Flexible Temperature Probe

Abstract

A flexible fiber optic temperature probe is disclosed that includes a plurality of fiber optic elements, a sensing member having a first end and a second end, the first end being connected to a distal portion of the plurality of fiber optic elements, and a flexible jacket surrounding the plurality of fiber optic elements, the flexible jacket engaged to the sensing member to prevent relative movement between the flexible jacket and the sensing member.

Description

[Technical field]

[0001] [CROSS REFERENCE TO RELATED APPLICATIONS] This application claims priority to U.S. Provisional Patent Application No. 63 / 201,328, filed April 23, 2021, the contents of which are incorporated herein by reference.

[0002] [Technical field] The following relates generally to fiber optic based probes, and more particularly to fiber optic based probes that can be bent about a radius to provide thermal communication with a desired location to be measured. [Background technology]

[0003] Typically, fiber optic temperature probes are designed to include a stiff, rigid tubular shaft having a connector end and a distal end. Existing fiber optic temperature probes include a stiff, rigid fiber optic rod that is inserted into the shaft. A sensing element or "button" is attached to the distal end of the shaft, and the fiber optic rod contacts the button to determine temperature based on light emitted from the sensing element. Existing probes may also include a spring at the connector end to bias the fiber optic rod into contact with the button. Summary of the Invention [Problem to be solved by the invention]

[0004] Recognizing that conventional fiber optic temperature probes are difficult to bend to access target areas or surfaces in hard-to-reach areas, the following provides a flexible temperature probe design that can accommodate the bend radius into which the probe is inserted. [Means for solving the problem]

[0005] A flexible temperature probe would be capable of being deformed so that the probe can bend around a small radius inlet to contact or be in thermal communication with the object to be measured. Flexible shaft temperature probes have been developed that have a flexible polymer shaft (polytetrafluoroethylene (PTFE) in this example, but other polymers could be substituted depending on the bend radius and operating environment temperature) and have a flexible optical fiber bundle instead of a stiff glass rod.

[0006] In one aspect, a flexible fiber optic temperature probe is disclosed. The probe includes a plurality of fiber optic elements and a sensing member. The sensing member has a first end and a second end, the first end being connected to a distal portion of the plurality of fiber optic elements. The probe includes a flexible jacket surrounding the plurality of fiber optic elements and secured to the sensing member to prevent relative movement between the flexible jacket and the sensing member.

[0007] In an example embodiment, the first end of the sensing member is adhesively secured to a distal portion of the plurality of fiber optic elements.

[0008] In an example embodiment, the flexible fiber optic temperature probe further includes a member for engaging an opening of the channel, the member being spaced a channel length from the sensing member, the member being fixed to prevent relative movement between the flexible jacket and the sensing member.

[0009] In an example embodiment, the length of the sensing member allows the sensing member to pass through the smallest radius of a channel having one or more bends.

[0010] In an example embodiment, the thickness of the sensing member allows the sensing member to pass through the smallest radius of a channel having one or more bends.

[0011] In an example embodiment, the sensing member further includes a first portion having a first end and a second end, and a tip portion having the sensing element, the tip portion being secured to the second end. In an example embodiment, the tip portion is removably secured to the second end.

[0012] In example embodiments, the flexible jacket is engaged to the sensing member by one or more of a friction fit, crimping, overmolding or dip coat / filling resin, or adhesive connection.

[0013] In an example embodiment, the flexible jacket is at least partially disposed between the outer portion and the inner portion of the sensing member, and the flexible jacket is crimped to one or more of the outer portion or the inner portion. In an example embodiment, the inner portion of the sensing member includes a clearance capable of at least partially receiving the flexible jacket on the outer surface. In an example embodiment, the outer portion of the sensing member extends further from the distal end of the sensing member than the inner portion, and the outer portion is crimped to the flexible jacket to at least partially prevent axial movement of the inner portion relative to the outer portion.

[0014] In another aspect, a method of assembling a flexible fiber optic temperature probe is disclosed. The method includes inserting a plurality of fiber optic elements into a channel defined by a flexible jacket and securing distal portions of the plurality of fiber optic elements to a sensing member. The method includes securing the flexible jacket to the sensing member.

