Ultrasonic vibration joint device

Abstract

To provide an ultrasonic vibration joint device capable of excellently joining a joined material through ultrasonic vibrating operation by an ultrasonic vibrating horn even if frictional resistance associated with the joined material varies.SOLUTION: A control part 1 outputs an oscillation signal S12 including output information SC to a converter 11 as a control signal. The converter 11 imparts ultrasonic vibrations to an ultrasonic vibrating horn 10 based upon the oscillation signal S12. The ultrasonic vibrating horn 10 performs ultrasonic vibration operation to apply ultrasonic vibrations to the joined material 13 from a bottom face of an abutting tip part 10t. Control operation of the control part 1 using the oscillation signal S12 includes operation continuation processing to continue the ultrasonic vibration operation until the output information SC included in the oscillation signal S12 reaches an output value WX or more.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to an ultrasonic vibration bonding apparatus having an ultrasonic vibration horn that performs ultrasonic vibration action. [Background technology]

[0002] Conventional ultrasonic vibration bonding devices apply pressure from above to the materials to be bonded placed on the surface of a substrate and ultrasonic vibration from an ultrasonic vibration horn to bond the materials to the surface of the substrate. Examples of such ultrasonic vibration bonding devices include the ultrasonic bonding device disclosed in Patent Document 1 and the ultrasonic vibration bonding device disclosed in Patent Document 2.

[0003] Conventional ultrasonic vibration bonding devices perform an ultrasonic vibration operation in which ultrasonic vibration is applied to materials to be bonded using an ultrasonic vibration horn. To perform the ultrasonic vibration operation, an oscillation signal, which is an electric signal, is sent from an ultrasonic oscillator to a converter, which converts the electric signal into ultrasonic vibration, and the obtained ultrasonic vibration is applied to the ultrasonic vibration horn.

[0004] The ultrasonic oscillator outputs an oscillation signal that oscillates at a set oscillation frequency to the converter. The oscillation signal is an electrical signal such as a voltage or current.

[0005] In the conventional ultrasonic vibration bonding device, when bonding multiple bonding points at a fixed pitch on a bonding surface extending in a specific direction, there was a possibility that a first defective point where bonding could not be performed or a second defective point where the bonding material was broken could occur. As a result of the investigation into the cause, it was found that the occurrence of the above-mentioned first and second defective points was due to the frictional resistance of the materials to be bonded. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] JP 2022-61631 A [Patent Document 2] International Publication No. 2018 / 025362 Summary of the Invention [Problem to be solved by the invention]

[0007] Conventional ultrasonic vibration bonding devices use an energy control method as their ultrasonic control method. In other words, conventional ultrasonic control methods use an operation continuation process that continues ultrasonic vibration operation until the consumed energy calculated from the oscillation signal from the ultrasonic oscillator reaches a preset energy (threshold energy). The above-mentioned consumed energy (W s) is defined as the product of the electrical output value (W (att)) and time (s (econd)).

[0008] Fig. 7 is a graph showing the control content of a conventional ultrasonic control method. In the figure, the horizontal axis indicates time (ms) and the vertical axis indicates electrical output value (Power (W)). Fig. 7 shows the change over time of output information SC11 and SC12 in two connection cases (case 11, case 12).

[0009] Here, output information SC11 is an electrical output value (W) for causing the ultrasonic vibration horn to perform an ultrasonic vibration operation in case 11, and output information SC12 is an electrical output value (W) for causing the ultrasonic vibration horn to perform an ultrasonic vibration operation in case 12.

[0010] Case 11 shows the change over time of the output information SC11 when the frictional resistance of the materials to be joined is relatively small, and case 12 shows the change over time of the output information SC12 when the frictional resistance is relatively large. The "frictional resistance of the materials to be joined" is the total frictional resistance at the contact surface between the materials to be joined and the ultrasonic vibration horn (hereinafter, sometimes simply referred to as the "contact surface") and the joining surface between the materials to be joined and the substrate (hereinafter, sometimes simply referred to as the "joining surface"). The frictional resistance is determined by the smaller of the first frictional resistance at the contact surface and the second frictional resistance at the joining surface.

[0011] In case 11, since the frictional resistance is relatively small, the rate of increase in the output information SC11 becomes gradual, and at time t12 when the output information SC11 reaches the output value W1, the consumed energy ΣE1 reaches the energy threshold EX, and the ultrasonic vibration operation ends.

