Contact probe and manufacturing method therefor

Abstract

To provide a contact probe that can be shortened, can be secured in load resistance and durability and, in addition, can perform processing by means of a fixed plunger alone.SOLUTION: A contact probe 10A that is brought into contact with an IC package mounted on a socket for inspection, comprises: a cylindrical barrel 20A extending in a direction of an axis X; and a fixed plunger 30A a tip of which is brought into contact with an IC package and a basal-end side of which is housed in the barrel 20A, wherein a portion of the barrel 20A, which includes an edge 21 of the barrel 20A, fixes movement of the fixed plunger 30A in the direction of the axis X by means of a fixed-side caulking portion 22 reduced in diameter toward the fixed plunger 30A.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a contact probe and a method for manufacturing the same. [Background technology]

[0002] Electronic devices such as IC packages mounted on electronic devices are generally tested using an inspection socket to remove potential defects before they are mounted on a wiring board. The inspection socket is equipped with contact probes that electrically connect between electrodes such as solder balls and solder bumps of the electronic device and a printed wiring board (substrate) that is used as the inspection board or mounting board.

[0003] Contact probes include those disclosed in Patent Document 1 and Patent Document 2, for example. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2020-165803 A [Patent Document 2] JP 2012-207994 A Summary of the Invention [Problem to be solved by the invention]

[0005] The contact probe disclosed in Patent Document 1 is composed of four parts: a fixed lower plunger, a movable upper plunger, a barrel extending in the axial direction, and a spring. In order to fix the lower plunger, crimping portions are provided at two locations, at the edge of the barrel and at a portion spaced a predetermined distance from the edge in the axial direction. However, when this configuration is adopted, the overall length of the barrel must be long in order to secure a space within the barrel to accommodate the spring. In other words, the overall length of the contact probe is also long.

[0006] On the other hand, the contact probe disclosed in Patent Document 2 is composed of three parts: a barrel with an integral contact (a part corresponding to the tip of a fixed plunger), a movable sub-plunger, and a spring. When this configuration is adopted, the problem of the overall length of the barrel becoming longer does not occur. However, the heat treatment to harden the contact must be performed on the barrel as a whole, and there is a risk that the hardened barrel will crack when a squeezed portion (crimp) to prevent the sub-plunger from falling off is formed on the barrel.

[0007] SUMMARY OF THE PRESENT DISCLOSURE An object of the present invention is to provide a contact probe and a manufacturing method thereof that can shorten the contact probe while ensuring load resistance and durability, and that can perform processing on the fixed plunger alone. [Means for solving the problem]

[0008] In order to solve the above problems, the contact probe and the manufacturing method thereof of the present invention employ the following measures. In other words, the contact probe according to a reference aspect of the present invention is a contact probe that contacts an IC package mounted in an inspection socket, and comprises a cylindrical barrel extending in the axial direction, and a fixed plunger whose tip contacts the IC package and whose base end is housed in the barrel, and the movement of the fixed plunger is fixed in the axial direction by a crimping portion whose diameter is reduced toward the fixed plunger, the portion of the barrel including the edge of the barrel.

[0009] The contact probe according to this embodiment includes a cylindrical barrel extending in the axial direction, and a fixed plunger whose tip contacts the IC package and whose base end is housed in the barrel, and the movement of the fixed plunger is fixed in the axial direction by a crimping portion whose diameter is reduced toward the fixed plunger at a portion of the barrel including the edge of the barrel, so that the fixed plunger can be fixed to the barrel by a single crimping portion including the edge of the barrel. Therefore, compared to a four-part contact probe in which crimping portions are provided at two locations, the edge of the barrel and a portion spaced a predetermined distance from the edge, it is possible to ensure space in the barrel that houses the spring by shortening the fixed plunger. This allows the contact probe to be shortened while having superior load resistance and durability. In addition, since the fixed plunger and the barrel are separate, the heat treatment can be performed on the fixed plunger alone. In the case of a contact probe consisting of three parts, in which the fixed plunger and the barrel are integrated, the part that comes into contact with the IC package (the part corresponding to the fixed plunger) cannot be heat treated alone.

[0010] In addition, in the contact probe according to a reference aspect of the present invention, the fixed plunger has a constricted portion, and the crimping portion comes into contact with the constricted portion to fix the movement of the fixed plunger in the axial direction.

