Optical inspection method, optical inspection program, processor and optical inspection apparatus

Abstract

To provide an optical inspection method capable of excellently inspecting a surface state of an object to be inspected.SOLUTION: A method for optically inspecting a surface state of an object to be inspected comprises: acquiring a color vector of a color corresponding to a wavelength in an n-dimensional (n is a natural number of one or more) color coordinate system equal to the number of a plurality of color channels in each pixel of an image sensor or less than that by optical imaging using a wavelength selection part for selectively passing a plurality of wavelengths different from each other from a surface of the object to be inspected; and determining the surface state of the object to be inspected on the basis of a color vector direction in the color coordinate system.SELECTED DRAWING: Figure 8

Description

[Technical field]

[0001] An embodiment of the present invention relates to an optical inspection method, an optical inspection program, a processing device, and an optical inspection device. [Background technology]

[0002] For example, the surface of the test object is photographed with a normal camera, and the surface condition of the test object is inspected based on the photographed image of the test object surface. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2008-209726 A [Non-patent literature]

[0004] [Non-Patent Document 1] W.L. Hows, “Rainbow schlieren and its application,” Applied Optics, vol. 23, No. 14, 1984 [Non-Patent Document 2] JS Kim and T. Kanade, “Multiaperture telecentric lens for 3D reconstruction,” Optics Letters, vol. 36, No. 7, 2011 Summary of the Invention [Problem to be solved by the invention]

[0005] An object of the present invention is to provide an optical inspection method, an optical inspection program, a processing device, and an optical inspection device that are capable of inspecting the surface condition of a test object. [Means for solving the problem]

[0006] According to an embodiment, a method for optically inspecting the surface condition of a test object includes obtaining a color vector of a color corresponding to the wavelength in an n-dimensional (n is a natural number equal to or greater than 1) color coordinate system, the n-dimensional color coordinate system being equal to or less than the number of color channels of each pixel of an image sensor, by optical imaging using a wavelength selection unit that selectively passes a plurality of different wavelengths from the surface of the test object, and determining the surface condition of the test object based on the direction of the color vector in the color coordinate system. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a schematic block diagram showing an optical inspection system according to first to third embodiments. [Diagram 2] FIG. 2 is a schematic diagram showing a part of an optical inspection device of the optical inspection system according to the first and second embodiments. [Diagram 3] 3 is a schematic diagram showing color filters of the camera of the optical inspection device shown in FIG. 2. [Figure 4] 1 is a schematic diagram showing a camera without illustrating an imaging optical system, and showing a transmission state of light from a color filter to an image sensor when the surface condition of a test object is a standard surface. [Diagram 5] 5 is a schematic graph showing color vectors in a color coordinate system calculated from an image when the surface condition of the test object is the standard surface shown in Figure 4, with the horizontal axis representing the pixel value IR of R light and the vertical axis representing the pixel value IB of B light. [Figure 6] 1 is a schematic diagram showing a camera without illustrating an imaging optical system, and showing a transmission state of light from a color filter to an image sensor when the surface state of a test object has a detection portion on a standard surface. [Figure 7] 7 is a schematic graph showing color vectors in a color coordinate system calculated from an image when the surface state of the test object has a detection portion on the standard surface shown in Figure 6, with the pixel values ​​IR of R light on the horizontal axis and the pixel values ​​IB of B light on the vertical axis. [Figure 8] 4 is a flowchart showing a process for obtaining an inspection result of a surface condition of a test object using the optical inspection device of the optical inspection system according to the first to third embodiments. [Figure 9] The test objects were two pieces of paper with a matte surface (left) and one with a glossy surface (right), and the RGB image data was captured with a normal camera (RGB camera). [Figure 10] 10 is RGB image data obtained by capturing an image of the test object shown in FIG. 9 using a camera of the optical inspection device of the optical inspection system according to the second embodiment. [Figure 11] 10 is a schematic graph showing pixel value plots obtained from images of a paper surface having a matte surface and an image of a paper surface having a glossy surface, as shown in Figures 9 and 10, respectively, when the pixel value IR of R light is taken on the horizontal axis and the pixel value IB of B light is taken on the vertical axis, and showing color vectors in a color coordinate system calculated from each pixel value plot. [Figure 12] FIG. 13 is a schematic perspective view showing a camera of an optical inspection device of an optical inspection system according to a third embodiment. [Figure 13] 13 is a schematic cross-sectional view of a camera of the optical inspection device of the optical inspection system shown in FIG. 12 when viewed from a first plane including an optical axis. [Figure 14] 13 is a schematic cross-sectional view of the camera of the optical inspection device of the optical inspection system shown in FIG. 12 when viewed from a second plane including the optical axis. [Figure 15] FIG. 13 is a schematic diagram showing a camera of an optical inspection device of an optical inspection system according to a fourth embodiment. [Figure 16] 16 is a schematic graph showing the color vector calculated from the image of the standard surface shown in Figure 15 and the color vector calculated from the image of the detected portion when the horizontal axis represents the pixel value IR of R light and the vertical axis represents the pixel value IB of B light. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] (First embodiment) An optical inspection system 2 according to this embodiment will be described with reference to FIGS.

[0009] 1 is a block diagram showing an example of the configuration of an optical inspection system 2 according to this embodiment. As shown in FIG. 1, the optical inspection system 2 includes an optical inspection device 4 and a display 6.

[0010] The optical inspection device 4 includes an optical device 12, an image sensor (imaging section) 14, a light source 16, a beam splitter 18, and a processing device 20.

[0011] As shown in FIG. 2, the optical device 12 includes an imaging optical system (imaging lens) 32 and a color filter (wavelength selection unit) .

[0012] The imaging optical system 32 is formed by combining one or more lenses. The imaging optical system 32 may be any lens that images light, such as a single lens, a compound lens, a gradient index lens, a diffractive lens, a light guide lens, or a reflective mirror. Here, light is a form of electromagnetic waves. Examples of electromagnetic waves include X-rays, ultraviolet rays, visible light, infrared rays, far infrared rays, millimeter waves, terahertz waves, and microwaves. In this embodiment, the light is visible light, and the wavelength is, for example, in the range of 400 nm to 760 nm.

[0013] The imaging optical system 32 forms an image of light rays from the test object. In this embodiment, the color filter 34 is disposed on a focal plane at a distance f from the imaging optical system 32, and is rotationally symmetrical with respect to the optical axis of the imaging optical system 32. The optical axis C of the imaging optical system 32 coincides with the optical axis (center axis) of the color filter 34. However, the color filter 34 does not necessarily have to be disposed on the focal plane, and may be disposed inside or outside the imaging optical system 32, or may be disposed anywhere, such as in front of, behind, or inside the imaging optical system 32. By disposing the color filter 34 on the focal plane of the imaging optical system 32 as in this embodiment, there is an effect that the relationship between color and direction can be constant over the entire surface of the captured image.

[0014] As shown in FIG. 3, in this embodiment, the color filter 34 has, in order from the center side toward the radially outward, a first wavelength selection filter (wavelength selection region) 42, a second wavelength selection filter (wavelength selection region) 44, and a light shielding portion 46. The first wavelength selection filter 42, the second wavelength selection filter 44, and the light shielding portion 46 are formed concentrically. However, the wavelength selection region is not limited to this, and may have any shape. In other words, the color filter 34 only needs to have at least two different wavelength selection regions. Here, the light shielding portion 46 is considered as a wavelength selection region that shields the wavelength range of visible light.

[0015] The first wavelength-selecting filter 42 is formed in a disk shape. The first wavelength-selecting filter 42 is provided on the optical axis C of the imaging optical system 32. The first wavelength-selecting filter 42 passes a light beam of a first wavelength from the test object S that has passed through the imaging optical system 32. The first wavelength is set to be within a first wavelength range. The first wavelength-selecting filter 42 has a property of blocking light beams in a range different from the first wavelength range, rather than transmitting them.

[0016] The second wavelength-selecting filter 44 is formed in an annular shape on the outer periphery of the first wavelength-selecting filter 42. The second wavelength-selecting filter 44 passes light rays of a second wavelength different from the first wavelength from the test object S that have passed through the imaging optical system 32. The radial width of the second wavelength-selecting filter 44 can be set appropriately. The second wavelength is within a second wavelength range. The second wavelength-selecting filter 44 has the property of blocking light rays of wavelengths different from the second wavelength range, rather than transmitting them.

[0017] Therefore, the wavelength selection filters 42, 44 of the color filter 34 have the property of transmitting light of a specific wavelength (or wavelength range; wavelength spectrum) and blocking light of a wavelength outside the specific wavelength range for each wavelength selection filter 42, 44. The first wavelength and the second wavelength are each included in an appropriate range, that is, the first wavelength range and the second wavelength range, respectively, but it is preferable that the wavelengths do not overlap. For this reason, in this embodiment, the first wavelength range and the second wavelength range are independent of each other.

[0018] The light shielding portion 46 is formed on the outer periphery of the second wavelength selection filter 44. The light shielding portion 46 is formed of, for example, a black plate, and holds the second wavelength selection filter 44. The light shielding portion 46 blocks light rays of all wavelengths in the visible light range that are incident on the imaging optical system 32. The radial width of the light shielding portion 46 can be set appropriately. In FIG. 3, an example in which the light shielding portion 46 is annular is shown, but any shape, such as a rectangular outer edge, may be used as long as the second wavelength selection filter 44 can be held.

[0019] The radius of the outer periphery of the first wavelength-selective filter 42 of the color filter 34 is r1, and the radius of the outer periphery of the second wavelength-selective filter 44 is r2. At this time, r2>r1. Here, the area within the radius r1 of the first wavelength-selective filter 42 is A1. The area between the outer periphery of the first wavelength-selective filter 42 and the outer periphery of the second wavelength-selective filter 44 is A2. The radius r1 of the first wavelength-selective filter 42 and the distance r2-r1 between the outer periphery of the first wavelength-selective filter 42 and the outer periphery of the second wavelength-selective filter 44 can be set appropriately. More specifically, the radius r1 of the first wavelength-selective filter 42 of the color filter 34 and the radius r2 of the second wavelength-selective filter 44 can be changed. Therefore, the shape and size of the areas A1 and A2 can be changed.

