Waveguide holder, waveguide alignment device and inspection method

Abstract

To provide a waveguide holder that can efficiently perform continuity inspections on a plurality of waveguide components DUT.SOLUTION: This waveguide holder 50 for fixing waveguide components DUT in a waveguide alignment device S having an incident part 5a and a light receiving part 6a so that waveguides of the waveguide components DUT are parallel to an optical axis of the incident part 5a and the light receiving part 6a, comprises: a first fixing part 55 for fixing one or more first waveguide components DUT1 on a first surface away from a reference surface of the waveguide holder 50 in a first direction perpendicular to the optical axis by a first distance; and a second fixing part 65 for fixing one or more second waveguide components DUT2 on a second surface away from the reference surface in the first direction by a second distance. The first fixing part 55 and the second fixing part 65 fix the waveguide components DUT so that the direction of each of the waveguides of the first waveguide component DUT1 and the second waveguide component DUT2 is parallel to the optical axis.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present invention relates to a waveguide holder, a waveguide alignment device, and an inspection method. [Background technology]

[0002] Conventionally, continuity testing of waveguide components has generally been performed using a waveguide alignment device. The waveguide alignment device injects inspection light into the waveguide component from an optical fiber on the input side, and receives the light emitted from the waveguide component with an optical fiber on the output side. The waveguide alignment device automatically aligns the tip of the optical fiber with respect to the waveguide component fixed to a holder, and measures the amount of emitted light to perform a continuity test of the optical waveguide (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2016-125920 A Summary of the Invention [Problem to be solved by the invention]

[0004] In conventional alignment devices, continuity testing was performed on a single waveguide component fixed to a holder. This meant that the waveguide component had to be set in the waveguide alignment device each time a continuity test was completed, resulting in the problem that multiple waveguide components could not be tested efficiently.

[0005] Therefore, the present invention has been made in consideration of these points, and has an object to provide a waveguide holder, a waveguide alignment device, and an inspection method that are capable of efficiently performing continuity inspections on a plurality of waveguide components. [Means for solving the problem]

[0006] A waveguide holder according to one embodiment of the present invention is a waveguide alignment device having an incident portion through which light incident on a waveguide component passes and a light receiving portion through which light emitted by the waveguide component passes, the waveguide holder being for fixing the waveguide component such that a waveguide of the waveguide component is parallel to an optical axis of the incident portion and the light receiving portion, the waveguide holder comprising: a first fixing portion for fixing one or more first waveguide components on a first surface that is a first distance away from a reference surface of the waveguide holder in a first direction orthogonal to the optical axis; and a second fixing portion for fixing one or more second waveguide components on a second surface that is a second distance away from the reference surface in the first direction, the first fixing portion and the second fixing portion fixing the first waveguide component and the second waveguide component such that the direction of the waveguide of each of the first waveguide component and the second waveguide component is parallel to the optical axis.

[0007] The first fixing portion may fix the plurality of first waveguide components along a second direction perpendicular to the optical axis and perpendicular to the first direction, and the second fixing portion may fix the plurality of second waveguide components along the second direction.

[0008] The holder may include a holder body provided with the first fixing portion and a fixing portion forming member provided with the second fixing portion, and the fixing portion forming member may be removably attached to the holder body.

[0009] The holder body may have a convex portion that positions the fixing portion forming member relative to the holder body by engaging with a concave portion formed in the fixing portion forming member, or a concave portion that positions the fixing portion forming member relative to the holder body by engaging with a convex portion formed in the fixing portion forming member.

[0010] The fixing portion forming member may have an asymmetric shape so that the fixing portion forming member is not fixed to the holder body in an orientation other than an attachment orientation in which the fixing portion forming member is fixed to the holder body.

[0011] The fixing portion forming member may have a first connection portion and a second connection portion connected to the holder body, and the first connection portion and the second connection portion may have different shapes so that the fixing portion forming member is not fixed to the holder body in an orientation other than an installation orientation in which the fixing portion forming member is fixed to the holder body.

[0012] a first stage unit having the incident portion and aligning the incident portion with respect to a first end face of the waveguide component fixed to the waveguide holder; a second stage unit having the light receiving portion and aligning the light receiving portion with respect to a second end face of the waveguide component; a base unit supporting the waveguide holder and moving the waveguide holder at least in the first direction; and a control device controlling the base unit to move the waveguide holder in the first direction after the first stage unit and the second stage unit align the incident portion and the light receiving portion with respect to the first waveguide component, or controlling the base unit to move the waveguide holder in the first direction after the first stage unit and the second stage unit align the incident portion and the light receiving portion with respect to the second waveguide component.

