Substrate storage container packaging tray and manufacturing method therefor, and substrate storage container palletization packaging body

Abstract

To provide: a substrate storage container packaging tray capable of preventing a handling property from being deteriorated, of being repeatedly used for a long period of time and of preventing a paper piece and the like from being generated; a manufacturing method therefor; and a substrate storage container palletization packaging body.SOLUTION: A packaging tray 1 of a substrate storage container 20 for storing the substrate storage container 20, which is vacuum-molded with a resin sheet 2 containing a thermoelastic resin comprises: a plane-view nearly rectangular facing plate parts 4 opposed to a cargo pallet 3; a plurality of positioning pocket parts 6 each for storing the substrate storage container 20 individually packaged by a packaging bag 21, which are formed and arranged in an XY direction of the facing plate parts 4; and an endless peripheral wall part 9 for surrounding the individually packaged substrate storage container 20, which is formed so as to be erected at a peripheral edge portion of the facing plate parts 4. The tray is formed to have a size of the pallet 3 or smaller. The peripheral wall part 9 is not raised by vacuum-molding the packaging tray 1 with the thermoelastic resin, and thus not only size expansion during storage can be suppressed, but also a handling property during the storage can be improved.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a packaging tray for substrate storage containers used during shipping, storage, etc. of the substrate storage containers, a manufacturing method thereof, and a palletized package for the substrate storage containers. [Background technology]

[0002] Conventionally, when manufacturing and shipping FOSB type substrate storage containers for use outside clean rooms, methods such as individually packaging the substrate storage containers in packaging material and shipping them, or storing multiple substrate storage containers together in a cardboard box and shipping them, have been used from the standpoint of preventing the intrusion of foreign matter from the outside (see Patent Documents 1, 2, and 3). However, in order to reduce packaging materials such as cardboard and the labor required for unpacking, and to eliminate the hassle of disposing of cardboard, a corrugated packaging method as shown in Figures 12 to 14 has been proposed and implemented.

[0003] When shipping substrate storage containers 20 using this layerless packaging method, first the manufactured substrate storage containers 20 are covered with packaging bags 21 and individually packaged (see Figure 14), and these individually packaged substrate storage containers 20 are then block-stacked (also called flat stacking) in a matrix fashion within walled cardboard trays 50 placed on a loading pallet 3 (see Figure 13).

[0004] After the packaging bag 21 is placed over the substrate storage container 20, for example, the excess portion is heat sealed, or the excess portion is twisted and its base portion is adhered with an adhesive tape. The walled cardboard tray 50 includes a flat rectangular cardboard board 51 on which the substrate storage containers 20 are mounted, and a plurality of wall panels 52 connected to the peripheral portions of the front, rear, left and right sides of the cardboard board 51 in a manner that allows them to rise and fall and surround the substrate storage containers 20. The wall panels 52 are connected in an upright manner when in use, and are disconnected and deployed when not in use. The walled cardboard tray 50 is smaller than the size of the pallet 3 when in use, but when not in use, the wall panels 52 are folded down and deployed, so that they protrude from the periphery of the pallet 3.

[0005] Next, an insole plate 30 is placed on the multiple board storage containers 20 stacked in blocks, and the individually packaged board storage containers 20 are stacked in a matrix on the insole plate 30. These operations are repeated to palletize the multiple board storage containers 20 in multiple tiers on the pallet 3. After the multiple board storage containers 20 have been palletized in multiple tiers in this manner, a board 30 is placed on the top tier of the multiple board storage containers 20 as a ceiling to form a palletized package 40 (see FIG. 13).

[0006] Next, corner angles 41 are attached to each of the four corners of the palletized packaging body 40, and a wrap film 42 is wrapped around the periphery of the palletized packaging body 40 to seal and secure all of the substrate storage containers 20. After that, cable ties 43 are wrapped around the palletized packaging body 40 to secure it, allowing multiple substrate storage containers 20 to be shipped together (see Figure 12). [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Patent No. 6022887 [Patent Document 2] JP 2002-068216 A [Patent Document 3] Patent No. 4026320 Summary of the Invention [Problem to be solved by the invention]

[0008] As described above, the conventional walled cardboard tray 50 is stored in an unfolded state with the multiple wall panels 52 falling down when not in use, resulting in a problem that the size becomes large and the handling during storage becomes very poor. In addition, when the walled cardboard tray 50 is used repeatedly, the wall panels 52 are repeatedly raised and lowered and gradually fatigued, causing the wall panels 52 and the vicinity of the joint between the peripheral portion of the cardboard panel 51 and the wall panels 52 to break, which makes it difficult to use the walled cardboard tray 50 for a long period of time. Furthermore, when the wall panels 52 and the vicinity of the joint between the peripheral portion of the cardboard panel 51 and the wall panels 52 to break, pieces of cardboard paper are generated, which may cause contamination of a clean environment such as a clean room in some cases.

