Mobile device

Abstract

To avoid complication and enlargement of a structure, a large increase of a weight of a mobile body, and deterioration of a weight balance in a mobile device on which a position distance monitoring function is mounted.SOLUTION: A mobile body 2 is floated by air jet with respect to a fixed body 1 on which a magnetic material segment 11 is provided on an upper surface with a fixed pitch p, electric magnets 31 and 32 arranged within the mobile body 2 with an arrangement interval deviated with respect to the pitch p are energized by an energization control part 81, and the mobile body 2 is moved by sequentially applying magnetic force to each magnetic material segment 11. Cores 5 of the electric magnets 31 and 32 composing one electric magnet set 3 are mutually and electrically insulated by an insulation sheet 52, and a core convex part 51 of each core 5 forms a capacitor with the magnetic material segment 11. A capacity variation of the capacitor is detected by detection means 82 and a position or a movement distance after moving is detected.SELECTED DRAWING: Figure 6

Description

[Technical field]

[0001] The present invention relates to a moving device that moves an object in at least one direction, and to a moving device that has a function of identifying the position or distance moved of the object after it has moved in the one-dimensional direction. [Background technology]

[0002] A moving device that moves an object in at least one dimensional direction is required in various industrial fields, and various types have been developed and used. In some fields, it is necessary to move an object while specifying the object's position after movement or the distance it has moved. For example, this type of moving device is often required when the object is a workpiece (a workpiece) that is to be precisely machined. For example, in a device that performs machining such as cutting or drilling at a predetermined position on a workpiece, the tool (cutting tool or hole drilling tool) that performs such machining may move relative to the workpiece to perform machining at the predetermined position. On the other hand, due to issues such as the weight of the tool, a configuration may be adopted in which the position of the tool is fixed and the workpiece is positioned at a predetermined position relative to the tool to perform machining. In these cases, a moving device that moves the holder that holds the tool or the workpiece is installed on the processing machine.

[0003] In such a moving device, there are cases where it is required to have a function for monitoring the position or distance traveled of the processing tool or workpiece after it has been moved. The processing machine that performs the above-mentioned precision processing is one example, and in order to confirm that the precision of the processing position is ensured, it is required to have a function for monitoring the position or distance traveled of the processing tool or workpiece after it has been moved (hereinafter referred to as a position distance monitoring function).

[0004] For such position and distance monitoring functions, a configuration using a laser rangefinder is often adopted. A certain side of the moving object (moving body) is made into a surface that reflects laser light (reflective surface), and a laser light is directed in the same direction as the moving object, irradiating the reflective surface. The reflected laser light returns from the reflective surface, so the position of the reflective surface can be detected by detecting the phase difference with the incident light, and the movement distance can be calculated from the change in this phase.

[0005] On the other hand, in a moving device that levitates a moving body relative to a fixed object (fixed body) and moves the moving body above the fixed body, a configuration may be adopted in which electrodes are provided on the surface of the fixed body facing the moving body and the surface of the moving body facing the fixed body to form a capacitor, and position information is obtained from a change in the capacitance of the capacitor. An example of this type of moving device is disclosed in Patent Document 1. Patent Document 1 employs a configuration of an electromagnetic linear motor that moves by utilizing magnetism between the fixed body and the moving body, and in addition to being provided with an electromagnet that constitutes an electromagnetic linear motor, the moving body is provided with a capacitor electrode for a position distance monitoring function.

[0006] Patent Document 2 also discloses a configuration for a position distance monitoring function in a moving device that similarly employs an electromagnetic linear motor. In the configuration of Patent Document 2, a magnetic flux sensor is fixed to the side of a moving body. The magnetic flux sensor is equipped with a magnetic flux generating means including an electromagnet, and is configured to calculate the moving distance by detecting changes in the generated magnetic flux due to interaction with a ferromagnetic body on the fixed body side. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] JP 2013-24702 A [Patent Document 1] JP 2008-145140 A Summary of the Invention [Problem to be solved by the invention]

[0008] Among the above-mentioned conventional technologies, in the configuration using a laser rangefinder, as the moving distance becomes longer, the measuring range of the rangefinder also becomes longer accordingly, and the configuration is inevitably large-scale. In many cases, the movement is performed in two dimensions (X and Y directions), so a configuration that measures the distance in two directions with a laser is required, which inevitably makes the configuration complicated and large-scale. Furthermore, even in a configuration in which a capacitor electrode for a position and distance monitoring function is further provided to a moving body with an electromagnetic linear motor built in, as in Patent Document 1, there are problems of the structure becoming complicated and large in size. A certain level of capacitance is required to obtain position information (or moving distance) from the change in capacitance, and therefore the capacitor electrode must also be large to a certain extent. On the other hand, in the case of an electromagnetic linear motor, at least two electromagnets with a phase difference are required, and if these are built into the moving body, the structure of the moving body becomes complicated and large in size, which is unavoidable.

[0009] Furthermore, in a configuration in which a magnetic flux sensor is added to a moving body as in Patent Document 2, the magnetic flux sensor including an electromagnet significantly increases the overall weight (weight to be moved), and there is a problem that the driving capacity of the electromagnetic linear motor must be improved accordingly. Also, since an additional unit is provided on the side, problems may arise such as a deterioration in the weight balance and, in some cases, a limitation in the movable range of the moving body. The present invention has been made to solve the above-mentioned problems when realizing a position and distance monitoring function in a mobile device, and aims to avoid an increase in the complexity and size of the structure, as well as a large increase in the weight of the mobile body and a deterioration in weight balance. [Means for solving the problem]

