Semiconductor device

Abstract

To provide a new input / output panel having excellent convenience and reliability.SOLUTION: The present invention relates to an input-output panel having a gate wire, a first electrode, a second electrode, a current detection circuit, and a pixel. The first electrode is electrically connected to the gate wire. The second electrode intersects with the gate wire and forms capacitance with the first electrode. The current detection circuit is electrically connected to the second electrode and has a function of detecting change of the capacitance. The pixel has a transistor and a display element. The transistor has a gate electrode, a source electrode, and a drain electrode. The gate electrode is electrically connected to the gate wire. The display element has a third electrode and a liquid crystal material. The third electrode is electrically connected to the source electrode and the drain electrode.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] One embodiment of the present invention relates to an input / output panel, a semiconductor device, and a driving method.

[0002] Note that one embodiment of the present invention is not limited to the above technical field. The technical field of one aspect relates to an article, a method, or a manufacturing method. One aspect of the present invention is a process, machine, manufacture, or composition. Therefore, the present invention more specifically disclosed herein The technical field of one embodiment of the present invention is a semiconductor device, a display device, a light-emitting device, a power storage device, a memory device, The driving method thereof or the manufacturing method thereof can be given as an example. [Background technology]

[0003] The common electrode for display, which is originally provided in the liquid crystal display element, is replaced by a pair of electrodes for the touch sensor. One of the electrodes (drive electrode) is used as the other electrode (detection electrode for the sensor) and is newly formed. In addition, the existing common drive signal as a display drive signal is used as a touch sensor drive signal. A configuration in which the same device is shared among multiple devices is also known (Patent Document 1).

[0004] Touch signal lines, such as drive and sense lines, and ground regions in the display pixel stackup and other circuit elements are grouped together to form a touch sensor that senses touch on or near the display. A configuration for forming a switch sensing circuit is known (Patent Document 2). [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2009-244958 A [Patent Document 2] JP 2011-197685 A Summary of the Invention [Problem to be solved by the invention]

[0006] An object of one aspect of the present invention is to provide a novel input / output panel that is highly convenient and reliable. The object of the present invention is to provide a novel input / output panel or a novel semiconductor device. This is one of the topics.

[0007] The description of these problems does not preclude the existence of other problems. It is not necessary for the embodiment to solve all of these problems. The above will become apparent from the description in the specification, drawings, claims, etc. It is possible to extract other issues from the descriptions in the patent, claims, etc. [Means for solving the problem]

[0008] (1) An input / output panel of one embodiment of the present invention includes a gate wiring, a first electrode, a second electrode, and The pixel includes a current detection circuit and a first electrode electrically connected to a gate line. The second electrode is disposed so as to intersect with the gate line and form a capacitance between the second electrode and the first electrode. The current detection circuit is electrically connected to the second electrode and has a function of detecting a change in capacitance. The pixel includes a transistor and a display element. The gate electrode is electrically connected to the gate wiring. The display element comprises a third electrode and a liquid crystal material. The third electrode is a source electrode or a drain electrode. The semiconductor laser is electrically connected to the semiconductor laser electrode.

[0009] (2) In the above-mentioned configuration, the third electrode controls the alignment of the liquid crystal material between the third electrode and the second electrode. It is preferable that they are arranged to form an electric field.

[0010] (3) In each of the above configurations, the third electrode is sandwiched between the liquid crystal material and the second electrode. It is preferable that the region.

[0011] (4) In each of the above configurations, the display element has a fourth electrode, and the third electrode is The fourth electrode is disposed to form an electric field between the first electrode and the second electrode to control the orientation of the liquid crystal material. It is preferable that the signal line is electrically connected to a wiring that provides a potential.

[0012] (5) In each of the above configurations, the third electrode is sandwiched between the liquid crystal material and the fourth electrode. It is preferable that the region.

[0013] (6) In each of the above configurations, the first electrode contains the same material as the third electrode, The second electrode preferably comprises the same material as the fourth electrode.

[0014] (7) In each of the above configurations, a backlight is provided, and either the second electrode or the third electrode is provided. Either one or both have a reflectance of 5 for light with a wavelength in the range of 400 nm or more and less than 800 nm. % or more and less than 100%, and the transmittance is 1% or more and less than 95%, and the backlight is It is preferable that the layer containing the liquid crystal material can be irradiated with light.

