Modular material handling robot platform

Abstract

To provide a structural platform inside a vacuum chamber.SOLUTION: A robot control system includes a vacuum chamber, a robot operating inside the vacuum chamber, and an external controller for receiving communications from a host controller, and the vacuum chamber includes a first base plate having a linear drive component, a power coupling component, and a plurality of transport guides. The first base plate combines with a second base plate to implement a structural platform inside the vacuum chamber. The robot includes a robot driving portion that moves inside the vacuum chamber along a transport guide, and an arm that is movable together with the robot driving portion. Communications received at an external controller from a host controller is cooperated with an internal controller to provide closed-loop control for the robot.SELECTED DRAWING: Figure 25A

Description

[Technical field]

[0001] The exemplary and non-limiting embodiments relate generally to a substrate transport assembly.

[0002] Robots for transporting substrates are known. Linear drive systems for transport of substrate transport robots are also known, such as those described in U.S. Patent Application Publication Nos. 2016 / 0229296, 2013 / 0071218, 2015 / 0214086, and 2017 / 0028546, which are incorporated herein by reference in their entirety.

[0003] The following summary is intended to be exemplary only and is not intended to limit the scope of the claims. The present application discloses a robot control system comprising a vacuum chamber, a robot operating within the vacuum chamber, and an external controller configured to receive communications from a host controller; the vacuum chamber is configured to have a first base plate having at least one of a linear drive component and a power coupling component connected to a top surface of the first base plate and a plurality of transport guides disposed on a top surface of the first base plate, the first base plate having at least one alignment feature configured to align an edge of the first base plate with an edge of a second base plate, the first base plate being configured in combination with the second base plate to provide a structural platform within the vacuum chamber; the robot includes a robot driving unit and at least one arm, the robot driving unit has at least one motor and is configured to move within the vacuum chamber along the plurality of transport guides, the at least one arm has a coupling portion that is coupled to the robot driving unit and is configured to be movable together with the robot driving unit; The communications received at the external controller from the host controller are configured to cooperate with an internal controller to provide closed-loop control of the robot.

[0004] The present application also discloses a robot control system, comprising: a vacuum chamber, a robot operating within the vacuum chamber, an external controller configured to receive communications from a host controller, and a first optical communication module disposed on a wall of the vacuum chamber; the vacuum chamber is configured to have a first base plate having at least one of a linear drive component and a power coupling component connected to a top surface of the first base plate and a plurality of transport guides disposed on a top surface of the first base plate, the first base plate having at least one alignment feature configured to align an edge of the first base plate with an edge of a second base plate, the first base plate being configured in combination with the second base plate to provide a structural platform within the vacuum chamber; the robot includes a robot driving unit and at least one arm, the robot driving unit has at least one motor and is configured to move within the vacuum chamber along the plurality of transport guides, the at least one arm has a coupling portion that is coupled to the robot driving unit and is configured to be movable together with the robot driving unit; the at least one motor has at least one motor amplifier, and the robot drive is configured to move within the vacuum chamber along the plurality of transport guides; the external controller comprises a master controller and an input / output module; the robot control system further comprises a second optical communication module disposed on a wall surface of the robot driving section and configured to establish an optical communication link between the external controller and the first optical communication module; the optical communication link is configured to receive at least one optical signal from the first optical communication module and configured to transmit and receive data over varying distances; The communications received at the external controller from the host controller are configured to cooperate with the data received from the optical communications link to provide closed-loop control of the robot.

[0005] The present application also discloses a method including providing a vacuum chamber, providing a robot operating within the vacuum chamber, receiving at an external controller a communication from a host controller, and establishing an optical communication link between a first optical communication module disposed on a wall of the vacuum chamber and a second optical communication module disposed on a wall of the robot drive; the vacuum chamber is configured to have a first base plate having at least one of a linear drive component and a power coupling component connected to a top surface of the first base plate and a plurality of transport guides disposed on a top surface of the first base plate, the first base plate having at least one alignment feature configured to align an edge of the first base plate with an edge of a second base plate, the first base plate being configured in combination with the second base plate to provide a structural platform within the vacuum chamber; the robot includes the robot driving unit and at least one arm, the robot driving unit has at least one motor and is configured to move within the vacuum chamber along the plurality of transport guides, the at least one arm has a coupling portion that is coupled to the robot driving unit and is configured to be movable together with the robot driving unit, the at least one motor has at least one motor amplifier, and the robot drive is configured to move within the vacuum chamber along the plurality of transport guides; the external controller comprises a master controller and an input / output module; the optical communication link is configured to receive at least one optical signal from the first optical communication module and configured to transmit and receive data over varying distances; The communications received at the external controller from the host controller are configured to cooperate with the data received from the optical communications link to provide closed-loop control of the robot.

[0006] The present application also discloses an apparatus comprising a first base plate and a number of rails on an upper side of the first base plate. The first base plate is configured such that at least one linear drive component and / or at least one power coupling component is connected to the upper side of the first base plate. The first base plate is configured to be disposed within a vacuum chamber. An edge of the first base plate includes at least one alignment mechanism configured to align the edge with an edge of a second base plate. The first base plate is configured to combine with the second base plate to provide a structural platform within the vacuum chamber for movement of a robot drive within the vacuum chamber along the number of rails. The present application also discloses a method including connecting a first base plate assembly within a vacuum chamber and connecting a second base plate assembly within the vacuum chamber. The first base plate assembly includes a first base plate and a first plurality of rails on an upper side of the first base plate. The second base plate assembly includes a second base plate. An end of the second base plate is connected to an end of the first base plate. The first base plate assembly includes at least one alignment mechanism configured to align the end of the first base plate with the end of the second base plate. The first base plate is configured to combine with the second base plate to provide a structural platform within the vacuum chamber for movement of a robot drive within the vacuum chamber along the first plurality of rails. The present application also discloses a method including providing a first base plate, providing a plurality of rails on an upper side of the first base plate, providing at least one alignment mechanism on an edge of the first base plate configured to align the edge with an edge of a second base plate, and connecting to the upper side of the first base plate at least one of a power coupling component configured to transfer power to another power coupling component of a robot drive, the power transfer being by induction, and a linear motor component configured to provide a magnetic field to move the robot drive along the plurality of rails, the first base plate being configured to connect with the second base plate in the vacuum chamber to provide a structural platform within the vacuum chamber for movement of the robot drive within the vacuum chamber along the first plurality of rails. [Brief description of the drawings]

[0007] The foregoing aspects and other features are explained in the following description taken in conjunction with the accompanying drawings.

[0008] [Figure 1] 1 is a schematic top view of a substrate processing apparatus including features as described herein;

[0009] [Diagram 2] 2 is a perspective view of a substrate transport device of the substrate processing apparatus shown in FIG.

[0010] [Diagram 3] FIG. 3 is a perspective view of the substrate transport device shown in FIG.

[0011] [Figure 4] 4 is a perspective end view of the substrate transport apparatus shown in FIGS. 2 and 3 shown inside a transport chamber of a substrate processing apparatus; FIG.

[0012] [Diagram 5] FIG. 5 is a side view of a robot of the substrate transport apparatus shown in FIGS.

[0013] [Figure 6] FIG. 6 is a top view of the robot shown in FIG. 5.

[0014] [Figure 7] FIG. 7 is a schematic cross-sectional view of the robot shown in FIGS. 5 and 6.

[0015] [Figure 8] 1 is an end view of a substrate transport apparatus inside a transport chamber of a substrate processing apparatus.

[0016] [Figure 9] 2A-2C are diagrams illustrating various systems that may be used in conjunction with the apparatus shown in FIG. 1.

[0017] [Figure 10] 2 is a schematic top view of a substrate transfer apparatus inside a transfer chamber of the substrate processing apparatus shown in FIG. 1;

[0018] [Figure 10A] 11 is a cross-sectional end view of a substrate transport apparatus inside a transport chamber of the substrate processing apparatus shown in FIG. 10.

[0019] [Figure 11] FIG. 11 is an end view of the substrate transport apparatus inside the transfer chamber as shown in FIG.

[0020] [Figure 12] 12 is a perspective view showing one of the magnetic driving portion and the driven member of the linear motor shown in FIG. 10 and FIG. 11.

[0021] [Figure 13] FIG. 13 is a perspective view of the magnetic drive unit shown in FIG.

