltages that cause avalanche multiplication in avalanche diode 324, voltage VL (first voltage) is applied to pad electrode 511 of the first chip. This voltage is routed through multilayer wiring layer 331 provided in first chip 301, and is therefore not supplied to circuit region 531 of second chip 401. That is, it is possible to suppress a decrease in reliability of circuit region 531 arranged in second chip 401.

[0066] Since the plan view including the dashed line AA' in FIG. 5 is the same as FIG. 3, detailed description thereof will be omitted.

[0067] As a result, in the second embodiment, it is possible to suppress a decrease in reliability of the circuit region 531 of the second chip 401. In addition, it is possible to simplify the processes of forming pad openings and wire bonding.

[0068] [Third embodiment] 6 is a cross-sectional view of a photoelectric conversion device according to the third embodiment. The difference from the first embodiment is that a pad electrode 511 is disposed on the second chip 401, and a potential is supplied to the first chip 301 via the bonding portions 434 and 334. Descriptions of the same members as those in the first embodiment will be omitted.

[0069] In the first embodiment, the pad opening 501 and the pad openings 502 and 503 have different depths, so that it is necessary to apply optimal etching conditions and wire bonding conditions for each pad opening depth. On the other hand, in the third embodiment shown in FIG. 6, the pad electrodes 511, 512, and 513 are formed in the second chip 401. That is, the bottoms of the pad openings 501, 502, and 503 are provided between the surface 414 (third surface) and the surface 413 (fourth surface) of the second chip 401. With this configuration, it is possible to make the depths of the pad openings 501, 502, and 503 uniform, compared to the first embodiment. Therefore, it is not necessary to optimize the etching conditions and wire bonding conditions for forming the pad openings for each pad.

[0070] As described in the first embodiment, the pad electrode 512 is disposed on the second chip 401, and the potential is supplied to the MOS transistor 425 as well as to various processing circuits mounted on the second chip 401. Furthermore, when the number of functions required of the processing circuit increases and the number of elements mounted on the second chip 401 increases, high speed becomes an issue. In this case, it is preferable to supply a potential to the pad electrode 512 disposed on the second chip 401 as shown in FIG. 6, rather than disposing the pad electrode 512 on the first chip 301 and supplying a potential via a joint. This configuration can reduce the propagation delay due to wiring, and therefore it is possible to operate various processing circuits disposed on the second chip 401 at a higher speed.

[0071] In the third embodiment, the pad electrode 511 is configured not to be electrically connected to the semiconductor layer 411 of the second chip 401. This makes it possible to avoid deterioration in the reliability of the circuit region 531 of the second chip.

[0072] FIG. 7 is a plan view of the broken line AA′ in FIG. 6. In the pixel region 521, the junctions 332 for sending signals generated in each pixel to the second chip 401 are arranged two-dimensionally. Outside the pixel region 521, the pad electrodes 511, 512, and 513 arranged on the second chip are arranged. A junction 334 for supplying a voltage to be applied to the pad electrode 511 arranged on the second chip 401 to the pixel region 521 of the first chip 301 is arranged. In both the first direction 550 and the second direction 560, the length of the junction 334 is greater than the length of the junction 332. Therefore, the area of ​​the junction 334 is greater than the area of ​​the junction 332. The explanations regarding FIGS. 4(A) and (B) also apply to FIG. 7.

[0073] As described above, in the third embodiment, it is possible to increase the speed of various processing circuits mounted on the second chip 401 while suppressing a decrease in reliability of the circuit region 531 of the second chip. In addition, it is possible to simplify the processes of forming pad openings and wire bonding.

[0074] [Fourth embodiment] 8 is a cross-sectional view of a photoelectric conversion device according to the fourth embodiment. The difference from the first embodiment is that a through-silicon via (TSV) is used instead of wire bonding. Hereinafter, a description of the same members as those in the first embodiment will be omitted.

[0075] Specifically, the wire bonding wiring provided at the bottom of pad opening 501 in the first embodiment corresponds to through electrode 504 in the fourth embodiment. Similarly, the wire bonding wiring at the bottom of pad opening 502 corresponds to through electrode 505, and the wire bonding wiring at the bottom of pad opening 503 corresponds to through electrode 506, respectively.