[0012] In case 12, since the frictional resistance is relatively large, the rate of increase in the output information SC2 is relatively steep, and at time t11 when the output value W9 is reached, the consumed energy ΣE2 reaches the energy threshold EX, and the ultrasonic vibration operation ends.

[0013] As described above, in the conventional ultrasonic control method, if there is variation in the frictional resistance of the materials to be joined, variation will occur in the processing time of the ultrasonic vibration operation (times t11, t12) and the final electrical output values ​​(output values ​​W1, W9) indicated by the output information SC (SC1, SC2).

[0014] As a result, conventional ultrasonic vibration bonding devices had a problem in that if there was variation in the frictional resistance of the workpieces among multiple bonding locations, the workpieces could not be bonded well by the ultrasonic vibration action of the ultrasonic vibration horn.

[0015] The ultrasonic vibration bonding device disclosed herein has been made to solve the above-mentioned problems, and has an object to provide an ultrasonic vibration bonding device that can satisfactorily bond the workpieces by the ultrasonic vibration action of an ultrasonic vibration horn, even if there is variation in the frictional resistance of the workpieces. [Means for solving the problem]

[0016] The ultrasonic vibration bonding device according to the present disclosure comprises an ultrasonic vibration horn that performs an ultrasonic vibration operation to apply ultrasonic vibrations from a contact tip to a material to be joined, a converter that imparts the ultrasonic vibration to the ultrasonic vibration horn, and a control unit that performs a control operation to control the ultrasonic vibration operation by the ultrasonic vibration horn, wherein the control unit outputs a control signal including output information to the converter as the control operation, the converter imparts the ultrasonic vibration to the ultrasonic vibration horn based on the control signal, the output information is an electrical output value required for the ultrasonic vibration to vibrate at a predetermined frequency, and the control operation includes an operation continuation process that continues the ultrasonic vibration operation until the output information becomes equal to or greater than an output threshold value. Effect of the Invention

[0017] The control operation executed by the control unit in the ultrasonic vibration bonding device of the present disclosure includes an operation continuation process for continuing the ultrasonic vibration operation until the output information becomes equal to or greater than the output threshold value.

[0018] Therefore, during the period in which the ultrasonic vibration operation is being performed, the converter can always apply ultrasonic vibration to the ultrasonic vibration horn based on the control signal that includes output information equal to or greater than the output threshold.

[0019] As a result, by appropriately setting the output threshold value, the ultrasonic vibration bonding device of the present disclosure can bond the bonding points well even if there is variation in the frictional resistance of the materials to be bonded. [Brief description of the drawings]

[0020] [Figure 1] FIG. 1 is an explanatory diagram illustrating a schematic configuration of an ultrasonic vibration bonding device according to a first embodiment. [Diagram 2] FIG. 2 is an explanatory diagram illustrating the ultrasonic oscillator shown in FIG. 1 and its periphery. [Diagram 3] 5 is a flowchart showing a processing procedure of a control operation in the ultrasonic vibration bonding apparatus of the first embodiment. [Figure 4]4 is a graph showing the control content of an ultrasonic control method in the ultrasonic vibration bonding device of the first embodiment. [Diagram 5] FIG. 11 is an explanatory diagram illustrating a schematic diagram of an ultrasonic oscillator and its periphery in a second embodiment. [Figure 6] 10 is a flowchart showing a control procedure of an ultrasonic control method in a conventional ultrasonic vibration bonding device. [Figure 7] 1 is a graph showing the control content of a conventional ultrasonic control method. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] <Principles of the Disclosure> Conventional ultrasonic vibration bonding equipment uses the energy control method as the ultrasonic control method, so as shown in Figure 7, when bonding multiple joints, there is variation in the operating time of the ultrasonic vibration operation (t12>>t11) and the final electrical output value (W9>>W1).

[0022] The inventors of the present application focused on the electrical output value contained in the oscillation signal rather than the energy calculated from the oscillation signal, and assumed that an ideal output value WR exists for joining materials to be joined.

[0023] When the frictional resistance of the workpieces is lower than normal, as in case 11 shown in FIG. 7, the output value W1 falls far below the ideal output value WR. As a result, it is considered that the workpieces cannot be joined well even if the ultrasonic vibration operation is performed for a relatively long time.

[0024] On the other hand, when the frictional resistance is larger than normal, as in case 12 in Fig. 7, the output value W9 greatly exceeds the ideal output value WR, and as a result, it is highly likely that the workpieces will be damaged. For example, if the workpieces are metal foils, it is highly likely that the metal foils will be destroyed.

