Magnetic permeability measuring jig and permeability measuring method

Abstract

To provide a permeability measuring jig capable of improving measurement accuracy in magnetic permeability of a measurement object.SOLUTION: A magnetic permeability measuring jig 10 used for measuring magnetic permeability of a measurement object M comprises: an input side line path 12a provided with a signal input part 12a1 having one end part to which an electrical signal is inputted and receiving the electrical signal inputted from the signal input part 12a1; an output side line path 12b provided with a signal output part 12b1 having one end part from which an electrical signal is output and receiving the electrical signal output from the signal output part 12b1; a signal line path 13 with one end side connected to the input side line path 12a and the output side line path 12b, and the other end side connected to a jig body 11; and an installation part 11a provided outside the signal line path 13 and in a range where the measurement object M is subjected to an electric field and a magnetic field generated by the electrical signal transmitting through the signal line path 13, in which the measurement object M in installed.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a magnetic permeability measuring tool and a magnetic permeability measuring method used for measuring the magnetic permeability of an object to be measured. [Background technology]

[0002] Conventionally, a permeability measuring tool used for measuring the permeability of an object to be measured is known that includes a signal line connected to a ground, a connector connected to the signal line, and a mounting section for mounting the object to be measured near the signal line (see, for example, Patent Document 1). The permeability measuring tool is used in a state where a port of a vector network analyzer and the connector are connected via a cable.

[0003] When measuring the magnetic permeability of the object under test, the impedance of the signal line is measured by transmitting an electrical signal output from the network analyzer to the signal line when the object under test is present and when it is not present relative to the installation portion of the magnetic permeability measuring jig, and the magnetic permeability of the object under test is obtained from the difference in the impedance of the signal line measured when the object under test is present and when it is not. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2008-14920 A Summary of the Invention [Problem to be solved by the invention]

[0005] Conventional magnetic permeability measuring jigs are configured with a circuit used in the so-called reflection method, which obtains impedance based on the S11 parameter of a network analyzer. Therefore, when the impedance of a signal line is measured using a conventional magnetic permeability measuring jig, the measurement accuracy is low in the low impedance range, and it is difficult to obtain the difference in impedance of the signal line with and without the object to be measured with high accuracy, making it difficult to accurately measure the magnetic permeability of the object to be measured.

[0006] An object of the present invention is to provide a magnetic permeability measuring tool and a magnetic permeability measuring method that can improve the measurement accuracy of the magnetic permeability of an object to be measured. [Means for solving the problem]

[0007] The magnetic permeability measuring jig of the present invention is a magnetic permeability measuring jig used for measuring the magnetic permeability of an object to be measured, and comprises: an input side line having a signal input section at one end to which an electrical signal is input, and to which the electrical signal input from the signal input section is transmitted; an output side line having a signal output section at one end to which an electrical signal is output, and to which the electrical signal output from the signal output section is transmitted; a signal line having one end connected to the input side line and the output side line and the other end connected to ground; and a mounting section provided outside the signal line within a range where the object to be measured is affected by the electric field and magnetic field generated by the electrical signal traveling through the signal line, and on which the object to be measured can be mounted.

[0008] In addition, in the magnetic permeability measuring jig of the present invention, it is preferable that the signal line has an input side connection portion to which the other end of the input side line is connected, and an output side connection portion to which the other end of the output side line is connected.

[0009] In the magnetic permeability measuring tool according to the present invention, it is preferable that the signal line is a microstrip line.

[0010] In the magnetic permeability measurement tool according to the present invention, it is preferable that the input side line and the output side line are arranged on a straight line in a direction perpendicular to a direction in which the signal line extends.

[0011] In the magnetic permeability measurement tool according to the present invention, it is preferable that the input line and the output line are conductors disposed on a substrate.

[0012] In the magnetic permeability measuring tool according to the present invention, it is preferable that the signal line, the input side line and the output side line are adjusted so that their respective impedances become predetermined values.

[0013] In the magnetic permeability measuring tool according to the present invention, it is preferable that the installation portion is formed in a concave shape capable of accommodating the object to be measured.

[0014] Furthermore, it is preferable that the magnetic permeability measuring tool of the present invention has a structure in which the object to be measured is made of a sheet-like member, the installation portion is formed in a planar shape, and has a mounting surface on which the object to be measured is placed, and a holding mechanism that holds the object to be measured located on the mounting surface in a state aligned with the mounting surface.

[0015] In addition, it is preferable that the magnetic permeability measuring tool of the present invention is configured so that a portion of the object to be measured is located on the mounting surface and another portion is located outside the mounting surface, and the holding mechanism pulls the portion of the object to be measured that is located outside the mounting surface, thereby aligning the portion of the object to be measured that is located on the mounting surface with the mounting surface.

[0016] In addition, in the magnetic permeability measurement tool according to the present invention, it is preferable that the holding mechanism pulls a portion of the object to be measured that is located outside the placement surface in a direction lower than the height of the placement surface.

[0017] In addition, it is preferable that the magnetic permeability measuring tool according to the present invention has a plurality of suction holes formed over the entire surface of the mounting surface, and the holding mechanism has a suction pump whose suction side communicates with the plurality of suction holes.

[0018] In addition, it is preferable that the magnetic permeability measuring tool of the present invention has a clamping plate that clamps the object to be measured placed on the mounting surface between the holding mechanism and the mounting surface, and the clamping plate is formed from a material having a predetermined dielectric constant.

[0019] In the magnetic permeability measuring tool according to the present invention, it is preferable that the clamping plates have a relative dielectric constant of approximately 1.0.

[0020] In the magnetic permeability measuring tool according to the present invention, it is preferable that the clamping plate has the same size and shape as the object to be measured positioned on the placement surface.

[0021] In addition, in the magnetic permeability measuring tool according to the present invention, it is preferable that the object to be measured is made of a liquid material, and the installation portion is formed in a concave shape that is recessed in the vertical direction and has a storage portion in which the object to be measured can be stored.

[0022] In the magnetic permeability measuring tool according to the present invention, it is preferable that the object to be measured is a copper foil.