[0076] The pad electrode 511 (first electrode) of the first embodiment corresponds to the electrode 514 (first electrode) of the fourth embodiment. Similarly, the pad electrode 513 (second electrode) corresponds to the electrode 516 (second electrode), and the pad electrode 512 (third electrode) corresponds to the electrode 515. That is, these electrodes have in common that they are electrodes provided in the multilayer wiring layer 431 (second multilayer wiring layer) and are electrodes to which a voltage is supplied from outside the photoelectric conversion device.

[0077] In the fourth embodiment, the bottom of the opening (first opening) formed to expose the electrode 514 in order to conduct the electrode 514 to an external power source is provided between the surface 313 (first surface) and the surface 314 (second surface) of the first chip 301. This point is also common to the first embodiment. Similarly, the bottom of the opening (second opening and third opening) formed to expose the electrodes 516 and 515 is provided between the surface 414 (third surface) and the surface 413 (fourth surface) of the second chip 401. This point is also common to the first embodiment. In this specification, even if the electrode is filled after the opening (trench) is formed, the place where the opening was formed may be called the "opening".

[0078] When the electrode structure is wire-bonded wiring as in the first to third embodiments, it is difficult to reduce the package size because an extra space is required for mounting the wires relative to the chip size. On the other hand, in the case of through electrodes, the through electrodes and the package substrate are connected via bumps or the like, so it is possible to make the chip size and the package size approximately equal. Therefore, as in the first embodiment, which is advantageous in reducing the package size compared to wire-bonding wiring, the potential applied to the through electrodes 504 is supplied to the pixel region 521 of the first chip 301 via the electrodes 514. In addition, the potentials applied to the through electrodes 505 and 506 are supplied to the semiconductor layer 411 corresponding to the circuit region 531 of the second chip 401 via the electrodes 515 and 516, respectively. On the other hand, the potential applied to the through electrodes 504 is not supplied to the circuit region 531 of the second chip 401. Therefore, as in the first embodiment, it is possible to suppress a decrease in reliability of the circuit region 531 arranged in the second chip 401. Furthermore, since through electrodes 505 are arranged in second chip 401, various processing circuits arranged in second chip 401 can be operated at higher speed.

[0079] In addition, electrode 514 arranged on first chip 301 is arranged in a wiring layer at the same height as the topmost wiring of multilayer wiring layer 331 of first chip 301, and electrodes 515 and 516 arranged on second chip 401 are arranged in a wiring layer at the same height as the topmost wiring of multilayer wiring layer 431 of second chip 401.

[0080] The through electrodes are formed by forming an opening (trench) that penetrates the semiconductor layer 411 by etching, and then filling the opening with a metal that serves as the electrode material. When forming trenches corresponding to a plurality of through electrodes by etching, the process is simpler if the trench depth has fewer steps. For this reason, as described above, the process of forming the through electrodes can be simplified by arranging the electrodes that contact the through electrodes in a wiring layer that is at the same height as the topmost wiring of each chip.

[0081] Fig. 9 is a plan view of the dashed line AA' in Fig. 8. In pixel region 521, junctions 332 for sending signals generated in each pixel to second chip 401 are two-dimensionally arranged. Outside pixel region 521, electrode 514 in first chip 301 and electrodes 515 and 516 in second chip 401 are arranged. The explanations regarding Figs. 4(A) and (B) also apply to Fig. 9.

[0082] As described above, in the fourth embodiment, it is possible to achieve a reduction in package size, suppression of deterioration in reliability of circuit region 531 of second chip 401, and an increase in the speed of various processing circuits mounted on second chip 401.

[0083] [Fifth embodiment] 10 is a cross-sectional view of the fifth embodiment. The difference from the fourth embodiment is that electrodes 515 and 516 are provided on a first chip 301. A description of the same members as in the first embodiment will be omitted.

[0084] In the fourth embodiment, the electrode 514 of the first chip and the electrodes 515 and 516 of the second chip are disposed in different locations, so that the etching conditions for forming the trench and the film forming conditions for filling the trench with metal must be optimized according to the location of each electrode. On the other hand, in the fifth embodiment, by disposing the through electrodes 514, 515, and 516 all on the first chip, it becomes unnecessary to optimize the process conditions according to the location of each electrode, and the process can be simplified.