[0009] The present invention has been made in consideration of the above, and aims to provide a packaging tray for substrate storage containers that prevents deterioration of handling properties, can be used repeatedly over a long period of time, and prevents the generation of paper scraps, etc., and a manufacturing method thereof, as well as a palletized package for substrate storage containers. [Means for solving the problem]

[0010] In order to solve the above problems, the present invention provides a substrate storage container that is formed from a molding material containing a thermoplastic resin, and that stores a substrate storage container, It includes an opposing plate portion that faces a loading and unloading pallet, a plurality of positioning pocket portions formed on this opposing plate portion for accommodating substrate storage containers covered with packaging material, and an endless peripheral wall portion formed on the peripheral portion of the opposing plate portion for surrounding the substrate storage containers covered with packaging material, and is formed to be smaller in size than the pallet.

[0011] A plurality of positioning pockets may be arranged in a matrix of 2×2 or more, and communication portions may be formed as recesses between the plurality of positioning pockets in a predetermined row. Furthermore, at least one of the positioning pockets adjacent to the peripheral wall in a predetermined row may be formed to communicate with (be connected through) a recess that is close to the peripheral wall. Also, the opposing plate portion may be formed into a substantially rectangular shape in plan view, and support pocket portions for rod-shaped protective materials that communicate with the positioning pocket portions may be formed at the four corners of the opposing plate portion.

[0012] In order to solve the above problems, the present invention provides a method for manufacturing a packaging tray for a substrate storage container according to claim 1 or 2, comprising the steps of: The method is characterized in that a molding material containing a thermoplastic resin is heated and softened, the softened molding material is set in a metal mold, and the gap between the molding material and the metal mold is reduced in pressure to bring the molding material and the metal mold into close contact with each other, thereby molding the molding material into a packaging tray for a substrate storage container, and then the packaging tray for the substrate storage container is cooled and removed from the metal mold.

[0013] In order to solve the above problems, the present invention provides a method for manufacturing a packaging tray for a substrate storage container according to claim 1 or 2, comprising the steps of: The molding material containing thermoplastic resin is heated and softened, the softened molding material is sandwiched between a metal mold and an air-compressed box body, and compressed air is applied from the air-compressed box body to the molding material while reducing the pressure between the sandwiched molding material and the metal mold, thereby bonding the molding material and the metal mold, thereby molding the molding material into a packaging tray for a substrate storage container, and the packaging tray for the substrate storage container is cooled and removed from the metal mold.

[0014] In addition, in order to solve the above-mentioned problems, the present invention includes a plurality of individually packaged substrate storage containers which are palletized in multiple tiers on a loading and unloading pallet, and a packaging sheet which is wrapped around the peripheral surfaces of the plurality of individually packaged and palletized in multiple tiers of substrate storage containers, and is characterized in that a packaging tray for substrate storage containers as described in claim 1 or 2 is interposed between the pallet of the plurality of substrate storage containers and between adjacent tiers of the plurality of substrate storage containers, at least between the pallet of the plurality of substrate storage containers.

[0015] Here, the substrate storage container in the claims may be of FOSB type or FOUP type. It is preferable that the substrate storage container is covered and packaged with a transparent, opaque, or translucent packaging material. The facing plate may directly face the pallet, or may indirectly face the pallet via another packaging tray. The positioning pockets may be arranged in a matrix of, for example, 2×2, 2×4, 2×5, 3×3, or 3×4. The substantially rectangular shape includes a shape that is generally recognized as a rectangle as a whole, in addition to a rectangular shape. The packaging sheet includes a transparent, opaque, or translucent resin sheet or resin film. Furthermore, the up-down, front-rear, left-right, and right-left directions of the packaging tray of the substrate storage container according to the present invention are directions based on the drawings, and can be appropriately changed as necessary.

[0016] According to the present invention, the packing tray is not made of cardboard, but is made of a molding material containing thermoplastic resin, and the peripheral wall of the packing tray is fixed so that it does not collapse and unfold, so that the packing tray can be prevented from expanding in size during storage. Also, damage caused by the undulations of the peripheral wall is reduced, so that the packing tray can be used for a long period of time and dust from paper pieces and the like can be prevented. Effect of the Invention

[0017] According to the present invention, it is possible to prevent deterioration of the handleability of the packaging tray for the substrate storage container, to enable repeated use over a long period of time, and to prevent the generation of paper scraps and the like.