[0025] In this way, in the energy control method in which the energy threshold EX is set as the termination condition, when the frictional resistance is too large or too small compared to normal, it is not possible to perform good joining of the workpieces by ultrasonic vibration. In other words, when the frictional resistance varies among multiple joining points, the energy control method cannot cope with this.

[0026] Therefore, the inventors of the present application found that an effective control method is to set an output threshold value WX that matches the ideal output value WR in advance, and to continue the ultrasonic vibration operation until the electrical output value of the oscillation signal reaches the output threshold value WX. The ultrasonic vibration bonding apparatus that adopts the output control method as the ultrasonic control method is the first and second embodiments described below.

[0027] <Embodiment 1> FIG. 1 is an explanatory diagram that illustrates a schematic configuration of an ultrasonic vibration bonding apparatus 101 according to a first embodiment of the present disclosure, which is an ultrasonic vibration bonding apparatus.

[0028] As shown in the figure, an ultrasonic vibration bonding device 101 includes an ultrasonic vibration horn 10, a converter 11, and an ultrasonic oscillator 12 as main components.

[0029] Meanwhile, a substrate 14 is placed on a stage 20, and a material 13 to be joined is placed on the surface of the substrate 14. The material 13 to be joined may be, for example, a metal foil. An interface BF is an interface between the material 13 to be joined and the substrate 14 when they are joined. In this manner, the material 13 to be joined is placed on the stage 20 via the substrate 14.

[0030] The ultrasonic vibration horn 10 has a contact tip 10t at its tip, and performs an ultrasonic vibration operation to apply ultrasonic vibration from the bottom surface of the contact tip 10t to the workpiece 13. In parallel with the ultrasonic vibration operation, a pressurizing operation is performed in which pressure is applied to the ultrasonic vibration horn 10 toward the stage 20 by a pressurizing cylinder 6 (see FIG. 2), not shown in FIG. 1. Only the pressure force F6 during the pressurizing operation by the pressurizing cylinder 6 is shown in FIG.

[0031] The converter 11, which functions as an ultrasonic vibrator, applies ultrasonic vibration to the ultrasonic vibration horn 10. The ultrasonic oscillator 12 includes therein, as a main component, a control unit 1 that executes a control operation to control the ultrasonic vibration operation by the ultrasonic vibration horn 10.

[0032] 2 is an explanatory diagram that shows a schematic diagram of an ultrasonic oscillator 12 and its periphery. As shown in the figure, a control unit 1 in the ultrasonic oscillator 12 outputs an oscillation signal S12 including output information SC to a converter 11 as a control operation. The output information SC included in the oscillation signal S12 is an electrical output value for the ultrasonic vibration applied from the converter 11 to the ultrasonic vibration horn 10 to vibrate at a predetermined frequency. For example, when the oscillation signal S12 is a voltage signal, it is considered that the amplitude (magnitude) of the oscillation signal S12 is the output information SC.

[0033] The control unit 1 outputs an oscillation signal S12 as a control signal to the converter 11. The converter 11, which functions as an ultrasonic transducer, applies ultrasonic vibration to the ultrasonic vibration horn 10 based on the oscillation signal S12.

[0034] As a result, the ultrasonic vibration horn 10 can perform an ultrasonic vibration operation that applies ultrasonic vibration to the workpiece 13 from the bottom surface (contact surface) of the contact tip portion 10t.

[0035] The output information SC included in the oscillation signal S12 is an electrical output value required for the ultrasonic vibration to vibrate at a predetermined frequency in the ultrasonic vibration operation of the ultrasonic vibration horn 10. The momentum of the ultrasonic vibration imparted by the converter 11 to the ultrasonic vibration horn 10 is positively correlated with the output information SC, and the larger the output information SC, the larger the momentum of the ultrasonic vibration.

[0036] In this manner, the control unit 1 controls the ultrasonic vibration operation of the ultrasonic vibration horn 10 by outputting the oscillation signal S12 as a control signal to the converter 11 as a control operation.

[0037] The control operation by the control unit 1 in the ultrasonic vibration bonding apparatus 101 of the first embodiment is characterized by including an operation continuation process for continuing the ultrasonic vibration operation until the output information SC (the electric output value indicated by the output information SC) becomes equal to or greater than the output threshold value WX.