[0010] In order to solve the above problems, the moving device of the invention disclosed in this specification comprises a fixed body that is long in at least one direction, a moving body that faces the fixed body and is movable in the one-dimensional direction relative to the stationary fixed body, and a separating means for separating the moving body from the fixed body at least in the portion where a propulsive force is applied, and is a moving device that moves the moving body in the one-dimensional direction to position it at any position. In this moving device, the surface of the fixed body facing the moving body is provided with magnetic segments made of a large number of ferromagnetic bodies arranged at a constant pitch in the one-dimensional direction, and the surface of the moving body facing the fixed body is provided with at least two electromagnets arranged in line in the one-dimensional direction, generating magnetic flux directed toward one of the magnetic segments. The separating means is a means for separating the movable body from the fixed body while maintaining a separation distance at which the magnetic force formed by each electromagnet acts on each magnetic segment, causing the movable body to move in the one-dimensional direction due to the attractive or repulsive force generated by the magnetic force acting on each magnetic segment. In addition, each electromagnet is arranged at an interval that is offset from a natural number multiple of the pitch of the arrangement of each magnetic material segment, and a current control unit is provided that controls the current supplied to each electromagnet to move the moving body in the one-dimensional direction. Furthermore, each magnetic material segment is formed of a conductor, the core tip portion of each electromagnet, which is the portion facing the moving body of the core, is a conductor, the core tip portions of each electromagnet are electrically insulated from each other, and a detection means is provided for detecting the position or movement distance of the moving body in the one-dimensional direction from the capacitance value of a capacitor formed by each magnetic material segment and each core tip portion. Another invention disclosed in this specification relates to a moving device that comprises a fixed body that is long in a two-dimensional direction, a moving body that faces the fixed body and is movable in the two-dimensional direction relative to the stationary fixed body, and a separating means for separating the moving body from the fixed body at least in the portion where a propulsive force is applied, and is a moving device that moves the moving body in the two-dimensional direction to position it at any position. In this moving device, the surface of the fixed body facing the moving body is provided with magnetic segments made of a large number of ferromagnetic bodies arranged at a constant pitch in the two-dimensional direction, and the surface of the moving body facing the fixed body is provided with at least two electromagnets arranged in line in each of the two-dimensional directions, generating magnetic flux directed toward each magnetic segment. The spacing means is a means for spacing the moving body away from the fixed body while maintaining a spacing distance at which the magnetic force formed by each electromagnet acts on each magnetic material segment so that the moving body moves in the two-dimensional direction due to the attractive or repulsive force generated by the magnetic force acting on each magnetic material segment, and each electromagnet is arranged at an interval that is shifted relative to a natural number multiple of the pitch of the arrangement of each magnetic material segment, and a current control unit is provided which controls the flow of current to each electromagnet to move the moving body in any of the two-dimensional directions. Furthermore, each magnetic material segment is an electrical conductor, the core tip portion of each electromagnet, which is the portion facing the moving body of the core, is also an electrical conductor, the core tip portions of each electromagnet are electrically insulated from each other, and a detection means is provided for detecting the position or movement distance of the moving body in any of the two-dimensional directions from the capacitance value of a capacitor formed by each magnetic material segment and each core tip portion. In order to solve the above problem, the moving device of another invention can be configured such that the two-dimensional direction is a direction within a horizontal plane, and the spacing means is a means for lifting the moving body from the fixed body by injecting air. In order to solve the above problems, the moving device according to each of the above inventions comprises: The cores of the electromagnets are provided with a yoke on the opposite side to the core tip, and are magnetically connected to each other; An insulating portion is provided to insulate the core tip of each electromagnet from electrical conduction through the yoke, The insulating portion does not impede the magnetic force generated by each electromagnet from acting on each magnetic segment. It may have the following configuration. In order to achieve the above object, in the movement device according to each of the above inventions, the insulating portion may be an insulating layer having a thickness of 10 μm or more and 100 μm or less. In order to solve the above problem, the moving device according to the present invention comprises: Three electromagnets are arranged in a line in the one-dimensional direction on a surface of the movable body facing the fixed body, the electromagnets generating magnetic fluxes toward the respective magnetic material segments, The three electromagnets in the one-dimensional direction are, in order of adjacent positions, a first electromagnet, a second electromagnet, and a third electromagnet. When the pitch of the arrangement of the magnetic segments is p, the second electromagnet is arranged at a position shifted by p / 3 from the first electromagnet with respect to a natural number multiple of the pitch p, and the third electromagnet is arranged at a position shifted by 2p / 3 from the first electromagnet with respect to a natural number multiple of the pitch p. It may have the following configuration. In the moving device according to the above-mentioned another invention, three electromagnets are arranged in a line in each of the two-dimensional directions on a surface of the moving body facing the fixed body, the electromagnets generating magnetic fluxes in a state directed toward each of the magnetic material segments, The three electromagnets in each direction are the first electromagnet, the second electromagnet, and the third electromagnet, in that order, and the pitch of the arrangement of each magnetic segment is p. The second electromagnet is arranged at a distance of p / 3 from the first electromagnet to a natural number multiple of the pitch p, and the third electromagnet is arranged at a distance of 2p / 3 from the first electromagnet to a natural number multiple of the pitch p. It may have the following configuration. Effect of the Invention

[0011] As described below, according to the moving device of each of the disclosed inventions, the core of one of the electromagnets is configured to double as a capacitor electrode for the position and distance monitoring function, thereby providing a moving device with a position and distance monitoring function while avoiding an increase in structural complexity and size. Furthermore, in a moving device according to another disclosed invention, if the spacing means is configured to be a means for levitating the moving body from the fixed body by injecting air, there is no problem of interference with the action of magnetic force for movement, since it is not magnetic levitation, and there is no need to fill in the gaps between each magnetic segment to make the surface of the fixed body facing the moving body flat, resulting in the effect of simplicity. Furthermore, in the moving devices of the disclosed inventions, if a yoke is provided on the side of the core of each electromagnet opposite the core tip, and an insulating section is provided to insulate the core tip of each electromagnet from electrical conduction through the yoke, it is possible to generate a higher propulsive force with a small excitation current while also using the core as a capacitor electrode for monitoring position and distance. Furthermore, when three electromagnets are arranged side by side in one direction or in each of two directions, with the three electromagnets being the first electromagnet, the second electromagnet, and the third electromagnet in adjacent order, and the pitch of the arrangement of each magnetic material segment being p, the second electromagnet is arranged at a displacement of p / 3 from the first electromagnet relative to a natural number multiple of the pitch p, and the third electromagnet is arranged at a displacement of 2p / 3 from the first electromagnet relative to a natural number multiple of the pitch p, a configuration can be achieved in which the moving body can be propelled with effectively large power, resulting in the effects of high power efficiency, increased propulsion force, and reduced power consumption. [Brief description of the drawings]

[0012] [Figure 1] 1 is a schematic perspective view of a moving device according to a first embodiment; [Diagram 2] 2 is a schematic cross-sectional front view of a main part of the moving device of FIG. 1. [Diagram 3] FIG. 2 is a schematic cross-sectional plan view showing the arrangement of electromagnets in a moving body. [Figure 4] FIG. 2 is a schematic diagram showing the internal configuration of a control panel. [Diagram 5] FIG. 2 is a schematic front view showing the configuration of the harness. [Figure 6] 4 is a schematic front sectional view showing a more detailed structure of an electromagnet set in the moving device of the first embodiment. FIG. [Figure 7] 13 is a diagram showing the positional relationship between each core protrusion and each magnetic segment in one electromagnet set. FIG. [Figure 8] 11 is a diagram showing the change in capacitance of a capacitor formed by each core head of an electromagnet set and the magnetic segment facing it. FIG. [Figure 9]FIG. 11 is a schematic plan view showing the arrangement of each electromagnet set in the second embodiment. [Figure 10] FIG. 2 is a schematic cross-sectional plan view showing the arrangement of electromagnets in a moving body. [Figure 11] FIG. 11 is a schematic diagram showing an example of an excitation current of each electromagnet constituting one electromagnet set in the second embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] Next, a mode for carrying out the present invention (hereinafter, referred to as an embodiment) will be described. Fig. 1 is a schematic perspective view of a moving device according to a first embodiment, and Fig. 2 is a schematic front sectional view of a main part of the moving device of Fig. 1. The moving device of the present invention is a device that moves a moving body 2 relative to a stationary fixed body 1. The direction of movement is at least one-dimensional, but in this embodiment, it is a two-dimensional direction. The two-dimensional direction is two orthogonal directions (X and Y directions) in a horizontal plane. As shown in FIG. 1, the fixed body 1 is a rectangular plate-like member. The moving body 2 is also a rectangular plate-like member.

