Bonded abrasive article and method of making the same

Abstract

To provide: an abrasive article, and particularly, an abrasive article including a vitreous bond material, abrasive particles including a superabrasive material, and a plurality of pores; and a method of making the bonded abrasive article.SOLUTION: An abrasive article can include a body including a bond material, abrasive particles, and a plurality of pores, where the bond material can comprise a vitreous material. In one embodiment, an average particle size of the abrasive particles can be between 0.1 microns and 5 microns, and a porosity of the body may be between 40 vol.% and 70 vol.%, where the porosity may define an average pore size (D50) of at least 0.1 micron and at most 5 microns.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The following describes an abrasive article, particularly an abrasive particle comprising a vitreous bond material and a superabrasive material, and a plurality of and a method of making the bonded abrasive article. [Background technology]

[0002] Bonded abrasive articles, such as abrasive wheels, are used to cut, grind, or shape a variety of materials. The industry is looking for improved grinding tools with high grinding precision, high efficiency, and long life. The demand for bonded abrasive articles continues to grow. [Brief description of the drawings]

[0003] The present disclosure may be better understood and its numerous features may be better understood by reference to the accompanying drawings, in which: and advantages will be apparent to those skilled in the art. [Figure 1] 1 includes a drawing of a cross section of a body of an abrasive article according to an embodiment. [Figure 2A] 1 includes a graph illustrating pore size distribution of a body according to one embodiment. [Figure 2B] 1 includes a graph illustrating pore size distribution of a body according to one embodiment. [Diagram 3] 1 includes a graph illustrating particle size distribution of a powder mixture according to one embodiment. [Figure 4A] 1 includes an optical microscope image of a cross-section of a body according to one embodiment. [Figure 4B] Included are optical microscope images of cross sections of comparative bodies. [Diagram 5] 1 includes a drawing of the shape of the body of an abrasive article according to one embodiment. [Figure 6] 1 includes a drawing of an abrasive article comprising multiple bodies according to one embodiment. [Figure 7] 1 includes a graph illustrating elastic modulus versus porosity according to an embodiment. [Figure 8]1 includes a graph illustrating Shore D hardness versus porosity according to an embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0004] The following description in conjunction with the drawings is provided to aid in understanding the teachings provided herein. The following disclosure will focus on specific implementations and embodiments of the teachings. The focus is provided to help explain the teachings and may not be relevant to the scope or applicability of the teachings. However, other teachings are also incorporated herein by reference in their entirety. It can be used for crabs.

[0005] As used herein, the terms "comprises" and "comprising "includes", "including", "has", "has "having," or any other variation thereof, is intended to cover a non-exclusive inclusion. For example, a method, article, or apparatus that includes a list of features is not necessarily limited to those features. The present invention is not limited to the above-mentioned embodiments, but includes other features not expressly recited, or any such method, article, or method. or other features inherent to the device. Further, unless expressly stated to the contrary, "or" may be used interchangeably with "or." refers to inclusive-or, not exclusive-or For example, condition A or B is satisfied by one of the following: A is true (and A exists) and B is false (or does not exist), A is false (or does not exist) and B is true is (or exists), and both A and B are true (or exist).

[0006] Additionally, the use of "a" or "an" is intended to describe elements and components described herein. This is done merely for convenience and to give a general sense of the scope of the invention. This description refers to one or more At least one, and the singular should be understood as including the plural and vice versa For example, where a single item is described herein, two items may be used instead of a single item. Similarly, two or more of the articles described herein may be used. If a single item is used, two or more items may be substituted for the single item.

[0007] Unless otherwise defined, all technical and scientific terms used herein are defined by the principles of the present invention. The term "material" has the same meaning as commonly understood by a person skilled in the art to which the present invention pertains. The methods and examples are illustrative only and are not intended to be limiting. Unless specific details of the act are given, such details are to be understood as references in the art. These techniques may include conventional techniques that may be found in books and other sources.

[0008]

[0004] Embodiments disclosed herein are directed to an abrasive article comprising a body, the body being made of glass. a binder material including a porous material, abrasive particles contained in the binder material, and a plurality of pores. In one embodiment, the body has at least 40% by volume, based on the total volume of the body, Porosity of 70% or less by volume, at least 10% by weight and 95% by weight by volume of the total body % abrasive content, at least 0.05 microns and no more than 5 microns Average particle size (D50) of at least 0.1 microns and no more than 5 microns or any combination thereof. In certain aspects, the abrasive article may be suitable for high precision grinding.

[0009] In one embodiment, the method of forming the body of the abrasive article of the present disclosure comprises mixing abrasive particles and a binder material. providing a powder mixture comprising: filling the powder mixture into a die; and applying pressure to the powder mixture in the die to compress it. and heating the resulting powder mixture to a temperature of at least 600°C.

[0010] In one particular embodiment, the powder mixture creates an aqueous dispersion of abrasive particles and binding material; Spray drying, freeze casting, or lyophilization, or high shear of dry or wet ingredients By mixing, grinding, crushing, sieving, filtering, or any combination thereof. It can be manufactured.

[0011] In one embodiment, the powder mixture comprises no more than 5% by weight, or no more than 4% by weight, based on the total weight of the powder mixture. % by weight or less, or 3% by weight or less, or 2% by weight or less.

[0012] In certain embodiments, the powder mixture has a particle size of at least 0.5 microns, or at least 0.6 Average particle size (D5 In another embodiment, the D50 value can be 2 microns or less, or 1.5 microns or less. It may be sub-column, or sub-1.0 micron.

[0013] In one embodiment, filling the powder mixture into the mold comprises filling the powder mixture to a tap density of the powder mixture. In order to form a pre-compressed powder mixture, a die is used in combination with powder agitation. As used herein, the term "tacking of a powder mixture" refers to the sequential filling of a powder mixture with a powder. The density of the powder is determined by ASTM D7481.

[0014] In one embodiment, the tap density of the pre-compressed powder mixture in the die is at least 0.4 5g / cm 3 , or at least 0.50 g / cm 3 , or at least 0.52 g / cm 3 , or at least 0.54 g / cm 3 It could be.

[0015] After the mold is filled, it can be closed and the powder mixture contained within the mold is poured into the desired volume. Pressure is applied to press the material into a volume (also referred to herein as "pressing into volume"). This is also fine.

[0016] In one embodiment, the pressing can be performed by cold pressing. When used in combination, the term "cold pressing" refers to pressing at room temperature or slightly elevated temperatures. In one embodiment, the cold pressing is performed at a temperature of at least 20° C., or at least 25° C., or is at least 30°C, or at least 50°C and not more than 80°C, or not more than 60°C, or It can be carried out at temperatures below 0°C.

[0017] In a particular embodiment, the pressure applied during cold pressing is at least 40 MPa, is at least 60 MPa, or at least 100 MPa, or at least 120 MPa In another embodiment, the applied pressure is 150 MPa or less, or 130 MPa or less. , or 125 MPa or less.

[0018] In a further embodiment, after cold pressing, the cold pressed body is removed from the mold before heating. In a particular embodiment, the heating of the cold press body is at least 620° C., The maximum heating temperature is at least 650°C, or at least 680°C, or at least 700°C. In another particular embodiment, the maximum heating temperature is 850° C. or less, or It may be 800°C or less, or 750°C or less.

[0019] As shown in FIG. 1, the body (10) is made of abrasive grains uniformly distributed within a bonding material (13). It may include abrasive particles (11) and a plurality of pores (12).