[0038] The ultrasonic vibration horn 10 and the converter 11 have a friction resistance recognition function that recognizes the friction resistance related to the workpiece 13. As described above, the "friction resistance related to the workpiece 13" is the total friction resistance at the contact surface between the workpiece 13 and the ultrasonic vibration horn 10 and the joining surface between the workpiece 13 and the substrate 14. That is, the friction resistance is determined by the smaller of the first friction resistance at the contact surface and the second friction resistance at the joining surface. The friction resistance recognition function can be realized by an existing technology that utilizes, for example, the piezoelectric principle. A detection member for the friction resistance recognition function is provided, for example, in the ultrasonic vibration horn 10, and a feedback signal SF including friction resistance information detected by the ultrasonic vibration horn 10 is output to the control unit 1 in the ultrasonic vibration horn 10 via the converter 11.

[0039] The feedback signal SF is output at a predetermined time interval, which may be, for example, 1 ms.

[0040] In response to receiving the feedback signal SF, the control unit 1 calculates output information SC based on the frictional resistance information included in the feedback signal SF, and outputs an oscillation signal S12 including the newly calculated output information SC to the converter 11 as a control signal.

[0041] The converter 11 then applies to the ultrasonic vibration horn 10 ultrasonic vibration based on the oscillation signal S12 including the newly obtained output information SC.

[0042] During the execution of the ultrasonic vibration operation, the frictional resistance information (frictional resistance value indicated by the frictional resistance information) increases, and therefore the output information SC (electrical output value indicated by the frictional resistance information) also increases. This is because there is a positive correlation between the frictional resistance information and the output information SC. The control unit 1 in the ultrasonic oscillator 12 continues to output the oscillation signal S12 including the output information SC to the converter 11 until the output information SC becomes equal to or greater than the output threshold value WX, and therefore the ultrasonic vibration operation continues to be executed.

[0043] As shown in FIG. 2, the ultrasonic vibration bonding apparatus 101 of the first embodiment is provided with a pressurizing cylinder 6 as a pressurizing mechanism, and the pressurizing cylinder 6 performs a pressurizing operation of applying a pressure F6 to the ultrasonic vibration horn 10 toward the stage 20 under the control of the control unit 1.

[0044] The control unit 1 controls the pressurizing operation of the pressurizing cylinder 6 by outputting a pressurizing control signal SP to the pressurizing cylinder 6 .

[0045] 3 is a flowchart showing the procedure of the control operation in the ultrasonic vibration bonding apparatus 101 of the embodiment 1. As described above, the control operation is performed by the control unit 1, and the ultrasonic vibration bonding apparatus 101 employs an output control method as an ultrasonic control method. Hereinafter, the processing contents of the control operation of the control unit 1 will be described with reference to FIG.

[0046] In step ST1, an output threshold value WX, which is a termination condition parameter in the output control method, is set. The output threshold value WX is set to, for example, the ideal output value WR shown in FIG.

[0047] Next, in step ST2, a pressurizing operation is started by the pressurizing cylinder 6, which is a pressurizing mechanism. Specifically, the control unit 1 outputs a pressurizing control signal SP, which instructs the pressurizing cylinder 6 to start the pressurizing operation, to the pressurizing cylinder 6, whereby the pressurizing operation by the pressurizing cylinder 6 is started.

[0048] Thereafter, in step ST3, it is recognized that the contact between the contact tip 10t of the ultrasonic vibration horn 10 and the workpiece 13 is in contact with the workpiece 13. For example, an existing detection function for detecting the presence or absence of contact between the contact tip 10t and the workpiece 13 is provided in the pressurizing cylinder 6, and when the detection function detects contact, a contact detection signal S6 indicating the contact state is output to the control unit 1, whereby the control unit 1 can recognize the contact state.

[0049] Next, in step ST4, the control unit 1 of the ultrasonic oscillator 12 outputs an oscillation signal S12 including output information SC and oscillating at a predetermined frequency to the converter 11, thereby starting ultrasonic vibration operation by the ultrasonic vibration horn 10. Note that the output information SC at the start of operation is set to a relatively small value.

[0050] In this way, steps ST3 and ST4 are steps in which the contact between the contact tip 10t and the workpiece 13 is used as a trigger to start the ultrasonic vibration operation.

[0051] Thereafter, in step ST5, when the ultrasonic vibration operation is started, the converter 11 outputs the feedback signal SF to the control unit 1 of the ultrasonic oscillator 12. As described above, the feedback signal SF includes friction resistance information indicating the friction resistance value at the contact point between the bottom surface of the contact tip portion 10t and the workpiece 13.