[0020] As an example, the radius r1 of the color filter 34 is about 1.5 mm, and the radius r2 is about 12 mm.

[0021] The image sensor 14 is disposed on the optical path of light that has passed through the imaging optical system 32 and the color filter 34. The image sensor 14 has a light receiving section (light receiving surface) 14a that serves as an imaging surface at a distance L (>f) from the imaging optical system 32. The optical device 12 and the image sensor 14 constitute a so-called camera (photographing section) 13.

[0022] The image sensor 14 may be, for example, an imaging element such as a CCD or a CMOS. The image sensor 14 includes a plurality of pixels. The image sensor 14 has a plurality of color channels for separating at least two mutually different wavelengths in each pixel. Typically, the image sensor 14 includes an R channel, a G channel, and a B channel in each pixel. Therefore, the image sensor 14 can obtain a color image and separate three mutually different wavelengths.

[0023] Each pixel of the image sensor 14 may distinguish one color, and different pixels may distinguish different colors. In this case, at least two pixels corresponding to different colors are considered to be a set of pixels, and the set of pixels is simply called a pixel.

[0024] The light source 16 is used to illuminate the surface of the test object S. For example, an LED may be used as the light source 16. A beam splitter 18 is disposed between the test object S and the imaging optical system 32. For example, a half mirror may be used as the beam splitter 18.

[0025] When the light from the light source 16 enters the beam splitter 18, it is reflected toward the test object S and illuminates the surface of the test object S. A part of the light from the surface of the test object S transmits through the beam splitter 18, passes through the imaging optical system 32 and the color filter 34, and is then entered into the image sensor 14.

[0026] In this embodiment, for the sake of simplicity, the color filter 34 is assumed to transmit light of a certain wavelength range among visible light for each of the wavelength selection filters 42 and 44, and to block wavelengths outside the certain wavelength range, i.e., to prevent the transmission of the light.

[0027] Here, the first wavelength is blue (B) light, and the second wavelength is red (R) light. In this embodiment, for the sake of convenience, the wavelength of red (R) light is set to 700 nm and the wavelength of blue (B) light is set to 435 nm, as determined by the International Commission on Illumination (CIE: Commission Internationale de I'Eclairage).

[0028] In this embodiment, the region A1 of the first wavelength selection filter 42 passes, for example, blue light (435 nm) and B light having a first wavelength (for example, 400 nm to 500 nm) in the vicinity of blue light among visible light, and blocks light of other wavelengths. In this embodiment, the region A2 of the second wavelength selection filter 44 passes, for example, red light (700 nm) and R light having a second wavelength (for example, 600 nm to 700 nm) in the vicinity of red light among visible light, and blocks light of other wavelengths. Note that, in this embodiment, it is preferable that the range of the first wavelength passed by the region A1 of the first wavelength selection filter 42 and the range of the second wavelength passed by the region A2 of the second wavelength selection filter 44 do not overlap. Therefore, the first wavelength selection region does not pass, and blocks, light of the second wavelength and its surrounding wavelengths. The second wavelength selection region does not pass, and blocks, light of the first wavelength and its surrounding wavelengths.

[0029] The wavelength of green (G) light according to the International Commission on Illumination is 546 nm, which is between the wavelengths of R and B light. For this reason, the wavelengths of R and B light are less likely to overlap than when the wavelengths of R and G light are used, or when the wavelengths of G and B light are used.

[0030] For example, a general-purpose computer is used as the processing device 20. The processing device 20 includes, for example, a processor 22, a storage unit 24, a read only memory (ROM) 26, and a random access memory (RAM) 28.

[0031] The processing unit 20 may be in wired or wireless communication with the image sensor 14. The processing unit 20 may be included in the camera 13, for example.

[0032] The processor 22 is connected to the image sensor 14 and the storage unit 24. The processor 22, the ROM 26, and the RAM 28 are connected to each other via a bus, for example. The storage unit 24, the ROM 26, and the RAM 28 can communicate with the processor 22 mutually.

[0033] The processing device 20 may be located outside the optical inspection device 4. In this case, the output of the image sensor 14 may be output to the outside of the optical inspection device 4 or recorded in a storage unit on the cloud. In other words, the calculation of information related to the test object S may be performed inside or outside the optical inspection device 4.

[0034] The processor 22 includes an integrated circuit such as a Central Processing Unit (CPU), a GPU, or an Application Specific Integrated Circuit (ASIC). The processor 22 may be provided as a program executed by a computer, not limited to a dedicated circuit. In this case, the program is recorded in a storage area, a storage unit, or the like in the integrated circuit.

[0035] The processor 22 may be in a server in a cloud service that transmits and receives data over a network.

[0036] The processor 22 has a function as an image processing unit for image data (RGB image data Irgb, R image data Ir, G image data Ig, and B image data Ib) captured by the image sensor 14. The processor 22 calculates information related to the test object S based on the output of the image sensor 14. Note that the image data acquired by the image sensor 14 is output from at least two or more pixels.

[0037] For example, various programs are stored in the storage unit 24. The processor 22 performs functions according to the programs by, for example, writing the various programs stored in the storage unit 24 to the RAM 28 and executing the programs. The various programs do not necessarily have to be stored in the storage unit 24, and the processor 22 can also execute the various programs on a server via a network.

[0038] The storage unit 24 is a non-volatile memory such as an HDD, SSD, or flash memory, but may further include a volatile memory. The storage unit 24 may be, for example, a cloud memory. The storage unit 24 stores, for example, an optical inspection program (algorithm) 24a according to this embodiment, and a plurality of different reference vector data 24b corresponding to the settings of the camera 13 (settings of the color filter 34 relative to the optical axis C). The optical inspection program 24a may be stored in the ROM 26.

[0039] The optical inspection program 24a may be pre-installed in the optical inspection device 4, or may be stored in a non-volatile storage medium or distributed via a network. The optical inspection program 24a may be located outside the optical inspection device 4, for example, on an appropriate server.

[0040] In this embodiment, the optical inspection program 24a causes the computer to calculate a color vector Cn (n indicates the dimension) based on the image data (pixel value) of each pixel acquired from all or a specified range of the light receiving section 14a of the image sensor 14, compare it with reference vector data 24b stored in the memory section 24, and calculate the surface condition of the test object S.

[0041] For example, the storage unit 24 stores the relationship between the optical axis C of the imaging optical system 32 and the color filter 34. The relationship between the optical axis C of the imaging optical system 32 and the color filter 34 includes, for example, the transmission wavelengths, blocking wavelengths, and arrangements of the first wavelength selection filter 42, the second wavelength selection filter 44, and the light blocking portion 46 of the color filter 34. Note that the optical inspection program 24a includes a program for acquiring information of the optical device 12 and / or the camera 13, and thus is capable of acquiring the relationship between the optical axis C of the imaging optical system 32 and the color filter 34.

[0042] For example, a display 6 is connected to the processor 22. The display 6 displays various information based on the processing of the processor 22. For example, the display 6 displays an image captured by the image sensor 14, and also displays a determination result of the surface condition of the test object S, which will be described later.

[0043] The surface condition of the test object S includes the planar condition of the entire surface of the test object S or the surface in a specified area, scratches or rough surfaces in the inspected area, the presence or absence of a detection part (abnormal part) S2 that is to be detected by the processing device 20 and whose surface condition is to be determined, surface roughness (roughness) / glossiness (see the second embodiment), and various other conditions.

[0044] Next, the operation of the optical inspection system 2 according to this embodiment will be described.

[0045] When inspecting the surface of the test object S, the processor 22 of the processing device 20 causes the camera 13 to capture an image of the surface of the test object S while illuminating the surface of the test object S with illumination light from the light source 16 .

[0046] The imaging optical system 32 images an object point into an image point. A first object point O1 is taken on a standard surface S1 on the surface of the test object S, and a second object point O2 is taken on a detection portion S2. Light incident on the first object point O1 is reflected as a first reflected light. Light incident on the second object point O2 is reflected as a second reflected light. Light from the first object point O1 is transferred to a first image point by the imaging optical system 32. Light from the second object point O2 is transferred to a second image point by the imaging optical system 32. It is assumed that the first image point and the second image point are on the image sensor 14.

[0047] Since the first object point O1 is on the specular standard surface S1, the light has a large specular component (regular reflection component). In other words, the light distribution from the first object point O1 tends to have a narrow angular distribution as shown in Figure 4. Since the second object point O2 is on a non-specular surface, such as a rough surface, the light has a large diffuse component. In other words, the light distribution from the second object point O2 tends to have a wide angular distribution as shown in Figure 6.

[0048] 2, for example, illumination light from a light source 16 is reflected by a beam splitter 18 and illuminates the surface of a test object S. On the surface of the test object S, a light ray (specular component) L11 specularly reflected at an object point O on the test object S and light rays L21 and L31 scattered at appropriate angles are refracted by an imaging optical system 32 and enter a color filter 34.

[0049] 3, the area A1 of the first wavelength selection filter 42 of the color filter 34 of the camera 13 according to this embodiment passes the B light from the test object S, but blocks the R light and G light. The B light passing through the area A1 on the optical axis C of the imaging optical system 32 is a specular reflected light component from the surface of the test object S. The area A2 of the second wavelength selection filter 44 passes the R light from the test object S, but blocks the G light and B light. The R light passing through the area A2 off the optical axis C of the imaging optical system 32 is a scattered light component from the surface of the test object S. Incidentally, the light incident on the area A3 of the light shielding portion 46 is shielded.