[0014] The moving device of the embodiment is configured to keep the moving body 2 separated from the fixed body 1 at least in the portion where the propulsive force is applied, and to move the moving body 2 while maintaining this state. For this reason, a separating means 20 is provided as shown in Fig. 2. In this embodiment, since the movement is in a direction within a horizontal plane, the levitation of the moving body 2 means levitation from the fixed body 1, and the moving body 2 as a whole separates from the fixed body 2. Therefore, the separating means 20 is a levitation means. In this embodiment, an air levitation configuration is adopted for the separating means 20 which is a levitation means.

[0015] As shown in FIG. 2, a plurality of jet nozzles 21 are provided at the end of the surface of the movable body 2 facing the fixed body 1. The jet nozzles 21 are terminal openings of a pressurized passage 22 provided on a side plate of a casing 200 constituting the movable body 2. A pressurized hose (not shown in FIG. 2) is connected to the pressurized passage 22, which is connected to a pressurized source such as a compressor. When the pressurized source operates, the pressurized passage 22 becomes high pressure, and a high-pressure airflow is ejected from the jet nozzles 21. This causes the movable body 2 to float above the fixed body 1. The jet nozzles 21 are provided at equal intervals along the rectangular outline of the movable body 2. For example, they are provided at the four corners.

[0016] In this embodiment, an electromagnetic linear motor system is used to move the air-levitated movable body 2. In this embodiment, a driving electromagnet is provided on the movable body 2 side, and a ferromagnetic body is provided on the fixed body 1 side. As shown in Fig. 2, the surface of the fixed body 1 facing the movable body 2 (hereinafter simply referred to as the facing surface) is provided with a number of magnetic material segments 11 made of ferromagnetic material arranged at regular intervals. As shown in Fig. 1, each magnetic material segment 11 is a low rectangular column. The horizontal cross-sectional shape is a square, with each side aligned along the XY direction. Each magnetic material segment 11 is the same size, and therefore the width in the XY direction is also the same for each magnetic material segment 11.

[0017] In this embodiment, each magnetic material segment 11 is formed by processing the surface on one side of a flat plate-like member made of a ferromagnetic material such as iron. A plate (hereinafter, segment plate) 12 on one side of which each magnetic material segment 11 is formed is fixed to the upper surface of a base plate 13 to form a fixed body 1. In this example, the base plate 13 has a recess on its upper surface into which the segment plate 12 is fitted, and the segment plate 12 is fitted and fixed therein. Note that a non-magnetic material (e.g., a resin material) may be embedded between each magnetic material segment 11 to make the upper surface of the fixed body 1 flat as a whole. Also, each magnetic material segment 11 may be formed by fixing a small rectangular parallelepiped member made of a ferromagnetic material to one surface of a plate-like member by brazing, adhesive, or the like.

[0018] The spacing (indicated by g in FIG. 2) between the magnetic segments 11 is constant. The spacing g is the same in both the X and Y directions. Hereinafter, the sum of the width (indicated by w in FIG. 2) of the magnetic segments 11 and the spacing g is referred to as the pitch, and is indicated by p in FIG. 2. In this embodiment, w=g, and therefore w=g=p / 2.

[0019] Next, the structure of the moving body 2 will be described in more detail with reference to FIG. 2. In carrying out the present invention, at least two electromagnets are sufficient, but in the present invention, a plurality of pairs of two electromagnets (hereinafter referred to as electromagnet sets) are provided. One electromagnet set is a driving source that generates a propulsive force for movement in the X direction or Y direction. Therefore, an X-direction electromagnet set 3 and a Y-direction electromagnet set 4 are provided.

[0020] In Fig. 2, the two electromagnets 31, 32 on the right side constitute one electromagnet set 3. Since the left-right direction in Fig. 2 is the X direction, this electromagnet set 3 is an X-direction magnet set. The two electromagnets 42, 42 on the left side constitute electromagnet sets 4, 4 together with an electromagnet (not shown) adjacent in the direction penetrating the paper (Y direction). These electromagnet sets 4, 4 are electromagnet sets for the Y direction because the electromagnets are lined up in the Y direction.

[0021] As shown in FIG. 2, each electromagnet 31, 32, 42 is composed of a columnar core 5 and a coil 6 wound around the core 5. An insulating paper (reference numeral omitted) is interposed between each core 5 and each coil 6, and they are electrically insulated. Each electromagnet 31, 32, 42 is arranged so that the longitudinal direction of the core 5 is the up-down direction. Therefore, when the coil 6 is energized, a magnetic field is generated that diverges on the upper and lower sides. Since the lower surface of the coil 6 faces the fixed body 1, the magnetic field diverging on the lower side is directed toward one of the magnetic segments 11, and a magnetic force acts on the magnetic segment 11. At this time, a propulsive force in the X direction or Y direction is generated by controlling the spatial arrangement of the electromagnets constituting the electromagnet sets 3 and 4 and the timing of energization.

[0022] In each of the electromagnets 31, 32, and 42, the lower surface of the core 5 (the surface facing the fixed body 1) has a comb-tooth uneven shape as shown in FIG. 2. In this embodiment, the width of the protruding portion 51 in the unevenness is approximately the same as the width of the magnetic body segment 11 of the opposing moving body 2, and the width of the recessed portion is approximately the same as the separation distance g of the magnetic body segments 11. In addition, the protruding portion 51 has a shape (protrusion) that is long in the horizontal direction perpendicular to the direction in which the thrust is generated. That is, the protruding portions 51 on the opposing surface of the core 5 in each of the electromagnets 31 and 32 of the X-direction electromagnet set 3 are long in the Y direction (perpendicular to the paper surface of FIG. 2), and the protruding portion 51 of the core 5 in each of the electromagnets 42 of the Y-direction electromagnet set 4 is long in the Y direction (perpendicular to the paper surface of FIG. 2). Hereinafter, each protruding portion 51 is referred to as a core protruding portion. Note that each core protruding portion 51 may be formed into a rectangular column shape like the magnetic body segment 11.

[0023] Such electromagnets are arranged at intervals that are offset from the intervals at which the magnetic segments 11 are arranged. In Fig. 2, the arrangement pitch of the two electromagnets 31, 32 that make up the X-direction electromagnet set 3 is called the electromagnet pitch, and is indicated by p' in Fig. 2. For the sake of distinction, the pitch p of the magnetic segments 11 will hereinafter be referred to as the segment pitch. As shown in FIG. 2, the electromagnet pitch P' is offset from the segment pitch p. "Offset" means that it does not match the length of a natural number multiple of the segment pitch p. More specifically, in this embodiment, the electromagnet pitch p' is offset by a distance of p / 4 from the natural number multiple of the segment pitch p. In this example, it is longer by p / 4 (p'=np+p / 4, n is a natural number).