[0015] (8) In each of the above configurations, a backlight is provided, and either the third electrode or the fourth electrode is provided. Either one or both have a reflectance of 5 for light with a wavelength in the range of 400 nm or more and less than 800 nm. % or more and less than 100%, and the transmittance is 1% or more and less than 95%, and the backlight is It is preferable that the layer containing the liquid crystal material can be irradiated with light.

[0016] (9) An input / output panel of one embodiment of the present invention includes a gate wiring, a first electrode, a second electrode, and The pixel includes a current detection circuit and a first electrode electrically connected to a gate line. The second electrode is disposed so as to intersect with the gate line and form a capacitance between the second electrode and the first electrode. The current detection circuit is electrically connected to the second electrode and has a function of detecting a change in capacitance. The pixel includes a first transistor, a second transistor, and a light emitting element. The first transistor has a first gate electrode, a first source electrode, and a first drain electrode. The second transistor has a second gate electrode, a second source electrode and a second drain electrode. The first gate electrode is electrically connected to the gate wiring. The first source electrode or the first drain electrode is electrically connected to the second gate electrode. The source electrode or the second drain electrode has a function of supplying power to drive the light-emitting element. .

[0017] (10) The semiconductor device according to one embodiment of the present invention is a device for use in a keyboard, a hardware button, a pointing device, touch sensor, illuminance sensor, imaging device, voice input device, viewpoint input device, posture and the input / output panel.

[0018] (11) A method for driving an input / output panel according to one embodiment of the present invention includes: The pixel has a driving method for an input / output panel electrically connected to the gate wiring and the signal line. In the method, a video signal is supplied to a signal line during a period in which a selection signal is supplied to a gate line. and detects an object to be detected that is close to the gate wiring.

[0019] (12) A method for driving an input / output panel according to one embodiment of the present invention includes: , and the pixel is electrically connected to the gate wiring and the signal line, and the pixel includes a display element. The driving method of the input / output panel includes a first period to a third period. In the second period, a predetermined voltage is supplied to the signal line, and in the third period, all the gate wirings are connected to the selection signal line. A selection signal is supplied to each of the gate wirings in a predetermined order so that a gate signal is supplied to the gate wirings. In the third period, all the gate wirings are turned on. A selection signal is supplied to the gate wiring in a predetermined order so that a video signal is supplied to the gate wiring. Supply to the line.

[0020] (13) A method for driving an input / output panel according to one embodiment of the present invention includes: , and the pixel is electrically connected to the gate wiring and the signal line, and the pixel includes a display element. The driving method of the input / output panel includes a first period to a third period. In the second period, a predetermined voltage is supplied to the signal line, and in the third period, all the gate wirings are connected to the selection signal line. supplying a selection signal to each group of adjacent gate wirings in a predetermined order so that the gate wirings are supplied with a selection signal; A detection object adjacent to a group of adjacent gate wirings is detected, and in a third period, all of the gates supplying the selection signals to the gate lines in a predetermined order so that the gate lines are supplied with the selection signals; A video signal is applied to the signal line.

[0021] (14) A method for driving an input / output panel according to one embodiment of the present invention includes: a second display area adjacent to the first display area, the first display area including a group of games; the first display area includes a set of gate lines and signal lines, and the second display area includes another set of gate lines and signal lines. A driving method for an input / output panel, comprising: a first period to a sixth period; In the second period, a predetermined voltage is supplied to the signal line, and a selection signal is applied to a group of gate wirings. is supplied to detect an object to be detected adjacent to a group of gate wirings, and in a third period, A selection signal is applied to a group of gate wirings in a predetermined order so that the gate wirings are supplied with the selection signal. In the fourth period, a video signal is supplied to the signal line by selecting one of the video signals from the first period and supplying the video signal to the signal line. In the fifth period, a selection signal is supplied to another group of gate wirings, and in the fifth period, a selection signal is supplied to another group of gate wirings. In the sixth period, a detection object adjacent to the group of gate wirings is detected, and in the sixth period, a detection object adjacent to the group of gate wirings is detected. In order to supply the selection signal to the gate wiring, the selection signal is sent from another group of gate wirings in a predetermined order. The video signal is supplied to the signal line by selecting one of the outputs at a time.

