Dressing member and manufacturing method of the same

Abstract

To provide a dressing member which enables reduction of costs.SOLUTION: A dressing member is used in dressing of a processing tool and includes: a dressing part which has a contact surface configured to come into contact with the processing tool and performs dressing to the processing tool; and a non-dressing part which is provided at the opposite side of the contact surface of the dressing part and does not come into contact with the processing tool. The dressing part includes abrasive grains and a binder for fixing the abrasive grains. The non-dressing part does not include abrasive grains and is formed of the same material as the binder.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a dressing member for use in dressing a machining tool and to a method for producing said dressing member. [Background technology]

[0002] A wafer on which a plurality of devices are formed is divided and diced to produce device chips each including a device. A package substrate is formed by mounting a plurality of device chips on a predetermined substrate and covering and sealing the mounted device chips with a resin layer (mold resin). A package device including a plurality of packaged device chips is manufactured by dividing and dicing this package substrate. The device chips and package devices are incorporated into various electronic devices such as mobile phones and personal computers.

[0003] A cutting device is used to divide wafers and package substrates. The cutting device is equipped with a chuck table that holds the workpiece, and a cutting unit that performs cutting processing on the workpiece. The cutting unit is equipped with a spindle, and a processing tool (cutting blade) with an annular cutting edge is attached to the tip of the spindle. The workpiece is held on the chuck table, and the cutting blade is rotated while cutting into the workpiece, thereby cutting the workpiece.

[0004] In recent years, with the miniaturization of electronic devices, there is a demand for thinner device chips and package devices. Therefore, a process of grinding and thinning undivided wafers and package substrates using a grinding device is sometimes performed. The grinding device includes a chuck table for holding the workpiece and a grinding unit for grinding the workpiece. The grinding unit includes a spindle, and a circular processing tool (grinding wheel) having multiple grinding wheels is attached to the tip of the spindle. The workpiece is held by the chuck table, and the grinding surface of the grinding wheel is brought into contact with the workpiece while rotating the chuck table and the grinding wheel, thereby grinding the workpiece (see Patent Document 1).

[0005] The cutting edge of a cutting blade or the grinding wheel of a grinding wheel is formed by fixing abrasive grains made of diamonds or the like with a bonding material (bond material). If the abrasive grains are not adequately exposed from the bonding material, the processing ability of the processing tool will be reduced, and the force (processing load) acting on the workpiece and the processing tool during processing will increase. This makes the workpiece more susceptible to processing defects such as chipping. In addition, particularly when grinding a workpiece with a grinding wheel, if there is variation in the height position of the grinding surfaces of multiple grinding wheels, the workpiece will not be ground uniformly, and the processing quality will decrease.

[0006] Therefore, before or during the machining of a workpiece, dressing is sometimes performed to intentionally wear down the machining tool to adjust its condition. The machining tool is dressed by rotating the machining tool and bringing it into contact with a dressing member (dressing member). For example, Patent Document 2 discloses a method of dressing a grinding wheel by bringing the grinding surface of the grinding wheel into contact with a dressing part for dressing and a dressing part for wheel shaping fixed to a board base. This allows the abrasive grains of the grinding wheel to be appropriately exposed from the binder (dressing), and the height positions of the grinding surfaces of multiple grinding wheels are aligned (truing). [Prior art documents] [Patent documents]

[0007] [Patent Document 1] JP 2000-288881 A [Patent Document 2] JP 2009-142906 A Summary of the Invention [Problem to be solved by the invention]

[0008] For dressing of machining tools such as cutting blades and grinding wheels, a dressing member is used in which the dressing part that comes into contact with the machining tool is supported by a board base (support plate) as described above. For example, the dressing member is formed by bonding a board base made of a resin plate and a dressing part to which diamond abrasive grains are fixed by a vitrified bond, using an adhesive. The board base is then sucked and held by a chuck table provided in the processing device, and the machining tool is brought into contact with the dressing member fixed to the board base, thereby dressing the machining tool.

[0009] However, when the main components of the board base and the dressing part are different as described above, it is necessary to form the board base and the dressing part separately, which increases the manufacturing cost of the dressing member. Also, when manufacturing the dressing member by separately forming the board base and the dressing part, it is necessary to perform an operation of bonding the board base and the dressing part while aligning them, which complicates the manufacturing process.

[0010] The present invention has been made in view of the above problems, and has an object to provide a dressing member and a method for manufacturing a dressing member that can reduce costs and simplify the manufacturing process. [Means for solving the problem]

[0011] According to one aspect of the present invention, there is provided a dressing member for use in dressing a machining tool, comprising: a dressing portion having a contact surface that contacts the machining tool and dresses the machining tool; and a non-dressing portion that is provided on the opposite side of the contact surface of the dressing portion and does not contact the machining tool, wherein the dressing portion contains abrasive grains and a binder that fixes the abrasive grains, and the non-dressing portion does not contain abrasive grains and is made of the same material as the binder.

[0012] Preferably, the processing tool is a grinding wheel having a grinding stone, and the dressing member is used for dressing the grinding stone. Preferably, the non-dressing portion includes a filler.