[0050] In the optical device 12 according to this embodiment, among the light rays emitted from an arbitrary object point O of the test object S, when the light rays are incident on the imaging optical system 32 and the color filter 34, blue (B) light whose principal ray is parallel to the optical axis C is separated as a blue light ray. That is, the optical device 12 according to this embodiment is a telecentric optical system having telecentricity for blue light rays. On the other hand, the optical device 12 according to this embodiment is a non-telecentric optical system not having telecentricity for red (R) light.

[0051] For this reason, it is mainly the specular reflection component that is incident on the image sensor 14 as B light and captured as B image data (first image data) Ib by the image sensor 14. Note that the specular reflection component is not limited to a component completely parallel to the optical axis C, and appropriate deviations are permitted. In this embodiment, the specular reflection component is in the range of 0≦θb shown in FIG. 2, where the direction along the optical axis C is set to 0. Note that the angle θb can be set appropriately. This angle θb depends on the distance between the imaging optical system 32 and the color filter 34, the radius r1 of the area A1 of the first wavelength selection filter 42 of the color filter 34, and the like.

[0052] The area A2 of the second wavelength selective filter 44 of the color filter 34 of the camera 13 passes the R light having a first scattering angle θr (θb≦θg<θs) with respect to the optical axis C, but blocks the B light of the specular reflected light component and another light having a second scattering angle θs (θs≦θ). Therefore, only the component of the first scattering angle θr is incident on the image sensor 14 as the R light and captured as the R image data (second image data) Ir by the image sensor 14. The angle θr depends on the distance between the imaging optical system 32 and the color filter 34, the size of the area A2 of the second wavelength selective filter 44 of the color filter 34, and the like.

[0053] The angle θs depends on the distance between the imaging optical system 32 and the color filter 34, the size of the area A3 of the light blocking portion 46 of the color filter 34, and the like.

[0054] Therefore, the RGB image data Irgb, R image data Ir, (G image data Ig), and B image data Ib captured by the image sensor 14 are colored according to the scattering angle (including specularly reflected light) from the surface of the test object S. Therefore, the color of the obtained RGB image data Irgb does not depend on the color of the surface of the test object S itself, but depends on the wavelengths selectively passed by the setting of the color filter 34. Therefore, by appropriately setting the color filter 34, the RGB image data Irgb acquired by the camera 13 according to this embodiment may be considered to have a different color from an image acquired by a normal camera that does not use the color filter 34, even if it is an image of the same surface of the test object S.

[0055] In this embodiment, R light and B light are incident on the light receiving section 14a of the image sensor 14, but G light is blocked by the color filter 34 and is not incident on the light receiving section 14a of the image sensor 14. Therefore, in each pixel of the light receiving section 14a, light is received at an appropriate pixel value (for example, 256 gradations from 0 to 255) in the R channel and the B channel, but no light is received in the G channel.

[0056] Here, a three-dimensional (orthogonal) coordinate system in which the pixel values ​​of R light, G light, and B light are output is defined as the color coordinate system (color space). In this embodiment, the color filter 34 is set so that no light is received in the G channel. Therefore, the output of G light can be ignored. For this reason, in this embodiment, a two-dimensional (orthogonal) coordinate system in which the pixel values ​​of R light and B light are output is defined as the color coordinate system.

[0057] 4 shows the positional relationship between the camera 13 (not shown) and the surface of the test object S. The surface of the test object S shown in Fig. 4 has a normal parallel to the optical axis C and is, for example, a mirror-like, scratch-free flat surface (hereinafter referred to as a standard surface S1).

[0058] Of the light incident on the image sensor 14 through the color filter 34 of the camera 13, the light beam from the standard surface S1 is the B light beam passing on the optical axis C (on the area A1) of the color filter 34. Therefore, the image sensor 14 obtains the specularly reflected light from the standard surface S1 as a blue image in the B image data Ib. The B image data Ib of the standard surface S1 of the test object S shown in FIG. 4 is obtained entirely as a blue image.

[0059] Light from the position corresponding to the standard surface S1 does not substantially enter the image sensor 14 as R light, or even if it does enter, its intensity is so small that the pixel value can be ignored. Therefore, in the R image data Ir, the image of the standard surface S1 appears black.

[0060] In this embodiment, among the light incident on the image sensor 14 through the color filter 34, the G light from the surface of the test object S does not enter, or even if it does, the intensity is so small that the pixel value can be ignored. Therefore, the G image data Ig is entirely black.

[0061] Therefore, the RGB image data Irgb obtained by the optical inspection device 4 according to this embodiment is colored according to the directional information of the light beam based on the color filter 34. The R image data Ir, G image data Ig, and B image data Ib obtained by separating this RGB image data Irgb into each color channel are each images based on the surface information (unevenness information) of the test object S. In this way, the optical inspection device 4 according to this embodiment acquires structural (unevenness) information of the test object S from the image captured by the image sensor 14.

[0062] 5, a two-dimensional color coordinate system is set in which the pixel value IR of R light is taken on the horizontal axis and the pixel value IB of B light is taken on the vertical axis. The processing device 20 causes the camera 13 to image the surface of the test object S, and the processing device 20 plots the pixel values ​​IR and IB of R light and B light acquired from all or a predetermined range of pixels of the light receiving section 14a of the image sensor 14 on the graph of the color coordinate system shown in FIG.

[0063] For example, in a graph of the color coordinate system, it is displayed as a vector as shown by reference symbol C2 in Fig. 5. In this embodiment, this is called a color vector Cn (n is the number of dimensions).

[0064] In this embodiment, each pixel of the light receiving section 14a of the image sensor 14 has three different color channels, for example, R (red), G (green), and B (blue). Due to the structure of the color filter 34, no G light is received by the light receiving section 14a of the image sensor 14. Therefore, the color vector Cn can be expressed as C2 in two dimensions of R light and B light.

[0065] The color vector C2 is a vector whose components are the pixel values ​​IR of the R channel and the pixel values ​​IB of the B channel. That is, the color vector C2 is expressed as follows: C2=(IR,IB) It can be expressed as:

[0066] The color vector C2=(IR, IB) corresponding to each object point O1, O2 is calculated by the processor 20.

[0067] In the image of the standard surface S1 of the test object S shown in Fig. 4, the B image data Ib is obtained as a blue image, but the R image data Ir is a black image. That is, the color vector C2 corresponding to the first object point O1 has a large blue intensity component (IB). Therefore, the color vector C2 shown in Fig. 5 extends from the origin along the vertical axis IB.

[0068] The pixel values ​​IR and IB of each pixel mainly depend on the intensity of the illumination light, the distance between the camera and the surface of the test object S, and the like. They also depend on the relationship between the color of the surface of the test object S and the color filter 34, and the like.

[0069] Fig. 6 shows the positional relationship between the camera 13 (illustration of the imaging optical system 32 is omitted) and the surface of the test object S. The surface of the test object S shown in Fig. 6 has a detection target portion (defect) S2 such as a foreign object or a scratch on a part of a standard surface S1. Here, the detection target portion S2 means a defect to be detected. In other words, the detection target portion S2 is a defect.

[0070] Of the light incident on the image sensor 14 through the color filter 34 of the camera 13, the light beam from the standard surface S1 is B light passing on the optical axis C (on the area A1) of the color filter 34. Therefore, the image sensor 14 obtains the specularly reflected light from the standard surface S1 as a blue image in the B image data Ib. Light from a position corresponding to the detection portion S2 is incident on the image sensor 14 as B light and R light. Therefore, in the B image data Ib, the image of the standard surface S1 of the test object S is blue, and the image of the detection portion S2 is blue and red.

[0071] Most of the detection part S2 is not parallel to the standard surface S1, for example. Alternatively, the size of the detection part S2 is close to or smaller than the wavelength of visible light, causing scattering due to the diffraction phenomenon of light. For example, it is known that a rough surface having irregularities close to the wavelength of light scatters the light. Of the light incident on the image sensor 14 through the color filter 34, most of the light from the detection part S2 is incident on the imaging optical system 32 as scattered light. Therefore, the light from the detection part S2 is incident on the image sensor 14 through the area A1 and the outer area A2 of the color filter 34. That is, of the light incident on the image sensor 14 through the color filter 34, some of the light from the detection part S2 is due to R light passing over the area A2 shifted from the optical axis C of the color filter 34. Therefore, the image sensor 14 obtains the scattered light from the detection part S2 as a red image in the R image data Ir. The light from the position corresponding to the standard surface S1 does not enter the image sensor 14 as R light. Therefore, in the R image data Ir, the image of the standard surface S1 is black and the image of the detection portion S2 is red. On the other hand, in the B image data Ib, the image of the standard surface S1 is blue and the image of the detection portion S2 is also blue.

[0072] Furthermore, in this embodiment, of the light that is incident on the image sensor 14 through the color filter 34, G light from the surface of the test object S is not incident. Therefore, the G image data Ig is entirely black.

[0073] Therefore, the RGB image data Irgb obtained by the optical inspection device 4 according to this embodiment is colored according to the directional information of the light beam based on the color filter 34. The R image data Ir, G image data Ig, and B image data Ib obtained by separating this RGB image data Irgb into each color channel are each images based on the surface information (unevenness information) of the test object S. In this way, the optical inspection device 4 according to this embodiment acquires structural (unevenness) information of the test object S from the image captured by the image sensor 14.

[0074] In Fig. 7, a two-dimensional color coordinate system is set in which the horizontal axis represents the pixel value IR of R light and the vertical axis represents the pixel value IB of B light, as in Fig. 5. The processing device 20 causes the camera 13 to image the surface of the test object S, and the processing device 20 plots the pixel values ​​IR and IB of R light and B light acquired from all or a predetermined range of pixels of the light receiving section 14a of the image sensor 14 on a color coordinate system graph shown in Fig. 7. For example, the color coordinate system graph is displayed as a vector, as shown by the symbol C2 in Fig. 7. The color vector C2 corresponding to the second object point O2 has both a blue intensity component (IB) and a red intensity component (IR).

