Sensor and capacitor device

Abstract

To provide a sensor and capacitor device capable of improving characteristics.SOLUTION: A sensor comprises a base and an element section. The element section includes a fixed electrode, a first support structure, and a movable member. The fixed electrode is fixed to the base. The first support structure includes a first fixed member fixed to the base, a first intermediate member supported by the first fixed member, a first connecting member supported by the first intermediate member, a first cross fixed member fixed to the base, a first cross intermediate member supported by the first cross fixed member, and a first cross connecting member supported by the first cross intermediate member. The first connecting member includes a first connecting portion, a first support connecting portion, and a first intermediate connecting portion between the first connecting portion and the first support connecting portion. The first support member is fixed to the base and supports the first intermediate connecting portion. The movable member includes a first movable portion. The first movable portion is supported by the first support connecting portion and the first cross connecting member.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] SUMMARY OF THE DISCLOSURE The present invention relates to a sensor and a capacitor device. [Background technology]

[0002] For example, there is a sensor for detecting gas such as hydrogen, etc. In the sensor, improvement of the characteristics is desired. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2019-56607 A Summary of the Invention [Problem to be solved by the invention]

[0004] SUMMARY OF THE DISCLOSURE Embodiments of the present invention provide a sensor and capacitor device that allows for improved performance. [Means for solving the problem]

[0005] According to an embodiment of the present invention, the sensor includes a base and an element section. The element section includes a fixed electrode, a first support structure, and a movable member. The fixed electrode is fixed to the base. The first support structure includes a first fixed member fixed to the base, a first intermediate member supported by the first fixed member, a first connecting member supported by the first intermediate member, a first cross fixing member fixed to the base, a first cross intermediate member supported by the first cross fixing member, and a first cross connecting member supported by the first cross intermediate member. The first connecting member includes a first connecting portion, a first support connecting portion, and a first intermediate connecting portion between the first connecting portion and the first support connecting portion. A direction from the first connecting portion to the first support connecting portion is along a second direction that intersects with a first direction from the base to the fixed electrode. The first support member is fixed to the base and supports the first intermediate connecting portion. The movable member includes a movable electrode. The movable member includes a first movable portion. The first movable part is supported by the first support connection part and the first cross-connection member. A first gap is provided between the fixed electrode and the movable part. [Brief description of the drawings]

[0006] [Figure 1] FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. [Diagram 2] FIG. 2 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Diagram 3] FIG. 3 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 4] FIG. 4 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Diagram 5] FIG. 5 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 6] FIG. 6 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 7] FIG. 7 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. As shown in FIG. [Figure 8] FIG. 8 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 9] FIG. 9 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. As shown in FIG. [Figure 10] FIG. 10 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. As shown in FIG. [Figure 11] FIG. 11 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 12] FIG. 12 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 13] FIG. 13 is a schematic plan view illustrating the sensor according to the first embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios of each part may be different depending on the drawing. In this specification and each drawing, elements similar to those described above with reference to the previous drawings are given the same reference numerals and detailed descriptions thereof will be omitted as appropriate.

[0008] (First embodiment) FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. 2 to 5 are schematic cross-sectional views illustrating the sensor according to the first embodiment. Fig. 2 is a cross-sectional view taken along line A1-A2 in Fig. 1. Fig. 3 is a cross-sectional view taken along line A3-A4 in Fig. 1. Fig. 4 is a cross-sectional view taken along line B1-B2 in Fig. 1. Fig. 5 is a cross-sectional view taken along line B3-B4 in Fig. 1.

[0009] 1 to 5, the sensor 110 according to the embodiment includes a base body 51s and an element portion 10E. The base body 51s includes, for example, a silicon substrate. The base body 51s may include an electronic element such as a transistor.

[0010] The element section 10E includes a fixed electrode 51E, a first support structure 20a, and a movable member 11M. The fixed electrode 51E is fixed to a base body 51s. A first direction D1 from the base body 51s to the fixed electrode 51E is defined as the Z-axis direction. A direction perpendicular to the Z-axis direction is defined as the Y-axis direction. A direction perpendicular to the Z-axis direction and the Y-axis direction is defined as the X-axis direction.

[0011] 2, the base 51s includes a first surface 51F. The first surface 51F is substantially along the XY plane. A fixed electrode 51E is provided on the first surface 51F.

[0012] The first support structure 20a includes a first fixing member 21F, a first intermediate member 21M, a first connecting member 21, a first cross fixing member 41F, a first cross intermediate member 41M and a first cross connecting member 41C.

[0013] The first fixing member 21F is fixed to the base body 51s. The first intermediate member 21M is supported by the first fixing member 21F. The first connecting member 21 is supported by the first intermediate member 21M.

[0014] The first connecting member 21 includes a first connecting portion 21a, a first support connecting portion 21b, and a first intermediate connecting portion 21c. The first intermediate connecting portion 21c is provided between the first connecting portion 21a and the first support connecting portion 21b. The direction from the first connecting portion 21a to the first support connecting portion 21b is along the second direction D2. The second direction D2 intersects with the first direction D1 from the base 51s to the fixed electrode 51E. In this example, the second direction D2 is along the Y-axis direction.

[0015] The first supporting member 21S is fixed to the base body 51s. The first supporting member 21S supports the first intermediate connecting portion 21c.

[0016] For example, a first intersecting direction Dx1 from the first support member 21S to the first intermediate connecting portion 21c intersects with a plane that includes the first direction D1 and the second direction D2.

[0017] In this example, the element portion 10E further includes a first opposing support member 21Sx. The first opposing support member 21Sx is fixed to the base body 51s. The first opposing support member 21Sx supports a first intermediate connection portion 21c. The first intermediate connection portion 21c is located between the first support member 21S and the first opposing support member 21Sx.