[0018] According to the invention described in claim 2, since the positioning pockets of the packing tray are arranged in a matrix of 2 x 2 or more, it is possible to align and store the substrate storage containers to prevent misalignment. In addition, since the communication parts are recessed between the positioning pockets in a predetermined row, the part that defines the communication parts has a reinforcing shape, and it is possible to improve the mechanical properties such as the rigidity of the packing tray.

[0019] According to the invention described in claim 3, at least one of the positioning pockets adjacent to the peripheral wall in a predetermined row is formed with a recessed portion that is close to the peripheral wall, so that the front-rear direction of the packing tray can be easily determined using the recessed portion as a marker. In addition, the portion that defines the recessed portion has a reinforcing shape, which makes it possible to improve the mechanical properties of the packing tray, such as its rigidity.

[0020] According to the invention described in claim 4, the rod-shaped protective materials can be inserted into the multiple support pockets of the packing tray and can be made to stand up in a stable state, so that the rod-shaped protective materials are less likely to tilt or fall during the packing work of the substrate storage containers, and workability can be improved. Also, the rod-shaped protective materials inserted into the support pockets can cover the corners of the substrate storage containers covered with the packaging material, making it possible to protect the corners of the substrate storage containers covered with the packaging material from collisions, etc.

[0021] According to the invention described in claim 5, since the packing tray is vacuum molded, it is possible to easily manufacture packing trays with curved designs, thereby reducing the cost of making molds and shortening the manufacturing period.

[0022] According to the invention described in claim 6, the packaging tray is formed by pressure molding, which reduces the manufacturing cost of the mold, shortens the manufacturing period, and enables thin-wall molding. In addition, since the material can be attached to the mold with a higher pressure than vacuum molding, the degree of adhesion between the molding material and the mold is strengthened, and the reproducibility of the mold shape can be improved, which is expected to improve the dimensional accuracy of the packaging tray. In addition, a surface shape similar to that of injection molding can be secured, undercuts can be easily created, and the minimum R can be set to a small value.

[0023] According to the invention described in claim 7, the packaging tray is molded from a molding material containing a thermoplastic resin, and the undulations of the peripheral wall of the packaging tray are restricted, so that it is expected that the size of the packaging tray will not increase during storage. In addition, damage caused by the undulations of the peripheral wall is reduced, so that the packaging tray can be used for a long period of time and the generation of paper scraps and the like can be prevented. In addition, since the palletized package is sealed with a packaging sheet, the work of sealing with heat sealing or the like can be omitted when individually packaging the substrate storage containers with packaging material. Furthermore, it is possible to carefully tear and open the sealed packaging material over a long period of time, and it is also possible to prevent the generation of dust caused by tearing the packaging material. [Brief description of the drawings]

[0024] [Figure 1] 1 is a perspective explanatory diagram showing a state in which a corner angle is attached to a packaging tray in an embodiment of a packaging tray for a substrate storage container and a palletized package for a substrate storage container according to the present invention; FIG. [Diagram 2] 1 is a perspective explanatory diagram that illustrates a packaging tray for a substrate storage container according to the present invention, and a packaging tray in an embodiment of a palletized package of a substrate storage container. FIG. [Diagram 3] 1 is a side view illustrating a packaging tray for substrate storage containers according to an embodiment of the present invention, and a palletized package for substrate storage containers, the packaging tray including substrate storage containers housed therein; FIG. [Figure 4] 1 is a plan view illustrating a packing tray for a substrate storage container according to an embodiment of the present invention and a method for manufacturing the same; FIG. [Diagram 5] 1 is a side explanatory view showing a schematic diagram of a packing tray for a substrate storage container and a manufacturing method thereof according to an embodiment of the present invention; FIG. [Figure 6] 1 is a perspective explanatory view showing a schematic diagram of an embodiment of a packaging tray for substrate storage containers and a palletized package for substrate storage containers according to the present invention; [Figure 7]11 is a perspective explanatory view showing a state in which a corner angle is inserted into a packaging tray in a second embodiment of a packaging body for a substrate storage container according to the present invention and a palletized package for a substrate storage container. FIG. [Figure 8] 11 is a perspective explanatory view that shows a packaging tray for a substrate storage container according to the present invention and a packaging tray for a palletized package of a substrate storage container according to a second embodiment of the present invention. FIG. [Figure 9] 11 is a side view illustrating a packaging tray for substrate storage containers according to the present invention, and a state in which substrate storage containers are accommodated in the packaging tray in a second embodiment of a palletized package for substrate storage containers according to the present invention. FIG. [Figure 10] FIG. 11 is a plan explanatory view that illustrates a packing tray in a second embodiment of the packing tray for a substrate storage container and the manufacturing method thereof according to the present invention. [Figure 11] FIG. 11 is an explanatory side view that typically shows a packing tray in a second embodiment of the packing tray for a substrate storage container and the manufacturing method thereof according to the present invention. [Figure 12] 1 is a perspective view illustrating a palletized package of substrate storage containers mounted on a pallet; FIG. [Figure 13] 1 is a perspective explanatory view showing a working state in which a plurality of substrate storage containers are palletized in multiple stages on a pallet. FIG. [Figure 14] 1 is a perspective explanatory view showing a state in which a packaging material is placed over a substrate storage container to individually package the substrate storage container; FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0025] A preferred embodiment of the present invention will now be described with reference to the drawings. The packaging tray 1 for substrate storage containers in this embodiment is a stackable dedicated tray that is thermoformed from a resin sheet 2, which is a molding material containing thermoplastic resin, and is mounted on a loading and unloading pallet 3, as shown in Figures 1 to 6. The packaging tray 1 is equipped with an opposing plate portion 4 facing the pallet 3, a plurality of positioning pocket portions 6 formed on the opposing plate portion 4 and capable of accommodating substrate storage containers 20 individually packaged in packaging bags 21, and a peripheral wall portion 9 formed on the peripheral portion of the opposing plate portion 4 and capable of surrounding the individually packaged substrate storage containers 20, thereby contributing to the achievement of Goal 9 of the SDGs (the United Nations' international goals for sustainable development, consisting of 17 global goals and 169 targets (achievement criteria)) adopted at the United Nations Summit.