[0015] In an example embodiment, securing the distal portion of the plurality of fiber optic elements to the sensing member further includes inserting the distal portion of the plurality of fiber optic elements through an interior channel of the sensing member.

[0016] In an example embodiment, the method further includes securing a member for engaging an opening of the channel, the member being spaced a channel length from the sensing member.

[0017] In an example embodiment, the plurality of fiber optic elements are inserted into the channel defined by the flexible jacket after securing distal portions of the plurality of fiber optic elements to the sensing member.

[0018] In an example embodiment, securing the flexible jacket to the sensing member includes crimping the flexible jacket to one or more of the exterior portion or interior portion of the sensing member.

[0019] In an example embodiment, the sensing member includes a first portion and a second portion including the sensing element secured to one another, and the method further includes attaching the first portion to the second portion. In an example embodiment, the first portion and the second portion are removably attached to one another.

[0020] In an example embodiment, securing the flexible jacket to the sensing member includes securing a portion of the flexible jacket to a recessed portion of the sensing member.

[0021] In another aspect, an assembly including a temperature sensor is disclosed. The assembly includes a body including a channel having at least one bend and terminating at an edge. The assembly includes a temperature probe including a plurality of fiber optic elements, a sensing member having a first end and a second end, the first end being connected to a distal portion of the plurality of fiber optic elements, and a flexible jacket surrounding the plurality of fiber optic elements and engaged with the sensing member to prevent relative movement between the flexible jacket and the sensing member. The temperature probe is at least within the channel and passes through the at least one bend to place the sensing member in thermal communication with the edge.

[0022] In an example embodiment, the assembly further includes a mechanism for biasing the sensing member into contact with the edge.

[0023] In another aspect, a flexible fiber optic temperature probe is disclosed. The probe includes a bundle of fiber optic elements and a collar having an internal channel and secured to an end portion of the bundle within the internal channel. The probe includes a sensing member including a first part and a second part, the first part including a channel for receiving the collar, the first part being secured to the collar within the channel, and a protrusion that can be secured to an adjacent wall. The second part includes the sensing element.

[0024] In an example embodiment, the first part and the second part are removably attached.

[0025] In an example embodiment, the first component is adhesively secured to the collar.

[0026] In an example embodiment, the protrusion includes one or more surfaces for laser welding to an adjacent wall.

[0027] In an example embodiment, at least a portion of the first part can be inserted into a passage defined by adjacent walls, and the protrusion prevents another portion of the first part from being inserted into the passage.

[0028] In yet another aspect, a ferrule and attachment method at the distal end of the tube is disclosed that allows for a phosphor button to be threaded in. Additionally, a ferrule near the connector end is disclosed that provides attachment of the flexible tube to the connector nut and does not cause damage or separation of the flexible tube from the connector.

[0029] Additionally, the phosphor can be attached to the fiber with an overmolding or dip coat / filling resin.

[0030] Embodiments will now be described with reference to the accompanying drawings. [Brief description of the drawings]

[0031] [Figure 1] FIG. 1 is a partial cross-sectional view of a body having a channel. [Diagram 2] FIG. 2 is an enlarged cross-sectional view of a curved portion of the channel shown in FIG. [Figure 3A-3B] 3A and 3B are schematic diagrams illustrating examples of sensing elements interacting with a channel. [Figure 4] FIG. 4 is a perspective view showing an example of a flexible temperature probe. [Figure 5A-5B] 5A and 5B are schematic cross-sectional views showing examples of the flexible temperature probe of FIG. [Figure 6] FIG. 6 is an enlarged schematic cross-sectional view of an example of a component of a temperature probe. [Figure 7A-7B] 7A and 7B are schematic cross-sectional views each showing an example of a sensing member. [Figure 7C-7D] 7C and 7D are schematic perspective views showing other examples of the sensing member. [Figure 8A-8B] 8A and 8B are block diagrams illustrating an example method of assembling an example flexible temperature probe. [Figure 9A-9E] 9A-9E are a series of images showing how to assemble an example flexible temperature probe. [Figure 10] FIG. 10 shows an example of another embodiment of a flexible temperature probe. [Figure 11] FIG. 11 is a block diagram illustrating an example method of assembling an example flexible temperature probe. [Figure 12] FIG. 12 is a block diagram illustrating an example method for measuring a desired area with an example flexible temperature probe. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0032] Hereinafter, unless otherwise noted, the terms sensor and probe will be understood to be used interchangeably to refer to at least a device that measures temperature. Further, for ease of reference, the terms sensor and probe will be understood to mean a flexible temperature probe or sensor, as described herein.