[0011] According to the contact probe of the present embodiment, the fixed plunger has a constricted portion, and the crimping portion contacts the constricted portion to fix the movement of the fixed plunger in the axial direction, so that the fixed plunger can be fixed to the barrel by utilizing the edge and constricted portion of the barrel.

[0012] In addition, in a contact probe related to a reference aspect of the present invention, the fixed plunger has an expanded diameter portion that expands toward the base end, and the barrel has a stepped portion whose inner surface expands toward the edge portion, and the expanded diameter portion of the fixed plunger contacts the stepped portion of the barrel, and the crimped portion contacts the expanded diameter portion, thereby fixing the movement of the fixed plunger in the axial direction.

[0013] According to the contact probe of the present embodiment, the fixed plunger has an expanded diameter portion that expands toward the base end, and the barrel has a stepped portion whose inner surface expands toward the edge portion, and the expanded diameter portion of the fixed plunger contacts the stepped portion of the barrel and the crimped portion contacts the expanded diameter portion, thereby fixing the movement of the fixed plunger in the axial direction, so that the expanded diameter portion and the stepped portion, and the expanded diameter portion and the crimped portion can be used to fix the fixed plunger to the barrel.

[0014] Furthermore, a contact probe according to one embodiment of the present invention is a contact probe that contacts an IC package mounted in an inspection socket, and comprises a barrel having a protrusion formed on an end face of a cylindrical portion extending in the axial direction, and a fixed plunger having an insertion portion whose tip contacts the IC package and into which the protrusion is inserted on its base end side, and the movement of the fixed plunger is fixed in the axial direction by a crimping portion of the insertion portion that is reduced in diameter toward the protrusion and an edge of the insertion portion that contacts the end face of the barrel.

[0015] The contact probe according to this aspect includes a barrel having a protrusion formed on an end surface of a cylindrical portion extending in the axial direction, and a fixed plunger having an insertion portion whose tip contacts an IC package and into which the protrusion is inserted on the base end side, and the insertion portion is fixed in the axial direction by a crimping portion whose diameter is reduced toward the protrusion and an edge of the insertion portion that contacts the end surface of the barrel, so that the fixed plunger can be fixed to the barrel by a single crimping portion using the end surface of the barrel. Also, compared to a four-part contact probe in which crimping portions are provided at two locations, the edge of the barrel and a portion spaced a predetermined distance from the edge, a space can be secured in the barrel to accommodate the spring. This provides superior load resistance and durability.

[0016] In addition, in a contact probe according to one embodiment of the present invention, the barrel has a constricted portion formed by the end face and the protrusion, and the crimping portion contacts the constricted portion to fix the movement of the fixed plunger in the axial direction.

[0017] According to the contact probe of the present embodiment, the barrel has a constricted portion formed by the end face and the protrusion, and the crimping portion contacts the constricted portion to fix the movement of the fixed plunger in the axial direction, so that the fixed plunger can be fixed to the barrel by utilizing the constricted portion and the crimping portion formed by the end face and the protrusion.

[0018] In the contact probe according to one aspect of the present invention, the protrusion has a constricted portion, and the crimping portion comes into contact with the constricted portion to fix the movement of the fixed plunger in the axial direction.

[0019] According to the contact probe of the present embodiment, the protrusion has a constricted portion, and the crimping portion contacts the constricted portion to fix the movement of the fixed plunger in the axial direction, so that the fixed plunger can be fixed to the barrel by utilizing the constricted portion and the crimping portion formed on the protrusion.

[0020] In addition, a manufacturing method according to a reference aspect of the present invention is a manufacturing method for a contact probe comprising a cylindrical barrel extending in an axial direction, and a fixed plunger whose tip contacts an IC package and whose base end is housed in the barrel, and in which a portion including the edge of the barrel is crimped to fix movement of the fixed plunger in the axial direction by a crimping portion whose diameter is reduced toward the fixed plunger, and includes a step of pressing a tool against the outer periphery of the barrel and rotating the barrel around the axis relative to the tool to tilt the portion including the edge of the barrel toward the fixed plunger to form the crimping portion.