[0075] Therefore, the direction of the color vector C2 shown in Fig. 5 and the direction of the color vector C2 shown in Fig. 7 change depending on the surface condition of the test object S. As a result, the direction of the color vector C2 differs greatly depending on whether or not there is a micro defect. In other words, the presence or absence of a micro defect at each object point can be identified based on the direction of the color vector C2.

[0076] For example, assume that the standard surface S1 of the test object S shown in Fig. 4 is the desired product state (surface state). Then, when the standard surface S1 of the test object S shown in Fig. 4 is imaged and the processing device 20 outputs a color vector C2 corresponding to the standard surface S1 of the test object S shown in Fig. 4, this color vector C2 is set as a reference vector. This reference vector is stored in the storage unit 24, for example, as one of the reference vector data 24b in correspondence with the structure of the color filter 34, i.e., the structure of the camera 13.

[0077] 6, the surface of the test object S including the standard surface S1 and the detection portion S2 is imaged, and when the processing device 20 outputs the color vector C2, the processing device 20 compares the directions of the color vector C2 with the reference vector stored in the storage unit 24. The processing device 20 can determine (output) whether the surface of the test object S is within or outside the range of the desired product state, based on whether the directions of the reference vector and the color vector C2 match or differ.

[0078] Note that the processing device 20 may set a threshold value (tolerance range) that allows deviation in the direction of the reference vector, rather than determining the direction of the reference vector shown in Fig. 5 to be one direction. The threshold value is stored together with the reference vector, for example, as a part of the reference vector data 24b in the storage unit 24. At this time, the processing device 20 refers to the threshold value together with the reference vector stored in the storage unit 24, and can determine (output) whether the surface of the test object S is within or outside the range of the desired product state, based on whether the direction of the color vector C2 relative to the reference vector is within or outside the range of the threshold value.

[0079] Such a series of processes for inspecting the surface condition of the test object S by the processing device 20 is executed according to a flowchart shown in FIG.

[0080] Reference vector data 24b including the threshold value is stored in advance, for example, in storage unit 24. Also, the relationship between color filter 34 and the wavelength of light received by image sensor 14, i.e., the structure of camera 13, is stored, for example, in storage unit 24. Note that camera 13 may hold its own structure data, and upon connection to processing device 20, may communicate with processor 22 of processing device 20 to cause processor 22 to recognize the structure of camera 13. In this case, it is not necessarily necessary to store the structure of camera 13 in storage unit 24. The threshold value can be appropriately changed by setting.

[0081] When inspecting the surface condition of the test object S, the processor 22 obtains the relationship between the color filter 34 and the wavelength of light received by the image sensor 14, and obtains an image by the image sensor 14 of the camera 13 (step ST1). At this time, the processor 22 causes the display 6 to display the image obtained by the image sensor 14 of the camera 13.

[0082] Assume that the surface of the test object S is in the state shown in Fig. 6. The surface of the test object S in the example shown in Fig. 6 is a standard surface S1 in which most of the light is reflected as specular light and enters the image sensor 14 through the color filter 34, but a detection portion S2 is formed in a part of the surface.

[0083] The processor 22 calculates a color vector for each pixel based on the output gradation (pixel value) of the color channel (here, two channels, R and B) of each pixel in the entire range or a predetermined range of the light receiving section 14a of the image sensor 14 (step ST2). The processing device 20 determines the maximum dimension of the color coordinate system according to the acquisition of the relationship between the color filter 34 and the color of the image obtained by the image sensor 14. In this embodiment, the colors that can be acquired by the image sensor 14 are three colors, R, G, and B, but the transmission wavelength of the color filter 34 is only two, R and B, so the color coordinate system is two-dimensional.

[0084] As described above, the imaging optical system 32 images an object point onto an image point. The processor 22 calculates a color vector C2 for each pixel (step ST3). That is, the processor 22 calculates the direction (angle or inclination) of the color vector C2.

[0085] The processor 22 compares the color vector C2 obtained and calculated from each pixel with the reference vector of the reference vector data 24b (step ST4). That is, the direction (angle or inclination) of the color vector is compared with the direction (angle or inclination) of the reference vector that is the same as or closest to the color vector C2 in the reference vector data 24b.

[0086] The processor 22 outputs the surface state of the test object S as an inspection and judgment result based on whether or not the reference vector is within the threshold value (step ST5). At this time, the processor 22 displays the judgment result on, for example, the display 6. As shown in FIG. 5, it is assumed that the direction of the color vector calculated from each pixel coincides with the reference vector shown in FIG. 5, for example, taking into account a threshold value. At this time, the processing device 20 displays, for example, on the display 6, as the judgment result, that the surface of the test object S is normal. As shown in FIG. 7, it is assumed that a part of the direction of the color vector calculated from each pixel deviates from the reference vector shown in FIG. 5, for example, taking into account a threshold value. At this time, the processing device 20 displays, for example, on the display 6, as the judgment result, that the detection target portion S2 exists. The processing device 20 may make the surroundings aware of the judgment result by sound. In addition, the inspection and judgment signal of the test object S in the processing device 20 may also be suitably used as an operation trigger signal of an apparatus that operates to separate the test object S having the detection target portion S2 from the line of the test object S that is determined not to have the detection target portion S2.

[0087] In this manner, the processing device 20 judges the surface condition of the specimen S (whether there is a defect or not).

[0088] The optical inspection program 24a may perform steps ST1-ST5 automatically, or may have a user check, for example, between steps ST1 and ST2. When a user checks in step ST1, the user can appropriately set an inspection range in the image. Then, in steps ST2-ST5, the surface condition of the test object S in the set inspection range can be determined. The setting of the inspection range may be maintained in a predetermined state.

[0089] In this embodiment, an example has been described in which the color vector C2 calculated by the processor 22 from the output of each pixel is compared with the reference vector of the reference vector data 24b in step ST4. However, for example, if the intensity of the illumination light or the reflection intensity from the object S is known in advance, defects can be detected by comparing the intensity of only the B light. Alternatively, for example, if the color filter 34 transmits only the B light, and the image sensor 14 receives the B light and does not receive the G and R lights as shown in FIG. 5, the output of the pixel value of the B channel of each pixel acquired by the image sensor 14 is obtained, but the output of the pixel value of the G and B channels is not obtained or is negligibly small compared to the output of the pixel value of the B channel. In this case, the direction of the color vector can be regarded as the same as the direction along one dimension. Therefore, if the direction of the color vector can be regarded as the same as the direction along one dimension, it is not necessarily necessary to compare the direction of the color vector with the direction of the reference vector. Therefore, the processing device 20 can determine the surface condition of the test object S based on the direction of the color vector in the color coordinate system, without necessarily comparing it with the direction of the reference vector.

[0090] In this embodiment, an example has been described in which a color vector C2 is calculated from each pixel, and each color vector C2 is compared with a reference vector. For example, the processor 22 may calculate an average of pixel values ​​to calculate one color vector C2 from one image. The processor 22 may then compare the color vector C2 calculated by calculating the average of pixel values ​​with the reference vector.

[0091] Incidentally, the light intensities of the R image data Ir, G image data Ig, and B image data Ib acquired by each pixel of the image sensor 14 of the optical inspection device 4 according to this embodiment change complementarily when the amount of reflected light from an object point on the test object S is considered to be constant. That is, among the reflected light from the test object S passing through the color filter 34, when the light intensity of the R light in a certain image becomes stronger, the light intensity of the B light (and the light intensity of the G light) in the pixel becomes weaker. Also, when the light intensity of the B light in another pixel becomes stronger, the light intensity of the R light (and the light intensity of the G light) in the image becomes weaker. This is because the color and the direction of the reflected light correspond to each other. For example, if the amount of R light increases, it means that the reflected light component in the corresponding direction is greater, and at the same time, it means that the reflected light component in the corresponding direction is smaller.

[0092] In contrast to this, in the R image data, G image data, and B image data of the test object S captured by a normal camera that does not pass through the color filter 34 described in this embodiment, the light intensity of the R light, the light intensity of the G image, and the light intensity of the B light at a certain pixel simply vary depending on the color of the test object, and do not have the above-mentioned complementary relationship. This is because there is no correspondence between the color and the direction of the reflected light.

[0093] Furthermore, even if a standard surface S1 without any scratches is imaged with a normal camera, the color vector described in this embodiment will not be calculated in a direction parallel to the axis representing B light unless the standard surface of the test object S reflects only blue light.

[0094] In contrast, the color vector C2 described in this embodiment is calculated in the direction of the vertical axis indicating B light when the surface condition is the standard surface S1, regardless of whether the surface of the test object S reflects only blue light or not. Therefore, the direction of the color vector C2 of the standard surface S1 according to this embodiment does not depend on the color of the test object S. Also, if the surface of the test object S reflects a color other than blue even slightly, that is, if red is reflected, as described above, a defect (detection target portion (defect) S2) can be detected using the direction of the color vector C2 without being influenced by the color of the detection object S.

[0095] Therefore, the optical inspection device 4 according to this embodiment can satisfactorily inspect the surface condition of the test object S regardless of the color of the test object S.

[0096] According to this embodiment, the optical inspection method for the surface of the test object S includes obtaining a color vector of a color corresponding to a wavelength in an n-dimensional (n is a natural number equal to or greater than 1) color coordinate system, the n-dimensional color coordinate system being equal to or less than the number of color channels of each pixel of the image sensor 14, by optical imaging using a color filter (wavelength selection unit) 34 that passes a plurality of different wavelengths from the surface of the test object S, and determining the surface condition of the test object S based on the direction of the color vector in the color coordinate system.

[0097] According to this embodiment, the method for optically inspecting the surface of the test object S preferably includes associating the direction of a color vector in a color coordinate system with a color. According to this embodiment, the directions of the light from the test object S are different for each of the multiple wavelengths that are different from one another.

[0098] According to this embodiment, in an optical inspection method for the surface of a test object S, determining the surface condition of the test object S preferably includes calculating, for each pixel, the directional closeness between a color vector and a reference vector that serves as the basis for determining the surface condition of the test object S.