[0013] An inspection method according to one aspect of the present invention is an inspection method for inspecting a waveguide component fixed to a waveguide holder, the waveguide holder being a waveguide alignment device having an incident portion through which light incident on the waveguide component passes and a light receiving portion through which light emitted from the waveguide component passes, the method fixing the waveguide component so that a waveguide of the waveguide component is parallel to an optical axis of the incident portion and the light receiving portion, the method including: a first fixing portion fixing one or more first waveguide components on a first surface that is a first distance away from a reference surface of the waveguide holder in a first direction perpendicular to the optical axis; and a second fixing portion fixing one or more second waveguide components on a second surface that is a second distance away from the reference surface in the first direction, the first fixing portion and the second fixing portion being The first waveguide component and the second waveguide component are fixed so that the directions of the waveguides of each of the first waveguide component and the second waveguide component are parallel to the optical axis, and the method includes a first step of aligning the incident portion and the light receiving portion with respect to the first waveguide component, a second step of aligning the incident portion and the light receiving portion with respect to the second waveguide component, and a step of, after the first step, the waveguide alignment device moving the waveguide holder in the first direction so that the second waveguide component becomes close to the incident portion and the light receiving portion, or a step of, after the second step, the waveguide alignment device moving the waveguide holder in the first direction so that the first waveguide component becomes close to the incident portion and the light receiving portion. Effect of the Invention

[0014] According to the present invention, it is possible to provide a waveguide holder, a waveguide alignment device, and an inspection method that are capable of efficiently performing a continuity inspection on a plurality of waveguide components. [Brief description of the drawings]

[0015] [Figure 1] FIG. 2 is a diagram illustrating a schematic configuration of a waveguide alignment device. [Diagram 2] FIG. 2 is a perspective view of a waveguide holder for fixing a plurality of waveguide components. [Diagram 3]4 is a diagram showing a schematic positional relationship between a first fixing portion and a second fixing portion of a waveguide holder and a plurality of waveguide components. FIG. [Figure 4] FIG. 4 is a side view showing only a portion of the waveguide holder. [Diagram 5] 11 is a perspective view showing a holder body and a fixing portion forming member in a state separated from each other. FIG. [Figure 6] 13 is a side view showing the holder body and the fixing portion forming member in a state separated from each other. FIG. [Figure 7] FIG. 13 is a side view showing a state in which a second fixing portion forming member is further attached to the first fixing portion forming member. [Figure 8] 13 is a flowchart of an example of a continuity test. [Figure 9] FIG. 11 is a schematic diagram for explaining the order of examinations. [Figure 10] 10A and 10B are schematic diagrams showing an example of an order in which a plurality of waveguide components are inspected; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0016] Hereinafter, a waveguide holder, a waveguide alignment device, and an inspection method according to one embodiment of the present invention will be described. Fig. 1 is a diagram showing a schematic configuration of a waveguide alignment device S. Fig. 2 is a perspective view of a waveguide holder 50 for fixing a plurality of waveguide components DUTs.

[0017] 1, the Z direction is a direction parallel to the optical axis of the incident portion 5a and the light receiving portion 6a of the waveguide alignment device S. The Y direction is a direction perpendicular to the Z axis, corresponds to the "first direction" of the present invention, and corresponds to the height direction of the waveguide holder 50. The X direction is a direction perpendicular to the Y axis and the Z axis, and corresponds to the "second direction" of the present invention.

[0018] The waveguide component DUT has, as an example, a substantially rectangular prism shape, and is shown extending in the Z direction in Figures 1 and 2. A waveguide (not shown) extending in the Z direction is formed inside the waveguide component DUT.

[0019] As shown in FIG. 1, the waveguide alignment device S includes, as its main components, a base 1, a support frame 2, a first stage unit 10, a second stage unit 20, a base unit 30, a waveguide holder 50, an imaging device 71, a dispenser 73, a light irradiation device 75, a moving mechanism 77, a power meter 110, and a control device 120.

[0020] The waveguide alignment device S performs a continuity test on a plurality of waveguide parts DUT fixed to a waveguide holder 50.

[0021] The base 1 is a platform on which a mounting surface is formed on which the support frame 2, the first stage unit 10, the second stage unit 20, and the base unit 30 are placed.

[0022] The support frame 2 is a frame provided on the base 1 , and supports the imaging device 71 , the dispenser 73 , the light irradiation device 75 , and the moving mechanism 77 .

[0023] The first stage unit 10 has an optical fiber holding section 11 and a moving section 12. The optical fiber holding section 11 holds an incident fiber 5. The incident fiber 5 is an optical component through which inspection light emitted from a light source (not shown) passes. In FIG. 1, an end of the incident fiber 5 is shown as an incident section 5a.