[0021] The manufacturing method of the contact probe according to the present embodiment includes a step of pressing a tool against the outer periphery of the barrel and rotating the barrel around its axis relative to the tool to tilt the portion including the edge of the barrel toward the fixed plunger to form a crimped portion, thereby making it possible to crimp the portion including the edge of the barrel and simultaneously center the barrel and the fixed plunger.

[0022] Moreover, a manufacturing method according to one embodiment of the present invention is a method for manufacturing a contact probe comprising a barrel having a protrusion formed on an end face of a cylindrical portion extending in the axial direction, and a fixed plunger having an insertion portion whose tip contacts an IC package and into which the protrusion is inserted at its base end, wherein the movement of the fixed plunger is fixed in the axial direction by a crimping portion whose diameter is reduced toward the protrusion and an edge portion of the insertion portion contacting the end face of the barrel, and includes a step of pressing a tool against the outer periphery of the insertion portion and rotating the insertion portion around the axis relative to the tool to reduce the diameter of the insertion portion toward the protrusion to form the crimping portion.

[0023] The manufacturing method of the contact probe according to the present embodiment includes a step of pressing a tool against the outer periphery of the insertion portion and rotating the insertion portion around the axis relative to the tool to reduce the diameter of the insertion portion toward the protrusion portion and form the crimped portion, so that the barrel and the fixed plunger can be centered at the same time as the insertion portion is crimped.

[0024] In addition, a manufacturing method according to a reference aspect of the present invention is a manufacturing method for a contact probe comprising a cylindrical barrel extending in an axial direction, and a fixed plunger whose tip contacts an IC package and whose base end is housed in the barrel, and in which a portion including the edge of the barrel is crimped to fix movement of the fixed plunger in the axial direction by a crimping portion whose diameter is reduced toward the fixed plunger, and includes a step of pressing a tool against the edge of the barrel along the axial direction to tilt the portion including the edge of the barrel toward the fixed plunger to form the crimping portion.

[0025] The manufacturing method of the contact probe according to the present embodiment includes a step of pressing a tool against the edge of the barrel along the axial direction to tilt the portion including the edge of the barrel toward the fixed plunger to form a crimped portion, thereby making it possible to crimp the insertion portion and simultaneously center the barrel and the fixed plunger. Effect of the Invention

[0026] According to the present invention, the contact probe can be shortened while ensuring the load resistance and durability, and processing can be performed by the fixed plunger alone. [Brief description of the drawings]

[0027] [Figure 1] FIG. 2 is a perspective view of an inspection socket. [Diagram 2] FIG. 2 is a longitudinal sectional view of the inspection socket. [Diagram 3] 1 is a longitudinal sectional view of a contact probe according to a first reference embodiment of the present invention. [Figure 4] 1 is a partial vertical cross-sectional view of a contact probe according to a first reference embodiment of the present invention. [Diagram 5] 10 is a partial vertical cross-sectional view of a modified example of a contact probe according to a first reference embodiment of the invention. FIG. [Figure 6] FIG. 13 is a diagram showing a die crimping process. [Figure 7] FIG. 13 is a diagram showing a rotary crimping process. [Figure 8]13A and 13B are diagrams showing another example of a fixed plunger. [Figure 9] 11 is a partial vertical cross-sectional view of a contact probe according to a second reference embodiment of the present invention. FIG. [Figure 10] 1 is a longitudinal sectional view of a contact probe according to a first embodiment of the present invention. [Figure 11] 1 is a partial vertical cross-sectional view of a contact probe according to a first embodiment of the present invention. [Figure 12] FIG. 4 is a diagram showing the machining direction of the barrel. [Figure 13] FIG. 4 is a vertical cross-sectional view of the fixed plunger. [Figure 14] FIG. 11 is a vertical cross-sectional view of a modified example of the fixed plunger. [Figure 15] 5 is a partial vertical cross-sectional view of a contact probe according to a second embodiment of the present invention. FIG. [Figure 16] 11 is a partial vertical cross-sectional view of another example of a contact probe according to the second embodiment of the present invention. FIG. [Figure 17] 13A and 13B are diagrams showing a plunger according to a modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0028] [First Reference Embodiment] A contact probe according to a first reference embodiment of the present invention will now be described with reference to the drawings.

[0029] As shown in Figures 1 and 2, the contact probe 10A is a component that electrically connects between the electrode portion (e.g., solder ball 5a) of the IC package 5 placed on the inspection socket 1 and the printed wiring board (substrate 4) on which the inspection socket 1 is mounted.