[0022] [Figure 14] FIG. 12 is a perspective view of a power module for use with the apparatus shown in FIGS. 10 and 11.

[0023] [Figure 14A] FIG. 15 is a perspective view showing the relative layout of the power modules shown in FIG.

[0024] [Figure 15] FIG. 14 illustrates power coupling using the power module shown in FIGS. 14 and 14A.

[0025] [Figure 16] FIG. 16 is an isometric view of one exemplary embodiment coupling shown in FIG. 15.

[0026] [Figure 17] FIG. 12 is a schematic diagram showing some components of the optical communication system shown in FIGS. 10 and 11.

[0027] [Figure 18] FIG. 2 is a perspective view of a substrate transport apparatus on a bottom wall of a transport chamber.

[0028] [Figure 18A] 13 is a perspective view of an alternative embodiment of a substrate transport apparatus on a bottom wall of a transport chamber.

[0029] [Figure 19] 1 is a schematic top view of a substrate processing apparatus including features as described herein;

[0030] [Figure 20A] FIG. 1 is a schematic side view of a material handling robotic platform including features as are described herein.

[0031] [Figure 20B] FIG. 20B is an end view of the platform shown in FIG. 20A.

[0032] [Figure 20C] FIG. 25 is a top plan view of the platform shown in FIGS. 20A and 20B.

[0033] [Figure 20D] FIG. 25 is a partial perspective view of an end of one of the base plate assemblies of the platform shown in FIGS. 20A-20C.

[0034] [Figure 20E] FIG. 1 is a partial perspective view of a rail or magnetic levitation guide integrally formed on a base plate assembly.

[0035] [Figure 20F] FIG. 13 is a partial cross-sectional view of one of the base plate assemblies showing a portion of the opening and seal.

[0036] [Figure 21A] 1 is a schematic side view of a cross-section of a material handling robot platform and a chamber including features as described herein.

[0037] [Figure 21B] FIG. 21B is an end cross-sectional view of the platform shown in FIG. 21A.

[0038] [Figure 21C]FIG. 21C is a top cross-sectional view of the platform shown in FIGS. 21A and 21B.

[0039] [Figure 22A] 1 is a schematic side view of a cross-section of a material handling robot platform and a chamber including features as described herein.

[0040] [Figure 22B] FIG. 22B is an end cross-sectional view of the platform shown in FIG. 22A.

[0041] [Figure 22C] FIG. 22C is a top cross-sectional view of the platform shown in FIGS. 22A and 22B.

[0042] [Figure 23A] 1 is a schematic side view of a cross-section of a material handling robot platform and a chamber including features as described herein.

[0043] [Figure 23B] FIG. 23B is an end cross-sectional view of the platform shown in FIG. 23A.

[0044] [Figure 23C] FIG. 23C is a top cross-sectional view of the platform shown in FIGS. 23A and 23B.

[0045] [Figure 24] FIG. 13 illustrates the use of multiple sensors to illustrate the transition between a linear magnetic levitation track / guide and a magnetic levitation gap sensor target.

[0046] [Diagram 25] 1A-1D illustrate exemplary embodiments showing an example of a linear robot control system. [Figure 26] 1A-1D illustrate exemplary embodiments showing an example of a linear robot control system. [Figure 27] 1A-1D illustrate exemplary embodiments showing an example of a linear robot control system. [Figure 28] 1A-1D illustrate exemplary embodiments showing an example of a linear robot control system. [Figure 29] 1A-1D illustrate exemplary embodiments showing an example of a linear robot control system. [Diagram 30] 1A-1D illustrate exemplary embodiments showing an example of a linear robot control system. Detailed Description of the Embodiments

[0047] Referring to Figure 1, a schematic top plan view of an apparatus 10 incorporating features of exemplary embodiments is shown. Features are described with reference to the exemplary embodiment shown in the drawings, but it will be understood that these features may be implemented in various alternative forms of embodiment. Furthermore, any suitable size, shape, or type of elements or materials may be used.

[0048] In this example, the apparatus 10 is a substrate processing apparatus. The substrate processing apparatus 10 generally comprises a substrate transport apparatus 12 (also referred to as a linear vacuum robot), a number of substrate processing chambers 14, a transfer chamber 15, an equipment front end module (EFEM) 16, and a substrate cassette elevator 18. The transfer chamber 15 may be maintained as, for example, a vacuum chamber or an inert gas chamber. The transport apparatus 12 is disposed within the chamber 15 and configured to transport substrates 20, such as semiconductor wafers or flat panel displays, between, for example, the chambers 14, 15 and a stationary transfer chamber or load lock 22. The EFEM 16 is configured to transport substrates 20 between the substrate cassette elevator 18 and the stationary transfer chamber 22. In this example, the EFEM comprises a robot 24 having a SCARA arm. The robot 24 is configured to move linearly within the EFEM, as indicated by arrow A. However, any suitable type of EFEM may be provided. The apparatus 10 comprises a controller 50. The controller 50 comprises at least one processor 52 and at least one memory 54 containing computer program code 56. The controller 50 is configured to control the operation of the various devices and robots of the apparatus 10.

[0049] With further reference to Figures 2-4, perspective and end views of the substrate transport apparatus 12 are shown. In this example, the substrate transport apparatus 12 includes a robot 26, a robot housing 28, and a linear drive system 30. Figures 2 and 3 show the substrate transport apparatus 12 on the bottom wall of the transfer chamber 15, with the sides and top wall of the transfer chamber 15 not shown. Figure 4 shows the substrate transport apparatus 12 on the bottom wall or floor of the transfer chamber 15, with only the top wall of the transfer chamber 15 not shown. The robot 26 is connected to the robot housing 28, which is movable relative to the chamber 15 by a linear drive system 30. The linear drive system 30 includes guides 32 on the floor of the transfer chamber 15 and tracks or carriages 33 on the outer bottom side of the housing. For a magnetically levitated linear drive system, the tracks may be separated from the guides 32 by a magnetic / electromagnetically maintained gap. For a non-magnetically levitated linear drive system, the guides may include rails on which the tracks ride. In an alternative example, the guides can be magnetic levitation transport guides or tracks. In one example, the tracks 33 can have wheels attached to the bottom side of the housing, which run on the rails 32. The linear drive system 30 is configured to move the robot housing 28, which in turn moves the substrate transporter 12 within the transport chamber 15 along the rails 32 in a linear path, as shown by arrow B in FIG. 1. In an alternative embodiment, the robot 26 can be mounted on a non-enclosed slide or platform rather than a housing, which in turn has tracks and runs on the rails / guides 32. In another alternative, the guides and tracks can be provided on the side walls of the chamber 15 in addition to or instead of the floor of the chamber 15.

[0050] 5-7, the robot 26 generally comprises a robot drive 34 and a robot arm assembly 36 connected to the robot drive 34. The robot 26 shown in FIGS. 5-7 is merely one example of a robot having multiple end effectors for moving a substrate and should not be construed as limiting. Any suitable type of robot, robot drive, and robot arm may be provided. In this example, the robot arm assembly 36 is a two-arm configuration. Each of the arms 36a, 36b of the robot arm assembly 36 has an arm link, pulley, band, and substrate supporting end effector 38 driven by coaxial drive shafts 40a, 40b, 40c of the robot drive 34. In an alternative example, the drive may include multiple drive shafts that are non-coaxially aligned with each other. The robot drive 34 includes a motor 42 a , 42 b , 42 c for each drive shaft, a vertical drive system 44 including a motor 46 , and various position encoders / sensors 48 a , 48 b , 48 c for the motors 42 and / or drive shafts 40 and vertical drive system 44 .

[0051] The robot 26 is mounted to the robot housing 28 such that substantially all of the robot 26, except for the robot arm assembly 36, is disposed within the robot housing 28. This is best shown, for example, in FIGS. 3 and 4. Specifically, the robot arm assembly 36 is disposed outside the housing 28 adjacent to the top side of the robot housing 28, and the drive shafts 40a, 40b, 40c extend from the remainder of the drive section 34 disposed within the housing 28 through openings 58 (see FIG. 3) within the top side of the robot housing 28. A seal 60 (see FIG. 3) is provided at the opening 58 to seal the opening 58 while allowing the drive shafts 40a, 40b, 40c to pivot and move vertically when moved by the vertical drive system 44. According to this type of embodiment, the area within the housing 28 may have a different environment than the area within the chamber 15. For example, the area within the housing may simply be in an air environment at atmospheric pressure, while the area within the chamber 15 (outside the housing 28) may be in a vacuum environment or an inert gas environment.