[0020] In one embodiment, the abrasive particles are made of a superabrasive material, such as diamond, cubic boron nitride, or a combination thereof. In certain embodiments, the superabrasive material may comprise diamond. In certain embodiments, the superabrasive material is made of diamond. It can become essential.

[0021] In one embodiment, the abrasive particles have an average particle size (D50) of at least 0.1 microns; is at least 0.3 microns, or at least 0.4 microns, or at least 0.5 microns clonal, or at least 0.8 microns, or at least 1 micron, or at least 1 It may be at least 0.5 microns, or at least 2 microns, or at least 3 microns. In an embodiment, the average particle size (D50) is 5 microns or less, or 4 microns or less, or 3 microns or less. Cr or less, or 2.5 microns or less, or 2.0 microns or less, or 1.5 microns or less or less than 1.3 microns, or less than 1.0 microns, or less than 0.9 microns, or It may be 0.8 microns or less, or 0.7 microns or less, or 0.6 microns or less. The average particle size (D50) of the abrasive particles is between any of the minimum and maximum values ​​above. In certain embodiments, the average particle size (D50) of the abrasive particles is at least 0.3 microns. and may be 0.7 microns or less.

[0022] In a further embodiment, the amount of abrasive particles is at least 15 parts by weight based on the total weight of the body. % by weight, for example at least 20%, or at least 25%, or at least 30% by weight. % by weight, or at least 35% by weight, or at least 40% by weight, or at least 45% by weight %, or at least 50%, or at least 55%, or at least 60% by weight In another embodiment, the amount of abrasive particles may be 95% by weight or more based on the total weight of the body. or less than 93% by weight, or less than 90% by weight, or less than 85% by weight, or less than 80% by weight or less than 75% by weight, or less than 70% by weight, or less than 65% by weight, or less than 60% by weight The amount of abrasive particles may be less than or equal to 55% by weight, or less than or equal to 50% by weight. The value may be any value between the maximum value and the minimum value.

[0023] In still further embodiments, the amount of abrasive particles is at least 30 volumes based on the total volume of the body. % by volume, for example, at least 35% by volume, at least 40% by volume, at least 45% by volume, Or at least 50% by volume. In another embodiment, the amount of abrasive particles is 65% by volume or less. , or 60% by volume or less, or 55% by volume or less, or 50% by volume or less, or 45% by volume or less It could be.

[0024] In a further embodiment, the porosity of the body is at least 40 volumes based on the total volume of the body. % by volume, or at least 41% by volume, or at least 42% by volume, or at least 43% by volume %, or at least 44% by volume, or at least 45% by volume, or at least 46% by volume %, or at least 47%, or at least 48%, or at least 49%, by volume; In another embodiment, the porosity of the body is 7. 0% by volume or less, or 65% by volume or less, or 60% by volume or less, or 58% by volume or less, or 5 6% by volume or less, or 55% by volume or less, or 54% by volume or less, or 53% by volume or less, or 5 The porosity of the body may be 2% by volume or less, or 51% by volume or less, or 50% by volume or less. It can be any value between the minimum and maximum values ​​listed above. The porosity is at least 52% by volume and not more than 60% by volume based on the total volume of the body. As used herein, the term "porosity" (unless otherwise indicated) ) has a pore size of at least 3 nm, also referred to herein as "open porosity." The total pore size is determined by the Archimedes method.

[0025] In certain embodiments, the total porosity Pt of the body (the sum of the open and closed porosity) The ratio of the open porosity Po to the open porosity Po [P t :P o ] is 1.25 or less, for example, 1.11 or less or 1 The closed porosity may be 0.05 or less or 1.01 or less. Pores or particles smaller than 3 nm that are completely contained within the body and cannot be detected by the Medes method is defined as the sum of the larger discrete isolated pores.

[0026] In one embodiment, the average pore size (D50) of the body is at least 0.1 microns; Or at least 0.2 microns, or at least 0.3 microns, or at least 0.5 microns, or at least 0.8 microns, or at least 1 micron, or at least 5 microns, or at least 10 microns, or at least 15 microns, or at least It can be as small as 20 microns, or at least 30 microns. The average pore size is 50 microns or less, or 45 microns or less, or 40 microns or less. or less than 30 microns, or less than 20 microns, or less than 10 microns, or less than 5 microns 1.0 microns or less, or 2 microns or less, or 1.5 microns or less, or 1.0 microns or less The average pore size (D50) is at least 0.1 microns and no more than 50 microns. , at least 0.2 microns and no more than 5 microns, or at least 0.3 microns and no more than 0 Between any of the minimum and maximum values ​​listed above, such as .9 microns or less can.

[0027] In a further embodiment, the 10th percentile (D10) of the pore size of the body is at least At least 0.05 microns, or at least 0.1 microns, for example at least 0.2 microns. Chromon, or at least 0.3 microns, or at least 0.5 microns, or at least At least 0.8 microns, or at least 1 micron, or at least 3 microns In another embodiment, the D10 size is 10 microns or less, or 5 microns or less, or Can be 1 micron or less, or 0.8 microns or less, or 0.5 microns or less D10 pore size is 0.1 microns to 4 microns or 0.1 microns to 1 micron , or any of the minimum and maximum values ​​listed above, such as 0.2 microns to 0.7 microns The value can be between .

[0028] In yet a further embodiment, the 90th percentile (D90) of the pore size is at least At least 0.5 microns, or at least 0.7 microns, or at least 1 micron, or at least 3 microns, or at least 5 microns, or at least 10 microns, or It can be at least 20 microns, or at least 40 microns. D90 value is 70 microns or less, or 50 microns or less, or 30 microns or less, or is 10 microns or less, or 5 microns or less, or 1 micron or less, or 0.9 microns or less The D90 pore size can be 0.5 microns to 60 microns or less. Klon, 0.5 microns to 5 microns, or 0.6 microns to 0.95 microns, etc. , can be a value between any of the minimum and maximum values ​​listed above.

[0029] In certain embodiments, the 99th percentile (D99) value of the pore size of the body is 80 microns. lon or less, for example, 50 microns or less, or 10 microns or less, or 3 microns or less, can be 1 micron or less, or 0.98 microns or less.

[0030] In another embodiment, the body may have a pore size distribution, with pore sizes ranging from 10 The distance between the percentile value (D10) and the average pore size (D50), i.e., D1 0-D50 is 1 micron or less, or 0.5 microns or less, or 0.3 microns or less It is possible.

[0031] In yet another embodiment, the body has a mean pore size (D50) and a 90th percentile (D90), i.e., D50-D90 is 1 micron or less, or 0.5 microns The pore size distribution may be less than 0.4 microns or less than 0.1 microns. .

[0032] In still further aspects, the pores have a multimodal size distribution, e.g., bimodal or trimodal size. It can have a distribution.

[0033] In a further particular embodiment, at least 95% of the plurality of pores in the body are between 0.1 microns and 1 micron, for example, at least 96%, or at least 97%, or at least 98% or at least 99%, or at least 99.5%, or at least 99.9% of the pores It may have a size.