[0033] Existing optical temperature sensors are rigid and have a rigid optical rod for contacting the sensing element, and sometimes include a rigid shell to house the rigid optical rod.

[0034] The present disclosure relates to a flexible optical probe that may eliminate or mitigate concerns that arise when not using a rigid rod as a medium to transmit light from a sensor: (1) protecting the medium from external light pollution or physical damage from the external environment, (2) providing a means to ensure signal continuity despite curved facility or access geometries, (3) reliably attaching the medium to the probe tip without affecting the performance of the probe, and (4) avoiding unnecessarily complex manufacturing or relatively expensive or relatively difficult to obtain components.

[0035] Turning now to the figures, FIG. 1 shows a partial view of a body 100 having a channel 104. In an example embodiment, the body 100 is a showerhead of a semiconductor processing chamber. The channel 104 includes a surface 102, and it is desirable to measure the temperature of the surface 102 in various applications (e.g., the showerhead described above in a semiconductor processing chamber). To measure the temperature of the surface 102 (or any portion of the body 100 that defines or is within a radio frequency (RF) hot portion or zone), a sensor or probe is positioned in engagement with or in substantial thermal communication with the surface 102 (e.g., positioned in close proximity such that a sensing element provides a response to temperature changes of the surface 102). In some example embodiments, for example, the temperature at the surface 102 of the body 100 can be used as a proxy for the temperature of a desired region (e.g., the temperature at the center of the body 100), and thus a sensor can be desirably positioned to measure the temperature of the surface 102.

[0036] The channel 104 includes at least one bend 106 and has a channel length C defined by the distance a probe must travel from an opening 108 of the channel 104 to a desired location (e.g., here, surface 102). The illustrated channel length C is exemplary, and it is understood that channel length C includes probe configurations other than a probe traveling directly down the length of the channel 104. For example, channel length C includes channel lengths where the probe has a bend or other type of change that increases or decreases the length of the probe required to contact a desired region.

[0037] Curves 106 may be of various sizes and include various features, as described below. In at least one example embodiment, body 100 includes multiple curvatures (not shown), but for simplicity will be described with respect to the presence of a single curvature.

[0038] 2 shows an enlarged cross-sectional view of curved portion 106 to highlight the difficulties associated with inserting a flexible temperature probe into curved portion 106. Accessing surface 102 of body 100 with the probe can pose difficulties, especially when curved portion 106 includes a small bend radius R (exaggerated for ease of reference), which in the illustrated example is 1 inch.

[0039] Similarly, as noted above, the bend 106 may include one or more features that impede a probe from passing through the channel 104. For example, the illustrated bend 106 includes a transition that may impede a probe from passing through the bend 106. A variety of transitions are contemplated by the present disclosure. For example, in the illustrated embodiment, the transition is defined by a single continuous step 110 that expands the channel 104 such that the transition is defined by a diameter D' that is greater than the diameter D of the channel 104 in the area outside the transition. A probe passing through the channel 104 may be prevented from passing further within the channel 104 by the step 110.

[0040] 3A and 3B further illustrate the complications associated with inserting a temperature probe into the channel 104. In the illustrated embodiment, the probe 112 includes a rigid or substantially rigid sensing member 114 having both a thickness t (e.g., diameter) and height h that may impede passage of the probe 112 through the channel 104.

[0041] 4, 5A and 5B, various views of an example flexible temperature probe 112 are shown. The probe 112 includes a sensing member 114 and a flexible jacket 116 surrounding a plurality of fiber optic elements 118. The probe 112 may further include a member 120 for engaging the opening 108 of the channel 104. In the illustrated embodiment, the member 120 includes both a first part 122 (e.g., a retainer) and a second part 124 (e.g., a nut that engages the first part 122 of the retainer). As described herein, the member 120 may be used to configure the probe 112 to a channel length C or a length substantially similar thereto.