[0023] Moreover, a magnetic permeability measuring method according to the present invention uses the magnetic permeability measuring jig. Effect of the Invention

[0024] According to the present invention, by connecting a network analyzer to the signal input section and the signal output section, a circuit used in the shunt-through method, which is a method of measuring impedance using a network analyzer, is constructed, making it possible to accurately measure impedance in a low impedance numerical range, and improving the measurement accuracy of the magnetic permeability of the object to be measured. [Brief description of the drawings]

[0025] [Figure 1] FIG. 1 is a perspective view of a magnetic permeability measuring tool according to a first embodiment of the present invention. [Diagram 2]FIG. 2 is a side view of the magnetic permeability measuring tool according to the first embodiment of the present invention. [Diagram 3] FIG. 3 is a circuit diagram of the magnetic permeability measuring tool according to the first embodiment of the present invention. [Figure 4] FIG. 4(a) is an open jig according to the first embodiment of the present invention, FIG. 4(b) is a short jig according to the first embodiment of the present invention, and FIG. 4(c) is a calculation formula for eliminating the influence of the connector portion using the open jig and short jig according to the first embodiment of the present invention. [Diagram 5] FIG. 5(a) is a schematic diagram of a magnetic permeability measurement jig in which the influence of the connector portion is removed according to the first embodiment of the present invention, FIG. 5(b) is a graph showing the relationship between frequency and the real part of impedance in the presence and absence of a measured object according to the first embodiment of the present invention, and FIG. 5(c) is a graph showing the relationship between frequency and the imaginary part of impedance in the presence and absence of a measured object according to the first embodiment of the present invention. [Figure 6] FIG. 6 is a diagram for explaining the relational expression between impedance and effective permeability in the presence and absence of an object to be measured according to the first embodiment of the present invention. [Figure 7] FIG. 7 is a diagram illustrating the effective permeability according to the first embodiment of the present invention. [Figure 8] FIG. 8(a) is a graph showing the relationship between relative permeability and effective permeability according to the first embodiment of the present invention, FIG. 8(b) is a graph showing the relationship between frequency and effective permeability according to the first embodiment of the present invention, and FIG. 8(c) is a graph showing the relationship between frequency and relative permeability according to the first embodiment of the present invention. [Figure 9] FIG. 9 is a perspective view of a magnetic permeability measuring tool according to the second embodiment of the present invention. [Figure 10] FIG. 10 is a plan view of a magnetic permeability measuring tool according to the second embodiment of the present invention. [Figure 11] FIG. 11 is a circuit diagram of a magnetic permeability measuring tool according to the second embodiment of the present invention. [Figure 12]FIG. 12(a) shows an open jig according to the second embodiment of the present invention, and FIG. 12(b) shows a short jig according to the second embodiment of the present invention. [Figure 13] FIG. 13 is a perspective view of a magnetic permeability measurement tool according to the third embodiment of the present invention. [Figure 14] FIG. 14 is a perspective view of a magnetic permeability measurement tool according to the fourth embodiment of the present invention. [Figure 15] FIG. 15 is a perspective view of a magnetic permeability measurement tool according to the fifth embodiment of the present invention. [Figure 16] FIG. 16 is a perspective view of a magnetic permeability measurement tool according to the sixth embodiment of the present invention. [Figure 17] FIG. 17 is a perspective view of a magnetic permeability measurement tool according to the seventh embodiment of the present invention. [Figure 18] FIG. 18 is a perspective view of a magnetic permeability measurement tool according to the eighth embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0026] First Embodiment Figures 1 to 8 show a first embodiment of the present invention. Figure 1 is a perspective view of a magnetic permeability measuring jig, Figure 2 is a side view of the magnetic permeability measuring jig, Figure 3 is a circuit diagram of the magnetic permeability measuring jig, Figure 4(a) is an open jig, Figure 4(b) is a short jig, Figure 4(c) is a calculation formula for removing the influence of the connector part using the open jig and the short jig, Figure 5(a) is a schematic diagram of the magnetic permeability measuring jig from which the influence of the connector part has been removed, and Figure 5(b) shows the relationship between frequency and the real part of the impedance in the presence and absence of an object to be measured. FIG. 5(c) is a graph showing the relationship between frequency and the imaginary part of the impedance in the presence and absence of an object to be measured, FIG. 6 is a diagram explaining the relationship between impedance and effective permeability in the presence and absence of an object to be measured, FIG. 7 is a diagram explaining effective permeability, FIG. 8(a) is a graph showing the relationship between relative permeability and effective permeability, FIG. 8(b) is a graph showing the relationship between frequency and effective permeability, and FIG. 8(c) is a graph showing the relationship between frequency and relative permeability.

[0027] The magnetic permeability measuring tool 10 of this embodiment is used when measuring the magnetic permeability of a magnetic material, that is, an object to be measured M. The object to be measured M is, for example, a copper foil whose surface is plated with a nickel-phosphorus alloy, and which is used as a shield for blocking electromagnetic waves.

[0028] As shown in Figures 1 and 2, the magnetic permeability measuring jig 10 comprises a jig body 11 on which the object to be measured M is placed, a connector portion 12 arranged on one side of the jig body 11 and to which a network analyzer is connected, and a signal line 13 over which an electrical signal output from the network analyzer is transmitted.

[0029] The jig body 11 is made of a conductor such as a copper alloy and functions as a ground. The jig body 11 has a mounting portion 11a on which the object to be measured M can be mounted. The mounting portion 11a is provided outside the signal line 13 within a range in which the object to be measured M is affected by the electric field and magnetic field generated by the electric signal transmitted through the signal line 13. It is desirable that the mounting portion 11a is provided at a position where the distance between the mounted object to be measured M and the signal line 13 is within a range of, for example, λ / 2π, where λ is the wavelength of the electric signal. The mounting portion 11a of this embodiment is provided on the upper surface side of the jig body 11. The mounting portion 11a is formed into a concave shape capable of accommodating the object to be measured M by the plate-like portion of the connector portion 12 described later and the jig body 11. The object to be measured M is mounted on the mounting portion 11a without contacting the signal line 13.