[0018] The first cross fixing member 41F is fixed to the base body 51s. The first cross intermediate member 41M is supported by the first cross fixing member 41F. The first cross connection member 41C is supported by the first cross intermediate member 41M.

[0019] The movable member 11M includes a movable electrode 11E. The movable member 11M includes a first movable part 11a. The first movable part 11a is supported by the first support connection part 21b and the first cross-connection member 41C. A first gap g1 is provided between the fixed electrode 51E and the movable member 11M. A part of the first gap g1 is between the base body 51s and the first connection member 21. Another part of the first gap g1 is between the base body 51s and the first cross-connection member 41C.

[0020] 1, the direction from the first connecting member 21 to the first movable part 11a is along the second direction D2. The direction from the first cross-connecting member 41C to the first movable part 11a intersects with the first direction D1 and the second direction D2. For example, the direction from the first cross-connecting member 41C to the first movable part 11a is along the third direction D3. In this example, the third direction D3 is along, for example, the first intersecting direction Dx1.

[0021] As shown in FIG. 2, the distance between the base 51s and the first connection portion 21a in the first direction D1 is defined as the first distance d1. The distance between the base 51s and the first support connection portion 21b in the first direction D1 is defined as the second distance d2. In the embodiment, when the first distance d1 decreases, the second distance d2 increases. When the first distance d1 increases, the second distance d2 decreases. In the first connection member 21, the height of the first intermediate connection portion 21c is fixed, and the portions on both sides thereof (the first connection portion 21a and the first support connection portion 21b) are displaced in opposite directions. The first connection member 21 has a seesaw structure.

[0022] When the end portion (the end portion on the first connecting member 21 side) of the first intermediate member 21M attempts to displace so as to approach the base body 51s, the first support connection portion 21b attempts to displace so as to move away from the base body 51s.

[0023] On the other hand, when the end portion (the end portion on the first cross-connection member 41C side) of the first cross intermediate member 41M attempts to displace so as to approach the base body 51s, the first cross-connection member 41C attempts to displace so as to approach the base body 51s.

[0024] In this way, the two beams (the first connecting member 21 and the first cross-connecting member 41C) supporting the first movable part 11a of the movable member 11M are displaced in opposite directions. This makes it possible to suppress, for example, the influence of temperature. For example, it becomes possible to achieve detection with higher accuracy.

[0025] In one example, the first intermediate member 21M and the first cross intermediate member 41M deform in response to temperature. For example, when the temperature rises, the end of the first intermediate member 21M and the end of the first cross intermediate member 41M are displaced so as to approach the base body 51s. At this time, as described above, the direction of displacement in the first support connection portion 21b is opposite to the direction of displacement in the first cross connection member 41C. This makes it possible to suppress, for example, unintended displacement of the movable member 11M due to temperature.

[0026] In another example, the first intermediate member 21M is deformable according to the state of the detection target. The deformation of the first intermediate member 21M changes the rotation angle of the first connecting member 21. This changes the inter-electrode distance dz between the fixed electrode 51E and the movable electrode 11E. The change in inter-electrode distance dz changes the capacitance between these electrodes. By detecting the change in capacitance, the state of the detection target can be detected. The state of the detection target is, for example, the concentration of the gas to be detected. The capacitance may be detected by, for example, the control unit 70 (see FIG. 2).

[0027] In the above example in which the first intermediate member 21M deforms in response to the state of the detection target, by providing the first cross-connection member 41C, which has an opposite displacement direction, it is possible to suppress the influence of, for example, temperature, etc., and detection with higher accuracy is possible.

[0028] In one example, as shown in FIG. 2, the first intermediate member 21M includes a first layer 21L. The first layer 21L is, for example, a sensitive film. The volume of the first layer 21L changes depending on the concentration of the detection target (for example, the detection target gas). This is caused by the detection target entering the first layer 21L. The first intermediate member 21M including the first layer 21L functions as, for example, an actuator.

[0029] For example, when the concentration of the detection target is high, the volume of the first layer 21L increases. This causes the first intermediate member 21M to deform, and the first connection portion 21a approaches the base body 51s. In response, the first support connection portion 21b moves away from the base body 51s. Therefore, when the concentration of the detection target is high, the inter-electrode distance dz increases and the electrostatic capacitance decreases.

[0030] On the other hand, there is a reference example in which the inter-electrode distance dz increases as the concentration of the detection target increases. In this reference example, if the inter-electrode distance dz becomes too short, the movable member 11M comes into contact with the fixed electrode 51E, making it difficult to obtain normal operation. In this reference example, if the inter-electrode distance dz in the initial state is set long, the sensitivity decreases.

[0031] In the embodiment, the first intersecting intermediate member 41M does not have a sensitive film (for example, the first layer 21L), and the first intermediate member 21M does not have to have a sensitive film. In this case, for example, when the concentration of the detection target increases, the first connecting member 21 having a seesaw structure increases the inter-electrode distance dz and reduces the electrostatic capacitance. Even at high concentrations, the detection target can be properly detected. Even if the inter-electrode distance dz is set short in the initial state, the inter-electrode distance dz does not become shorter than the initial state. As a result, in the embodiment, the inter-electrode distance dz in the initial state can be made smaller than the value in the reference example. This enables detection with higher sensitivity. According to the embodiment, a wide dynamic range is obtained. High sensitivity is obtained. According to the embodiment, a sensor capable of improving characteristics can be provided.

[0032] For example, in the embodiment, a first state and a second state can exist. The concentration of the detection target present around the element unit 10E in the first state is higher than the concentration of the detection target in the second state. The first state is, for example, a high concentration state. The second state is a low concentration state.

[0033] For example, the first distance d1 in the first state is shorter than the first distance d1 in the second state. When the concentration of the detection target is high, the first distance d1 becomes shorter. For example, the second distance d2 in the first state is longer than the second distance d2 in the second state. When the concentration of the detection target is high, the second distance d2 becomes longer.