[0030] [Inspection socket configuration] First, an overview of the inspection socket 1 will be given. The inspection socket 1 includes a socket base 2, a housing 3, and a contact probe 10A.

[0031] As shown in FIG. 1, the socket base 2 is a component that constitutes the outer shape of the inspection socket 1. The socket base 2 is a rectangular parallelepiped that is approximately square in plan view. A recess 2a is formed in the center of the upper surface of the socket base 2. A housing 3 is accommodated inside the socket base 2.

[0032] The recess 2a is a space that accommodates the IC package 5. The recess 2a is formed so as to be recessed from the upper surface, and has a substantially square shape in a plan view.

[0033] As shown in FIG. 2, the housing 3 is a member made up of multiple layers. As shown in FIGS. 1 and 2, the housing 3 faces the outside through a recess 2a of the socket base 2. As shown in FIG. The housing 3 is formed with a plurality of insertion holes 3a.

[0034] As shown in FIG. 2, a contact probe 10A is housed in the insertion hole 3a. The insertion holes 3a receive the solder balls 5a of the IC package 5 placed in the recess 2a, so that the contact probes 10A and the solder balls 5a come into contact with each other inside the insertion holes 3a.

[0035] [Contact probe configuration] Next, the configuration of contact probe 10A will be described. As described above, contact probe 10A is a component that electrically connects IC package 5 and substrate 4. Contact probe 10A is a so-called short probe.

[0036] 3, the contact probe 10A includes a barrel 20A, a fixed plunger 30A, a movable plunger 40, and a spring 50. That is, the contact probe 10A is a probe made up of four components.

[0037] The barrel 20A is a cylindrical member that is open on both ends and extends in the direction of the axis X. The barrel 20A has an outer diameter of about 0.20 mm to 0.80 mm and a wall thickness of about 0.03 mm to 0.06 mm. Note that these values ​​are merely examples, and the dimensions are not limited to these values. The barrel 20A is made by lathe-machining a copper-based material such as phosphor bronze into a cylindrical shape and then plating the material with a predetermined thickness. The plating is made into multiple layers, and the inner surface is preferably made of a material with good electrical conductivity and corrosion resistance (e.g., an Au-based material). The barrel 20A has a fixed crimped portion (crimped portion) 22 at one end and a movable crimped portion 28 at the other end.

[0038] The fixed side crimping portion 22 is a portion of the barrel 20A including the edge portion 21 of the barrel 20A that is reduced in diameter so as to incline toward the axis X. The fixed side crimping portion 22 is a portion that comes into contact with a fixed portion 32 of the fixed plunger 30A, which will be described later.

[0039] The movable crimping portion 28 is a portion of the barrel 20A including the edge portion 27 of the barrel 20A that is reduced in diameter so as to be inclined toward the axis X side.

[0040] The fixed plunger 30A is a member that comes into contact with the solder ball 5a. The fixed plunger 30A is formed by subjecting a base material (a part that constitutes the outer shape of the fixed plunger 30A) made of a copper-based material such as beryllium copper, an SK material, an alloy material (Pd), or the like, to a predetermined plating process. The plating is made into multiple layers, and the outer surface is preferably made of a material with good electrical conductivity and corrosion resistance (for example, an Au-based material). The base material is heat-treated to improve hardness. As shown in FIG. 4, the fixed plunger 30A has a sharp portion 31, a fixed portion 32 and a spring umbilicus 33.

[0041] The sharpened portion 31 constitutes the tip of the fixed plunger 30A, and is the portion of the fixed plunger 30A that comes into contact with the solder ball 5a. The sharpened portion 31 is a so-called crown cut, and improves contact with the solder ball 5a. In the above description, the IC package 5 is described taking a BGA (Ball Grid Array) type as an example, but other types such as an LGA (Land Grid Array) type or a QFN (Quad Flat Non-leaded package) type may also be used. In this case, the sharpened portion 31 has a shape other than a crown cut (for example, a cone shape).

