Probe card

Abstract

To provide a probe card capable of arranging probes at a narrower pitch while retaining the probes inserted into guide holes of a guide plate on the guide plate so as not to fall out.SOLUTION: A probe card includes two or more probes 200 and a first guide plate 14 having two or more first guide holes 14h through which the probes 200 are respectively inserted. The probe 200 is disposed so as to be inclined with respect to the first guide plate 14 and has: a locking portion 21 protruding from a side surface 210 on a first direction d1 side, which is a side surface above the first guide plate 14 and forms an acute angle with respect to the first guide plate 14; and an offset portion 22 formed by offsetting a side surface 220 on a second direction d2 side, which is a side surface above the first guide plate 14 and forms an obtuse angle with respect to the first guide plate 14, toward a side of the locking portion 21. Two adjacent probes 220 are arranged such that the locking portion 21 of one probe faces the offset portion 22 of the other.SELECTED DRAWING: Figure 11

Description

[Technical field]

[0001] The present invention relates to a probe card, and more particularly to an improvement in a probe card in which two or more probes are supported by a guide plate. [Background technology]

[0002] A probe card is an inspection device used to inspect the electrical characteristics of semiconductor devices formed on a semiconductor wafer, and has a wiring board with numerous probes that are brought into contact with electrode pads on the semiconductor device. Inspection of the characteristics of a semiconductor device is performed by connecting a tester device that inputs and outputs test signals to the probe card, bringing the semiconductor wafer close to the probe card so that the tips of the probes come into contact with the electrode pads on the semiconductor device, and establishing electrical continuity between the tester device and the semiconductor device via the probes and the wiring board.

[0003] 17 is a diagram showing an example of a conventional probe card (for example, Patent Document 1). In this probe card, a probe 300 having a locking portion 31 is supported by a guide plate 14. The probe card has guide plates 14, 15 provided below wiring boards 10, 11, and the probe 300 is inserted into guide holes 14h, 15h of both guide plates 14, 15, with its upper end contacting a probe electrode 11t formed on the lower surface of the wiring board 11 and its lower end contacting an electrode pad formed on the upper surface of the semiconductor wafer.

[0004] The probe 300 has a pair of locking portions 31 whose side surfaces protrude above the upper guide plate 14. The pair of locking portions 31 are formed by protruding opposing side surfaces of the probe, and the probe 300 is supported so as not to fall off the first guide plate 14. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2018-44912 A Summary of the Invention [Problem to be solved by the invention]

[0006] With recent advances in microfabrication technology, the pitch of electrode pads of semiconductor devices has become narrower, and accordingly, a narrower pitch is also required for probes. To narrow the pitch of the probe arrangement, it is necessary to shorten the probe width or probe interval. However, considering the electrical characteristics and mechanical strength required of the probe, there is a limit to how much the cross-sectional area of ​​the probe can be reduced. Therefore, to achieve a further narrower pitch, it is necessary to shorten the probe interval, and therefore the protrusion amount of the locking portion 31 must also be shortened.

[0007] Due to this narrowing of the pitch, the protruding amount of the locking portion 31 is approaching the gap between the probe 300 and the guide hole 14h. If the protruding amount is made shorter than this, there is a risk that the locking portion 31 will fall off the guide hole 14h.

[0008] The present invention has been made in consideration of the above-mentioned circumstances, and aims to provide a probe card that can be arranged at a narrower pitch while engaging probes inserted into guide holes in a guide plate to prevent them from falling out. [Means for solving the problem]

[0009] A probe card according to a first embodiment of the present invention comprises two or more probes and a first guide plate having two or more first guide holes through which the probes are respectively inserted, the probes being arranged at an angle with respect to the first guide plate and having a locking portion that protrudes from a side surface above the first guide plate facing a first direction and forming an acute angle with respect to the first guide plate, and the side surface of the probe above the first guide plate facing a second direction and forming an obtuse angle with respect to the first guide plate is configured so that the distance from the central axis of the probe is shorter than the protruding surface of the locking portion.

[0010] The probe to be inserted into the first guide hole is inclined with respect to the first guide plate, and a side surface above the first guide plate on the first direction side at an acute angle with respect to the first guide plate is protruded to form a locking portion, so that the locking portion faces the upper surface of the first guide plate around the first guide hole, and the probe is locked to the first guide plate. Therefore, regardless of the size of the gap between the probe width and the first guide hole, the amount of protrusion of the locking portion can be reduced, and the probes can be arranged at a narrow pitch. Furthermore, the side opposite to the first direction side, that is, the side surface above the first guide plate on the second direction side at an obtuse angle with respect to the first guide plate, is closer to the central axis than the protruding surface of the locking portion, so that the probes can be arranged at an even narrower pitch.

[0011] In addition to the above configuration, a probe card according to a second embodiment of the present invention has a probe further having an offset portion in which the side surface on the second direction side is offset toward the locking portion, and two adjacent probes are arranged so that the locking portion of one faces the offset portion of the other.