[0022] In this specification, the source and drain of a transistor are used to indicate the polarity and The name changes depending on the potential applied to the terminal. Generally, n-channel In a transistor with a low potential, the terminal to which the low potential is applied is called the source, and the terminal to which the high potential is applied is called the The terminal to which the transistor is connected is called the drain. The terminal to which the high potential is applied is called the drain, and the terminal to which the high potential is applied is called the source. For convenience, let us assume that the source and drain are fixed. In some cases, the connection relationship between the source and drain is explained, but in reality, the connection between the source and drain is determined according to the above potential relationship. The way they are handled changes.

[0023] In this specification, the source of a transistor refers to a source region that is a part of a semiconductor film, or The drain of a transistor is the source electrode connected to the semiconductor film. A drain region which is a part of the semiconductor film, or a drain electrode connected to the semiconductor film "Gate" means a gate electrode.

[0024] In this specification, the state in which transistors are connected in series refers to, for example, a first transistor Only one of the source or drain of one transistor is connected to the source or drain of the second transistor. It also means that the transistors are connected in parallel. The state where either the source or drain of the first transistor is connected to the second transistor and the source or drain of the first transistor is connected to one of the source and drain of the second transistor. This means that the other of the two transistors is connected to the other of the source or drain of the second transistor. do.

[0025] In this specification, the term "connection" refers to an electrical connection, and a current, voltage, or potential is supplied. Therefore, the connected state corresponds to a state in which the does not necessarily refer to the state in which a current, voltage or potential is available or transferable. The signals are transmitted through circuit elements such as wiring, resistors, diodes, and transistors. This also includes the state of being directly connected.

[0026] In this specification, even if components that are independent on the circuit diagram are connected to each other, However, in reality, for example, when a part of a wiring functions as an electrode, one conductive film may be connected to multiple In this specification, the term "connection" refers to such a connection. Cases in which one conductive film has the functions of multiple components are also included in this category.

[0027] In this specification, one of the first electrode and the second electrode of a transistor is a source the first electrode and the second electrode is the drain electrode. Effect of the Invention

[0028] According to one aspect of the present invention, it is possible to provide a novel input / output panel that is highly convenient and reliable. Alternatively, a novel input / output panel or a novel semiconductor device can be provided.

[0029] The description of these effects does not preclude the existence of other effects. An embodiment does not necessarily have to have all of these effects. Effects other than these may also be included. The above is self-evident from the description, drawings, claims, etc. Other effects can be extracted from the claims and other descriptions. [Brief description of the drawings]

[0030] [Figure 1] FIG. 2 is a circuit diagram illustrating a configuration of an input / output panel according to an embodiment. [Diagram 2] FIG. 2 is a plan view illustrating a configuration of an input / output panel according to an embodiment. [Diagram 3] 1A and 1B are a cross-sectional view and a plan view illustrating a configuration of an input / output panel according to an embodiment. [Figure 4] 1A and 1B are a cross-sectional view and a plan view illustrating a configuration of an input / output panel according to an embodiment. [Diagram 5] 1A to 1C are schematic diagrams showing a configuration of a mutual capacitance type touch sensor according to an embodiment, schematic diagrams of input / output waveforms, and a configuration example of a touch sensor having a plurality of capacitors arranged in a matrix. [Figure 6]1A and 1B are a cross-sectional view and a plan view illustrating a configuration of an input / output panel according to an embodiment. [Figure 7] 1A and 1B are a cross-sectional view and a plan view illustrating a configuration of an input / output panel according to an embodiment. [Figure 8] 1A and 1B are a cross-sectional view and a plan view illustrating a configuration of an input / output panel according to an embodiment. [Figure 9] 3A to 3C are a block diagram of wiring and a timing chart of input and output waveforms according to an embodiment. [Figure 10] 4 is a timing chart of input and output waveforms according to the embodiment. [Figure 11] 4 is a timing chart of input and output waveforms according to the embodiment. [Figure 12] 4 is a timing chart of input and output waveforms according to the embodiment. [Figure 13] 4 is a timing chart of input and output waveforms according to the embodiment. [Figure 14] FIG. 2 is a block diagram of wiring of a touch panel according to an embodiment. [Figure 15] 1A and 1B are a cross-sectional view and a plan view illustrating a configuration of an input / output panel according to an embodiment. [Figure 16] 1A and 1B are a cross-sectional view and a plan view illustrating a configuration of an input / output panel according to an embodiment. [Figure 17] 1A and 1B are a cross-sectional view and a circuit diagram illustrating a structure of an input / output panel according to an embodiment. [Figure 18] 1 is a cross-sectional view illustrating a configuration of an input / output panel according to an embodiment. [Figure 19] 1A to 1C are diagrams illustrating electronic devices having an input / output panel according to an embodiment. [Figure 20] 1A to 1C are diagrams illustrating electronic devices having an input / output panel according to an embodiment. [Figure 21] 1A to 1C illustrate a structure of a transistor that can be used for an input / output panel according to an embodiment. [Figure 22] 1A to 1C illustrate a structure of a transistor that can be used for an input / output panel according to an embodiment. [Figure 23] 1A to 1C are diagrams illustrating electronic devices having an input / output panel according to an embodiment. [Figure 24] FIG. 2 is a circuit diagram of a touch sensor according to the embodiment. [Diagram 25] 1A and 1B are a block diagram and a timing chart of a display device according to an embodiment. [Figure 26] 5A to 5C are diagrams illustrating operations of a display device and a touch sensor according to an embodiment. [Figure 27] 5A to 5C are diagrams illustrating operations of a display device and a touch sensor according to an embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0031] The embodiment will be described in detail with reference to the drawings. However, the present invention is not limited to the following description. The present invention may be modified in various ways in form and detail without departing from the spirit and scope of the present invention. It will be readily understood by those skilled in the art that the present invention can be modified in various ways. The present disclosure is not to be construed as being limited to the contents of the description of the embodiment.

