Gas monitoring device

Abstract

To provide a gas monitoring device capable of easily maintaining and exchanging each sampling assembly and detecting a plurality of environmental points.SOLUTION: A gas monitoring device includes a main body and a plurality of sampling assemblies. The plurality of sampling assemblies are removably attached to the main body; each sampling assembly includes a plurality of sampling inlets, a solenoid valve assembly and a sampling outlet; the plurality of sampling inlets are used for communicating to a plurality of gas sources to be detected, respectively; the solenoid valve assembly communicates the plurality of sampling inlets with the sampling outlet; and the solenoid valve assembly selectively controls the communication of the plurality of sampling inlets with the sampling outlet.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a gas monitoring device, and in particular to an improvement in the technical configuration of a gas monitoring device for multi-environment detection. [Background technology]

[0002] In the semiconductor manufacturing process, the air quality in the clean room environment has a significant impact on semiconductor yield. However, the factory site is very large, and it takes a lot of manpower and time to perform inspections using multiple machines or by moving machines to various places in the factory. In addition, conventional fixed gas monitoring devices have a fixed detection module, and if the detection module breaks down and needs repair, the entire device must stop detecting environmental gases, and detection operations cannot be continued until maintenance is completed. As a result, detection efficiency decreases.

[0003] Therefore, there is a need to provide a new and innovative gas monitoring device to solve the above problems. Summary of the Invention [Problem to be solved by the invention]

[0004] A primary object of the present invention is to provide a gas monitoring device that facilitates maintenance and replacement of each of its sampling assemblies and allows for detection of multiple environmental points. [Means for solving the problem]

[0005] In order to achieve the above-mentioned object, the present invention provides a gas monitoring device comprising a main body, and a plurality of sampling assemblies removably attached to the main body, each of which includes a plurality of sampling inlets, a solenoid valve assembly, and a sampling outlet, wherein the plurality of sampling inlets are used to connect to a plurality of target gas sources, respectively, the solenoid valve assembly connects the plurality of sampling inlets to the sampling outlet, and the solenoid valve assembly selectively controls the communication between the plurality of sampling inlets and the sampling outlet. [Brief description of the drawings]

[0006] [Figure 1] FIG. 1 is a perspective view of one preferred embodiment of the present invention. [Diagram 2] FIG. 2 is a three-dimensional enlarged view of FIG. [Diagram 3] FIG. 2 is a schematic diagram of a second limiting unit in a preferred embodiment of the present invention when in a locked position; [Figure 4] FIG. 2 is a schematic diagram of a second limiting unit of one preferred embodiment of the present invention when in an unlocked position; [Diagram 5] 1 is a schematic diagram of a sampling assembly according to one preferred embodiment of the present invention when removed from the main body. [Figure 6] FIG. 2 is another perspective view of one preferred embodiment of the present invention. [Figure 7] 1 is a perspective view of one preferred embodiment of the present invention; [Figure 8] FIG. 2 is an exploded view of the sampling assembly and slide rail assembly of one preferred embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] The following examples are only used to illustrate possible embodiments of the present invention, and are not intended to limit the scope of protection of the present invention. The "one" or "at least one" in front of the nouns mentioned in this specification does not limit the number, and can be "multiple" according to requirements. This number change is also within the scope of protection.

[0008] One preferred embodiment of the present invention is shown in Figures 1 to 8. The gas monitoring device 1 of the present invention includes a body 10 and a plurality of sampling assemblies 20.

[0009] The multiple sampling assemblies 20 are removably attached to the main body 10, and each sampling assembly 20 includes multiple sampling inlets 21, an electromagnetic valve assembly 22, and a sampling outlet 23, and the multiple sampling inlets 21 are each used to communicate with multiple sources of the gas to be detected. In this embodiment, the target gas sources are environmental gases of various working regions, and the solenoid valve assembly 22 communicates the multiple sampling inlets 21 with the sampling outlet 23, and the solenoid valve assembly 22 selectively controls the communication between the multiple sampling inlets 21 and the sampling outlet 23. This allows the multiple sampling assemblies 20 to be individually maintained or replaced, improving the maintainability and efficiency of the entire device, and further enabling multi-point environmental detection of multiple regions, with high detection efficiency. Furthermore, the solenoid valve assembly 22 can efficiently switch the target gases of various working regions to the sampling outlet 23 for subsequent detection.