[0024] The moving unit 12 moves the optical fiber holding unit 11 in the X-axis, Y-axis, Z-axis, θx-axis, θy-axis, and θz-axis directions. The θx-axis, θy-axis, and θz-axis indicate circumferential directions centered on the X-axis, Y-axis, and Z-axis, respectively. The moving unit 12 aligns the incident portion 5a with a first end face, which is one end face of the waveguide component DUT. The first end face is the face of the waveguide component DUT facing the incident portion 5a.

[0025] The second stage unit 20 has a similar configuration to the first stage unit 10 , and includes an optical fiber holding unit 21 and a moving unit 22 .

[0026] The optical fiber holding portion 21 holds the light-receiving fiber 6. The light-receiving fiber 6 is a component through which the inspection light emitted from the waveguide device DUT passes. An end portion of the light-receiving fiber 6 is shown as a light-receiving portion 6a.

[0027] The moving unit 22 moves the optical fiber holding unit 21 in the X-axis, Y-axis, Z-axis, θx-axis, θy-axis, and θz-axis directions. The moving unit 22 aligns the light receiving unit 6a with respect to a second end face, which is the other end face of the waveguide component DUT. The second end face is the face of the waveguide component DUT facing the light receiving unit 6a.

[0028] The base unit 30 moves the waveguide holder 50, for example, in the X-axis and Y-directions, thereby moving the waveguide component DUT fixed to the waveguide holder 50. The base unit 30 has a holder fixing surface 30a on which the waveguide holder 50 is placed. The holder fixing surface 30a is a plane perpendicular to the Y-direction.

[0029] 2, the waveguide holder 50 holds a plurality of waveguide component DUTs at a first fixing portion 55 at a first height and a second fixing portion 65 at a second height. Specifically, the waveguide holder 50 holds a plurality of waveguide component DUTs in such a manner that the direction of each waveguide of the waveguide component DUTs is parallel to the optical axis of the incident portion 5a and the light receiving portion 6a. As an example, the plurality of waveguide component DUTs are all the same, but for convenience of explanation, the one fixed to the first fixing portion 55 is referred to as the "first waveguide component DUT1" and the one fixed to the second fixing portion 65 is referred to as the "second waveguide component DUT2."

[0030] The imaging device 71 is a camera that captures an image of the waveguide component DUT and its surroundings. The dispenser 73 applies, for example, a photocurable resin between the waveguide component DUT and a predetermined component when fixing the waveguide component DUT to the component. The light irradiation device 75 is a device that irradiates light for curing the photocurable resin, for example, UV light.

[0031] The moving mechanism 77 moves the imaging device 71, the dispenser 73, and the light irradiation device 75 in the Z direction. Specifically, the moving mechanism 77 moves the imaging device 71 above the target waveguide component DUT so that the imaging device 71 can image the waveguide component DUT and its surroundings. The moving mechanism 77 also moves the dispenser 73 above the target waveguide component DUT so that the dispenser 73 can supply the photocurable resin to the connection portion between the waveguide component DUT and a predetermined component. The moving mechanism 77 also moves the light irradiation device 75 above the target waveguide component DUT so that the light irradiation device 75 can irradiate the photocurable resin light of the connection portion between the waveguide component DUT and a predetermined component.

[0032] The power meter 110 receives the test light emitted from the waveguide part DUT via the light receiving fiber 6 and measures the amount of the light. The power meter 110 notifies the control device 120 of data indicating the measured amount of light.

[0033] The control device 120 has a processor that operates by executing a program stored in a storage medium, for example, and controls the operation of each part of the waveguide alignment device S. Although the control device 120 is shown as one device in FIG. 1, the control device 120 may be composed of multiple devices or equipment. The control device 120 controls the operations of the first stage unit 10, the second stage unit 20, and the base unit 30. The control device 120 also determines whether the continuity test is successful. Specifically, the control device 120 determines that the waveguide component DUT is conductive when the amount of light measured by the power meter 110 is equal to or greater than a threshold value.

[0034] Note that components other than the waveguide holder 50 can be made of known parts or devices, and therefore detailed description thereof will be omitted.

[0035] (Waveguide holder 50) Next, the waveguide holder 50 will be described in detail with reference to Fig. 2 as well as Fig. 3 to Fig. 6. Fig. 3 is a diagram showing a schematic positional relationship between the first and second fixing parts of the waveguide holder and a plurality of waveguide components. Fig. 4 is a side view showing only a part of the waveguide holder. Fig. 5 is a perspective view showing the holder body and the fixing part forming member in a state where they are separated from each other. Fig. 6 is a side view showing the holder body and the fixing part forming member in a state where they are separated from each other. Fig. 7 is a side view showing a state where a second fixing part forming member is further attached to the first fixing part forming member.