[0013] According to another aspect of the present invention, there is provided a method for manufacturing a dressing member used for dressing a machining tool, the method including a molding step of stacking and molding a dressing material containing abrasive grains and a first raw material powder that is a raw material for a binder that fixes the abrasive grains, and a non-dressing material containing a second raw material powder that does not contain abrasive grains and is made of the same material as the first raw material powder, and a firing step of integrating the stacked dressing material and non-dressing material to form the dressing member having a dressing portion that has a contact surface that comes into contact with the machining tool and dresses the machining tool, and a non-dressing portion that is provided on the opposite side of the contact surface of the dressing portion and does not come into contact with the machining tool.

[0014] Preferably, the processing tool is a grinding wheel having a grinding stone, and the dressing member is used for dressing the grinding stone. Preferably, the non-dressing material includes a filler. Effect of the Invention

[0015] In the dressing member according to one aspect of the present invention, the dressing part that dresses the machining tool and the non-dressing part that supports the dressing part are made of the same material, which eliminates the need to make the dressing part and the non-dressing part out of members made of different materials, thereby reducing manufacturing costs.

[0016] In addition, in a method for manufacturing a dressing member according to one aspect of the present invention, a dressing member having a dressing part and a non-dressing part is formed by integrating stacked dressing materials and non-dressing materials through firing, which makes it possible to form the dressing part and the non-dressing part in the same process and simplifies the manufacturing process since it is not necessary to bond the dressing part and the non-dressing part together with an adhesive. [Brief description of the drawings]

[0017] [Figure 1] FIG. [Diagram 2] FIG. 2(A) is a perspective view showing a dressing member, and FIG. 2(B) is a cross-sectional view showing a part of the dressing member. [Diagram 3] FIG. 2 is a perspective view showing a grinding apparatus for dressing a machining tool. [Figure 4] 10 is a flowchart showing a method for manufacturing a dressing member. [Diagram 5] FIG. 5(A) is a cross-sectional view showing a dressing material, and FIG. 5(B) is a cross-sectional view showing a non-dressing material. [Figure 6] Figure 6(A) is a cross-sectional view showing a mold into which a dressing material has been poured, Figure 6(B) is a cross-sectional view showing a mold into which a non-dressing material has been poured, and Figure 6(C) is a partially cross-sectional front view showing the dressing material and non-dressing material being pressed. [Figure 7] A partially cross-sectional front view showing a dressing material and a non-dressing material to be baked. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0018] Hereinafter, an embodiment according to one aspect of the present invention will be described with reference to the accompanying drawings. First, a configuration example of a processing device capable of dressing a processing tool using a dressing member according to this embodiment will be described. In this embodiment, as an example of the processing device, a grinding device that grinds a workpiece with a processing tool (grinding wheel) equipped with a grinding wheel will be described.

[0019] Fig. 1 is a perspective view showing a grinding device 2 that grinds a workpiece 11. In Fig. 1, the X-axis direction (first horizontal direction) and the Y-axis direction (second horizontal direction) are perpendicular to each other. Also, the Z-axis direction (up-down direction, height direction, vertical direction) is perpendicular to the X-axis direction and the Y-axis direction.

[0020] For example, the workpiece 11 is a disk-shaped wafer made of a semiconductor material such as single crystal silicon, and includes a front surface 11a and a back surface 11b that are generally parallel to each other. The workpiece 11 is divided into a plurality of rectangular regions by a plurality of streets (planned division lines) arranged in a lattice pattern so as to intersect with each other. Devices (not shown), such as ICs (Integrated Circuits), LSIs (Large Scale Integration), LEDs (Light Emitting Diodes), and MEMS (Micro Electro Mechanical Systems) devices, are formed on the front surface 11a side of each of the plurality of regions divided by the streets.

[0021] A plurality of device chips each including a device are manufactured by dividing the workpiece 11 along the streets. In addition, before dividing the workpiece 11, the back surface 11b side of the workpiece 11 is ground using the grinding device 2 to thin the workpiece 11, thereby obtaining thin device chips.

[0022] However, there are no limitations on the material, shape, structure, size, etc. of the workpiece 11. For example, the workpiece 11 may be a substrate made of a semiconductor other than silicon (GaAs, InP, GaN, SiC, etc.), glass (quartz glass, borosilicate glass, etc.), ceramics, resin, metal, etc. In addition, there are no limitations on the type, number, shape, structure, size, arrangement, etc. of devices, and the workpiece 11 does not necessarily have to have devices formed thereon.

[0023] The grinding device 2 includes a chuck table (holding table) 4 that holds the workpiece 11. The upper surface of the chuck table 4 is a flat surface that is approximately parallel to the horizontal plane (XY plane) and constitutes a holding surface 4a that holds the workpiece 11.

[0024] Specifically, the chuck table 4 includes a cylindrical frame (main body) 6 made of metal such as SUS (stainless steel), glass, ceramics, resin, or the like. A cylindrical recess 6b is provided in the center of the upper surface 6a side of the frame 6. A disk-shaped holding member 8 made of a porous material such as porous ceramics is fitted into the recess 6b of the frame 6. The holding member 8 includes a large number of pores that communicate from the upper surface to the lower surface of the holding member 8. The upper surface of the holding member 8 forms a circular suction surface 8a that sucks the workpiece 11 when the workpiece 11 is held by the chuck table 4.