[0052] Nested Environments

[0053] FIG. 8 illustrates a schematic of a "nested" type configuration that may be used in one example. The robot housing 28 may provide a sealed robot housing for the robot drive 34, except for a small portion of the drive shaft that extends through an opening 58. More specifically, all of the motors 42, 44, all of the sensors 48, all of the electrical wiring, and most of the drive shaft 40 (see FIG. 7) are sealed within the robot housing 28. All of the active electrical hardware of the robot drive 34, including the sensors and motors, may be kept within the sealed robot housing 28 in region 29 shown in FIG. 8, isolated from the environment outside the robot housing 28 in region 17 of the transfer chamber 15. Region 17 may be maintained as an isolated environment within the transfer chamber 15, isolated from the external atmospheric environment 13. Thus, environment 29 is nested within environment 17, which isolates environment 29 from the external atmospheric environment 13 (normal atmosphere 13 outside chamber 15). Environment 29 may be, but need not be, a vacuum environment, even if environment 17 is a vacuum environment. The fact that environment 29 within robot housing 28 need not be a vacuum environment can help prevent out-gassing of vapors from components within robot housing 28. This nesting of environments (region 29 nested within region 17) applies particularly to robot housing 28 that is movable within transfer chamber 15 without impeding or being interfered with in linear relative movement along the length of transfer chamber 15.

[0054] 9, in this example, the apparatus 10 includes a linear drive system 30, an electrical power coupling system 62, a data communication coupling system 64, and a heat transfer coupling system 66. The electrical power coupling system 62 may be used to provide electrical power to the components within the housing 28. The data communication coupling system 64 may be used to transmit data signals to the components within the housing 28 (and / or to the components within the arm through the housing) and / or to transmit data signals from the components within the housing 28 to a data processor outside the chamber 15 (and / or from the components within the arm through the housing). The heat transfer coupling system 66 may be used to transfer heat from the components within the housing 28 to outside the chamber 15. In alternative exemplary embodiments, the electrical power coupling system 62 and the data communication coupling system 64 may be at least partially combined to reduce the number of components within the region 17 of the chamber 15. In some embodiments, an apparatus may be provided that does not include all of the above-mentioned systems.

[0055] In the illustrated example, all of these systems 30, 62, 64, 66 may be configured so as not to obstruct or interfere with the nested environment shown in Figure 8. In other words, it is preferred that these systems 30, 62, 64, 66 be constructed such that when all four systems 30, 62, 64, 66 are in operation, the environment within the enclosure 28 is isolated from the environment within the chamber 15.

[0056] Linear motor

[0057] 10 and 11, the linear drive system 30 generally comprises a linear motor 70. The linear motor 70 is an electric motor whose stator and rotor are essentially "non-rotating". Thus, instead of generating torque (rotation), it generates a linear force along its length. An example of this is disclosed in U.S. Patent Publication No. 2015 / 0214086, which is incorporated herein by reference in its entirety. The figures show the linear motor disposed below the housing 28. However, in alternative embodiments, one or more components of the linear drive may not be disposed below the housing 28. For example, the linear motor and / or components of the linear drive system 30 may be disposed on the sides of the housing 28 and the chamber 15.

[0058] In an exemplary embodiment, the linear drive system 30 may include a magnetic levitation system utilizing a non-contact magnetic support and guidance subsystem. Referring also to FIGS. 12 and 13, the linear motor 70 in the illustrated example utilizes a modular design including a fixed magnetic drive 72 and a driven member 76. The drive 72 has a generally "U" shape in this example. The generally "U" shape defines a slot 73 with opposing electromagnets 74 on the top and bottom sides of the slot 73. As best shown in FIG. 10, the drive 72 is fixedly mounted in alignment on the bottom wall of the chamber 15 and the driven member 76 is attached to the exterior of the bottom side of the robot housing 28. In an alternative example, the drive 72 may be attached to the robot housing 28 and the rail 76 may be fixedly attached to the transport chamber 15.

[0059] A shield may be provided around the linear rail. Referring also to FIG. 10A, the transfer chamber 15 houses a robot having a linear rail 32 and track 30. The linear rail and track may be partially or completely enclosed within a shield 31. The purpose of the shield is to reduce or eliminate the upward movement of undesirable particulate or contaminating material from the rail or track into the transfer chamber while still allowing motion of the robot in the direction of the rail. Additionally, the shield, which may be a single piece or an assembly of pieces, prevents the movement of material, particles, wafer debris from the transfer chamber into the operating area of ​​the linear rail. This helps prevent contamination / jamming of the linear rail mechanism.

[0060] The transfer chamber may further include a vent port 16 and a pump port 17, with the vent port positioned generally toward the top of the chamber 15 and the pump port positioned below or within the shielded region of the shield 31. Such an arrangement also prevents migration of contaminants from the shielded region into the transfer chamber. If the vent port is activated, molecules from the vent port will move toward the pump port, carrying with them any airborne contaminants in the process. Even if the vent port is closed, activating the pump will draw any contaminants from the chamber into the shielded region.

[0061] As best seen in FIG. 12, the driven member 76 extends into a slot in the "U" shaped drive 72. The drive 72 may therefore autonomously utilize the same rails 76 that extend from the bottom side of the robot housing 28. In alternative embodiments, fewer or more guide rails may be provided and positioned in other arrangements, such as, for example, on the side walls of the chamber 15. As discussed above, the modular linear drive system may utilize a non-contact magnetic drive forcer subsystem. This subsystem may include one or more linear motor modules and one or more position feedback modules. Using the above example, the housing 28 may move linearly within the chamber 15, as shown by arrow B in FIG. 1, without the need to run any wires within the housing 28. The linear motor 70 is entirely outside the housing 28, and therefore the inclusion of the linear motor 70 does not increase the risk of interference between the two regions 17, 29. Additionally, because driven member 76 does not contact any of the drivers 72 and the drive of the driven member is simply magnetically controlled, the risk of contaminants from driven member 76 and driver 72 in region 17 is reduced. Power to driver 72 may be controlled by controller 50 shown in Figure 1. Driver 72, or portions of driver 72, may be energized to generate a magnetic field to move driven member 76 in linear direction B (e.g., accelerate and decelerate) and also magnetically lock housing 28 in a fixed position in front of chambers 14 and 22 as appropriate.

[0062] Each linear motor module may have a stationary passive magnetic stainless steel portion. The stationary passive magnetic stainless steel portion may have a toothed portion that interacts with a corresponding primary forcer. The passive portion may or may not have a magnet. Multiple supports may utilize the same secondary forcer autonomously. Each linear motor module may have a primary forcer coupled to the support, where the primary forcer may have three-phase wiring and a permanent magnet. In an alternative embodiment, the permanent magnet may be provided as part of the driven member to counteract gravity and dynamic loads. In an alternative embodiment, the permanent magnet may be provided as part of one or more of the magnetic bearings to counteract gravity and dynamic loads. An example of a possible primary and secondary forcer topology is the Siemens 1FN6 design. In an alternative embodiment, any suitable forcer may be provided. The permanent magnet of the forcer may be provided as a component that facilitates both efficient thrust (coupled to wiring) generation and payload counteracting, such that the magnetic bearings minimize power usage during normal operation. Here, the attractive force between the forcer and the corresponding passive rail can be set to a nominal clearance such that this force counteracts the force due to gravity, resulting in minimal power consumption. Additionally, the clearance set point can be changed such that as the payload changes, the clearance is adjusted such that the attractive force counteracts the force due to gravity, resulting in minimal power consumption as the payload changes. For example, the clearance of the left forcer can be changed independently of that of the right forcer. Voltages can be selectively applied to the magnetic coils of the primary forcers by the advanced control subsystem to generate thrust on the support against the fixed passive magnetic stainless steel secondary forcers. Each fixed passive magnetic stainless steel secondary forcer can be mounted with its teeth pointing vertically downward. This allows the attractive force of the permanent magnets of the primary forcers to counteract the weight of the support and the payload, minimizing the DC component that needs to be applied by the vertical coils of the non-contact magnetic support guidance subsystem.