[0042] The fixed portion 32 is a portion that constitutes the base end of the fixed plunger 30A, and is a portion formed below the sharpened portion 31, and is a portion that is housed in the barrel 20A and comes into contact with the fixed-side crimping portion 22. Note that the base end here means the end opposite to the tip. The fixing portion 32 has a constricted portion formed by a reduced diameter surface 32a and an increased diameter surface 32c. The reduced diameter surface 32a is a surface whose outer diameter is reduced from the tip end to the base end (for example, a tapered surface). The reduced diameter surface 32a is formed in the entire circumferential direction around the axis X. The enlarged diameter surface 32c is a surface (e.g., a tapered surface) whose outer diameter increases from the tip to the base end. The enlarged diameter surface 32c is formed over the entire circumferential direction around the axis X. The enlarged diameter surface 32c is continuously connected to the reduced diameter surface 32a.

[0043] The fixed side crimping portion 22 of the barrel 20A is in contact with the fixed portion 32 configured as above. In detail, the surface of the edge portion 21 contacts the reduced diameter surface 32a, and the inner peripheral surface of the inclined portion of the barrel 20A contacts the expanded diameter surface 32c. This fixes the movement of the fixed plunger 30A along the axis X. In other words, the fixed plunger 30A is fixed to the barrel 20A.

[0044] As shown in FIG. 2, the movable plunger 40 is a member that comes into contact with the substrate 4. The movable plunger 40 is made by subjecting a base material (a part that constitutes the outer shape of the movable plunger 40) made of a copper-based material such as beryllium copper or an SK material to a predetermined plating process. The plating is made into multiple layers, and the outer surface is preferably made of a material with good electrical conductivity and corrosion resistance (for example, an Au-based material). The base material is heat-treated to improve hardness. As shown in FIG. 3, the movable plunger 40 is configured by the movable crimping portion 28 so as not to fall off from the barrel 20A.

[0045] The spring 50 is provided between the fixed plunger 30A and the movable plunger 40 inside the barrel 20A. The spring 50 biases the movable plunger 40 in a direction to separate it from the fixed plunger 30A. As a result, the movable plunger 40 contacts the movable-side crimping portion 28 in an unloaded state (FIG. 3), and is pushed toward the fixed plunger 30A in a loaded state (FIG. 2) in which the movable plunger 40 contacts the substrate 4.

[0046] [Variation 1] 5, a constricted portion may be formed by aligning the reduced diameter surface 32a with a plane perpendicular to the axis X, and providing a constant diameter surface 32b having a constant outer diameter between the reduced diameter surface 32a and the expanded diameter surface 32c. In this case, the corner of the edge 21 comes into contact with the reduced diameter surface 32a.

[0047] In contact probe 10A described above, fixed side crimping portion 22 is formed by, for example, die crimping shown in FIG. 6 or rotational crimping shown in FIG.

[0048] [Shape clamping] 6, first, the fixed portion 32 of the fixed plunger 30A is housed in the barrel 20A. A crimping die 61 is prepared according to the shape of the fixed-side crimping portion 22 to be formed. Then, the fixed plunger 30A, the barrel 20A, and the crimping die 61 are arranged in a straight line so that their axes coincide with each other.

[0049] Next, the crimping die 61 is moved along the axial direction toward the barrel 20A and pressed against the edge 21 of the barrel 20A. As a result, a portion of the barrel 20A including the edge 21 is tilted toward the fixed portion 32 while being plastically deformed.

[0050] [Rotational crimping] 7, first, the fixed portion 32 of the fixed plunger 30A is placed in the barrel 20A. A crimping tool 62 is prepared according to the shape of the fixed-side crimped portion 22 to be formed. Then, the fixed plunger 30A and the barrel 20A are arranged in a straight line so that their axes coincide with each other, and the crimping tool 62 is arranged radially outward of the axes.

[0051] Next, the crimping tool 62 is moved toward the barrel 20A along the radial direction of the axis and pressed against the barrel 20A while rotating the barrel 20A about the axis. As a result, a portion of the barrel 20A including the edge portion 21 is plastically deformed and tilted toward the fixed portion 32. It is not always necessary to rotate the barrel 20A, but the crimping tool 62 or both may be rotated.