[0032] In the configuration of the invention described below, the same parts or parts having similar functions are The same reference numerals are used in common between different drawings, and the repeated explanations are omitted. When referring to a function, the hatch pattern may be the same and no particular symbol may be used.

[0033] In each figure described in this specification, the size, layer thickness, or area of ​​each component is not clearly indicated. may be exaggerated for clarity and are not necessarily limited to scale .

[0034] In this specification, ordinal numbers such as "first" and "second" are used to avoid confusion of components. The number is not intended to be a numerical limiting factor.

[0035] In this specification, the term "metal oxide" refers to a metal oxide in a broad sense. Metal oxides are oxide insulators and oxide conductors (including transparent oxide conductors). , oxide semiconductor (also called OS) For example, when a metal oxide is used in the active layer of a transistor, the metal oxide In other words, metal oxides have the functions of amplification, rectification, and switching action, the metal oxide is called a metal oxide semiconductor. Metal oxide semiconductor, abbreviated as OS In addition, when describing OS FET, it is possible to use a metal oxide or an oxide semiconductor. In other words, it is a transistor having a body.

[0036] In the present specification and the like, metal oxides having nitrogen are also referred to as metal oxides. Nitrogen-containing metal oxides are also called metal oxynitrides (met de). It may also be called tetrahydrofuran (tetrahydrofuran) oxynitride.

[0037] In the present specification and the like, the term CAAC (c-axis aligned crystal ), and CAC (cloud-aligned composite) CAAC represents an example of a crystal structure, and CAC represents an example of a function or material configuration. Represents.

[0038] In the present specification and the like, CAC-OS or CAC-metal oxide means A part of the material has a conductive function, and a part of the material has an insulating function, and the whole material has a It functions as a semiconductor. CAC-OS or CAC-metal oxide When e is used in the active layer of a transistor, the conductive function is to transfer electrons (or The insulating function is the function of allowing the passage of electrons (carriers) and the insulating function is the function of preventing the passage of electrons (carriers). The conductive function and the insulating function work in a complementary manner. You can set the function to turn on / off the CAC-OS or CAC-metal It can be added to CAC-OS or CAC-metal oxide. By separating the functions of each in e, it is possible to maximize the functions of both. Cut.

[0039] In the present specification and the like, CAC-OS or CAC-metal oxide is a conductive material. The conductive region has the above-mentioned conductive function, and the insulating region has the above-mentioned insulating function. The region has the insulating function described above. In addition, the material has a conductive region and an insulating region. The regions may be separated at the nanoparticle level. The conductive regions may be unevenly distributed in the material. They may be observed connected in a circular fashion.