[0026] As shown in Figures 1 to 6, the resin sheet 2 is formed into a continuous strip shape or a flat rectangular plate shape from a molding material containing a thermoplastic resin, and is folded back into an uneven shape by thermoforming to form a packaging tray 1. The thermoplastic resin used as the molding material is not particularly limited, but examples thereof include polyethylene resin, high-density polyethylene resin, polypropylene resin, polycarbonate resin, polystyrene resin, polyethylene terephthalate resin, polyvinyl chloride resin, ABS resin, acrylic resin, and resin compositions combining these. Among these, a resin composition that is a mixture of inexpensive polyethylene resin and polypropylene resin, which can form the resin sheet 2 into a continuous strip shape and has excellent productivity, processability, moldability, and cushioning properties, is optimal.

[0027] Examples of a molding method for molding the molding material into the resin sheet 2 include a melt extrusion molding method using a T-die. The thickness of the molded resin sheet 2 is not particularly limited, but is preferably 1 mm or more and 3 mm or less, more preferably 1.2 mm or more and 2.8 mm or less, and even more preferably 1.5 mm or more and 2.5 mm or less, from the viewpoint of ensuring both the rigidity of the packaging tray 1 and the productivity.

[0028] As the pallet 3, as shown in Fig. 6, for example, a two-way pallet, a four-way pallet, a single-sided pallet, a single-sided use pallet, etc. are used. This pallet 3 is preferably a general-purpose product, but a dedicated product may also be used. Considering the number of substrate storage containers 20 to be shipped, versatility, and convenience, the size of the pallet 3 is 1100 mm or more x 1400 mm or less, preferably 1100 mm x 1100 mm, 1100 mm x 1300 mm, or 1100 mm x 1400 mm, and more preferably the standard size defined by JIS Z0601, 1100 mm x 1100 mm, or 1100 mm x 1300 mm.

[0029] As shown in Figures 1, 2, 4 and 5, the facing plate 4 of the packing tray 1 is formed in a substantially rectangular shape in plan view, large enough to accommodate a matrix of multiple individually packaged substrate storage containers 20, with each of the four corners chamfered to stabilize the thickness, and faces the surface of the pallet 3. From the viewpoint of preventing the intrusion of foreign matter, the facing plate 4 is formed in a substantially plate shape without any through holes communicating with the surface of the pallet 3. One or both front sides of the facing plate 4 are slightly cut out as necessary to form a deformed portion 5, as shown in Figure 4, and the deformed portion 5 serves as a reference for distinguishing the front, back, left and right of the packing tray 1.

[0030] 1 to 5, the multiple positioning pockets 6 are arranged in a matrix of 2x2 or more, preferably 3x3, at predetermined intervals in the XY directions of the opposing plate 4, and each positioning pocket 6 is recessed into a bottomed rectangular cylinder that is mounted on the surface of the pallet 3, and the positioning pockets 6 fit into the individually packaged substrate storage containers 20 to prevent rattling in the up, down, left and right directions. The multiple positioning pockets 6 are not particularly limited, but considering the loading efficiency of the pallet 3 on a truck and the size of the pallet 3 that is frequently used, it is optimal to arrange them in a matrix of 3x3 to accommodate nine substrate storage containers 20.