[0063] Power Combination System

[0064] 14, in this exemplary embodiment, the power coupling system 62 is configured to use magnetic induction resonance effects to transmit power to the substrate transport apparatus 12, such as for use with components within the housing 28. The power coupling system 62 generally comprises a power coupling or module 78 on the inner bottom wall of the transport chamber 15 and a power coupling or module 80 on the outer bottom side of the robot housing 28. As best shown in FIGS. 14A, 4, 10 and 11, a plurality of primary modules 78 may be arranged in an array on the bottom wall of the transport chamber 15, and a secondary module 80 may be arranged on a row of primary modules 78 attached to the outer bottom side of the housing 28. An example of inductive power transfer of a substrate transport apparatus is disclosed in U.S. Patent Publication No. US2016 / 0229296, which is incorporated herein by reference in its entirety. The power coupling may be combined with a communication device.

[0065] 15, a block diagram representation of an exemplary embodiment of the power coupling system 62 is shown. As shown, the power coupling system 62 may include an alternating current (AC) power source 82, a power coupling to at least one primary module 78 and at least one secondary module 80, and an optional rectifier circuit 84. AC power 86 is provided to the primary module 78, which provides power to the secondary module 80 through a gap 88, which provides AC power 90 to the rectifier circuit 84. The secondary module 80 moves with the robot housing 28 while the primary module 78 remains stationary. However, in alternative examples, the primary and secondary modules may be configured to move relative to one another, including translationally, rotationally, or a combination of the two. The primary and secondary modules may be primary or secondary cores, or primary or secondary rails. In alternative aspects, any suitable combination or shape may be provided. For example, electrical wire(s) from module 80 may extend through a sealed opening in housing 28 to provide electricity, for example, to the robot's motors 42 and / or controllers (e.g., servo motor controllers, etc.) and / or communications equipment and / or sensors within housing 28, or subsequently to devices in or on the robot arm assembly 36. In alternative embodiments, two or more modules 80 may be provided and mounted on one or more sides of housing 28. Because modules 78, 80 do not contact each other, the risk of contamination within chamber 15 is reduced as module 80 moves relative to module 78.

[0066] 16, an isometric view of an alternative embodiment of one example of the power coupling 62a is shown. As best shown in FIG. 14, the primary module(s) 78 may be comprised of a primary core or rail 94 and a primary winding or coil 96. These may be configured, for example, to be supplied by an AC power source 82 such that an AC current through the primary winding 96 generates an AC magnetic flux in the primary core or rail 94. The primary core or rail 94 may feature an extension 98 along the direction of relative motion B between the primary module 78 and the secondary module 80. The secondary module 80 may be comprised of a secondary core or rail 100 and a secondary winding or coil 102 configured such that the AC magnetic flux in the secondary core or rail 100 induces a voltage in the secondary winding 102. The secondary core or rail 100 may travel along the extension 98 of the primary core or rail 94 as part of the secondary module and may be positioned such that magnetic flux may pass between the extensions of the primary and secondary cores or rails at the shoe portion across the gap 104 between the extensions 98 of the primary and secondary cores or rails 100. The output of the secondary winding 102 may be used directly as an AC power source, or if DC power is required, the secondary winding may feed a rectifier circuit 84 (e.g., inside the housing 28), which may function as the DC power source 92 as shown in FIG. 15. The primary winding 96 and the secondary winding 102 may feature substantially the same number of turns such that the amplitude of the output voltage of the secondary winding is substantially equal to the amplitude of the voltage provided by the AC power source 82. If the required output voltage is higher, the number of turns of the secondary winding 102 may be greater than the number of turns of the primary winding 96. Conversely, if a lower output voltage is required, the number of turns in the secondary winding 102 may be fewer than the number of turns in the primary winding 96. The primary core 94 and secondary core 100 may be C-shaped, as shown diagrammatically in FIG. 16, E-shaped, or may feature any suitable shape that enables inductive coupling between the primary module 78 and the secondary module 80. The extension 98 of the primary core 94 may be straight to accommodate linear movement between the primary module 78 and the secondary module 80, or may be curved to accommodate curved or rotational movement.The primary core 94, extension 98, and secondary core 100 may be fabricated from a soft magnetic material, such as silicon steel, a soft magnetic composite, another material suitable for conducting magnetic flux, or a combination of such materials. A laminated construction may be utilized. Here, the primary and secondary modules may be considered as an inductive section, with the windings being coils. All electrical wiring for the secondary module 80 may be located inside the robot housing 28, such that no wiring is located within region 17. All electrical wiring for the primary module 78 may be located outside the transfer chamber 15, such that no wiring is located within region 17.

[0067] Data communication connection system

[0068] In this example, the data communication coupling system 64 comprises an optical communication system 106 including a first member 108 and a second member 110, as best shown in Figures 10, 11, and 17. The first member 108 is connected to the exterior bottom side of the robot housing 28. In an alternative example, the first member 108 can be inside the housing with an optical window through the housing or can be located on a side of the housing other than the bottom. The second member 110 is connected to a sidewall of the transfer chamber 15. The second member 110 can be located outside the region 17 and still the transfer chamber 15 can have a window for the two members 108, 110 to optically communicate with each other. In another example, the second member 110 can be inside the chamber 15.

[0069] The two members 108, 110 may use one or more laser beams or other optical signals 112 to send and receive data signals at the varying distance between the housing 28 and the chamber 15 as the housing moves within the chamber 15. The data signals may then be sent to and from components within the robot housing 28, such as to control the robot 26 and / or the linear drive system 30, and to send data from sensors of the substrate transporter 12 to the controller 50. All wiring (electrical and / or optical) from the first member 108 may be placed within the robot housing 28 so that no wiring is placed within the region 17. All wiring (electrical and / or optical) from the second member 110 may be placed outside the transport chamber 15 so that no wiring is placed within the region 17. This reduces the risk of contamination within the region 17, such as outgassing from these wirings. This communication system may be combined with a power supply.

[0070] Heat Transfer Coupling System

[0071] As mentioned above, the apparatus 10 may further include a heat transfer coupling system 66. The heat transfer coupling system 66 may be used to provide thermal management for the components of the substrate transport apparatus 12 within the robot housing 28 to transfer heat from within the robot housing 28 to outside the transport chamber 15. This may be particularly important when the area 17 is a vacuum environment with poor heat transfer capabilities. The moving robot housing 28 serves to house all of the advanced control subsystems that move with the substrate transport apparatus 12. The moving robot housing 28 also serves to support a robot transport arm that cooperates with a moving support to transport one or more substrates between multiple positions. As there are active components coupled to the moving robot housing 28, such as the motors 42, for example, the heat generated by the active components may be dissipated by the thermal management subsystem. In the case of a moving support in a vacuum, the heat may be dissipated by radiation or by conduction through a medium, such as a gas or by coupling a bellows to the moving support and circulating a gas or liquid coolant through the coolant. In the case of cooling by radiation alone (or a combination of radiation and convection), a tolerable temperature difference between all or a portion of the moving parts and the chamber may be specified, such as, for example, 50 degrees Celsius. In the illustrated exemplary embodiment, non-contact interleaved fin-like structures 120, 122 (see Figures 2-4, 10, 11) may be used to maximize the facing surface area. High emissivity coatings may also be utilized to maximize the heat transfer associated with the surface area. Examples of suitable coatings may include aluminum oxide, aluminum nitride, or any suitable high emissivity coating. In alternative aspects, any suitable surface or coating may be provided. In the case of a moving support in a gas or inert environment, heat may be dissipated by radiation or convection, or both. Because there are active components coupled to the moving support 28, power and communications may be delivered to the moving support subsystem with the power coupling system 62 and the communications coupling system 64, as described in the examples above. Power and communications may be delivered wirelessly to the moving support subsystem by inductive coupling, service loops, or a combination of these approaches, as described in the examples above.

[0072] The active components coupled to the support may be potted with a vacuum compatible potting or epoxy, or encapsulated within the housing 28, or a combination of both. An example of a suitable moving support thermal sink subsystem is disclosed in Hosek M. and Hofmeister C. (U.S. Application Serial No. 13 / 618,117, filed September 14, 2012, U.S. Patent Publication No. 2013 / 0071218, entitled "Low Variability Robot"), which is incorporated herein by reference in its entirety. However, because a robot housing 28 is used, potting or epoxy may be used in reduced amounts or not at all.

