Robot system and control method

Abstract

To improve positioning accuracy of an end effector.SOLUTION: A driving system includes: a support unit that supports an end effector capable of operating on a workpiece such that the end effector is displaceable; and a second driving unit which is arranged between the support unit and the end effector, and is capable of driving the end effector relative to the support unit with a second stroke smaller than a first stroke of a first driving unit capable of driving the end effector via the support unit.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a drive system. [Background technology]

[0002] Conventionally, there has been disclosed a technology relating to a robot device having a robot arm and an end effector and used for applications such as product assembly (see, for example, Patent Document 1). In the conventional technology described above, it has been difficult to improve the positioning accuracy of the end effector. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] U.S. Pat. No. 4,994,639 Summary of the Invention

[0004] According to a first aspect, there is provided a drive system comprising: a support part that supports an end effector capable of performing work on a workpiece in a displaceable state of the end effector; and a drive part that is disposed between the support part and the end effector and is capable of driving the end effector relative to the support part with a second stroke that is smaller than a first stroke of a first drive part that is capable of driving the end effector via the support part. [Brief description of the drawings]

[0005] [Figure 1] FIG. 1 is a diagram illustrating an example of a configuration of a robot system according to an embodiment of the present invention. [Diagram 2] 1A and 1B are diagrams illustrating an example of a configuration of a connection portion between an arm portion and an end effector in the present embodiment. [Diagram 3] FIG. 2 is a diagram showing an example of an arrangement of linear motors according to the present embodiment. [Figure 4] 5A to 5C are diagrams illustrating an example of position detection of an end effector according to the present embodiment. [Diagram 5] 10A to 10C are diagrams illustrating another example of the position detection of the end effector according to the embodiment. [Figure 6] FIG. 4 is a diagram showing an example of an arrangement of a detection unit according to the present embodiment. [Figure 7] 5A and 5B are diagrams illustrating a specific example of an arrangement of a detection unit according to the present embodiment. [Figure 8] FIG. 4 is a diagram illustrating an example of a detection method of a detection unit of the present embodiment. [Figure 9] FIG. 11 is a diagram showing another example of the arrangement of the detection unit according to the embodiment. [Figure 10] FIG. 2 is a perspective view showing an example of the external configuration of the end effector of the present embodiment. [Figure 11] FIG. 2 is a bottom view showing an example of the external configuration of the end effector of the present embodiment. [Figure 12] FIG. 2 is a side view showing an example of an external configuration of the end effector of the present embodiment. [Figure 13] 1 is a diagram showing an example of a state in which a hand portion of an end effector of the present embodiment is gripping a workpiece; [Figure 14] FIG. 2 is a diagram illustrating an example of a functional configuration of a control device according to the present embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0006] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0007] [Robot system configuration] 1 is a diagram showing an example of the configuration of a robot system 1 according to this embodiment. The robot system 1 includes a robot unit 2, an end effector unit 3, a detection unit 200, and a control device 10. The robot unit 2 includes an arm unit 20 and an arm driving unit 30. The end effector unit 3 includes a support part 41 , a base drive part 50 , a base part 61 , and an end effector 62 . The pedestal portion 61 and the end effector 62 may be collectively referred to as the pedestal-equipped end effector 60. Furthermore, the pedestal-equipped end effector 60 may simply be referred to as the end effector. In addition, in the following description, an example is given in which the base portion 61 and the end effector 62 are configured as separate parts, but this is not limited to this, and the base portion 61 and the end effector 62 may be configured as a single unit. Also, the arm portion 20 and the support portion 41 may be integrally configured. In the following description, the arm portion 20 and the support portion 41 may be collectively referred to as the arm portion 40 with the support portion.

[0008] The detection unit 200 detects the position of the end effector 62. The detection unit 200 may also detect the posture of the end effector 62. The detection unit 200 detects the position and posture of the end effector 62. Here, the position of the end effector 62 refers to the coordinates of the end effector 62 in the space in which the robot unit 2 is installed. The posture of the end effector 62 refers to the direction of the end effector 62 (or the orientation of the end effector 62) at a certain position in the space in which the robot unit 2 is installed. Note that in the following description, the position and posture of the end effector 62 may not be distinguished from each other and may be referred to as the position of the end effector 62 (or the posture of the end effector 62). The control device 10 controls the arm driving unit 30 provided in the robot unit 2 to control the position or the posture, or both, of the robot unit 2 .

[0009] The robot unit 2 of this embodiment is a multi-joint arm type robot. As an example, the robot unit 2 includes five arms (for example, a first arm section 21 to a fifth arm section 25) connected in order by joints. The robot unit 2 includes five arm driving sections 30 (for example, a first arm driving section 31 to a fifth arm driving section 35) corresponding to the five arms. That is, the robot unit 2 includes a multi-joint arm. Note that the robot unit 2 is not limited to a multi-joint arm type robot, and may be a flying object such as an unmanned aerial vehicle (UAV, drone) or a multicopter.

[0010] The arm driving unit 30 includes, for example, a servo motor (not shown) and an arm position detection unit (not shown). The first arm driving unit 31 displaces (e.g., rotates) the first arm unit 21 using a servo motor with reference to the installation surface of the robot unit 2. The first arm driving unit 31 includes a first arm position detection unit 311. The first arm position detection unit 311 detects the amount of displacement (e.g., rotation angle) of the first arm unit 21 with reference to the installation surface of the robot unit 2. The second arm driving unit 32 displaces (e.g., rotates) the second arm unit 22 with respect to the first arm unit 21 by a servo motor. The second arm driving unit 32 includes a second arm position detection unit 321. The second arm position detection unit 321 detects the amount of displacement (e.g., rotation angle) of the second arm unit 22 with respect to the first arm unit 21. The configurations of the third arm driver 33 to the fifth arm driver 35 and the third arm position detector 331 to the fifth arm position detector 351 are the same as those described above, and therefore description thereof will be omitted.

[0011] The end effector 62 has various shapes and functions according to the application of the robot system 1, and is attached to the end of the fifth arm unit 25. The details of the configuration of the connection portion between the arm unit 20 and the end effector 62 will be described with reference to FIG.

[0012] [Configuration of the connection between the arm and the end effector] 2 is a diagram showing an example of the configuration of a connection portion between the arm unit 20 and the end effector 62 in this embodiment. The arm unit 20 (in this example, the fifth arm unit 25) and the end effector 62 are connected via a support unit 41, a base drive unit 50, and a base unit 61. It can also be said that the arm portion 20 and the pedestal-equipped end effector 60 are connected via the support portion 41 and the pedestal drive portion 50 . In the following description, the pedestal-equipped end effector 60 may be simply referred to as the end effector 62, with the description of the pedestal portion 61 omitted. When the description of the pedestal portion 61 is omitted, for example, it will be described that the arm portion 20 and the end effector 62 are connected via the support portion 41 and the pedestal drive portion 50.