[0025] The holding surface 4a of the chuck table 4 is configured by the upper surface 6a of the frame 6 and the suction surface 8a of the holding member 8. The holding surface 4a (suction surface 8a) is connected to a suction source (not shown) such as an ejector via pores contained in the holding member 8, flow paths (not shown) provided inside the frame 6, valves (not shown), and the like.

[0026] A moving unit (not shown) that moves the chuck table 4 in the horizontal direction (XY plane direction) is connected to the chuck table 4. For example, the moving unit is configured with a ball screw type moving mechanism or a turntable. In addition, a rotation drive source (not shown) such as a motor that rotates the chuck table 4 around a rotation axis set approximately perpendicular to the radial direction of the holding surface 4a is connected to the chuck table 4.

[0027] A grinding unit 10 that performs grinding on a workpiece 11 is provided above the chuck table 4. The grinding unit 10 includes a cylindrical spindle 12 that is disposed along the Z-axis direction. A rotation drive source (not shown), such as a motor, that rotates the spindle 12 is connected to a base end (upper end) of the spindle 12.

[0028] A disk-shaped wheel mount 14 made of metal or the like is fixed to the tip (lower end) of the spindle 12. A processing tool 16 for processing the workpiece 11 is detachably attached to the lower surface side of the wheel mount 14. The processing tool 16 is an annular grinding wheel that performs grinding on the workpiece 11. For example, the processing tool 16 is fixed to the wheel mount 14 by a fastener such as a bolt.

[0029] The machining tool 16 is equipped with an annular wheel base 18 made of a metal such as aluminum or stainless steel and formed to have approximately the same diameter as the wheel mount 14. The upper surface side of the wheel base 18 is fixed to the lower surface side of the wheel mount 14. In addition, a plurality of grinding wheels 20 are fixed to the lower surface side of the wheel base 18.

[0030] For example, the grinding wheels 20 are formed in a rectangular parallelepiped shape and are arranged in a ring shape at approximately equal intervals along the circumferential direction of the wheel base 18. The lower surface of the grinding wheel 20 constitutes a grinding surface 20a that grinds the workpiece 11. The grinding wheel 20 includes abrasive grains made of diamond, cBN (cubic boron nitride), or the like, and a bonding material (bond material) such as a metal bond, a resin bond, or a vitrified bond that fixes the abrasive grains. However, there are no limitations on the material, shape, structure, size, etc. of the grinding wheel 20. In addition, the number of grinding wheels 20 can be set arbitrarily.

[0031] The machining tool 16 rotates around a rotation axis roughly parallel to the Z-axis direction by power transmitted from a rotation drive source (not shown) connected to the spindle 12 via the spindle 12 and the wheel mount 14. When the machining tool 16 rotates, each of the multiple grinding wheels 20 revolves around the rotation axis of the machining tool 16 along a circular revolution orbit (revolution path) roughly parallel to the horizontal plane (XY plane).

[0032] A moving unit (not shown) that moves (raises and lowers) the grinding unit 10 along the Z-axis direction is connected to the grinding unit 10. For example, the moving unit is configured with a ball screw type moving mechanism. Specifically, the moving unit includes a ball screw arranged along the Z-axis direction, a pulse motor that rotates the ball screw, and a nut portion that is connected to the grinding unit 10 and into which the ball screw is screwed. When the grinding unit 10 is raised and lowered by the moving unit, the machining tool 16 moves relative to the chuck table 4, and the holding surface 4a and the machining tool 16 approach and move away from each other along the Z-axis direction.

[0033] A grinding fluid supply path (not shown) for supplying liquid (grinding fluid) such as pure water is provided inside or near the grinding unit 10. When the workpiece 11 is ground with the processing tool 16, the grinding fluid is supplied to the workpiece 11 and the grinding wheel 20. This cools the workpiece 11 and the grinding wheel 20, and washes away chips (grinding chips) generated by the grinding process.

[0034] The grinding apparatus 2 also includes a controller (control unit, control unit, control device) (not shown) that controls the grinding apparatus 2. The controller is connected to the components (chuck table 4, grinding unit 10, etc.) of the grinding apparatus 2, and generates control signals that control the operation of each component.

[0035] For example, the controller is configured by a computer and includes a processing unit that executes processes such as calculations necessary for the operation of the grinding device 2, and a storage unit that stores various information (data, programs, etc.) used for the operation of the grinding device 2. The processing unit includes a processor such as a CPU (Central Processing Unit). The storage unit includes memories such as a ROM (Read Only Memory) and a RAM (Random Access Memory).

[0036] When grinding the workpiece 11 with the grinding device 2, first, the workpiece 11 is held by the chuck table 4. For example, the workpiece 11 is placed on the chuck table 4 so that the front surface 11a faces the holding surface 4a and the back surface 11b (surface to be ground) is exposed upward. In this state, when the suction force (negative pressure) of the suction source is applied to the holding surface 4a, the workpiece 11 is sucked and held by the chuck table 4. Note that a protective sheet for protecting the workpiece 11 may be fixed to the front surface 11a side of the workpiece 11.

[0037] Next, the chuck table 4 is positioned below the processing tool 16. Then, while rotating the chuck table 4 and the spindle 12, the grinding unit 10 is lowered at a predetermined speed, and the grinding surface 20a of the grinding wheel 20 is brought into contact with the back surface 11b of the workpiece 11. As a result, the back surface 11b side of the workpiece 11 is scraped off, and the workpiece 11 is ground and thinned.