[0052] According to this embodiment, the following effects are obtained. The movement of the fixed plunger 30A can be fixed in the direction of the axis X by a single fixed-side crimping portion 22 where the portion of the barrel 20A including the edge portion 21 of the barrel 20A is reduced in diameter toward the fixed plunger 30A. Therefore, compared to a four-component contact probe in which crimping portions are provided at two locations, the edge portion of the barrel and a portion spaced a predetermined distance from the edge portion, a space can be secured within the barrel 20A to accommodate the spring 50 by shortening the fixed plunger 30A. This allows the contact probe 10A to be shortened while having superior load resistance and durability.

[0053] In addition, since the fixed plunger 30A and the barrel 20A are separate bodies, the heat treatment can be performed on the fixed plunger 30A alone. In the case of a contact probe having a three-part configuration in which the fixed plunger and the barrel are integrated, the part that comes into contact with the IC package 5 (the part corresponding to the fixed plunger) cannot be heat treated alone.

[0054] In addition, the process includes a step of pressing a crimping tool 62 against the outer periphery of the barrel 20A and rotating the barrel 20A around the axis X relative to the crimping tool 62 to tilt the portion of the barrel 20A including the edge 21 toward the fixed plunger 30A to form the fixed side crimped portion 22, so that the portion of the barrel 20A including the edge 21 can be crimped while simultaneously centering the barrel 20A and the fixed plunger 30A.

[0055] The spring umbilicus 33 of the fixed plunger 30A is not an essential component, and can be omitted as in the fixed plunger 30A shown in FIG.

[0056] [Second Reference Embodiment] A contact probe according to a second reference embodiment of the present invention will now be described with reference to the drawings. Contact probe 10B according to the present embodiment is different from contact probe 10A according to the first reference embodiment in the configuration near fixed-side crimping portion 22 and the configuration of fixed portion 32 of fixed plunger 30B, but the other configurations are similar. For this reason, the same configurations are given the same reference numerals and the description thereof will be omitted.

[0057] As shown in FIG. 9, the barrel 20B has a stepped portion 23 near the fixed crimped portion 22. The stepped portion 23 is a stepped portion formed by abruptly expanding the inner diameter of the barrel 20B toward the edge portion 21. The stepped portion 23 is a portion that comes into contact with an end face 34 of a fixed plunger 30B, which will be described later. Since the stepped portion 23 is formed, the portion of the barrel 20B on the edge portion 21 side (upper side in the figure) of the stepped portion 23 is made thinner than the other portions of the barrel 20B.

[0058] The fixed portion 32 of the fixed plunger 30B has an enlarged diameter surface 32c and an end surface . The diameter expansion surface 32c is a surface whose outer diameter expands from the tip end to the base end (for example, a tapered surface). The diameter expansion surface 32c is formed in the entire circumferential direction around the axis X. The end face 34 is a face formed at the lower part of the diameter expansion face 32c.

[0059] The fixed portion 32 configured as above is in contact with the fixed side crimped portion 22 and the stepped portion 23 of the barrel 20B. In detail, the inner circumferential surface of the inclined portion of the barrel 20B contacts the expanded diameter surface 32c, and the stepped portion 23 of the barrel 20B contacts the end surface 34. This fixes the movement of the fixed plunger 30B along the axis X. In other words, the fixed plunger 30B is fixed to the barrel 20B.

[0060] According to this embodiment, the following effects are obtained. The fixed plunger 30B can be fixed to the barrel 20B by utilizing the expanded diameter surface 32c of the fixed plunger 30B and the stepped portion 23 of the barrel 20B, and the expanded diameter surface 32c of the fixed plunger 30B and one crimping portion 22. Therefore, as in the first reference embodiment, the space in the barrel 20B that accommodates the spring 50 can be secured by shortening the fixed plunger 30B. This allows the contact probe 10B to be shortened while having superior load resistance and durability.

[0061] Furthermore, since the crimped portion 22 is formed at the portion of the barrel 20B that has been thinned by the stepped portion 23, the force required to plastically deform the barrel 20B can be reduced.

[0062] [First embodiment] A contact probe according to a first embodiment of the present invention will be described below with reference to the drawings. Contact probe 10C according to the present embodiment is different from contact probe 10A according to the first reference embodiment in the configuration of barrel 20C and fixed plunger 30C, but the other configurations are similar. Therefore, the same components are denoted by the same reference symbols and the description thereof will be omitted.