[0013] The end effector 62 is connected to the base end portion 601 of the base portion 61 in a detachable or non-detachable manner. The end effector 62 is capable of performing operations on the workpiece WK to be worked on. The end effector can also be said to be a part of the robot that has the function of directly acting on the workpiece. Examples of the end effector 62 include a multi-fingered (or double-fingered) hand capable of gripping the workpiece WK, a processing head for laser processing or ultrasonic processing, a camera, an injector for injecting molten metal / resin or particles for blast processing, a manipulator, an air blower, and the like. The end effector 62 has various shapes and functions according to the application of the robot system 1. For example, the end effector 62A includes a camera 62A1 and a laser irradiation unit 62A2, and has a laser cutter function for cutting a workpiece WK (not shown). In other words, the end effector 62A includes a laser irradiation unit 62A2 (second irradiation unit) that irradiates the workpiece WK with processing light (e.g., laser light) for processing the workpiece WK. The end effector 62B includes a camera 62B1 and a hand unit 62B2, and has a robot hand function of gripping and moving a workpiece WK (not shown). The end effector 62C includes a camera 62C1 and a vacuum unit 62C2, and has a robot hand function of adsorbing and moving a workpiece WK (not shown).

[0014] The support portion 41 has a connection end portion 411. The connection end portion 411 is connected to the arm end portion 251 of the fifth arm portion 25 in a detachable or non-detachable manner. The support portion 41 has a recessed portion. The support portion 41 has the connection end portion 411 on one end side, and has a recessed portion on the other end side. The base driving portion 50 and the intermediate portion 412 are disposed in the recessed portion of the support portion 41.

[0015] That is, the support part 40 includes a connection element that connects to the robot unit 2. An example of the connection element is a connection end part 411.

[0016] The base driving unit 50 (second driving unit) includes a linear motor 500 and displaces the position of the base 61 relative to the connection unit 41. The linear motor 500 is, for example, a voice coil motor, and includes a magnetic field generating unit 501 and a magnetized unit 502. The magnetic field generating unit 501 generates a magnetic field by a driving current supplied thereto. The magnetized unit 502 generates a repulsive force or an attractive force by the magnetic field generated by the magnetic field generating unit 501. The linear motor 500 displaces the base 61 relative to the connection unit 41 by changing the distance between the magnetic field generating unit 501 and the magnetized unit 502 by the repulsive force or the attractive force. As an example, when a repulsive force is generated between the magnetic field generating unit 501 and the magnetized unit 502, the distance between the connection unit 41 and the base 61 increases. Also, when an attractive force is generated between the magnetic field generating unit 501 and the magnetized unit 502, the distance between the connection unit 41 and the base 61 decreases. The magnetic field generating unit 501 is disposed on the support unit 41. The magnetic field generating unit 501 is disposed in a recess formed in the support unit 41. The magnetized unit 502 is disposed on the pedestal unit 61. The magnetized unit 502 is disposed in a recess formed in the pedestal unit 60. Although an example has been given in which the magnetic field generating unit 501 is disposed on the support unit 41 and the magnetized unit 502 is disposed on the pedestal unit 61, the present invention is not limited thereto, and the magnetic field generating unit 501 may be disposed on the pedestal unit 61 and the magnetized unit 502 may be disposed on the support unit 41. The base driving unit 50 can drive the support unit 41 and the base unit 61 (or the base-equipped end effector 60) without contacting each other (that is, in a non-contact state).

[0017] It should be noted that the base driving unit 50 (second driving unit) does not contribute to supporting the weight of the end effector 62. The weight of the end effector 62 is supported by the support unit 40 described above. Here, the robot unit 2 includes an intermediate portion that connects the support portion 40 and the end effector 62 (or the end effector 60 with a pedestal). The intermediate portion 412 supports the weight of the end effector 62. The intermediate portion 412 includes, for example, a damper element 413 and a spring element 414. The intermediate portion 412 includes an elastic member and reduces vibration of the end effector 62. The elastic force of the elastic member may be adjustable. In this case, the robot unit 2 includes an adjustment portion (not shown) that adjusts the elastic force of the elastic member. For example, the elastic member may be an air spring. In this case, the adjustment portion (not shown) is capable of adjusting the air pressure of the air spring, and adjusts the elastic force by adjusting the air pressure of the air spring. The intermediate portion 412 also damps vibrations applied from the outside. The intermediate portion 412 suppresses the displacement of the end effector 62 (or the pedestal-attached end effector 60) due to its own weight. The intermediate portion 412 supports the end effector 62 in the direction of gravity regardless of the posture of the end effector 62 . In addition, the intermediate portion 412 may include an element for reducing vibration of the end effector 62 (for example, a piezoelectric element) in addition to the elastic member.

[0018] Here, one end of the end effector unit 3 (for example, the end connected to the fifth arm section 25) is a fixed end, and the other end (for example, the end on the end effector 62 side) is a free end. The robot unit 2 drives the arm section 20 to change the position and posture of the fixed end with respect to the end effector unit 3. In the end effector unit 3, changes in the position and posture of the fixed end affect the position and posture of the end effector 62, which is the free end. Generally, in the robot unit 2, it is difficult to precisely control the position and posture of the tip of the arm section 20 (i.e., the fixed end with respect to the end effector unit 3) due to the influence of external forces such as vibrations of the floor surface, the weight and rigidity of the arm section 20, the driving force of the arm driving section 30, and the like. In the robot unit 2 of this embodiment, the pedestal driving unit 50 drives the support unit 41 and the pedestal unit 61 (or the pedestal-equipped end effector 60) without contacting them (i.e., in a non-contact state), thereby preventing the influence of displacement in the position and posture of the tip of the arm unit 20 (i.e., the fixed end for the end effector unit 3) from affecting the position and posture of the end effector 62.

[0019] [Modifications of the configuration of the connection part between the arm part and the end effector] The configuration of the connection portion between the arm portion 20 and the pedestal portion 61 (or the pedestal-equipped end effector 60) may have various modifications. When changing the shape or function of the end effector 62, the end effector unit 3, the end effector 62, or the pedestal-equipped end effector 60 may be replaced. When replacing the end effector unit 3, the end effector 62, or the pedestal-equipped end effector 60, the following modifications may be possible depending on the difference in the configuration of the connection portion between the arm portion 20 and the end effector 62. (1) When the arm end 251 and the support part 41 are detachable. In this case, the support part 41, the base driving part 50, and the base-equipped end effector 60 (base part 61 and end effector 62) are assembled in advance. When attaching the pedestal end effector 60 , the combined support part 41 , pedestal drive part 50 and pedestal end effector 60 are connected to the arm end part 251 . (2) The support unit 41 and the base drive unit 50 are detachable. In this case, the arm end 251 of the arm portion 20 and the connection end 411 of the support portion 41 are combined in advance. When attaching the pedestal end effector 60 (the pedestal portion 61 and the end effector 62 ), the pedestal drive portion 50 and the pedestal end effector 60 in an assembled state are connected to the support portion 41 . (3) When the base portion 61 and the end effector 62 are detachable. In this case, the arm end 251 of the arm unit 20 and the connection end 411 of the support unit 41 are pre-assembled. The support unit 41, the base drive unit 50, and the base unit 61 are pre-assembled. When attaching the end effector 62, the end effector 62 is connected to the support part 41, the base drive part 50, and the base part 61 which are in an assembled state. (4) The arm end 251 and the support 41, and the base 61 and the end effector 62 are detachable. In this case, the support portion 41, the base drive portion 50, and the base portion 61 are assembled in advance. When attaching the end effector 62, the end effector 62 is connected to the combined support part 41, pedestal drive part 50, and pedestal part 61. Furthermore, the combined support part 41, pedestal drive part 50, and pedestal-equipped end effector 60 (pedestal part 61 and end effector 62) are connected to the arm end part 251.