[0038] Before or during grinding of the workpiece 11, the processing tool 16 is dressed. Specifically, the grinding surface 20a side of the grinding wheel 20 is intentionally worn to adjust the condition of the grinding wheel 20. The processing tool 16 is dressed by rotating the grinding wheel 20 and bringing it into contact with a member for dressing (dressing member, dressing board, dressing tool). The dressing member according to this embodiment will be described in detail below.

[0039] Fig. 2(A) is a perspective view showing the dressing member 21, and Fig. 2(B) is a cross-sectional view showing a part of the dressing member 21. The dressing member (dressing board, dressing tool) 21 is a plate-shaped member (tool) that dresses the grinding wheel 20 (see Fig. 1) of the processing tool 16, and has a first surface (upper surface) 21a and a second surface (lower surface) 21b that are generally parallel to each other.

[0040] The dressing member 21 includes a dressing part (dressing layer) 31 and a non-dressing part (non-dressing layer) 41. The dressing part 31 and the non-dressing part 41 are laminated so as to overlap each other in the thickness direction of the dressing member 21, and are integrated. For example, the dressing part 31 and the non-dressing part 41 are formed in a disk shape, and the diameter of the dressing part 31 is equal to the diameter of the non-dressing part 41. The dressing part 31 and the non-dressing part 41 are arranged concentrically so that the center position and the position of the outer circumferential edge coincide in a plan view.

[0041] The dressing portion 31 corresponds to a portion of the dressing member 21 that dresses the machining tool 16 (grinding wheel 20), and the surface (upper surface) of the dressing portion 31 forms a circular contact surface 31a that comes into contact with the machining tool 16 (grinding wheel 20). The surface of the dressing portion 31 corresponds to the first surface 21a of the dressing member 21.

[0042] The non-dressing portion 41 is provided on the opposite side to the contact surface 31a of the dressing portion 31, and corresponds to a support portion (support plate) that supports the dressing portion 31. The surface (lower surface) of the non-dressing portion 41 contacts the holding surface 4a (see FIG. 1) to form a circular held surface 41a that is held by the chuck table 4, and corresponds to the second surface 21b of the dressing member 21. The non-dressing portion 41 does not contact the machining tool 16 (grinding wheel 20) and does not contribute to dressing the machining tool 16.

[0043] The dressing portion 31 and the non-dressing portion 41 are joined by sintering as described below. Therefore, no bonding agent such as an adhesive is provided between the dressing portion 31 and the non-dressing portion 41.

[0044] As shown in FIG. 2(B), the dressing part 31 includes a binder (bond material) 33 and abrasive grains 35, and the binder 33 fixes the abrasive grains 35. As the binder 33, a vitrified bond made of glass mainly composed of SiO2 or the like, or a resin bond mainly composed of resin can be used. As the abrasive grains 35, abrasive grains made of white alundum (WA), green carborundum (GC) or the like can be used. However, there is no restriction on the material of the binder 33 and the material, shape, and size of the abrasive grains 35. Note that in FIG. 2(B), the abrasive grains 35 are shown enlarged for the sake of convenience.

[0045] The non-dressing portion 41 does not contain abrasive grains 35, and is made of the same material as the binder of the dressing portion 31. In other words, the main material (base material) 43 of the dressing portion 31 is the same material (vitrified bond, resin bond, etc.) as the binder 33 of the dressing portion 31. Therefore, the dressing portion 31 and the non-dressing portion 41 have the same main component, and differ in the presence or absence of abrasive grains 35.

[0046] However, the non-dressing portion 41 may contain a filler (aggregate) 45 that reinforces the non-dressing portion 41. For example, ceramic particles made of silica (silicon dioxide, SiO2), alumina (aluminum oxide, Al2O3), or the like are dispersed in the main material 43 as the filler 45. For convenience of explanation, the filler 45 is illustrated in an enlarged scale in FIG. 2(B).

[0047] The average particle size of the filler 45 is smaller than that of the abrasive grains 35. Specifically, the average particle size of the filler 45 is preferably set to 1 / 5 or less of the average particle size of the abrasive grains 35, more preferably 1 / 10 or less of the average particle size of the abrasive grains 35, and even more preferably 1 / 20 or less of the average particle size of the abrasive grains 35. The relationship between the average particle size of the abrasive grains 35 and the average particle size of the filler 45 can be confirmed by measuring both of them by the same measuring method and comparing the measurement results. For example, the average particle size of the abrasive grains 35 is 1 μm or more and 300 μm or less, and the average particle size of the filler 45 is 0.1 μm or more and 10 μm or less. The above average particle size values ​​of the abrasive grains 35 and the filler 45 correspond to the particle size at 50% cumulative of the particle size distribution measured by, for example, a laser diffraction / scattering method (median diameter, d50, 50% diameter).

[0048] By including the filler 45 in the main material 43, the mechanical strength of the non-dressed portion 41 is improved, and deformation of the non-dressed portion 41 is suppressed. There are no limitations on the material, shape, or size of the filler 45, so long as the filler 45 can reinforce the main material 43. In addition, if the main material 43 itself has high strength and is not easily deformed, the main material 43 does not need to include the filler 45.