[0042] The jacket 116 includes channels into which the plurality of fiber optic elements 118 can be inserted. For example, the jacket 116 includes channels 154 (FIG. 7B) formed as a result of the material properties of the jacket 116. In at least some example embodiments, the jacket 116 is biased to reduce the cross-sectional area of ​​the channels to contact the plurality of fiber optic elements 118. Example jacket materials include jackets made from polytetrafluoroethylene (PTFE), other types of polymers, and the like.

[0043] The probe 112 may include a label 126 and a mechanism 127 (e.g., a spring-loaded mechanism) for biasing the sensing member 114 toward a surface (e.g., the surface 102). The mechanism may be part of a standard straight-tip (ST) connector at the connection end of the probe 114.

[0044] 5A and 5B also show an axis A located approximately at the center of the plurality of fiber optic elements 118. Hereinafter, the terms "outer" or "inner", or similar terms, will be used to mean radially relative to axis A. For example, an outer surface is further away from axis A than an inner surface.

[0045] 6, there is shown an enlarged schematic cross-sectional view of an example member 120 for engaging the opening 108 of the channel 104. As described herein, similar to the sensing member 114, the second part 122 can include a zone 125 of reduced radial thickness where crimping is expected.

[0046] Turning now to the sensing member 114, the properties of the sensing member 114 can be tailored to facilitate passage of the probe 112 through the channel 104. For example, the sensing member 114 can be selected to have a thickness t or height h that enables it to pass through the diameter D of the smallest bend 106 in the channel 104.

[0047] 7A-7D show another example configuration of the sensing member 114. In the illustrated embodiment, the sensing member 114 includes a tip portion 128 and another portion (e.g., a ferrule 130) disposed inwardly relative to the tip portion 128. The ferrule 130 includes a channel 132 for receiving the plurality of optical fiber elements 118 between a first end and a second end of the ferrule 130, the first end and the second end of the ferrule 130 being axially opposed to each other relative to an example axis A. The ferrule 130 is secured to a portion of the plurality of optical fiber elements 118 within the channel 132, as shown in FIGS. 7A and 7B. The ferrule 130 and the plurality of optical fiber elements 118 can be secured to each other in various ways. For example, the plurality of optical fiber elements 118 and the ferrule 130 can be bonded to each other with an adhesive that does not interfere with the performance of the optical fiber elements 118. In at least some example embodiments, the ferrule 130 may be at least partially deformable, such that the ferrule 130 may be deformed to secure the plurality of fiber optic elements 118. The portion of the plurality of fiber optic elements 118 that is secured to the ferrule 130 shall be understood to be a distal portion of the plurality of fiber optic elements 118. It should be noted that the tip 128 may alternatively be referred to as an outer portion, and the ferrule 130 may be referred to as an inner portion.

[0048] The tip 128 and the ferrule 130 can be secured to one another such that the sensing element 140 is in optical communication with the distal end of the element 118, as shown. In an example embodiment, the tip 128 is threadedly secured to the ferrule 130, as shown in FIGS. 7C and 7D. In some example embodiments, the tip 128 is secured to the ferrule 130 at least partially using an overmold (e.g., melt-processable or sintered fluoropolymer) or a dip coat / filling resin. In an example embodiment, the tip 128 and the ferrule 130 are secured to one another via an adhesive. In yet further example embodiments, the tip 128 and the ferrule 130 are secured to one another via crimping. For example, in FIGS. 7A and 7B, the tip 128 can be crimped along section L such that after inward deformation of the tip portion 138, the deformed tip portion 138 at least partially prevents axial movement of the ferrule 130 relative to the tip 128. In at least some example embodiments, the tip 128 and the ferrule 130 are crimped together. For example, in Figures 7C and 7D, the ferrule 130 includes a recess 148. The tip 128 can be crimped over the recess 148 to secure the tip 128 to the ferrule 130.

[0049] Optionally, as shown in Figures 7A-7B, the ferrule 130 can include a clearance 134 defined by an outer surface 136 that can at least partially receive the flexible jacket 116. For example, as shown in Figure 7A, the clearance 134 can result from a thickness of the ferrule 130 and an inner surface 138 of the tip 128, which collectively define the clearance 134. In an example embodiment, the clearance 134 is defined by the thickness of the ferrule 130 relative to other portions of the ferrule 130. The clearance 134 can receive the jacket 116 therein, as shown. When the tip 128 and ferrule 130 are crimped together and there is a clearance 134, the crimping can advantageously secure the jacket 116 to the tip 128 or the ferrule 130, or both.