[0020] In the following description, the arm section 20 and the support section 41 are also collectively referred to as the arm section with support section 40. For example, in the above-mentioned case (2), when attaching the end effector with pedestal 60, the combined pedestal drive section 50 and the end effector with pedestal 60 (the pedestal section 61 and the end effector 62) are connected to the arm section with support section 40. When the arm section 20 is a multi-joint arm like the robot unit 2 of this embodiment, the arm section with support section 40 is the whole or a part of the multi-joint arm. It can also be understood that a part of the arm portion 20 and the support portion 41 function as a support portion.

[0021] The support portion 41 supports the end effector 62 (or the pedestal-attached end effector 60) in a state in which the end effector 62 (or the pedestal-attached end effector 60) is displaceable. As described above, the support part 41 is driven by the arm driving part 30 (first driving part). That is, the arm driving part 30 (first driving part) can drive the end effector 62 (or the pedestal-attached end effector 60) via the support part 41. In addition, the pedestal driving unit 50 (second driving unit) is disposed between the support unit 41 and the end effector 62 (or the pedestal-mounted end effector 60), and drives the end effector 62 (or the pedestal-mounted end effector 60) relative to the support unit 41 based on the position of the end effector 62 (or the pedestal-mounted end effector 60) detected by the detection unit 200. In the description of this embodiment, driving the end effector 62 also includes driving the pedestal end effector 60. Moreover, displacing the end effector 62 also includes displacing the pedestal end effector 60. Here, the magnitude of displacement when the arm driving unit 30 drives the end effector 62 is also referred to as the first stroke. Also, the magnitude of displacement when the base driving unit 50 drives the end effector 62 is also referred to as the second stroke. The magnitude of displacement when the base driving unit 50 drives the end effector 62 is smaller than the magnitude of displacement when the arm driving unit 30 drives the end effector 62. In other words, the second stroke is smaller than the first stroke. In other words, the arm driving unit 30 (first driving unit) can drive the end effector 62 with a first stroke via the support unit 41. Also, the base driving unit 50 (second driving unit) can drive the end effector 62 with respect to the support unit 41 with a second stroke that is smaller than the first stroke. The stroke here can also be expressed as the movement range, movement width, length of the movement trajectory, movable range, etc. of the end effector 62.

[0022] As described above, the arm section 20 of this embodiment includes five arms (for example, the first arm section 21 to the fifth arm section 25) and can drive the support section 41 in six degrees of freedom with respect to the contact surface of the first arm section 21. In other words, the arm driving section 30 (first driving section) can drive the end effector 62 in six degrees of freedom with a first stroke via the support section 41.

[0023] In the following description, the support unit 41, the base drive unit 50, and the base unit 61 are also collectively referred to as the adapter 70. For example, when attaching the end effector 62 in the above-mentioned case (4), the end effector 62 is connected to the adapter 70 (i.e., the support unit 41, the base drive unit 50, and the base unit 61 in an assembled state). Furthermore, the adapter 70 and the end effector 62 are connected to the arm end 251. For example, the adapter 70 includes a support part (e.g., support part 41) having a first connection element (e.g., connection end part 411) connectable to the robot unit 2 and supporting the end effector 62 in a state in which the end effector 62 is displaceable, a base part 61 having a second connection element (e.g., base end part 601) connectable to the end effector 62, and a base drive part 50 arranged between the support part (e.g., support part 41) and the base part 61 and capable of electromagnetically driving the end effector 62 via the base part 61 relative to the support part (e.g., support part 41). The adapter 70 may have an intermediate portion 412. The intermediate portion 412 is disposed between the support portion 41 and the base portion 61.

[0024] [Linear motor layout example] An example of the arrangement of the linear motors 500 in the base driving unit 50 will be described with reference to FIG. 3 is a diagram showing an example of the arrangement of the linear motors 500 in this embodiment. In this example, the base drive unit 50 is equipped with six linear motors 500. When necessary in the following description, a three-dimensional orthogonal coordinate system of the X-axis, Y-axis, and Z-axis is used as the coordinate system of the adapter 70 (or the connection unit 41 and the base unit 61). Here, the Z-axis is an axis connecting the end effector 62 and the workpiece WK that is the target of action of the end effector 62.

[0025] In the pedestal driving unit 50, linear motors 500 (first linear motor 510, second linear motor 520, and third linear motor 530) are disposed at three points on the XY plane of the pedestal unit 61. In the pedestal driving unit 50, linear motors 500 (fourth linear motor 540 and fifth linear motor 550) are disposed at two points (points P4 and P5) on the XZ plane of the pedestal unit 61. In addition, in the pedestal driving unit 50, a linear motor 500 (sixth linear motor 560) is disposed at one point on the YZ plane of the pedestal unit 61.

[0026] Here, the arrangement of the linear motor 500 will be described more specifically when the coordinates of the center of gravity G of the base portion 61 are (x2, y2, z1). The first linear motor 510, the second linear motor 520, and the third linear motor 530 may be disposed at the vertices of a triangle (e.g., an equilateral triangle) on an XY plane centered on an axis in the Z-axis direction (Z-direction central axis AxZ) passing through the center of gravity G of the pedestal 61. For example, the first linear motor 510 is disposed at a point P1 (x2, y3, z0), the second linear motor 520 at a point P2 (x3, y1, z0), and the third linear motor 530 at a point P3 (x1, y1, z0). The fourth linear motor 540 and the fifth linear motor 550 may be disposed at positions opposite to each other across an axis in the Y-axis direction (Y-direction central axis AxY) passing through the center of gravity G of the base portion 61 in the XZ plane. For example, the fourth linear motor 540 is disposed at a point P4 (x3, y0, z1), and the fifth linear motor 550 is disposed at a point P5 (x1, y0, z1). The sixth linear motor 560 may be disposed at a position on an axis in the X-axis direction (X-direction center of gravity axis AxX) that passes through the center of gravity G of the pedestal portion 61. For example, the sixth linear motor 560 is disposed at a point P6 (x0, y2, z1). It should be noted that "linear motor 500 is disposed at point P" includes the meaning that "linear motor 500 is disposed at a position where the force generated by linear motor 500 is applied to point P."

[0027] [Linear motor drive example] The pedestal driving unit 50 displaces the position of the pedestal part 61 relative to the connection part 41 by generating the same repulsive force (or attractive force) in the linear motor 500. The displacement of the pedestal part 61 by the pedestal driving unit 50 only needs to have at least one degree of freedom. The pedestal driving unit 50 reduces vibrations generated in the end effector 62 (or the pedestal-equipped end effector 60).