[0040] In addition, in the CAC-OS or CAC-metal oxide, the conductive region and the insulating region are The peripheral region is 0.5 nm to 10 nm, preferably 0.5 nm to 3 nm. The following sizes may be present in the material:

[0041] In addition, CAC-OS or CAC-metal oxide has different band gaps. For example, CAC-OS or CAC-metal oxi de is a component with a wide gap due to the insulating region and a component with a narrow gap due to the conductive region. In the case of this configuration, when a carrier flows, In the narrow gap component, carriers mainly flow. The component having a narrow gap acts complementary to the component having a wide gap. Carriers also flow to the wide gap component in conjunction with the component with a large gap. AC-OS or CAC-metal oxide is used for the channel region of the transistor. In this case, the transistor has a high current driving capability in the on-state, i.e., a large on-current, and High field effect mobility can be obtained.

[0042] That is, CAC-OS or CAC-metal oxide is a matrix composite material. (matrix composite), or metal matrix composite It can also be called a composite matrix.

[0043] The embodiment will be described in detail with reference to the drawings. However, the present invention is not limited to the following description. The present invention is not limited to the above embodiment, and various changes and modifications may be made in the form and details without departing from the spirit and scope of the present invention. It will be easily understood by those skilled in the art that the above-mentioned invention can be obtained by the following embodiments. The present invention should not be construed as being limited to the contents described below. The same reference numerals are used in different drawings to indicate the same parts or parts having similar functions. A repeated explanation will be omitted.

[0044] (Embodiment 1) In this embodiment, a detection object that can be applied to the input / output panel of one embodiment of the present invention will be described. This section describes an example of the configuration of a sensor that can detect proximity or contact (hereafter referred to as a touch sensor). The input / output panel of one embodiment of the present invention includes a display element.

[0045] The touch sensor according to one embodiment of the present invention uses a capacitive touch sensor. Representative examples of such sensors include surface capacitive touch sensors and projected capacitive touch sensors. The capacitance type is classified into self-capacitance type and mutual capacitance type, mainly based on the difference in the driving method. Here, if the mutual capacitance method is used, multiple points can be detected simultaneously (multipoint detection). This is preferable because it allows for touch (also called "touch").

[0046] The input / output panel according to one embodiment of the present invention includes a capacitive sensor. The capacitor has a pair of electrodes, and a capacitance is formed between the pair of electrodes. One of them is a sensor electrode, which is connected to the gate wiring. The port wiring has a function of supplying a selection signal.

[0047] The other of the pair of electrodes intersects with the gate wiring.

[0048] In one aspect of the present invention, for example, the other electrode is separated from the electrode of the display element. In addition, in one embodiment of the present invention, the other electrode is a display element. This structure will be described with reference to FIG.

[0049] 1A and 1B are circuit diagrams of a pixel portion of an input / output panel of one embodiment of the present invention. The input / output panel of one embodiment of the present invention includes a display element, and the display element includes a layer including a liquid crystal material. The input / output panel of one embodiment of the present invention includes a pixel portion. 13, a capacitance section 3514, a capacitive sensor section 3515, and a gate electrode 3516, A gate wiring 3517, a contact region 3518, a source wiring 3519, and a transistor The pixel portion includes a common electrode 3522 and a sensor electrode 3529. and a pixel electrode 3523. The common electrode 3522 is a A common potential is supplied to the pixel electrode 3523. The pixel electrode 3523 is electrically connected to the transistor 3521. The transistor 3521 receives a signal from the source wiring 3519 based on a selection signal. A signal can be supplied to the pixel electrode 3523. The source wiring 3519 is also simply called a signal line.

[0050] In the contact region 3518, the sensor electrode 3529 is electrically connected to the gate wiring 3517. The gate electrode 3516 is electrically connected to a gate wiring 3517. That is, the gate wiring 3517 has a function of auxiliary wiring for the sensor electrode 3529 and The wiring has a function of supplying a selection signal for driving the transistor 3521 .

[0051] The common electrode 3522 has an area parallel to the source wiring 3519. In FIG. 1B, the row direction is the direction indicated by the arrow R, and the column direction is the direction indicated by the arrow C. do.

[0052] The liquid crystal element 3513 includes a common electrode 3522 and a pixel electrode 3523. The electrode 3522 and pixel electrode 3523 are used to vary the electric field in the layer containing the liquid crystal material. It is possible.

[0053] The pixel portion also includes a capacitor portion 3514. The capacitor portion 3514 can store electric charges. As a result, during the period until the next gate wiring 3517 is selected (one frame period), This allows the voltage required for display of the liquid crystal element 3513 to be maintained. The voltage between the supply electrode 3522 and the pixel electrode 3523 can be maintained. Of the two electrodes provided in the pixel electrode 3523, the electrode not electrically connected to the pixel electrode 3523 is connected to a common A conducting potential is applied. In this specification, the capacitive portion 3514 may be omitted from the illustration. .