[0024] As shown in FIG. 2, the electromagnet sets 3 and 4 are provided with a permanent magnet 7, a yoke 71, and a bridge plate 72. The permanent magnet 7 is fixed to the upper end of the core 5 of each electromagnet 31, 32, and 42. Each permanent magnet 7 is a plate-like shape having almost the same shape as the upper end surface of the core 5. The magnetic poles of each permanent magnet 7 are present on the upper and lower surfaces, and for example, the upper side is a north pole and the lower side is a south pole (the reverse is also possible). The magnetic poles are present in the same way in each permanent magnet 7, and in the above example, the upper side is a north pole and the lower side is a south pole in all permanent magnets 7. The yoke 71 is connected to the upper side of each permanent magnet 7, and connects each permanent magnet 7 to form a magnetic path. Each bridge plate 72 is a member for connecting each core 5 to stabilize each electromagnet 31, 32, and 42, and is made of a material with high magnetic permeability such as iron.

[0025] The horizontal arrangement of the X-direction electromagnet set 3 and the Y-direction electromagnet set, which are made up of such electromagnets 31, 32, 42, will be described with reference to Fig. 3. Fig. 3 is a schematic planar cross-sectional view showing the arrangement of the electromagnets in the moving body 2. In FIG. 3, for convenience, the horizontal region in the internal structure of the moving body 2 is divided into four regions. The four regions are the first quadrant, the second quadrant, the third quadrant, and the fourth quadrant, in order from the upper right. Two X-direction electromagnet sets 3 (four in total) are arranged in the second and fourth quadrants, and two Y-direction electromagnet sets 4 (four in total) are arranged in the first and third quadrants. In each X-direction electromagnet set 3, two X-direction electromagnets 31, 32 are arranged in the X direction, and in each Y-direction electromagnet set 4, two Y-direction electromagnets 41, 42 are arranged in the Y direction. In each X-direction electromagnet set 3, as described above, the electromagnet pitch p' is shifted by p / 4 from the segment pitch p. In each Y-direction electromagnet set 4, the electromagnet pitch p' is also shifted by p / 4 from the segment pitch p.

[0026] As shown in Fig. 1, a control panel 8 is fixed to the side of the fixed body 1. Fig. 4 is a schematic diagram showing the configuration inside the control panel 8. Inside the control panel 8, there is provided an energization control unit 81 that generates a thrust force in the X direction and a thrust force in the Y direction by controlling the energization of each coil 6 of each electromagnet 31, 32, 41, 42 arranged as described above. Note that, although Fig. 4 shows only two electromagnet sets 3, 4, the remaining electromagnet sets 3, 4 are also similarly wired to the energization control units 81. The magnetomotive force generated by energizing each coil 6 controls the magnetic flux generated by each electromagnet 31, 32, 41, 42 while weakening or strengthening the magnetic force of each permanent magnet 7, thereby generating a propulsive force. This point will be described as an example in the X direction with reference to FIG.

[0027] In the X-direction electromagnet set 3 shown in Fig. 2, current is applied to the electromagnets 31 facing the magnetic segments 11 so that a magnetomotive force (opposite direction magnetomotive force) is generated to weaken the magnetic force of the permanent magnet 7 and make it substantially zero, and current is applied to the electromagnets 32 not facing the magnetic segments 11 so that a magnetomotive force (same direction magnetomotive force) is generated to strengthen the magnetic force of the permanent magnet 7. As a result, a force is applied to the core protrusions 51 of the electromagnets 32 whose magnetic force is strengthened, attracting each magnetic segment 11, and since the fixed body 1 is fixed, a propulsive force is generated relatively in the moving body 2. At the timing when each core protrusion 51 faces each magnetic segment 11, current is switched to each electromagnet 31, 32, and current is applied to the electromagnets that the core protrusions 51 no longer face so that a magnetic force is increased, and current is applied to the electromagnets that the core protrusions 51 face so that a magnetic force is substantially zero. By repeating this, the moving body 2 moves in the X direction. The same is true for the Y direction. A more detailed configuration of the current control can be performed in the same way as for a normal electromagnetic linear motor, so a detailed explanation will be omitted. 3, when moving in the X direction, the electromagnets 31, 32 of the total of four X-direction electromagnet set 3 are simultaneously energized as described above. When moving in the Y direction, the electromagnets 41, 42 of the total of four Y-direction electromagnet set 4 are simultaneously energized as described above.

[0028] As shown in Fig. 1, the control panel 8 is fixed to the side of the fixed body 1. The control panel 8 and the movable body 2 are connected by a harness 9, which includes current-carrying wires 23 and a pressure-supply hose 24 to the electromagnets 31, 32, 41, and 42. Fig. 5 is a front schematic diagram showing the configuration of the harness. In Fig. 5, (1) is a front partial cross-sectional schematic diagram, and (2) is a plan schematic diagram. As shown in FIG. 5, a pair of upper and lower brackets 91 are fixed to the side plate of the casing 200. A holder 92 is attached between the pair of brackets 91. The holder 92 is attached via a vertical rotation shaft pin 93 and is rotatable. The harness 90 is configured by connecting a pair of upper and lower linked tags 94 in the length direction. The leading edge of each linked tag 94 is arc-shaped, and a step is formed at the rear end into which the leading edge of the rear linked tag 94 is dropped. The edge of the step is also arc-shaped and matches the arc shape of the leading edge. The leading edge of the rear linked tag 94 is dropped into the step, and both are connected by a rotation shaft pin 95. Each rotation shaft pin 95 is a pin with a vertical rotation axis. This structure is symmetrical up and down, and the electric wire 23, the pressure supply hose 24, etc. are inserted into the hollow space.

[0029] Due to the above-mentioned structure, the harness 9 is capable of bending and stretching in a horizontal plane in accordance with the movement of the mobile object 2. On the other hand, the harness 9 is prevented from bending in the vertical direction by the connection of each linked tag 94, and the harness 9 will not come into contact with the fixed object 1. The harness 9 has a length sufficiently longer than the distance from the control panel 8 when the mobile object 2 is located at the furthest position.

[0030] The moving device of this embodiment is equipped with a position and distance monitoring function. The moving device of the embodiment is designed to avoid a complex and large structure while being equipped with the position and distance monitoring function, and to avoid a large increase in weight of the moving body 2 and a deterioration in weight balance. This point will be described below with reference to Fig. 6. Fig. 6 is a front cross-sectional schematic diagram showing a more detailed structure of an electromagnet set in the moving device of the first embodiment.

[0031] The moving device of the embodiment employs a configuration in which a capacitor is formed between the moving body 2 and the fixed body 1, and the movement distance and the position after movement are identified by detecting the change in capacitance accompanying the movement. In this case, in order to avoid a complicated structure, a structure is employed in which the core 5 of the electromagnetic linear motor is also used as a capacitor electrode for the position distance monitoring function. The capacitor for the position distance monitoring function is composed of the mutually facing portions of the fixed body 1 and the movable body 2. Therefore, these portions are conductive. More specifically, in this embodiment, it is composed of each core protrusion 51 formed at the lower end of the core 5 of one electromagnet 31, 32, 42, 42 in each electromagnet set 3, 4, and each magnetic material segment 11 on the upper surface of the fixed body 1. These are made of a ferromagnetic material such as iron, and therefore are conductive.