[0028] When the six linear motors 500 are arranged as described above, the base drive unit 50 can provide displacement of a total of six degrees of freedom, that is, three degrees of freedom in the X, Y and Z axial directions and three degrees of freedom around the X, Y and Z axes, to the base 61. In other words, the base drive unit 50 can electromagnetically drive the end effector 62 in the six degrees of freedom directions relative to the support unit 41.

[0029] The intermediate portion 412 described above can support the end effector 62 in six degrees of freedom directions. More specifically, the intermediate portion 412 has six support elements, and by adjusting the distribution of the support force among the six support elements, can support the end effector 62 in six degrees of freedom directions, including a first direction which is the direction of gravity, a second direction perpendicular to the first direction, a third direction perpendicular to the first direction and the second direction, a fourth direction about the first direction as an axis, a fifth direction about the second direction as an axis, and a sixth direction about the third direction as an axis. In this case, the intermediate portion 412 can support the end effector 62 using different support elements among the six support elements depending on the posture of the end effector 62. Specifically, the intermediate portion 412 has a first support element that supports at least a portion of the weight of the end effector 62 in the direction of gravity when the end effector 62 is in a first posture, and a second support element that supports at least a portion of the weight of the end effector 62 in the direction of gravity when the end effector 62 is in a second posture that is different from the first posture. Although an example has been described in which intermediate portion 412 has six support elements, the present invention is not limited to this, and intermediate portion 412 may have, for example, three support elements. The number of support elements in intermediate portion 412 may be one or more. The number of support elements included in the intermediate section 412 may be the same as or different from the number of drive elements (e.g., linear motors 500) included in the base drive section 50. The number of support elements included in the intermediate section 412 may be less than or greater than the number of drive elements included in the base drive section 50.

[0030] The intermediate portion 412 is inserted into a recess formed on one of the support portion 41 and the pedestal end effector 60 (or the pedestal portion 61) and is positioned between the recess and a protrusion formed on the other of the support portion 41 and the pedestal end effector 60 (or the pedestal portion 61). In this case, the base driving unit 50 (second driving unit) is disposed between the recessed portion and the protruding portion.

[0031] Below, specific examples of displacing the end effector 62 in each direction will be described. (1) Displacement in the X-axis direction The base driving section 50 drives the sixth linear motor 560 to apply a displacement force to a point P6 (x0, y2, z1) of the base section 61. As a result, the base section 61 is displaced in the X-axis direction. (2) Displacement in the Y-axis direction The base driving unit 50 simultaneously drives the fourth linear motor 540 and the fifth linear motor 550 by the same amount to apply a displacement force to the point P4 (x3, y0, z1) and the point P5 (x1, y0, z1). As a result, the base unit 61 is displaced in the Y-axis direction. (3) Displacement in the Z-axis direction The base driving unit 50 simultaneously drives the first linear motor 510, the second linear motor 520, and the third linear motor 530 by the same amount to apply a displacement force to point P1 (x2, y3, z0), point P2 (x3, y1, z0), and point P3 (x1, y1, z0). As a result, the base 61 is displaced in the Z-axis direction. In other words, the base driving unit 50 can drive the end effector 62 in a plane (e.g., XY plane) perpendicular to the direction of an axis (e.g., the Z-axis) connecting the end effector 62 and the workpiece WK. (4) Displacement around the X-axis The base drive unit 50 does not drive the first linear motor 510, but simultaneously drives the second linear motor 520 and the third linear motor 530 by the same amount to apply a displacement force to points P2 (x3, y1, z0) and P3 (x1, y1, z0) while not applying a displacement force to point P1 (x2, y3, z0). As a result, the base unit 61 is displaced around the X-axis. The base driving unit 50 may drive the first linear motor 510 so as to displace it in a direction opposite to the displacement direction of the second linear motor 520 and the third linear motor 530. (5) Displacement around the Y axis The base driving unit 50 drives either the second linear motor 520 or the third linear motor 530 to apply a displacement force to the point P2 (x3, y1, z0) or the point P3 (x1, y1, z0). As a result, the base unit 61 is displaced around the Y axis. The base driving unit 50 may drive the second linear motor 520 and the third linear motor 530 in the opposite directions. (6) Displacement around the Z axis The base drive unit 50 drives either the fourth linear motor 540 or the fifth linear motor 550 to apply a displacement force to the point P4 (x3, y0, z1) or the point P5 (x1, y0, z1). As a result, the base unit 61 is displaced around the Z axis. The base driving unit 50 may drive the fourth linear motor 540 and the fifth linear motor 550 in the opposite directions.

[0032] As described above, the base driving unit 50 (second driving unit) is capable of changing the attitude of the end effector 62. For example, the base driving unit 50 (second driving unit) can change the attitude of the end effector 62 in the above-mentioned six degrees of freedom directions. More specifically, the base drive unit 50 (second drive unit) has six drive elements (e.g., linear motors 500) and can adjust the drive force between the six drive elements to drive the end effector 62 relative to the support unit 41 in six degrees of freedom directions: a first direction which is the direction of gravity, a second direction perpendicular to the first direction, a third direction perpendicular to the first and second directions, a fourth direction around the first direction, a fifth direction around the second direction, and a sixth direction around the third direction.

[0033] [End effector position detection] A description will be given of a specific example of position detection of the end effector 62 by the detection unit 200. In the description of this embodiment, detecting the position of the end effector 62 also includes detecting the position of the pedestal end effector 60. When the base drive unit 50 drives the end effector 62, the amount of displacement of the end effector 62 is determined, for example, by position feedback of the end effector 62. The position feedback of the end effector 62 is performed based on the deviation between a target position of the end effector 62 and the current position of the end effector 62. A method for detecting the current position of the end effector 62 will be described below.

[0034] [(1) Position detection using an external sensor (laser tracker)] 4 is a diagram showing an example of position detection of the end effector 62 of this embodiment. The end effector 62A includes, for example, a camera 62A1 and a laser irradiation unit 62A2, and has a laser cutter function for cutting a predetermined position of the workpiece WK. In this example, the robot system 1 includes a laser tracker 300 as the above-mentioned detection unit 200. The laser tracker 300 includes an irradiation unit 310 and a light receiving unit 320. The detection unit 200 detects position information of the end effector 62A, and outputs the detected position information of the end effector 62A to the control device 10 as control information for the cutting position of the workpiece WK by the laser irradiation unit 62A2. The irradiation unit 310 irradiates the end effector 62 (or the pedestal-equipped end effector 60; the same applies in the following description of this paragraph) with a tracking light (e.g., a laser light). As an example, the irradiation unit 310 periodically changes the irradiation direction of the tracking light (e.g., a laser light) by a known method (e.g., a galvanometer mirror) to scan the measurement space. Even if the position or the attitude or both of the end effector 62 change due to scanning in the space, the irradiation unit 310 can irradiate the tracking light to the end effector 62 by following the change. The light receiving unit 320 receives the reflected light that is the tracking light emitted by the irradiating unit 310 and reflected by the end effector 62 . The laser tracker 300 detects the position of the end effector 62 based on the result of light reception by the light receiving unit 320.