[0099] According to this embodiment, the optical inspection program 24a for the surface of the test object S causes a computer to execute optical imaging using a color filter (wavelength selection unit) 34 that passes multiple different wavelengths from the surface of the test object S, thereby obtaining a color vector of a color corresponding to a wavelength in an n-dimensional (n is a natural number greater than or equal to 1) color coordinate system that is equal to or less than the number of multiple color channels of each pixel of the image sensor 14, and determining the surface condition of the test object S based on the direction of the color vector in the color coordinate system.

[0100] In this way, according to this embodiment, the surface condition of the test object S can be determined based on the direction of a color vector in a color coordinate system calculated by performing optical imaging using a color filter 34 that passes a plurality of different wavelengths from the surface of the test object S. The direction of the color vector at this time depends on the unevenness information, not on the color of the test object S. Therefore, the optical inspection method, optical inspection program 24a, processing device 20, and optical inspection device 4 according to this embodiment can each satisfactorily inspect the surface condition of the test object S.

[0101] Furthermore, according to this embodiment, a reference vector in a predetermined color coordinate system is set, a color vector in the predetermined color coordinate system is calculated from an image captured by the camera 13, and the direction of the calculated color vector is compared with the reference vector, thereby enabling inspection of the surface condition of the test object S.

[0102] In this embodiment, the color filter 34 is set to block G light from the surface of the test object S. By providing an area in the color filter 34 that transmits G light, each pixel of the light receiving section 14a of the image sensor 14 can receive G light. In this case, the color coordinate system is three-dimensional. At this time, the reference vector is also three-dimensional. In this embodiment, since the image sensor 14 capable of acquiring three colors of light, R light, G light, and B light, is used, the color coordinate system is three-dimensional at maximum. When the image sensor 14 uses, for example, a hyperspectral camera capable of acquiring N colors (N is a natural number equal to or greater than 4) by dispersing them, the color coordinate system is N-dimensional at maximum. That is, by setting an N-dimensional reference vector according to the color filter 34 of the camera 13, the processing device 20 can determine whether the surface of the test object S is within the range of the desired product state.

[0103] Generally, a color vector can be defined for N independent color channels. In other words, when the pixel values ​​of the N independent color channels are I1, I2, ..., IN, the N-dimensional color vector can be expressed as follows: CN=(I1,I2,…,IN) It can be expressed as:

[0104] The calculation time of the color vector C2 in the color coordinate system varies depending on the number of pixels in a predetermined range and, for example, the processing capacity of the processor 22 of the processing device 20. If the calculation time is long, the output of the inspection result of the surface condition of the test object S will be delayed. For this reason, even if a reference vector with up to N dimensions can be set as the color coordinate system, it may be n dimensions (2≦n≦N (n, N are natural numbers)) which is less than N dimensions.

[0105] In this way, according to the present embodiment, it is possible to provide an optical inspection method, an optical inspection program 24a, a processing device 20, and an optical inspection device 4 that are capable of satisfactorily inspecting the surface condition of the test object S.

[0106] In this embodiment, the color filter 34 has been described as a first wavelength-selective filter 42 on the imaging optical system 32 that passes blue (B) light and blocks red (R) light, and a second wavelength-selective filter 44 that passes red (R) light and blocks blue (B) light. The color filter 34 may be, for example, a first wavelength-selective filter 42 that passes red (R) light and blocks blue (B) light, and a second wavelength-selective filter 44 that passes blue (B) light and blocks red (R) light.

[0107] In the present embodiment, the color filter 34 is described as an example using the first wavelength selection filter 42 and the second wavelength selection filter 44. Instead of the first wavelength selection filter 42 and the second wavelength selection filter 44, the color filter 34 may be configured to transmit light of a wavelength that changes continuously, for example, from the inside to the outside. That is, the color filter 34 may be configured to transmit light of a certain wavelength in a circular shape of a predetermined radius from the inside to the outside with respect to a common central axis, but not to transmit light of a wavelength different from the certain wavelength at the position of the predetermined radius. For example, the color filter 34 may be configured to transmit blue (B) light at the center, to lengthen the wavelength that passes through the color filter 34 as it moves radially outward, and to transmit green (G) light at the outermost edge (inside the light shielding portion 46) of the color filter 34.

[0108] In the present embodiment, the image sensor 14 has been described as acquiring an RGB image, but it may be configured to acquire a color channel having a wavelength corresponding to the transmission wavelength of the color filter 34. In other words, the wavelength of light received by the light receiving unit 14a of the image sensor 14 is selected to be an appropriate wavelength other than R light, G light, and B light.

[0109] (Modification) The color filter 34 shown in FIG. 3 may, for example, shield the position indicated by reference symbol 42 on the optical axis C, define the position indicated by reference symbol 44 as a first wavelength selection region that transmits light of a first wavelength, such as red (R) light, and define the position indicated by reference symbol 46 as a second wavelength selection region that transmits light of a second wavelength, such as blue (B) light.

[0110] In this case, the image sensor 14 acquires an image of the surface of the test object S by the scattered light of the first wavelength at a first scattering angle that has passed through the first wavelength selection region and the scattered light of the second wavelength at a second scattering angle that has passed through the second wavelength selection region. In this case, the processing device 20 calculates a color vector based on the scattered light, not the specular reflected light component, based on the image acquired by the image sensor 14. The reference vector is set based on such a color filter 34.

[0111] Therefore, an image of the surface of the test object S can be obtained by acquiring a first wavelength of light of specular reflection or scattered light from the surface of the test object S and a second wavelength different from the first wavelength of light of scattered light from the surface of the test object S by optical imaging using the image sensor 14 with a color filter (wavelength selection unit) 34. Then, a color vector is calculated from pixel values ​​of the first wavelength and pixel values ​​of the second wavelength in at least a two-dimensional color coordinate system that is equal to or less than the number of multiple color channels of each pixel of the image sensor 14. The surface condition of the test object S can be inspected using such color vectors.

[0112] Second embodiment The second embodiment will be described with reference to Figures 9 to 11. This embodiment is a modified example of the first embodiment, and the same members as those described in the first embodiment or members having the same functions are denoted by the same reference numerals as much as possible, and detailed descriptions thereof will be omitted.

[0113] As the optical inspection system 2 according to this embodiment, the optical inspection system 2 described in the first embodiment can be used as it is.

[0114] 9 shows RGB image data of a paper PM with a matte surface and a paper PG with a glossy surface, which were placed side by side and captured with a normal camera (RGB camera). The paper PM with the matte surface and the paper PG with the glossy surface are both generally used as photo paper, etc.

[0115] FIG. 10 shows RGB image data obtained by photographing the papers PM and PG shown in FIG. 9 using the camera 13 of the optical inspection device 4 according to this embodiment.

[0116] For example, suppose that the surface of paper PM having a matte surface on the left side of FIG. 9 and the surface of paper PG having a glossy surface on the right side are both desired products of a certain manufacturer.

[0117] In FIG. 11, a color coordinate system is set in which the pixel value IR of R light is taken on the horizontal axis and the pixel value IB of B light is taken on the vertical axis. FIG. 11 shows a color vector C2M of an image of a surface of a paper PM having a desired matte surface and a color vector C2G of an image of a surface of a paper PG having a desired gloss surface, calculated by the processor 22 of the processing device 20. The processor 22 of the processing device 20 sets the color vector C2M of the image of a surface of a paper PM having a desired matte surface as a first reference vector, sets the color vector C2G of the image of a surface of a paper PG having a desired gloss surface as a second reference vector, and stores these as reference vector data 24b in, for example, the storage unit 24. That is, the reference vector data 24b of this embodiment stores two reference vectors.

[0118] The color vector C2G (second reference vector) of the image of the paper PG having a glossy surface of the test object S has a larger inclination (angle) than the color vector C2M (first reference vector) of the image of the paper PM having a matte surface. This is presumably because the paper surface of the test object S has a glossy surface, and therefore more regular reflection light components are incident on the image sensor 14 from the surface of the test object S than from a matte surface.

[0119] Such a series of processes for inspecting the surface state of the test object S by the processing device 20 is executed according to the flowchart shown in Fig. 8 using, for example, a program 24a stored in the storage unit 24. Furthermore, a threshold value (tolerance range) for the deviation in the direction of the first reference vector and a threshold value (tolerance range) for the deviation in the direction of the second reference vector are each set and stored, for example, in the storage unit 24. Here, it is assumed that the surface state of the test object S is a matte surface.

[0120] When inspecting the surface condition of the test object S, the processor 22 obtains the relationship between the color filter 34 and the wavelength of light received by the image sensor 14, and obtains an image by the image sensor 14 of the camera 13 (step ST1). At this time, the processor 22 causes the display 6 to display the image obtained by the image sensor 14 of the camera 13 (see, for example, the left diagram in FIG. 10).

[0121] The processor 22 calculates a color vector for each pixel based on the output gradations (pixel values) IR and IB of the color channels (here, two channels, R and B) of each pixel in the entire range or a predetermined range of the light receiving section 14a of the image sensor 14 (step ST2). As shown in Fig. 11, a collection M of countless points is shown in a line.

[0122] The processor 22 calculates an average color vector C2M based on the collection M of an infinite number of points (step ST3). That is, the processor 22 calculates the angle or inclination of the color vector C2M.

[0123] The processor 22 compares the calculated color vector C2M with the first and second reference vectors of the reference vector data 24b (step ST4). That is, the direction (angle or inclination) of the color vector is compared with the direction (angle or inclination) of a reference vector that is the same as or closest to the color vector C2M among multiple reference vector data.

[0124] Here, the surface state of the test object S is a matte surface. The color vector C2M coincides or substantially coincides with the direction of the first reference vector and is away from the direction of the second reference vector.

[0125] The processor 22 outputs the surface state of the test object S as an inspection judgment result based on whether or not the first reference vector is within the threshold value (step ST5). At this time, the processor 22 displays the judgment result on, for example, the display 6. For example, the display 6 displays the surface of the test object S being in a matte state, and the difference in angle with the first reference vector (including the threshold value).