[0034] The binding material of the body of the abrasive article facilitates improved manufacturing and performance of the abrasive articles of the present disclosure. In one embodiment, the bonding material of the body can have a specific bonding chemistry that can bond the glassy material to the glassy material. In certain embodiments, the bonding material may consist essentially of a vitreous material. As used herein, consisting essentially of a vitreous material means that at least This means that the material is 99% vitreous by volume. A glassy phase can be formed, which can bond the abrasive particles together. Typical materials for forming the composite include natural and synthetic minerals, metal oxides, and non-metal oxides. A non-limiting example of a glassy material is a glassy material having Si as the main oxide compound. O2 and two or more further oxides, e.g. Al2O3, Li2O, Na2O, B2O3 , K2O, BaO, or any combination thereof. In another embodiment, the bonding material may not be limited to vitreous materials, but may be one or more other inorganic materials, such as ceramics, cermets, metals, metal alloys, or any of these. In addition, the inorganic material may include amorphous materials, polycrystalline materials, monocrystalline materials, and combinations thereof. crystalline materials, or any combination thereof.

[0035] In one embodiment, the binding material may comprise, in addition to inorganic binding materials, organic binders, hereinafter also referred to as organic binders. During the heat treatment, the organic binder may decompose and remain in the sintered body. The organic binder material can be used to create or assist in the creation of desired porosity. Natural materials, synthetic materials, resins, epoxies, thermosets, thermoplastics, elastomers, or In certain embodiments, the binder may be an organic binder and any combination thereof. Examples include polyether, phenolic resin, epoxy resin, polyester resin, and polyurethane. Polyimide, Polybenzimidazole, Aromatic polyamide, Modified phenanthroline Nol resins (epoxy and rubber modified resins, or phenolic resins blended with plasticizers) The preferred examples of the present invention include corn starch, corn starch, and any combination thereof. In certain embodiments, the organic binder is polyethylene glycol (PE In certain embodiments, the PEG can be 18,000 or less, or 15,0 00 or less, or 10,000 or less, or 8,000 or less. In another particular embodiment, the molecular weight of the PEG is at least 1000, or at least 3000. , or at least 5000, or at least 7000.

[0036] In one embodiment, the amount of bond material in the abrasive body after heating (sintering) the press body is: At least 5% by weight, or at least 7% by weight, or at least at least 10% by weight, or at least 15% by weight, or at least 20% by weight, or at least In another embodiment, the body may be at least 25% by weight, or at least 30% by weight. The amount of the bonding material is not more than 90% by weight, or not more than 80% by weight, or is 70% by weight or less, or 60% by weight or less, or 50% by weight or less, or 40% by weight or less, or is 30% by weight or less, or 20% by weight or less, or 15% by weight or less, or 10% by weight or less, The amount of binder may be up to 8% by weight. The amount of binder may be any of the minimum and maximum values ​​given above. In certain embodiments, the bonding material in the body consists essentially of a vitreous bonding material. By consisting essentially of a vitreous bonding material, it is meant herein that the bonding material is The joint material may contain no more than 1% by weight of non-vitreous material based on the total weight of the joint material. In certain embodiments, the binder material is at least about 100% by weight based on the total weight of the body. The amount of the vitreous bonding material may be at least 5% and not more than 10% by weight.

[0037] In one embodiment, the binding material [C b ] abrasive particles [C a ] and the weight percentage ratio [C b :C a In certain embodiments, the weight ratio may range from 1:15 to 10:1. Cent ratio [C b :C a ] should be in the range of 1:15 to 1:4 or 1:15 to 1:10. This can be done.

[0038] The body of the abrasive article of the present disclosure has an abrasive strength of at least 1.3 g / cm 3 , e.g., at least 1. 35g / cm 3 , or at least 1.40 g / cm 3 , or at least 1.42 g / cm 3 , or at least 1.46 g / cm 3 , or at least 1.48 g / cm 3 The density of In another embodiment, the density of the body is 1.6 g / cm 3 Below, or 1. 55g / cm 3 or less than 1.50g / cm 3 or less than 1.45g / cm 3 Below is The density of the body may be any value between the minimum and maximum values ​​given above. Cut.

[0039] The body of the abrasive article of the present disclosure can have an excellent homogeneous microstructure. The main body is a normalized defect amount of 5 or less, or 3 or less, or 1 or less. nt, nDFA), the nDFA having a diameter size of 50 microns or more. 1mm 2 In certain embodiments, the body is less than 50 microns in size. As used herein, a "defect" may not include a defect having a diameter size above 10 mm. The term refers to a high density of undesirable particle agglomerates within a body and is applied to cross-cut surfaces of the body. They can be identified and counted in SEM or optical microscope images taken from a 3D scanner. The term "defect" is also used herein as "agglomerate" unless otherwise indicated. The term is used interchangeably.

[0040] In certain other particular embodiments, the defect in the body has a diameter of 18 microns or greater. The particle may be an agglomerate, the body being 5 or less, or 3 or less, or 1 or less than 1 mm 2 Hit In a particular embodiment, the body may have a normalized defect amount (nDFA) of 1 In another embodiment, the present disclosure may be free of defects having a diameter size of 8 microns or greater. The material of the body of the abrasive article shown has a hardness of at least 70, or less than 70%, according to ASTM D2240. and having a Shore D hardness of at least 73, or at least 75, or at least 77. can.

[0041] In a further embodiment, the material of the body has a strength of at least 10G according to ASTM E1876. Pa, or at least 11 GPa, or at least 12 GPa, or at least 13 GPa a, or at least 14 GPa elastic modulus (EMOD).

[0042] The body may have any suitable size and shape known in the art; It will be appreciated that the abrasive composition may be incorporated into a variety of different abrasive articles to form a bonded abrasive article. For example, the body may be attached to a substrate such as the hub of a wheel for use in a bonded abrasive grinding machine. The formation of the wheel can be facilitated.

[0043] In one embodiment, the body of the abrasive article of the present disclosure is also referred to herein as a body segment. The body may include a plurality of body segments, and the body segments may be attached to a substrate.

[0044] In one particular embodiment, the abrasive article comprises a substrate and a plurality of bodies attached to the substrate. each of the plurality of bodies may include a bonding material including a vitreous material and a plurality of pores. In certain embodiments, the superabrasive particles may include a plurality of superabrasive particles attached to a substrate. The body contains a Porosity Content Variation (PCV) value of 1.3 or less. As used herein, the PCV value is the value of the number of particles attached to a substrate. The standard deviation of the porosity of all the bodies among the bodies, and at least some of the eight bodies The total volume of the bodies tested is at least 0.45 cm 3 That is it. In certain embodiments, the PCV value is 1.2 or less, or 1.0 or less, or 0.8 or less, or 0. 0.6 or less, or 0.4 or less, or 0.3 or less. In certain embodiments, the abrasive article The amount of the plurality of bodies (also referred to herein as segments) attached to the support is at least 40 bodies, or at least 45 bodies, or at least 48 bodies; or at least 50 bodies, or at least 100 bodies, or at least 150 bodies In another embodiment, the number of bodies may be at least 200. The quantity is 500 units or less, or 300 units or less, or 100 units or less, or The number of bodies in the abrasive article may be 70 or less, or 50 or less. The number may be any number between the minimum and maximum numbers listed above.

[0045] In one embodiment, the material of the substrate can include aluminum or steel. The bodies may be attached to the substrate by an adhesive, for example an epoxy adhesive.

[0046] In a further embodiment, the batch of bodies may include a plurality of bodies, Each body may include superabrasive particles contained in a binder material that includes a vitreous material. pores of at least 0.20 cm 3 and a porosity content of the plurality of bodies. The PCV value may be less than or equal to 1.3. In certain embodiments, the total volume of each body is , at least 0.25 cm 3 , or at least 0.3 cm 3 , or at least 0.5 cm 3 , or at least 0.7 cm 3 , or at least 1 cm 3 , or at least 5 cm 3 , Or at least 10 cm 3 , or at least 12 cm 3 In another embodiment, The total volume of each body is 20 cm 3 Less than or equal to 15cm 3 Less than or equal to 10cm 3 Below, again is 5cm 3 Less than or equal to 1cm 3 Less than or equal to 0.5cm 3 Less than or equal to 0.3cm 3 Below The PCV value can be a number between any of the minimum and maximum values ​​listed above. Cut.