[0036] In the following, expressions such as "first height", "second height", "top surface", and "bottom surface" are used to correspond to the orientation of the waveguide holder 50 shown in each figure, but these terms are not intended to limit the present invention. The "first height" refers to the position of a first surface that is a first distance away from a reference surface of the waveguide holder 50 in the Y direction, which is a first direction. The "second height" refers to the position of a second surface that is a second distance away from the reference surface in the Y direction. The "reference surface" is, for example, the position of the bottom surface of the holder body 51 in the Y direction, but may be another position.

[0037] Although the first height and the second height are defined here as distances from a reference surface, the first height and the second height may be defined as distances from a predetermined reference position.

[0038] The waveguide holder 50 has a holder main body 51, a base member 52, and a fixing portion forming member 61. The holder main body 51 is a member provided with a first fixing portion 55, and the fixing portion forming member 61 is a member provided with a second fixing portion 65. The first fixing portion 55 is located at a first height in the height direction of the waveguide holder 50, and the second fixing portion 65 is located at a second height in the height direction of the waveguide holder 50.

[0039] 3, in this embodiment, the first waveguide component DUT1 and the second waveguide component DUT2 arranged along the X direction have the same arrangement interval dw. As an example, the arrangement interval dh in the Y direction between the first waveguide component DUT1 and the second waveguide component DUT2 is the same as the arrangement interval dw. Note that this arrangement is merely one example of the present invention, and the present invention is not limited to this arrangement.

[0040] (Holder body 51) The holder body 51 is a substantially rectangular parallelepiped as shown in Fig. 2, and has a top surface 51a, a bottom surface 51b, a first side surface 51-1, a second side surface 51-2, a third side surface 51-3, and a fourth side surface 51-4. The holder body 51 is fixed to the holder fixing surface 30a of the base unit 30 via a base member 52. Although the waveguide holder 50 of this embodiment has the base member 52, the base member 52 may not be provided and the holder body 51 may be directly fixed to the holder fixing surface 30a. Moreover, the holder body 51 and the base member 52 in Fig. 2 may be formed as a single member.

[0041] The first side surface 51-1 and the second side surface 51-2 are parallel to each other and perpendicular to the Z direction when the waveguide holder 50 is attached to the holder fixing surface 30a. The third side surface 51-3 and the fourth side surface 51-4 are parallel to the YZ plane. The bottom surface 51b is parallel to the XZ plane.

[0042] The upper surface 51a is a surface parallel to the XZ plane. As shown in Fig. 4 and Fig. 5, a plurality of protrusions 51t and protrusions 57 are provided on the upper surface 51a. In this example, the protrusions 51t are rib-shaped protrusions provided to extend in the Z direction. The protrusions 51t have a receiving surface 51ta (Fig. 5) parallel to the YZ plane. The receiving surface 51ta is a surface for determining the position of the waveguide part DUT.

[0043] The protrusion 57 is provided on one end side in the X direction of the holder main body 51. The protrusion 57 is a portion to which the second connection portion 63-2 of the fixing portion forming member 61 is connected. The protrusion 57 has a receiving surface 57ta parallel to the YZ plane, similar to the protruding portion 51t.

[0044] In the present invention, the mechanism for fixing the waveguide part DUT is not limited to a specific one, and various mechanisms can be used, but in this embodiment, as an example, a clamp member C and a fixing screw Sw1 are provided. The clamp member C and the fixing screw Sw1 have the same structure at all points where the waveguide part DUT is fixed, so a duplicated description will be omitted.

[0045] 5, the clamp member C is connected to the upper surface 51a of the holder body 51 by a fixing screw Sw1. A pressing portion Ca is formed on the clamp member C. By fastening the fixing screw Sw1, the waveguide part DUT is sandwiched between the pressing portion Ca of the clamp member C, the upper surface 51a, and the receiving surface 51ta, and the waveguide part DUT is fixed.

[0046] (Fixed portion forming member 61) The fixing portion forming member 61 is brought close to the holder main body 51 along the Y direction and attached to the upper surface 51a of the holder main body 51. As shown in Figures 5 and 6, the fixing portion forming member 61 has a plate-shaped portion 62, a first connection portion 63-1, a second connection portion 63-2, and a protrusion portion 67. As an example, the fixing portion forming member 61 is a member in which the plate-shaped portion 62, the first connection portion 63-1, the second connection portion 63-2, and the protrusion portion 67 are integrally formed.