[0012] By adopting such a configuration, two or more probes can be arranged adjacent to each other so that the locking portion of one faces the offset portion of the other, and the protruding direction of the locking portion and the offset direction of the offset portion can be made to coincide with each other, so that the probes can be arranged at an even narrower pitch. Also, by forming the offset portion on the side surface on the second direction side, the offset amount can be increased regardless of the size of the gap between the probe width and the first guide hole, and the probes can be arranged at an even narrower pitch.

[0013] In addition to the above configuration, a probe card according to a third embodiment of the present invention is configured so that a lower surface of the offset portion is formed lower than a lower surface of the locking portion on the central axis of the probe.

[0014] By employing such a configuration, it is possible to prevent the lower end of the engaging portion from coming into contact with the side surface below the offset portion, and it is possible to arrange the probes at a narrow pitch.

[0015] In addition to the above configuration, a probe card according to a fourth embodiment of the present invention is configured so that an outermost edge of a lower surface of the offset portion is located lower than an upper surface of the first guide plate.

[0016] By employing such a configuration, it is possible to prevent the lower end of the engaging portion from coming into contact with the side surface below the offset portion, and it is possible to arrange the probes at a narrow pitch.

[0017] In addition to the above configuration, a probe card according to a fifth embodiment of the present invention is configured such that the lower surface of the offset portion is inclined with respect to the central axis of the probe so that the offset amount decreases downward.

[0018] By adopting such a configuration, it is possible to prevent the locking portion from coming into contact with the side surface below the offset portion. Also, by providing the offset portion, it is possible to suppress the influence on the electrical characteristics and mechanical strength of the probe.

[0019] In addition to the above configuration, a probe card according to a sixth embodiment of the present invention further includes a wiring board arranged above the first guide plate and having two or more probe electrodes against which the upper ends of the probes respectively abut, and the offset portion is configured as a recess formed in the side opposite the engagement portion.

[0020] By adopting such a configuration, the width of the upper end of the probe can be increased, and the range of inclination angles of the probe at which the upper end of the probe can contact the probe electrode can be increased, thereby ensuring more reliable electrical conduction between the probe and the probe electrode.

[0021] In addition to the above configuration, a probe card according to a seventh embodiment of the present invention is configured such that the outermost edge of the upper surface of the offset portion is formed above the outermost edge of the upper surface of the engagement portion on the central axis of the probe.

[0022] By employing such a configuration, it is possible to prevent the upper end of the engaging portion from coming into contact with the side surface above the offset portion, and it is possible to arrange the probes at a narrow pitch.

[0023] In addition to the above configuration, a probe card according to an eighth embodiment of the present invention is configured such that the upper surface of the offset portion is inclined with respect to the central axis of the probe so that the amount of offset decreases toward the top.

[0024] By adopting such a configuration, it is possible to prevent the locking portion from coming into contact with the side surface above the offset portion. Also, by providing the offset portion, it is possible to suppress the influence on the electrical characteristics and mechanical strength of the probe.

[0025] In addition to the above configuration, a probe card according to a ninth embodiment of the present invention further includes a second guide plate arranged below the first guide plate and having two or more second guide holes through which the probes are each inserted, and the first guide holes and the second guide holes are configured to be arranged at positions relatively offset in the direction in which the probes are tilted.

[0026] By employing such a configuration, the probe inserted into the first guide hole can be inclined with respect to the first guide plate. Effect of the Invention

[0027] According to the present invention, it is possible to provide a probe card in which the probes inserted into the guide holes of the guide plate can be locked to the guide plate so as not to fall out, and the probes can be arranged at a narrower pitch. [Brief description of the drawings]