[0034] In one example, the first layer 21L included in the first intermediate member includes at least one selected from the group consisting of, for example, palladium (Pd), platinum (Pt), and gold (Au). The first layer 21L may further include at least one selected from the group consisting of, for example, silicon (Si), phosphorus (P), boron (B), copper (Cu), silver (Ag), nickel (Ni), gold (Au), iron (Fe), and chromium (Cr). The first layer 21L may include, for example, an alloy including a first element and a second element. The first element includes, for example, at least one selected from the group consisting of Mg, Ti, Zr, Ca, La, Mn, and V. The second element includes, for example, at least one selected from the group consisting of Ni, Cu, Fe, Co, Cr, Mn, V, and Nb. The above materials are capable of absorbing, for example, hydrogen. In this case, the detection target includes hydrogen. The first intermediate member 21M deforms in response to the concentration of hydrogen.

[0035] As shown in FIG. 2, in this example, the first intermediate member 21M includes a first insulating layer 21i. The first insulating layer 21i is between the base 51s and the first layer 21L. For example, when the concentration of the detection target increases, the volume of the first layer 21L expands. On the other hand, the volume of the first insulating layer 21i does not change substantially. As a result, the end portion (the terminal on the first connection member 21 side) of the first intermediate member 21M is displaced so as to approach the base 51s. The first support connection portion 21b is displaced so as to move away from the base 51s. In response to this, the movable member 11M is displaced so as to move away from the base 51s.

[0036] 1, 2 and 5, the element portion 10E may further include a first other support structure 20aA. The first other support structure 20aA includes a first other fixing member 21FA, a first other intermediate member 21MA, a first other connecting member 21A, a first other support member 21SA, a first other cross fixing member 41FA, a first other intersecting intermediate member 41MA, and a first other cross connecting member 41CA.

[0037] The first other fixing member 21FA is fixed to the base body 51s. The first other intermediate member 21MA is supported by the first other fixing member 21FA. The first other connecting member 21A is supported by the first other intermediate member 21MA.

[0038] The first other connection member 21A includes a first other connection portion 21aA, a first other support connection portion 21bA, and a first other intermediate connection portion 21cA. The first other intermediate connection portion 21cA is provided between the first other connection portion 21aA and the first other support connection portion 21bA. The direction from the first other connection portion 21aA to the first other support connection portion 21bA intersects with the first direction D1. In this example, the direction from the first other support connection portion 21bA to the first other connection portion 21aA is along the second direction D2.

[0039] The first other support member 21SA is fixed to the base 51s. The first other support member 21SA supports the first other intermediate connection portion 21cA. As shown in FIG. 1, in this example, the element portion 10E further includes a first other opposing support member 21SxA. The first other opposing support member 21SxA is fixed to the base 51s. The first other opposing support member 21SxA supports the first other intermediate connection portion 21cA. The first other intermediate connection portion 21cA is provided between the first other support member 21SA and the first other opposing support member 21SxA. As shown in FIG. 2, a part of the first gap g1 is between the base 51s and the first other connection member 21A.

[0040] 1 and 5, the first other intersecting fixing member 41FA is fixed to the base body 51s. The first other intersecting intermediate member 41MA is supported by the first other intersecting fixing member 41FA. The first other intersecting connection member 41CA is supported by the first other intersecting intermediate member 41MA.

[0041] The movable member 11M further includes a first other movable part 11aA. The first other movable part 11aA is supported by a first other support connection part 21bA and a first other cross-connection member 41CA.

[0042] By providing the first other support structure 20aA, for example, the movable member 11M is supported more stably.

[0043] 1, the element portion 10E may further include a second support structure 20b. The second support structure 20b includes a second fixing member 22F, a second intermediate member 22M, a second connecting member 22, a second support member 22S, a second cross fixing member 42F, a second cross intermediate member 42M, and a second cross connecting member 42C.

[0044] 3, the second fixing member 22F is fixed to the base body 51s. The second intermediate member 22M is supported by the second fixing member 22F. The second connecting member 22 is supported by the second intermediate member 22M.

[0045] The second connecting member 22 includes a second connecting portion 22a, a second support connecting portion 22b, and a second intermediate connecting portion 22c. The second intermediate connecting portion 22c is provided between the second connecting portion 22a and the second support connecting portion 22b. The direction from the second connecting portion 22a to the second support connecting portion 22b intersects with the first direction D1. In this example, the direction from the second connecting portion 22a to the second support connecting portion 22b is along the second direction D2.

[0046] The second supporting member 22S is fixed to the base body 51s. The second supporting member 22S supports the second intermediate connecting portion 22c.

[0047] In this example, the element portion 10E further includes a second opposing support member 22Sx. The second opposing support member 22Sx is fixed to the base body 51s. The second opposing support member 22Sx supports the second intermediate connection portion 22c. The second intermediate connection portion 22c is located between the second support member 22S and the second opposing support member 22Sx.

[0048] As shown in FIG. 3, the distance between the base 51s and the second connection portion 22a in the first direction D1 is the third distance d3. The distance between the base 51s and the second support connection portion 22b in the first direction D1 is the fourth distance d4. In the embodiment, when the third distance d3 decreases, the fourth distance d4 increases. When the third distance d3 increases, the fourth distance d4 decreases. In the second connection member 22, the height of the second intermediate connection portion 22c is fixed, and the portions on both sides thereof (the second connection portion 22a and the second support connection portion 22b) are displaced in opposite directions.

[0049] 4, the second cross fixing member 42F is fixed to the base body 51s. The second cross intermediate member 42M is supported by the second cross fixing member 42F. The second cross connection member 42C is supported by the second cross intermediate member 42M.

[0050] The movable member 11M further includes a second movable portion 11b. The second movable portion 11b is supported by the second support connection portion 22b and the second cross-connection member 42C.