[0031] Between adjacent positioning pockets 6 in each row, a narrow communication portion 7 that communicates between them is recessed and formed, and this communication portion 7 functions to improve releasability during manufacturing of the packing tray 1 and to contribute to reducing distortion by improving the rigidity of the packing tray 1. Furthermore, of a pair of positioning pockets 6 adjacent to the peripheral wall portion 9 in each row, the positioning pocket 6 in the frontmost row is integrally formed with a narrow recessed portion 8 that is close to the inner peripheral surface of the peripheral wall portion 9 as shown in Fig. 4, and this recessed portion 8 serves as a mark for distinguishing between the front and rear of the packing tray 1, improves releasability during manufacturing of the packing tray 1, or improves the rigidity of the packing tray 1.

[0032] The positioning pocket 6 is formed in a bottomed structure without a through hole in order to prevent foreign matter from entering inside. Also, in order to facilitate thermoforming and to facilitate demolding from the mold during thermoforming, it is formed in a shallow, hollow, approximately truncated pyramid shape, and the four corners of the bottom and the curved parts of the peripheral wall are each chamfered to have a radius to stabilize the wall thickness.

[0033] As shown in Figures 1 to 3 and 5, the peripheral wall 9 is formed to rise endlessly on the front, rear, left and right peripheral portions of the facing plate portion 4, and functions to partially surround a plurality of individually packaged substrate storage containers 20. The peripheral wall 9 is folded back into a hollow space with a generally inverted V-shaped cross section, and a flat outer peripheral surface 10 without irregularities extends downward while inclining, and a flat flange 11 that contacts the surface of the pallet 3 is bent at the tip of the outer peripheral surface 10. From the viewpoint of ensuring the rigidity of the packing tray 1, the height of the peripheral wall 9 is optimally 30 mm to 300 mm, preferably 60 mm to 200 mm, more preferably 80 mm to 150 mm, and even more preferably around 100 mm.

[0034] The substrate storage container 20 is of the FOSB type, which comprises a container body capable of storing multiple semiconductor wafers of φ300 mm in an aligned manner, and a lid that is detachably fitted to the open front of the container body, and is covered and protected by a packaging bag 21 made of a polyethylene resin bag or the like. When the substrate storage container 20 is stored in the packaging tray 1, it is changed to an upward position with no semiconductor wafers stored therein, and the rear of the container body is fitted into the positioning pocket 6 and surrounded by the peripheral wall 9.

[0035] In order to improve handling, the packing tray 1 for such a substrate storage container 20 is formed so that the overall size including the peripheral wall portion 9 is equal to or smaller than the size of the pallet 3, i.e., exactly the same size as the size of the pallet 3 or smaller than the size of the pallet 3. For example, when the size of the pallet 3 to be used is 1100 mm×1300 mm, the size is formed to 1020 mm or more×1190 mm, 1050 mm×1220 mm, or 1100 mm×1300 mm. In addition, the mechanical properties of the packing tray 1, specifically, the maximum tensile strength, tensile elongation at break, and tensile modulus of elasticity can be appropriately adjusted by changing the shape and structure of the packing tray 1.

[0036] In the above configuration, when manufacturing the packaging tray 1 of the substrate storage container 20, first, the thermoplastic resin-containing resin sheet 2 is heated from above and below by a heater to be softened, and the softened resin sheet 2 is set horizontally in a mold. At this time, if the molding material of the resin sheet 2 is a resin composition in which polyethylene resin and polypropylene resin are mixed, the resin sheet 2 of a predetermined length can be continuously unwound from a roll-shaped original and heated and softened, making it possible to carry out continuous manufacturing operations. In addition, when the resin sheet 2 is set horizontally in the mold, the resin sheet 2 may be lowered toward the mold, or the mold may be raised toward the resin sheet 2. The mold may be made of general-purpose aluminum casting or may be made of general-purpose aluminum block material.

[0037] Next, the air in the gap between the softened resin sheet 2 and the mold is exhausted from inside the mold by a vacuum pump to reduce the pressure, thereby bonding the resin sheet 2 to the mold, forming the resin sheet 2 into a packing tray 1 and cooling it, and after stopping the reduction in pressure by the vacuum pump, air is blown in to remove the packing tray 1 from the mold, thereby manufacturing the packing tray 1. At this time, if the resin sheet 2 has been unwound from the original roll by a predetermined length, the packing tray 1 can be removed from the mold, and then punched out and separated, thereby manufacturing a large number of packing trays 1. The removed packing tray 1 can be trimmed with a router or the like as necessary.

[0038] Since the packing tray 1 is thermoformed, specifically vacuum formed, instead of injection molded, it is easy to manufacture the packing tray 1 with a curved design, the cost of manufacturing the mold is inexpensive, and it is expected that the manufacturing period will be shortened. Also, partial design changes can be realized more easily than with injection molding, and post-molding processing changes can also be realized more easily than with injection molding.