[0052] Based on the frictional resistance information included in the feedback signal SF, the control unit 1 newly calculates the output information SC required to apply ultrasonic vibration of a predetermined frequency to the contact point. There is a positive correlation between the frictional resistance information of the contact point (the frictional resistance value indicated by the information) and the output information SC (the electrical output value indicated by the information).

[0053] Then, in step ST6, the control unit 1 outputs the oscillation signal S12 including the output information SC to the converter 11. The converter 11 then applies ultrasonic vibration to the ultrasonic vibration horn 10 based on the oscillation signal S12 including the output information SC.

[0054] Since the frictional resistance at the contact point increases during the execution of the ultrasonic vibration operation, the output information SC (the electrical output value indicated thereby) also increases. For example, when the output information SC indicates a voltage value (V), usually, since the current value (A) flowing through the converter 11 is constant, the power value (W) of the converter 11 also increases along with the voltage value.

[0055] Next, in step ST7, the output information SC (the electrical output value indicated thereby) is compared with the output threshold value WX. When the output information SC is a voltage value, the output threshold value WX is a voltage value, and when the output information SC is a power value, the output threshold value WX is a power value. As described above, since the current value flowing through the converter 11 is constant, the voltage value and the power value are substantially equivalent electrical output values.

[0056] In step ST7, when {SC≧WX} is satisfied, the process proceeds to the next step ST8 and subsequent steps, and when {SC≧WX} is not satisfied, the process returns to step ST5.

[0057] When {SC<WX} in step ST7, steps ST5 to ST7 are repeatedly executed until {SC≧WX} is satisfied. Thus, step ST7 is a step for repeatedly executing steps ST5 and ST6 until the output information SC becomes equal to or greater than the output threshold value WX.

[0058] Therefore, until the output information SC reaches the output threshold value WX, the output of the oscillation signal S12 effective as a control signal is continued, so that the ultrasonic vibration operation by the ultrasonic vibration horn 10 is continuously executed.

[0059] In step ST8 executed when {SC≧WX} is satisfied in step ST7, the pressurization operation by the pressurization cylinder 6 which is a pressurization mechanism is terminated. Specifically, by outputting a pressurization control signal SP instructing the termination of the pressurization operation from the control unit 1 to the pressurization cylinder 6, the pressurization operation by the pressurization cylinder 6 is terminated.

[0060] Thereafter, in step ST9, the ultrasonic vibration operation by the ultrasonic vibration horn 10 is terminated. For example, the output of the oscillation signal S12 to the converter 11 is stopped to terminate the ultrasonic vibration operation.

[0061] In this way, steps ST8 and ST9 are executed after the output information SC becomes equal to or greater than the output threshold value WX, and are steps for ending the pressurizing operation by the pressurizing cylinder 6 and the ultrasonic vibration operation by the ultrasonic vibration horn 10.

[0062] Fig. 4 is a graph showing the control content of the ultrasonic control method in the ultrasonic vibration bonding apparatus 101 of the embodiment 1. In the figure, the horizontal axis indicates time (ms) and the vertical axis indicates the electric output value (Power (W)). That is, in Fig. 4, the output information SC indicates the power value (W) as the electric output value.

[0063] Case 1 shows the change over time of the output information SC1 in the case where the frictional resistance of the workpiece 13 is relatively small when the ultrasonic vibration horn 10 is performing the ultrasonic vibration operation. That is, case 1 shows the control content in the case where the degree of slippage at the interface BF between the workpiece 13 and the substrate 14 is relatively large, that is, the second frictional resistance at the interface BF that becomes the joining surface is small.

[0064] On the other hand, case 2 shows the change over time of the output information SC2 when the frictional resistance is relatively large. Case 2 shows the control content when there is almost no slippage at the interface BF between the workpieces 13 and the substrate 14, for example.

[0065] In case 1, since the frictional resistance is relatively small, the rate of increase of the output information SC1 becomes relatively gradual, and at time t2, the output information SC1 reaches the output threshold value WX, and the ultrasonic vibration operation ends.

[0066] In case 2, since the frictional resistance is relatively large, the increase in the output information SC2 is relatively steep, and at time t1, the output threshold WX is reached and the ultrasonic vibration operation is terminated. A relatively large time difference dt12 exists between time t1 and time t2.

[0067] When there is almost no slippage at the interface BF (joint surface) between the joined material 13 and the substrate 14 and the frictional resistance of the joined material 13 is relatively large, the output information SC1 reaches the output threshold value WX at time t1, as shown in case 2 of Figure 4.