[0051] 1, the element portion 10E may further include a second other support structure 20bA. The second other support structure 20bA includes a second other fixing member 22FA, a second other intermediate member 22MA, a second other connecting member 22A, a second other support member 22SA, a second other cross fixing member 42FA, a second other cross intermediate member 42MA, and a second other cross connecting member 42CA.

[0052] 3, the second other fixing member 22FA is fixed to the base body 51s. The second other intermediate member 22MA is supported by the second other fixing member 22FA. The second other connecting member 22A is supported by the second other intermediate member 22MA.

[0053] The second other connection member 22A includes a second other connection portion 22aA, a second other support connection portion 22bA, and a second other intermediate connection portion 22cA. The second other intermediate connection portion 22cA is provided between the second other connection portion 22aA and the second other support connection portion 22bA. The direction from the second other connection portion 22aA to the second other support connection portion 22bA intersects with the first direction D1. The direction from the second other support connection portion 22bA to the second other connection portion 22aA is along the second direction D2.

[0054] The second other support member 22SA is fixed to the base body 51s. The second other support member 22SA supports the second other intermediate connection portion 22cA.

[0055] In this example, the element portion 10E further includes a second other opposing support member 22SxA. The second other opposing support member 22SxA is fixed to the base body 51s. The second other opposing support member 22SxA supports the second other intermediate connection portion 22cA. The second other intermediate connection portion 22cA is provided between the second other supporting member 22SA and the second other opposing support member 22SxA. As shown in FIG. 3, a part of the first gap g1 is between the base body 51s and the second other connecting member 22A.

[0056] The second other intersecting fixing member 42FA is fixed to the base body 51s. The second other intersecting intermediate member 42MA is supported by the second other intersecting fixing member 42FA. The second other intersecting connection member 42CA is supported by the second other intersecting intermediate member 42MA.

[0057] The movable member 11M further includes a second other movable portion 11bA. The second other movable portion 11bA is supported by a second other support connection portion 22bA and a second other cross-connection member 42CA.

[0058] By providing the second other support structure 20bA, for example, the movable member 11M is supported more stably.

[0059] As already described, the first intermediate member 21M may include the first layer 21L and the first insulating layer 21i (see FIG. 2). The first insulating layer 21i is between the base body 51s and the first layer 21L. As shown in FIG. 2, the first other intermediate member 21MA may include the first other layer 21LA and the first other insulating layer 21iA. The first other insulating layer 21iA is between the base body 51s and the first other layer 21LA. As shown in FIG. 3, the second intermediate member 22M may include the second layer 22L and the second insulating layer 22i. The second insulating layer 22i is between the base body 51s and the second layer 22L. As shown in FIG. 3, the second other intermediate member 22MA may include the second other layer 22LA and the second other insulating layer 22iA. The second other insulating layer 22iA is between the base body 51s and the second other layer 22LA.

[0060] 6 to 9 are schematic cross-sectional views illustrating the sensor according to the first embodiment. 6 to 9 are cross-sectional views respectively corresponding to the lines A1-A2, A3-A4, B1-B2, and B3-B4 in FIG.

[0061] 6, in the sensor 111 according to the embodiment, the first intermediate member 21M includes a first conductive member 21h. Except for this, the configuration of the sensor 111 may be similar to the configuration of the sensor 110.

[0062] When a first current is supplied to the first conductive member 21h, the distance (first distance d1) between the base 51s and the first connection portion 21a in the first direction D1 decreases. At this time, the distance (second distance d2) between the base 51s and the first support connection portion 21b in the first direction D1 increases. Then, the movable member 11M (first movable portion 11a) is displaced so as to move away from the base 51s. Such displacement is caused by the expansion of a part of the first intermediate member 21M based on the current supplied to the first conductive member 21h. The first conductive member 21h functions as, for example, a heater.

[0063] As shown in FIG. 8, the first intersecting intermediate member 41M may include a first intersecting conductive member 41h. When a current is supplied to the first intersecting conductive member 41h, the movable member 11M is displaced to approach the base body 51s. For example, when the first intersecting current is supplied to the first intersecting conductive member 41h, the distance (substantially the interelectrode distance dz) between the base body 51s and the first movable part 11a along the first direction D1 is shorter than the distance between the base body 51s and the first movable part 11a along the first direction D1 when the first intersecting current is not supplied to the first intersecting conductive member 41h. An insulating member 41i may be provided around the first intersecting conductive member 41h.

[0064] In this way, the direction of displacement of movable member 11M (first movable portion 11a) is opposite when a current is supplied to first conductive member 21h and when a current is supplied to first cross conductive member 41h.

[0065] By controlling at least one of the current to the first conductive member 21h and the current to the first cross conductive member 41h, the position of the movable member 11M relative to the base body 51s can be controlled.

[0066] The control of the current may be performed, for example, by the control unit 70. The control unit 70 can supply the first current to the first conductive member 21h. The control unit 70 can supply the first cross current to the first cross conductive member 41h.

[0067] In the sensor 111, the first other intermediate member 21MA may further include a first other conductive member 21hA. In the sensor 111, the second intermediate member 22M may further include a second conductive member 22h. In the sensor 111, the second other intermediate member 22MA may further include a second other conductive member 22hA.

[0068] In the sensor 111, the first other intersecting intermediate member 41MA may include a first other intersecting conductive member 41hA. In the sensor 111, the second intersecting intermediate member 42M may include a second intersecting conductive member 42h. In the sensor 111, the second other intersecting intermediate member 42MA may include a second other intersecting conductive member 42hA. An insulating member 41iA may be provided around the first other intersecting conductive member 41hA. An insulating member 42i may be provided around the second intersecting conductive member 42h. An insulating member 42iA may be provided around the second other intersecting conductive member 42hA.