[0126] It is assumed that the surface state of the specimen S to be subsequently inspected is a gross surface.

[0127] When inspecting the surface condition of the test object S, the processor 22 obtains the relationship between the color filter 34 and the wavelength of light received by the image sensor 14, and obtains an image by the image sensor 14 of the camera 13 (step ST1). At this time, the processor 22 causes the display 6 to display the image obtained by the image sensor 14 of the camera 13 (see, for example, the right side of FIG. 10).

[0128] The processor 22 calculates a color vector for each pixel based on the output gradations (pixel values) IR and IB of the color channels (here, two channels, R and B) of each pixel in the entire range or a predetermined range of the light receiving section 14a of the image sensor 14 (step ST2). As shown in FIG. 11, a collection G of countless points is shown as a mass.

[0129] The processor 22 calculates an average color vector C2G based on the collection G of an infinite number of points (step ST3). That is, the processor 22 calculates the angle or inclination of the color vector C2G.

[0130] The processor 22 compares the calculated color vector C2G with the first and second reference vectors of the reference vector data 24b (step ST4). That is, the direction (angle or inclination) of the color vector is compared with the direction (angle or inclination) of a reference vector that is the same as or closest to the color vector C2G among multiple reference vector data.

[0131] Here, the surface state of the test object S is a glossy surface. The color vector C2G coincides or substantially coincides with the direction of the second reference vector and is away from the direction of the first reference vector.

[0132] The processor 22 outputs the surface state of the test object S as an inspection judgment result based on whether or not the second reference vector is within the threshold value (step ST5). At this time, the processor 22 displays the judgment result on, for example, the display 6. For example, the display 6 displays the surface of the test object S in a gross state and the difference in angle with the second reference vector (including the threshold value).

[0133] Although not shown, it is assumed that the direction of the color vector of the image of the surface of the test object S deviates from the first and second reference vectors in consideration of the respective threshold values. In this case, the processing device 20 displays, for example, on the display 6, a determination result that the surface of the test object S does not have the desired surface state.

[0134] The inspection judgment signal of the test object S in the processing device 20 can be used, for example, as an operation trigger signal to operate a device that separates the test object S into, for example, three lines, such as paper having a matte surface, paper having a glossy surface, and other types of paper (paper whose surface is determined not to be in the desired surface state).

[0135] In this embodiment, an example has been described in which color vectors calculated from images of two paper surfaces, a matte surface and a glossy surface, as shown in Fig. 9, are used as reference vectors. Color vectors calculated from images of multiple paper surfaces may be stored in the storage unit 24 as reference vectors. In this case, the processing device 20 can output (determine) the surface roughness as the surface condition of the surface of the test object S by comparing the color vector calculated from the image of the test object S captured by the camera 13 with, for example, reference vector data 24b stored in the storage unit 24.

[0136] Therefore, the processing device 20 of this embodiment can appropriately set multiple reference vectors and compare them with a color vector calculated from the image of the test object S, thereby not only determining the presence or absence of the detection part S2 (see Figure 6) described in the first embodiment, but also inspecting, for example, surface roughness.

[0137] According to the present embodiment, it is possible to provide an optical inspection method, an optical inspection program 24a, a processing device 20, and an optical inspection device 4 that are capable of satisfactorily inspecting the surface condition of the test object S.

[0138] In addition, there are various matte and glossy states of the surface of the test object S. By comparing the direction of the color vector Cn according to this embodiment with the closest reference vector among the reference vector data, the surface state can be determined in a stepped or stepless manner.

[0139] (Modification) For example, the color vector obtained from the image of the standard surface S1 shown in Fig. 4 is taken as the first reference vector. Although not shown, a color vector along the horizontal axis IR of the color coordinate system is assumed and taken as the second reference vector. These first and second reference vectors are each stored, for example, in the storage unit 24. As an example, the first reference vector is a color vector corresponding to the direction of specular reflection from the surface of the test object S, and the second reference vector is a color vector corresponding to a scattering direction different from the specular reflection direction.

[0140] Then, when a color vector is calculated from an image of the surface of a certain test object S, the processing device 20 may determine the condition and type of the surface based on whether the direction of the color vector is closer to the first reference vector or to the second reference vector.

[0141] In this way, the reference vector can be set appropriately depending on the object S to be measured.

[0142] In addition, when using the color filter described in the modified example of the first embodiment, as an example, the first reference vector is a color vector corresponding to a first scattering direction from the surface of the subject S, and the second reference vector is a color vector corresponding to a second scattering direction different from the first scattering direction.

[0143] Third embodiment The third embodiment will be described with reference to Figures 12 to 14. This embodiment is a modification of the first and second embodiments, and the same members or members having the same functions as those described in the first and second embodiments are denoted by the same reference numerals as much as possible, and detailed descriptions thereof will be omitted.

[0144] 12, the optical device 12 has an imaging optical system 32 and a color filter 134. The color filter 134 is disposed on a focal plane at a distance f from the imaging optical system 32. However, the color filter 134 may be disposed in front of or behind the imaging optical system 32. By disposing the color filter 134 on the focal plane of the imaging optical system 32, it is possible to obtain an effect of making the relationship between color and direction constant over the entire captured image.

[0145] Here, an example has been described in which the color filter 34 of the optical device 12 of the optical inspection device 4 according to the first and second embodiments is rotationally symmetric with respect to the optical axis C, that is, isotropic with respect to the optical axis C. However, rotationally symmetric means that when the shape is rotated around the axis, it matches the original shape when the rotation angle is less than 360 degrees. In this embodiment, an example will be described in which the color filter 134 is anisotropic.

[0146] The color filter 134 is formed, for example, in a rectangular shape with a longitudinal direction in one direction perpendicular to the optical axis C (a direction parallel to a second axis Ay described later). In this embodiment, the color filter 134 selectively passes a first wavelength and a second wavelength different from the first wavelength. The color filter 134 has a first wavelength selection filter (wavelength selection region) 142 and a second wavelength selection filter (wavelength selection region) 144. The first wavelength selection filter 142 and the second wavelength selection filter 144 of the color filter 134 are surrounded by a light shielding portion 146. The light shielding portion 146 is formed, for example, of a black plate, and holds the first wavelength selection filter 142 and the second wavelength selection filter 144.

[0147] Here, in this embodiment, the first axis Ax is taken so as to be perpendicular to the optical axis C of the imaging optical system 32. In this embodiment, the first wavelength selection filter 142 and the second wavelength selection filter 144 are divided into regions along the axial direction of the first axis Ax. That is, when the first wavelength selection filter 142 is translated along the axial direction of the first axis Ax, the end of the first wavelength selection filter 142 can be overlapped with the end of the second wavelength selection filter 144. This is referred to as the first wavelength selection filter 142 and the second wavelength selection filter 144 being disposed with a shift from the first axis Ax. In this embodiment, the second axis Ay is taken in a direction perpendicular to both the first axis Ax and the optical axis C. In this embodiment, the axial direction of the second axis Ay is along the longitudinal direction of the color filter 134.

[0148] The first wavelength-selecting filter 142 and the second wavelength-selecting filter 144 are each formed along the longitudinal direction of the color filter 134. The first wavelength-selecting filter 142 is disposed on the optical axis C. The first wavelength-selecting filter 142 is adjacent to the second wavelength-selecting filter 144. The first wavelength-selecting filter 142 and the second wavelength-selecting filter 144 of the color filter 134 are formed in translational symmetry with respect to an axis parallel to the second axis Ay.

[0149] The first wavelength selection filter 142 passes a light beam having a first wavelength (a first light beam). For example, the first wavelength is blue light (435 nm) and B light having a first wavelength (400 nm to 500 nm) nearby the blue light. The second wavelength selection filter 144 passes a light beam having a second wavelength (a second light beam). The second wavelength is red light (700 nm) and R light having a second wavelength (600 nm to 700 nm) nearby the red light. The first wavelength selection filter 142 blocks a light beam having a wavelength (including the second wavelength) different from the first wavelength. The second wavelength selection filter 144 blocks a light beam having a wavelength (including the first wavelength) different from the second wavelength.

[0150] The image sensor 14 may be an area sensor or a line sensor. Also, the image sensor 14 may have three color channels of R, G, and B for each pixel. Here, as shown in Fig. 12, the image sensor 14 is an area sensor, and each pixel has two color channels of red and blue. In other words, the image sensor 14 can receive B light and R light in independent color channels.

[0151] A plane where the first axis Ax and the optical axis C extend is defined as a first plane (virtual plane), and a plane where the second axis Ay and the optical axis C extend is defined as a second plane (virtual plane). Fig. 13 shows a cross-sectional view of the optical inspection device 4 taken along the first plane. Fig. 14 shows a cross-sectional view of the optical inspection device 4 taken along the second plane.

[0152] 12 and 13, among the light rays from the test object S, the light rays that are parallel to the optical axis C and lie within the first plane are defined as a first light ray group L1. Two light rays, a first light ray L1a and a first light ray L1b, are considered to represent the first light ray group L1. Among the light rays from the object side, the light rays that are in a direction inclined with respect to the optical axis C and lie within the first plane are defined as a second light ray group L2. Two light rays, a second light ray L2a and a second light ray L2b, are considered to represent the second light ray group L2.

[0153] As shown in Figures 12 and 14, among the rays from the object side, the rays that are parallel to the optical axis C and lie within the second plane are defined as the third light ray group. Consider the third light ray L3 as a representative of the third light ray group. Among the rays from the object side, the rays that are in a direction tilted with respect to the optical axis C and lie within the second plane are defined as the fourth light ray group. Consider the fourth light ray L4 as a representative of the fourth light ray group.

