Electrostatic chuck

Abstract

To provide an electrostatic chuck which can suppress leakage of gas through a joint layer.SOLUTION: An electrostatic chuck 10 includes: a dielectric substrate 100; and a seal ring 151 as a circular protrusion formed in the dielectric substrate 100. The seal ring 151 has a non-round part 151A. The dielectric substrate 100 is provided with a plurality of gas holes 140 for supplying gas into a space SP in the inside of the seal ring 151. The gas holes 140 include a circular gas hole group arranged in a circular pattern along the shape of the seal ring 151.SELECTED DRAWING: Figure 3

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