[0068] On the other hand, when the degree of slippage at the interface BF (joining surface) between the joined material 13 and the substrate 14 is relatively large and the frictional resistance of the joined material 13 is relatively small, as shown in case 1 of Figure 4, the output information SC2 reaches the output threshold WX at time t2, which is delayed by a time difference dt12 from time t1.

[0069] In this way, the control unit 1 of the ultrasonic vibration bonding apparatus 101 of embodiment 1 executes a control operation including an operation continuation process that continues the ultrasonic vibration operation until the output information SC (SC1, SC2) reaches the output threshold value WX, regardless of the level of frictional resistance of the workpiece 13 at the contact point.

[0070] (Conventional ultrasonic control method) Fig. 6 is a flow chart showing the control procedure of the ultrasonic control method of a conventional ultrasonic vibration bonding device. As described above, an energy control method has been used as the ultrasonic control method in the past. The processing procedure of the conventional ultrasonic control method will be explained below with reference to the same figure. Here, for convenience of explanation, it is assumed that the conventional ultrasonic vibration bonding device has a configuration similar to that shown in Figs. 1 and 2, and that a control unit similar to the control unit 1 executes the control operation.

[0071] In step ST51, an energy threshold EX is set, which is a termination condition parameter in the energy control method.

[0072] Next, in step ST52, similar to step ST2 shown in FIG. 3, the pressurization operation by the pressurization cylinder 6 which is a pressurization mechanism is started.

[0073] Thereafter, in step ST53, similar to step ST3 shown in FIG. 3, the contact between the contact tip portion 10t of the ultrasonic vibration horn 10 and the material to be joined 13 is recognized.

[0074] Next, in step ST54, similar to step ST4 shown in FIG. 3, the ultrasonic vibration operation by the ultrasonic vibration horn 10 is started.

[0075] Thereafter, in step ST55, similar to step ST5 shown in FIG. 3, new output information SC necessary for applying ultrasonic vibration of a predetermined frequency to the contact portion where the frictional resistance indicated by the frictional resistance information is generated is newly calculated.

[0076] And in step ST56, similar to step ST6 shown in FIG. 3, the oscillation signal S12 including the output information SC is output to the converter 11.

[0077] Next, in step ST57, the consumed energy ΣE is calculated based on the output information SC of the oscillation signal S12. When the output information SC indicates a power value, the consumed energy ΣE is the integrated value in the change over time of the output information SC.

[0078] Next, in step ST58, the consumed energy ΣE and the energy threshold EX are compared.

[0079] In step ST58, when {ΣE≧EX} is satisfied, the process proceeds to the next step ST59 and subsequent steps. When {ΣE≧EX} is not satisfied, the process returns to step ST55.

[0080] In step ST58, when {ΣE<EX}, steps ST55 to ST58 are repeatedly executed until {ΣE≧EX} is satisfied.

[0081] Therefore, until the output information ΣE reaches the energy threshold EX, the output of the valid oscillation signal S12 continues, so that the ultrasonic vibration operation by the ultrasonic vibration horn 10 is continuously performed.

[0082] In step ST59, which is executed if {ΣE≧EX} is satisfied in step ST58, the pressurizing operation by the pressurizing cylinder 6 is terminated, similarly to step ST8 shown in FIG.

[0083] Thereafter, in step ST60, the ultrasonic vibration operation by the ultrasonic vibration horn 10 is terminated, similarly to step ST9 shown in FIG.

[0084] In this way, the conventional ultrasonic control method adopts an energy control method, which means that the ultrasonic vibration operation ends at time t12 when the output information SC11 is significantly lower than the ideal output value WR (≒WX) as in case 11 shown in Fig. 7, or the ultrasonic vibration operation ends only at time t11 when the output information SC12 is significantly higher than the ideal output value WR as in case 12 shown in Fig. 7.

[0085] (effect) The control operation executed by the control unit 1 in the ultrasonic oscillator 12 in the ultrasonic vibration bonding apparatus 101 of the first embodiment includes an operation continuation process for continuing the ultrasonic vibration operation until the output information SC becomes equal to or greater than the output threshold value WX.

[0086] Therefore, during the execution period of the ultrasonic vibration operation, the converter 11 can always apply to the ultrasonic vibration horn 10 ultrasonic vibration based on the oscillation signal S12 including the output information SC equal to or greater than the output threshold value WX.