[0047] The plate-shaped portion 62 extends in the X direction above the first fixing portion 55. The plate-shaped portion 62 has an upper surface 61a that is parallel to the upper surface 51a of the holder body 51 when the fixing portion forming member 61 is attached to the holder body 51. The upper surface 61a is provided with a plurality of protrusions 61t, similar to the upper surface 51a of the holder body 51 described above. The protrusions 61t have the same structure as the protrusions 51t, and therefore a description thereof will be omitted. The protrusions 67 are provided on one end side of the fixing portion forming member 61 in the X direction, and protrude upward.

[0048] The first connection portion 63-1 and the second connection portion 63-2 are provided at both ends of the lower surface of the plate-shaped portion 62. The first connection portion 63-1 and the second connection portion 63-2 protrude downward (toward the holder body 51 side) from the plate-shaped portion 62. The protrusion amount of the first connection portion 63-1 is smaller than the protrusion amount of the second connection portion 63-2, and therefore the lower surface of the first connection portion 63-1 and the lower surface of the second connection portion 63-2 are located at different heights.

[0049] The first connecting portion 63-1 and the second connecting portion 63-2 are formed with through holes (not shown) through which fixing screws Sw2 are passed. The fixing portion forming member 61 is fixed to the holder body 51 by fastening the fixing screws Sw2 passed through the through holes. The fixing portion forming member 61 can be removed from the holder body 51 by loosening the fixing screws Sw2.

[0050] (Connection between holder body 51 and fixed portion forming member 61) In a structure in which the fixing portion forming member 61 is constructed as a separate member from the holder body 51 and is fixed to the holder body 51 as in this embodiment, the positional accuracy of the fixing portion forming member 61 relative to the holder body 51 becomes important in order to accurately position the multiple waveguide components DUT.

[0051] Therefore, in this embodiment, a pin 59 is provided on the holder body 51. The pin 59 extends in the Y direction and engages with a recess 69 (FIG. 6) formed in the fixing portion forming member 61 to position the fixing portion forming member 61 with respect to the holder body 51. One pin 59 is provided on each end in the X direction on the upper part of the holder body 51. One pin 59 is inserted into the recess 69 formed in the first connection part 63-1, and the other pin 59 is inserted into the recess 69 formed in the second connection part 63-2. By forming such pins 59 and recesses 69, the fixing portion forming member 61 can be attached to the holder body 51 with good positional accuracy.

[0052] (Structure that prevents installation in any direction other than the specified direction) The plate-like portion 62, the first connecting portion 63-1, and the second connecting portion 63-2 of the fixing portion forming member 61 may be provided in a shape symmetrical with respect to, for example, the reference line CL in Fig. 6. However, in the case of such a symmetrical shape, for example, there is a possibility that an operator may attach the fixing portion forming member 61 to the holder main body 51 in an orientation other than a predetermined attachment orientation in which the fixing portion forming member 61 is fixed to the holder main body 51.

[0053] Therefore, in the configuration of this embodiment, the fixing portion forming member 61 is provided in an asymmetric shape. Specifically, the first connecting portion 63-1 and the second connecting portion 63-2 have different shapes. In the case of such a configuration, the fixing portion forming member 61 can be fixed to the holder main body 51 in the mounting orientation as shown in Fig. 6. On the other hand, the fixing portion forming member 61 cannot be fixed to the holder main body 51 in an orientation rotated 180° around the reference line CL. This makes it possible to prevent the fixing portion forming member 61 from being mounted in an incorrect orientation due to an installation error by an operator.

[0054] In addition, the fixing portion forming member 61 may be formed asymmetrically by having the first connection portion 63-1 and the second connection portion 63-2 arranged as not line-symmetrical with respect to a predetermined reference line, or may be formed asymmetrically by having the first connection portion 63-1 and the second connection portion 63-2 arranged as not point-symmetrical with respect to a predetermined reference point.

[0055] As another example of an asymmetric shape, for example, the outer shape of the first connection portion 63-1 and the outer shape of the second connection portion 63-2 may be different from each other. As a specific example, the first connection portion 63-1 may be a cylindrical shape that is fitted into a recess with a circular outline, and the second connection portion 63-2 may be a quadrangular prism shape that is fitted into a recess with a quadrangular outline.

[0056] (Shape of stackable fixing portion forming member 61) As an example, the fixing portion forming members 61 have a shape that allows them to be stacked on one another. Although not essential in the present invention, when the fixing portion forming members 61 have such a shape that allows them to be stacked on one another, as shown in Fig. 7, a fixing portion for a multi-stage waveguide component having three or more stages can be formed by further stacking a second fixing portion forming member 61-2 on a first fixing portion forming member 61-1 attached on the holder main body 51.