[0154] As shown in FIG. 12 and FIG. 13, the plane parallel to the first surface intersects the first wavelength selection filter 142 and the second wavelength selection filter 144 of the color filter 134 at the same time. That is, the plane parallel to the first surface intersects at least two different wavelength selection filters 142, 144 of the color filter 134. As shown in FIG. 12 and FIG. 14, the plane parallel to the second surface intersects one wavelength selection filter 142 of the color filter 134. That is, the color filter 134 is anisotropic and has anisotropy because the number of intersections with the wavelength selection filters 142, 144 of the color filter 134 differs between the first surface and the second surface. In other words, the color filter 134 is anisotropic because the distribution of the wavelength selection filters 142, 144 differs depending on the direction of the first axis Ax and the second axis Ay.

[0155] In an optical system in which light rays from an object point O of a test object S are imaged to an image point by the imaging optical system 32, an optical system in which the chief ray is parallel to the optical axis C on the object side is generally called an object-side telecentric optical system. In this embodiment, when light rays that are substantially parallel to the optical axis C on the object side are imaged by the imaging optical system 32, the light rays have object-side telecentricity. On the other hand, when light rays that are not substantially parallel to the optical axis C on the object side and are inclined are imaged by the imaging optical system 32, the light rays have object-side non-telecentricity.

[0156] The rays L1a and L1b of the first group of rays from the object side are parallel to the optical axis C. The rays L1a and L1b reach the focus of the focal plane of the imaging optical system 32. Therefore, the first rays L1a and L1b reach the first wavelength-selective filter 142 of the color filter 134 placed on the focal plane. That is, the first rays L1a and L1b having telecentricity in the first plane reach the first wavelength-selective filter 142.

[0157] The rays L2a and L2b of the second group of rays from the object side are inclined with respect to the optical axis C in the first plane. The rays L2a and L2b of the second group of rays are out of focus on the focal plane of the imaging optical system 32 and reach, for example, the second wavelength-selecting filter 144. That is, the second rays L2a and L2b reach the second wavelength-selecting filter 144. That is, the rays L2a and L2b having non-telecentricity in the first plane reach the second wavelength-selecting filter 144.

[0158] A part of the object-side light beam that is inclined with respect to the optical axis C within the first plane reaches the second wavelength-selecting filter 144 as well as the light beam blocking portion 146 .

[0159] The light ray L3 of the third light ray group from the object side is parallel to the optical axis C in the second plane. The light ray L3 of the third light ray group reaches the focus of the focal plane of the imaging optical system 32. Therefore, the third light ray L3 reaches the first wavelength-selective filter 142 of the color filter 134 placed on the focal plane. That is, the light ray L3 having telecentricity in the second plane reaches the first wavelength-selective filter 142.

[0160] The ray L4 of the fourth group of rays from the object side is inclined with respect to the optical axis C in the second plane. The ray L4 of the fourth group of rays reaches the first wavelength-selecting filter 142, which is out of focus on the focal plane of the imaging optical system 32. That is, the fourth ray L4 reaches the first wavelength-selecting filter 142. That is, a ray having non-telecentricity in the second plane reaches the first wavelength-selecting filter 142.

[0161] It should be noted that the object-side light ray that is inclined with respect to the optical axis C within the second plane does not reach the light ray blocking portion 146 .

[0162] In this way, in the first plane, the telecentric light beams L1a and L1b and the non-telecentric light beams L2a and L2b reach different wavelength selection regions, whereas in the second plane, the telecentric light beam L3 and the non-telecentric light beam L4 reach the same wavelength selection filter 142.

[0163] Consider the path of any light ray that reaches the imaging optical system 32 from the object side in any direction, projected onto the first surface (see FIGS. 12 and 13) and onto the second surface (see FIGS. 12 and 14). The above-mentioned properties are similarly established for each of these projected light rays. That is, light rays projected onto the first surface that have telecentricity and light rays that have non-telecentricity reach different wavelength selection regions of the color filter 134. On the other hand, light rays projected onto the second surface that have telecentricity and light rays that have non-telecentricity both reach the same wavelength selection filter 142.

[0164] When capturing an image of B light (light beam of a first wavelength) of an object with the image sensor 14 of the optical inspection device 4 of this embodiment, that is, when obtaining B image data Ib, the first wavelength selection filter 142 of the color filter 134 emits the B light toward the image sensor 14. At this time, the first wavelength selection filter 142 of the color filter 134 blocks the R light (light beam of a second wavelength). The B light is telecentric in the axial direction of the first axis Ax. Therefore, the optical inspection device 4 can obtain the B image data Ib having telecentricity with the image sensor 14.

[0165] When capturing an image of an object with the image sensor 14 of the optical inspection device 4 using R light (a light beam of a second wavelength), that is, when obtaining R image data Ir, the second wavelength selection filter 144 of the color filter 134 emits the R light toward the image sensor 14. At this time, the second wavelength selection filter 144 of the color filter 134 blocks the B light (a light beam of a first wavelength). The R light is non-telecentric in both the axial direction of the first axis Ax and the axial direction of the second axis Ay. This can also be said to have entcentricity. In other words, the optical inspection device 4 can acquire an entcentric image of the R light with the image sensor 14. This allows the optical inspection device 4 to acquire an image with a large angle of view.

[0166] In this way, the image sensor 14 of the optical inspection device 4 of this embodiment simultaneously acquires images of B light (e.g., corresponding to specularly reflected light) and R light (e.g., corresponding to scattered light) along the direction of the first axis Ax.

[0167] In this way, the color filter 134 provided on the focal plane of the imaging optical system 32 between the imaging optical system 32 and the image sensor 14 emits a light beam of a first wavelength (e.g., B light) and a light beam of a second wavelength (e.g., R light) different from the first wavelength toward the image sensor 14 according to the direction of the light beam from the test object S. Then, the color filter 134 causes the image sensor 14 to acquire first image information related to the first wavelength and second image information related to the light beam of the second wavelength. At this time, the image sensor 14 simultaneously acquires images of the light beams of the first wavelength and the second wavelength that have passed through the color filter 134.

[0168] The light intensity of the R image data Ir and the B image data Ib acquired by each pixel of the image sensor 14 of the optical inspection device 4 according to this embodiment changes complementarily when the amount of reflected light from an object point on the test object S is considered to be constant. That is, when the light intensity of the R light in a certain image of the light reflected from the test object S passing through the color filter 134 at a certain pixel becomes stronger, the light intensity of the B light at that pixel becomes weaker. Also, when the light intensity of the B light at another pixel becomes stronger, the light intensity of the R light at that image becomes weaker. This is because the color and the direction of the light beam are associated with each other. That is, if the intensity of the reflected light (e.g., R light) is constant, when the reflected light component is concentrated in a certain direction, the remaining directional components corresponding to the B light and G light become smaller.

[0169] For example, assume that the surface of the test object S is the standard surface S1 shown in Fig. 4. At this time, among the light incident on the image sensor 14 through the color filter 134 of the camera 13, the light beam from the standard surface S1 is the B light beam passing on the optical axis C (on the area A1) of the color filter 134. Therefore, the image sensor 14 obtains the specularly reflected light from the standard surface S1 as a blue image in the B image data Ib. The B image data Ib of the standard surface S1 of the test object S shown in Fig. 4 is obtained as an all-blue image.

[0170] With respect to light from a position corresponding to the standard surface S1, no R light is incident on the image sensor 14, or even if it is incident, the pixel value is so small that it can be ignored. Therefore, in the R image data Ir, the image of the standard surface S1 is black.

[0171] In this embodiment, among the light incident on the image sensor 14 through the color filter 134, the G light from the surface of the test object S does not enter, or even if it does, the pixel value is so small that it can be ignored. Therefore, the G image data Ig is entirely black.

[0172] Therefore, the RGB image data Irgb obtained by the optical inspection device 4 according to this embodiment is colored according to the directional information of the light beam based on the color filter 34. The R image data Ir, G image data Ig, and B image data Ib obtained by separating this RGB image data Irgb into each color channel are each images based on the surface information (unevenness information) of the test object S. In this way, the optical inspection device 4 according to this embodiment acquires structural (unevenness) information of the test object S from the image captured by the image sensor 14.

[0173] When the surface of the test object S is the standard surface S1 shown in FIG. 4, a graph of the color coordinate system as shown in FIG. 5 is obtained.

[0174] For example, it is assumed that the surface of the test object S has a detection portion S2 on a standard surface S1 shown in FIG.

[0175] Of the light incident on the image sensor 14 through the color filter 134 of the camera 13, the light beam from the standard surface S1 is the B light beam passing along the optical axis C (on the area A1) of the color filter 34. Therefore, the image sensor 14 obtains the specularly reflected light from the standard surface S1 as a blue image in the B image data Ib.

[0176] In this embodiment, light from a position corresponding to the detection portion S2 does not enter image sensor 14 as B light on the first surface (see FIG. 13). On the other hand, light from a position corresponding to detection portion S2 enters image sensor 14 as B light on the second surface (see FIG. 14).

[0177] Furthermore, light from a position corresponding to the detection portion S2 is incident on the image sensor 14 as R light on the first surface (see FIG. 13). Although not shown, the R light from the position corresponding to the detection portion S2 is transmitted through the second wavelength selection filter 144 parallel to the second surface (see FIG. 14), and is incident on the image sensor 14 as R light.

[0178] Therefore, when the surface of the test object S has a detection portion S2 on the standard surface S1 shown in FIG. 6, a graph of the color coordinate system as shown in FIG. 7 is obtained.

[0179] 5 and 7 change depending on the surface condition of the test object S. Therefore, the surface condition of the surface of the test object S can be inspected by performing the processing described in the first embodiment with the processing device 20 shown in FIG. 1 using the camera 13 (see FIGS. 12 to 14) of the optical inspection device 4 according to this embodiment.

[0180] Also, assume that the surface of the test object S is in the state shown in Fig. 9 and Fig. 10 of the second embodiment. In this case, too, the surface state of the surface of the test object S can be determined by using the camera 13 (see Figs. 12 to 14) of the optical inspection device 4 according to this embodiment and setting the reference vector data 24b as described in the second embodiment.