[0087] For example, in case 2 shown in Fig. 4, the output information SC2 reaches the output threshold value WX at time t1, and in case 1 shown in Fig. 4, the output information SC1 reaches the output threshold value WX at time t2 delayed by a time difference dt12 from time t1. That is, the ultrasonic vibration bonding device of the first embodiment does not end the ultrasonic vibration operation at the output value W1 where the output information SC11 is significantly lower than the ideal output value WR corresponding to the output threshold value WX, as in case 11 shown in Fig. 7.

[0088] As a result, by appropriately setting the output threshold WX, the ultrasonic vibration bonding apparatus 101 of the first embodiment can satisfactorily bond the workpiece 13 onto the surface of the substrate 14 by the ultrasonic vibration action of the ultrasonic vibration horn 10.

[0089] Therefore, when joining multiple joining points of the workpieces 13, even if there is variation in the frictional resistance of the workpieces 13 among the multiple joining points, the ultrasonic vibration joining device 101 of embodiment 1 can join each of the multiple joining points well.

[0090] For example, by performing an experiment in which the ultrasonic vibration bonding apparatus 101 is used to bond a plurality of bonding points to an experimental bonding material equivalent to the bonded material 13, it is possible to obtain an output threshold value WX that provides an output value that can perform good bonding regardless of the level of friction resistance of the bonded material 13 at the contact points. As the output threshold value WX, for example, the ideal output value WR shown in FIG. 7 can be considered.

[0091] In response to receiving the feedback signal SF, the control unit 1 in the ultrasonic vibration bonding apparatus 101 of embodiment 1 calculates output information SC based on the frictional resistance information contained in the feedback signal SF, and outputs the oscillation signal S12 including the newly calculated output information SC as a control signal.

[0092] Therefore, the control unit 1 in the ultrasonic vibration bonding apparatus 101 of the first embodiment can always output to the converter 11 the oscillation signal S12 including the output information SC reflecting the frictional resistance information included in the feedback signal SF.

[0093] As a result, the ultrasonic vibration bonding apparatus 101 of embodiment 1 can apply ultrasonic vibrations that always vibrate at a predetermined frequency to the workpiece 13 by the ultrasonic vibration horn 10 by causing the ultrasonic vibration horn 10 to perform ultrasonic vibration operation via the converter 11.

[0094] The control unit 1 in the ultrasonic vibration bonding apparatus 101 of embodiment 1 executes control operations including steps ST1 to ST9 shown in FIG. 3, thereby quickly terminating the pressurizing operation by the pressurizing cylinder 6 and the ultrasonic vibration operation by the ultrasonic vibration horn 10 when the output information SC reaches or exceeds the output threshold value WX.

[0095] The ultrasonic vibration bonding apparatus 101 of the first embodiment can cause the ultrasonic vibration horn 10 to perform ultrasonic vibration operation by outputting an oscillation signal S12 as a control signal from the control unit 1 included in the ultrasonic oscillator 12 to the converter.

[0096] <Embodiment 2> Fig. 5 is an explanatory diagram showing a schematic diagram of an ultrasonic oscillator 12B and its periphery provided in an ultrasonic vibration bonding apparatus 102 according to the embodiment 2. The overall configuration of the ultrasonic vibration bonding apparatus 102 is similar to that of the ultrasonic vibration bonding apparatus 101 according to the embodiment 1 shown in Fig. 1, except that the ultrasonic oscillator 12 is replaced with an ultrasonic oscillator 12B.

[0097] Hereinafter, the same components as those of the ultrasonic oscillator 12 of the first embodiment will be denoted by the same reference numerals and the description thereof will be omitted as appropriate, and the description will be centered on the characteristic components of the ultrasonic oscillator 12B of the second embodiment.

[0098] As shown in FIG. 5, a control unit 1B in an ultrasonic oscillator 12B outputs an oscillation signal S12 indicating output information SC to a converter 11, similar to the control unit 1 in the first embodiment.

[0099] The ultrasonic oscillator 12B includes as a main component a timer 2 in addition to the control unit 1B. The control unit 1B receives time information S2 indicating the passage of time from the timer 2, recognizes the processing time of the ultrasonic vibration operation, and outputs to the outside processing time information TP indicating the bonding processing time, which is the processing time of the ultrasonic vibration operation.

[0100] The control unit 1B constantly receives time information S2 from the timer 2, and thereby recognizes, for example, the elapsed time from the start time of the ultrasonic vibration operation in step ST4 shown in FIG. 3 to the end time of the ultrasonic vibration operation in step ST9 as the processing time of the ultrasonic vibration operation.