[0050] The tip 128 includes a sensing element 140. The sensing element 140 may be made from a disk of a phosphor compound or other material suitable for measuring temperature. In the illustrated embodiment, the sensing element 140 is disposed in a cavity 142 in the tip 128. The sensing element 140 may be secured within the tip 128, for example, by adhesive bonding, by overmolding, or the like.

[0051] The profile of tip 128 is defined in part by profile 144 and distal end profile 146, for example, and may be configured or selected based on the expected characteristics of channel 104 and curvature 106 therein. For example, the sensing member of Figure 7B may be selected for use in applications where a smaller curvature 106 is expected because distal end profile 146 of Figure 7B is thinner as compared to the similar profile of sensing member 114 of Figure 7A.

[0052] Similarly, in example embodiments, the ferrule 130 may be configured based on the expected characteristics of the channel 104 and the bend 106 therein, complementary to the configuration of the tip 128. For example, and referring again to Figures 7A and 7B, the head portion 149 of the ferrule 130 (as opposed to the tail portion 150) may have a radial thickness that allows it to pass through the expected diameter D of the channel 104, or a length that allows it to pass through the expected radius R of the bend 106, when secured to the tip 128.

[0053] 7A also shows that the tail portion 150 can have a radial thickness such that, for example, when the jacket 116 is slid onto the tail portion 150 to secure the jacket 116 to the tail portion 150, a clearance 152 is formed between the jacket 116 and the ferrule 130. Furthermore, like the member 120, the entire ferrule 130, or the tail portion 150, or the head portion 149, can have a radial thickness that varies across various axial portions of the ferrule 130.

[0054]

[0033] Referring now to Figure 8A, a block diagram of an example method for assembling an example flexible temperature probe is shown. To explain the example method, Figure 8A will be described with reference to Figures 9A, 9B and 9D.

[0055] At block 802, distal portions of the plurality of fiber optic elements 118 are secured to the sensing member 114 (e.g., ferrule 130 of the sensing member 114). Image 155 of FIG. 9A illustrates the secured plurality of fiber optic elements 118 in a bent configuration. In at least one example embodiment, securing the distal portions of the plurality of fiber optic elements 118 includes inserting the distal portions of the plurality of fiber optic elements 118 through an interior channel (e.g., channel 132) of the sensing member 114 and securing the elements 118 to the channel walls.

[0056] At block 804 , a plurality of fiber optic elements 118 are inserted into a channel (eg, channel 154 ) defined by the flexible jacket 116 .

[0057] At block 806, the flexible jacket 116 is secured to the sensing member 114. For example, as shown in FIG. 9D, the jacket 116 may be secured to the sensing member 114 of FIGS. 7C and 7D via a crimping process. The illustrated crimping occurs at or near the recess 148, with the flexible jacket 116 slipping over the recess 148 prior to crimping, and the crimping securing the flexible jacket 116 to the ferrule 130. In an example embodiment, the jacket 116 slips over the recess 148 and over a portion of the tip 128, such that the crimping secures the jacket 116, tip 128, and ferrule 130 together.

[0058] In an example embodiment, the jacket 116, as well as the connection between the tip 128 and the ferrule 130, can be secured to the sensing member 114 via an overmold (e.g., a melt-processable or sintered fluoropolymer) or a dip coat / filling resin. Some fluoropolymers, such as perfluoroalkoxyalkane (PFA), are melt-processable, and PFA can be an alternative material for the jacket 116.

[0059] Image 156 illustrates an example process for inserting the plurality of fiber optic elements 118 into the jacket 116, including sliding the jacket 116 over the plurality of fiber optic elements 118. In the illustrated example, the jacket 116 may be secured to the ferrule 130 in a friction fit by application of force. As discussed above, in at least some example embodiments, the jacket 116 is secured to the ferrule 130 via one or more combinations of adhesives, crimping, or other means.

[0060] It is understood that the present disclosure contemplates that blocks 802, 804, and 806 may occur in an order different than that shown in Figure 9A. For example, block 804 may occur before block 802.