[0054] Here, the input / output panel described using the circuit diagram of FIG. 1(A) has a sensor electrode 3527. The sensor electrode 3527 is separated from the common electrode 3522.

[0055] The capacitive sensor unit 3515 includes a sensor electrode 3529 and a sensor electrode 3527. In one aspect of the touch sensor of the present invention, when a finger, a stylus pen, or the like approaches, the sensor voltage The change in capacitance between the electrode 3529 and the sensor electrode 3527 can be read. The electrode 3527 is supplied with a common potential or a floating potential.

[0056] The sensor electrode 3527 has an area parallel to the source wiring 3519. Auxiliary wiring may be provided to 3527.

[0057] On the other hand, the input / output panel described using the circuit diagram of FIG. 1(B) does not have a sensor electrode 3527. This is different from the input / output panel described with reference to FIG. 1(A) in that there is no capacitance type sensor. 3515 includes a sensor electrode 3529 and a common electrode 3522. When a finger or a stylus pen approaches, the touch sensor detects the sensor electrode 3529 and the common The change in capacitance between the poles 3522 can be read.

[0058] FIG. 2(A) is a plan view in which the structure of wiring and the like is superimposed on the circuit diagram shown in FIG. 1(A). FIG. 1B) is a plan view in which the structure of wiring and the like is superimposed on the circuit diagram shown in FIG. 1B. For convenience, these plan views may include parts that are different from the actual dimensions and shapes. For convenience of explanation, some of the wirings and the transistor 3521 are shown by symbols. In FIG. 2(A) and FIG. 2(B), the common electrode 3522 or the pixel electrode 3523 is not overlapped. Although a transistor 3521 is shown, the transistor 3521 is connected to a common electrode 3522 or a pixel It may be arranged at a position overlapping with the electrode 3523. It may be arranged similarly in other plan views. do.

[0059] The input / output panel described with reference to FIG. 2(A) and the input / output panel described with reference to FIG. 2(B) Each of the electrodes includes a gate line 3517, a common electrode 3522, a pixel electrode 3523, and a sensor electrode 3524. 3529 and contact region 3518. In each figure, the capacitance portion The input / output panel 3514 is omitted in the illustration. Equipped with a sensor electrode 3527.

[0060] The input / output panel described with reference to FIG. 2(A) and the input / output panel described with reference to FIG. 2(B) In each of the modules, the common electrode 3522 is connected to the gate wiring 3517 and the sensor electrode 3529. It has an area sandwiched between them.

[0061] The input / output panel described with reference to FIG. 2(A) and the input / output panel described with reference to FIG. 2(B) In each of the modules, the pixel electrodes 3523 and the sensor electrodes 3529 contain the same material. This allows the pixel electrode 3523 and the sensor electrode 3529 to be formed in the same process. In addition, the input / output panel described with reference to FIG. 2(A) has a common electrode 3522 and a sensor The common electrode 3522 and the sub-electrode 3527 each contain the same material. The sensor electrode 3527 can be formed in the same process.

[0062] An auxiliary wiring can be provided in the common electrode 3522. This reduces wiring resistance. Alternatively, the pixels can be made smaller.

[0063] In addition, the solenoid is placed so as to overlap with an electrode to which a common potential or a floating potential is applied. A source wiring 3519 may be arranged. This allows, for example, a sensor electrode or a detected object ( Specifically, the effect of noise from fingers, etc. can be reduced. For example, This can reduce the effect on the video signal provided by the 3519.

[0064] The input / output panel of the present invention may have a circuit as shown in FIG. 1(A) or FIG. 1(B). For example, the gate wiring 3 is formed in the order from the side closest to the substrate. 517, then the sensor electrode 3529, and then the common electrode 3522 may be formed. In addition, the pixel electrode 3523 may be formed of a material different from that of the sensor electrode 3529. In addition, the common electrode 3522 may be formed of a material different from that of the sensor electrode 3527. .