[0030] The connector portion 12 has a plate-like portion 14, and the plate-like portion 14 is attached to one side surface of the jig body 11. The connector portion 12 has an input-side line 12a having a signal input portion 12a1 at one end thereof to which an electric signal is input and to which the electric signal input from the signal input portion 12a1 is transmitted, a signal output portion 12b1 at one end thereof to which an electric signal is output and an output-side line 12b to which the electric signal output from the signal output portion 12b1 is transmitted, and a connection line 12c having a connection portion 12c1 at one end thereof to which the signal line 13 is connected and a connection line 12c having the other end thereof connected to the other ends of the input-side line 12a and the output-side line 12b.

[0031] Port 1 of the network analyzer is connected to signal input section 12a1 of connector section 12 via a cable, and an electrical signal output from the network analyzer is input from signal input section 12a1. Port 2 of the network analyzer is connected to signal output section 12b1 of connector section 12 via a cable, and an electrical signal to be input to the network analyzer is output from signal output section 12b1.

[0032] The input line 12a and the output line 12b are arranged to extend in a straight line with each other, and the connection line 12c extends in a direction perpendicular to the input line 12a and the output line 12b that are arranged in a straight line.

[0033] The signal line 13 is a line through which an electrical signal of a microstrip line configured by regarding the air below the signal line 13 as an insulating layer and regarding the jig body 11 as a ground layer is transmitted, and the size in the width direction and the size in the thickness direction of the conductor are adjusted so that the impedance is, for example, 50 Ω. One end of the signal line 13 is connected to the connection part 12c1 of the connector part 12, and the other end is connected to the jig body 11. The signal line 13 is connected to the jig body 11 at the other end, thereby being connected to the ground.

[0034] The magnetic permeability measuring jig 10 configured as described above is used with port 1 of a network analyzer connected to the signal input portion 12a1 of the connector portion 12 via a cable, and with port 2 of the network analyzer connected to the signal output portion 12b1 of the connector portion 12 via a cable.

[0035] As shown in FIG. 3, the magnetic permeability measuring jig 10 is configured with a circuit used in a shunt-through method, which is one of the methods for measuring impedance using a network analyzer.

[0036] In the shunt-through method, the circuit characteristics (such as S parameters) are measured by outputting a measurement electrical signal from the signal source of the network analyzer, and the impedance is calculated based on the measured circuit characteristics.

[0037] At this time, the calculated impedance does not include the influence of the cables connected to ports 1 and 2 by performing calibration of the network analyzer. However, since the calculated impedance includes the influence of the impedance of the input side line 12a and the output side line 12b of the connector section 12, port extension is performed in advance to remove the influence of the input side line 12a and the output side line 12b of the connector section 12, and the impedance Z meas Get the.

[0038] Also, the obtained impedance Z meas includes the effect of the impedance of the connection line 12c of the connector portion 12. Therefore, the exact impedance Z DUT In order to obtain this, the influence of the impedance of the connection line 12c of the connector section 12 is eliminated using the following method.

[0039] Impedance Z DUT In order to obtain the impedance Z, first, as shown in FIG. 4(a), an open jig 10a is used, which is obtained by removing the jig body 11 and the signal line 13 from the magnetic permeability measurement jig 10, to measure the impedance Z оpen Also, measure the impedance Z DUT In order to obtain the impedance Z shоrt Measure.

[0040] Next, impedance Z meas、 Impedance Z оpen , impedance Z shоrtBy substituting, the impedance Z of the signal line 13 is DUT Calculate.

[0041] As a result, as shown in FIG. 5(a), the impedance Z DUT It is possible to obtain the following.

[0042] In the network analyzer set up as described above, the impedance Z DUT As a result, the frequency and impedance Z are measured with and without the object to be measured M relative to the installation portion 11a, as shown in FIG. DUT As shown in Fig. 5(c), the relationship between the real part of the impedance Z and the frequency DUT The relationship with the imaginary part of is obtained.

[0043] The magnetic permeability of the object to be measured M is calculated by the impedance Z DUT It is calculated based on:

[0044] The impedance Z of the signal line 13 when the object to be measured M is not placed on the placement portion 11a DUT The impedance Z air 6 satisfies the relationship of formula (2) shown in FIG. 6. In addition, the impedance Z DUT The impedance Z mag satisfies the relationship of formula (3) shown in FIG.

[0045] To obtain the magnetic permeability of the object to be measured, the impedance Z air Equation (2) for impedance Z mag Based on equation (3) for the effective permeability μ eff Calculate the effective permeability μ effObtain the relative permeability corresponding to

[0046] Here, the effective permeability μ eff This refers to the magnetic permeability of the base material when the air layer and the object to be measured M in a microstrip line consisting of an air layer with a relative magnetic permeability of 1 and an object to be measured M with a relative magnetic permeability of μ, as shown in Figure 7, are replaced with a single type of base material with approximately the same overall relative magnetic permeability.

[0047] By analyzing the relative permeability, which varies depending on the object M to be measured, for example, by changing the range of 1 to 4000 and calculating the effective permeability, the relative permeability μ and effective permeability μ shown in FIG. 8(a) can be obtained. eff The effective permeability μ eff and the relative permeability μ and effective permeability μ shown in Fig. 8(a) eff The relative permeability μ is determined from the approximation curve that represents the relationship between the effective permeability μ and the magnetic field strength. eff FIG. 8(c) shows the relative permeability μ and effective permeability μ shown in FIG. 8(b) and FIG. 8(a). eff 1 is an example of a relative permeability μ determined from an approximation curve that represents the relationship between

[0048] Thus, according to the magnetic permeability measuring jig 10 of this embodiment, the magnetic permeability measuring jig 10 is used to measure the magnetic permeability of the object to be measured M, and is equipped with: an input side line 12a having a signal input section 12a1 at one end to which an electric signal is input, and to which the electric signal input from the signal input section 12a1 is transmitted; an output side line 12b having a signal output section 12b1 at one end to which an electric signal is output, and to which the electric signal output from the signal output section 12b1 is transmitted; a signal line 13 having one end connected to the input side line 12a and the output side line 12b and the other end connected to the jig body 11; and an installation section 11a that is provided outside the signal line 13, within a range where the object to be measured is affected by the electric field and magnetic field generated by the electric signal transmitted through the signal line 13, and on which the object to be measured M can be installed.