[0010] Each of the sampling assemblies 20 is removably and slidably mounted on the main body 10. Specifically, the gas monitoring device 1 further includes at least one slide rail assembly 30. The at least one slide rail assembly 30 is provided between the main body 10 and the at least one sampling assembly 20, and each slide rail assembly 30 includes a first slide rail 31 and a second slide rail 32. The main body 10 is provided with the first slide rail 31, and the at least one sampling assembly 20 is provided with the second slide rail 32 and is slidably mounted on the first slide rail 31 with the second slide rail 32. In this embodiment, the main body 10 is provided with a plurality of the slide rail assemblies 30, and each slide rail assembly 30 is provided between each of the sampling assemblies 20 and the main body 10. Therefore, the mounting and dismounting of the plurality of sampling assemblies 20 is facilitated, the time required for mounting and dismounting is reduced, and the sliding of the sampling assemblies 20 relative to the main body 10 is smooth. Furthermore, a ball structure may be provided between the first slide rail and the second slide rail to slide smoothly relative to each other.

[0011] A first limiting unit 33 is provided on the first slide rail 31, and a second limiting unit 34 is provided on the second slide rail 32, and each sampling assembly 20 is movable from a storage position to a deployed position outside the main body 10 in a first direction L1 relative to the main body 10 (see Figure 2), and when at least one sampling assembly 20 is in the deployed position, the second limiting unit 34 is abuttable against the first limiting unit 33 in the first direction L1. When each of the sampling assemblies 20 is in the storage position, each of the sampling assemblies 20 is stored in the main body 10. Specifically, the second limiting units 34 are movable between a locked position and an unlocked position, and when these second limiting units 34 are in the locked position, the second limiting units 34 can abut against the first limiting units 33 in the first direction L1, and when these second limiting units 34 are in the unlocked position, the second limiting units 34 do not abut against the first limiting units 33 in the first direction L1. In this embodiment, the second limiting unit 34 is an elastic member. Therefore, when each of the sampling assemblies 20 is pulled out relative to the main body 10, it is restricted by the first limiting unit 33 and the second limiting unit 34, and the sampling assemblies 20 are restricted from coming off. Also, the sampling assemblies 20 may be removed when the second limiting unit 34 is adjusted to the unlocked position. In this way, attachment, removal, and prevention of coming off are efficiently achieved.

[0012] The sampling inlets 21 are exposed to the body 10 and the sampling outlet 23 is built into the body 10. In this manner, the sampling outlet 23 is protected from damage and contamination while facilitating connection to the multiple target gas sources.

[0013] Each of the sampling assemblies 20 further includes a removal inlet 24, which communicates with the solenoid valve assembly 22, and which communicates with a removal gas source (e.g., clean air or an inert gas such as nitrogen). Specifically, each of the sampling assemblies 20 further includes a splitting unit 25, which is provided between the plurality of sampling inlets 21 and the splitting unit 25, which is provided with a plurality of splitting inlets 26, the sampling outlet 23, and the removal inlet 24, which communicate the plurality of splitting inlets 26 with the solenoid valve assembly 22 and the sampling outlet 23, and the solenoid valve assembly 22 and the removal inlet 24, and which communicates with the removal gas source. This prevents the plurality of sampling assemblies 20 from being washed, which would cause a detection error due to the mixing of different detection gases, and is simple in structure and easy to install.