[0028] [Figure 1] 1 is a cross-sectional view showing an example of a configuration of a probe card 100 according to a first embodiment of the present invention. [Diagram 2] 2 is a plan view showing an example of a configuration of a first guide plate 14 in FIG. 1. [Diagram 3] 1 is a schematic diagram showing a state in which the probe 200 and the guide plates 14 and 15 are assembled. [Figure 4] 2 is an external view showing an example of the configuration of a probe 200. FIG. [Diagram 5] FIG. 2 is a partially enlarged view showing a part of the probe 200. [Figure 6] 6 is a cross-sectional view showing a cross section taken along line AA in FIG. 5. [Figure 7] 2 is an enlarged cross-sectional view showing a part of a first guide plate 14 and a probe 200 in FIG. 1. [Figure 8] FIG. 2 is a diagram showing a main part of a comparative example to be compared with the first embodiment of the present invention. [Figure 9] 11 is a diagram showing an example of a main part of a probe 201 according to a second embodiment of the present invention. FIG. [Figure 10] 10 is a cross-sectional view showing a cross section taken along line BB in FIG. 9. [Figure 11] 2 is an enlarged cross-sectional view showing a part of a first guide plate 14 and a probe 201. FIG. [Figure 12] FIG. 11 is a diagram showing a main part of a comparative example to be compared with the second embodiment of the present invention. [Figure 13] 11 is a diagram showing an example of a main part of a probe 202 according to a third embodiment of the present invention. FIG. [Figure 14] 2 is an enlarged cross-sectional view showing a part of a first guide plate 14 and a probe 202. FIG. [Figure 15] FIG. 11 is a diagram showing an example of a main part of a probe 203 according to a fourth embodiment of the present invention. [Figure 16] 2 is an enlarged cross-sectional view showing a part of a first guide plate 14 and a probe 203. FIG. [Figure 17] FIG. 1 is a diagram showing an example of a conventional probe card. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0029] Embodiment 1 <Probe card 100> 1 is a cross-sectional view showing an example of a configuration of a probe card 100 according to a first embodiment of the present invention, showing a cross section of the horizontally arranged probe card 100 cut along a vertical plane. The probe card 100 is an inspection device that makes an electrical connection to an inspection object (not shown) such as a semiconductor wafer, and a large number of probes 200 are arranged to contact a large number of electrode pads on the inspection object so as to correspond to the electrode pads. The illustrated probe card 100 is composed of a main substrate 10, an ST (space transformer) substrate 11, a reinforcing plate 12, a spacer 13, a first guide plate 14, a second guide plate 15, and two or more probes 200.

[0030] The main board 10 is a wiring board that is detachably attached to a prober (not shown), and may be, for example, a disk-shaped printed circuit board. The main board 10 is disposed substantially horizontally, and a reinforcing plate 12 is attached to its upper surface. The reinforcing plate 12 is a reinforcing member for suppressing distortion of the main board 10, and may be, for example, a metal block. In addition, two or more external electrodes 10t to which signal terminals of a tester (not shown) are connected are provided outside the reinforcing plate 12 on the main board 10, that is, on the outer periphery of the upper surface of the main board 10.

[0031] The ST board 11 is a wiring board that converts the electrode pitch, and is attached to the lower surface of the main board 10. Two or more probe electrodes 11t are formed on the lower surface of the ST board 11. The probe electrodes 11t are electrode terminals that come into contact with the probes 200, and are arranged at a pitch corresponding to the probes 200, and are electrically connected to external electrodes 10t arranged at a wider pitch via the wiring patterns and through holes of the main board 10 and the ST board 11.

[0032] The guide plates 14 and 15 are both support substrates that support the probe 200, and may be, for example, flat silicon substrates. The guide plates 14 and 15 are fixed to the main substrate 10 or the ST substrate 11 via the spacer 13, and are disposed substantially horizontally at a distance from the ST substrate 11.

[0033] The first guide plate 14 has two or more first guide holes 14h. The first guide holes 14h are through holes that vertically pass through the first guide plate 14, and the probes 200 are inserted through the first guide holes 14h. The first guide plate 14 is disposed below the ST board 11 at a distance, supports the probes 200 so that they do not fall off, and positions the probes 200 horizontally relative to the ST board 11.

[0034] The second guide plate 15 has two or more second guide holes 15h. The second guide holes 15h are through holes that pass through the second guide plate 15 in the vertical direction, and the probes 200 are inserted through the second guide holes 15h. The second guide plate 15 is disposed below the first guide plate 14 at a distance, supports the probes 200 so that they can move in the vertical direction, and positions the probes 200 in the horizontal direction relative to the object to be inspected.

[0035] The guide holes 14h and 15h through which the same probe 200 is inserted are arranged to be offset by a certain distance in the horizontal direction. By relatively offsetting the positions of the corresponding guide holes 14h and 15h, the probe 200 is curved and deformed between the guide plates 14 and 15, and the vicinity of both ends of the probe 200 are inclined with respect to the guide plates 14 and 15. The inclination direction D is a direction on the horizontal plane that indicates the inclination of the probe 200.

[0036] The probe 200 is a vertical probe having an elongated shape and made of a conductive material. The upper end of the probe 200 contacts the probe electrode 11t of the ST board 11, and the lower end contacts an electrode pad of the test object.

[0037] By performing an overdrive process in which the probe 200 is brought into contact with the test object and then the probe 200 is brought closer to the test object, the probe 200 is elastically deformed and the lower end moves up and down. Therefore, by bending the probe 200 when not being tested due to the offset arrangement of the guide holes 14h and 15h, the curved portion of the probe 200 is buckled during overdrive, and the stroke length of the vertical movement can be secured while applying an appropriate pressure to the test object. In addition, by bending the probes 200 when not being tested so that they have approximately the same shape, it is possible to prevent the buckled probes from coming into contact between the guide plates 14 and 15.

[0038] <Guide plates 14, 15> FIG. 2 is a plan view showing an example of the configuration of the first guide plate 14 in FIG. 1, illustrating the upper surface of the first guide plate 14. As shown in FIG.

