Inkjet device, control method, and article manufacturing method

Abstract

To provide an inkjet device that has higher durability and reliability.SOLUTION: An inkjet device comprises a substrate stage for holding a substrate, an inkjet unit, which can be lifted and driven and which includes an inkjet head for discharging ink onto the substrate held on the substrate stage, a carriage base supporting the inkjet unit, which is provided with an opening part through which the inkjet unit being lifted passes, and a maintenance unit arranged upper than the carriage base. Pressure in a first space upper than the opening part in the inkjet device is lower than pressure in a second space lower than the opening part.SELECTED DRAWING: Figure 3

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