[0061]

[0046] Referring now to Figure 8B, a block diagram of another example method for assembling an example flexible temperature probe is shown. To explain the example method, Figure 8B will be described with reference to Figures 9B-9E. Blocks 802-806 of Figure 8A are incorporated into the method shown in Figure 8B as shown.

[0062] At block 808, if block 802 included attaching the sensing element 118 and jacket 116 to a sensing member 114 without a sensing element (i.e., unassembled), the tip 128 having the sensing element 140 of the sensing member 114 is secured to the ferrule 130 to complete the assembly of the sensing member 114. In an example embodiment, as shown in FIG. 9B, the tip 128 is removably attached to the ferrule 130, for example, via a threaded connection.

[0063] At block 810, member 120 is secured to jacket 116 for engaging opening 118 of channel 104 a channel length away from sensing element 114. For example, FIG. 9C shows example parts 122 and 124 (a retainer and a nut, respectively) being slid over sensing element 114 and onto jacket 116. FIG. 9E shows an example process for securing member 120 to jacket 116, which includes crimping and subsequent deformation of member 120.

[0064] Although the sensing member 114 has been described throughout this disclosure as being comprised of separate pieces, it is understood that one or more of the components, or the entire sensing member 114, may be a single piece. That is, the sensing member 114 may include various unitary combinations of the described components. For greater certainty, the sensing member 114 may be comprised of, for example, a unitary tip 128 and ferrule 130.

[0065] 10 illustrates another example embodiment of a flexible temperature probe 212. The probe 212 includes a bundle of fiber optic elements 218 and a sensing member 214. The bundle of fiber optic elements 218 is configured or selected to be able to pass through a passageway (similar to channel 104) defined by a rigid wall 250 (e.g., a wall machined into a stainless steel body to define the passageway). For example, the thickness or length of the bundle 218 can be selected for a desired application.

[0066] The sensing element 214 includes a collar (e.g., inner ferrule 230), a tip 228, and an intermediate portion (e.g., outer ferrule 234). The inner ferrule 230 includes an internal channel 232 for receiving a bundle 218 of fiber optic elements. Similar to the ferrule 130, the inner ferrule 230 is secured to an end portion of the bundle 218 within the internal channel 232. In at least some example embodiments, the inner ferrule 230 is a separate piece from the sensing member 214. For example, the end portion of the bundle 218 can be secured to the inner ferrule 230 (e.g., via an adhesive) prior to securing the inner ferrule 230 to the sensing element 214. The inner ferrule 230 can be glass to at least partially address concerns regarding the optical performance of the bundle 218 or to address concerns regarding heat dissipation, as described herein.

[0067] In at least one example embodiment, an end portion of the bundle 218 can be secured to an inner ferrule 230, which is threaded through a passage defined by the wall 250 into the opening. The inner ferrule 230 is then secured to an outer ferrule 234, which itself includes a channel 238 for receiving the inner ferrule 230. The outer ferrule 234 can be a rigid metal component, and the inner ferrule 230 can be secured to the outer ferrule 234, for example, via an adhesive or other attachment mechanism. In example embodiments, for example, the inner ferrule 230 and the outer ferrule 234 are secured at a portion 252 of the outer ferrule 234 away from the protrusions (described herein) of the outer ferrule 234, because the protrusions may be subject to thermal loads that may adversely affect the securing means. In example embodiments, the outer ferrule 234 at portion 252 includes a funnel configuration to facilitate receiving the inner ferrule 230 into the channel 238.

[0068] In at least some example embodiments, the outer ferrule 234 includes one or more protrusions 236 that can be secured to an adjacent wall (e.g., wall 250). The protrusions 236 can be secured to the adjacent portion of the wall 250, for example, by laser welding the outer surface 241 of the protrusion to the adjacent wall portion, by generating heat as alluded to above, via an adhesive, or the like. Securing the outer ferrule 234 to the adjacent portion of the wall 250 via the protrusions 236 closes the opening in the wall 250. In this manner, the environment within the passageway of the wall 250 is isolated from the environment outside the sensing element 214.