[0039] The illustrated first guide plate 14 is a substantially rectangular flat plate, with multiple first guide holes 14h two-dimensionally arranged so as to be aligned in the tilt direction D and a direction perpendicular thereto. The first guide holes 14h are through holes perpendicular to the main surface, and their cross sections are rectangular with a pair of sides perpendicular to the tilt direction D.

[0040] Focusing on the inclination direction D, the first guide holes 14h are through holes with a width Hw and are arranged at intervals Hi. That is, they are aligned at a pitch Hp=Hw+Hi. The cross-sectional shape of the probe 200 is determined by the electrical characteristics and mechanical strength required of the probe 200. For this reason, if the probes 200 are arranged at a narrower pitch, it becomes necessary to shorten the interval Hi. Recently, it has become necessary for the interval Hi of the first guide holes 14h to be 1 / 2 or less, for example 1 / 3 or less, of the width Hw. As a result, short circuits between adjacent probes 200 are more likely to occur.

[0041] The second guide plate 15 has exactly the same configuration as the first guide plate 14, except that the positions of the second guide holes 15h are offset from the positions of the first guide holes 14h.

[0042] 3 is a schematic diagram showing the state when the probe 200 and the guide plates 14, 15 are assembled. (a) in the figure shows a state in which the probe 200 is inserted into the guide holes 14h, 15h, and (b) in the figure shows a state in which the guide holes 14h, 15h are offset and the probe 200 is curved and deformed.

[0043] FIG. 1(a) shows a state in which the guide plates 14 and 15 are arranged so that the positions of the corresponding guide holes 14h and 15h coincide with each other, and the linear probe 200 is inserted into the guide holes 14h and 15h. Then, by relatively translating the guide plates 14 and 15 in the inclination direction D, the positions of the corresponding guide holes 14h and 15h can be offset. FIG. 1(b) shows a state after the guide holes 14h and 15h have been offset. Then, the ST substrate 11 is attached so that the upper end of the probe 200 contacts the probe electrode 11t.

[0044] <Probe 200> 4 is an external view showing one configuration example of the probe 200. In the figure, (a) is a front view of the probe 200, and (b) is a right side view of the probe 200.

[0045] The probe 200 is formed as a columnar body having a substantially uniform rectangular cross section, and the upper and lower ends of the probe 200 are sharpened so that the central axis J of the probe 200 protrudes. In addition, a locking portion 21 is provided near the upper end of the probe 200, with a part of the side surface protruding.

[0046] The probe 200 is divided into a probe upper part 251, a probe main body 252, and a probe lower part 253. The probe main body 252 is an elastically deformable part disposed between the guide plates 14, 15. The upper side of the probe main body 252 is the probe upper part 251, and the lower side is the probe lower part 253. The locking part 21 is provided on the probe upper part 251.

[0047] The probe 200 has a three-layer structure in which one intermediate layer 302 is sandwiched between two outer layers 301 and 303, and is fabricated using MEMS (Micro Electro Mechanical Systems) technology. The intermediate layer 302 is a conductive layer made of a metal material with good conductivity, and the outer layers 301 and 303 are stress layers made of a metal material with good mechanical strength. A contact layer 304 made of a metal material with good conductivity is formed on the upper end surface of the probe 200 so as to contact each end surface of the three main layers 301 to 303. The three main layers 301 to 303 are laminated and formed as layers parallel to the central axis J and the tilt direction D, and the locking portion 21 is formed as a substantially rectangular convex portion in the planar shape of each of the layers 301 to 303.

[0048] Figures 5 and 6 are diagrams showing a detailed configuration of the probe 200 of Figure 4. Figure 5 is a partially enlarged view showing a part of the probe 200, and Figure 6 is a cross-sectional view showing a cross section taken along the line AA of Figure 5.

[0049] The locking portion 21 is formed by protruding one side surface 210 in the inclination direction D in a direction perpendicular to the central axis J, and has a lower surface 211 and an upper surface 213 perpendicular to the central axis J, and a protruding surface 212 parallel to the central axis J. On the other hand, no locking portion is formed on the other side surface 220 in the inclination direction D.

[0050] In the figure, Lw is the probe width, and L21 is the protruding amount of the locking portion 21. The distance from the central axis J of the probe 200 to the protruding surface 212 is L31=Lw / 2+L21, whereas the distance from the central axis J to the side surface 220 opposing the locking portion 21 is L32=Lw / 2, and the distance from the central axis J to the side surface 220 is shorter than that of the protruding surface 212 by the protruding amount L21.

[0051] Fig. 7 is an enlarged cross-sectional view showing a part of the first guide plate 14 and the probe 200 in Fig. 1. The upper end of the probe 200 abuts against the probe electrode 11t of the ST substrate 11, and the lower surface 211 of the locking portion 21 abuts against the upper surface of the first guide substrate 14. Therefore, the probe 200 is electrically connected to the probe electrode 11t, and the probe 200 can be supported so as not to fall out of the first guide hole 14h.