[0049] Since the dressing portion 31 is worn by contact with the grinding wheel 20 of the processing tool 16, it is preferable that a certain thickness is ensured. On the other hand, the thickness of the non-dressing portion 41 may be ensured to an extent that the non-dressing portion 41 can support the dressing portion 31. Therefore, the thickness of the dressing portion 31 can be set to be greater than the thickness of the non-dressing portion 41. For example, the thickness of the dressing portion 31 is set to be 5 times or more, preferably 10 times or more, the thickness of the non-dressing portion 41. More specifically, the thickness of the dressing portion 31 can be set to be 1 mm or more and 10 mm or less, and the thickness of the non-dressing portion 41 can be set to be 0.1 mm or more and less than 1 mm.

[0050] 2(B), for ease of explanation, the boundary between the dressed portion 31 and the non-dressed portion 41 is illustrated as a straight line. However, since the main components of the dressed portion 31 and the non-dressed portion 41 are the same, there may be cases where there is no clear boundary between the dressed portion 31 and the non-dressed portion 41. In this case, a region of a predetermined thickness including the abrasive grains 35 on the first surface 21a side of the dressing member 21 corresponds to the dressed portion 31, and a region of a predetermined thickness not including the abrasive grains 35 on the second surface 21b side of the dressing member 21 corresponds to the non-dressed portion 41.

[0051] Next, a specific example of a method for dressing the machining tool 16 using the above-mentioned dressing member 21 will be described. FIG.

[0052] When dressing the machining tool 16, first, the dressing member 21 is held by the chuck table 4. Specifically, the dressing member 21 is placed on the chuck table 4 so that the first surface 21a side (the contact surface 31a side of the dressing portion 31) of the dressing member 21 is exposed upward and the second surface 21b side (the held surface 41a side of the non-dressed portion 41) of the dressing member 21 faces the holding surface 4a. At this time, the dressing member 21 is positioned concentrically with the holding surface 4a so that the rotation axis of the chuck table 4 passes through the center of the dressing member 21.

[0053] The shape and size of the non-dressing portion 41 are set so as to be able to cover the entire suction surface 8a (see FIG. 1) of the chuck table 4. Specifically, the diameter of the non-dressing portion 41 is equal to or greater than the diameter of the suction surface 8a. The dressing member 21 is arranged so that the entire suction surface 8a of the chuck table 4 is covered by the non-dressing portion 41. In this state, when the suction force (negative pressure) of the suction source is applied to the holding surface 4a, the held surface 41a of the non-dressing portion 41 is sucked in contact with the holding surface 4a. As a result, the dressing portion 31 is sucked and held by the chuck table 4 via the non-dressing portion 41.

[0054] As described above, the non-dressed portion 41 does not contain abrasive grains 35. Therefore, irregularities caused by the abrasive grains 35 are not formed on the held surface 41a of the non-dressed portion 41, and the held surface 41a has high flatness. This makes it easier for the held surface 41a to come into close contact with the holding surface 4a of the chuck table 4, and the non-dressed portion 41 can be reliably sucked and held by the chuck table 4.

[0055] Next, the positional relationship between the chuck table 4 and the machining tool 16 is adjusted. Specifically, with the machining tool 16 disposed above the dressing member 21, the chuck table 4 is positioned so that the center of the dressing member 21 (the center of the dressing portion 31) and the rotation orbit of the grinding wheel 20 overlap in the Z-axis direction.

[0056] Next, while rotating the chuck table 4 and the machining tool 16, the chuck table 4 and the machining tool 16 are moved relatively along the Z-axis direction. Specifically, the grinding unit 10 is lowered along the Z-axis direction at a predetermined speed, and the machining tool 16 is brought close to the dressing member 21 (grinding feed). As a result, the grinding surfaces 20a of the rotating multiple grinding wheels 20 come into contact with the contact surfaces 31a of the dressing parts 31.

[0057] When the grinding wheel 20 comes into contact with the dressing part 31, the grinding wheel 20 rotates so as to pass through the rotation axis of the chuck table 4, and grinds the entire contact surface 31a side of the dressing part 31. At this time, the binder of the grinding wheel 20 collides with the abrasive grains 35 (see FIG. 2(B)) exposed at the contact surface 31a of the dressing part 31, promoting wear on the grinding surface 20a side of the grinding wheel 20. As a result, the abrasive grains of the grinding wheel 20 are appropriately exposed from the binder (sharpening), and the height positions of the grinding surfaces 20a of the multiple grinding wheels 20 are aligned (truing), and the condition of the grinding wheel 20 is adjusted.

[0058] In this manner, the grinding wheel 20 of the processing tool 16 is dressed. Then, before the binder 33 (see FIG. 2(B)) of the dressing portion 31 is worn away and the grinding wheel 20 reaches the non-dressing portion 41, the grinding feed is stopped and the processing tool 16 is raised. As a result, the grinding wheel 20 leaves the dressing portion 31 without coming into contact with the non-dressing portion 41, and the dressing of the grinding wheel 20 is completed.

[0059] As described above, in the dressing member 21 according to this embodiment, the dressing portion 31 that dresses the machining tool 16 and the non-dressing portion 41 that supports the dressing portion 31 are made of the same material. This eliminates the need to make the dressing portion 31 and the non-dressing portion 41 out of members made of different materials, thereby reducing manufacturing costs.