[0047] In another embodiment, the present disclosure is directed to a plurality of abrasive articles, each abrasive article of the plurality of articles. As described above, the device may include a substrate and a plurality of bodies attached to the substrate. The porosity content variation (PCV) of all the bodies of several abrasive articles may be 1.3 or less. In certain embodiments, the plurality of abrasive articles comprises at least three abrasive articles, or at least five abrasive articles. abrasive articles, or at least 10 abrasive articles, or at least 20 abrasive articles, or at least There may be at least 30, or at least 50, abrasive articles, each abrasive article attached to a backing. The device may include at least 45 bodies attached thereto.

[0048] The abrasive article may be made of an oxide, a carbide, a nitride, a boride, or any combination thereof. A material removal operation is performed on a wafer comprising a silicon or ceramic material selected from the group consisting of The present invention can be configured as follows.

[0049] In one particular aspect, a material removal operation on a silicon carbide wafer or a silicon carbide ingot is performed. The work is carried out using an abrasive article to obtain a polishing surface roughness of 50 Å or less, e.g., 40 Å or less, 30 Å or less, 2 Obtaining an average surface roughness Ra of 5 Å or less, 20 Å or less, 15 Å or less, or 10 Å or less can be done.

[0050] In certain embodiments, the abrasive article is suitable for precision grinding with low subsurface damage under low forces. The fixed abrasive vertical spindle (FAVS) is In one embodiment, the abrasive article has a thickness variation of at least 2 microns with a total thickness variation of 2 microns or less. It can be adapted to remove material from silicon carbide wafers with a diameter of 0.1 mm. Meanwhile, the grinding performance can have a G-ratio of 1.0 or less at 25 lbs of force.

[0051] Many different aspects and embodiments are possible. After reading this specification, those skilled in the art will understand that these aspects and embodiments are It will be understood that these are merely illustrative examples and are not intended to limit the scope of the invention. The embodiment may be according to any one or more of the embodiments listed below.