[0085] Moreover, it is preferable that the electrodes 514, 515, and 516 are provided in the same wiring layer of the multilayer wiring layer 331 of the first chip 301. Specifically, in Fig. 10, the electrodes 514, 515, and 516 are provided in the uppermost layer of the multilayer wiring layer 331. This makes the trench depth of each through electrode the same, so that the etching conditions for forming the trenches and the film forming conditions for filling the trenches with a metal that serves as the electrode material can be made the same, and these can be formed in the same process.

[0086] 10, electrodes 515, 516 and joint 335 are connected by a plurality of via plugs. That is, one electrode and one joint provided in the multilayer wiring layer are connected by a plurality of via plugs. Similarly, wiring provided in the top layer of multilayer wiring layer 431 provided in second chip 401 and joint 433 are connected by a plurality of via plugs. This makes it possible to reduce electrical resistance and suppress signal propagation delay.

[0087] Incidentally, as described in the first embodiment, of the voltages that cause avalanche multiplication in avalanche diode 324, voltage VL (first voltage) is applied to electrode 514 of the first chip. This voltage is routed through multilayer wiring layer 331 provided in first chip 301, and is therefore not supplied to circuit region 531 of second chip 401. That is, it is possible to suppress a decrease in reliability of circuit region 531 arranged in second chip 401.

[0088] Fig. 11 is a plan view including the dashed line AA' in Fig. 10. In the pixel region 521, the junctions 332 for sending signals generated in each pixel to the second chip 401 are arranged two-dimensionally. Outside the pixel region 521, the electrodes 514 in the first chip 301, the electrodes 515 and 516 in the first chip 301, and the junctions 335 for transmitting the applied potentials of the electrodes to the second chip are arranged. The explanations regarding Figs. 4(A) and (B) also apply to Fig. 11.

[0089] As described above, in the fifth embodiment, it is possible to suppress a decrease in reliability of the circuit region 531 of the second chip 401. In addition, it is possible to simplify the process of forming the through electrodes.

[0090] [Sixth embodiment] 12 is a cross-sectional view of a photoelectric conversion device according to the sixth embodiment. The difference from the fourth embodiment is that through electrodes 514 are arranged in second chip 401. Descriptions of the same members as in the fourth embodiment will be omitted.

[0091] In the sixth embodiment, compared to the fourth embodiment, since the electrodes 514, 515, and 516 are arranged on the second chip, there is no need to optimize the etching conditions when forming the trenches and the film forming conditions when filling the trenches with metal according to the depth of each electrode, and the process can be simplified.

[0092] It is desirable that the electrodes 514, 515, and 516 are disposed at the same depth within the second chip 401. This makes the trench depth of each through electrode the same, so that the etching conditions for forming the trenches and the film forming conditions for filling the trenches with a metal that will be the electrode material can be the same.

[0093] In the sixth embodiment, the potential applied to the through electrode 504 is supplied to the first chip 301 via the joints 436 and 336, and is therefore not supplied to the circuit region 531 of the second chip 401. Therefore, it is possible to suppress a decrease in the reliability of the circuit region 531 of the second chip.

[0094] The through electrode 515 is disposed in the second chip 401, and the potential is supplied to the MOS transistor 425 as well as to various processing circuits mounted on the second chip 401. When the number of functions required of the processing circuit increases and the number of elements mounted on the second chip 401 increases, high speed becomes an issue. In that case, it is possible to operate various processing circuits disposed on the second chip at a higher speed by disposing the through electrode 515 in the second chip 401 and supplying a potential thereto, rather than disposing the through electrode 515 in the first chip 301 and supplying a potential thereto via a joint. Note that the plan view including the dashed line AA' in FIG. 12 is the same as FIG. 9, and therefore a detailed description thereof will be omitted.

[0095] As described above, in the sixth embodiment, it is possible to suppress deterioration in reliability of circuit region 531 of second chip 401, increase the speed of various processing circuits mounted on second chip 401, and simplify the process of forming the through electrodes.