[0032] As described above, the separation means 20, which is a levitation means, separates the moving body 2 from the fixed body 1 by injecting air, but the levitation distance (separation distance) at this time is very small. When the moving body 2 is in a levitated state, the parts closest to the fixed body 1 are the core protrusions 51 of the core 5. On the other hand, the parts closest to the fixed body 1 are the magnetic segments 11. The separation distance between the core protrusions 51 and the magnetic segments 11 (shown as d in FIG. 6) is a short distance of about 5 to 20 μm. The pressure source constituting the levitation means is controlled so that the distance is about this extent. As a result of separating them by such a distance, each core protrusion 51 and each magnetic segment 11 form a capacitor. The ratio of the area where each core protrusion 51 and each magnetic segment 11 face each other changes periodically as the moving body 2 moves. Therefore, by detecting the change in the electrostatic capacitance measured by applying a voltage to the capacitor, the moving distance of the moving body 2 and the position after the movement can be specified as described later.

[0033] What is important in this configuration is to electrically insulate the cores 5 of the electromagnets 31, 32, 42, 42 in the electromagnet sets 3, 4 from each other. The reason for this is that the position distance is monitored by utilizing the 90° phase difference in the sinusoidal change in the capacitance of the capacitor formed by the cores of each electromagnet constituting one electromagnet set. If the two are electrically conductive, the phase difference disappears and position detection within the pitch p becomes impossible. For this reason, it is necessary to detect the change in capacitance for only one core 5, and each core protrusion 51 of a certain core 5 must be insulated from each protrusion 51 of the other core 5. In this case, since each core protrusion 51 is a portion that generates a propulsive force by applying a magnetic force to each magnetic segment 11, it is necessary not to hinder the formation of a magnetic circuit.

[0034] As a means for solving the new technical problems as described above, this embodiment employs a structure in which an insulating layer is interposed between the cores 5 in the electromagnet sets 3 and 4 to insulate them from each other. An insulating sheet 52 is employed as the insulating layer. As shown in FIG. 6, the core 5 is composed of a core body 50 around which the coil 6 is wound, a core head 53 at the tip of which each core projection 51 is formed, and an insulating sheet 52 provided in a state of being interposed between the core body 50 and the core head 53. As the insulating sheet 52, a double-sided tape (a tape with adhesive layers on both sides) having a thickness of about 10 to 100 μm can be suitably used. For example, Kamiton Tape 650S#50 (thickness 50 μm) manufactured by Teraoka Seisakusho Co., Ltd. can be used. The core head 53 corresponds to the core tip in this embodiment.

[0035] The insulating sheet 52 is made of paper or resin, but is basically non-magnetic, so if it is made thick, it will obstruct the magnetic field and will not be able to exert a sufficient magnetic force on each magnetic segment 11. Therefore, it is preferable to make the thickness 100 μm or less. If the thickness of the insulating sheet 52 is thinner than 10 μm, sufficient insulation will not be obtained. The core head 53 is attached in a state where it is pressed against the core body 50 by a frame (not shown). Therefore, the insulating sheet 52 may not be adhesive.

[0036] Moreover, wiring for monitoring the position distance (hereinafter, monitoring wiring) 54 is connected to the core head 53. The monitoring wiring 54 includes a power supply line that applies a voltage to charge a capacitor formed by each core protrusion 51 and each magnetic material segment 11, and a detection line for detecting the capacitance of the capacitor. The monitoring wiring 54 is bundled together with the power supply lines 23 to each electromagnet 31, 32, 42, 42, etc. and is included in the harness 9, and is connected to a detection means 82 for monitoring the position distance built into the control panel 8.

[0037] The configuration of the detection means 82 for monitoring the position distance will be described below with reference to Figures 4, 7 and 8. Figure 7 is a diagram showing the positional relationship between each core protrusion and each magnetic segment in one electromagnet set. Figure 8 is a diagram showing the change in capacitance of a capacitor formed by each core head of one electromagnet set and the magnetic segment 11 facing it. In Figure 7, the core head of one electromagnet 31, 41 constituting one electromagnet set 3, 4 is designated as 53a and the core protrusion as 51a, and the core head of the other electromagnet 32, 42 is designated as 53b and the core protrusion as 51b.

[0038] The detection means 82 can have a configuration similar to that of a resolver that detects the rotation angle of the rotor of a motor. As shown in Fig. 4, the detection means 82 includes a high-frequency application circuit 821 that applies a high-frequency voltage for detection to each core head 53, a capacitance detection circuit 822 that detects the electrostatic capacitance between each core head 53 and the magnetic material segment 11, and an in-pitch position detection circuit 823 that processes the output of the capacitance detection circuit 822 to detect the position within one pitch.

[0039] 7(1) shows the position of the movable body 2 relative to the fixed body 1 in the initial state before it starts to move. For example, in the X direction, in this example, each core protrusion 51a of the core head 53a of one electromagnet 31 is completely opposite each magnetic material segment 11 (their centers are aligned in the up-down direction). Each core protrusion 51b of the core head 53b of the other electromagnet 32 ​​is shifted by p / 4 from each magnetic material segment 11. In this state, the capacitance of one core head 53a is maximum, and the capacitance of the other core head 53b is half that.

[0040] From this state, suppose that the electromagnets are moved a distance of p / 4 by energizing the electromagnets by the energization control unit 81. This state is shown in Fig. 7(2). In this state, the capacitance of one core head 53a decreases from its maximum value to 1 / 2. The other core head 53b has the core protrusions 51b positioned exactly between the magnetic segments 11, so the capacitance becomes substantially zero. Figure 7(3) shows a state where the core head 53a has moved a further p / 4 from the state shown in Figure 7(2). In this state, the capacitance of one core head 53a is substantially zero, and the capacitance of the other core head 53b is 1 / 2 of the maximum value. When the core head 53a is moved a further p / 4, the capacitance of one core head 53a is 1 / 2 of the maximum value, and the capacitance of the other core head 53b is at its maximum value, as shown in Figure 7(4). When the core head 53a is moved a further p / 4, the original state shown in Figure 7(1) is reached.

[0041] In this way, the capacitance detected by the core head 53 of each electromagnet changes periodically as the movable body 2 moves. The change in capacitance detected by the core head 53 of the other electromagnet is shifted by exactly p / 4 from the change in capacitance detected by the core head 53 of one electromagnet. Since the movement of the pitch p is one cycle (360 degrees), this means that there is a shift of 1 / 4 cycle (90 degrees).

[0042] 8(1) shows the high frequency voltage applied to each of the core heads 53a and 53b. The high frequency voltage is applied to each of the core heads 53a and 53b in synchronization with each other. Figures 8(2) and (3) show the change in capacitance in each of the core heads 53a and 53b when the moving body 2 moves while the high frequency voltage is applied. Figure 8(2) shows the change in capacitance in one core head 53a, and Figure 8(3) shows the change in capacitance in the other core head 53b. The capacitance detection circuit 822 is configured to discharge the capacitor at the peak timing of the high frequency voltage and detect the capacitance at the time of discharge from the amount of current that flows at that time.