[0057] One of the conditions for the fixing portion forming members 61 to have a shape that allows them to be stacked on one another is that the distance between the upper surface 61a and the lower surface of the plate-shaped portion 62 is sufficiently long so that the lower surface of the plate-shaped portion 62 does not interfere with the fixing screw Sw1 when the second fixing portion forming member 61-2 is attached to the first fixing portion forming member 61-1, as shown in Fig. 7. With this configuration, a desired number of stages of fixing portions for the waveguide component can be formed using multiple fixing portion forming members 61.

[0058] (Continuity test of multiple waveguide components DUT) As described above, in this embodiment, a plurality of waveguide components DUTs are fixed to the waveguide holder 50. When a continuity test is performed on a plurality of waveguide components DUTs, the control device 120 performs, for example, the following process.

[0059] Fig. 8 is an example of a flow chart of a continuity test. Fig. 9 is a schematic diagram for explaining the order of tests. In this example, as shown in Fig. 9, a continuity test is performed on the first waveguide components DUT1-1, DUT1-2, and DUT1-3 of the first fixed portion 55, and then a continuity test is performed on the second waveguide components DUT2-3, DUT2-2, and DUT2-1 of the second fixed portion 65.

[0060] In step S1, the control device 120 controls the first stage unit 10 and the second stage unit 20 in a state in which the incident portion 5a and the light receiving portion 6a are close to the waveguide component DUT, and aligns the incident portion 5a and the light receiving portion 6a with respect to the first waveguide component DUT 1-1 (step S1). Step S1 corresponds to the first step of the inspection method of the present invention.

[0061] Next, the control device 120 operates a light source (not shown) to emit the inspection light to the first waveguide part DUT1-1 via the input fiber 5 (step S2).

[0062] Next, the control device 120 performs a continuity determination based on whether or not the amount of light received by the power meter 110 through the light receiving fiber 6 is equal to or greater than a threshold (step S3). If the amount of light is less than the threshold, the control device 120 determines that the continuity is poor, and if the amount of light is equal to or greater than the threshold, the control device 120 determines that the continuity is normal.

[0063] Next, the control device 120 performs a continuity test on the first waveguide component DUT1-2 (step S4). Specifically, the control device 120 operates the base unit 30 to move the waveguide holder 50 in the X direction so that the first waveguide component DUT1-2 approaches the incident portion 5a and the light receiving portion 6a. More specifically, the control device 120 moves the waveguide holder 50 in the X direction by a distance corresponding to the arrangement interval dw between the first waveguide component DUT1-1 and the first waveguide component DUT1-2. Thereafter, the control device 120 repeats the same processes as steps S1 to S3 to perform a continuity test on the first waveguide component DUT1-2.

[0064] Next, after performing a continuity test on the first waveguide component DUT1-3 by the same steps as above, the control device 120 performs a continuity test on the waveguide component DUT of the second fixed portion 65. First, the control device 120 controls the operation of the base unit 30 to move the waveguide holder 50 in the Y direction so that the second waveguide component DUT2-3 approaches the incident portion 5a and the light receiving portion 6a (step S5).

[0065] Specifically, the control device 120 controls the base unit 30 so that the base unit 30 moves the waveguide holder 50 in the Y direction by a distance corresponding to the arrangement interval dh (FIG. 3) between the first waveguide component DUT1 and the second waveguide component DUT2.

[0066] Next, the control device 120 controls the first stage unit 10 and the second stage unit 20 to align the input portion 5a and the light receiving portion 6a with respect to the second waveguide component DUT2-3 (step S6), in the same manner as in step S1. Step S6 corresponds to the second step of the inspection method of the present invention.

[0067] Next, a continuity test is sequentially performed on the second waveguide part DUT2 in the same steps as those for the test on the first waveguide part DUT1 (step S7).

[0068] By the series of steps described above, the waveguide alignment device S of this embodiment can autonomously and continuously perform continuity tests on a plurality of waveguide parts DUTs fixed to the waveguide holder 50.

[0069] (effect) As described above, in the waveguide holder 50 of this embodiment, one or more first waveguide components DUT1 are fixed at the first height, one or more second waveguide components DUT2 are fixed at the second height, and each waveguide component DUT is arranged so that the direction of each waveguide is parallel to the optical axis. Since multiple waveguide components DUTs are fixed to the waveguide holder 50 in this manner, the continuity test by the waveguide alignment device S can be performed more efficiently than when using a waveguide holder to which only one waveguide component DUT is fixed.