[0052] Embodiments: Embodiment 1. An abrasive article comprising a body including a binder material, abrasive particles, and a plurality of pores. the bond material comprises a vitreous material, the abrasive particles are contained in the bond material, and the superabrasive The main body contains at least 40% and no more than 70% by volume of fine particles, based on the total volume of the main body. Porosity: at least 10% by weight and no more than 94% by weight of abrasive particles based on the total weight of the body Content, average particle size of abrasive particles of at least 0.05 microns and less than 5 microns (D50 ), The average pore size of the plurality of pores is at least 0.1 microns and not more than 5 microns ( D50), or any combination thereof. Embodiment 2. An abrasive article comprising a body including a binder material, abrasive particles, and a plurality of pores. The bonding material includes a vitreous material, and further, abrasive particles are contained in the bonding material, and The abrasive material comprises an abrasive particle having an average particle size of at least 0.1 microns and no more than 5 microns. (D50), and the body further comprises an abrasive in an amount of at least 15% by weight based on the total weight of the body. An abrasive article comprising particles. Embodiment 3. An abrasive article comprising a body including a binder material, abrasive particles, and a plurality of pores. the bond material comprises a vitreous material, the abrasive particles are contained in the bond material, and the superabrasive The abrasive particles have an average particle size of at least 0.1 microns and no more than 5 microns (D5 0), and the porosity of the body is at least 40 volume % and at least 70 volume %, based on the total volume of the body. % or less, and the porosity is at least 0.1 microns and the average pore size is not more than 5 microns. The abrasive article defines a gap. Embodiment 4. An abrasive article comprising a substrate and a plurality of bodies attached to the substrate. Each of the plurality of bodies includes abrasive particles contained in a binder material including a vitreous material. , the plurality of bodies includes a plurality of pores, and the normalized porosity content variation (PC V) value is 1.3 or less. Embodiment 5. A batch of bodies comprising a plurality of bodies, each body of the plurality of bodies being made of glass. abrasive particles contained in a binder material having a plurality of pores, the binder material comprising: At least 0.45 cm 3 Porosity Content Variation (PCV) value of multiple bodies having a total volume of However, the batch of the main unit is 1.3 or less. Embodiment 6. The plurality of bodies is at least 15 bodies, or at least 30 bodies. or at least 40 bodies, or at least 45 bodies, or at least 50 bodies body, or at least 100 bodies, or at least 150 bodies, or at least 6. The plurality of bodies of embodiment 4 or 5, comprising 200 bodies. Embodiment 7. The PCV value of the plurality of bodies is 1.2 or less, or 1.0 or less, or 0.8 or less. or 0.6 or less, or 0.4 or less, or 0.3 or less, or 0.2 or less, A plurality of main bodies according to any one of aspects 4 to 6. Embodiment 8. The total volume of each of the plurality of bodies is at least 0.03 cm 3 , or less At most 0.05cm 3 , or at least 0.1 cm 3 , or at least 0.2 cm 3 ,also is at least 0.25 cm 3 , or at least 0.3 cm 3 , or at least 0.5 cm 3 , or at least 0.7 cm 3 , or at least 1 cm 3 , or at least 5 cm 3 , Or at least 10 cm 3 , or at least 12 cm 3 Any of embodiments 4 to 7, Or multiple units as described in one. Embodiment 9. The total volume of each of the plurality of bodies is 20 cm 3 Less than or equal to 15cm 3 below , or 10 cm 3 Less than or equal to 5cm 3 Less than or equal to 1cm 3 Less than or equal to 0.5cm 3 below, or 0.3 cm 3 A plurality of bodies according to any one of embodiments 4 to 7, which are as follows: Embodiment 10. A plurality of abrasive articles, each abrasive article of the plurality of abrasive articles being an embodiment A plurality of abrasive articles comprising a plurality of bodies according to any one of 4 to 9. Embodiment 11. The amount of the plurality of abrasive articles is at least 5 abrasive articles, or at least 10 abrasive articles, or at least 20 abrasive articles, or at least 30 abrasive articles or at least 50 abrasive articles. Embodiment 12. The porosity content variation (PCV) value of all the bodies of the plurality of articles is 1.3 12. A plurality of abrasive articles according to embodiment 10 or 11, wherein: Embodiment 13. The abrasive particles are diamond, cubic boron nitride, or a combination thereof. 13. The abrasive article according to any one of embodiments 1 to 12, comprising a combination of Embodiment 14. The abrasive article of embodiment 13, wherein the abrasive particles comprise diamond. Embodiment 15. The method of embodiment 14, wherein the abrasive particles consist essentially of diamond. Abrasive articles. Embodiment 16. The body has at least 40% and at least 70% by volume of the total volume of the body. 6. The abrasive article of any one of embodiments 2, 4, or 5, comprising the following porosity: Embodiment 17. The porosity of the body is at least 41% by volume relative to the total volume of the body; is at least 42% by volume, or at least 43% by volume, or at least 44% by volume, or At least 45% by volume, or at least 46% by volume, or at least 47% by volume, or At least 48%, or at least 49%, or at least 50% by volume. The abrasive article of any one of embodiments 1, 3, and 13. Embodiment 18. The porosity of the main body is 65% by volume or less, or 60% by volume or less, or 58% by volume or less. % or less by volume, or 56% or less by volume, or 55% or less by volume, or 54% or less by volume, or 53% or less by volume % or less by volume, or 52% or less by volume, or 51% or less by volume, or 50% or less by volume. 17. The abrasive article of any one of embodiments 1, 3, and 16. Embodiment 19. The porosity is at least 45% by volume and not more than 60% by volume, or at least 50% by volume and not more than 58% by volume, or at least 53% by volume and not more than 57% by volume 20. The abrasive article of claim 17 or 18. Embodiment 20. The body has an average pore size of at least 0.1 microns and no more than 5 microns. 6. The method of any one of claims 2, 4, and 5, comprising a plurality of pores having a size (D50) of The abrasive article described above. Embodiment 21. The pores are at least 0.3 microns, or at least 0.4 microns. , or at least 0.5 microns, or at least 0.8 microns, or at least 1 mm clonal, or at least 1.5 microns, or at least 2 microns average pore size ( 21. The abrasive article of embodiment 1, 3, or 20, having a tensile strength of 1000 nm (D50). Embodiment 22. The pores are 4 microns or less, or 3 microns or less, or 2.5 microns or less. or less than 2.0 microns, or less than 1.5 microns, or less than 1.3 microns, or has an average pore size (D50) of 1.0 microns or less, or 0.8 microns or less; 21. The abrasive article of embodiment 1, 3, or 20. Embodiment 23. The plurality of pores are 20 microns or less, or 10 microns or less, or 5 microns or less. Implemented with a D99 value of 0.95 microns or less, or 1 micron or less, or 23. The abrasive article according to any one of embodiments 1 to 22. Embodiment 24. The plurality of pores are 1 micron or less, or 0.5 microns or less, or 0. 24. The method of any one of claims 1 to 23, having a D10-D50 range value of 3 microns or less. The abrasive article described above. Embodiment 25. The plurality of pores are 1 micron or less, or 0.5 microns or less, or 0. 25. The method of any one of claims 1 to 24, having a D50-D90 range value of 4 microns or less. The abrasive article described above. Embodiment 26. At least 95%, for example at least 96%, or at least At least 97%, or at least 98%, or at least 99%, or at least 99. 5%, at least 99.9%, or 100% have pore sizes between 0.1 microns and 1 micron The abrasive article of any one of embodiments 1 to 25, having a groove. Embodiment 27. Any of embodiments 1 to 26, wherein the plurality of pores defines a multimodal size distribution. The abrasive article according to any one of the above. Embodiment 28. The plurality of pores defines a bimodal or trimodal size distribution. 8. The abrasive article according to claim 7. Embodiment 29. The ratio of the porosity (Pt) of the main body to the open porosity (Po) of the main body [Pt:P o] is 1.25 or less, for example, 1.11 or less, or 1.05 or less, or 1.01 or less. 29. An abrasive article according to any one of embodiments 1 to 28. Embodiment 30. The amount of abrasive particles is at least 15% by weight, based on the total weight of the body; or at least 20% by weight, or at least 25% by weight, or at least 30% by weight, or at least 35% by weight, or at least 40% by weight, or at least 45% by weight, or At least 50% by weight, or at least 55% by weight, or at least 60% by weight; 30. The abrasive article according to any one of embodiments 1 to 29. Embodiment 31. The amount of abrasive particles is 95% by weight or less, or 9% by weight or less, based on the total weight of the body. 4% by weight or less, or 93% by weight or less, or 92% by weight or less, or 90% by weight or less, or 8 5% by weight or less, or 80% by weight or less, or 70% by weight or less, or 65% by weight or less, or 6 0% by weight or less, or 55% by weight or less, or 50% by weight or less, or 45% by weight or less, or 4 31. The abrasive article of any one of embodiments 1 to 30, wherein the abrasive content is 0% by weight or less. Embodiment 32. The amount of the bonding material is at least 5% by weight, based on the total weight of the body. At least 6% by weight, or at least 7% by weight, or at least 10% by weight, or at least At least 15% by weight, or at least 20% by weight, or at least 25% by weight, or at least 30% by weight. Embodiment 33. The amount of bonding material is 93% by weight or less, based on the total weight of the body, or 9 2% by weight or less, or 91% by weight or less, or 90% by weight or less, or 85% by weight or less, or 8 0% by weight or less, or 70% by weight or less, or 60% by weight or less, or 50% by weight or less, or 40 % by weight or less, or 35% by weight or less, or 30% by weight or less, or 20% by weight or less, or 15 % or less by weight, or 10% or less by weight, or 8% or less by weight, or 6% or less by weight. The abrasive article according to any one of aspects 1 to 32. Embodiment 34. Any of embodiments 1 to 33, wherein the bonding material consists essentially of a vitreous material. The abrasive article according to any one of the above. Embodiment 35. The bonding material of any one of embodiments 1 to 3, wherein the bonding material comprises an amorphous phase and / or a polycrystalline phase. 