[0043] In Figures 8(2) and (3), the change in capacitance of each capacitor is the change in capacitance detected at the peak of the high-frequency voltage, and corresponds to the envelope curve (not shown) that traces the peak. As can be seen from Figures 8(2) and (3), the envelope curves are out of phase with each other by 90 degrees, so when one is sinθ, the other is cosθ. Therefore, the value of θ when a certain capacitance is detected can be calculated by tanθ={(sinθ) / (cosθ)}, and the tan -1 This θ indicates the position within pitch p, which means that the position within pitch p at which the movement will end can be determined. The in-pitch position detection circuit 823 is configured to perform the above calculation to specify the position within one pitch p.

[0044] The detection means 82 includes a circuit 824 that detects the number of periodic changes in the capacitance of one of the core heads 53. For example, it includes a circuit that detects the number of peaks on the positive side of the envelope sin θ shown in Figure 8 (2). Hereinafter, this circuit 824 will be referred to as a peak count circuit. The detection means 82 is equipped with a movement distance calculation circuit 825 that calculates the movement distance according to the number of peaks counted by the peak count circuit 824 and the in-pitch position identified by the in-pitch position detection circuit 823. That is, the movement distance calculation circuit 823 calculates the number of peaks x (distance of) pitch p + in-pitch position, and outputs it as the movement distance. If the position at the time when the movement started is identified, the position after the movement can also be identified by calculating the movement distance as described above. The detection means 82 has such a configuration in both the X direction and the Y direction, so that the movement distance and the position after movement can be specified in both the X direction and the Y direction.

[0045] As shown in Fig. 4, the moving device of the embodiment includes a main control unit 80 in a control panel 8. The main control unit 80 controls each element of each energization control unit 81 and detection means 82. Information on the pitch p and the standby position of the moving body 2 is provided as constants in the main control unit 80. The main control unit 80 includes an input unit (not shown) into which an external command related to movement is input. The main control unit 80 is configured to transmit a control signal for movement in the X direction and / or Y direction to the energization control unit 81 in accordance with the information input to the input unit, and to have the detection means 82 detect and monitor the position of the moving body 2 during movement.

[0046] For example, when a command to move a distance XX in the X direction from the standby position is input from the outside, the main control unit 80 divides that distance by pitch p to determine the number of pitches and calculates the remainder (hereinafter referred to as the remainder distance). Then, it sends an operation signal to the energization control unit 81 and has the detection means 82 perform detection to monitor the movement distance. After the peak count circuit 824 in the detection means 82 counts the peak of the pitch number, when the detection value of the in-pitch position detection circuit 823 matches or is closest to the remainder distance, it sends a stop signal to the energization control unit 81 to stop energization. The main control unit 80 is configured so that such control is performed in the Y direction in addition to the X direction.

[0047] Next, a usage example of the moving device of this embodiment will be described below. In the following description, an example will be taken of the moving device being mounted on a processing device that processes a workpiece. The workpiece is placed on the movable body 2 and, if necessary, is fixed so as not to shift on the movable body 2. For example, the movable body 2 has vacuum suction holes on its upper surface, which are used for vacuum suction to fix the workpiece. An electrostatic chuck structure for electrostatic adhesion may be provided on the upper surface of the movable body 2. Alternatively, a separate table may be fixed on the movable body 2, and a vacuum suction mechanism and an electrostatic chuck may be provided on the table.

[0048] Before and after a workpiece is placed on the moving body 2, an external command regarding movement is input to the main control unit 80. The external command includes information on the direction of movement and the distance of movement. The main control unit 80 sends a control signal to the energization control unit 81 according to the external command, and moves the moving body 2 a predetermined distance in the X direction and / or Y direction. At this time, a monitoring signal (a signal indicating the position after movement or the detection result of the distance moved) is constantly sent from the detection means 82 to the main control unit 80, and when the moving body 2 has moved a distance to reach the position specified by the external command, a stop signal is sent to the energization control unit 81 and the moving body 2 stops. In addition, in the stopped state, a control signal is sent to the energization control unit 81 so that an excitation current flows through all the coils 6 in a direction that makes the magnetic field of the permanent magnets 7 zero.

[0049] After that, a predetermined process is performed on the workpiece on the moving body 2, and if it is necessary to process the workpiece in another position, an external command is input to the main control unit 80 to move it. The main control unit 80 includes a storage unit such as a memory, and a module that stores the position (X-direction position and Y-direction position) at the time when the movement is completed in the storage unit. When the next movement is to be performed, the movement direction and movement distance are calculated based on the position (XY coordinates) at the time of the previous movement completion, and a control signal is sent to each current control unit 81 according to a signal from the detection means 82 so that the movement in this direction and distance is performed. According to the in-pitch position at the time of the previous movement completion, the electromagnet to be excited first is selected so that the magnetic force from the core protrusion 51 located in front of the direction of movement acts first to start the movement.

[0050] In the operation of the moving device, the movements in each direction may be performed separately in order, such as moving in the X direction and then moving in the Y direction, or may be performed simultaneously. When they are performed simultaneously, the electromagnets 31 and 32 of the X-direction electromagnet set 3 and the electromagnets 41 and 42 of the Y-direction electromagnet set 4 are energized simultaneously, and the moving body 2 moves in an oblique direction. The oblique direction may be a 45-degree angle, or may be another angle. When moving obliquely at an angle other than 45 degrees, the electromagnets 31 and 32 of the X-direction electromagnet set 3 and the electromagnets 41 and 42 of the Y-direction electromagnet set 4 are energized with a difference in energizing current.

[0051] In the moving device of this embodiment, the core 5 of the electromagnet sets 3, 4 is configured to double as a capacitor electrode in the position distance monitoring function, so that the moving device is equipped with a position distance monitoring function while avoiding an increase in size and complexity of the structure. When multiple electromagnet sets 3, 4 are provided in each of the X and Y directions as in the embodiment, it is sufficient that the configuration for detecting the capacitor capacitance for the position distance monitoring function is added to only one electromagnet set 3, 4 for each direction. However, it is also possible to detect the capacitor capacitance of multiple electromagnet sets 3, 4 for each direction and take the average of each to obtain the detection result of the in-pitch position. Furthermore, in the configuration of the above embodiment, the insulating layer is not necessarily required. The insulating layer is provided in consideration of the fact that the cores 5 of the two electromagnets constituting the electromagnet set are electrically conductive because they are connected by the yoke 71 and the bridge plate 72. Therefore, if the cores 5 of the two electromagnets constituting the electromagnet set are not electrically conductive, it is sufficient to connect the high frequency application circuit 821, the capacitance detection circuit 822, etc.

[0052] However, the yoke 71 has the effect of preventing leakage of the magnetic field from each permanent magnet 7 and each electromagnet, thereby increasing the magnetic flux acting on each magnetic segment 11, and is significant in generating a higher thrust force with a small excitation current. Therefore, the insulating layer is significant in that it allows the core 5 to be used also as a capacitor electrode for monitoring the position distance while generating a higher thrust force with a small excitation current. The insulating layer may be the insulating sheet 52 described above, a layer provided by coating, or an insulating spacer in which a plurality of minute insulating members are scattered.