[0052] The probe upper portion 251 is disposed so as to be inclined in an inclination direction D with respect to the first guide plate 14. Of the inclination directions D, a direction in which the angle between the central axis J of the probe 200 and the first guide plate 14 above the first guide plate 14 is an acute angle is defined as a first direction d1, and a direction opposite to the first direction d1, i.e., a direction in which the angle between the central axis J of the probe 200 and the first guide plate 14 above the first guide plate 14 is an obtuse angle is defined as a second direction d2.

[0053] The locking portion 21 is formed on a side surface 210 on the first direction d1 side of the probe upper portion 251. That is, the locking portion 21 is formed by protruding the side surface 210 which is a side surface above the first guide plate 14 and has an acute angle with respect to the first guide plate 14 due to inclination. Therefore, regardless of the shapes and sizes of the locking portion 21 and the first guide hole 14h, the lower surface 211 of the locking portion 21 faces the upper surface of the guide plate 14 around the first guide hole 14h, and the locking portion 21 is locked to the first guide plate 14, and the probe 200 can be supported so as not to fall out of the first guide hole 14h.

[0054] For example, even if the probe upper portion 251 is designed in advance as having a shape that allows it to pass through the first guide hole 14h, or even if it becomes passable later due to wear or damage, the probe 200 can be supported.

[0055] Furthermore, compared to the case where the locking portion 21 is formed on the side surface 220 on the second direction d2 side, i.e., the side surface 220 above the first guide plate 14 and which forms an obtuse angle with respect to the first guide plate 14 due to the inclination, the protrusion amount L21 of the locking portion 21 can be made smaller, so that the probe pitch Lp can be reduced while maintaining a predetermined probe spacing Li.

[0056] The probe interval Li is the distance from the protruding surface 212 of one of the locking portions 21 of two adjacent probes 200 to the side surface 220 on the second direction d2 side of the other, and the probe pitch is Lp=Lw+L21+Li. For example, if the probe width Lw is 20 μm, the protruding amount L21 of the locking portion 21 is 7 μm, and the probe interval Li is 13 μm, the probe pitch Lp is 40 μm. To achieve a narrow pitch arrangement, it is desirable that the protruding amount L21 of the locking portion 21 is equal to or less than the probe width Lw, and more desirably, equal to or less than 1 / 2 of the probe width Lw. Also, it is desirable that the probe interval Li is equal to or less than the probe width Lw.

[0057] Fig. 8 is a diagram showing a main part of a comparative example to be compared with the first embodiment of the present invention. The comparative probe 200' is disposed at an angle to the first guide plate 14, and has a pair of locking portions 21 that protrude from two side surfaces 210, 220 on the first direction d1 side and the second direction d2 side opposite to the first direction d1. This probe 200' has a disadvantage that, compared to the probe 200 in Fig. 7, when the same probe interval Li is to be ensured, the probe pitch Lp is longer by the protrusion amount L21.

[0058] In the probe card according to the present embodiment, the probe 200 is arranged at an angle with respect to the first guide plate 14, and has a locking portion 21 that protrudes from a side surface 210 on the first direction d1 side where the angle between the probe 200 and the first guide plate 14 is an acute angle above the first guide plate 14. Therefore, the locking portion 21 can be locked to the upper surface of the first guide plate 14, and the probe 200 can be supported so as not to fall off. Moreover, regardless of the size of the gap between the probe 200 and the first guide hole 14h, the protruding amount L21 of the locking portion 21 can be shortened, and the probe pitch Lp can be shortened.

[0059] Furthermore, the probe 200 does not have a locking portion formed on the side surface 220 facing the locking portion 21, and the locking portions 21 of one of the two adjacent probes 200 face the side surface 220 of the other, and do not face each other. Therefore, compared to the case where a probe having locking portions 21 on both opposing side surfaces 210, 220 is used, the same probe interval Li can be ensured and the probe pitch Lp can be shortened.

[0060] In the above embodiment, an example in which the side surface 220 facing the locking portion 21 is flat has been described, but the present invention is not limited to such a case. That is, the side surface facing the locking portion 21 may have a recess or a protrusion, or may be a curved surface, as long as the distance L32 from the central axis J is shorter than the distance L31 from the central axis J to the protruding surface 212. That is, in a cross section including the locking portion 21, the central axis J may be eccentric toward the second direction d2.

[0061] Embodiment 2 In the first embodiment, a case has been described in which a probe 200 is used that is arranged at an angle with respect to the first guide plate 14 and has a locking portion 21 that protrudes from a side surface 210 on the first direction d1 side where the angle between the probe 200 and the first guide plate 14 is an acute angle above the first guide plate 14. In the present embodiment, in addition to this, a case will be described in which a probe 201 is used that has an offset portion 22 in which a side surface 220 on the second direction d2 side opposite to the first direction d1 is offset toward the central axis J.