[0035] As an example, the detection unit 200 detects the position information of the end effector 62 while the processing light from the laser irradiation unit 62A2 (second irradiation unit) is being irradiated onto the workpiece WK. The robot system 1 operates based on a predetermined processing path and position information detected by the detection unit 200. The processing path is stored in, for example, a storage unit (not shown). Specifically, the arm unit 20 (first drive unit) drives the end effector 62 via the support unit 41. The support unit 41 supports the end effector 62 along the direction of gravity. The base drive unit 50 (second drive unit) drives the end effector 62 in a non-contact state in a direction perpendicular to the irradiation direction in which the processing light is irradiated.

[0036] The robot system 1 may include an acceleration sensor (not shown) that detects acceleration information of the end effector 62. In this case, the base driving unit 50 (second driving unit) drives the end effector 62 in a non-contact state in a direction perpendicular to the irradiation direction based on the machining path, position information detected by the detection unit 200, and acceleration information detected by the acceleration sensor (not shown). The robot system 1 may also include a position sensor (not shown) disposed between the support unit 41 and the end effector 62 to detect relative position information between the support unit 41 and the end effector 62. In this case, the base driving unit 50 (second driving unit) drives the end effector 62 in a non-contact state in a direction perpendicular to the irradiation direction based on the machining path, position information detected by the detection unit 200, acceleration information detected by an acceleration sensor (not shown), and relative position information detected by the position sensor (not shown).

[0037] Here, various known methods can be applied to detect the position of the end effector 62 by the laser tracker 300. For example, the laser tracker 300 may detect the position information of the end effector 62 based on the distance measurement results using a Time Of Flight (TOF) method based on the difference between the irradiation timing by the irradiation unit 310 and the light reception timing by the light receiving unit 320. The laser tracker 300 may detect position information of the end effector 62 by determining a geometric positional relationship by a triangulation method based on the measurement results of the reflection positions of reflected light generated by irradiating tracking light of multiple optical paths from the irradiation unit 310. In this case, a variable focus lens (e.g., a zoom lens) may be used in the light receiving optical system of the light receiving unit 320 to improve the measurement accuracy of the reflection positions of the reflected light. In addition, a distance measurement method using an optical comb using extremely short optical pulses may be applied to detect the position of the end effector 62 by the laser tracker 300.

[0038] The robot system 1 may further include a reflector 612 on the end effector 62 (or the pedestal-equipped end effector 60; the same applies in the following description of this paragraph). The reflector 612 is made of, for example, a retroreflective material, and reflects the tracking light (for example, laser light) irradiated by the irradiation unit 310. In this case, the laser tracker 300 detects the position information of the end effector 62 by acquiring three-dimensional position information of the reflector 612 based on the light reception result by the light receiving unit 320. In this embodiment, the detection unit 200 is the laser tracker 300, and the detection unit 200 detects the position (or posture) by light, but the present invention is not limited to this. For example, the detection unit 200 may detect the position (or posture) by sound such as ultrasonic waves or radio waves.

[0039] [(2) Position detection using an external sensor (camera)] 5 is a diagram showing another example of position detection of the end effector 62 in this embodiment. In this example, the robot system 1 includes an imaging unit 400 as the above-mentioned detection unit 200. The imaging unit 400 captures an image of the end effector 62 and generates image data. The imaging unit 400 detects the position of the end effector 62 based on the generated image data.

[0040] Furthermore, the robot system 1 may include a light-emitting unit 616 in the end effector 62 (or the pedestal-equipped end effector 60; the same applies in the following description of this paragraph). The light-emitting unit 616 includes, for example, an infrared LED and emits light by itself. In this case, the imaging unit 400 includes, for example, an infrared camera and is configured to be able to capture infrared wavelengths. The imaging unit 400 detects the position information of the end effector 62 by acquiring three-dimensional position information of the light-emitting unit 616 based on image data of the light-emitting unit 616 captured by the infrared camera.

[0041] [External sensor placement example] 6 is a diagram showing an example of the arrangement of the detection unit 200 of this embodiment. Here, the detection unit 200 refers to, for example, a portion including the irradiation unit 310 and the light receiving unit 320, or a portion including the camera of the imaging unit 400, that is, a measurement head. The arrangement of the detection unit 200 refers to the arrangement of the measurement head. As an example of the detection unit 200, a laser tracker 300 or an imaging unit 400 is arranged at multiple locations (for example, four locations) in the space in which the robot unit 2 is installed. When necessary in the following description, a three-dimensional orthogonal coordinate system of Xr, Yr, and Zr axes is used as a coordinate system indicating coordinates in the space in which the robot unit 2 is installed. The detection unit 200 (laser tracker 300 or imaging unit 400) detects the position or posture of the end effector 62 by detecting its placement position in space and the relative position between the end effector 62 (or pedestal-mounted end effector 60; the same applies in the following description of this paragraph) of the robot unit 2. In the example shown in the figure, four laser trackers 300 (laser tracker 301 to laser tracker 304) are arranged. In this example, laser tracker 301 and laser tracker 302 detect end effector 62A, laser tracker 303 detects end effector 62B, and laser tracker 304 detects end effector 62B.

[0042] [External sensor placement example (modified)] FIG. 7 is a diagram showing another example of the arrangement of the detection unit 200 of this embodiment. As described above, the detection unit 200 may be arranged at only one location in the space in which the robot unit 2 is installed, or may be arranged at multiple locations. In this example, the detection unit 200 (detection units 201 to 203) is arranged at multiple locations (for example, three locations) in the space in which the robot unit 2 is installed. The detection units 201 to 203 may be arranged at equal intervals on the Xr-Yr plane in the space. For example, the detection units 201 to 203 are arranged at the vertices of an equilateral triangle on the Xr-Yr plane in the space. In this case, the angle θ1 between the position of the detection unit 201 and the position of the detection unit 202, the angle θ2 between the position of the detection unit 202 and the position of the detection unit 203, and the angle θ3 between the position of the detection unit 203 and the position of the detection unit 201 are all 120°. By arranging the detection unit 200 in this manner, even if the position (or posture, or both) of the end effector 62 changes, it is possible to reduce the occurrence of the end effector 62 (or the base unit 61, or the base-equipped end effector 60) being located in the blind spot of the detection unit 200. According to the robot system 1 configured with three detection units 200 as described above, when a displacement with one degree of freedom is detected using one detection unit 200 (measurement head), the entire detection unit 200 can detect a displacement with three degrees of freedom, and when a displacement with two degrees of freedom is detected using one detection unit 200 (measurement head), the entire detection unit 200 can detect a displacement with six degrees of freedom. Furthermore, the detection units 200 may detect the same part (area) of the robot unit 2, or may detect different parts (areas) from each other. When the detection units 200 detect different parts (areas) from each other, for example, the detection unit 201 detects the left side surface of the end effector 62 (or the pedestal portion 61 or the pedestal-equipped end effector 60), the detection unit 202 detects the right side surface of the end effector 62 (or the pedestal portion 61 or the pedestal-equipped end effector 60), and the detection unit 203 detects the front surface of the end effector 62 (or the pedestal portion 61 or the pedestal-equipped end effector 60). Each of the detection units 200 may change the position of the detection target in accordance with a change in the position (or posture, or both) of the end effector 62. For example, in accordance with a change in the position (or posture, or both) of the end effector 62, the detection unit 201 changes the position of the detection target from the left side surface of the end effector 62 (or the pedestal unit 61 or the pedestal-equipped end effector 60) to the front surface, the detection unit 202 changes the position of the detection target from the right side surface of the end effector 62 (or the pedestal unit 61 or the pedestal-equipped end effector 60) to the left side surface, and the detection unit 203 changes the position of the detection target from the front surface of the end effector 62 (or the pedestal unit 61 or the pedestal-equipped end effector 60) to the right side surface. Note that the arrangement of the detection units 200 shown here is just one example, and the configuration may also include, for example, four detection units 200, each of which is arranged at the vertices of a regular tetrahedron in the space in which the robot unit 2 is installed.