[0073] Alternative examples

[0074] With further reference to FIG. 18, an alternative exemplary embodiment is shown. This embodiment is similar to that shown in FIG. 2 to FIG. 4, but with a reduced form factor. The linear motor is sealed, there are sealed linear bearings and protected optical links. In some circumstances, heat transfer fins may not be necessary. With further reference to FIG. 18A, an alternative, another exemplary embodiment is shown. This embodiment is similar to that shown in FIG. 18, but in this example, the housing 28 does not include heat transfer fins. In this type of embodiment, wall cooling may be provided to the walls of the housing 28 and / or the walls of the vacuum chamber, such as flowing coolant through the chamber walls in the absence of cooling fins. However, such a cooling system may be used in combination with fins. FIG. 18A shows an example of a cooling tube 15a in the wall of the chamber 15'.

[0075] In some embodiments, cooling of the robot may be facilitated by cooling of the vacuum chamber walls. Heat may be transferred from the robot drive to the vacuum chamber walls by radiation or convection, or a combination of the two. Regardless of the mechanism of heat transfer from the robot drive to the vacuum chamber, the amount and rate at which heat is transferred may be increased by cooling of the chamber walls. Cooling of the chamber walls may be accomplished by a number of different methods, or combinations thereof. In one exemplary embodiment, cooling may be accomplished by integrating vent cooling paths directly or indirectly on the vacuum chamber walls. A reduction in the vacuum wall temperature may be accomplished using a continuous or intermittent flow of the working fluid, which may be a liquid, gas, or a combination of the two, such that the working fluid has an initial inlet temperature that is lower than the vacuum chamber wall temperature. This facilitates cooling of the robot drive. In an alternative embodiment, a thermoelectric cooling tile may be used to cool the surface of the vacuum chamber, with heat rejected at a higher temperature on the hot side of the thermoelectric tile, thus allowing for more effective cooling.

[0076] With further reference to Figure 19, an alternative exemplary embodiment is shown. In this example, the system is used between two cluster tools 150a, 150b. The chamber 15 has load locks 152 at both ends coupled to the tools 150a, 150b. The robot housing 28 and attached robot 26 are movable as shown by arrow B to transfer substrates between the tool robots 154a, 154b. The robot can also be used in a vacuum EFEM as in Figure 1.

[0077] Features

[0078] One of the features described herein is the ability of the robot chassis 28 to function as a cart that moves linearly within the transfer chamber 15 carrying all of the components required for the substrate transport apparatus 12, with the only physical contact with the transfer chamber 15 being on the rails 32. However, if a magnetic levitation system is used, then even that contact with the rails 32 may not be necessary.

[0079] Another feature described herein is that substantially all components of the substrate transport apparatus 12, except for the robot arm assembly 36 and the upper part of the robot drive shaft, can be isolated in the robot housing 28 in the region 29. The region 29 can have an atmosphere other than a vacuum, even if the region 17 is a vacuum. This allows the robot 26 to be a non-vacuum compatible robot. For a non-vacuum compatible robot, outgassing is not a significant factor in its design and manufacture. Therefore, a non-vacuum compatible robot does not need to provide a low or zero outgassing design and is less expensive than a vacuum compatible robot. The robot housing 28 can also have a window for optical communication so that the member 108 can be located completely inside the robot housing 28. The power coupling 80 can also be located completely inside the robot housing 28, with a portion of the robot housing 28 having a magnetically transparent section for the two power couplings 78, 80 to function properly by induction. The transport chamber 15 can be equipped with a linear encoder 156 as shown in FIG. 10 to detect the linear position of the robot housing 28 on the rail 32. All communications with components within and / or on the robot housing 28 may be optical or wireless, or via power coupling, so that no communication wires or optical wires need to cross area 17.

[0080] Due to the features described herein, the robot drive 34 may be enclosed by the sealed robot housing 28. Thus, the transfer chamber 15 only requires the rails 32 along which the substrate transport apparatus 12 moves, and there is no other direct physical contact by the transfer chamber 15 to the robot housing 28 or the substrate transport apparatus 12. Even in non-magnetic levitation embodiments, there may always be a gap or space between the transfer chamber 15 and the substrate transport apparatus 12 everywhere else except for the rails 32. This lack of contact reduces contamination of the region 17 by the substrate transport apparatus 12.

[0081] Modular Platform

[0082] Features as described herein may be used to provide a material handling platform having a modular, laterally moving, vacuum environment robot. The modular system may allow for scalability and eliminate the need to manufacture and ship excessively large components. The modular features may be used with one or more of the features described above, or in an entirely different system.

[0083] An exemplary embodiment of a material handling robot platform 200 includes features as described herein, as shown diagrammatically in FIGS. 20A-20D. As shown in these figures, the platform 200 may comprise a robot drive 202 having a robot arm 36 and a controller 50, and one or more base plate assemblies (modules) 204. As an example, three base plate assemblies 204 are shown in FIGS. 20A-20C. However, more or less than three base plate assemblies 204 may be provided. The controller 50 comprises at least one processor 52 and at least one memory 54 containing computer program code 56. The controller 50 is configured to control the operation of the various devices and robots of the apparatus 200. The robot drive 202 may include the features described above, including the linear drive system 30 and the robot drive 34. However, other types of drives may alternatively be used. Also, any suitable robot arm assembly may be provided.

[0084] The base plate assemblies 204 may be identical or may have different features. Each base plate assembly 204 may include a base plate 206 and various modules 208 that may facilitate lateral movement of the robot drive 202 along each base plate assembly 204. For example, the modules 208 may include rails (e.g., for mechanical linear or magnetic bearings, etc.), power transmission components (e.g., service loops, arms, contactless power coupling modules, etc.), communication components (e.g., service loops, arms, wireless radio frequency modules, optical communication modules, communication via contactless power coupling, etc.), linear electric motors (e.g., magnet tracks, stator segments, etc.), and linear position encoders (e.g., scales for optical, magnetic, inductive, or capacitive position encoder readheads, etc.). The modules may be included entirely on individual base plate assemblies 204. Alternatively, the modules may be positioned to straddle two or more adjacent base plates.

[0085] The transport chamber 15 may be provided with a linear encoder 156 as shown in FIG. 10 to detect the linear position of the robot housing 28 on the rails 32. The linear position encoder may have one continuous position track, or multiple in-line position tracks, and may use multiple read heads. Any communication with components in and / or on the robot housing 28 may be optical or wireless, or via power coupling, so that communication electrical or optical wires do not need to cross the region 17. For example, the sensor(s) may include position encoders, such as optical, magnetic, inductive, or capacitive position encoders, laser interferometers, or any other suitable device capable of measuring the position of the robot drive along a desired lateral direction of motion, such as relative to the chamber 15. Measurements from these position sensors may be utilized to control the position of the robot drive along the desired lateral direction of motion of the robot using forces generated by the linear actuators. To accommodate modular designs of the vacuum chamber (i.e., a vacuum chamber consisting of multiple sections), additional encoder read heads for the linear actuation system and / or additional position sensors for the magnetic support system may be utilized to enable smooth transitions between individual sections of the vacuum chamber. Specifically, in the case of mechanical linear bearings, the fixed rails may extend a small distance outside the base plate 206. This allows for a smooth transition in the case of a rectangular arrangement of linear tracks. This feature is not necessary for other arrangements, such as a triangular one.

[0086] The base plate assemblies 204 may be configured to be arranged adjacent to one another such that the robot drive 202 can be moved laterally from one base plate assembly 204 to another, as indicated by arrow B. To this end, as shown, for example, in FIG. 20D, each base plate assembly 204 may feature an alignment feature 210 that allows two adjacent base plate assemblies 204 to be aligned vertically and laterally at joints 211, providing a smooth transition of the robot drive 202 between the two adjacent base plate assemblies 204. By way of example, the alignment feature 210 may be formed by a suitably shaped precise mating surface or a system of pins and cylindrical and / or elliptical holes.

[0087] The base plate assembly 204 may further include a sealing mechanism 212 that, when installed in a vacuum chamber, may facilitate a sealed joint at the joint 211. By way of example, the sealing mechanism 212 may include a polished sealing surface, a coated sealing surface, a groove for a sealing element, and / or a sealing element such as an O-ring.

[0088] The base plate assembly 204 may further include a mechanical connection 214 between the base plate assembly 204 and the vacuum chamber, such as, for example, a hole, a threaded stud, a threaded fastener, or a clamp. The mechanical connection 214 and the base plate 206 itself may be configured such that the various modules 204 that may facilitate lateral movement of the robot drive 202 may be directly alignable with corresponding modules on an adjacent base plate assembly 204.