[0049] Moreover, according to the magnetic permeability measuring method of the present embodiment, the magnetic permeability measuring jig 10 is used.

[0050] As a result, by connecting a network analyzer to the signal input section 12a1 and the signal output section 12b1, a circuit used in the shunt-through method, which is a method of measuring impedance using a network analyzer, is constructed, making it possible to accurately measure impedance in a low impedance numerical range, and therefore to accurately measure the magnetic permeability of the object to be measured M.

[0051] Moreover, the signal line 13 is preferably a microstrip line.

[0052] This makes it possible to improve the impedance measurement accuracy with a simple configuration.

[0053] Moreover, it is preferable that the installation portion 11a is formed in a concave shape capable of accommodating the object M to be measured.

[0054] As a result, by placing the object to be measured M on the placement section 11a, it is possible to accurately position the object to be measured M relative to the signal line 13, making it possible to easily measure the magnetic permeability of the object to be measured M.

[0055] Moreover, the object to be measured is preferably a copper foil.

[0056] <Second embodiment> Figures 9 to 12 show a second embodiment of the present invention. Figure 9 is a perspective view of a magnetic permeability measurement jig, Figure 10 is a plan view of the magnetic permeability measurement jig, Figure 11 is a circuit diagram of the magnetic permeability measurement jig, Figure 12(a) is an open jig, and Figure 12(b) is a short jig. Note that the same components as those in the above embodiment are denoted by the same reference numerals.

[0057] The magnetic permeability measurement jig 10 of this embodiment includes a connector portion 15 that includes a pair of plate-like portions 14a attached to a jig body 11, as shown in FIGS.

[0058] The connector portion 15 has a signal input portion 15a1 at one end to which an electrical signal is input, and an input side line 15a to which the electrical signal input from the signal input portion 15a1 is transmitted, a signal output portion 15b1 at one end to which an electrical signal is output, and an output side line 15b to which the electrical signal output from the signal output portion 15b1 is transmitted, and a substrate 15c arranged between the signal input portion 15a1 and the signal output portion 15b1.

[0059] The input line 15a and the output line 15b are each a conductor disposed on the upper surface of the substrate 15c.

[0060] The substrate 15c is disposed in a portion adjacent to the installation portion 11a on the upper surface side of the jig body 11. On the upper surface of the substrate 15c, the input side line 15a and the output side line 15b are disposed in a straight line in a direction perpendicular to the direction in which the signal line 13 extends.

[0061] One end of the signal line 13 is connected to the substrate 15c by soldering or the like, thereby connecting the signal line 13 to the input side line 15a and the output side line 15b arranged on the substrate 15c. That is, as shown in Fig. 10, the signal line 13 has an input side connection part 13a to which the other end of the input side line 15a is connected, and an output side connection part 13b to which the other end of the output side line 15b is connected.

[0062] The signal line 13, the input line 15a, and the output line 15b are adjusted in width and height so that their impedances become predetermined values.

[0063] In the magnetic permeability measuring jig 10 configured as described above, as in the first embodiment, the device is used with port 1 of the network analyzer connected to signal input portion 15a1 of connector portion 15 via a cable, and with port 2 of the network analyzer connected to signal output portion 15b1 of connector portion 12 via a cable.

[0064] As shown in FIG. 11, the magnetic permeability measuring jig 10 is configured with a circuit used in a shunt-through method, which is one of the methods for measuring impedance using a network analyzer.

[0065] When calculating the impedance by the shunt-through method, as in the first embodiment, the influence of the cables connected to the ports 1 and 2 is eliminated by calibrating the network analyzer, and the influence of the input side line 15a and the output side line 15b of the connector unit 15 is eliminated by performing port extension, so that the impedance Z meas Get the.

[0066] Also, the obtained impedance Z meas includes the influence of the line on the connector portion 15 side of the signal line 13. Therefore, the accurate impedance Z DUT In order to obtain this, the influence of the line on the connector portion 15 side of the signal line 13 is removed using the following method.

[0067] Impedance Z DUT In order to obtain the impedance Z, first, as shown in FIG. 12(a), an open jig 10a, which is a portion of the magnetic permeability measuring jig 10 closer to the connector portion 15 than the portion facing the installation portion 11a of the signal line 13, is used to measure the impedance Z оpen Also, measure the impedance Z DUT In order to obtain the impedance Z, as shown in FIG. 12(b), a short jig 10b identical to the magnetic permeability measuring jig 10 is used to measure the impedance Z shоrt Measure.

[0068] Next, as in the first embodiment, impedance Z meas、 Impedance Z оpen , impedance Z shоrt By substituting the above, the impedance Z of the portion of the signal line 13 facing the installation portion 11a is obtained. DUT Calculate.

[0069] Thus, according to the magnetic permeability measuring jig 10 of this embodiment, as in the first embodiment, by connecting a network analyzer to the signal input section 15a1 and the signal output section 15b1, a circuit used in the shunt-through method, which is a method of measuring impedance using a network analyzer, is constructed, making it possible to accurately measure impedance in a low impedance numerical range, and therefore to accurately measure the magnetic permeability of the object to be measured M.

[0070] It is also preferable that the signal line 13 has an input side connection portion 13a to which the other end of the input side line 15a is connected, and an output side connection portion 13b to which the other end of the output side line 15b is connected.

[0071] As a result, the input side line 15a and the output side line 15b are each directly connected to the signal line 13, so that it is possible to suppress the effect of resistance due to contact between the signal line 13 and the input side line 15a and the output side line 15b, and it is possible to more reliably measure the impedance of the portion of the signal line 13 facing the object to be measured M and more accurately measure the magnetic permeability of the object to be measured M.

[0072] Moreover, it is preferable that the input line 15a and the output line 15b are disposed on a straight line in a direction perpendicular to the direction in which the signal line 13 extends.

[0073] This makes it possible to suppress the occurrence of coupling between the input side line 15a and the output side line 15b, between the input side line 15a and the signal line 13, or between the output side line 15b and the signal line 13.