[0043] [Modification of the detection method of the detection unit 200 (feature point servo method)] Up to now, an example has been described in which the detection unit 200 (e.g., the laser tracker 300 or the imaging unit 400) detects the position (or posture, or both) of the end effector 62 by setting the reflector 612 or the light emitting unit 616 arranged on the end effector unit 3 as the detection target position, but this is not limiting. The detection unit 200 may detect the position (or posture, or both) of the end effector 62 by setting a characteristic part (feature point) of the external shape of the end effector 62 (or the pedestal unit 61 or the pedestal-equipped end effector 60) as the detection target position. Here, a method of controlling the position (or posture) of the end effector 62 based on the position of the feature point detected by the detection unit 200 is also referred to as a feature point servo method.

[0044] FIG. 8 is a diagram showing an example of a detection method of the detection unit 200 of this embodiment. In the feature point servo method, among the external appearance of the end effector 62 (or the pedestal 61 or the pedestal-equipped end effector 60), a corner (vertex), a protrusion (convex portion), a depression (concave portion), a step, a boundary, a pattern, etc. may be set as a feature point. Which of the external appearances of the end effector 62 is to be set as a feature point may be determined in advance, or may be determined by learning during the operation of the robot system 1. As an example, the laser tracker 300A detects the vertices V1 and V2 of the end effector 62 (or the pedestal 61 or the pedestal end effector 60) as positions to be detected. The laser tracker 300B detects the convex portions C1 and C2 of the end effector 62 (or the pedestal 61 or the pedestal end effector 60) as positions to be detected. The laser tracker 300C detects the concave portions R1 and R2 of the end effector 62 (or the pedestal 61 or the pedestal end effector 60) as positions to be detected. Each laser tracker 300 scans the feature points with a tracking light (e.g., a laser light). The laser tracker 300 includes a known scanning means (e.g., a galvanometer mirror) and irradiates the tracking light by changing the scanning state (e.g., the vibration state of the galvanometer mirror) for each feature point to be detected. As an example, the laser tracker 300 sets the scanning state to a line scan for certain feature points (e.g., vertices V1 and V2) and sets the scanning state to a triangular scan for other feature points (e.g., convex portions C1 and C2). The laser tracker 300 extracts feature points by scanning the tracking light, and detects changes in the positions (or attitudes, or both) of the extracted feature points as the positions (or attitudes) of the feature points of the end effector 62 (or the pedestal 61 or the pedestal-equipped end effector 60). Here, the laser tracker 300 may be configured to scan a predetermined spatial range around the feature points, without scanning the entire outer shape of the end effector 62 (or the pedestal 61 or the pedestal-equipped end effector 60). According to the laser tracker 300 configured in this manner, the scan range is narrowed compared to the case where the entire outer shape of the end effector 62 (or the pedestal 61 or the pedestal-equipped end effector 60) is scanned, so that the scan period can be increased and the displacement of the end effector 62 can be tracked at a higher speed. Furthermore, the laser tracker 300 may estimate the position (or posture, or both) of the end effector 62 based on the displacement speed, target position, etc. of the end effector 62 (or the pedestal portion 61 or the pedestal-equipped end effector 60). In this case, the laser tracker 300 determines the scan range of the tracking light based on the estimated position (or posture, or both). In the case of the feature point servo method, even if the position of the detection target seen from the detection unit 200 becomes a blind spot due to a change in the position (or posture, or both) of the end effector 62 (or the pedestal unit 61 or the pedestal-mounted end effector 60), it is possible to continue detection of the position (or posture, or both) of the end effector 62 (or the pedestal unit 61 or the pedestal-mounted end effector 60) by setting another feature point that is not in a blind spot as the position of the detection target. For this reason, in the case of the feature point servo method, a configuration in which detection is performed by detection units 200 arranged at multiple positions, or a configuration in which detection is performed by a single detection unit 200, may be used.

[0045] [(3) Position detection using sensors mounted on end effectors (vision servo)] 9 is a diagram showing another example of the arrangement of the detection unit 200 of this embodiment. In this example, the end effector 62 includes a position detection unit 611 as the above-mentioned detection unit 200. The position detection unit 611 includes, for example, a stereo camera (not shown), and detects the relative position between the end effector 62 and the workpiece WK. In other words, the position detection unit 611 (second detection unit) detects the position of the workpiece WK.

[0046] In any of the above-mentioned configurations, the detection unit 200 may be configured to detect the posture of the end effector 62 in addition to the position of the end effector 62. That is, the detection unit 200 detects the position and posture of the end effector 62. The detection unit 200 outputs position information indicating the detected position of the end effector 62 and posture information indicating the posture of the end effector 62 to the control device 10.

[0047] [Example of end effector configuration] A specific example of the configuration of the end effector 62 including the above-mentioned position detection unit 611 will be described with reference to FIGS. FIG. 8 is a perspective view showing an example of the external configuration of the end effector 62 of the present embodiment. FIG. 11 is a bottom view showing an example of the external configuration of the end effector 62 of this embodiment. FIG. 12 is a side view showing an example of the external configuration of the end effector 62 of the present embodiment. In the following description, where necessary, a three-dimensional Cartesian coordinate system of Xe, Ye and Ze axes is used as a coordinate system showing the position of each part of the end effector 62 (or the pedestal-equipped end effector 60).

[0048] The end effector 62 includes a position detection unit 611 , a hand unit 613 , a touch sensor 614 , and a camera driving unit 615 . The hand unit 613 includes a first hand 613A, a second hand 613B, and a third hand 613C, each of which is attached to a hand base 621. The first hand 613A and the second hand 613B are driven by a hand driving unit 617 to slide in the Xe axis direction. The first hand 613A and the second hand 613B can be opened and closed depending on the size of the object to be grasped (for example, the workpiece WK). The third hand 613C does not displace in the Xe axis direction.

[0049] The touch sensor 614 is provided at the tip of the hand unit 613 and detects the pressure applied to the hand unit 613 when the workpiece WK is gripped. The touch sensor 614 is preferably a three-axis force sensor capable of detecting pressure applied in the directions of the Xe axis, the Ye axis, and the Ze axis.