5. An abrasive article according to any one of claims 4 to 4. Embodiment 36. The weight percent ratio [Cb:Ca] of the binding material [Cb] to the abrasive particles [Ca] is , at least 1:15, or at least 1:12, or at least 1:10, or less The composition according to any one of embodiments 1 to 35, wherein the ratio of Polished items. Embodiment 37. The weight percent ratio [Cb:Ca] of the binding material [Cb] to the abrasive particles [Ca] is , 10:1 or less, or 1:1 or less, or 1:5 or less, or 1:10 or less. 37. The abrasive article according to any one of 1 to 36. Embodiment 38. The weight percentage ratio of the binding material [Cb] to the abrasive particles [Ca] [Cb: Ca] is in the range of 1:15 to 10:1, 1:15 to 1:4, or 1:15 to 1:10 38. The abrasive article of embodiment 36 or 37, wherein Embodiment 39. The body has a density of at least 1.3 g / cm 3 , or at least 1.35 g / cm 3 , or at least 1.40 g / cm 3 , or at least 1.42 g / cm 3 or At least 1.44g / cm 3 , or at least 31.46 g / cm 3 , or at least 1.48g / cm 3 39. The abrasive article of any one of embodiments 1 to 38, having a density of . Embodiment 40. The body is 1.6 g / cm 3 or less than 1.55g / cm 3 The following, or 1.50g / cm 3 or less than 1.48g / cm 3 or less than 1.45g / cm 3 below 40. The abrasive article of any one of embodiments 1-39, having a density. Embodiment 41. The body has a normalized defect amount (nDFA) of 5 or less, or 3 or less, or 1 or less. ), and the nDFA is a particle agglomerate per mm2 having a diameter size of 50 microns or more. 41. The abrasive article of any one of embodiments 1-40, wherein the total amount of the agglomerates is 100%. Embodiment 42. A method for manufacturing a semiconductor device, comprising the steps of: 41. The abrasive article of embodiment 40. Embodiment 43. The body has a normalized defect amount (nDFA) of 5 or less, or 3 or less, or 1 or less. ), and the nDFA is a particle agglomerate per mm2 having a diameter size of 18 microns or more. 41. The abrasive article of any one of embodiments 1-40, wherein the total amount of the agglomerates is 100%. Embodiment 44. An embodiment of a method for manufacturing a semiconductor device, comprising the steps of: 44. The abrasive article of embodiment 43. Embodiment 45. Any one of embodiments 1 to 44, wherein the body is essentially free of ceria. The abrasive article according to any one of claims 1 to 5. Embodiment 46. An abrasive article according to embodiment 45, wherein the body does not contain ceria. Embodiment 47. The material of the body is at least 70, or at least 73, or at least and a Shore D hardness according to ASTM D2240 of at least 75, or at least 77. The abrasive article according to any one of aspects 1 to 46. Embodiment 48. The material of the body is at least 10GP according to ASTM E1876 a, or at least 11 GPa, or at least 12 GPa, or at least 13 GPa or any of the preceding claims 1 to 47, comprising an elastic modulus (EMOD) of at least 14 GPa. 1. The abrasive article according to claim 1. Embodiment 49. The abrasive article is an oxide, a carbide, a nitride, a boride, or any of these. A material on a wafer comprising a silicon or ceramic material selected from the group consisting of a combination of The polishing method according to any one of the first to fourth embodiments, which is configured to perform a polishing operation. Goods. Embodiment 50. An abrasive article configured to perform a material removal operation on a silicon carbide wafer. 50. The abrasive article of embodiment 49, wherein Embodiment 51. The abrasive article has a thickness of 30 Å or less, or 25 Å or less, or 20 Å or less, or 1 Perform material removal operations on silicon carbide wafers to a surface roughness Ra of 5 Å or less, or 10 Å or less 51. The abrasive article of embodiment 50, adapted for: Embodiment 52. The abrasive article has a thickness of at least 200 mm with a total thickness variation of 2 microns or less. 50. The method of claim 50, wherein the silicon carbide wafer is adapted to remove material from the silicon carbide wafer having a diameter. Or an abrasive article as described in 51. Embodiment 53. An embodiment in which the bodies are attached to the substrate by an adhesive. 4 and 6 to 52. An abrasive article according to any one of the above. Embodiment 54. The material of the substrate according to any one of embodiments 4 and 6 to 53, wherein the material includes aluminum or steel. 13. The abrasive article according to claim 12, Embodiment 55. The plurality of bodies includes at least 45 bodies attached to a substrate. 55. The method of any one of embodiments 4 and 6 to 54, wherein the substrate has a diameter of 11 inches or less. The abrasive article described above. Embodiment 56. The average particle size (D50) of the abrasive particles is at least 0.1 microns, or At least 0.3 microns, or at least 0.4 microns, or at least 0.5 microns ron, or at least 0.8 microns, or at least 1 micron, or at least 1. 5 microns, or at least 2 microns, or at least 3 microns. 55. An abrasive article according to any one of claims 1 to 55. Embodiment 57. The average particle size (D50) of the abrasive particles is 5 microns or less, or 4 microns or less. or less than 3 microns, or less than 2.5 microns, or less than 2.0 microns, or less than 1 0.5 microns or less, or 1.3 microns or less, or 1.0 microns or less, or 0.9 microns 0.05 microns or less, or 0.8 microns or less, or 0.7 microns or less, or 0.6 microns or less The abrasive article of any one of embodiments 1 to 56, wherein Embodiment 58. A method of forming an abrasive article, comprising: forming a body, the forming of the body comprising: Providing a powder mixture comprising abrasive particles and a binding material, the binding material being glass providing a quality material; Packing the powder mixture into a mold; cold pressing to form a cold pressed body having a predetermined volume; Heating the cold pressed body to a maximum heating temperature of at least 600°C to form the body. and wherein the abrasive particles comprise a superabrasive material and are at least 0.05 microns and less than 5 microns in diameter. The method has a particle size of less than or equal to Kron. Embodiment 59. The powder mixture has a moisture content of 3% by weight or less, based on the total weight of the powder mixture. 59. The method of embodiment 58, comprising an amount Embodiment 60. The cold pressing is performed at a temperature of at least 20°C, or at least 25°C, or less. 60. The method according to claim 58 or 59, wherein the reaction is carried out at a temperature of at least 30° C., or at least 40° C. method. Embodiment 61. The cold pressing is performed at 80° C. or less, or 60° C. or less, or 50° C. or less, or 61. The method of any one of embodiments 58-60, wherein the method is carried out at a temperature of 40° C. or less. Embodiment 62. The cold pressing is at least 40 MPa, or at least 100 MPa. or at least 120 MPa. The method described. 63. The cold press is 150 MPa or less, or 130 or less, or 125 MPa or less. 63. The method of any one of embodiments 58 to 62, wherein the pressure is less than or equal to a. Embodiment 64. Filling the mold comprises pouring the powder mixture into the mold in at least two steps. and pre-compacting the powder mixture to remove trapped air. The method according to any one of embodiments 58 to 63, comprising: Embodiment 65. Filling the mold with the powder mixture comprises at least three steps. 65. The method of embodiment 64. Embodiment 66. Filling the mold with a powder mixture comprises powdering the powder mixture to a tap density of the powder mixture. 66. The method of embodiment 64 or 65, comprising precompressing the powder mixture. Embodiment 67. The tap density of the powder in the mold is at least 0.45 g / cm 3 or At least 0.50g / cm 3 , or at least 0.52 g / cm 3 , or at least 0 .54g / cm 3 67. The method of embodiment 66, wherein Embodiment 68. The predetermined volume of the cold-pressed body is at least 1.3 g / cm 3 or At least 1.35g / cm 3 , or at least 1.40 g / cm 3 , or at least one .42g / cm 3 , or at least 1.44 g / cm 3 , or at least 1.46 g / c m 3 68. The method of any one of embodiments 58 to 67, wherein the density after heating corresponds to Embodiment 69. The specified volume of the cold press body is 1.6 g / cm 3 Less than or equal to 1.5 5g / cm 3 or less than 1.50g / cm 3 or less than 1.45g / cm 3 After heating as follows The method according to any one of embodiments 58 to 68, wherein the density corresponds to Embodiment 70. The maximum heating temperature is at least 620°C, or at least 650°C, or Any of embodiments 58 to 69, wherein the temperature is at least 680° C., or at least 700° C. The method described in one. Embodiment 71. The maximum heating temperature is 850°C or less, or 800°C or less, or 750°C or less The method of any one of embodiments 58 to 70, wherein Embodiment 72. The abrasive particles of any one of embodiments 58 to 7, wherein the abrasive particles consist essentially of diamond particles. 1. The method according to any one of claims 1 to 1. Embodiment 73. The powder mixture has an average particle size (D50) of at least 0.5 microns, or is at least 0.6 microns, or at least 0.8 microns, or at least 1 micron The method of any one of embodiments 58 to 72, wherein the Embodiment 74. The average particle size (D50) of the powder mixture is 2 microns or less, or 1.5 microns or less. 74. Any one of embodiments 58 to 73, wherein the particle size is less than or equal to 1.0 microns. How to. Embodiment 75. The D90 value of the powder mixture is 7 microns or less, or 5 microns or less, or 75. The method of any one of embodiments 58-74, wherein the thickness is 4 microns or less. Embodiment 76. The D99 value of the powder mixture is 15 microns or less, or 10 microns or less. 76. The method of any one of embodiments 58-75, wherein the thickness is 0.01 to 0.9 microns or less. Embodiment 77. Any of embodiments 58 to 76, wherein the powder mixture further comprises an organic binder. or one of the methods described above. Embodiment 78. Organic binders include polyethers, phenolic resins, and epoxy resins. , polyester resin, polyurethane, polyester, polyimide, polybenzimidazole 78. The method of claim 77, further comprising the step of: Method of posting. Embodiment 79. The method of embodiment 78, wherein the organic binder comprises a polyether. Embodiment 80. An embodiment in which the polyether comprises polyethylene glycol (PEG). 79. The method according to claim 79. Embodiment 81. The amount of organic binder is at least 0.01% by weight, based on the total weight of the powder mixture. 8% by weight, or at least 1% by weight, or at least 1.5% by weight, or at least 2. 0% by weight, or at least 3% by weight, according to any one of embodiments 78 to 80. method. Embodiment 82. The amount of organic binder is 10% by weight or less, based on the total weight of the powder mixture. % or less by weight, or 5% or less by weight, or 3% or less by weight, Method of posting. Embodiment 83. The molecular weight of PEG is 18,000 or less, or 15,000 or less, or 10,000 or less, or 9,000 or less, or 8,000 or less, or 7,000 or less , The method according to embodiment 80. Embodiment 84. The molecular weight of PEG is at least 1000, or at least 3000, or at least 5000, or at least 7000, or at least 8000. 81. The method of embodiment 80. Embodiment 85. Any of embodiments 58 to 84, wherein the powder mixture is essentially free of ceria. The method according to any one of the above. Embodiment 86. The method of embodiment 85, wherein the powder mixture does not contain ceria. Embodiment 87. After heating, the body is essentially composed of diamond particles and a vitreous bonding material. The method according to any one of embodiments 58 to 86, Embodiment 88. The method of embodiment 5, further comprising cutting the body into a plurality of bodies after heating. 8. The method according to any one of claims 8 to 87. Embodiment 89. The method of embodiment 8 further comprising attaching the plurality of bodies to a substrate with an adhesive. 8. The method according to claim 8. Embodiment 90. The porosity content variation (PCV) value of the plurality of bodies is 1.3 or less. The method according to embodiment 88 or 89. EXAMPLES