[0014] Each of the sampling assemblies 20 is movable in the first direction L1 relative to the main body 10. Each of the sampling assemblies 20 further includes a plurality of communication outlets 28, which communicate the plurality of sampling inlets 21 with the solenoid valve assembly 22 and the plurality of communication outlets 28. The solenoid valve assembly 22 and the flow dividing unit 25 are provided at intervals in the first direction L1. This makes it easy to connect a plurality of pipes between the plurality of communication outlets 28 and the solenoid valve assembly 22, and between the solenoid valve assembly 22 and the plurality of sampling outlets 23, and the plurality of pipes are provided in an orderly manner and do not interfere with each other, allowing gas to flow smoothly through them.

[0015] Each of the sampling assemblies 20 further includes a base 27, and the solenoid valve assembly 22 and the sampling outlet 23 are provided on a first side surface 271 of the base 27. When each of the sampling assemblies 20 is in the deployed position and the first side surface 271 is outside the main body 10, the solenoid valve assembly 22 and the flow dividing unit 25 of each of the sampling assemblies 20 are exposed. Here, when each of the sampling assemblies 20 is in the deployed position, each of the sampling assemblies 20 is outside the main body 10. Furthermore, when the first side surface 271 of each of the sampling assemblies 20 is inside the main body 10, the solenoid valve assembly 22 and the flow dividing unit 25 of each of the sampling assemblies 20 are built into the main body 10. Therefore, when each of the sampling assemblies 20 is pulled out without being removed from the main body 10, the state of the solenoid valve assembly 22 and the flow dividing unit 25 can be directly observed, and the piping therebetween can be directly attached and detached, which facilitates maintenance.

[0016] The gas monitoring device 1 includes a detection unit 40, a processing unit 50, and an alarm device 60, the detection unit 40 and the processing unit 50 being respectively provided in the main body 10, the alarm device 60 being provided outside the main body 10 and communicatively connected to the processing unit 50, the detection unit 40 communicating with the sampling outlet 23 to detect gas of each of the target gas sources, the processing unit 50 transmitting the numerical values ​​detected by the detection unit 40 to the processing unit 50 for calculation and analysis, and when an abnormal value appears, the alarm device 60 issues an alarm for reminding purposes. Each of the sampling assemblies 20 is movable in the first direction L1 relative to the processing unit 50 and the detection unit 40. In this embodiment, the alarm device 60 is a light-emitting device to achieve a noticeable reminder effect.

[0017] In use, after removing the sampling assembly 20 (for maintenance or replacement), another sampling assembly 20 can be efficiently installed immediately, thereby reducing downtime of gas detection, improving detection efficiency, and facilitating maintenance or replacement. [Explanation of symbols]

[0018] 1 Gas monitoring devices 10. Main Unit 20 Sampling Assembly 21 Sampling inlet 22 Solenoid valve assembly 23 Sampling outlet 24 Removal inlet 25 Diversion Unit 26 minute inlet 27 Base 271 First aspect 28 Communication exit 30 Slide Rail Assembly 31 First slide rail 32 Second slide rail 33 First Restriction Unit 34 Second Restriction Unit 40 Detection Unit 50 Processing Units 60 Alarm device L1 1st direction

Claims

1. 1. A gas monitoring device comprising: The main body, a plurality of sampling assemblies removably attached to the body, each including a plurality of sampling inlets, a solenoid valve assembly, and a sampling outlet, the plurality of sampling inlets being used for communicating with a plurality of target gas sources, the solenoid valve assembly communicating the plurality of sampling inlets with the sampling outlet, and the solenoid valve assembly selectively controlling communication between the plurality of sampling inlets and the sampling outlet; Gas monitoring devices.

2. The gas monitoring device of claim 1 , wherein the plurality of sampling inlets are exposed to the body and the sampling outlet is embedded in the body.

3. The gas monitoring device of claim 1 , wherein each said sampling assembly further comprises an abatement inlet, said abatement inlet communicating with said solenoid valve assembly, said abatement inlet communicating with a source of abatement gas.

4. The gas monitoring device of claim 1 , wherein each said sampling assembly is removably and slidably mounted to said body.