[0089] 20E, the base plate 206 may include a metal with the rails 32 integrally formed thereon. Alternatively, the rails may be formed separately and then connected to the top side 207 of the base plate 206. In this example, the modules 208 are attached to the top side 207 of the base plate 206. The modules may include, for example, a plurality of magnetic drives 72 and a plurality of power couplings 78 aligned along the longitudinal length of the base plate 206. As shown in FIG. 20F, the base plate 206 may include openings 209, 211 passing between the top side 207 and the bottom side 213. Electrical wires 215, 217 from the modules 72, 78 may reach the controller 50 or other power source / controller through the openings 209, 211. Seals 219, 221 may be provided at the openings 209, 211 to seal the openings 209, 211.

[0090] As shown in Figures 21A-21C, multiple base plate assemblies 204 may be integrated within the vacuum chamber 220. In the example of Figures 21A-21C, three base plate assemblies 204 are used. As shown, the vacuum chamber 220 may include one or more lateral ribs 222 to provide structural strength. The chamber may further be fitted with one or more lids 224. As a feature of the present invention, the above-described design of the base plate assemblies 204 allows the base plate assemblies to be installed from above the chamber, as shown by arrow C, such that each base plate assembly directly faces another base plate assembly without interference from the lateral ribs 222. Thus, facilitating interference-free lateral movement of the robot drive 202 along the entire length of the vacuum chamber 220, as shown by arrow B.

[0091] In this embodiment, the base plate 206 has ledges 223 on its bottom side on opposing sides and both ends (see, e.g., FIGS. 20F and 20A). As best shown in FIG. 21A, the frame of the vacuum chamber has a number of openings through its bottom side. The base plate 206 is positioned in those openings to close them and form at least a portion of the bottom wall of the vacuum chamber. The ledges 223 can rest on the bottom of the vacuum chamber frame with seals 225 (see FIG. 20F) forming a seal at the joint.

[0092] To further avoid the creation and transportation of excessively large components, the vacuum chamber may be divided into sections 240, as shown in Figs. 22A-22C. In the example in Figs. 22A-22C, three sections 240 are shown. The chamber sections may be fitted with one or more lids 224. Each section 240 may utilize one or more base plate assemblies 204 installed as described above with respect to Figs. 21A-21C. The sections 240 may include a connection and sealing mechanism 242 at the joints of the sections 240, for example, 212 in Fig. 20D. Sealing mechanisms may also be used in other areas, possibly at each end of the chamber, so that one section 240 may be attached to the next section 240 with a seal around the entire inner opening area between them. In this example, the area is square or rectangular, as shown in the shape in Fig. 22B. As an example, flanges with fasteners or clamps may be utilized for the mechanical connection. Various sealing elements, such as polished sealing surfaces, coated sealing surfaces, grooves for sealing elements, and / or O-rings, may be used to achieve a suitable seal, these are merely a few examples and should not be construed as limiting.

[0093] The very wide range of X-axis motion for a linear vacuum robot makes it difficult to construct position trajectories for the position sensors that are part of the linear actuator system mentioned above. To overcome this limitation, a two-position sensor split position trajectory approach is disclosed herein. Referring to FIG. 24, when the robot drive traverses in the X-direction, both position sensors RH1, RH2 generate valid position data offset by an interval length F in all cases except when one or the other of the sensors RH1, RH2 targets a transition between the ends of the two position trajectories E1, E2. Note the gap or transition N. The disclosed solution overcomes the period when one sensor data is invalid by switching to another sensor. Since the sensors RH1, RH2 are physically offset from each other for the length of the guide / trajectory E1, E2, at least one of the sensors RH1, RH2 reports a valid position. The location of the transition N between the trajectories E1, E2 is known in advance since it is a design value, and the controller 2406 makes a decision about switching between the sensors RH1, RH2 based on the known location of the transition N. In other embodiments, algorithms may be implemented to use, integrate, or combine data from sensors RH1, RH2 to provide a gradual or smooth data transition when switching between active sensors. During periods when data from both sensors is active, data from both may be combined or integrated in various ways to improve accuracy, resolution, reliability, or noise rejection.

[0094] It should be noted that the very wide range of X-axis motion for a robot supported on magnetic levitation makes it difficult to construct a smooth, continuous surface for the gap sensors to cover. Referring to FIG. 31, there are two vertical sensors P, Q aimed at targets T1, T2. At position L, there is an interruption / transition of targets T1, T2. The gap measurement from either sensor is valid as long as the sensor is not moving through position L. The controller 2406 makes a decision based on the X-axis motion position from sensors RH1, RH2 when the gap sensor is transitioning through L. The algorithm described above is implemented on the controller 2406 to use the gap data from P or Q.

[0095] In an exemplary embodiment, an apparatus is provided, the apparatus comprising: a first base plate and a plurality of rails or transport guides on an upper side of the first base plate. The first base plate is configured such that at least one linear drive component and / or at least one power coupling component is connected to the upper side of the first base plate. The first base plate is configured to be disposed within a vacuum chamber. An edge of the first base plate includes at least one alignment mechanism configured to align the edge with an edge of a second base plate. The first base plate is configured in combination with the second base plate to provide a structural platform within the vacuum chamber for movement of a robot drive within the vacuum chamber along the plurality of rails or transport guides.

[0096] The at least one alignment feature may be configured to align the rails or transport guides with rails or transport guides of the second base plate. The at least one alignment feature may include at least one protrusion extending from the end of the first base plate and at least one recess extending into the end of the first base plate. The end of the first base plate may include at least one mechanical connection feature protruding from the end of the first base plate, the at least one mechanical connection feature configured to be mechanically attached to the second base plate by at least one fastener. The first base plate may be configured to be mechanically attached directly to the vacuum chamber at a bottom side of the vacuum chamber. The first base plate may be configured to form at least a portion of a bottom wall of the vacuum chamber. The first base plate may close an opening through a bottom of the vacuum chamber. The first base plate may include first ledges on two opposing sides thereof, the first ledges being configured to rest on a shelf formed by the vacuum chamber on opposing sides of the vacuum chamber. The first base plate may include second ledges on opposite ends thereof, the second ledges extending laterally through the vacuum chamber and configured to rest on a shelf formed by the vacuum chamber. The first base plate may have a plurality of openings therethrough, the openings configured to allow electrical wires to extend through the first base plate from a bottom side of the first base plate to the top side of the first base plate, the apparatus further comprising a seal configured to seal the openings with the wires. The apparatus may further comprise the vacuum chamber, the vacuum chamber including a plurality of main portions configured to be attached to one another in an end-to-end configuration to form an elongated shaped frame to which the first base plate is connected, the main portions having opposing side walls and a bottom wall portion, and at least one lid portion configured to be removably connected to an upper side of the opposing side walls.The apparatus may further comprise the at least one linear drive component connected to the top side of the first base plate, the at least one linear drive component configured to provide a magnetic field for moving the robot drive along the plurality of rails or transport guides. The apparatus may further comprise the power coupling component configured to transfer power to another power coupling component of the robot drive, the power transfer being by induction.

[0097] An exemplary method may be provided, the method including connecting a first base plate assembly into a vacuum chamber and connecting a second base plate assembly into the vacuum chamber. The first base plate assembly includes a first base plate and a first plurality of rails or transport guides on an upper side of the first base plate. The second base plate assembly includes a second base plate. An end of the second base plate is connected to an end of the first base plate. The first base plate assembly includes at least one alignment mechanism configured to align the end of the first base plate with the end of the second base plate. The first base plate is configured to combine with the second base plate to provide a structural platform within the vacuum chamber for movement of a robot drive within the vacuum chamber along the first plurality of rails or transport guides.

[0098] The second base plate assembly may include a second plurality of rails or transport guides on an upper side of the second base plate, and connecting the second base plate assembly into the vacuum chamber may include having the at least one alignment mechanism align the second plurality of rails or transport guides with the first plurality of rails or transport guides. Connecting the first base plate assembly into the vacuum chamber may include forming at least a portion of a bottom wall of the vacuum chamber with the first base plate. The first base plate may close an opening through a bottom of the vacuum chamber. Connecting the first base plate assembly into the vacuum chamber may include the first base plate having first ledges on two opposing sides thereof, the first ledges resting on shelves formed by the vacuum chamber on opposing sides of the vacuum chamber. Connecting the first base plate assembly into the vacuum chamber may include the first base plate having second ledges on both ends thereof, the second ledges extending laterally through the vacuum chamber and resting on a shelf formed by the vacuum chamber.