[0050] The position detection unit 611 is capable of detecting the position of the workpiece WK. The position detection unit 611 includes a first stereo camera 611A and a second stereo camera 611B. In this example, the position detection unit 611 detects the position based on optical information from a camera, but is not limited to this. For example, the position detection unit 611 may detect the position using an ultrasonic sensor, a sonar sensor, a radio wave sensor such as a radar, a magnetic sensor, or a capacitance sensor. The first stereo camera 611A has an imaging optical axis in a direction intersecting the Ze axis, and captures an image of the tip of the hand unit 613. The first stereo camera 611A can acquire depth information of the vicinity of the tip of the hand unit 613. The first stereo camera 611A may be configured with a time-of-flight (TOF) sensor.

[0051] The first stereo camera 611A is attached to the tip of a camera arm unit 622. The camera arm unit 622 is attached to a hand base 621, and is driven by a camera driving unit 615 (third driving unit) and can be displaced in the A direction or the B direction in the figure. The first stereo camera 611A can change the imaging direction of the tip of the hand unit 613 by driving the camera arm unit 622 by the camera driving unit 615. That is, the end effector 62 includes a camera driving unit 615 (third driving unit) that drives the first stereo camera 611A (second detection unit) to change the orientation.

[0052] The camera arm unit 622 may be configured to be able to change the imaging direction of the first stereo camera 611A in the direction of angle θ in the drawing. Even in this case, the camera driving unit 615 (third driving unit) drives the first stereo camera 611A (second detection unit) to change the orientation.

[0053] The second stereo camera 611B has an imaging optical axis from the hand base 621 to the tip of the hand part 613, i.e., in the Ze axis direction, and captures an image of the tip of the hand part 613. The second stereo camera 611B has a function as a palm-mounted vision system and can obtain an image from the top surface of the workpiece WK.

[0054] FIG. 13 is a diagram showing an example of a state in which the hand portion 613 of the end effector 62 of this embodiment is gripping a workpiece WK. The position detection unit 611 acquires depth information of the workpiece WK1 (e.g., a screw) held by the hand unit 613 and the workpiece WK2 (e.g., a screw hole) nearby the workpiece WK1 by using the first stereo camera 611A and the second stereo camera 611B. The position detection unit 611 calculates the three-dimensional shape of the workpiece WK (e.g., the workpiece WK1 and the workpiece WK2) based on the acquired depth information. The position detection unit 611 adjusts the position or posture of the hand unit 613 based on the calculated three-dimensional shape of the workpiece WK. For example, the position detection unit 611 adjusts the eccentricity of the hand unit 613 (e.g., adjusts the displacement of the hand unit 613 in the Xe-Ye plane) and adjusts the inclination of the hand unit 613 (e.g., adjusts the inclination of the Ze axis with respect to the workpiece WK2). The position detection unit 611 also calculates the distance between the workpieces (e.g., the distance in the Ze axis direction between the workpieces WK1 and WK2). Furthermore, the position detection unit 611 is also capable of extracting edges of an image of the workpiece WK, and in this case, the accuracy of the three-dimensional information of the workpiece WK can be improved.

[0055] [Control device functional configuration] 14 is a diagram showing an example of a functional configuration of the control device 10 of this embodiment. The control device 10 includes an arm position control unit 11, an end effector position control unit 12, an end effector operation control unit 13, and a generation unit 14.

[0056] The arm position control unit 11 controls the arm driving unit 30 based on the target position given by the higher-level device 100 and the current position of the arm unit 20 detected by the arm position detection unit 301. As a result, the position of the end effector 62 attached to the arm unit 20 moves to the given target position. That is, the arm driving unit 30 (first driving unit) can change the posture of the end effector 62 via the support unit 41. In other words, the arm driving unit 30 (first driving unit) can drive the end effector 62 in six degrees of freedom directions via the support unit 41. The arm driving unit 30 (first driving unit) may be configured to drive the end effector 62 via the support unit 41 based on position information of the end effector 62 detected by the detection unit 200.

[0057] The end effector position control unit 12 controls the base driving unit 50 based on the target position given by the upper device 100 and the position of the end effector 62 detected by the detection unit 200. As a result, the position of the end effector 62 attached to the arm unit 20 moves to the given target position. For example, the base driving unit 50 (second driving unit) positions the end effector 62 with respect to the workpiece WK based on the position of the end effector 62 detected by the detection unit 200.

[0058] [Example of end effector drive by pedestal drive unit] (1) The base driving unit 50 (second driving unit) drives the end effector 62 based on the position of the end effector 62 detected by the detection unit 200 so that the position of the end effector 62 with respect to the workpiece WK does not change. For example, the arm section 20 of the robot unit 2 may vibrate due to a disturbance or the like. In this case, the base driving section 50 drives the end effector 62 by displacing the end effector 62 in the direction opposite to the displacement caused by the vibration of the arm section 20, so that the position of the end effector 62 with respect to the workpiece WK does not change. (2) The base driving unit 50 (second driving unit) drives the end effector 62 so as to maintain a predetermined target position of the end effector 62 based on the position information of the end effector 62 detected by the detection unit 200. The target position is stored, for example, in a memory unit (not shown). (3) The base driving unit 50 (second driving unit) drives the end effector 62 based on the position information of the end effector 62 detected by the detection unit 200 and the target position information of the end effector 62 that is predetermined with respect to the workpiece WK.

[0059] (4) When the end effector 62 is in the first posture, the base driving unit 50 (second driving unit) drives the end effector 62 in a plane including the second direction and the third direction based on the position information of the end effector 62 detected by the detection unit 200. When the end effector 62 is in the second posture, the base driving unit 50 (second driving unit) drives the end effector 62 in a plane including the third direction and the first direction based on the position information of the end effector 62 detected by the detection unit 200. When the end effector 62 is in the third posture, the base driving unit 50 (second driving unit) drives the end effector 62 in a plane including the first direction and the second direction based on the position information of the end effector 62 detected by the detection unit 200. As described above, the first direction is, for example, the direction of gravity, the second direction is a direction perpendicular to the first direction, and the third direction is a direction perpendicular to the first and second directions. Note that the second direction may be a direction intersecting the first direction, and the third direction may be a direction intersecting the first and second directions.

[0060] In addition, in any of the above driving examples, the base driving unit 50 (second driving unit) drives the end effector 62 using a different driving element among the six driving elements (for example, the linear motor 500) depending on the posture of the end effector 62.

[0061] Here, as described above, the magnitude of the displacement of the end effector 62 driven by the base driving unit 50 (second stroke) is smaller than the magnitude of the displacement of the end effector 62 driven by the arm driving unit 30 (first stroke). That is, the arm position control unit 11 controls the rough position (that is, coarse movement control) of the end effector 62. The end effector position control unit 12 controls the precise position of the end effector 62 (that is, fine movement control). The robot system 1 of this embodiment precisely controls the position or posture of the end effector 62 by coarse motion control by the arm position control unit 11 and fine motion control by the end effector position control unit 12. That is, according to the robot system 1 of this embodiment, the control accuracy of the position or posture of the end effector 62 can be improved.