[0053] Example 1 Ten main body samples were prepared using raw powder having a particle size distribution as shown in FIG. The raw powder was approximately 91.5 wt. % with an average particle size (D50) of approximately 0.5 microns. % diamond particles, 7.0% by weight of a vitreous material with an average particle size of 2.5 microns %, and 1.5 wt. % of an organic binder (polyethylene glycol). It was a final mixture.

[0054] Approximately 0.543g / cm 3 The powders are mixed and mixed to obtain the desired tap density. In total, 47.5g of raw powder was added to the mold in three steps. The mold was filled.

[0055] After filling the mold, it was closed and the precalculated volume was 33 cm 3 The powder is then cooled at room temperature. The pressure applied was approximately 9 tons / inch for approximately 10 seconds. 2 (124MPa) After cold pressing, the press body was removed from the mold and transferred to an oven. Heating was performed at a heating rate of 1°C / min to 515°C, followed by a heating rate of 2°C / min to a temperature of 700°C. The heating was performed at 400°C and maintained at 700°C for 3 hours.

[0056] A series of 10 sintered bodies (samples 1 to 10) were prepared by the above process. Sample S The fabrication of the body of 1 was sufficiently repeatable. This resulted in the voids between the 10 samples. The standard deviation of the porosity values ​​was 0.122, which is referred to herein as the porosity content variation (PCV The measured density (weight divided by volume) of each body after heating and cooling to room temperature. of) is 1.44g / cm 3 It was.

[0057] [Table 1]

[0058] All pore size distributions described herein are determined according to ASTM D4404-10. and measured with a Micromeritics AutoPore IV mercury porosimeter. The porosity was measured via the water saturation of the pores by the Archimedes method.

[0059] The porosity measurement was carried out by placing the sample body in an oven at 80°C for about 2 hours and then removing it from the oven. Immediately after taking out the dry weight (W bd The dry weight was measured. After the measurement, the device was placed in a chamber containing distilled water and immersed in the water to measure the weight of the device due to water absorption. Increase in quantity (W ba) was measured using a balance. After a stable weight of the body in water was obtained, the body was placed in the water. The body is then removed from the container, dried with a damp cloth to remove excess water, and the body is immediately reweighed to remove any excess water. (W bs The weight of the body saturated with water was obtained. The porosity was calculated by the following formula: P(% )=(V body wV body true / V body w)×100, where V b ody w =W bs -W ba / d w and V true =W bd / d theo and d th eo is the theoretical density of the body without pores. Based on the amount of bond and vitreous bonding material, excluding pore volume, 3.21 g / cm 3 The value of The density of the body was calculated based on the value obtained during the Archimedes method. The dry weight of the main body (W bd ) to the volume of the body (V body w ) by dividing did.

[0060] The porosity values ​​measured via the Archimedes method and listed in Tables 1 and 2 were Regarding the open porosity of the sample, this means the pores accessible to water. The percentage of the total volume of the body (not reached by the The closed porosity was less than 1% by volume. , actual density, and measured "open" porosity (via the Archimedes method described above). The calculations were made based on the above.

[0061] Another series of nine body specimens (specimens S11 to S19) were prepared by adding the powder material to the mold in one step. The powder was mixed in the same manner as the samples in Table 1, except that the tap density was not increased and the powder was not mixed to its tap density. The porosity and density obtained are shown in Table 2.

[0062] From Table 2, the obtained porosity has a standard deviation of 1.47 (corresponding to a PCV value of 1.47 ), which had a much larger porosity variation (approximately 49%–54%). By measuring the pore size distribution of the body, it was found that more than 3% of the pore volume was made up of pores larger than 1 micron. It was also possible to observe that the pores were caused by the cold pressing and heating. The density of the body also varies widely, from 1.48 to 1.62 g / cm 3 The range was.

[0063] [Table 2]

[0064] Example 2 Microstructural investigation. SEM of a cross-cut section of Sample 9 of Example 1 to illustrate the microstructure of the body. The image is shown in FIG. 4A. The body is clear without any larger agglomerates of particles and larger It can be seen that there were no significant pores or cracks and the structure was very homogeneous. Image analysis, performed using ageJ software, demonstrated that the transverse section of the body shown in Figure 4A 1mm 2 Agglomerates (referred to herein as defects) having a diameter size of 50 microns or more within an area of (also called

[0065] Further, FIG. 4A focuses on detecting defects having a size of 18 microns or more. Analysis of the image shows that the body is 1mm2 It is clear that the product contains less than five defects within the area of ​​the An average of three images at different positions was taken for analysis.

[0066] In contrast, the same types and amounts of starting components (diamond particles, vitreous bonds, organic bonds) agent) but was not prepared by an embodiment of the method disclosed herein; A comparison sample is shown in FIG. 2B. It can be seen that the microstructure is much more heterogeneous. Image analysis of the microstructure of the sample shown in Figure 2B reveals diameter sizes of more than 50 microns. Has 1mm 2 The amount of defects was determined to be 200 per unit.

[0067] The body of the sample shown in FIG. 4A was micrometer-sized according to ASTM D4404-10. The pore size was measured using a eritics AutoPore IV mercury porosimeter. Further analysis was performed using the distribution of the mean.

[0068] A graph of the pore size distribution is shown in FIG. 2A, which shows D10, D50, D90, and D99. The measured pore size distribution confirms the homogeneous structure of the body shown in Figure 4A. The body has a narrow pore size distribution, with all pores smaller than 1 micron up to the D99 value. It can be seen that it was.

[0069] [Table 3]

[0070] Example 3 Mechanical properties with various porosities. Various bodies with porosities of 52 to 59 percent were prepared and the mechanical properties Shore D hardness The same volume was poured into the mold as described in Example 1 and the elastic modulus (EMOD) was tested. By varying the amount of powder mixture filled into the die while pressing, different voids can be obtained. A body having porosity was formed.