[0053] Also, in the first embodiment, the deviation of the electromagnet pitch p' from the segment pitch p does not have to be p / 4, and may be another deviation. If the deviation is other than p / 4, the difference between that deviation and p / 4 is known (design value), so the in-pitch position is calculated taking that difference into consideration. That is, if the difference (phase difference) from p / 4 is Δθ, Δθ is applied to the periodic change in the other capacitance to make it cosθ, and then θ (in-pitch position) is calculated as described above by combining it with the periodic change in one capacitance sinθ. However, it is more preferable to set it to p / 4, as this simplifies the calculation.

[0054] Next, a moving device according to a second embodiment will be described. Figures 9 and 10 are schematic diagrams of the main parts of the moving device according to the second embodiment, and are schematic diagrams showing the arrangement of each electromagnet set. Figure 9 is a schematic plan view showing the arrangement of each electromagnet set in the second embodiment, and Figure 10 is a schematic plan cross-sectional view showing the arrangement of each electromagnet in the moving body. In the second embodiment as well, the overall horizontal arrangement is such that two X-direction electromagnet sets 3 are arranged in each of the second and fourth quadrants shown in FIG. 9, and two Y-direction electromagnet sets 4 are arranged in each of the first and third quadrants.

[0055] In the second embodiment, unlike the first embodiment, one electromagnet set 3, 4 is composed of three electromagnets 31-33, 41-43. Hereinafter, for convenience of explanation, the three electromagnets are called the first electromagnets 31, 41, the second electromagnets 32, 42, and the third electromagnets 33, 43. The three electromagnets 31-33, 41-43 are arranged at intervals shifted by p / 3 with respect to a natural number multiple of the pitch p. That is, for example, as shown in FIG. 9 in the X direction, if each core protrusion 51 of the core 5 of the first electromagnet 31 faces each magnetic material segment 11, each core protrusion 51 of the core 5 of the second electromagnet 32 ​​faces each other at a shift of p / 3. Each core protrusion 51 of the core 5 of the third electromagnet 33 faces each other at a shift of 2p / 3.

[0056] The configuration of the three electromagnets 31-33, 41-43 constituting each electromagnet set 3, 4 is the same as that of the first embodiment. The upper sides are fixed to each other by a bridge plate 72, on which each permanent magnet 7 is disposed, and a yoke 71 is further provided above the bridge plate 72 to form a magnetic circuit. The core 5 of each electromagnet is composed of a core body 50 and a core head 53, and the core body 50 and the core head 53 are insulated from each other by an insulating sheet 52 as an insulating layer. The insulating layer is also a thin layer of about 10 to 100 μm, and while being electrically insulated, allows magnetic flux to pass through sufficiently so that the strength of the magnetic field radiating from each core protrusion 51 becomes sufficiently high.

[0057] 11 is a schematic diagram showing an example of the excitation current of each electromagnet constituting one electromagnet set in the second embodiment. In this example, the excitation current of each electromagnet 31 to 33, 41 to 43 changes in a sinusoidal shape. As an example, the excitation current of the first electromagnet 31 in the X-direction electromagnet set 3 is I 1 , the excitation current of the second electromagnet 32 ​​is I 2 , the excitation current of the third electromagnet 33 is I 3 As shown in Fig. 11, each excitation current I 1 ,I 2 ,I 3is a current that reaches a negative peak when each core protrusion 51 of the electromagnet to which it is applied faces (becomes coaxial with) the magnetic material segment 11, and reaches a positive peak when each core protrusion 51 faces a recess between the magnetic material segments 11. Since each core 5 is shifted by p / 3, the excitation currents are also shifted in phase by 120 degrees, and are applied voltages similar to three-phase AC.

[0058] In this manner, with one electromagnet set 3, 4 being composed of three electromagnets 31-33, 41-43 and excited by excitation currents shifted in phase by 120 degrees, the moving body 2 can be propelled with effectively large power, as in the case of three-phase AC transmission, resulting in high power efficiency, increased propulsion force, and reduced power consumption.

[0059] In this embodiment as well, the position distance monitoring function is realized by detecting the change in the electrostatic capacitance of the capacitor formed by the core head 53 and the magnetic segment 11 of each of the electromagnets 31-33, 41-43 constituting one electromagnet set 3, 4. The in-pitch position detection circuit 823 detects the in-pitch position by processing a three-phase AC signal, and the configuration for this purpose is to convert the three-phase AC to two-phase and then calculate tan θ={(sin θ) / (cos θ)} in the same way, and -1 A configuration may be adopted in which the position within the pitch is detected by θ (see, for example, http: / / deadsection.image.coocan.jp / dead_sec / conv3-2 / conv3-2.htm). Since the converted two-phase signal is shifted by 30 degrees and 120 degrees from the unconverted first-phase signal, the configuration is such that θ (position within the pitch) is identified by performing calculations taking this into account.

[0060] In the above embodiments, an air-floating type levitation means is used as the separation means 20, but other separation means may be used. For example, a separation means using a micro-rolling body may be used. In this case, the surface of the fixed body 1 facing the moving body 2 is made flat by filling the gaps between the magnetic segments 11 with a non-magnetic and insulating material (e.g., resin). The rolling bodies are spherical bodies such as bearings, and retainers that house the rolling bodies are provided at the four corners of the moving body 2. The rolling bodies are allowed to roll while protruding slightly downward from the retainers. In this configuration, the part where the rolling bodies are in contact is not the part that exerts the propulsive force, but this part means that the moving body is not separated from the fixed body.

[0061] Furthermore, even when levitation means is used, magnetic levitation may be used instead of air levitation. For example, when moving in one dimension, guide plates are provided on both sides along the direction of movement, and the moving body 2 moves inside the guide plates. In this case, magnets are placed between the side of the moving body 2 and the guide plates to apply magnetic force and attract it. The attractive forces due to the magnetic fields on both sides are made equal and balanced, which causes it to levitate from the fixed body 1. However, in a configuration in which an air-floating type levitation means is used as the separation means 20, there is no problem of magnetic interference with the action of the magnetic force for movement, and there is no need to fill in the gaps between each magnetic segment to make the surface of the fixed body facing the movable body flat, resulting in the effect of simplicity.

[0062] In the above embodiments, the configuration in which the tip surface of each core head 53 is uneven and the core protrusions 51 are formed has the effect of increasing the magnetic flux density of the magnetic force acting on each magnetic segment 11 and increasing the magnetic field efficiency. The present invention can be implemented even if the tip surface of each core head 53 is a flat surface, but the magnetic flux will be in a state of almost uniformly diverging from the tip surface, and some of it will act on each magnetic segment 11 to generate a thrust force, so there will be a lot of magnetic flux that is not used to generate the thrust force. In the configuration in which each core protrusion 51 is formed, the magnetic flux will gather in the part with high magnetic permeability and will diverge after converging on each core protrusion 51. Therefore, the magnetic flux density will be higher and the thrust force will be generated more efficiently.