[0039] Next, when the substrate storage containers 20 are shipped using the packaging tray 1 for the substrate storage containers 20, the packaging tray 1 is first placed on the loading pallet 3, and the manufactured substrate storage containers 20 are individually packaged by covering them with packaging bags 21, and the individually packaged substrate storage containers 20 are sequentially inserted upward into the multiple positioning pocket portions 6 of the packaging tray 1. When individually packaging the substrate storage containers 20, after the packaging bag 21 is covered on the substrate storage containers 20, the excess portion of the packaging bag 21 may be folded without being sealed in order to realize a quick opening operation.

[0040] Next, an insole plate 30 is placed on the multiple substrate storage containers 20, and the individually packaged substrate storage containers 20 are stacked in a matrix on the insole plate 30 in blocks. These steps are then repeated to palletize the multiple substrate storage containers 20 in multiple tiers (e.g., 3 tiers, 4 tiers, 5 tiers, 6 tiers, etc.) on the pallet 3. The insole plate 30 is unlikely to break even with repeated use, so it may be a flat rectangular corrugated cardboard plate or a resin sheet. After the multiple substrate storage containers 20 are palletized in multiple tiers in this way, the insole plate 30 is placed on the top tier of the multiple substrate storage containers 20 as a ceiling to form the palletized package 40 shown in FIG. 6.

[0041] Next, the required number of corner angles 41 are fitted and attached to the four corners of the palletizing package 40 while being connected vertically, and a dedicated wrap film 42 is tightly wrapped horizontally around the top and bottom of the periphery of the palletizing package 40 to seal and fix all of the substrate storage containers 20. Each corner angle 41 is made of, for example, a specified compressed paper (paper tube base paper, coated cardboard, etc.) and is bent into a substantially L-shape with a thickness of 3 mm to 8 mm, preferably about 5 mm, to protect the corners of the palletizing package 40 from impacts such as collisions and prevent the load from collapsing. The corner angles 41 are attached and supported vertically on the outside of the four corners of the packaging tray 1, but since they stand on the flat flanges 11 of the peripheral wall 9 when attached, it is expected that the posture will be stabilized.

[0042] The dedicated wrap film 42 may be, for example, a strip-shaped transparent polyethylene resin film wound in multiple layers around a core. This wrap film 42 is preferably a type that does not contain plasticizers, etc., in consideration of adverse effects on semiconductors. When the wrap film 42 is rolled up from the side, the outer peripheral surface 10 of the peripheral wall of the packaging tray 1 functions as an underlay for the wrap film 42, so that the wrap film 42 can be rolled up appropriately to seal without gaps. This makes it possible to reliably prevent foreign objects from entering the palletized package 40.

[0043] After wrapping the wrap film 42 around the palletized package 40 to seal all of the substrate storage containers 20, the palletized package 40 is bound with multiple cable ties 43 and a lot number identification label or other necessary documents 44 are attached to the wrap film 42 on the front of the palletized package 40, allowing multiple substrate storage containers 20 to be shipped together. Since the palletized package 40 is sealed with the wrap film 42, it is possible to eliminate the need to seal the substrate storage containers 20 with heat sealing when individually packaging the substrate storage containers 20 in packaging bags 21. It is also possible to prevent the sealed packaging bag 21 from having to be opened by cutting it open over a long period of time with a cutter and to prevent the generation of resin fragments due to the cutting of the packaging bag 21.

[0044] According to the above-mentioned configuration, the packing tray 1 is vacuum-formed from thermoplastic resin, and the peripheral wall portion 9 of the packing tray 1 is configured not to rise or fall, so that the size can be made smaller than the size of the pallet 3, and the size increase during storage can be effectively prevented. Therefore, the handling property of the packing tray 1 during storage can be improved. In addition, since the peripheral wall portion 9 of the packing tray 1 does not rise and fall, even if the packing tray 1 is used repeatedly, the peripheral wall portion 9 is not damaged by fatigue due to the rise and fall, and the packing tray 1 can be effectively used for a long period of time. In addition, since the packing tray 1 is made of thermoplastic resin rather than cardboard, no paper pieces are generated, and it is possible to eliminate the risk of contamination of a clean environment such as a clean room.