[0071] The Shore D hardness measurements of the main body samples are shown in Figure 7. The highest Shore D hardness was about 53. It can be seen that the body has a porosity of 1.0%. The Shore D hardness was measured according to ASTM-D224 Measured by 0.

[0072] A similar trend could be observed for the elastic modulus (EMOD). The best value was about The EMOD was also observed at a porosity of 53%, but as the porosity increased further, the EMOD decreased. OD was determined according to ASTM-E1876.

[0073] Example 4 Assembling the grinding wheel. The samples S1 to S10, which are sintered bodies produced according to the description of Example 1, are used herein. Cut the body into smaller body segments, also called bodies, and each body segment is As shown, it is approximately 0.5 inches long, 0.125 inches high, and 0.25 inches thick. The mold had a rounded edge and was shaped like a square.

[0074] The body segments are attached to the outer surface of a preformed wheel substrate using an epoxy adhesive. The 48 mounted body cells covered an 11 inch diameter circular substrate area. A drawing of a wheel containing a segment (a plurality of 48 bodies) is shown in FIG.

[0075] The body segment described and shown in this example is merely one non-limiting embodiment. The shapes of the main body segments and the arrangement of the multiple main bodies on the substrate may vary. It will be appreciated that the grinding wheel may be larger than 11 inches. Or it may have a smaller diameter size.

[0076] Example 5 Grinding performance testing. The grinding performance of a representative body (sample S20) with a porosity of 52.8% was compared with that of the over- The grinding performance of the main body (C1) made by overpressing was compared with that of the main body (C2) made by overpressing. The amount of powder was increased and pressed to the same volume. Porosity is 1mm 2 A less homogeneous structure with a defect density of about 22 defects per A further comparative body (C2) having the following structure was tested.

[0077] [Table 4]

[0078] Using the main body samples summarized in Table 4 as segments, a multi-body test was performed as shown in Figure 6. A grinding wheel with the structure of a segment wheel was prepared. The grinding experiment was carried out using the Revasu The grinding was performed using a 7AF-HMG grinding machine and a 4H-N type with a diameter of 6 inches was used as the substrate. Silicon carbide wafers of 1000 nm were used.

[0079] The results summarized in Table 4 show that the wheels made from the overpressed bodies It can be seen that too high a maximum force (over 100 lbs) was required for grinding. The comparative wheel C3 required a lower maximum force of 23 pounds, but the valley depth (the surface of the wafer) was The subsurface induced damage was very high (1192 microns). The wheel of the main body sample S21 had For sample C3, an excellent surface finish was achieved with low surface roughness and approximately 10 times lower valley depth. did.

[0080] The above-described embodiments are directed in particular to bonded abrasive products for precision grinding, which are in accordance with the state of the art It represents a departure from

[0081] Benefits, other advantages, and solutions to problems have been described above with regard to specific embodiments. However, benefits, advantages, solutions to problems, and any benefits, advantages, or solutions that bring Any feature that may render the invention more prominent or prominent may be added to any or all of the important, essential features of the claims. The term "material" should not be construed as a necessary or essential feature of the material. Reference herein to a material is intended to mean at least one material that consists essentially of one or more of the components identified. The term "consisting essentially of" may be interpreted as including at least one embodiment. and excludes all other materials except for small amounts (e.g., impurities) The term "compositions" refers to compositions that do not significantly change the properties of a material. Alternatively, or in certain non-limiting embodiments, the compositions identified herein Any of the above may be essentially free of material not expressly disclosed. The embodiments of the present disclosure include ranges of content of certain components in the materials, and may be used to determine the composition of a given material. It will be understood that component contents total 100%.

[0082] The specification and drawings of the embodiments described herein are provided to provide a general understanding of the structure of the various embodiments. The specification and drawings are intended to provide a solution to the problems described herein. Serves as a comprehensive and comprehensive description of all elements and features of the devices and systems used It is not intended that separate embodiments be provided in combination in a single embodiment. Conversely, various embodiments that are described in the context of a single embodiment for brevity may be combined together. The features may be provided separately or in any subcombination. Reference to a range of values ​​includes every individual value within that range. Many other embodiments are described herein. Without departing from the scope of the present disclosure, Other embodiments may be used such that structural, logical substitutions, or other changes may be made. and can be derived from the present disclosure. Accordingly, the present disclosure is intended to be illustrative and not restrictive. should be regarded as something.

Claims

1. 1. An abrasive article comprising: a body including a binder material, abrasive particles, and a plurality of pores; the bonding material comprises a vitreous material; the abrasive particles are contained within the bond material and include a superabrasive material; The body comprises: A porosity of at least 40 volume percent and no more than 70 volume percent relative to the total volume of the body; At least 10% by weight and no more than 94% by weight of the abrasives relative to the total weight of the body Particle content, The average particle size (D) of the abrasive particles is at least 0.05 microns and not more than 5 microns. ５０）、 an average pore size of said plurality of pores being at least 0.1 microns and no more than 5 microns; Size (D50), or Any combination of them 13. An abrasive article comprising at least one of:

2. 4. The method of claim 3, wherein the porosity of the body is at least 48% by volume and no more than 60% by volume.

2. The abrasive article according to claim 1.

3. The average pore size (D50) of the plurality of pores is 0.9 microns or less.

3. The abrasive article according to claim 1 or 2.

4. The abrasive particles include diamond, cubic boron nitride, or a combination thereof.

4. The abrasive article of claim 1, 2, or 3.

5. 5. The abrasive article of claim 4, wherein the abrasive particles consist essentially of diamond.

6. 4. The abrasive of claim 1, 2 or 3, wherein the bonding material consists essentially of a vitreous material. Polished items.

7. 4. The method of claim 1, 2, or 3, wherein the plurality of pores has a D90 value of 1 micron or less. The abrasive article described above.

8. The amount of the abrasive particles is at least 85% by weight based on the total weight of the body. The abrasive article according to claim 1 , 2 or 3 .

9. The amount of the bonding material is at least 5% by weight and at least 1.0% by weight based on the total weight of the body.

4. The abrasive article of claim 1, 2, or 3, wherein the abrasive content is 5% by weight or less.

10. The bonding material [C ｂ ] of the abrasive particles [C ａ ] to the weight percentage ratio [C ｂ :C ａ ] The abrasive article of claim 1, 2, or 3, wherein the ratio of the abrasive grain diameter to the abrasive grain diameter is in the range of 1:15 to 1:

10.

11. The body includes a normalized defect amount (nDFA) of 5 or less, the nDFA being 18 microns or less. Ron or larger diameter of 1 mm ２ The total amount of particle aggregates per unit area is defined as the total amount of particle aggregates per unit area.

4. The abrasive article of claim 1, 2, or 3.

12. The abrasive article performs the material removal operation on a silicon carbide wafer or a silicon carbide ingot.

4. The abrasive article of claim 1, 2, or 3, configured to:

13. 1. A method of forming an abrasive article, comprising: forming a body, said forming the body comprising: Providing a powder mixture comprising abrasive particles and a binding material, the binding material being providing a glassy material; Filling the powder mixture into a mold; The powder mixture is cold pressed to a predetermined volume to obtain a cold pressed body. And, Heating the cold pressed body to a maximum heating temperature of at least 600° C. and forming The abrasive particles have a particle size of at least 0.05 microns and no more than 5 microns. The method includes a superabrasive material.

14. Filling the mold with the powder mixture to a tap density of the powder mixture. The method of claim 13, comprising precompacting the powder mixture.

15. The average particle size (D50) of the powder mixture is at least 0.5 microns and less than 2 microns.

15. The method of claim 13 or 14, wherein:

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