[0069] 10, the protrusion 236 can prevent at least a portion of the outer ferrule 234 from being inserted into the passage defined by the wall 250. If the protrusion 236 is not insertable, the outer ferrule 234 can advantageously be secured to the inner ferrule 230 away from a position that would clamp the opening in the wall 250 for assembly, and the secured inner ferrule 230 and outer ferrule 234 can then be positioned to close the opening in the wall 250 with the protrusion 236.

[0070] The tip 228 can include a sensing element 240 and is secured to the intermediate portion 234 such that the sensing element 240 is in optical communication with the distal end of the bundle 218, as shown. The components can be secured in a variety of ways. For example, the sensing element 240 and the outer ferrule 234 can be removably attached via a threaded engagement, or secured via an adhesive, or the like. In at least some example embodiments, the sensing element 240 and the outer ferrule 234 form a single unitary component.

[0071] Referring now to FIG. 11, a block diagram of an example method for assembling an example flexible temperature probe 212 is shown.

[0072] At block 1102 , a distal portion of the bundle 218 is secured to the inner ferrule 230 .

[0073] In block 1104 , the inner ferrule 230 is secured to the sensing element 214 .

[0074] At block 1106 , the sensing element is secured to the adjacent wall 250 .

[0075] 12, a block diagram of an example method for measuring a desired area with an example flexible temperature probe is shown. The method of FIG. 12 will be described with reference to probe 112 for ease of explanation.

[0076] At block 1202, a flexible temperature probe 112 operable in a curved configuration is provided. The curved configuration may be defined by the minimum curvature 106 of the channel 104 in which the probe 112 is located.

[0077] At block 1204, the sensing member 114 of the temperature probe is threaded through a channel (e.g., channel 104) having at least one bend (e.g., bend 106) to place the sensing element 114 in thermal communication with a desired region. In an example embodiment, the desired region is a surface (e.g., surface 102).

[0078] Threading the probe 112 may include threading the sensing element 114 over any obstacles or variations before inserting it into the channel 104. In an example embodiment, there is a top plate (not shown) above the opening 118 to the channel 104, shown, for example, at the top of the image in FIG. 1. As mentioned above, the sensing element 114 may be configured or selected based on the characteristics of the channel 104 and the curved portion 106 (e.g., the sensing element of FIG. 3B compared to FIG. 3A may be selected because it can bend around a smaller bend radius, making it easier to get around obstacles and variations).

[0079] For simplicity and clarity of description, where considered appropriate, reference numerals may be repeated among the figures to indicate corresponding or similar elements. Additionally, numerous specific details are set forth in order to provide a thorough understanding of the examples described herein. However, it will be understood by those skilled in the art that the examples described herein may be practiced without these specific details. In other instances, well-known methods, procedures, and components have not been described in detail so as not to obscure the examples described herein. Additionally, this description is not intended to be construed as limiting the scope of the examples described herein.

[0080] It will be understood that the examples and corresponding schematic diagrams used herein are for illustrative purposes only. Various configurations and terminology can be used without departing from the principles set forth herein. For example, components and modules can be added, removed, modified, or rearranged in different connections without departing from these principles.

[0081] The steps or operations of the flowcharts and schematic diagrams described herein are merely examples. There may be many variations in these steps or operations without departing from the principles described above. For example, steps may be performed in a different order, or steps may be added, deleted, or modified.

[0082] While the above principles have been described with reference to specific embodiments, various modifications thereof will be apparent to those skilled in the art, as outlined in the appended claims.

Claims

1. 1. A flexible fiber optic temperature probe, comprising: A plurality of optical fiber elements; a sensing member having a first end and a second end, the first end being connected to a distal portion of the plurality of fiber optic elements; a flexible jacket surrounding the plurality of fiber optic elements and secured to the sensing member to prevent relative movement between the flexible jacket and the sensing member; A flexible fiber optic temperature probe comprising:

2. The flexible fiber optic temperature probe of claim 1 , wherein the first end of the sensing member is adhesively secured to the distal portion of the plurality of fiber optic elements.

3. 10. The flexible fiber optic temperature probe of claim 1, further comprising a member for engaging an opening of a channel, the member being spaced a channel length from the sensing member and secured to prevent relative movement between the flexible jacket and the sensing member.

4. The flexible fiber optic temperature probe of claim 1 , wherein the length of the sensing member enables the sensing member to pass through a minimum radius of a channel having one or more bends.