[0062] 9 and 10 are diagrams showing an example of a main part of a probe 201 constituting a probe card according to a second embodiment of the present invention. Fig. 9 is a partially enlarged view showing a part of the probe 201, and Fig. 10 is a cross-sectional view showing a cross section taken along line BB in Fig. 9.

[0063] 5 (Embodiment 1) in that the probe 201 has an offset portion 22 in which a side surface 220 facing the locking portion 21 is offset inwardly. The other configurations are the same as those of the probe 200, and therefore a duplicated description will be omitted.

[0064] The offset portion 22 is formed by offsetting the side surface 220 on the second direction d2 side of the probe upper portion 251 in the protruding direction of the locking portion 21, and has a lower surface 221 perpendicular to the central axis J and an offset surface 222 parallel to the central axis J. The offset portion 22 is provided at a position corresponding to the locking portion 21 on the central axis J, and the offset surface 222 faces the protruding surface 212 and extends to the upper end of the probe. The lower surface 221 constitutes a step portion formed at the boundary between the side surface 220 and the offset surface 222, and is provided below the lower surface 211 of the locking portion 21. In other words, the lower end of the offset portion 22 is located further below the lower end of the locking portion 21 on the central axis J.

[0065] In the figure, L22 is the offset amount of the offset portion 22. The distance from the central axis J of the probe 201 to the protruding surface 212 is L31=Lw / 2+L21, whereas the distance from the central axis J to the offset surface 222 is L32=Lw / 2-L22. The distance from the central axis J to the offset surface 222 is shorter than that of the protruding surface 212 by the sum of the protruding amount L21 and the offset amount L22.

[0066] 11 is an enlarged cross-sectional view showing a part of the first guide plate 14 and the probe 201. The locking portion 21 of one of the two adjacent probes 201 faces the offset portion 22 of the other. The offset portion 22 is formed so that the lower end of the locking portion 21 of one of the two adjacently arranged probes 201 does not contact the side surface 220 below the offset portion 22 of the other. Therefore, compared to the probe 200 of FIG. 7 (Embodiment 1), the probe pitch Lp can be shortened by the offset amount L22 when the same probe interval Li is to be ensured.

[0067] When the probe 201 is inclined, the outermost edge 225 of the lower surface 221 of the offset portion 22 is located below the outermost edge 215 of the lower surface 211 of the locking portion 21. In other words, the outermost edge 225 of the lower surface 221 of the offset portion 22 is located below the upper surface of the first guide plate 14, for example, within the first guide hole 14h. By adopting such a configuration, it is possible to prevent the outermost edge 215 of the lower surface 211 of the locking portion 21 from contacting the side surface 220 below the offset portion 22. Note that the outermost edges 215, 225 are the edges of the lower surfaces 211, 221 that are farthest from the central axis J.

[0068] The probe interval Li is the distance from one protruding surface 212 of the adjacent probe 201 to the other offset surface 222, and the probe pitch is Lp = Lw + L21 - L22 + Li. For example, if the probe width Lw is 20 μm, the protruding amount L21 of the locking portion 21 is 7 μm, the offset amount L22 is 5 μm, and the probe interval Li is 13 μm, the probe pitch Lp is 35 μm.

[0069] FIG. 12 is a diagram showing a main part of a comparative example to be compared with the second embodiment of the present invention. In the probe 201' as the comparative example, the lower end of the offset portion 22 is provided at a position corresponding to the lower end of the locking portion 21. That is, the lower surface 221 of the offset portion 22 and the lower surface 211 of the locking portion 21 are formed at the same position on the central axis J of the probe 201'. Therefore, if the probe 201' is arranged at an incline, the outermost edge 225 of the lower surface 221 of the offset portion 22 is located above the upper surface of the first guide plate 14, and the outermost edge 215 of the lower surface 211 of the locking portion 21 is at the same height as the side surface 220 below the offset portion 22. As a result, there is a risk that one of the locking portions 21 of two adjacently arranged probes 201' may come into contact with the non-offset side surface 220 of the other, and even if the offset portion 22 is provided, the probe pitch Lp cannot be shortened.

[0070] Probe 201 constituting the probe card according to the present embodiment has offset portion 22 in which side surface 220 facing locking portion 21 is offset in the protruding direction of locking portion 21. Therefore, compared to a case in which offset portion 22 is not provided, the probe pitch Lp can be further shortened while maintaining the same probe interval Li.

[0071] In addition, in the inclined state, the probe 201 constituting the probe card according to this embodiment has the lower end of the offset portion 22 located below the upper surface of the first guide plate 14, for example, in the first guide hole 14h. Therefore, between two adjacently arranged probes 201, it is possible to prevent the locking portion 21 of one probe from contacting the side surface 220 below the offset portion 22 of the other probe, and it is possible to shorten the probe pitch Lp.

[0072] Embodiment 3 In the second embodiment, a case is described in which a probe 201 having an offset portion 22 that extends to the upper end of the probe is used. In contrast, in the present embodiment, a case is described in which a probe 202 having an offset portion 22 formed as a recess that does not reach the upper end of the probe is used.