[0096] [Seventh embodiment] Fig. 13 is a region diagram showing a configuration of a photoelectric conversion system 1200 according to this embodiment. The photoelectric conversion system 1200 of this embodiment includes a photoelectric conversion device 1204. Any of the photoelectric conversion devices described in the above embodiments can be applied to the photoelectric conversion device 1204. The photoelectric conversion system 1200 can be used as, for example, an imaging system. Specific examples of the imaging system include a digital still camera, a digital camcorder, and a surveillance camera. Fig. 13 shows an example of a digital still camera as the photoelectric conversion system 1200.

[0097] 13 includes a photoelectric conversion device 1204, a lens 1202 that forms an optical image of a subject on the photoelectric conversion device 1204, an aperture 1203 that varies the amount of light passing through the lens 1202, and a barrier 1201 that protects the lens 1202. The lens 1202 and the aperture 1203 form an optical system that focuses light on the photoelectric conversion device 1204.

[0098] The photoelectric conversion system 1200 includes a signal processing unit 1205 that processes an output signal output from the photoelectric conversion device 1204. The signal processing unit 1205 performs signal processing operations such as performing various corrections and compression on an input signal as necessary and outputting the signal. The photoelectric conversion system 1200 further includes a buffer memory unit 1206 for temporarily storing image data, and an external interface unit (external I / F unit) 1209 for communicating with an external computer or the like. The photoelectric conversion system 1200 further includes a recording medium 1211 such as a semiconductor memory for recording or reading out imaging data, and a recording medium control interface unit (recording medium control I / F unit) 1210 for recording or reading out the imaging data on the recording medium 1211. The recording medium 1211 may be built in the photoelectric conversion system 1200 or may be removable. In addition, communication between the recording medium control I / F unit 1210 and the recording medium 1211 and communication from the external I / F unit 1209 may be performed wirelessly.

[0099] Furthermore, the photoelectric conversion system 1200 has an overall control / calculation unit 1208 that performs various calculations and controls the entire digital still camera, and a timing generation unit 1207 that outputs various timing signals to the photoelectric conversion device 1204 and the signal processing unit 1205. Here, the timing signals and the like may be input from outside, and the photoelectric conversion system 1200 only needs to have at least the photoelectric conversion device 1204 and the signal processing unit 1205 that processes the output signal output from the photoelectric conversion device 1204.

[0100] The overall control / calculation unit 1208 and the timing generation unit 1207 may be configured to implement a part or all of the control functions of the photoelectric conversion device 1204 .

[0101] The photoelectric conversion device 1204 outputs an image signal to the signal processing unit 1205. The signal processing unit 1205 performs a predetermined signal processing on the image signal output from the photoelectric conversion device 1204, and outputs image data. The signal processing unit 1205 also generates an image using the image signal. The signal processing unit 1205 may also perform distance measurement calculation on the signal output from the photoelectric conversion device 1204. The signal processing unit 1205 and the timing generating unit 1207 may be mounted on the photoelectric conversion device. That is, the signal processing unit 1205 and the timing generating unit 1207 may be provided on a chip on which pixels are arranged. By configuring an imaging system using the photoelectric conversion device of each of the above-mentioned embodiments, an imaging system capable of acquiring a higher quality image can be realized.

[0102] [Eighth embodiment] The photoelectric conversion system and the moving body of this embodiment will be described with reference to Fig. 14 and Fig. 15. Fig. 14 is a schematic diagram showing a configuration example of the photoelectric conversion system and the moving body according to this embodiment. Fig. 15 is a flow diagram showing the operation of the photoelectric conversion system according to this embodiment. In this embodiment, an example of an in-vehicle camera is shown as the photoelectric conversion system.

[0103] FIG. 14 shows an example of a vehicle system and a photoelectric conversion system mounted thereon for capturing images. The photoelectric conversion system 1301 includes a photoelectric conversion device 1302, an image preprocessing unit 1315, an integrated circuit 1303, and an optical system 1314. The optical system 1314 forms an optical image of a subject on the photoelectric conversion device 1302. The photoelectric conversion device 1302 converts the optical image of the subject formed by the optical system 1314 into an electric signal. The photoelectric conversion device 1302 is any of the photoelectric conversion devices according to the above-mentioned embodiments. The image preprocessing unit 1315 performs a predetermined signal processing on the signal output from the photoelectric conversion device 1302. The function of the image preprocessing unit 1315 may be incorporated in the photoelectric conversion device 1302. The photoelectric conversion system 1301 is provided with at least two sets of an optical system 1314, a photoelectric conversion device 1302, and an image pre-processing unit 1315, and the output from each set of the image pre-processing unit 1315 is input to the integrated circuit 1303.