5. The flexible fiber optic temperature probe of claim 1 , wherein the thickness of the sensing member enables the sensing member to pass through a minimum radius of a channel having one or more bends.

6. The sensing member is a ferrule having a first end and a second end; a tip portion having a sensing element and secured to the second end; The flexible fiber optic temperature probe of claim 1 further comprising:

7. The flexible fiber optic temperature probe of claim 6 , wherein said tip is removably secured to said second end.

8. 10. The flexible fiber optic temperature probe of claim 1, wherein the flexible jacket is secured to the sensing member by one or more of a friction fit, crimping, overmolding or dip coat / filling resin, or adhesive connection.

9. 9. The flexible fiber optic temperature probe of claim 8, wherein the flexible jacket is disposed at least partially between an outer portion and an inner portion of the sensing member, the flexible jacket being crimped to one or both of the outer portion or the inner portion.

10. The flexible fiber optic temperature probe of claim 9 , wherein the interior portion of the sensing member includes a clearance capable of at least partially receiving the flexible jacket over an exterior surface.

11. 10. The flexible fiber optic temperature probe of claim 9, wherein the outer portion of the sensing member extends further from a distal end of the sensing member than the inner portion, and the outer portion is crimped with the flexible jacket to at least partially prevent axial movement of the inner portion relative to the outer portion.

12. 1. A method of assembling a flexible fiber optic temperature probe, comprising: inserting a plurality of fiber optic elements into channels defined by a flexible jacket; affixing a distal portion of the plurality of fiber optic elements to a sensing member; securing the flexible jacket to the sensing member; A method comprising:

13. The method of claim 12 , wherein securing the distal portions of the plurality of fiber optic elements to the sensing member further comprises inserting the distal portions of the plurality of fiber optic elements through an interior channel of the sensing member.

14. The method of claim 12 further comprising securing a member for engaging an opening of the channel a channel length away from the sensing member.

15. The method of claim 12 , wherein the plurality of fiber optic elements are inserted into channels defined by the flexible jacket after securing the distal portions of the plurality of fiber optic elements to the sensing member.

16. The method of claim 12 , wherein securing the flexible jacket to the sensation member comprises crimping the flexible jacket to one or more of an exterior portion or an interior portion of the sensation member.

17. The method of claim 12 , wherein the sensing member includes a first portion secured to one another and a second portion including a sensing element, the method further including attaching the first portion to the second portion.

18. The method of claim 17 , wherein the first portion and the second portion are removably attached to one another.

19. The method of claim 12 , wherein securing the flexible jacket to the sensing member includes securing a portion of the flexible jacket to a recessed portion of the sensing member.

20. 1. An assembly including a temperature sensor, comprising: a body including a channel having at least one curve and terminating in an edge; Temperature probe and Including, The temperature probe is A plurality of optical fiber elements; a sensing member having a first end and a second end, the first end being connected to a distal portion of the plurality of fiber optic elements; a flexible jacket surrounding the plurality of fiber optic elements and engaged with the sensing member to prevent relative movement between the flexible jacket and the sensing member; Including, the temperature probe is at least within the channel and passes through the at least one bend to place the sensing member in thermal communication with the edge; assembly.

21. 21. The assembly of claim 20, wherein the flexible jacket is a polytetrafluoroethylene jacket.

22. 1. A flexible fiber optic temperature probe, comprising: a bundle of optical fiber elements; a collar having an internal channel and secured to an end portion of the bundle within the internal channel; a sensing member including a first part and a second part; Including, The first part includes: a channel for receiving the collar, the first part being secured to the collar within the channel; and a projection that can be fixed to an adjacent wall; Including, the second component includes a sensing element; Flexible fiber optic temperature probe.

23. 23. The flexible fiber optic temperature probe of claim 22, wherein the first and second parts are removably attached.

24. 23. The flexible fiber optic temperature probe of claim 22, wherein the first component is adhesively secured to the collar.

25. 23. The flexible fiber optic temperature probe of claim 22, wherein the protrusion includes one or more surfaces for laser welding to the adjacent wall.

26. 23. The flexible fiber optic temperature probe of claim 22, wherein at least a portion of the first part is insertable into a passage defined by the adjacent walls, and the protrusion prevents another portion of the first part from being inserted into the passage.

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