Force sensor and method for manufacturing force sensor
JP2024175598APending Publication Date: 2024-12-18ALPS ALPINE CO LTD
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Patent Information
- Application Number
- JP2023093505
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2023-06-06
- Publication Date
- 2024-12-18
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Abstract
To provide a force sensor excellent in load resistance and strain detection properties, and a method for manufacturing the force sensor.SOLUTION: A force sensor includes: a pressure transmitting member including a pressure receiving part for receiving a force to be detected in an end part on one side in a first direction; and a sensor substrate arranged on the other side in the first direction of the pressure transmitting member and having rigidity higher than that of the pressure transmitting member. The sensor substrate includes a strain detection element on the side facing the pressure transmitting member; the pressure transmitting member has a first area having relatively low rigidity and a second area adjacent to the first area when viewing the first direction, having relatively high rigidity and including a contact part contacting the sensor substrate; and the strain detection element is positioned in the vicinity of a boundary between the first and second areas.SELECTED DRAWING: Figure 3
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