[0074] Moreover, the input line 15a and the output line 15b are preferably conductors disposed on a substrate 15c.

[0075] As a result, the input line 15a and the output line 15b are reinforced by the substrate 15c, making it possible to prevent damage to the input line 15a and the output line 15b.

[0076] Moreover, it is preferable that the impedances of the signal line 13, the input line 15a, and the output line 15b are adjusted to be predetermined values.

[0077] This makes it possible to measure the impedance of the portion of the signal line 13 facing the object to be measured M more reliably, and to measure the magnetic permeability of the object to be measured M more accurately.

[0078] <Third embodiment> 13 is a perspective view of a magnetic permeability measuring tool according to a third embodiment of the present invention, in which the same components as those in the above-described embodiment are denoted by the same reference numerals.

[0079] The magnetic permeability measuring jig 10 of this embodiment has an installation portion 11a formed in a flat shape, a mounting surface 11b on which the object to be measured M is placed, and a holding mechanism 11c that holds the object to be measured M located on the mounting surface 11b in a state aligned with the mounting surface 11b.

[0080] In this embodiment, the object to be measured M is made of a sheet-like member. The object to be measured M is formed so that its longitudinal size is larger than the longitudinal size of the mounting surface 11b. When the object to be measured M is placed on the placement section 11a, the central side in the longitudinal direction is located on the mounting surface 11b, and both end sides are located outside the mounting surface 11b.

[0081] The holding mechanism 11c has a pair of gripping portions 11c1 that grip both ends of the object M in the longitudinal direction, respectively, and a support portion 11c2 that supports the pair of gripping portions 11c1.

[0082] Each of the pair of gripping portions 11c1 has a pair of clamping plates for clamping the object to be measured M, and an assembly bolt for assembling the pair of clamping plates together.

[0083] The support portion 11c2 is capable of moving each of the pair of gripping portions 11c1 in the extending direction of the placement surface 11b and in the height direction of the placement surface 11b.

[0084] In the magnetic permeability measurement jig 10 configured as above, when the sheet-shaped object M to be measured is placed on the placement section 11a, first, the center side in the longitudinal direction of the object M to be measured is placed on the placement surface 11b. Next, both ends in the longitudinal direction of the object M to be measured are gripped by the gripping sections 11c1, and the pair of gripping sections 11c1 gripping the object M to be measured are moved in directions away from each other and in a direction lower than the height of the placement surface 11b, and fixed to the support section 11c2. As a result, tension is applied to the object M to be measured, and the center side in the longitudinal direction is pressed against the placement surface 11b, so that the object M to be measured is placed on the placement surface 11b without wrinkles or slack.

[0085] Thus, according to the magnetic permeability measuring jig 10 of this embodiment, as in the first embodiment, by connecting a network analyzer to the signal input section 15a1 and the signal output section 15b1, a circuit used in the shunt-through method, which is a method of measuring impedance using a network analyzer, is constructed, making it possible to accurately measure impedance in a low impedance numerical range, and therefore to accurately measure the magnetic permeability of the object to be measured M.

[0086] It is also preferable that the object to be measured M is made of a sheet-like member, and the installation portion 11a is formed in a flat shape and has a mounting surface 11b on which the object to be measured M is placed, and a holding mechanism 11c that holds the object to be measured M located on the mounting surface 11b in a state aligned with the mounting surface 11b.

[0087] This makes it possible to place the sheet-like object M to be measured along the placement surface 11b, thereby making it possible to measure the magnetic permeability of the object M to be measured more accurately.

[0088] It is also preferable that a portion of the object to be measured M is located on the mounting surface 11b and the other portion is located outside the mounting surface 11b, and that the holding mechanism 11c pulls the portion of the object to be measured M that is located outside the mounting surface 11b, thereby aligning the portion of the object to be measured M that is located on the mounting surface 11b with the mounting surface 11b.

[0089] This makes it possible to place the object to be measured M to which tension is applied on the placement surface 11b, thereby making it possible to prevent the object to be measured M from wrinkling or sagging on the placement surface 11b.

[0090] Moreover, it is preferable that the holding mechanism 11c pulls the portion of the object to be measured M located outside the placement surface 11b in a direction lower than the height of the placement surface 11b.

[0091] As a result, the object M to be measured on the placement surface 11b is pressed against the placement surface 11b, so that it is possible to further prevent the object M to be measured from wrinkling or sagging on the placement surface 11b.

[0092] <Fourth embodiment> 14 is a perspective view of a magnetic permeability measuring tool according to a fourth embodiment of the present invention, in which the same components as those in the above-described embodiment are denoted by the same reference numerals.

[0093] As in the third embodiment, the magnetic permeability measuring jig 10 of this embodiment has an installation portion 11a formed in a flat shape, a mounting surface 11b on which the object to be measured M is placed, and a holding mechanism 11c that holds the object to be measured M located on the mounting surface 11b in a state aligned with the mounting surface 11b.

[0094] In this embodiment, the object to be measured M is made of a sheet-like member. The object to be measured M is formed so that its longitudinal size is larger than the longitudinal size of the mounting surface 11b. When the object to be measured M is placed on the placement section 11a, one end side in the longitudinal direction is located on the mounting surface 11b, and the other end side is located outside the mounting surface 11b.

[0095] The holding mechanism 11c has a fixing portion 11c3 that fixes one longitudinal end of the object to be measured M to one longitudinal end of the mounting surface 11b, and a tension applying portion 11c4 that holds the other end of the object to be measured M placed on the installation portion 11b and applies tension.

[0096] The fixing portion 11c3 has, at one end in the longitudinal direction of the mounting surface 11b, a clamping plate that clamps the object to be measured M between itself and the mounting surface 11b, and a fixing bolt that fixes the clamping plate onto the mounting surface 11b.