[0104] The integrated circuit 1303 is an integrated circuit for use in an imaging system, and includes an image processing unit 1304 including a memory 1305, an optical distance measuring unit 1306, a distance measuring calculation unit 1307, an object recognition unit 1308, and an abnormality detection unit 1309. The image processing unit 1304 performs image processing such as development processing and defect correction on the output signal of the image pre-processing unit 1315. The memory 1305 temporarily stores the captured image and stores the defective positions of the captured pixels. The optical distance measuring unit 1306 performs focusing and distance measurement of the subject. The distance measuring calculation unit 1307 calculates distance measurement information from multiple image data acquired by multiple photoelectric conversion devices 1302. The object recognition unit 1308 recognizes subjects such as cars, roads, signs, and people. When the abnormality detection unit 1309 detects an abnormality in the photoelectric conversion device 1302, it notifies the main control unit 1313 of the abnormality.

[0105] The integrated circuit 1303 may be realized by dedicated hardware, a software module, or a combination of these. It may also be realized by a field programmable gate array (FPGA), an application specific integrated circuit (ASIC), or the like, or a combination of these.

[0106] The main control unit 1313 supervises and controls the operations of the photoelectric conversion system 1301, the vehicle sensor 1310, the control unit 1320, etc. It is also possible to adopt a method in which the main control unit 1313 is not provided, and the photoelectric conversion system 1301, the vehicle sensor 1310, and the control unit 1320 each have their own communication interface and transmit and receive control signals via a communication network (for example, CAN standard).

[0107] The integrated circuit 1303 has a function of receiving a control signal from the main control unit 1313 or transmitting a control signal or a set value to the photoelectric conversion device 1302 by its own control unit.

[0108] The photoelectric conversion system 1301 is connected to a vehicle sensor 1310, and can detect the vehicle's driving state, such as vehicle speed, yaw rate, and steering angle, as well as the state of the environment outside the vehicle, other vehicles, and obstacles. The vehicle sensor 1310 is also a distance information acquisition means for acquiring distance information to an object. The photoelectric conversion system 1301 is also connected to a driving assistance control unit 1311 that performs various driving assistance functions, such as automatic steering, automatic cruising, and collision prevention functions. In particular, the collision determination function determines whether or not a collision with another vehicle or obstacle has occurred based on the detection results of the photoelectric conversion system 1301 and the vehicle sensor 1310. This allows for avoidance control when a collision is estimated, and activation of a safety device when a collision occurs.

[0109] The photoelectric conversion system 1301 is also connected to an alarm device 1312 that issues an alarm to the driver based on the result of the determination by the collision determination unit. For example, if the collision determination unit determines that there is a high possibility of a collision, the main control unit 1313 performs vehicle control to avoid a collision and reduce damage by applying the brakes, releasing the accelerator, suppressing engine output, etc. The alarm device 1312 warns the user by sounding an alarm, displaying alarm information on a display screen such as a car navigation system or a meter panel, vibrating a seat belt or steering wheel, etc.

[0110] In this embodiment, the surroundings of the vehicle, for example, the front or rear, are photographed by a photoelectric conversion system 1301. Fig. 14B shows an example of the arrangement of the photoelectric conversion system 1301 when the photoelectric conversion system 1301 photographs the area in front of the vehicle.

[0111] The two photoelectric conversion devices 1302 are disposed in front of the vehicle 1300. Specifically, if the center line of the vehicle 1300 with respect to its forward / backward direction or outer shape (for example, vehicle width) is regarded as an axis of symmetry, it is preferable to dispose the two photoelectric conversion devices 1302 in line symmetry with respect to the axis of symmetry in order to obtain distance information between the vehicle 1300 and an object to be photographed and to determine the possibility of a collision. In addition, the photoelectric conversion devices 1302 are preferably disposed so as not to obstruct the driver's field of vision when the driver visually checks the situation outside the vehicle 1300 from the driver's seat. The alarm device 1312 is preferably disposed so as to be easily within the driver's field of vision.