[0062] The end effector operation control unit 13 controls various actuators equipped in the end effector 62. In the case of the end effector 62 shown in the example above, it is equipped with a camera driving unit 615 and a hand driving unit 617. In this case, the end effector operation control unit 13 controls the camera driving unit 615 and the hand driving unit 617 based on an end effector operation instruction given from the higher-level device 100.

[0063] The generation unit 14 generates three-dimensional information of the workpiece WK based on the detection result by the position detection unit 611 (second detection unit). When fastening the workpiece WK1 (e.g., a screw) to the workpiece WK2 (e.g., a screw hole) as described above, the generation unit 14 generates three-dimensional information of the workpiece WK1 and the workpiece WK2 detected by the position detection unit 611. In this case, the arm position control unit 11 and the end effector position control unit 12 move the end effector 62 based on the amount of displacement calculated from the relative position between the three-dimensional shape of the workpiece WK1 and the three-dimensional shape of the workpiece WK2.

[0064] For example, when a workpiece WK1 (e.g., a screw) is fastened to a workpiece WK2 (e.g., a screw hole), predetermined target position information of the end effector 62 with respect to the workpiece WK is provided from the upper device 100 to the control device 10. In this case, the arm position control unit 11 and the end effector position control unit 12 control the position and / or the attitude of the end effector 62 by driving the arm driving unit 30 and the base driving unit 50 based on the position information of the end effector 62 detected by the detection unit 200 and the target position information of the end effector 62 with respect to the workpiece WK. Note that the control device 10 may be provided outside the robot system 1, or a control unit that performs a part of the processing performed by the control device 10 may be provided in the robot system 1, and a control unit that performs another part of the processing performed by the control device 10 may be provided outside the robot system 1.

[0065] Although the embodiment of the present invention has been described in detail above with reference to the drawings, the specific configuration is not limited to this embodiment, and appropriate modifications can be made without departing from the spirit of the present invention. The configurations described in the above-mentioned embodiments may be combined.

[0066] Each unit of each device in the above-described embodiments may be realized by dedicated hardware, or may be realized by a memory and a microprocessor.

[0067] In addition, each part of each device may be composed of a memory and a CPU (central processing unit), and the functions of each part of each device may be realized by loading a program for realizing the function of each part into the memory and executing the program.

[0068] In addition, a program for implementing the functions of each unit of each device may be recorded on a computer-readable recording medium, and the program recorded on the recording medium may be read into a computer system and executed to perform processing by each unit of the control unit. Note that the term "computer system" here includes hardware such as the OS and peripheral devices.

[0069] In addition, if a WWW system is used, the "computer system" also includes the homepage providing environment (or display environment). In addition, "computer-readable recording medium" refers to portable media such as flexible disks, optical magnetic disks, ROMs, and CD-ROMs, and storage devices such as hard disks built into computer systems. Furthermore, "computer-readable recording medium" also includes those that dynamically hold a program for a short period of time, such as communication lines when transmitting a program via a network such as the Internet or a communication line such as a telephone line, and those that hold a program for a certain period of time, such as volatile memory inside a computer system that serves as a server or client in such cases. Furthermore, the above program may be one that realizes part of the above-mentioned functions, or may be one that can realize the above-mentioned functions in combination with a program already recorded in the computer system. [Explanation of symbols]

[0070] 1...robot system, 2...robot unit, 3...end effector unit, 10...control device, 11...arm position control unit, 12...end effector position control unit, 13...end effector operation control unit, 14...generation unit, 20...arm unit, 30...arm drive unit, 41...support unit, 50...pedestal drive unit, 60...end effector with pedestal 60, 62...end effector, 70...adapter, 100...host device, 200...detection unit, 500...linear motor

Claims

1. A work system capable of performing work on an object using an end effector, comprising: A drive device capable of changing at least one of a position and a posture of the end effector; a first measuring device that acquires information regarding at least one of a position of the end effector, a posture of the end effector, a position of the driving device, and a posture of the driving device; a second measuring device that acquires information regarding at least one of a position of the end effector, a posture of the end effector, a position of the driving device, and a posture of the driving device; Control device and wherein the control device generates control information for controlling at least one of the end effector and the drive device based on information acquired by at least one of the first measurement device and the second measurement device.

2. The drive device includes a movable part to which the end effector is connected, and a drive part that moves the movable part; The information regarding the attitude of the drive device includes information regarding the attitude of the movable part. The robot system of claim 1 .

3. The first measuring device is capable of measuring a first portion, and the second measuring device is capable of measuring a second portion different from the first portion. The robot system according to claim 1 or 2.

4. The first part and the second part are at least a part of the end effector. The robot system according to claim 3 .

5. When the first portion is in a blind spot for a first measuring device, information regarding at least one of the position and orientation of the end effector is obtained by measuring the second portion with a second measuring device. The robot system according to claim 3 or 4.

6. At least a portion of the measurement by the first measuring device and the measurement by the second measuring device are performed simultaneously. The robot system according to any one of claims 1 to 5.

7. At least one of the portion measured by the first measuring device and the portion measured by the second measuring device is changed based on a change in at least one of the position of the end effector, the attitude of the end effector, the position of the driving device, and the attitude of the driving device. The robot system according to any one of claims 1 to 6.

8. Based on the measurement results of the first measuring device and the measurement results of the second measuring device, information regarding at least one of six degrees of freedom of the end effector and the driving device is obtained. The robot system according to any one of claims 1 to 7.

9. A portion measured by the first measuring device and a portion measured by the second measuring device are provided with measuring members. The robot system according to any one of claims 1 to 8.

10. At least one of the first measurement device and the second measurement device is capable of irradiating light, The measuring member is capable of reflecting the light. The robot system of claim 9.

11. The drive device is a first drive device, and a second drive device different from the first drive device is provided between the first drive device and the end effector, the second drive device is capable of changing at least one of a position and an attitude of the end effector; The second stroke of the second driving device is smaller than the first stroke of the first driving device. The robot system according to any one of claims 1 to 10.

12. Based on the measurement results of at least one of the first measuring device and the second measuring device, Obtaining information regarding at least one of a position of the second drive unit and an attitude of the drive unit. The robotic system of claim 11.

13. The end effector further comprises a detection device, Obtaining information regarding the position of the end effector and the object The robot system according to any one of claims 1 to 12.

14. The detection device further obtains information regarding the position of the end effector. The robot system of claim 13.

15. A control method for controlling a robot system having a first measuring device and a second measuring device and capable of performing operations on an object using an end effector, comprising: the first measurement device acquiring information regarding at least one of a position of the end effector, a posture of the end effector, a position of a drive unit, and a posture of the drive unit; the second measurement device acquiring information regarding at least one of a position of the end effector, a posture of the end effector, a position of the actuator, and a posture of the actuator; generating control information for controlling at least one of the end effector and the driving device based on information acquired by at least one of the first measuring device and the second measuring device; A control method comprising:

Images