[0073] 13 is a diagram showing an example of a main part of a probe 202 constituting a probe card according to a third embodiment of the present invention, and is a partially enlarged view showing a part of the probe 202. The probe 202 differs from the probe 201 (second embodiment) of FIG 9 in that the offset portion 22 is formed as a recess that does not reach the upper end of the probe. The other configurations are the same as those of the probe 201, so a duplicated description will be omitted.

[0074] The offset portion 22 is formed by offsetting a side surface 220 on the second direction side of the probe upper portion 251 in the protruding direction of the locking portion 21, and has a lower surface 221 and an upper surface 223 perpendicular to the central axis J, and an offset surface 222 parallel to the central axis J. In addition, the offset portion 22 is provided at a position corresponding to the locking portion 21 on the central axis J, and the offset surface 222 faces the protruding surface 212 of the locking portion 21.

[0075] The offset portion 22 is formed as a recess that does not reach the upper end of the probe, and the non-offset side surface 220 is provided not only below the offset portion 22 but also above it. The upper surface 223 is a surface that constitutes a step portion formed at the boundary between the offset surface 222 and the upper side surface 220. The upper surface 223 is provided above the upper surface 213 of the locking portion 21. In other words, the upper end of the offset portion 22 is formed at a position that is further above the upper end of the locking portion 21 with respect to the central axis J. The lower surface 221 is a surface that constitutes a step portion formed at the boundary between the offset surface 222 and the lower side surface 220. The lower surface 221 is provided below the lower surface 211 of the locking portion 21. In other words, the lower end of the offset portion 22 is formed at a position that is further below the lower end of the locking portion 21 with respect to the central axis J.

[0076] FIG. 14 is an enlarged cross-sectional view showing a part of the first guide plate 14 and the probe 202. The locking portion 21 of one of the two adjacent probes 202 faces the offset portion 22 of the other. The offset portion 22 is formed so that the lower end and the upper end of the locking portion 21 of one of the two adjacent probes 202 do not contact any of the side surfaces 220 below or above the offset portion 22 of the other. Therefore, similar to the probe 201 of FIG. 11, the probe pitch Lp can be shortened. Also, unlike the probe 201 of FIG. 11, the width of the probe upper end is not narrowed by the offset by forming the offset portion 22 as a recess. Therefore, the range of the inclination angle of the probe that can contact the probe electrode 11t can be expanded, and even if the inclination angle of the probe 202 becomes excessive, the probe upper end can contact the probe electrode 11t.

[0077] When the probe 202 is inclined, the outermost edge 225 of the lower surface 221 of the offset portion 22 is located below the outermost edge 215 of the lower surface 211 of the locking portion 21. In other words, the outermost edge 225 of the lower surface 221 of the offset portion 22 is located below the upper surface of the first guide plate 14, for example, within the first guide hole 14h. By employing such a configuration, it is possible to prevent the outermost edge 215 of the lower surface 211 of the locking portion 21 from contacting the side surface 220 below the offset portion 22.

[0078] Furthermore, when the probe 202 is inclined, the outermost edge 227 of the upper surface 223 of the offset portion 22 is disposed above the outermost edge 217 of the upper surface 213 of the locking portion 21. By adopting such a configuration, it is possible to prevent the outermost edge 217 of the upper surface 213 of the locking portion 21 from contacting the side surface 220 above the offset portion 22. Note that the outermost edges 217, 227 are the edges of the upper surfaces 213, 223 that are farthest from the central axis J.

[0079] Embodiment 4 In the third embodiment, a case has been described in which the probe 202 is used in which the upper surface 213 of the locking portion 21 and the lower surface 221 and the upper surface 223 of the offset portion 22 are perpendicular to the central axis J. In contrast, in the present embodiment, a case will be described in which the probe 203 in which these are inclined with respect to the central axis J is used.

[0080] 15 is a diagram showing an example of a main part of probe 203 constituting a probe card according to embodiment 4 of the present invention, and is a partially enlarged view showing a part of probe 203. Probe 203 differs from probe 202 (embodiment 3) in FIG. 13 in that upper surface 213 of engaging portion 21 and lower surface 221 and upper surface 223 of offset portion 22 are inclined with respect to central axis J. Other configurations are similar to those of probe 202, so duplicated explanations will be omitted.

[0081] The locking portion 21 is formed by protruding a side surface 210 on the first direction side of the probe upper portion 251, and has a lower surface 211 perpendicular to the central axis J, a protruding surface 212 parallel to the central axis J, and an upper surface 213 inclined with respect to the central axis J. The upper surface 213 is a flat surface or a curved surface that protrudes less the further upward and is inclined so as to approach the central axis J.

