Electrostatic chuck

Abstract

To provide an electrostatic chuck capable of keeping a balance of a support force applied to a substrate, and controlling deflections of a substrate.SOLUTION: An electrostatic chuck 10 comprises: a dielectric substrate 100; a plurality of seal rings 150 that is formed on the dielectric substrate 100; and a plurality of dots 160 formed on the dielectric substrate 100. Each of a first seal ring 151 and a second seal ring 152 out of the plurality of seal rings 150 includes non-circular parts 151A and 152A. The plurality of dots 160 contains: a first dot group that is arranged so as to be aligned along a shape of the first seal ring 151 in an inner side of the first seal ring 151; and a second dot group that is arranged so as to be allocated along a shape of the second seal ring 152 in the inner side of the second seal ring 152.SELECTED DRAWING: Figure 3

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