[0065] Configuration example 1. The input / output panel described using the circuit diagram shown in FIG. 1A has a sensor electrode 3527. The sensor electrode 3527 is separated from the common electrode 3522. The structure of a portion of the pixel of the panel 3551 will be described using a schematic cross-sectional view (FIG. 3(A)). The input / output panel 3551 has a layer 3524 containing a liquid crystal material. The 3551 operates in FFS (Fringe Field Switching) mode. The liquid crystal element includes a liquid crystal display.

[0066] The input / output panel 3551 includes a transistor 3521, a common electrode 3522, and a pixel electrode 35 23, a layer 3524 containing a liquid crystal material, and a color filter 3525 (FIG. 3(A) ) The pixel electrode 3523 includes a pixel electrode 3523A and a pixel electrode 3523B. The pixel electrode 3523B is electrically connected to the pixel electrode 3523A. The layer 3524 is sandwiched between an alignment film 3561 and an alignment film 3562. 23A and the pixel electrode 3523B are the source electrode or drain electrode of the transistor 3521. It is electrically connected to one of the electrodes.

[0067] The pixel electrode 3523A and the pixel electrode 3523B are a part of the pixel electrode. The liquid crystal display panel 3A and the pixel electrode 3523B are provided on the common electrode 3522 via an insulating layer. The liquid crystal element has a pair of electrodes. The pixel electrode 3523A and the pixel electrode 3523B are a pair of electrodes. The common electrode 3522 is the other of the pair of electrodes. By applying a voltage between the electrodes, the liquid crystal material contained in the layer 3524 containing the liquid crystal material is aligned. The direction can be controlled.

[0068] The gate wiring 3517 is made of the same material as the gate electrode 3516 of the transistor 3521. This allows the gate wiring 3517 and the gate electrode 3516 to be formed in the same process. In addition, the gate wiring 3517 and the gate electrode 3516 can be electrically Also, the gate wiring 3517 can be connected to the sensor in the contact region 3518. It can be electrically connected to the electrode 3529.

[0069] The sensor electrode 3527 contains the same material as the common electrode 3522. The sensor electrode 3527 and the common electrode 3522 can be formed in the same process.

[0070] The input / output panel 3551 shown in FIG. The electric field formed between the sensor electrode 3529 and the sensor electrode 3527 is indicated by a dashed line. In addition, for example, the conductive object 3564 crosses this electric field. The sensor electrodes 3529 and 3527 are the same as those shown in FIG. This corresponds to the capacitive sensor unit 3515 of the input / output panel, which will be described using a circuit diagram.

[0071] A layer 3524 containing a liquid crystal material is sandwiched between a substrate 3543 and a substrate 3541 .

[0072] FIG. 3B is a plan view showing a schematic structure of wiring, etc., of the input / output panel 3551 shown in FIG. FIG.

[0073] In addition, between Am and An, and between Bm and Bn shown in each cross-sectional view of this specification, It corresponds to the area between Am and An, and between Bm and Bn shown in the figure. However, m and n are both It is a natural number.

[0074] The transistor 3521 is disposed so as to overlap with the common electrode 3522 and the pixel electrode 3523. The gate electrode 3516 of the transistor 3521 is connected to the gate wiring 351. 7. The source and drain electrodes of the transistor 3521 are electrically connected to The electrode contains the same material as the source wiring 3519. The drain electrode and the source wiring 3519 can be formed in the same process. The source electrode or drain electrode can be electrically connected to the source wiring 3519. In other plan views, the transistors are arranged to overlap with the common electrode or the pixel electrode. It is possible.

[0075] In addition, as described in Embodiment 7, the transistor 3521 may be a bottom-gate type or a top-gate type. The transistor may be of a multi-gate type or a type having two gate electrodes.

[0076] A part of the electric field formed between the sensor electrode 3529 and the sensor electrode 3527 is indicated by a dashed line 35 The touch sensor of one embodiment of the present invention is shown by 63 (see FIG. 3B). The sensor electrode 3529 and the sensor electrode 3530 can detect the detection object 3564. Reference numeral 527 corresponds to a pair of electrodes of the capacitive sensor unit 3515 (see FIG. 1A).

[0077] Configuration example 2. The input / output panel described using the circuit diagram shown in FIG. 1B has a common electrode 3522 and a sensor As an example, the structure of a part of the pixel of the input / output panel 3552 is shown in FIG. The following description will be given using a schematic cross-sectional view (see FIG. 4(A)). The input / output panel 3552 has a layer 3524 containing a liquid crystal material. It has a crystal element.