[0099] An exemplary method may be provided that includes providing a first base plate, providing a plurality of rails or transport guides on an upper side of the first base plate, providing at least one alignment mechanism on an edge of the first base plate configured to align the edge with an edge of a second base plate, and connecting to the upper side of the first base plate at least one of a power coupling component configured to transfer power to another power coupling component of a robot drive, the power transfer being by induction, and a linear motor component configured to provide a magnetic field to move the robot drive along the plurality of rails or transport guides. The first base plate is configured to be connected to the second base plate in the vacuum chamber to provide a structural platform within the vacuum chamber for movement of the robot drive within the vacuum chamber along the first plurality of rails or transport guides.

[0100] An exemplary embodiment may be provided in an apparatus comprising: means for connecting a first base plate assembly into a vacuum chamber; and means for connecting a second base plate assembly into the vacuum chamber. The first base plate assembly includes a first base plate and a plurality of rails or transport guides on an upper side of the first base plate. The second base plate assembly includes a second base plate. An end of the second base plate is connected to an end of the first base plate. The first base plate assembly includes at least one alignment mechanism configured to align the end of the first base plate with the end of the second base plate. The first base plate is configured to combine with the second base plate to provide a structural platform within the vacuum chamber for movement of a robot drive within the vacuum chamber along the first plurality of rails or transport guides.

[0101] An additional measure to prevent the creation and transportation of excessively large components is to eliminate the need for the base plate 204 of Figures 20 and 21. Figures 23A-23C show an example of an embodiment in which the base plate is an integral part of the chamber 241. The chamber can be a single piece, or a divided piece as shown in Figure 23A. All features and components required to facilitate the lateral movement of the robot drive 202, such as rails or transportation guides (e.g., for mechanical linear bearings or magnetic bearings), power transmission arrangements (e.g., service loops, arms, contactless power coupling modules, etc.), communication arrangements (e.g., service loops, arms, wireless radio frequency modules, optical communication modules, communication via contactless power coupling, etc.), linear electric motors (e.g., magnetic tracks, stator segments, etc.), and linear position encoders (e.g., scales for optical, magnetic, inductive or capacitive position encoder read heads, etc.), can be mounted directly on the floor (or walls) of the chamber 241. The chamber section 241 can have connection and sealing mechanisms 242 at the joints of the section 241. It is contemplated that sealing mechanisms may be used in other areas, such as at each end of the chamber, such that one portion 241 may be attached to the next portion 241 with a seal around the entire inner open area therebetween. In this example, the area is square or rectangular, as shown in the shape in FIG. 23B. As an example, a flange with a fastener or clamp may be utilized for the mechanical connection. Various sealing elements, such as polished sealing surfaces, coated sealing surfaces, grooves for sealing elements, and / or O-rings may be used to achieve a suitable seal. These are merely some examples and should not be considered limiting.

[0102] Linear Vacuum Robot Control System Architecture

[0103] A block diagram of an exemplary embodiment of a linear robot control system is shown in FIG.

[0104] The master controller may perform functions such as a user interface, communication with a host controller (e.g., utilizing serial or Ethernet communications), configuration data management, high-level motion planning (i.e., sequencing of robot movements), trajectory generation (computation of the motion profile for each movement for each motion axis), position control for all motion axes, and an Adaptive Placement System (APS). An example of an adaptive placement system is described in U.S. Patent No. 10,058,996, which is incorporated herein by reference in its entirety.

[0105] The master controller may receive various commands from the host controller, including configuration, request, and action commands (e.g., commands to perform pick or place operations), and may report command completion and other information back to the host controller.

[0106] The master controller may receive, via a high-speed network, the positions of all motion axes (periodically from the motor amplifiers), the status of digital and analog inputs (from the I / O module and, if applicable, from the motor amplifiers), and the timing of digital input changes (from the I / O module and, if applicable, from the motor amplifiers). The master controller may send, via a high-speed network, information to set the commanded currents (periodically to the motor amplifiers) and the digital and analog outputs (to the I / O module and, if applicable, to the motor amplifiers) for each motion axis. Whether a rail-based linear system or a magnetic levitation linear system, the control system may involve the use of optical communication links or other wireless communication links. For example, as shown in FIG. 25, the system may include two optical communication modules with respective viewports in the vacuum chamber wall and the robot drive wall. Thus, an optical communication link may be provided between the external controller and the robot drive (which may include closed-loop control as described above).

[0107] The I / O modules may read digital and analog inputs (which may include inputs from APS sensors) and may set digital and analog outputs. The I / O modules may read information to set digital and analog outputs (from the master controller) over the high speed network and may transmit the status of the digital and analog inputs (to the master controller) and the timing of digital input changes (further back to the master controller) over the high speed network.

[0108] Each motor amplifier may perform functions such as running motor commutation algorithm(s), running a current control loop, reading digital and analog inputs, and setting digital and analog outputs. Each motor amplifier may periodically read measured position(s) from position encoder(s) and set output voltages for control of motor(s). Each motor amplifier may (periodically) receive information for setting commanded current(s) and digital and analog outputs for supported motion axis(es) from the master controller over the high-speed network. Each motor amplifier may (periodically) transmit the measured position of supported motion axis(es), the status of digital and analog inputs, and timing of digital input changes, if applicable, to the master controller over the high-speed network.

[0109] A high-speed network (e.g., EtherCAT) may facilitate communication between the master controller and the I / O modules and motor amplifiers. Outbound traffic (i.e., traffic from the master controller to the I / O modules and motor amplifiers) may include commanded currents for each axis of motion (sent periodically from the master controller to the motor amplifiers) and information for setting digital and analog outputs (sent from the master controller to the I / O modules and, if applicable, to the motor amplifiers). Inbound traffic (i.e., traffic from the I / O modules and motor amplifiers to the master controller) may include measured positions (from the motor amplifiers), status of digital and analog inputs (from the I / O modules and, if applicable, from the motor amplifiers), and timing of digital input changes (from the I / O modules and, if applicable, from the motor amplifiers).

[0110] If APS (Adaptive Positioning System) functionality is required, the APS sensor(s) may be routed to one or more inputs of the I / O module, either directly or via an I / O connection board. The purpose of any I / O connection board is to reduce the number of inputs routed to the I / O module.

[0111] A block diagram of another exemplary embodiment of a linear robot control system is shown in Figure 26. In this exemplary embodiment, the master controller may be located within the robot drive, as opposed to being part of an external controller.

[0112] In the exemplary embodiment of FIG. 26, the master controller may communicate with the motor amplifiers via a high-speed network, substantially similar to the previous embodiment. However, another means of communication may be used for communication between the master controller and the I / O module. As an example, a separate communication network (e.g., Ethernet) may be used. As shown diagrammatically in FIG. 26, the same communication network may also be utilized for communication with the host controller, in which case the network router may be conveniently integrated into the external controller board. Alternatively, separate communication means may be used for communication between the host controller and the master controller, and also for communication between the master controller and the I / O module. These two communication channels may be realized via the same physical medium (e.g., serial communication over Ethernet) or may use different physical media.

[0113] Communication between the master controller and the I / O module may enable synchronization of clocks running on the two devices, or may feature another mechanism to properly time digital input changes on the I / O module for APS calculation purposes (e.g., the offset between the two clocks may be periodically determined and applied as digital input changes occur).

[0114] In yet another exemplary embodiment, high speed communication via bidirectional light beams may be routed through a power coupling, which may use the same set of coils for power transmission or an additional set of coils for data transmission. An exemplary embodiment equivalent to FIG. 25 is shown diagrammatically in FIG. 27, and an exemplary embodiment equivalent to FIG. 26 is shown diagrammatically in FIG. 28.

[0115] Block diagrams of additional exemplary embodiments of a linear robot control system with control of a magnetic support system (magnetic levitation) are shown in FIGS.