[0045] In addition, since the height of the peripheral wall portion 9 is in the range of 30 mm to 300 mm, the wrap film 42 can be appropriately attached and sealed without gaps. Furthermore, since no through holes are drilled in the packing tray 1, it is possible to reliably prevent foreign objects from passing through the packing tray 1 from the pallet 3 and entering the bottommost stage of the multiple substrate storage containers 20. Furthermore, since the packing tray 1 is configured to have a stackable structure by folding back the resin sheet 2, it is expected that space saving during storage will be greatly achieved. Furthermore, since the transparent wrap film 42 is wrapped around the peripheral surface of the palletized package 40, it is possible to quickly determine whether or not there is any damage such as unevenness or tears on the peripheral surface of the palletized package 40.

[0046] Next, Figures 7 to 11 show a second embodiment of the present invention. In this case, support pocket portions 12 for corner angles 41 that communicate with adjacent positioning pocket portions 6 are formed in each of the four corners of the opposing plate portion 4 of the packaging tray 1, and the corner angles 41 are inserted and supported vertically in each of these multiple support pocket portions 12 when the substrate storage containers 20 are palletized.

[0047] Unlike the first embodiment, the packaging tray 1 is vacuum-formed without folding, and the deformation portion 5 and the flange 11 are omitted. Each support pocket portion 12 is recessed into a bottomed rectangular cylinder mounted on the surface of the pallet 3, is formed smaller than the positioning pocket portion 6, and communicates with the corners of the adjacent positioning pocket portion 6. The support pocket portion 12 is formed in a bottomed structure without a through hole from the viewpoint of preventing foreign matter from entering inside. Also, from the viewpoint of facilitating thermoforming and facilitating removal from the mold during thermoforming, the support pocket portion 12 is formed in a shallow, hollow, approximately pyramidal truncated shape, and the corners of the bottom portion and the bent portion of the peripheral wall portion are chamfered to R to stabilize the wall thickness. Other portions are the same as those of the above embodiment, so the description will be omitted.

[0048] In this embodiment, the same effects as those of the above embodiment can be expected, and moreover, since the corner angles 41 are not simply placed on the flange 11 of the packing tray 1 but are inserted into the multiple support pockets 12 and made to stand, the corner angles 41 will not tilt or fall over during the packing work, and it is clear that a great improvement in workability can be expected. Also, since the support pockets 12 and the positioning pockets 6 are not separate holes but are connected and integrated, a simplification of the configuration can be expected.

[0049] In the above embodiment, the packaging tray 1 is vacuum-formed, but it may be pressure-formed. When manufacturing the packaging tray 1 of the substrate storage container 20 by this pressure-formed molding, the thermoplastic resin-containing resin sheet 2 is heated from above and below by a heater to be softened, the softened resin sheet 2 is sandwiched between a lower mold and an upper airtight compressed air box, and the resin sheet 2 and the mold are closely attached to each other by applying compressed air from the compressed air box to the resin sheet 2 while reducing the pressure between the sandwiched resin sheet 2 and the mold by a vacuum pump, and the pressurized resin sheet 2 is molded into the packaging tray 1, the packaging tray 1 is cooled, and the reduction in pressure is stopped, and then air is blown in to remove the packaging tray 1 from the mold, and the removed packaging tray 1 is selectively trimmed by a router or the like, whereby the packaging tray 1 can be manufactured.

[0050] In this case, if the resin sheet 2 is unwound by a predetermined length from the original roll, the packaging tray 1 can be removed from the mold, and then punched out and separated, thereby mass-producing the packaging tray 1. When producing the packaging tray 1 by such a pressure molding method, the degree of adhesion between the resin sheet 2 and the mold is stronger than in vacuum molding, so that the reproducibility of the mold shape can be improved, and the dimensional accuracy of the packaging tray 1 can be significantly improved.

[0051] In the above embodiment, the molding material of the resin sheet 2 is only a thermoplastic resin, but the present invention is not limited to this. For example, conductive substances such as carbon fibers, carbon powder, carbon nanotubes, conductive polymers, etc., and various antistatic agents such as anionic, cationic, and nonionic may be added to the molding material of the resin sheet 2 as necessary. In addition, ultraviolet absorbers such as benzotriazole, salicylate, cyanoacrylate, oxalic acid anilide, and hindered amine may be added, and glass fibers or carbon fibers that improve rigidity may be selectively added.

[0052] In the above embodiment, the communicating portions 7 are recessed between adjacent positioning pockets 6 in each row, but the communicating portions 7 may be recessed only between adjacent positioning pockets 6 in a predetermined row. Furthermore, narrow recesses 8 approaching the peripheral wall portion 9 may be formed in each of a pair of front and rear positioning pockets 6 adjacent to the peripheral wall portion 9 in each row, provided that no particular hindrance is caused.