5. 2. The gas monitoring device of claim 1, wherein each of the sampling assemblies further includes a diversion unit, the solenoid valve assembly being disposed between the multiple sampling inlets and the diversion unit, the diversion unit being provided with multiple diversion inlets, the sampling outlet, and a removal inlet, the multiple diversion inlets communicating the solenoid valve assembly with the sampling outlet and the solenoid valve assembly with the removal inlet, and the removal inlet communicating with a removal gas source.

6. Each of the sampling assemblies further includes a base, the solenoid valve assembly and the flow diverter unit are respectively disposed on a first side surface of the base, and when each of the sampling assemblies is in a deployed position and the first side surface is outside the body, the solenoid valve assembly and the flow diverter unit of each of the sampling assemblies are in an exposed state; The gas monitoring device of claim 5 , wherein each of the sampling assemblies is external to the body when in the deployed position.

7. A gas monitoring device as described in any one of claims 1 to 6, further comprising at least one slide rail assembly, the at least one slide rail assembly being provided between the main body and at least one of the sampling assemblies, each of the slide rail assemblies including a first slide rail and a second slide rail, the main body being provided with the first slide rail, and the at least one sampling assembly being provided with the second slide rail and being slidably provided on the first slide rail using the second slide rail.

8. a first limiting unit is provided on the first slide rail, and a second limiting unit is provided on the second slide rail, and each of the sampling assemblies is movable in a first direction relative to the main body from a stored position to a deployed position outside the main body; The gas monitoring device of claim 7 , wherein the second limiting unit is abuttable against the first limiting unit in the first direction when at least one of the sampling assemblies is in the deployed position.

9. the second limiting unit is movable between a locked position and an unlocked position; The gas monitoring device of claim 8, wherein when these second limiting units are in the locked position, the second limiting units are capable of abutting against the first limiting units in the first direction, and when these second limiting units are in the unlocked position, the second limiting units do not abut against the first limiting units in the first direction.

10. Each of the sampling assemblies is movable in a first direction relative to the body; Each of the sampling assemblies further includes a plurality of communication outlets, the plurality of communication outlets communicating the plurality of sampling inlets with the solenoid valve assembly and the plurality of communication outlets, the solenoid valve assembly and the flow dividing unit being spaced apart from each other in the first direction; the plurality of sampling inlets are exposed to the body and the sampling outlet is embedded in the body; Each of the sampling assemblies is removably and slidably mounted to the body; When the first side of each of the sampling assemblies is within the body, the solenoid valve assembly and the flow distribution unit of each of the sampling assemblies are contained within the body; The gas monitoring device further includes at least one slide rail assembly, the at least one slide rail assembly being disposed between the body and the at least one sampling assembly, each slide rail assembly including a first slide rail and a second slide rail, the body being provided with the first slide rail, the at least one sampling assembly being provided with the second slide rail, and being slidably mounted on the first slide rail by the second slide rail, a first limiting unit is provided on the first slide rail, and a second limiting unit is provided on the second slide rail, and each of the sampling assemblies is movable from a storage position to the deployed position outside the main body in the first direction relative to the main body; When the at least one sampling assembly is in the deployed position, the second limiting unit is abuttable against the first limiting unit in the first direction; the second limiting unit is movable between a locked position and an unlocked position; When these second limiting units are in the locking position, the second limiting units can abut against the first limiting units in the first direction, and when these second limiting units are in the unlocking position, the second limiting units do not abut against the first limiting units in the first direction; The gas supply system further includes a detection unit, a processing unit, and an alarm device, the detection unit and the processing unit being respectively provided in the main body, the alarm device being provided outside the main body and communicatively connected to the processing unit, the detection unit communicating with the sampling outlet to detect the gas of each of the detection target gas sources, the processing unit transmitting the values ​​detected by the detection unit to the processing unit for calculation and analysis, and when an abnormal value appears, the alarm device issues an alarm for reminding the user, The gas monitoring device of claim 6 , wherein each of the sampling assemblies is movable in the first direction relative to the processing unit and the detection unit.

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