[0060] Next, a specific example of a method for manufacturing the dressing member 21 will be described. Fig. 4 is a flow chart showing the method for manufacturing the dressing member. The method for manufacturing the dressing member according to this embodiment includes a molding step S1 and a firing step S2.

[0061] In the molding step S1, first, a dressing material that will become the dressing portion 31 and a non-dressing material that will become the non-dressing portion 41 are produced. Fig. 5(A) is a cross-sectional view showing the dressing material 39, and Fig. 5(B) is a cross-sectional view showing the non-dressing material 49.

[0062] As shown in Fig. 5(A), the dressing material 39 is produced by mixing abrasive grains 35 and a powdered first raw material powder 37, which is a raw material for the binder 33 (see Fig. 2(B)). For example, the abrasive grains 35 and the first raw material powder 37 are put into a cylindrical mixing container 30A made of plastic or the like in a predetermined ratio, and the mixing container 30A is rotated to mix the abrasive grains 35 and the first raw material powder 37. In this way, the dressing material 39 containing the abrasive grains 35 and the first raw material powder 37 is obtained.

[0063] As shown in Fig. 5(B), the non-dressing material 49 is produced by mixing the filler 45 with the powdered second raw material powder 47, which is the raw material of the main material 43 (see Fig. 2(B)). For example, the filler 45 and the second raw material powder 47 are put into a cylindrical mixing container 30B made of plastic or the like in a predetermined ratio, and the mixing container 30B is rotated to mix the filler 45 and the second raw material powder 47. In this way, the non-dressing material 49 containing the filler 45 and the second raw material powder 47 is obtained.

[0064] The first raw powder 37 and the second raw powder 47 are the same material. However, the abrasive grains 35 are not put into the mixing container 30B. Therefore, the non-dressing material 49 does not contain the abrasive grains 35, unlike the dressing material 39. Furthermore, when it is not necessary to include the filler 45 in the main material 43 (see FIG. 2(B)), the filler 45 and the second raw powder 47 are not mixed, and the second raw powder 47 can be used alone as the non-dressing material 49.

[0065] Next, the dressing material 39 and the non-dressing material 49 are laminated and molded. The manner in which the dressing material 39 and the non-dressing material 49 are laminated and molded is shown in Fig. 6(A) to Fig. 6(C).

[0066] A mold 40 is used to mold the dressing material 39 and the non-dressing material 49. The mold 40 is a cylindrical member made of metal, and a container (recess) 40a into which the molded object is inserted is provided in the center of the mold 40. In this embodiment, a mold 40 having a cylindrical container 40a is used to mold the dressing material 39 and the non-dressing material 49 into a disk shape. The diameter of the container 40a is set to a target value for the diameter of the dressing material 39 and the non-dressing material 49 after molding. The depth of the container 40a is set to a value larger than the total value of the thickness of the dressing material 39 and the non-dressing material 49 after molding.

[0067] 6(A) is a cross-sectional view showing a mold 40 into which a dressing material 39 has been poured. First, the dressing material 39 is poured into the container 40a of the mold 40. Then, while rotating the mold 40, the surface of the dressing material 39 is smoothed with a predetermined jig (not shown) as necessary, so that the thickness of the dressing material 39 in the mold 40 is made roughly uniform.

[0068] 6(B) is a cross-sectional view showing the mold 40 into which the non-dressing material 49 has been poured. After the dressing material 39 in the mold 40 has been smoothed, the non-dressing material 49 is poured into the accommodation portion 40a of the mold 40, and the surface of the dressing material 39 is covered with the non-dressing material 49. Then, while rotating the mold 40, the surface of the non-dressing material 49 is smoothed with a predetermined jig (not shown) as necessary, thereby making the thickness of the non-dressing material 49 in the mold 40 approximately uniform. As a result, the dressing material 39 and the non-dressing material 49 are stacked on top of each other.

[0069] When the dressing material 39 and the non-dressing material 49 are layered, the first raw material powder 37 (see FIG. 5(A)) and the second raw material powder 47 (see FIG. 5(B)) may be mixed near the interface between the dressing material 39 and the non-dressing material 49. In this case, the clear boundary between the dressing material 39 and the non-dressing material 49 disappears, and the dressing material 39 and the non-dressing material 49 are partitioned by the presence or absence of abrasive grains 35.

[0070] The amounts of the dressing material 39 and the non-dressing material 49 to be put into the mold 40 are set according to the specifications of the dressing member 21 (see FIG. 2(A)). Specifically, the amounts of the dressing material 39 and the non-dressing material 49 are adjusted so that the thickness ratio between the dressing material 39 and the non-dressing material 49 after smoothing in the mold 40 is approximately the same as the thickness ratio between the dressing portion 31 and the non-dressing portion 41 of the dressing member 21 that is finally manufactured.

[0071] 6(C) is a partial cross-sectional front view showing the dressing material 39 and the non-dressing material 49 being pressed. By pressing the dressing material 39 and the non-dressing material 49 stacked in the mold 40, the dressing material 39 and the non-dressing material 49 are compressed and solidified to be formed into a disk shape.