[0112] Next, a fault detection operation of the photoelectric conversion device 1302 in the photoelectric conversion system 1301 will be described with reference to Fig. 15. The fault detection operation of the photoelectric conversion device 1302 is performed in accordance with steps S1410 to S1480 shown in Fig. 15.

[0113] Step S1410 is a step for performing startup settings of the photoelectric conversion device 1302. That is, settings for the operation of the photoelectric conversion device 1302 are transmitted from outside the photoelectric conversion system 1301 (e.g., the main control unit 1313) or from inside the photoelectric conversion system 1301, and the image capturing operation and fault detection operation of the photoelectric conversion device 1302 are started.

[0114] Next, in step S1420, pixel signals are obtained from the effective pixels. In addition, in step S1430, output values ​​are obtained from failure detection pixels provided for failure detection. These failure detection pixels have a photoelectric conversion unit, just like the effective pixels. A predetermined voltage is written to this photoelectric conversion unit. The failure detection pixels output a signal corresponding to the voltage written to this photoelectric conversion unit. Note that steps S1420 and S1430 may be reversed.

[0115] Next, in step S1440, a judgment is made as to whether the output expected value of the fault detection pixel corresponds to the actual output value from the fault detection pixel. If the result of the judgment in step S1440 indicates that the output expected value and the actual output value correspond, the process proceeds to step S1450, it is judged that the imaging operation is performed normally, and the process proceeds to step S1460. In step S1460, the pixel signal of the scanning row is sent to the memory 1305 and temporarily stored. Thereafter, the process returns to step S1420, and the fault detection operation is continued. On the other hand, if the result of the judgment in step S1440 indicates that the output expected value and the actual output value do not correspond, the process proceeds to step S1470. In step S1470, it is judged that there is an abnormality in the imaging operation, and an alarm is issued to the main control unit 1313 or the alarm device 1312. The alarm device 1312 displays the detection of the abnormality on the display unit. Thereafter, in step S1480, the photoelectric conversion device 1302 is stopped, and the operation of the photoelectric conversion system 1301 is terminated.

[0116] In this embodiment, the flowchart is looped for each line, but the flowchart may be looped for each set of lines, or the fault detection operation may be performed for each frame. The issuance of the alarm in step S1470 may be notified to the outside of the vehicle via a wireless network.

[0117] In addition, in this embodiment, the control to prevent collision with other vehicles has been described, but the control can also be applied to automatic driving control to follow other vehicles, automatic driving control not to go out of the lane, etc. Furthermore, the photoelectric conversion system 1301 is not limited to vehicles such as the vehicle itself, but can be applied to moving bodies (moving devices) such as ships, aircraft, and industrial robots. In addition, the photoelectric conversion system 1301 is not limited to moving bodies, but can be applied to a wide range of devices that use object recognition, such as intelligent transport systems (ITS).

[0118] The present invention is not limited to the above-described embodiments, and various modifications are possible. For example, an example in which a part of the configuration of any of the embodiments is added to another embodiment, or an example in which a part of the configuration of another embodiment is replaced with another embodiment is also an embodiment of the present invention.

[0119] It should be noted that the above-mentioned embodiments are merely examples of the implementation of the present invention, and the technical scope of the present invention should not be interpreted as being limited by these. In other words, the present invention can be implemented in various forms without departing from its technical concept or main features. [Explanation of symbols]

[0120] 301 First Chip 401 2nd Chip 324 Avalanche Diode 521 pixel area 531 Circuit area 501, 502, 503 Pad opening 511, 512, 513 Pad electrodes

Claims

1. a first chip having a first semiconductor layer including an avalanche diode and a first multi-layer wiring layer; a second chip having a second semiconductor layer including a signal processing unit that processes a signal based on an output from the avalanche diode, and a second multilayer wiring layer; the first chip and the second chip are stacked and bonded together, the first chip has a first bonding portion; the second chip has a second joint portion in contact with the first joint portion; a first voltage and a second voltage are supplied to the avalanche diode; a third voltage is supplied to the signal processing unit; a potential difference between the first voltage and the third voltage is greater than a potential difference between the second voltage and the third voltage; a first electrode to which the first voltage is supplied from an outside of the first chip and the second chip is provided in the first multilayer wiring layer or the second multilayer wiring layer; a second electrode to which the second voltage is supplied from outside the first chip and the second chip is provided in the same wiring layer as the wiring layer in which the first electrode is provided, of the first multilayer wiring layer or the second multilayer wiring layer; The photoelectric conversion device, wherein the first electrode is not electrically connected to the second semiconductor layer.