[0063] As shown in FIGS. 10 and 11, the barrel 20C is a cylindrical member that extends in the direction of the axis X and has one closed end. The barrel 20C is made by processing a copper-based material such as phosphor bronze into a cylindrical shape and then performing a predetermined plating process. The plating is in multiple layers, and the inner circumferential surface is preferably made of a material with good electrical conductivity and corrosion resistance (for example, an Au-based material). As shown in FIG. 11, the barrel 20C has a protrusion 25.

[0064] The protrusion 25 is a top-shaped portion formed on the end face 24 on the closed end side. The protrusion 25 is a portion that comes into contact with a fixed side crimping portion 35aC of a fixed plunger 30C, which will be described later. The protrusion 25 has a reduced diameter surface 25a.

[0065] The reduced diameter surface 25a is a surface whose outer diameter is reduced from the tip end to the base end (for example, a tapered surface). The reduced diameter surface 25a is formed in the entire circumferential direction around the axis X. The barrel 20C has a narrowed portion formed by the reduced diameter surface 25a and the end surface 24.

[0066] The fixed plunger 30C is a member that comes into contact with the solder ball 5a. The fixed plunger 30C is formed by subjecting a base material (a part that constitutes the outer shape of the fixed plunger 30C) made of a copper-based material such as beryllium copper to a predetermined plating process. The plating is made into multiple layers, and the outer surface is preferably made of a material with good electrical conductivity and corrosion resistance (e.g., an Au-based material). The base material is heat-treated to increase its hardness. The fixed plunger 30C has a sharp tip 31 and an insertion portion 35.

[0067] The sharpened portion 31 constitutes the tip of the fixed plunger 30C, and is the portion of the fixed plunger 30C that comes into contact with the solder ball 5a. The sharpened portion 31 is a so-called crown cut, and improves contact with the solder ball 5a.

[0068] The insertion portion 35 is a portion that constitutes the base end portion of the fixed plunger 30C and is formed below the sharpened portion 31, and is a cylindrical portion into which the protrusion 25 of the barrel 20C is inserted. The insertion portion 35 has a fixed crimping portion 35aC.

[0069] The fixed side crimping portion 35aC is a portion of the insertion portion 35 including the edge portion 36 of the insertion portion 35 that is reduced in diameter so as to be inclined toward the axis X side. Furthermore, by making the portion of the insertion portion 35 that forms the fixed side crimping portion 35aC thinner than the other portions of the insertion portion 35, the force required to plastically deform the fixed plunger 30C after heat treatment can be reduced.

[0070] The fixed side crimping portion 35aC of the insertion portion 35 configured as above is in contact with a constricted portion formed by the reduced diameter surface 25a and the end face 24 of the barrel 20C. In detail, the edge 36 of the insertion portion 35 contacts the end surface 24 of the barrel 20C, and the inner peripheral surface of the inclined portion of the insertion portion 35 contacts the reduced diameter surface 25a of the protrusion 25. This fixes the movement of the fixed plunger 30C along the axis X. In other words, the fixed plunger 30C is fixed to the barrel 20C.

[0071] As shown in FIG. 12, the barrel 20C allows machining from one direction, so that uneven thickness caused by re-gripping the workpiece can be suppressed. Moreover, the fixed side crimped portion 35aC shown in FIG. 11 and the like is formed by rotational crimping similar to the fixed side crimped portion 22 of the first reference embodiment.

[0072] [Variation 2] In the above explanation, a cylindrical fixed plunger 30C that penetrates from the insertion portion 35 to the sharp portion 31 as shown in FIG. 13 has been used as an example, but it does not have to penetrate from the insertion portion 35 to the sharp portion 31 as shown in FIG. 14.

[0073] This embodiment provides the following advantages. Since the fixed side crimping portion 35aC contacts the constricted portion to fix the movement of the fixed plunger 30C in the direction of the axis X, the fixed plunger 30C can be fixed to the barrel 20C by utilizing the constricted portion formed by the end face 24 of the barrel 20C and the reduced diameter surface 25a of the protrusion 25 and one fixed side crimping portion 35aC. Therefore, compared to a four-part contact probe in which crimping portions are provided at two locations, the edge of the barrel and a portion spaced a predetermined distance from the edge, a space can be secured within the barrel 20C to accommodate the spring 50. This allows the contact probe 10C to be shortened while having superior load resistance and durability.