[0069] In one example, when the ambient temperature rises, current is supplied to the first cross conductive member 41h, the first other cross conductive member 41hA, the second cross conductive member 42h, and the second other cross conductive member 42hA, thereby adjusting the inter-electrode distance dz to a desired value (e.g., a center value).

[0070] In another example, when the ambient temperature drops, a current is supplied to the first conductive member 21h, the first other conductive member 21hA, the second conductive member 22h, and the second other conductive member 22hA, thereby adjusting the inter-electrode distance dz to a desired value (e.g., a center value).

[0071] A current may be supplied to a conductive member included in any of the multiple support structures (e.g., the first support structure 20a, the first other support structure 20aA, the second support structure 20b, and the second other support structure 20bA, etc.), which makes it possible to adjust and correct, for example, the inclination (distortion) of the movable member 11M based on the base body 51s.

[0072] 10 and 11 are schematic cross-sectional views illustrating the sensor according to the first embodiment. 10 and 11 are cross-sectional views corresponding to lines B1-B2 and B3-B4 in FIG. 1, respectively.

[0073] 10, in a sensor 112 according to the embodiment, a first cross intermediate member 41M includes a first cross layer 41L. The configuration of the sensor 112 other than this may be similar to the configuration of the sensor 111.

[0074] The material of the first cross layer 41L may be the same as the material of the first layer 21L. The first cross layer 41L is, for example, a sensitive film. In the sensor 112, the first cross intermediate member 41M may include a first cross cover layer 41j. The first cross layer 41L is between the base body 51s and the first cross cover layer 41j. By providing the first cross cover layer 41j, the first cross layer 41L is substantially unresponsive to the detection target.

[0075] 10, in the sensor 112, the second cross intermediate member 42M may include a second cross layer 42L. The material of the second cross layer 42L may be the same as the material of the first layer 21L. In the sensor 112, the second cross intermediate member 42M may include a second cross cover layer 42j. The second cross layer 42L is between the substrate 51s and the second cross cover layer 42j.

[0076] 11, in the sensor 112, the first other intersecting intermediate member 41MA may include a first other intersecting layer 41LA. The material of the first other intersecting layer 41LA may be the same as the material of the first layer 21L. In the sensor 112, the first other intersecting intermediate member 41MA may include a first other intersecting cover layer 41jA. The first other intersecting layer 41LA is between the base body 51s and the first other intersecting cover layer 41jA.

[0077] 11, in the sensor 112, the second other intersecting intermediate member 42MA may include a second other intersecting layer 42LA. The material of the second other intersecting layer 42LA may be the same as the material of the first layer 21L. In the sensor 112, the second other intersecting intermediate member 42MA may include a second other intersecting cover layer 42jA. The second other intersecting layer 42LA is between the base body 51s and the second other intersecting cover layer 42jA.

[0078] FIG. 12 is a schematic plan view illustrating the sensor according to the first embodiment. 12, in a sensor 113 according to the embodiment, an element portion 10E includes a third support structure 20c and a third other support structure 20cA. Except for this, the configuration of the sensor 113 may be similar to the configuration of any of the sensors 110 to 112.

[0079] The configuration of the third support structure 20c may be the same as that of the first support structure 20a, for example. The configuration of the third other support structure 20cA may be the same as that of the first other support structure 20aA, for example.

[0080] For example, the third support structure 20c includes a third fixed member 23F fixed to the base 51s, a third intermediate member 23M supported by the third fixed member 23F, and a third connecting member 23 supported by the third intermediate member 23M. The third connecting member 23 supports the movable member 11M. The direction from the third connecting member 23 to the movable member 11M is inclined with respect to the direction from the first connecting member 21 to the movable member 11M.

[0081] For example, the third other support structure 20cA includes a third other fixing member 23FA fixed to the base 51s, a third other intermediate member 23MA supported by the third other fixing member 23FA, and a third other connecting member 23A supported by the third other intermediate member 23MA. The third other connecting member 23A supports the movable member 11M. The direction from the third other connecting member 23A to the movable member 11M intersects with the direction from the first other connecting member 21A to the movable member 11M.

[0082] In the sensor 113 as well, for example, the influence of temperature can be suppressed, and detection with higher accuracy is possible. In the sensor 113 as well, a wide dynamic range can be obtained. High sensitivity can be obtained. In the sensor 113 as well, a sensor with improved characteristics can be provided.

[0083] FIG. 13 is a schematic plan view illustrating the sensor according to the first embodiment. 13, in a sensor 114 according to the embodiment, the third support structure 20c and the third other support structure 20cA are omitted. Except for this, the configuration of the sensor 114 may be similar to the configuration of the sensor 113. In the sensor 114, it is possible to provide a sensor whose characteristics can be improved.

[0084] Second embodiment The second embodiment relates to a capacitor device. The capacitor device according to the second embodiment may have a similar configuration to the sensor according to the first embodiment. For example, the configuration of the capacitor device 210 (see FIG. 1) may be similar to the configuration of the sensor 110. For example, the influence of temperature can be suppressed.

[0085] For example, the configuration of the capacitor device 211 (see FIGS. 6 to 9) may be the same as that of the sensor 111. For example, in the capacitor device 211, the element portion 10E includes a fixed electrode 51E, a first support structure 20a, and a movable member 11M. The fixed electrode 51E is fixed to a base 51s. The first support structure 20a includes a first fixing member 21F fixed to the base 51s, a first intermediate member 21M supported by the first fixing member 21F, a first connecting member 21 supported by the first intermediate member 21M, a first supporting member 21S, a first cross fixing member 41F fixed to the base 51s, a first cross intermediate member 41M supported by the first cross fixing member 41F, and a first cross connecting member 41C supported by the first cross intermediate member 41M.