2. 2. The photoelectric conversion device according to claim 1, wherein the first voltage is a negative voltage.

3. 3. The photoelectric conversion device according to claim 1, wherein a potential difference between the first voltage and the second voltage is greater than a breakdown voltage of the avalanche diode.

4. a first chip having a first semiconductor layer with an avalanche diode; a second chip having a second semiconductor layer including a signal processing unit that processes a signal based on an output from the avalanche diode; the first chip and the second chip are stacked and bonded together, the first chip has a first bonding portion; the second chip has a second joint portion in contact with the first joint portion; The avalanche diode is supplied with a first voltage, which is a negative voltage, and a second voltage, which is a positive voltage; a first electrode to which the first voltage is supplied from outside the first chip and the second chip is provided between a surface of the first semiconductor layer and a surface of the second semiconductor layer opposed to a bonding surface between the first chip and the second chip; a second electrode to which the second voltage is supplied from an outside of the first chip and the second chip is provided at the same height as the first electrode between a surface of the first semiconductor layer and a surface of the second semiconductor layer opposed to the junction surface; The photoelectric conversion device, wherein the first electrode is not electrically connected to the second semiconductor layer.

5. the first chip has a first multi-layer wiring layer; 5. The photoelectric conversion device according to claim 4, wherein the second chip has a second multi-layer wiring layer.

6. a third voltage is supplied from outside the first chip and the second chip; 6. The photoelectric conversion device according to claim 5, wherein a potential difference between the first voltage and the third voltage is greater than a potential difference between the second voltage and the third voltage.

7. 7. The photoelectric conversion device according to claim 6, wherein a potential difference between the first voltage and the second voltage is greater than a breakdown voltage of the avalanche diode.

8. 8. The photoelectric conversion device according to claim 1, wherein a quench element for suppressing avalanche multiplication of the avalanche diode is disposed on the second chip.

9. A photoelectric conversion device described in any one of claims 1 to 3, 6 and 7, characterized in that a third electrode to which the third voltage is supplied from outside the first chip and the second chip is provided in the first multilayer wiring layer or the second multilayer wiring layer.

10. 10. The photoelectric conversion device according to claim 1, wherein the third voltage is a ground voltage.

11. a bottom of a first opening exposing the first electrode is provided between a first surface of the first chip and a second surface of the first chip opposite to the first surface; 11. The photoelectric conversion device according to claim 1, wherein a bottom of the second opening exposing the second electrode is provided between the first surface and the second surface.

12. the first opening and the second opening are formed through the second semiconductor layer, The photoelectric conversion device according to claim 11 , wherein the first opening and the second opening are filled with an electrode.

13. The photoelectric conversion device according to claim 12 , wherein the electrode is in contact with the first electrode at a bottom of the first opening, and is in contact with the second electrode at a bottom of the second opening.

14. the avalanche diode is electrically connected to the quench element via the first junction and the second junction; The photoelectric conversion device according to claim 8 , wherein, in a plan view, a length of the first electrode in a predetermined direction is greater than a length of the first junction.

15. 14. The photoelectric conversion device according to claim 1, wherein the first voltage supplied to the first electrode is not applied to a junction surface where the first junction and the second junction are in contact with each other.

16. The photoelectric conversion device according to any one of claims 1 to 15, and a signal processing device that processes a signal output from the photoelectric conversion device.

17. 17. The photoelectric conversion system according to claim 16, wherein the signal processing device performs distance measurement and imaging based on the signal from the photoelectric conversion device.

18. The photoelectric conversion device according to any one of claims 1 to 15, a distance information acquisition means for acquiring distance information to an object from distance measurement information based on a signal from the photoelectric conversion device, A moving body further comprising a control means for controlling the moving body based on the distance information.

Images