[0116] The magnetic levitation controller may implement position control of the robot drive (e.g., five degrees of freedom control associated with the lateral, vertical, pitch, roll, and yaw angles of the robot drive) and operate current control loops for each actuator of the magnetic support system. In this process, the magnetic levitation controller may periodically read the positions measured from the position sensors (e.g., two horizontal and three vertical sensors) of the magnetic support system and set the output voltages for the force actuators (e.g., two pairs of horizontal actuators and three pairs of vertical actuators) of the magnetic support system. The magnetic levitation controller may receive various commands from the master controller over a high-speed network, including commands for lift-off, commands to maintain a given position (which may be conveniently represented as a gap between the robot drive and the guides of the magnetic support system), and commands to land the robot drive. Alternatively, the magnetic levitation controller may receive a stream of commanded positions (e.g., in the form of periodically transmitted data frames) from the master controller.

[0117] As another alternative, the master controller may perform position control of the robot drive via the magnetic support system. In this process, the master controller may periodically receive position measurements from sensors in the magnetic support system from the magnetic levitation controller via a high-speed network, and may periodically send commanded currents for each force actuator of the magnetic support system to the magnetic levitation controller via a high-speed network. In this arrangement, the magnetic levitation controller may still operate a current control loop for each actuator of the magnetic support system.

[0118] To accommodate modular designs of the vacuum chamber (i.e., a multi-section vacuum chamber), additional encoder read heads for the linear actuation system and / or additional position sensors for the magnetic support system may be utilized to allow smooth transitions between the individual sections of the vacuum chamber. This is shown diagrammatically in Figures 29 and 30.

[0119] All of the above-described embodiments may include additional features that are omitted from the drawings for brevity. For example, the external controller may include support for a teach pendant, e-stops, interlocks, safety circuitry (including solid-state components and electromechanical contactor(s)), and energy storage (e.g., batteries and / or capacitors). Similarly, the on-board controller may feature safety circuitry (including solid-state components and electromechanical contactor(s), a back-EMF regeneration system, and power storage (e.g., batteries and / or capacitors).

[0120] Although three axes of rotational motion (T1, T2, and T3) are shown in the exemplary embodiment described above with respect to Figures 25-28, any number of axes of rotation or no axes may be used. Similarly, although one z-axis is shown in the exemplary embodiment described above with respect to Figures 25-28, any number of z-axes or no z-axes may be used.

[0121] It will be understood that the above description is merely illustrative. Various alternatives and modifications may be devised by those skilled in the art. For example, the features recited in each dependent claim may be combined with each other in any suitable combination(s). Furthermore, features of different embodiments described above may be selectively combined to form new embodiments. Accordingly, the above description is intended to cover all such alternatives, modifications, and variations that fall within the scope of the appended claims.

Claims

1. 1. A robot control system, comprising: A vacuum chamber; a robot operating within the vacuum chamber; an external controller configured to receive communications from the host controller; Equipped with the vacuum chamber is configured to have a first base plate with at least one of a linear drive component and a power coupling component connected to a top surface of the first base plate and a plurality of transport guides disposed on a top surface of the first base plate, the first base plate having at least one alignment feature configured to align an edge of the first base plate with an edge of a second base plate, the first base plate being configured in combination with the second base plate to provide a structural platform within the vacuum chamber; The robot comprises: a robot drive having at least one motor and configured to move within the vacuum chamber along the plurality of transport guides; At least one arm having a coupling portion coupled to the robot drive portion and configured to be movable together with the robot drive portion; Equipped with the communications received at the external controller from the host controller are configured to cooperate with an internal controller to provide closed-loop control of the robot; Robot control system.

2. The robotic control system of claim 1 , wherein the closed loop control includes an optical communication link between the vacuum chamber, the robot drive, and the external controller.

3. The robotic control system of claim 1 , wherein the closed loop control includes a wired connection from the external controller to the robot.

4. an input / output module in communication with the external controller; a master controller in communication with the input / output modules and the host controller; The robotic control system of claim 1 .

5. The robotic control system of claim 4 , wherein at least one digital or analog input is received from at least one sensor into the input / output module and at least one digital or analog output is provided to the master controller.

6. The robotic control system of claim 4 , wherein the master controller is configured to receive at least one position of at least one axis of motion from the at least one motor.

7. The robotic control system of claim 1 , wherein the at least one motor includes at least one motor amplifier.

8. The at least one motor amplifier Executing the motor commutation algorithm; Implementing the current control loop; Reading at least one of the digital and analog inputs; At least one digital and one analog output configuration; The robot control system of claim 7 , further comprising:

9. 2. The robotic control system of claim 1, wherein the end of the first base plate comprises at least one mechanical connection mechanism protruding from the end of the first base plate, the at least one mechanical connection mechanism configured to be mechanically attached to the second base plate with at least one fastener.

10. 1. A robot control system, comprising: A vacuum chamber; a robot operating within the vacuum chamber; an external controller configured to receive communications from the host controller; a first optical communication module disposed on a wall of the vacuum chamber; Equipped with the vacuum chamber is configured to have a first base plate with at least one of a linear drive component and a power coupling component connected to a top surface of the first base plate and a plurality of transport guides disposed on a top surface of the first base plate, the first base plate having at least one alignment feature configured to align an edge of the first base plate with an edge of a second base plate, the first base plate being configured in combination with the second base plate to provide a structural platform within the vacuum chamber; The robot comprises: a robot drive having at least one motor; At least one arm having a coupling portion coupled to the robot drive portion and configured to be movable together with the robot drive portion; the at least one motor having at least one motor amplifier, and the robot drive configured to move within the vacuum chamber along the plurality of transport guides; The external controller: A master controller; An input / output module; Equipped with The robot control system further includes a second optical communication module disposed on a wall surface of the robot drive section and configured to establish an optical communication link between the external controller and the first optical communication module; the optical communication link is configured to receive at least one optical signal from the first optical communication module and configured to transmit and receive data over varying distances; the communications received at the external controller from the host controller are configured to cooperate with the data received from the optical communications link to provide closed-loop control of the robot; Robot control system.

11. The robotic control system of claim 10 further comprising at least one placement sensor connected to the input / output module.

12. The robotic control system of claim 11 , wherein the input / output module is configured to read digital and analog inputs from the at least one placement sensor and provide digital and analog outputs to the master controller.

13. The robotic control system of claim 10 , wherein the master controller is connected to the robotic drives by a wired network.

14. The robotic control system of claim 13 , wherein the wired network is configured to enable communication between the master controller, the input / output modules, and the at least one motor amplifier.

15. The robotic control system of claim 10 , wherein the master controller is configured to receive at least one position of at least one axis of motion from the at least one motor amplifier.

16. The at least one motor amplifier Executing the motor commutation algorithm; Implementing the current control loop; Reading at least one of the digital and analog inputs; At least one digital and one analog output configuration; The robotic control system of claim 15 , further comprising:

17. 11. The robotic control system of claim 10, wherein the end of the first base plate comprises at least one mechanical connection mechanism protruding from the end of the first base plate, the at least one mechanical connection mechanism configured to be mechanically attached to the second base plate with at least one fastener.

18. 1. A method comprising: providing a vacuum chamber; providing a robot operable within the vacuum chamber; receiving at an external controller a communication from the host controller; Including, the vacuum chamber is configured to have a first base plate with at least one of a linear drive component and a power coupling component connected to a top surface of the first base plate and a plurality of transport guides disposed on a top surface of the first base plate, the first base plate having at least one alignment feature configured to align an edge of the first base plate with an edge of a second base plate, the first base plate being configured in combination with the second base plate to provide a structural platform within the vacuum chamber; The robot comprises: a robot drive having at least one motor; At least one arm having a coupling portion coupled to the robot drive portion and configured to be movable together with the robot drive portion; the at least one motor having at least one motor amplifier, and the robot drive configured to move within the vacuum chamber along the plurality of transport guides; The external controller: A master controller; An input / output module; Equipped with The method further includes establishing an optical communication link between a first optical communication module disposed on a wall of the vacuum chamber and a second optical communication module disposed on a wall of the robot drive; the optical communication link is configured to receive at least one optical signal from the first optical communication module and configured to transmit and receive data over varying distances; the communications received at the external controller from the host controller are configured to cooperate with the data received from the optical communications link to provide closed-loop control of the robot; method.

19. reading digital and analog inputs from at least one placement sensor in the input / output module; providing digital and analog outputs to said master controller; 20. The method of claim 18, further comprising:

20. The at least one motor amplifier executing a motor commutation algorithm; implementing a current control loop; reading at least one of the digital input and the analog input; configuring at least one of a digital output and an analog output; The method of claim 18, further comprising:

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