[0097] The tension applying unit 11c4 is disposed outside the other end of the mounting surface 11b in the longitudinal direction and at a position lower than the height of the mounting surface 11b. The tension applying unit 11c4 has a pair of rollers whose outer circumferential surfaces abut against each other and one of which moves in conjunction with the other by rotating. The tension applying unit 11c4 rotates one of the rollers while the other end of the object to be measured M is sandwiched between the pair of rollers, thereby feeding the object to be measured M to the outside of the other end of the mounting surface 11b in the longitudinal direction by the pair of rollers.

[0098] In the magnetic permeability measuring tool 10 configured as above, when the sheet-shaped object M to be measured is placed on the placement section 11a, first, one end side in the longitudinal direction of the object M to be measured is placed on the placement surface 11b. Next, one end side in the longitudinal direction of the object M to be measured is fixed to one end side of the placement surface 11b by the fixing section 11c3, and the other end side in the longitudinal direction of the object M to be measured is placed between a pair of rollers of the tension applying section 11c4, and the pair of rollers is rotated to feed the other end side of the object M to the outside of the other end side in the longitudinal direction of the placement surface 11b. As a result, tension is applied to the object M to be measured, and one end side in the longitudinal direction is pressed against the placement surface 11b, so that the object M to be measured is placed on the placement surface 11b without wrinkles or slack.

[0099] Thus, according to the magnetic permeability measuring jig 10 of this embodiment, as in the first embodiment, by connecting a network analyzer to the signal input section 15a1 and the signal output section 15b1, a circuit used in the shunt-through method, which is a method of measuring impedance using a network analyzer, is constructed, making it possible to accurately measure impedance in a low impedance numerical range, and therefore to accurately measure the magnetic permeability of the object to be measured M.

[0100] It is also preferable that the object to be measured M is made of a sheet-like member, and the installation portion 11a is formed in a flat shape and has a mounting surface 11b on which the object to be measured M is placed, and a holding mechanism 11c that holds the object to be measured M located on the mounting surface 11b in a state aligned with the mounting surface 11b.

[0101] This makes it possible to place the sheet-like object M to be measured along the placement surface 11b, thereby making it possible to measure the magnetic permeability of the object M to be measured more accurately.

[0102] It is also preferable that a portion of the object to be measured M is located on the mounting surface 11b and the other portion is located outside the mounting surface 11b, and that the holding mechanism 11c pulls the portion of the object to be measured M that is located outside the mounting surface 11b, thereby aligning the portion of the object to be measured M that is located on the mounting surface 11b with the mounting surface 11b.

[0103] This makes it possible to place the object to be measured M to which tension is applied on the placement surface 11b, thereby making it possible to prevent the object to be measured M from wrinkling or sagging on the placement surface 11b.

[0104] Moreover, it is preferable that the holding mechanism 11c pulls the portion of the object to be measured M located outside the placement surface 11b in a direction lower than the height of the placement surface 11b.

[0105] As a result, the object M to be measured on the placement surface 11b is pressed against the placement surface 11b, so that it is possible to further prevent the object M to be measured from wrinkling or sagging on the placement surface 11b.

[0106] <Fifth embodiment> 15 is a perspective view of a magnetic permeability measuring tool according to a fifth embodiment of the present invention, in which the same components as those in the above-described embodiment are denoted by the same reference numerals.

[0107] The magnetic permeability measuring jig 10 of this embodiment has an installation portion 11a formed in a flat shape, a mounting surface 11b on which the object to be measured M is placed, and a holding mechanism 11c that holds the object to be measured M located on the mounting surface 11b in a state aligned with the mounting surface 11b.

[0108] In this embodiment, the object to be measured M is made of a sheet-like member. The size of the object to be measured M in the longitudinal direction is approximately the same as the size of the placement surface 11b in the longitudinal direction.

[0109] A plurality of suction holes 11b1 are formed over the entire surface of the mounting surface 11b.

[0110] The holding mechanism 11c has a suction pump (not shown) whose suction side communicates with the plurality of suction holes 11b1.

[0111] In the magnetic permeability measurement tool 10 configured as above, when a sheet-like object M to be measured is placed on the placement section 11a, the object M to be measured is placed on the placement surface 11b. Next, the suction pump is driven to suck air through the multiple suction holes 11b1. As a result, the object M to be measured is sucked through the multiple suction holes 11b1 and is stuck to the placement surface 11b, and is placed on the placement surface 11b without wrinkles or slack.

[0112] Thus, according to the magnetic permeability measuring jig 10 of this embodiment, as in the first embodiment, by connecting a network analyzer to the signal input section 15a1 and the signal output section 15b1, a circuit used in the shunt-through method, which is a method of measuring impedance using a network analyzer, is constructed, making it possible to accurately measure impedance in a low impedance numerical range, and therefore to accurately measure the magnetic permeability of the object to be measured M.

[0113] It is also preferable that the object to be measured M is made of a sheet-like member, and the installation portion 11a is formed in a flat shape and has a mounting surface 11b on which the object to be measured M is placed, and a holding mechanism 11c that holds the object to be measured M located on the mounting surface 11b in a state aligned with the mounting surface 11b.

[0114] This makes it possible to place the sheet-like object M to be measured along the placement surface 11b, thereby making it possible to measure the magnetic permeability of the object M to be measured more accurately.

[0115] It is preferable that a plurality of suction holes 11b1 are formed over the entire surface of the mounting surface 11b, and that the holding mechanism 11c has a suction pump whose suction side communicates with the plurality of suction holes 11b1.

[0116] This makes it possible for the object to be measured M placed on the mounting surface 11b to be in a state of being stuck to the mounting surface 11b, making it possible to prevent the object to be measured M from wrinkling or sagging on the mounting surface 11b.

[0117] Sixth embodiment 16 is a perspective view of a magnetic permeability measuring tool according to a sixth embodiment of the present invention, in which the same components as those in the above-described embodiments are denoted by the same reference numerals.

[0118] The magnetic permeability measuring jig 10 of this embodiment has an installation portion 11a formed in a flat shape, a mounting surface 11b on which the object to be measured M is placed, and a holding mechanism 11c that holds the object to be measured M located on the mounting surface 11b in a state aligned with the mounting surface 11b.

[0119] In this embodiment, the object to be measured M is made of a sheet-like member. The size of the object to be measured M in the longitudinal direction is approximately the same as the size of the placement surface 11b in the longitudinal direction.