[0063] It is preferable that the width (length in the moving direction) of each core protrusion 51 does not differ significantly from the width of each magnetic material segment 11. For example, it is preferable that the width of each core protrusion 51 is in the range of about 1 / 2 to 2 times the width of each magnetic material segment 11. The arrangement pitch p of each magnetic material segment 11 may be different in the X direction and the Y direction. In this case, the detection means 82 calculates the movement distance and the position within the pitch in the X direction using the pitch px in the X direction as a known constant, and calculates the movement distance and the position within the pitch in the Y direction using the pitch py in the Y direction as a known constant. In relation to the above, each magnetic material segment 11 is described as having a columnar shape with a square cross section, but may also have a columnar shape with a rectangular cross section. [Explanation of symbols]

[0064] 1 Fixed body 11 Magnetic segment 2. Mobile 20 Separation means 21 Nozzle 3 X-direction electromagnet set 31 Electromagnet 32 Electromagnet 33 Electromagnet 4 Y-direction electromagnet set 41 Electromagnet 42 Electromagnet 43 Electromagnet 5 cores 51 Core protrusion 52 Insulation sheet 6 Coils 7. Permanent Magnets 71 York 8 Control Panel 80 Main control unit 81 Power supply control unit 82 Detection Methods 821 High frequency application circuit 822 Capacitance detection circuit 823 In-pitch position detection circuit 824 Peak count circuit

Claims

1. A moving device comprising: a fixed body that is long in at least one direction; a moving body that faces the fixed body and is movable in the one-dimensional direction relative to the stationary fixed body; and a separating means for separating the moving body from the fixed body at least in a portion where a propulsive force is applied, the moving body being moved in the one-dimensional direction to a desired position, a surface of the fixed body facing the movable body is provided with magnetic segments made of a large number of ferromagnetic bodies arranged at a constant pitch in the one-dimensional direction; At least two electromagnets are arranged in line in the one-dimensional direction on a surface of the movable body facing the fixed body, the electromagnets generating magnetic flux in a state directed toward any one of the magnetic material segments, the separating means separates the movable body from the fixed body while maintaining a separation distance at which the magnetic forces formed by the electromagnets act on the magnetic material segments, so that the movable body moves in the one-dimensional direction due to the attractive or repulsive force generated by the magnetic forces acting on the magnetic material segments; the electromagnets are arranged at intervals that are offset from a natural number multiple of the pitch of the arrangement of the magnetic material segments, and a current control unit is provided that controls current flow to each electromagnet to move the moving body in the one-dimensional direction; Each magnetic segment is made of a conductor. The core tip portion of each electromagnet, which is the portion of the core facing the fixed body, is a conductor, and the core tips of each electromagnet are electrically insulated from each other, A moving device characterized in that a detection means is provided for detecting the position or moving distance of the moving body in the one-dimensional direction from the electrostatic capacitance value of a capacitor formed by each magnetic segment and each core tip.

2. A moving device comprising: a fixed body elongated in a two-dimensional direction; a moving body opposed to the fixed body and movable in the two-dimensional direction relative to the stationary fixed body; and a separating means for separating the moving body from the fixed body at least in a portion where a propulsive force is applied, the moving body being moved in the two-dimensional direction to a position of interest, a surface of the fixed body facing the movable body is provided with magnetic segments made of a large number of ferromagnetic bodies arranged at a constant pitch in the two-dimensional direction; At least two electromagnets are arranged on a surface of the movable body facing the fixed body, the electromagnets generating magnetic fluxes toward the magnetic material segments in each of the two-dimensional directions, the separating means separates the movable body from the fixed body while maintaining a separation distance at which the magnetic forces formed by the electromagnets act on the magnetic material segments, so that the movable body moves in any one of the two-dimensional directions due to an attractive or repulsive force generated by the magnetic forces acting on the magnetic material segments; the electromagnets are arranged at intervals that are offset from a natural number multiple of the pitch of the arrangement of the magnetic material segments, and a current control unit is provided that controls current flow to the electromagnets to move the moving body in the two-dimensional direction; Each magnetic segment is an electrical conductor, A core tip portion of each electromagnet, which is a portion of the core facing the moving body, is a conductor, and the core tips of each electromagnet are electrically insulated from each other, A moving device characterized in that it is provided with a detection means for detecting the position or movement distance of the moving body in any of the two-dimensional directions from the capacitance value of a capacitor formed by each magnetic segment and each core tip.

3. the two-dimensional direction is a direction in a horizontal plane, 3. The moving apparatus according to claim 2, wherein said separating means is a means for lifting said moving body from said fixed body by jetting air.

4. The cores of the electromagnets are provided with a yoke on the opposite side to the core tip end, and are magnetically connected to each other, an insulating portion is provided to insulate the core tip of each electromagnet from electrical conduction through a yoke; 4. The moving device according to claim 1, wherein the insulating portion does not impede the magnetic force generated by each electromagnet from acting on each magnetic segment.

5. 5. The moving device according to claim 4, wherein the insulating portion is an insulating layer having a thickness of 10 [mu]m to 100 [mu]m.

6. Three electromagnets are arranged in a line in the one-dimensional direction on a surface of the movable body facing the fixed body, the electromagnets generating magnetic fluxes toward the magnetic material segments, 2. The moving device according to claim 1, characterized in that when the three electromagnets in the one-dimensional direction are arranged in adjacent order as a first electromagnet, a second electromagnet, and a third electromagnet, and the pitch of the arrangement of each of the magnetic material segments is p, the second electromagnet is arranged at a displacement of p / 3 from the first electromagnet relative to a natural number multiple of the pitch p, and the third electromagnet is arranged at a displacement of 2p / 3 from the first electromagnet relative to a natural number multiple of the pitch p.

7. three electromagnets are arranged on a surface of the movable body facing the fixed body in each of the two-dimensional directions to generate magnetic fluxes toward each of the magnetic material segments; 4. A moving device as described in claim 2 or 3, characterized in that the three electromagnets in each direction are arranged in adjacent order as a first electromagnet, a second electromagnet, and a third electromagnet, and when the pitch of the arrangement of each of the magnetic segments is p, the second electromagnet is arranged at a displacement of p / 3 from the first electromagnet relative to a natural number multiple of the pitch p, and the third electromagnet is arranged at a displacement of 2p / 3 from the first electromagnet relative to a natural number multiple of the pitch p.

8. three electromagnets are arranged on a surface of the movable body facing the fixed body in each of the two-dimensional directions to generate magnetic fluxes toward each of the magnetic material segments; 5. The moving device according to claim 4, characterized in that when the three electromagnets in each direction are arranged in adjacent order as a first electromagnet, a second electromagnet, and a third electromagnet, and the pitch of the arrangement of each of the magnetic segments is p, the second electromagnet is arranged at a displacement of p / 3 from the first electromagnet relative to a natural number multiple of the pitch p, and the third electromagnet is arranged at a displacement of 2p / 3 from the first electromagnet relative to a natural number multiple of the pitch p.

Images