[0086] The first connecting member 21 includes a first connecting portion 21a, a first support connecting portion 21b, and a first intermediate connecting portion 21c. The first intermediate connecting portion 21c is provided between the first connecting portion 21a and the first support connecting portion 21b. The direction from the first connecting portion 21a to the first support connecting portion 21b is along a second direction D2 that intersects with a first direction D1 from the base 51s to the fixed electrode 51E. The first supporting member 21S is fixed to the base 51s and supports the first intermediate connecting portion 21c.

[0087] The movable member 11M includes a movable electrode 11E. The movable member 11M includes a first movable portion 11a. The first movable portion 11a is supported by a first support connection portion 21b and a first cross-connection member 41C. A first gap g1 is provided between the fixed electrode 51E and the movable member 11M.

[0088] In the capacitor device 211, the first intermediate member 21M includes a first conductive member 21h. The control unit 70 is capable of supplying a first current to the first conductive member 21h. When the first current is supplied to the first conductive member 21h, a first distance d1 between the base 51s and the first connection portion 21a along the first direction D1 decreases, and a second distance d2 between the base 51s and the first support connection portion 21b along the first direction D1 increases.

[0089] In the capacitor device 211, the first intersecting intermediate member 41M may include a first intersecting conductive member 41h (see FIG. 8). When a current is supplied to the first intersecting conductive member 41h, the movable member 11M is displaced to approach the base body 51s. For example, when the first intersecting current is supplied to the first intersecting conductive member 41h, the distance (substantially the interelectrode distance dz) between the base body 51s and the first movable part 11a along the first direction D1 is shorter than the distance between the base body 51s and the first movable part 11a along the first direction D1 when the first intersecting current is not supplied to the first intersecting conductive member 41h.

[0090] In this way, the direction of displacement of movable member 11M (first movable portion 11a) is opposite when a current is supplied to first conductive member 21h and when a current is supplied to first cross conductive member 41h.

[0091] By controlling these currents, the desired capacitance can be obtained with high precision, for example by reducing temperature effects.

[0092] Embodiment capacitor device 212 may have the structure of sensor 112. Embodiment capacitor device 213 may have the structure of sensor 113. Embodiment capacitor device 214 may have the structure of sensor 114.

[0093] The embodiment may include the following configurations (e.g., technical solutions). (Configuration 1) A substrate; An element portion; Equipped with the element portion includes a fixed electrode, a first support structure, and a movable member, The fixed electrode is fixed to the base body, The first support structure is A first fixing member fixed to the base body; a first intermediate member supported by the first fixed member; a first connection member supported by the first intermediate member, the first connection member including a first connection portion, a first support connection portion, and a first intermediate connection portion between the first connection portion and the first support connection portion, the direction from the first connection portion to the first support connection portion being along a second direction intersecting a first direction from the base to the fixed electrode; a first support member fixed to the base and supporting the first intermediate connector; a first cross fastening member secured to the substrate; a first cross intermediate member supported by the first cross fixing member; a first cross connection member supported by the first cross intermediate member; Including, the movable member includes a movable electrode; The movable member includes a first movable portion, the first movable portion is supported by the first support connection portion and the first cross-connection member, The sensor has a first gap between the fixed electrode and the movable member.

[0094] (Configuration 2) The sensor of configuration 1, wherein a first intersecting direction from the first support member to the first intermediate connection portion intersects with a plane including the first direction and the second direction.

[0095] (Configuration 3) a direction from the first connection member to the first movable part is along the second direction, The sensor of configuration 1 or 2, wherein a direction from the first cross-connection member to the first movable part intersects the first direction and the second direction.

[0096] (Configuration 4) The element portion further includes a first opposing support member, the first opposing support member is fixed to the base, the first opposing support member supports the first intermediate connection portion, the first intermediate connection portion is between the first support member and the first opposing support member, The sensor of configuration 3, wherein a portion of the first gap is between the base and the first connection member.

[0097] (Configuration 5) The sensor of any one of configurations 1 to 4, wherein when a first distance along the first direction between the base and the first connection portion decreases, a second distance along the first direction between the base and the first support connection portion increases.

[0098] (Configuration 6) a first distance in the first direction between the base and the first connection portion in the first state is longer than the first distance in the second state; The sensor of any one of configurations 1 to 4, wherein a second distance along the first direction between the base and the first support connection portion in the first state is longer than the second distance in the second state.

[0099] (Configuration 7) The sensor of configuration 6, wherein a concentration of the detection target present around the element portion in the first state is higher than a concentration of the detection target in the second state.

[0100] (Configuration 8) the first intermediate member includes a first layer; the first layer includes at least one selected from the group consisting of palladium, platinum, and gold; The sensor of configuration 7, wherein the detection target includes hydrogen.

[0101] (Configuration 9) The first intermediate member further includes a first insulating layer; 9. The sensor of embodiment 8, wherein the first insulating layer is between the substrate and the first layer.

[0102] (Configuration 10) The element portion further includes a first other support structure, The first other support structure is A first other fixing member fixed to the base body; a first other intermediate member supported by the first other fixed member; a first other connection member supported by the first other intermediate member, the first other connection member including a first other connection portion, a first other support connection portion, and a first other intermediate connection portion between the first other connection portion and the first other support connection portion, the first other connection member being such that a direction from the first other connection portion to the first other support connection portion intersects with the first direction; a first other support member fixed to the base and supporting the first other intermediate connection portion; a first other cross fastening member fixed to the base; a first other intersecting intermediate member supported by the first other intersecting fixed member; a first other cross connection member supported by the first other cross intermediate member; Including, The movable member further includes a first other movable part, The sensor according to any one of configurations 1 to 9, wherein the first other movable part is supported by the first other support connection part and the first other cross-connection member.