[0101] Then, the control unit 1B outputs, to the outside of the ultrasonic vibration bonding apparatus 102, processing time information TP indicating a bonding processing time, which is the processing time of the ultrasonic vibration operation.

[0102] Since the control unit 1B in the ultrasonic oscillator 12B in the ultrasonic vibration bonding apparatus 102 of embodiment 2 receives time information S2 from the timer 2, it is relatively easy to recognize the bonding processing time, which is the processing time of the ultrasonic vibration operation by the ultrasonic vibration horn 10, from the time information S2.

[0103] Therefore, the ultrasonic vibration bonding apparatus 102 of embodiment 2 outputs processing time information TP indicating the bonding processing time to the outside, so that a user of the ultrasonic vibration bonding apparatus 102 can use the processing time information TP as information for judging the quality of the bonding.

[0104] <Other> In addition, within the scope of the present disclosure, it is possible to freely combine the respective embodiments, and to appropriately modify or omit the respective embodiments.

[0105] For example, in the first and second embodiments, the control unit 1 (1B) may be provided outside the ultrasonic oscillator 12 (12). Hereinafter, the control unit 1 provided outside is referred to as the "externally arranged control unit." The externally arranged control unit may be configured to control the output form of the oscillation signal S12 of the ultrasonic oscillator 12 and the pressurizing operation of the pressurizing cylinder 6. In this case, the externally arranged control unit outputs the oscillation signal S12 including the output information SC to the converter 11 via the ultrasonic oscillator 12. [Explanation of symbols]

[0106] 1,1B Control section 2. Timer 6. Pressurizing cylinder 10 Ultrasonic vibration horn 11 Converter 12,12B Ultrasonic oscillator 13 Material to be joined 14 Substrate 20 Stages 101,102 Ultrasonic vibration bonding equipment

Claims

1. an ultrasonic vibration horn that performs an ultrasonic vibration operation to apply ultrasonic vibration to the workpiece from a contact tip portion; a converter that imparts the ultrasonic vibration to the ultrasonic vibration horn; a control unit that executes a control operation to control the ultrasonic vibration operation by the ultrasonic vibration horn, the control unit outputs a control signal including output information to the converter as the control operation, the converter applies the ultrasonic vibration to the ultrasonic vibration horn based on the control signal, and the output information is an electrical output value required for the ultrasonic vibration to vibrate at a predetermined frequency, The control operation includes an operation continuation process of continuing the ultrasonic vibration operation until the output information is equal to or greater than an output threshold value. Ultrasonic vibration bonding equipment.

2. 2. The ultrasonic vibration bonding apparatus according to claim 1, the converter outputs a feedback signal including friction resistance information indicating a friction resistance of the workpieces to the control unit when the ultrasonic vibration horn performs the ultrasonic vibration operation, the feedback signal being output at a predetermined time interval; The control unit, in response to receiving the feedback signal, determines the output information based on the frictional resistance information included in the feedback signal, and outputs the control signal including the newly determined output information. Ultrasonic vibration bonding equipment.

3. 3. The ultrasonic vibration bonding apparatus according to claim 2, A stage on which the workpieces are placed; a pressure mechanism for applying pressure to the ultrasonic vibration horn toward the stage, The control operation is (a) initiating the pressurizing operation; (b) starting the ultrasonic vibration operation using contact between the contact tip and the workpiece as a trigger; (c) calculating the output information based on the frictional resistance information indicated by the feedback signal; (d) outputting the control signal including the output information calculated in step (c) to the converter; (e) repeatedly executing steps (c) and (d) until the output information is equal to or greater than the output threshold value; (f) a step of terminating the pressurizing operation and the ultrasonic vibration operation, the step being executed after the output information becomes equal to or greater than the output threshold value; Ultrasonic vibration bonding equipment.

4. 4. The ultrasonic vibration bonding apparatus according to claim 1, further comprising an ultrasonic oscillator that outputs an oscillation signal to the converter; The ultrasonic oscillator has the control unit, The oscillation signal is output as the control signal. Ultrasonic vibration bonding equipment.

5. 5. The ultrasonic vibration bonding apparatus according to claim 4, The ultrasonic generator further includes a timer. The control unit receives time information from the timer, recognizes the processing time of the ultrasonic vibration operation as a bonding processing time, and outputs processing time information indicating the bonding processing time to the outside. Ultrasonic vibration bonding equipment.

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