[0120] The holding mechanism 11c has a clamping plate 11c5 that clamps the object to be measured M placed on the placement surface 11b between itself and the placement surface 11b.

[0121] The sandwiching plate 11c5 is made of a material having a predetermined relative dielectric constant. Here, the sandwiching plate 11c5 is preferably made of a material having a relative dielectric constant of approximately 1.

[0122] Here, the numerical range in which the relative dielectric constant of the clamping plate 11c5 is approximately 1 varies depending on the size of the measured portion M in the thickness direction. That is, the greater the thickness of the measured object M, the less susceptible it is to the influence of the dielectric, and the smaller the thickness, the more susceptible it is to the influence of the dielectric. For this reason, for example, when the thickness of the measured object M is 20 μm, the relative dielectric constant of the clamping plate 11c5 is approximately 1 includes a numerical range of 1.0 to 1.1. When the thickness of the measured object M is 40 μm, the relative dielectric constant of the clamping plate 11c5 is approximately 1 includes a numerical range of 1.0 to 1.2. When the thickness of the measured object M is 10 μm, the relative dielectric constant of the clamping plate 11c5 is approximately 1 includes a numerical range of 1.0 to 1.05.

[0123] In addition, when the relative dielectric constant is outside the range of approximately 1, the clamping plate 11c5 preferably has the same size and shape as the object to be measured M placed on the placement surface 11b.

[0124] In the magnetic permeability measuring tool 10 configured as above, when the sheet-shaped object M to be measured is placed on the placement section 11a, the object M to be measured is first placed on the placement surface 11b. Next, the clamping plate 11c5 is placed on the upper surface side of the object M to be measured. As a result, the object M to be measured is sandwiched between the placement surface 11b and the clamping plate 11c5, and is placed on the placement surface 11b without wrinkles or slack. Here, when the clamping plate 11c5 is made of a material whose relative dielectric constant is within a range of approximately 1, the magnetic permeability of the object M to be measured can be obtained directly from the measured impedance. Also, when the clamping plate 11c5 is made of a material whose relative dielectric constant is outside the range of approximately 1, a calculation is performed to remove the influence of the relative dielectric constant of the clamping plate 11c5 from the measured impedance, and the magnetic permeability of the object M to be measured is obtained.

[0125] Thus, according to the magnetic permeability measuring jig 10 of this embodiment, as in the first embodiment, by connecting a network analyzer to the signal input section 15a1 and the signal output section 15b1, a circuit used in the shunt-through method, which is a method of measuring impedance using a network analyzer, is constructed, making it possible to accurately measure impedance in a low impedance numerical range, and therefore to accurately measure the magnetic permeability of the object to be measured M.

[0126] It is also preferable that the object to be measured M is made of a sheet-like member, and the installation portion 11a is formed in a flat shape and has a mounting surface 11b on which the object to be measured M is placed, and a holding mechanism 11c that holds the object to be measured M located on the mounting surface 11b in a state aligned with the mounting surface 11b.

[0127] This makes it possible to place the sheet-like object M to be measured along the placement surface 11b, thereby making it possible to measure the magnetic permeability of the object M to be measured more accurately.

[0128] In addition, it is preferable that the holding mechanism 11c has a clamping plate 11c5 that clamps the object to be measured M placed on the mounting surface 11b between itself and the mounting surface 11b, and that the clamping plate 11c5 is formed from a material having a predetermined dielectric constant.

[0129] This makes it possible to hold the object M to be measured between the placement surface 11b and the clamping plate 11c5, making it possible to prevent wrinkles or sagging of the object M to be measured on the placement surface 11b.

[0130] Moreover, it is preferable that the relative dielectric constant of the sandwiching plate 11c5 is approximately one.

[0131] This makes it possible to minimize the effect of the clamping plate 11c5 on the impedance measurement results.

[0132] Moreover, it is preferable that the clamping plate 11c5 has the same size and shape as the object to be measured M positioned on the placement surface 11b.

[0133] This makes it possible to eliminate the influence of the relative dielectric constant of the sandwiching plate 11c5 with higher precision.

[0134] Seventh embodiment 17 is a perspective view of a magnetic permeability measuring tool according to a seventh embodiment of the present invention, in which the same components as those in the above-described embodiment are denoted by the same reference numerals.

[0135] In the magnetic permeability measurement jig 10 of this embodiment, as in the sixth embodiment, the holding mechanism 11c has a clamping plate 11c5 that clamps the object to be measured M placed on the mounting surface 11b between the holding mechanism 11c and the mounting surface 11b. The holding mechanism 11c of this embodiment also has a clamping plate fixing portion 11c6 that fixes the clamping plate 11c5, which is in a state of clamping the object to be measured M placed on the mounting surface 11b, to the jig body 11.

[0136] The clamping plate fixing portions 11c6 clamp the jig body 11 and the clamping plate 11c5 in the thickness direction on both sides in the longitudinal direction of the placement surface 11b, thereby fixing the clamping plate 11c5 to the jig body 11.

[0137] In the magnetic permeability measurement jig 10 configured as above, when a sheet-like object M to be measured is placed on the placement section 11a, the object M to be measured is first placed on the placement surface 11b. Next, the clamping plate 11c5 is placed on the upper surface side of the object M to be measured. Finally, the clamping plate 11c5 is fixed to the jig body 11 by the clamping plate fixing section 11c6. As a result, the object M to be measured is sandwiched between the placement surface 11b and the clamping plate 11c5, and is placed on the placement surface 11b without wrinkles or slackness.

[0138] Thus, according to the magnetic permeability measuring jig 10 of this embodiment, as in the sixth embodiment, it is possible to clamp the object to be measured M between the mounting surface 11b and the clamping plate 11c5, thereby making it possible to suppress the occurrence of wrinkles or sagging of the object to be measured M on the mounting surface 11b.

[0139] Eighth embodiment 18 is a perspective view of a magnetic permeability measuring tool according to an eighth embodiment of the present invention, in which the same components as those in the above-described embodiment are denoted by the same reference numerals.