[0072] Specifically, first, the mold 40 is placed on the support surface 42a of the support table 42 and supported by the support table 42. Then, the dressing material 39 and the non-dressing material 49 are pressed by the pressing unit 44 arranged above the mold 40.

[0073] The pressing unit 44 includes a disk-shaped support member 46 and a cylindrical pressing member 48 fixed to the underside of the support member 46. The diameter of the pressing member 48 is approximately equal to the diameter of the accommodation portion 40a of the mold 40, and the pressing member 48 is insertable into the accommodation portion 40a of the mold 40. The underside of the pressing member 48 forms a flat circular pressing surface 48a that presses the dressing material 39 and the non-dressing material 49.

[0074] When the mold 40 is supported by the support base 42, the pressing unit 44 is positioned above the mold 40 so that the pressing member 48 overlaps with the accommodation portion 40a of the mold 40. Thereafter, the pressing unit 44 is lowered so that the pressing member 48 enters the accommodation portion 40a of the mold 40 and comes into contact with the surface of the non-dressing material 49 layered on the dressing material 39. When the pressing unit 44 is further lowered, the pressing surface 48a of the pressing member 48 presses the dressing material 39 and the non-dressing material 49. As a result, the dressing material 39 and the non-dressing material 49 are compressed and solidified, and formed into a disk shape.

[0075] By the above molding step S1, the dressing material 39 and the non-dressing material 49 are molded in a stacked state, and disk-shaped dressing material 39 and non-dressing material 49 having the same diameter are obtained. In the above, the case where the dressing material 39 is poured into the mold 40 and then the non-dressing material 49 is poured therein has been described (see Figs. 6(A) and 6(B)). However, the dressing material 39 and the non-dressing material 49 may be poured into the mold 40 and then the dressing material 39 is poured therein, thereby stacking the dressing material 39 and the non-dressing material 49.

[0076] Next, the laminated dressing material 39 and non-dressing material 49 are fired and integrated to form a dressing member having a dressing portion 31 and a non-dressing portion 41 (firing step S2). Fig. 7 is a partially sectional front view showing the dressing material 39 and non-dressing material 49 to be fired.

[0077] For example, in the firing step S2, the dressing material 39 and the non-dressing material 49 are fired in a firing furnace 50 to sinter the dressing material 39 and the non-dressing material 49. There are no limitations on the type of firing furnace 50 as long as it is possible to fire the dressing material 39 and the non-dressing material 49, and for example, an electric heater, a gas burner, infrared rays, microwaves, etc. can be used as a heat source.

[0078] The firing furnace 50 includes a chamber 52 in which the workpiece is housed. The interior of the chamber 52 corresponds to a heating chamber 54 in which the workpiece is subjected to a heat treatment. A transfer port 52a for transferring the workpiece is provided on a side wall of the chamber 52. The transfer port 52a is opened and closed by a gate (opening and closing door) 56. By opening the gate 56 to expose the transfer port 52a, the workpiece can be transferred into or out of the heating chamber 54 via the transfer port 52a. By closing the transfer port 52a with the gate 56, the heating chamber 54 is sealed.

[0079] A heat-resistant holding table 58 for holding the workpiece is provided in the chamber 52. The upper surface of the holding table 58 is a flat surface that is approximately parallel to the horizontal surface, and constitutes a holding surface 58a for holding the workpiece.

[0080] In the firing step S2, first, the gate 56 is opened, and the dressing material 39 and the non-dressing material 49 formed in the forming step S1 are carried into the chamber 52. Then, the dressing material 39 and the non-dressing material 49 are placed in a stacked state on the holding surface 58a of the holding table 58. Thereafter, the gate 56 is closed to block the transfer port 52a, and the heating chamber 54 is sealed.

[0081] Next, the temperature of the heating chamber 54 is increased, and the dressing material 39 and the non-dressing material 49 are heated in the air atmosphere. As a result, the dressing material 39 and the non-dressing material 49 are sintered, and the dressing material 39 and the non-dressing material 49 are bonded and integrated together. As a result, the dressing member 21 having the dressing portion 31 and the non-dressing portion 41 is obtained.

[0082] For example, when the first raw material powder 37 (see FIG. 5(A)) and the second raw material powder 47 (see FIG. 5(B)) are glass frits for vitrified bonding, the dressing material 39 and the non-dressing material 49 can be sintered by heating them at a temperature of 600° C. or more and 1000° C. or less for about six hours. However, the heating conditions are appropriately set depending on the material, size, etc. of the dressing material 39 and the non-dressing material 49.

[0083] As described above, the dressing material 39 and the non-dressing material 49 are joined by sintering, rather than being bonded together with an adhesive as in the past. If the non-dressing material 49 contains a filler 45 (see FIG. 5(B)), the non-dressing material 49 is less likely to shrink when heated. This suppresses deformation of the non-dressing portion 41.

[0084] As described above, in the method for manufacturing a dressing member according to this embodiment, the laminated dressing material 39 and non-dressing material 49 are fired and integrated to form the dressing member 21 having the dressing portion 31 and the non-dressing portion 41. This makes it possible to form the dressing portion 31 and the non-dressing portion 41 in the same process, and also simplifies the manufacturing process since it is not necessary to bond the dressing portion 31 and the non-dressing portion 41 together with an adhesive.