[0053] In the above embodiment, the packing tray 1 for the substrate storage containers 20 is interposed between the surface of the pallet 3 and the first lowest tier of the substrate storage containers 20, but the present invention is not limited to this. For example, the packing tray 1 can be sandwiched between adjacent tiers of the substrate storage containers 20 in place of the insole plate 30. Specifically, by sandwiching the packing tray 1 between the first and second tiers, between the second and third tiers, between the third and fourth tiers, etc. of the substrate storage containers 20, it is possible to reduce the amount of packing materials such as cardboard boxes and to save the effort of disposing of the cardboard boxes.

[0054] Furthermore, by covering and protecting the topmost layer of multiple substrate storage containers 20 with a packing tray 1 instead of the insole plate 30, it is possible to reduce the amount of packing materials such as cardboard. When multiple individually packaged substrate storage containers 20 are stored together in a cardboard box, multiple packing trays 1 can be stored in the cardboard box to sandwich the multiple substrate storage containers 20, and the multiple packing trays 1 can be used as cushioning materials.

[0055] Furthermore, as long as no particular problems are caused, a resin bag that encases the substrate storage container 20 and an opaque aluminum laminate bag that encases the resin bag from the outside may be used as the packaging bag 21. Although the corner angle 41 is bent into a substantially L-shape in plan, it is also possible to use a combination of multiple long flat plates in a substantially L-shape in plan. Furthermore, the dedicated wrap film 42 may be changed to a wrap film for food packaging if no particular problems are caused. [Industrial Applicability]

[0056] The packaging tray for substrate storage containers and the manufacturing method thereof, as well as the palletized package for substrate storage containers according to the present invention, are used in fields such as the manufacturing, storage, transfer, and transportation of substrate storage containers. [Explanation of symbols]

[0057] 1 Packing tray for PCB storage container 2 Resin sheet (molding material) 3 Palette 4 Opposing plate 6 Positioning pocket 7 Communication section 8 Recess 9 Peripheral wall 10 Outer surface 11 Flange 12 Support pocket 20 Substrate storage container 21 Packaging bags (packaging materials) 40 Palletized packages 41 Corner angle (rod-shaped protective material) 42 Wrap film (packaging sheet)

Claims

1. A packaging tray for a substrate storage container, which is formed from a molding material containing a thermoplastic resin and contains a substrate storage container, A packaging tray for substrate storage containers, comprising: an opposing plate portion facing a loading pallet; a plurality of positioning pocket portions formed on the opposing plate portion for accommodating substrate storage containers covered with packaging material; and an endless peripheral wall portion formed on the peripheral portion of the opposing plate portion for surrounding the substrate storage containers covered with packaging material, the packaging tray being formed to be smaller than the size of the pallet.

2. 2. The packaging tray for substrate storage containers according to claim 1, wherein a plurality of positioning pockets are arranged in a matrix of 2.times.2 or more, and a communication portion is formed as a recess between the plurality of positioning pockets in a predetermined row.

3. 3. The packaging tray for substrate storage containers according to claim 2, wherein at least one of a plurality of positioning pockets adjacent to the peripheral wall in a predetermined row is formed with a recess that is adjacent to the peripheral wall and communicates with the peripheral wall.

4. 3. A packaging tray for substrate storage containers according to claim 1, wherein the opposing plate portion is formed in a substantially rectangular shape in plan view, and support pocket portions for rod-shaped protective materials which communicate with the positioning pocket portions are formed at the four corners of the opposing plate portion.

5. A method for manufacturing a packaging tray for a substrate storage container as described in claim 1 or 2, characterized in that a molding material containing a thermoplastic resin is heated and softened, the softened molding material is set in a mold, and the gap between the molding material and the mold is reduced in pressure to bring the molding material and the mold into close contact with each other, thereby molding the molding material into a packaging tray for the substrate storage container, and then the packaging tray for the substrate storage container is cooled and removed from the mold.

6. 3. A method for manufacturing a packaging tray for a substrate storage container as described in claim 1 or 2, comprising the steps of heating and softening a molding material containing a thermoplastic resin, sandwiching the softened molding material between a mold and an air-compressed box body, applying compressed air from the air-compressed box body to the molding material while reducing the pressure between the sandwiched molding material and the mold, thereby bringing the molding material and the mold into close contact with each other, thereby molding the molding material into a packaging tray for the substrate storage container, and cooling the packaging tray for the substrate storage container and removing it from the mold.

7. A palletized package of substrate storage containers comprising a plurality of individually packaged substrate storage containers palletized in multiple tiers on a loading and unloading pallet, and a packaging sheet wrapped around the peripheral surfaces of the plurality of individually packaged and palletized in multiple tiers, wherein a packaging tray for substrate storage containers as described in claim 1 or 2 is interposed between the plurality of substrate storage containers and the pallet, and between adjacent tiers of the plurality of substrate storage containers, at least between the plurality of substrate storage containers and the pallet.

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