[0074] Furthermore, even if the sharp point 31 is damaged, only the fixed plunger 30C can be removed and replaced without deforming the barrel 20C.

[0075] [Second embodiment] A contact probe according to a second embodiment of the present invention will now be described with reference to the drawings. Contact probe 10D according to the present embodiment is different from contact probe 10C according to the first embodiment in the configuration of barrel 20D and fixed plunger 30D, but the other configurations are similar. Therefore, the same components are denoted by the same reference numerals and the description thereof will be omitted.

[0076] As shown in FIG. 15, the constricted portion of barrel 20D is formed by projecting portion 25's reduced diameter surface 25a, equal diameter surface 25b, and expanded diameter surface 25c.

[0077] The fixed crimping portion 35aD is formed in the middle portion of the insertion portion 35 not including the edge portion 36.

[0078] With the above-described configuration, the edge 36 of the insertion portion 35 contacts the end face 24 of the barrel 20D, and the fixed side crimping portion 35aD contacts the reduced diameter surface 25a. This prevents the fixed plunger 30D from moving along the axis X. That is, the fixed plunger 30D is fixed to the barrel 20D by one fixed side crimping portion 35aD. Therefore, as in the first embodiment, a space can be secured within the barrel 20D to accommodate the spring 50. This provides superior load resistance and durability.

[0079] The fixed crimping portion 35aD does not need to contact the entire surface of the necked portion, but only needs to contact the reduced diameter surface 25a. Therefore, as shown in FIG.

[0080] 15 and 16 is formed by rotational crimping similar to the fixed side crimping portion 22 of the first reference embodiment. The fixed side crimping portion 35aD may be a point crimping provided at two or more points around the axis X.

[0081] [Variation 3] As shown in FIG. 17, a rod-shaped member 70 on which a protrusion 25 is formed may be used in place of the barrel 20D of the second embodiment, forming a plunger 80 as a whole. [Explanation of symbols]

[0082] 1 Inspection socket 2 Socket Base 2a recess 3. Housing 3a Insertion hole 4. Board 5 IC Package 5a solder ball 10A, 10B, 10C, 10D Contact Probes 20A, 20B, 20C, 20D Barrel 21 Edge 22 Fixed side crimping part (crimping part) 23 Stepped section 24 End face 25 Protrusion 25a Reduced diameter surface 25b Same diameter surface 25c Expanded diameter surface 27 Edge 28 Movable side crimping part 30A, 30B, 30C, 30D Fixed plunger 31 Sharp part 32 Fixed part 32a Reduced diameter surface 32b Same diameter surface 32c Expanded diameter surface 33 Spring umbilicus 34 End face 35 Insertion section 35aC, 35aD Fixed side crimping part (crimping part) 36 Edge 40 Movable plunger 50 Spring

Claims

1. A contact probe that contacts an IC package attached to an inspection socket, a barrel having a protrusion formed on an end surface of a cylindrical portion extending in an axial direction; a fixed plunger having a tip contacting the IC package and an insertion portion into which the protrusion is inserted on a base end side; Equipped with A contact probe in which the movement of the fixed plunger is fixed in the axial direction by a crimped portion of the insertion portion that is reduced in diameter toward the protrusion and an edge of the insertion portion that contacts the end face of the barrel.

2. the barrel has a constricted portion formed by the end surface and the protrusion, The contact probe according to claim 1 , wherein the crimping portion comes into contact with the constricted portion, thereby fixing the movement of the fixed plunger in the axial direction.

3. The protrusion has a constricted portion, The contact probe according to claim 1 , wherein the crimping portion comes into contact with the constricted portion, thereby fixing the movement of the fixed plunger in the axial direction.

4. a barrel having a protrusion formed on an end surface of a cylindrical portion extending in an axial direction; and a fixed plunger having an insertion portion at a base end side into which the protrusion is inserted and a tip end of which contacts the IC package; Equipped with A method for manufacturing a contact probe, in which the insertion portion is fixed in the axial direction by a crimping portion having a diameter reduced toward the protrusion portion and an edge portion of the insertion portion in contact with the end face of the barrel, A manufacturing method including a step of pressing a tool against the outer periphery of the insertion portion and rotating the insertion portion relative to the tool about the axis to reduce the diameter of the insertion portion toward the protrusion portion and form the crimped portion.

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