[0085] In this embodiment, the dressing member 21 is used for dressing the processing tool 16 (grinding wheel). However, the processing tool to which the dressing member 21 is applied is not limited to a grinding wheel. For example, the dressing member 21 can also be used for dressing an annular cutting blade that cuts a workpiece.

[0086] The cutting blade is attached to a cutting device and cuts the workpiece. The cutting device includes a chuck table that holds the workpiece and a cutting unit that performs cutting on the workpiece. The cutting unit includes a spindle, and the cutting blade is attached to the tip of the spindle. The workpiece is held by the chuck table, and the cutting blade is rotated while cutting into the workpiece, thereby cutting the workpiece.

[0087] The cutting blade attached to the cutting device may be a hub-type cutting blade (hub blade) or a washer-type cutting blade (washer blade). The hub blade has an annular hub base made of a metal such as an aluminum alloy, and an annular cutting edge formed along the outer periphery of the hub base. The cutting edge of the hub blade is made of an electroformed grinding wheel containing abrasive grains made of diamond, cubic boron nitride (cBN), or the like, and a binder such as a nickel plating layer that fixes the abrasive grains. On the other hand, the washer blade is made of only the annular cutting edge that contains abrasive grains and a binder made of metal, ceramics, resin, or the like that fixes the abrasive grains.

[0088] Before cutting the workpiece or during cutting, the cutting blade is dressed. Specifically, the cutting edge of the cutting blade is intentionally worn down to adjust the condition of the cutting blade. When dressing the cutting blade, the dressing portion 31 is held by the chuck table of the cutting device. Then, while rotating the cutting blade attached to the tip of the spindle, the cutting edge of the cutting blade is brought into contact with the contact surface 31a side of the dressing portion 31 of the dressing member 21 (see FIG. 2) and cuts into the workpiece.

[0089] When the cutting edge of the cutting blade comes into contact with the dressing portion 31, the binder of the cutting edge collides with the abrasive grains 35 (see FIG. 2(B)) exposed at the contact surface 31a of the dressing portion 31, accelerating the wear of the cutting edge. As a result, the abrasive grains of the cutting edge are appropriately exposed from the binder (sharpening), and the shape of the cutting edge is shaped to approach a perfect circle centered on the rotation axis of the spindle (circularity correction). This improves the condition of the cutting blade, and maintains the cutting ability of the cutting blade.

[0090] Furthermore, the dressing member 21 can also be used for dressing a processing tool such as a polishing tool (polishing pad) for polishing a workpiece, or a bit cutting tool for cutting a workpiece with a bit.

[0091] In addition, the structures, methods, etc. according to the above-described embodiments can be modified as appropriate without departing from the scope of the object of the present invention. [Explanation of symbols]

[0092] 11 Workpiece 11a surface 11b Back side 21 Dressing components (dressing boards, dressing tools) 21a 1st side (top side) 21b 2nd side (bottom side) 31 Dressing part (dressing layer) 31a Contact surface 33 Bonding material 35 Abrasive grain 37 First raw material powder 39 Dressing materials 41 Undressed part (undressed layer) 41a Surface to be held 43 Main material (base material) 45 Filler (aggregate) 47 Second raw material powder 49 Non-dressing materials 2 Grinding equipment 4 Chuck table (holding table) 4a Holding surface 6 Frame (main body) 6a Top side 6b Recess 8 Retaining member 8a Suction surface 10 Grinding unit 12 Spindle 14 Wheel mount 16 Processing tools 18 Wheel base 20 Grinding Wheel 20a Grinding surface 30A,30B Mixing container 40 Mold 40a Storage section (recess) 42 Support stand 42a Support surface 44 Pressing unit 46 Support member 48 Pressing member 48a Pressing surface 50 Kiln 52 Chamber 52a Delivery port 54 Heating chamber 56 Gate (opening and closing door) 58 Holding Table 58a Holding surface

Claims

1. A dressing member for use in dressing a machining tool, comprising: a dressing portion having a contact surface that comes into contact with the processing tool and that dresses the processing tool; a non-dressing portion provided on the opposite side of the contact surface of the dressing portion and not in contact with the processing tool; The dressing portion includes an abrasive grain and a binder that fixes the abrasive grain, The non-dressing portion does not contain abrasive grains and is made of the same material as the bonding material.

2. The processing tool is a grinding wheel having a grinding stone, 2. The dressing member according to claim 1, which is used for dressing the grinding wheel.

3. 3. The dressing member according to claim 1, wherein the non-dressing portion contains a filler.

4. A method for manufacturing a dressing member for use in dressing a processing tool, comprising: a molding step of stacking and molding a dressing material containing a first raw material powder that is a raw material for a binder that fixes the abrasive grains and a non-dressing material containing a second raw material powder that does not contain abrasive grains and is made of the same material as the first raw material powder; a sintering process for integrating the stacked dressing material and non-dressing material to form the dressing member comprising a dressing portion having a contact surface that contacts the machining tool and dresses the machining tool, and a non-dressing portion that is provided on the opposite side of the contact surface of the dressing portion and does not contact the machining tool.

5. The processing tool is a grinding wheel having a grinding stone, 5. The method for producing a dressing member according to claim 4, wherein the dressing member is used for dressing the grinding wheel.

6. 6. The method for producing a dressing member according to claim 4 or 5, characterized in that the non-dressing material contains a filler.

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