[0103] (Configuration 11) The element portion further includes a first other opposing support member, the first other opposing support member is fixed to the base, the first other opposing support member supports the first other intermediate connection portion, the first other intermediate connection portion is located between the first other support member and the first other opposing support member, 11. The sensor of claim 10, wherein a portion of the first gap is between the base and the first other connection member.

[0104] (Configuration 12) 12. The sensor of claim 10 or 11, wherein a direction from the first other support connection portion to the first support connection portion is along the second direction.

[0105] (Configuration 13) the first intermediate member further includes a first conductive member; The sensor of any one of configurations 1 to 12, wherein when a first current is supplied to the first conductive member, the distance along the first direction between the base and the first connection portion decreases, and the distance along the first direction between the base and the first support connection portion increases.

[0106] (Configuration 14) the first cross intermediate member further comprises a first cross conductive member; The sensor of configuration 13, wherein a distance along the first direction between the base and the first movable part when a first cross current is supplied to the first cross conductive member is shorter than the distance along the first direction between the base and the first movable part when the first cross current is not supplied to the first cross conductive member.

[0107] (Configuration 15) A control unit is further provided. the control unit is capable of supplying the first current to the first conductive member; 15. The sensor of claim 14, wherein the controller is capable of supplying the first cross current to the first cross conductive member.

[0108] (Configuration 16) The element portion further includes a second support structure, The second support structure is A second fixing member fixed to the base; a second intermediate member supported by the second fixed member; a second connection member supported by the second intermediate member, the second connection member including a second connection portion, a second support connection portion, and a second intermediate connection portion between the second connection portion and the second support connection portion, the second connection member being such that a direction from the second connection portion to the second support connection portion intersects with the first direction; a second support member fixed to the base and supporting the second intermediate connector; a second cross fastening member secured to the substrate; a second cross intermediate member supported by the second cross fixing member; a second cross connection member supported by the second cross intermediate member; Including, The movable member further includes a second movable part, 16. The sensor according to any one of configurations 1 to 15, wherein the second movable portion is supported by the second support connection portion and the second cross-connection member.

[0109] (Configuration 17) The element portion further includes a second other support structure, The second other support structure is A second other fixing member fixed to the base body; a second other intermediate member supported by the second other fixed member; a second other connection member supported by the second other intermediate member, the second other connection member including a second other connection portion, a second other support connection portion, and a second other intermediate connection portion between the second other connection portion and the second other support connection portion, the second other connection member being such that a direction from the second other connection portion to the second other support connection portion intersects with the first direction; a second other support member fixed to the base and supporting the second other intermediate connection portion; A second other cross fastening member fixed to the base; a second other intersecting intermediate member supported by the second other intersecting fixed member; a second other cross connection member supported by the second other cross intermediate member; Including, The movable member further includes a second other movable part, 17. The sensor of claim 16, wherein the second other movable part is supported by the second other support connection part and the second other cross connection member.

[0110] (Configuration 18) A substrate; An element portion; Equipped with the element portion includes a fixed electrode, a first support structure, and a movable member, The fixed electrode is fixed to the base body, The first support structure is A first fixing member fixed to the base body; a first intermediate member supported by the first fixed member; a first connection member supported by the first intermediate member, the first connection member including a first connection portion, a first support connection portion, and a first intermediate connection portion between the first connection portion and the first support connection portion, the direction from the first connection portion to the first support connection portion being along a second direction intersecting a first direction from the base to the fixed electrode; a first support member fixed to the base and supporting the first intermediate connector; a first cross fastening member secured to the substrate; a first cross intermediate member supported by the first cross fixing member; a first cross connection member supported by the first cross intermediate member; Including, the movable member includes a movable electrode; The movable member includes a first movable portion, the first movable portion is supported by the first support connection portion and the first cross-connection member, A capacitor device, wherein a first gap is provided between the fixed electrode and the movable member.

[0111] (Configuration 19) A control unit is further provided. the first intermediate member includes a first conductive member, The control unit is capable of supplying a first current to the first conductive member; 19. The capacitor device of configuration 18, wherein when the first current is supplied to the first conductive member, a first distance along the first direction between the base and the first connection portion decreases and a second distance along the first direction between the base and the first support connection portion increases.

[0112] According to the embodiment, it is possible to provide a sensor and a capacitor device capable of improving characteristics.

[0113] The above describes the embodiments of the present invention with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of each element included in the sensor and capacitor device, such as the base, element unit, fixed electrode, fixing member, intermediate member, connecting member, movable unit, support member, and control unit, are included in the scope of the present invention as long as a person skilled in the art can implement the present invention in the same way and obtain the same effects by appropriately selecting them from the known range.

[0114] Any combination of two or more elements of each embodiment, within the scope of technical feasibility, is also included within the scope of the present invention as long as it includes the gist of the present invention.

[0115] In addition, all sensors and capacitor devices that can be implemented by a person skilled in the art by making appropriate design modifications based on the sensor and capacitor device described above as embodiments of the present invention also fall within the scope of the present invention as long as they include the gist of the present invention.

[0116] In addition, within the scope of the concept of the present invention, a person skilled in the art may conceive of various modifications and alterations, and it will be understood that these modifications and alterations also fall within the scope of the present invention.