[0140] In the magnetic permeability measurement tool 10 of this embodiment, the installation section 11a is formed in a vertically recessed concave shape and has a storage section 11d capable of storing liquid. The storage section 11d has a bottom formed in a planar shape extending horizontally and a wall extending in a planar shape extending vertically.

[0141] The object to be measured M in this embodiment is made of a liquid material such as a magnetic fluid, etc. In addition, when the object to be measured M is stored in the storage portion 11d, the liquid surface forms a plane extending horizontally.

[0142] In the magnetic permeability measurement tool 10 configured as above, when the liquid object M to be measured is placed in the placement section 11a, the object M to be measured is poured into the storage section 11d. As a result, the liquid object M to be measured is placed in the placement section 11a.

[0143] Thus, according to the magnetic permeability measuring jig 10 of this embodiment, as in the first embodiment, by connecting a network analyzer to the signal input section 15a1 and the signal output section 15b1, a circuit used in the shunt-through method, which is a method of measuring impedance using a network analyzer, is constructed, making it possible to accurately measure impedance in a low impedance numerical range, and therefore to accurately measure the magnetic permeability of the object to be measured M.

[0144] It is also preferable that the object to be measured M is made of a liquid material, and the installation section 11a is formed in a concave shape that is recessed in the vertical direction and has a storage section 11d in which the object to be measured M can be stored.

[0145] This makes it possible to place a liquid object M to be measured on the placement portion 11a, and to measure the magnetic permeability of the liquid object M to be measured.

[0146] In the above embodiment, the object M to be measured for magnetic permeability is a plated copper foil for shielding, but the present invention is not limited to this. The object M to be measured can be applied to measuring the magnetic permeability of magnetic materials such as hard disk drives (HDDs), coil antennas for wireless power transmission, and plating or sheets having wear resistance and electromagnetic wave blocking properties.

[0147] In the above embodiment, the installation portion 11a on which the object to be measured M can be placed is formed on the upper surface of the jig body 11 located below the signal line 13, but this is not limited to this. As long as the object to be measured is placed in such a way that it is affected by the electric field and magnetic field generated by the electrical signal transmitted through the signal line, it does not need to be in contact with the jig body, and the installation portion may be placed above or to the side of the signal line. Also, an object to be measured made of a material that is not conductive may be placed on the installation portion in contact with the signal line. [Explanation of symbols]

[0148] 10 Magnetic permeability measuring tool 11 Jig body 11a Installation part 11b Placement surface 11b1 Suction hole 11c Retention mechanism 11c5 Holding plate 11d Storage section 12 Connector part 12a Input line 12a1 Signal input section 12b Output line 12b1 Signal output section 13 Signal Line 13a Input side connection 13b Output side connection 15 Connector part 15a Input line 15a1 Signal input section 15b Output line 15b1 Signal output section 15c Board M Object to be measured

Claims

1. A magnetic permeability measuring tool used to measure the magnetic permeability of an object to be measured, an input-side line provided with a signal input unit to which an electrical signal is input at one end and through which the electrical signal input from the signal input unit is transmitted; an output line provided with a signal output unit at one end thereof for outputting an electrical signal, and through which the electrical signal output from the signal output unit is transmitted; a signal line having one end connected to the input line and the output line and the other end connected to ground; a mounting portion that is provided outside the signal line within a range in which the object to be measured is affected by an electric field and a magnetic field generated by an electric signal transmitted through the signal line, and on which the object to be measured can be mounted. Magnetic permeability measuring fixture.

2. The signal line is an input side connection portion to which the other end of the input side line is connected; and an output side connection portion to which the other end of the output side line is connected. The magnetic permeability measuring tool according to claim 1.

3. The signal line is a microstrip line. The magnetic permeability measuring tool according to claim 1.

4. The input line and the output line are arranged on a straight line in a direction perpendicular to the direction in which the signal line extends. The magnetic permeability measuring tool according to claim 2.

5. The input line and the output line are conductors disposed on a substrate. The magnetic permeability measuring tool according to claim 2.

6. The signal line, the input line, and the output line are adjusted so that their impedances are predetermined values. The magnetic permeability measuring tool according to claim 2.

7. The installation section is formed in a concave shape capable of accommodating the object to be measured. The magnetic permeability measuring tool according to claim 1.

8. the object to be measured is a sheet-like member, The installation unit includes: a mounting surface formed in a flat shape on which the object to be measured is placed; a holding mechanism for holding the object to be measured located on the placement surface in a state aligned with the placement surface. The magnetic permeability measuring tool according to claim 1.

9. a part of the object to be measured is located on the placement surface, and another part is located outside the placement surface; The holding mechanism includes: A portion of the object to be measured that is positioned outside the placement surface is pulled, so that a portion of the object to be measured that is positioned on the placement surface is aligned with the placement surface. The magnetic permeability measuring tool according to claim 8.

10. The holding mechanism pulls a portion of the object to be measured that is positioned outside the placement surface in a direction that makes the portion lower than the height of the placement surface. The magnetic permeability measuring tool according to claim 9.

11. A plurality of suction holes are formed over the entire surface of the mounting surface, The holding mechanism has a suction pump whose suction side communicates with the plurality of suction holes. The magnetic permeability measuring tool according to claim 8.

12. the holding mechanism has a clamping plate that clamps the object to be measured placed on the placement surface between the clamping plate and the placement surface, The clamping plates are made of a material having a predetermined relative dielectric constant. The magnetic permeability measuring tool according to claim 8.

13. The relative dielectric constant of the sandwiching plates is approximately 1. The magnetic permeability measuring tool according to claim 12.

14. The clamping plate has the same size and shape as the object to be measured placed on the placement surface. The magnetic permeability measuring tool according to claim 12.

15. the object to be measured is a liquid material, The installation section is formed in a concave shape recessed in the vertical direction and has a storage section capable of storing the object to be measured. The magnetic permeability measuring tool according to claim 1.

16. The object to be measured is a copper foil. The magnetic permeability measuring tool according to claim 1.

17. A magnetic permeability measuring tool according to any one of claims 1 to 16 is used. Magnetic permeability measurement method.

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