[0070] In this embodiment, six waveguide component DUTs are fixed to the waveguide holder 50, but the waveguide holder may be configured such that all six waveguide component DUTs are fixed to the first fixing portion 55. However, in such a configuration, the length of the waveguide holder 50 in the X direction becomes long, and as a result, the stroke amount for the base unit 30 to move the waveguide holder 50 in the X direction during the continuity test becomes large. In this case, a problem may occur that the continuity test cannot be performed with the existing base unit 30. On the other hand, according to the configuration in which multiple waveguide component DUTs are fixed to the first fixing portion 55 and the second fixing portion 65 at different heights as in this embodiment, such a problem is unlikely to occur.

[0071] In the waveguide holder 50 of this embodiment, the fixing portion forming member 61 is provided so as to be detachable from the holder main body 51. With such a configuration, the operation of fixing the waveguide part DUT to the first fixing portion 55 can be easily performed. Also, the waveguide holder 50 can be assembled by a procedure of attaching the fixing portion forming member 61, with the waveguide part DUT fixed to the second fixing portion 65 in advance, to the holder main body 51.

[0072] The waveguide alignment device S of this embodiment performs a continuity test using the above-mentioned waveguide holder 50. In this case, it is also possible to perform an inspection of the waveguide components DUT of the first fixing part 55 and the second fixing part 65 by moving the first stage unit 10 and the second stage unit 20 in the Y direction without moving the waveguide holder 50. However, in this method, it is necessary to increase the movable amount in the Y direction of the first stage unit 10 and the second stage unit 20. As a result, it is necessary to raise the position of devices such as the dispenser 73 and increase the stroke amount of these devices, which may cause problems such as a complex structure and a decrease in accuracy. In contrast, according to the waveguide alignment device S of this embodiment, since the waveguide holder 50 is moved in the Y direction by operating the base unit 30, it is possible to prevent the structure of the peripheral devices from becoming complex and the accuracy of the dispenser from decreasing.

[0073] <Modification> In the above embodiment, the waveguide holder 50 has the first fixing portion 55 and the second fixing portion 65 each fixing a plurality of waveguide components DUTs, but the waveguide holder 50 may also be configured to fix only one waveguide component DUT to the first fixing portion 55 and the second fixing portion 65.

[0074] 6, in the above embodiment, the pin 59 is provided on the holder main body 51, but such a protrusion for positioning the fixing portion forming member 61 may be provided on the fixing portion forming member 61. In this case, the holder main body 51 is formed with a recess into which the protrusion of the fixing portion forming member 61 engages.

[0075] 9, an example has been described in which the first waveguide component DUT1 is aligned with the incident portion 5a and the light receiving portion 6a, a continuity test is performed, and then a continuity test is performed on the second waveguide component DUT2, but the test method of the present invention is not limited to this order. For example, after the second waveguide component DUT2 is aligned with the incident portion 5a and the light receiving portion 6a, and a continuity test is performed, the base unit 30 may move the waveguide holder 50 in the Y direction, and a continuity test may be performed on the first waveguide component DUT1.

[0076] Fig. 10 is a schematic diagram showing an example of an order for testing a plurality of waveguide components DUTs. The first waveguide component DUT1 and the second waveguide component DUT2 may be tested in the order shown in Fig. 10(a) and Fig. 10(b) other than the order shown in Fig. 9.

[0077] Although the waveguide holder 50 in the above embodiment has a configuration including the holder main body 51 and the fixing portion forming member 61, the waveguide holder may be formed of, for example, a single member, with a fixing portion corresponding to the first fixing portion 55 provided in one part of the member and a fixing portion corresponding to the second fixing portion 65 provided in another part. Even with such a configuration, the waveguide holder is common to the above-mentioned waveguide holder 50 in that it can hold the waveguide component DUT at each of the first height and the second height, and the same effect as that of the waveguide holder 50 can be obtained.

[0078] Although the present invention has been described above using the embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments, and various modifications and changes are possible within the scope of the gist of the present invention. For example, all or part of the device can be configured by distributing or integrating functionally or physically in any unit. In addition, new embodiments resulting from any combination of multiple embodiments are also included in the embodiments of the present invention. The effect of the new embodiment resulting from the combination combines the effect of the original embodiment. [Explanation of symbols]