[0181] According to the present embodiment, it is possible to provide an optical inspection method, an optical inspection program 24a, a processing device 20, and an optical inspection device 4 that are capable of satisfactorily inspecting the surface condition of the test object S.

[0182] (Fourth embodiment) The fourth embodiment will be described with reference to Figures 15 and 16. This embodiment is a modified example of the first to third embodiments, and the same members or members having the same functions as those described in the first to third embodiments are denoted by the same reference numerals as much as possible, and detailed descriptions thereof will be omitted.

[0183] 15, the optical device 12 includes a color filter (wavelength selection unit) 234 and an imaging optical system (imaging lens) 32. In this embodiment, the imaging optical system 32 is disposed between the color filter 234 and the image sensor 14. The image sensor 14 has a light receiving unit (light receiving surface) 14a that serves as an imaging surface at a distance L from the imaging optical system 32. The optical device 12 and the image sensor 14 constitute a so-called camera (photographing unit) 13.

[0184] The color filter 234 has, in a cross section, a first wavelength selection region 242, a second wavelength selection region 244, and a third wavelength selection region 246. The first wavelength selection region 242 and the second wavelength selection region 244 transmit light in different wavelength ranges. The third wavelength selection region 246 can transmit, for example, light of the same wavelength as the second wavelength selection region 244.

[0185] Instead of the color filter 234, the color filter 34 described in the first embodiment may be used, or the color filter 134 described in the third embodiment may be used.

[0186] The light source 16 according to this embodiment can irradiate the test object S with directional illumination light. The illumination light from the light source 16 is irradiated at an angle relative to the surface of the test object S.

[0187] The operation of the optical inspection system 2 according to this embodiment will be described.

[0188] In Fig. 15, the surface of the test object S is basically a mirror surface (standard surface) S1. A detection portion S2 is a minute defect having a diffusive surface on the surface. In this case, a first object point O1 is taken on the mirror-like surface of the test object S, and a second object point O2 is taken on the detection portion S2.

[0189] The illumination light incident on the first object point O1 from the light source 16 is reflected at the first object point O1 as a first reflected light L1. The angle of incidence of the illumination light incident on the first object point O1 and the angle of reflection of the light reflected at the first object point O1 coincide with each other with respect to the optical axis of the imaging optical system 32.

[0190] Since the first object point O1 is on the mirror surface, the light has a large specular component (regular reflection component). Here, since the illumination light from the light source 16 has directionality, the direction of the specular component is determined according to that direction. In other words, the light distribution of the first reflected light tends to be a narrow angle distribution, as shown by the symbol L1 in FIG. 15.

[0191] The light incident on the second object point O2 is reflected as second reflected light L21, L22. Because the second object point O2 is on a rough surface, for example, the second reflected light includes a diffuse component L22. However, the illumination light from the light source 16 has directionality. Therefore, the second reflected light also includes a specular component L21. That is, the light distribution of the light includes not only the specular component L21 but also the diffuse component L22, as shown by the reference characters L21 and L22 in FIG. 15. That is, the light distribution component of the second reflected light tends to have a wide angular distribution.

[0192] At the second object point O2 having a minute defect, the second reflected light has a diffuse component L22 and a specular component L21. The light passes through the color filter 234 and further passes through the imaging optical system 32. At this time, in the color filter 234, the light selectively passes through the first wavelength selection region 242 and the second wavelength selection region 244. The light passing through the first wavelength selection region 242 becomes blue (B) light having a wavelength range of 400 nm to 500 nm, for example. The light passing through the second wavelength selection region 244 becomes red (R) light having a wavelength range of 600 nm to 700 nm, for example. That is, the second reflected light passes through at least two or more different wavelength selection regions 242, 244. Then, the second reflected light is imaged on the image sensor 14 by the imaging optical system 32. The second reflected light from the second object point O2 is imaged on the image sensor 14 through the third wavelength selection region 246 depending on the reflection direction.

[0193] At the first object point O1 that has no micro-defects, the first reflected light is almost entirely the specular component L1. Therefore, the first reflected light passes through the second wavelength selection region 244 of the color filter 234. The light of the specular component L1 that passes through the second wavelength selection region 244 becomes, for example, red (R) light in the wavelength range of 600 nm to 700 nm.

[0194] A color vector C2=(IR,IB) corresponding to each object point O1, O2 is calculated by the processing unit 20. The color vector C21 corresponding to the first object point O1 has a red intensity component (IR). The color vector C22 corresponding to the second object point O2 has a blue intensity component (IB) and a red intensity component (IR).

[0195] As a result, the direction of the color vector C21 at the first object point O1, which has no micro defect, differs from the direction of the color vector C22 at the second object point O2, which has a micro defect. In other words, the presence or absence of a micro defect can be identified based on the directions of the color vectors C21 and C22.

[0196] As described above, the color vector C21 based on the first reflected light from the first object point O1 is used as the reference vector, and the color vector C2 at each pixel based on the second reflected light from the second object point O2 is compared with the reference vector, thereby making it possible to determine the surface condition of the test object S. Then, the presence / absence of a micro defect is identified based on the optical inspection program 24a and reference vector data 24b described in the first embodiment, and is output according to the flowchart shown in Fig. 8.

[0197] In this embodiment, an example has been described in which the illumination light from the light source 16 is obliquely incident on the test object S. In this way, the illumination light from the light source 16 is not limited to coaxial epi-illumination, and illumination light from various directions can be used. Even with such illumination light, the surface condition of the test object S can be determined by comparing the calculation result of the color vector Cn calculated by the processing device 20 with the reference vector.

[0198] Therefore, according to the present embodiment, it is possible to provide an optical inspection method, an optical inspection program 24a, a processing device 20, and an optical inspection device 4 that are capable of inspecting the surface condition of the test object S satisfactorily.

[0199] The color filter 234 may be located between the object S and the imaging optical system 32, or between the imaging optical system 32 and the image sensor 14. When the imaging optical system 32 is composed of, for example, a plurality of lenses, the color filter 234 may be disposed between the plurality of lenses.

[0200] According to at least one of the embodiments described above, it is possible to provide an optical inspection method, an optical inspection program 24a, a processing device 20, and an optical inspection device 4 that are capable of inspecting the surface condition of the test object S satisfactorily.

[0201] Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included in the scope and spirit of the invention, and are included in the scope of the invention and its equivalents described in the claims. [Explanation of symbols]

[0202] 2...optical inspection system, 4...optical inspection device, 6...display, 12...optical device, 13...camera, 14...image sensor, 14a...light receiving unit, 16...light source, 18...beam splitter, 20...processing device, 22...processor, 24...storage unit, 24a...optical inspection program, 24b...reference vector data, 26...ROM, 28...RAM, 32...imaging optical system, 34...color filter, 42...first wavelength selection filter, 44...second wavelength selection filter, 46...light shielding unit

Claims

1. By optical imaging using a wavelength selection unit that selectively passes a plurality of wavelengths different from each other from the surface of the test object, a color vector of a color corresponding to the wavelength is obtained in an n-dimensional (n is a natural number equal to or greater than 1) color coordinate system, the n-dimensional color coordinate system being equal to or smaller than the number of the plurality of color channels of each pixel of the image sensor; determining a surface condition of the test object based on a direction of the color vector in the color coordinate system; A method for optically inspecting a surface condition of a test object, comprising:

2. Correlating a direction of the color vector in the color coordinate system with the plurality of wavelengths. The optical inspection method according to claim 1 .

3. The plurality of different wavelengths each have a different light direction from the test object. The optical inspection method according to claim 1 or 2.

4. 4. The optical inspection method according to claim 1, wherein discriminating the surface condition of the test object includes setting a reference vector that serves as a basis for discriminating the surface condition of the test object, and discriminating based on a difference in direction between the reference vector and the color vector.

5. determining the surface condition of the test object includes calculating a directional proximity between a reference vector serving as a reference for determining the surface condition of the test object and the color vector; The optical inspection method according to any one of claims 1 to 3.

6. A color vector corresponding to a specular reflection direction or a first scattering direction from the surface of the test object is defined as a first reference vector, and a color vector corresponding to a second scattering direction different from the specular reflection direction or the first scattering direction is defined as a second reference vector, determining the surface condition of the test object includes determining a type of the surface based on whether a direction of the color vector is close to the first reference vector or close to the second reference vector; The optical inspection method according to any one of claims 1 to 3.

7. By optical imaging using a wavelength selection unit that selectively passes a plurality of wavelengths different from each other from the surface of the test object, a color vector of a color corresponding to the wavelengths is acquired in an n-dimensional (n is a natural number equal to or greater than 1) color coordinate system, the n-dimensional color coordinate system being equal to or smaller than the number of a plurality of color channels of each pixel of the image sensor; determining a surface condition of the test object based on a direction of the color vector in the color coordinate system; The optical inspection program for inspecting the surface condition of an object to be inspected causes a computer to execute the above steps.

8. By optical imaging using a wavelength selection unit that selectively passes a plurality of different wavelengths from the surface of the test object, a color vector of a color corresponding to the wavelength is obtained in an n-dimensional (n is a natural number equal to or greater than 1) color coordinate system, the n-dimensional color coordinate system being equal to or smaller than the number of the plurality of color channels of each pixel of the image sensor; A surface condition of the test object is determined based on a direction of the color vector in the color coordinate system. A processing device including a processor for use in optical inspection of a surface condition of a test object.

9. a wavelength selection unit provided at a focal position of the imaging optical system and selectively passing a plurality of wavelengths different from each other from the surface of the test object; an image sensor that captures an image of light passing through the wavelength selection unit; An imaging unit having the processing device according to claim 8 , further comprising: a processing unit for processing the color vector based on the image acquired by the image sensor; and a processing unit for processing the color vector based on the direction of the color vector, the processing unit determining a surface condition of the test object. An optical inspection apparatus comprising:

Images