[0117] Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included in the scope and spirit of the invention, and are included in the scope of the invention and its equivalents described in the claims. [Explanation of symbols]

[0118] 10E: element portion; 11E: movable electrode; 11M: movable member; 11a, 11b: first and second movable portions; 11aA, 11bA: first and second other movable portions; 20a-20c: first to third support structures; 20aA-20cA: first to third other support structures; 21-23: first to third connecting members; 21A-23A: first to third other connecting members; 21F-23F: first to third fixing members; 21FA-23FA: first to third other fixing members; 21L, 22L: first and second layers; 21LA, 22LA: first and second other layers; 21M-23M: first to third intermediate members; 21MA-23MA: first to third other intermediate members; 21S, 22S: first and second support members, 21SA, 22SA: first and second other support members, 21Sx, 22Sx: first and second opposing support members, 21SxA, 22SxA: first and second other opposing support members, 21a, 22a: first and second connection portions, 21aA, 22aA: first and second other connection portions, 21b, 22b: first and second support connection portions, 21bA, 22bA: first and second other support connection portions, 21c, 22c: first and second intermediate connection portions, 21cA, 22cA: first and second intermediate connection portions, 21h, 22h: first and second conductive members, 21hA, 22hA: first and second other conductive members, 21i, 22i: first and second insulating layers, 21iA, 22iA: first and second other insulating layers, 41C, 42C: first and second cross-connecting members, 41CA, 42CA: first and second other cross-connecting members, 41F, 42F: first and second cross-fixing members, 41FA, 42FA: first and second other cross-fixing members, 41L, 42L: first and second cross layers, 41LA, 42LA: first and second other cross layers, 41M, 42M: first and second cross intermediate members, 41MA, 42MA: first and second other cross intermediate members, 41h, 42h: first and second cross conductive members, 41hA, 42hA: first and second other cross conductive members, 41i, 42i, 41iA, 42iA: insulating members, 41j, 42j: first and second intersecting cover layers, 41jA, 42jA: first and second other intersecting cover layers, 51E: fixed electrode, 51F: first surface, 51s: base, 70: control unit, 110-114: sensor, 210-214: capacitor device, D1-D3: first to third directions, Dx1: first intersecting direction, d1-d4: first to fourth distances, dz: inter-electrode distance, g1: first gap

Claims

1. A substrate; An element portion; Equipped with the element portion includes a fixed electrode, a first support structure, and a movable member, The fixed electrode is fixed to the base body, The first support structure includes: A first fixing member fixed to the base body; a first intermediate member supported by the first fixed member; a first connection member supported by the first intermediate member, the first connection member including a first connection portion, a first support connection portion, and a first intermediate connection portion between the first connection portion and the first support connection portion, the direction from the first connection portion to the first support connection portion being along a second direction intersecting a first direction from the base to the fixed electrode; a first support member fixed to the base and supporting the first intermediate connector; a first cross fastening member secured to the substrate; a first cross intermediate member supported by the first cross fixing member; a first cross-connection member supported by the first cross intermediate member; Including, the movable member includes a movable electrode; The movable member includes a first movable portion, the first movable portion is supported by the first support connection portion and the first cross-connection member, The sensor includes a first gap between the fixed electrode and the movable member.

2. 2. The sensor of claim 1, wherein as a first distance along the first direction between the base and the first connection decreases, a second distance along the first direction between the base and the first support connection increases.

3. a first distance in the first direction between the base and the first connection portion in the first state is longer than the first distance in the second state; The sensor of claim 1 , wherein a second distance along the first direction between the base and the first support connection in the first state is greater than the second distance in the second state.

4. The sensor according to claim 3 , wherein a concentration of the detection target present around the element portion in the first state is higher than a concentration of the detection target in the second state.

5. The element portion further includes a first other support structure, The first other support structure includes: A first other fixing member fixed to the base body; a first other intermediate member supported by the first other fixed member; a first other connection member supported by the first other intermediate member, the first other connection member including a first other connection portion, a first other support connection portion, and a first other intermediate connection portion between the first other connection portion and the first other support connection portion, the first other connection member being such that a direction from the first other connection portion to the first other support connection portion intersects with the first direction; a first other support member fixed to the base and supporting the first other intermediate connection portion; a first other cross fastening member fastened to the base; a first other intersecting intermediate member supported by the first other intersecting fixing member; a first other cross connection member supported by the first other cross intermediate member; Including, The movable member further includes a first other movable part, 5. The sensor according to claim 1, wherein the first other movable portion is supported by the first other support connection portion and the first other cross-connection member.

6. The first intermediate member further includes a first conductive member, 2. The sensor of claim 1, wherein when a first current is supplied to the first conductive member, a distance along the first direction between the base and the first connection portion decreases and a distance along the first direction between the base and the first support connection portion increases.

7. the first cross intermediate member further comprises a first cross conductive member; 7. The sensor of claim 6, wherein a distance along the first direction between the base and the first movable part when a first cross current is supplied to the first cross conductive member is shorter than the distance along the first direction between the base and the first movable part when the first cross current is not supplied to the first cross conductive member.

8. A control unit is further provided. The control unit is capable of supplying the first current to the first conductive member, The sensor of claim 7 , wherein the controller is capable of providing the first cross current to the first cross conductive member.

9. A substrate; An element portion; Equipped with the element portion includes a fixed electrode, a first support structure, and a movable member, The fixed electrode is fixed to the base body, The first support structure includes: A first fixing member fixed to the base body; a first intermediate member supported by the first fixed member; a first connection member supported by the first intermediate member, the first connection member including a first connection portion, a first support connection portion, and a first intermediate connection portion between the first connection portion and the first support connection portion, the direction from the first connection portion to the first support connection portion being along a second direction intersecting a first direction from the base to the fixed electrode; a first support member fixed to the base and supporting the first intermediate connector; a first cross fastening member secured to the substrate; a first cross intermediate member supported by the first cross fixing member; a first cross-connection member supported by the first cross intermediate member; Including, the movable member includes a movable electrode; The movable member includes a first movable portion, the first movable portion is supported by the first support connection portion and the first cross-connection member, A capacitor device having a first gap between the fixed electrode and the movable member.

10. A control unit is further provided. the first intermediate member includes a first conductive member, The control unit is capable of supplying a first current to the first conductive member, 10. The capacitor device of claim 9, wherein when the first current is supplied to the first conductive member, a first distance along the first direction between the base and the first connection portion decreases and a second distance along the first direction between the base and the first support connection portion increases.

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