[0079] 1 Base 2 Support frame 5 Input fiber 5a Inlet section 6 Receiving fiber 6a Light receiving part 10 1st Stage Unit 11 Optical fiber holder 12 Mobile section 20 Second Stage Unit 21 Optical fiber holder 22 Mobile section 30 Base Unit 30a Holder fixing surface 50 Waveguide holder 51 Holder body 51a Top side 51b Bottom 51t protrusion 52 Base material 53-1 First connection part 53-2 Second connection part 55 1st fixed part 57 Protrusion 59 pin 61 Fixed portion forming member 61a Top side 62 Plate-shaped part 63-1 First connection part 63-2 Second connection part 65 Second fixed part 67 Protrusion 69 Recess 71 Imaging Device 73 Dispenser 75 Light irradiation device 77 Moving mechanism 110 Power Meter 120 Control device C Clamping member DUT waveguide components S waveguide alignment device Sw1 Fixing screw Sw2 Fixing screw

Claims

1. In a waveguide alignment device having an incident portion through which light incident on a waveguide component passes and a light receiving portion through which light emitted from the waveguide component passes, a waveguide holder for fixing the waveguide component so that a waveguide of the waveguide component is parallel to an optical axis of the incident portion and the light receiving portion, a first fixing portion that fixes one or more first waveguide components on a first surface that is a first distance away from a reference surface of the waveguide holder in a first direction perpendicular to the optical axis; a second fixing portion that fixes one or more second waveguide components on a second surface that is a second distance away from the reference surface in the first direction; Equipped with the first fixing portion and the second fixing portion fix the first waveguide component and the second waveguide component such that the directions of the waveguides of the first waveguide component and the second waveguide component are parallel to the optical axis; Waveguide holder.

2. the first fixing portion fixes the first waveguide components along a second direction perpendicular to the optical axis and perpendicular to the first direction; the second fixing portion fixes the second waveguide components along the second direction; The waveguide holder of claim 1 .

3. a holder body provided with the first fixing portion; a fixing portion forming member provided with the second fixing portion; Equipped with The fixing portion forming member is removably attached to the holder body.

3. A waveguide holder according to claim 1 or 2.

4. The holder body has a convex portion that positions the fixing portion forming member relative to the holder body by engaging with a concave portion formed in the fixing portion forming member, or a concave portion that positions the fixing portion forming member relative to the holder body by engaging with a convex portion formed in the fixing portion forming member. The waveguide holder of claim 3 .

5. The fixing portion forming member has an asymmetric shape so that the fixing portion forming member is not fixed to the holder body in an orientation other than an attachment orientation in which the fixing portion forming member is fixed to the holder body. The waveguide holder of claim 3 .

6. the fixing portion forming member has a first connecting portion and a second connecting portion connected to the holder main body, the first connection portion and the second connection portion have different shapes so that the fixing portion forming member is not fixed to the holder main body in an orientation other than an attachment orientation in which the fixing portion forming member is fixed to the holder main body; The waveguide holder of claim 3 .

7. A waveguide holder according to claim 1 or 2; a first stage unit having the incident portion and configured to align the incident portion with a first end surface of the waveguide component fixed to the waveguide holder; a second stage unit having the light receiving portion and aligning the light receiving portion with respect to a second end surface of the waveguide component; a base unit that supports the waveguide holder and moves the waveguide holder in at least the first direction; a control device that controls the base unit and moves the waveguide holder in the first direction so that the second waveguide part approaches the incident part and the light receiving part after the first stage unit and the second stage unit align the incident part and the light receiving part with respect to the first waveguide part, or controls the base unit and moves the waveguide holder in the first direction so that the first waveguide part approaches the incident part and the light receiving part after the first stage unit and the second stage unit align the incident part and the light receiving part with respect to the second waveguide part; A waveguide alignment device comprising:

8. 1. A method for inspecting a waveguide component fixed to a waveguide holder, comprising: The waveguide holder includes: a waveguide alignment device having an incident portion through which light incident on the waveguide component passes and a light receiving portion through which light emitted from the waveguide component passes, the device fixing the waveguide component so that a waveguide of the waveguide component is parallel to an optical axis of the incident portion and the light receiving portion, the device including a first fixing portion fixing one or more first waveguide components on a first surface that is a first distance away from a reference surface of the waveguide holder in a first direction perpendicular to the optical axis, and a second fixing portion fixing one or more second waveguide components on a second surface that is a second distance away from the reference surface in the first direction, the first fixing portion and the second fixing portion fixing the first waveguide component and the second waveguide component so that the direction of the waveguide of each of the first waveguide component and the second waveguide component is parallel to the optical axis, a first step of aligning the input portion and the light receiving portion with respect to the first waveguide component; a second step of aligning the input portion and the light receiving portion with respect to the second waveguide component; a step of, after the first step, the waveguide alignment device moving the waveguide holder in the first direction so that the second waveguide part approaches the incident part and the light receiving part, or, after the second step, the waveguide alignment device moving the waveguide holder in the first direction so that the first waveguide part approaches the incident part and the light receiving part; 4. A method for testing comprising:

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