[0082] The offset portion 22 is formed by offsetting the side surface 220 on the second direction side of the probe upper portion 251 in the protruding direction of the locking portion 21, and has a lower surface 221 and an upper surface 223 inclined with respect to the central axis J, and an offset surface 222 parallel to the central axis J. The offset portion 22 is provided at a position corresponding to the locking portion 21 on the central axis J, and the offset surface 222 faces the protruding surface 212 of the locking portion 21. The lower surface 221 formed below the offset surface 222 is provided below the lower surface 211 of the locking portion 21, and is a flat surface or a curved surface that is inclined so as to move away from the central axis J, with the offset amount decreasing as it moves downward. The upper surface 223 formed above the offset surface 222 is a flat surface or a curved surface that is inclined so as to move away from the central axis J, with the offset amount decreasing as it moves upward.

[0083] 16 is an enlarged cross-sectional view showing a part of the first guide plate 14 and the probe 203. Since the locking portion 21 of one of the two adjacent probes 203 faces the offset portion 22 of the other, the probe pitch Lp can be shortened as in the probe 202 (embodiment 3) of FIG. 14. Meanwhile, unlike the probe 201 of FIG. 11, the upper surface 213 of the locking portion 21, the lower surface 221 of the offset portion 22, and the upper surface 223 of the offset portion 22 are inclined with respect to the central axis J, so that the locking portion 21 of one of the two probes 203 can be prevented from contacting the other between the two probes 203 arranged adjacently. In addition, the effect of providing the offset portion 22 on the electrical characteristics and mechanical strength of the probe 203 can be suppressed.

[0084] Furthermore, when the probe 202 is inclined, the outermost edge 225 of the lower surface 221 of the offset portion 22 is located lower than the outermost edge 215 of the lower surface 211 of the locking portion 21, and the outermost edge 227 of the upper surface 223 of the offset portion 22 is located higher than the outermost edge 217 of the upper surface 213 of the locking portion 21. By employing such a configuration, it is possible to prevent the locking portion 21 from contacting the side surface 220 in the vicinity of the offset portion 22.

[0085] Similarly, for the probe 201 (embodiment 2) shown in Figure 9, by inclining the upper surface 213 of the engagement portion 21 or the lower surface 221 of the offset portion 22 with respect to the central axis J, it is possible to prevent the upper end or lower end of one engagement portion 21 from coming into contact with the other between two adjacent probes 201. [Explanation of symbols]

[0086] 100 Probe Card 10 Main board (wiring board) 10t external electrode 11 ST board (wiring board) 11t Probe Electrode 12 Reinforcement plate 13 Spacer 14 First guide plate 14h First guide hole 15 Second guide plate 15h 2nd guide hole 200~203 Probe 21 Locking part 210 Side of the first direction 211 Underside of locking part 212 Protruding surface of the locking part 213 Upper surface of the locking part 215 Outermost edge of the lower surface of the locking part 217 Outermost edge of the upper surface of the engagement part 22 Offset section 220 Second direction side 221 Underside of offset section 222 Offset surface of offset part 223 Top surface of offset section 225 Outermost edge of the underside of the offset section 227 Outermost edge of the top surface of the offset section 251 Probe Top 252 Probe body 253 Probe Lower Part 301~303 Main layer 304 Contact layer D Tilt direction d1 1st direction d2 2nd direction Hi First guide hole spacing Hp First guide hole pitch Hw Width of first guide hole J center axis L21 Overhang amount L22 offset amount L31 Distance from the central axis to the protruding surface L32 Distance from the central axis to the offset surface Li Probe Spacing Lp Probe Pitch Lw Probe width

Claims

1. Two or more probes formed as cylindrical bodies having approximately the same rectangular cross section; a first guide plate having two or more first guide holes through which the probes are respectively inserted; the probe is disposed at an angle with respect to the first guide plate, and has a locking portion that protrudes from a side surface above the first guide plate and that forms an acute angle with respect to the first guide plate on a first direction side, and a recess that offsets a side surface of the probe to the locking portion on a second direction side and that forms an obtuse angle with respect to the first guide plate, A probe card characterized in that the locking portion of one of the probes faces the recess of the other adjacent probe, and on the central axis of the probe, the lower surface of the recess is formed lower than the lower surface of the locking portion, the outermost edge of the upper surface of the recess is formed higher than the outermost edge of the upper surface of the locking portion, and the outermost edge of the lower surface of the recess is located on the side surface on the second direction side.

2. a second guide plate disposed below the first guide plate and having two or more second guide holes through which the probes are respectively inserted; the first guide hole and the second guide hole are disposed at positions relatively offset from each other in a direction in which the probe is tilted, the probe is curved and deformed between the first guide plate and the second guide plate, 2. The probe card according to claim 1, wherein the locking portion of the probe is inclined relative to the first guide plate and the second guide plate in a direction in which the probe undergoes buckling deformation during overdriving.

3. The probe has a multi-layer structure in which a plurality of layers are stacked in a thickness direction, 3. The probe card according to claim 2, wherein a contact layer is formed on an upper end surface of the probe, the contact layer contacting each end surface of the plurality of layers.

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