[0078] The input / output panel 3552 shown in FIG. 4(A) is different from the input / output panel 3552 shown in FIG. This is different from the input / output panel 3551 shown in A).

[0079] The input / output panel 3552 shown in FIG. 4A includes a sensor electrode 3529 and a common electrode 3522. The electric field formed between the sensor electrode 3529 and the common electrode 3522 is indicated by the dashed line 35 Also, for example, the state in which a conductive detection object 3564 crosses this electric field is shown as The other parts are the same as those of the input / output panel 3551 shown in FIG. The sensor electrode 3529 and the common electrode 3522 are the same as those shown in FIG. The circuit diagram is used to explain the capacitance type sensor unit 3515 of the input / output panel. Equivalent.

[0080] FIG. 4B is a plan view showing a schematic structure of wiring, etc., of the input / output panel 3552 shown in FIG. FIG.

[0081] A part of the electric field formed between the sensor electrode 3529 and the common electrode 3522 is indicated by a dashed line 356 3 (see FIG. 4B). In the touch sensor according to one embodiment of the present invention, The sensor electrode 3529 and the common electrode 352 can detect the sensing object 3564. 2 corresponds to a pair of electrodes of the capacitive sensor unit 3515 (see FIG. 1(B)).

[0082] [Example of sensor detection method] Figure 5 (A) and (B) show a schematic diagram of the mutual capacitance type touch sensor and the input / output waveforms. 1 is a schematic diagram of a touch sensor having a pair of electrodes and a capacitance formed between the electrodes. An input voltage is input to one of the pair of electrodes. A current flows through the other electrode. It is equipped with a current detection circuit that detects the potential of the other electrode.

[0083] For example, as shown in Figure 5(A), when a square wave is used as the input voltage waveform, the output current wave Waveforms that have sharp peaks in shape are detected.

[0084] As shown in FIG. 5B, when a conductive object is in close proximity to or in contact with the capacitance, , the capacitance between the electrodes decreases, and the output current value decreases accordingly.

[0085] In this way, the touch sensor according to one embodiment of the present invention has an output current (or potential ) to detect the change in capacitance, and detect the proximity or contact of the object to be detected. It can be known.

[0086] [Touch sensor configuration example] FIG. 5C shows a configuration example of a touch sensor having a plurality of capacitors arranged in a matrix. vinegar.

[0087] The touch sensor includes a plurality of wirings 3510 extending in the X direction (horizontal direction of the paper surface) and a plurality of The wiring includes a plurality of wirings 3511 that intersect with the wiring and extend in the Y direction (the vertical direction of the paper). A capacitance 3503 is formed between the two wirings. For example, in the input / output panel 3551 (FIG. 3( In (A) and (B), the wiring 3510 is connected to the gate wiring 3517 and the sensor electrode 352. 9, and wiring 3511 corresponds to sensor electrode 3527.

[0088] In addition, an input voltage or a common potential (ground potential, reference potential) is applied to the wiring 3510 extending in the X direction. This potential is, for example, a square wave. The pulse voltage can be supplied from the pulse voltage output circuit 3501. Also, the wiring 35 extending in the Y direction 11, a current detection circuit 3502 (e.g., a source meter, a sense amplifier, etc.) is electrically and the current (or potential) flowing through the wiring can be detected.

[0089] In the touch sensor, an input voltage is input in sequence to a plurality of wirings 3510 extending in the X direction. The line 3511 is scanned in such a way that a change in the current (or potential) flowing through the line 3511 extending in the Y direction is detected. By doing so, it becomes possible to detect (sens) two-dimensional objects.

[0090] (Embodiment 2) In this embodiment, an embodiment that can be applied to an input / output panel of one embodiment of the present invention will be described. A configuration example different from that of the input / output panel according to one embodiment of the present invention will be described. The input / output panel shown in this embodiment is an FFS mode LCD having a layer including a liquid crystal material. The liquid crystal element operates in the above-described manner.

[0091] Configuration example 3. The input / output panel described using the circuit diagram shown in FIG. 1B has a common electrode 3522 and a sensor As an example, the structure of a part of the pixel of the input / output panel 3553 is shown in FIG. The description will be given with reference to a schematic cross-sectional view (see FIG. 6(A)).

[0092] The input / output panel 3553 includes a transistor 3521, a common electrode, a pixel electrode 3523, (See FIG. 6(A)). The common electrodes are a common electrode 3522A and a common electrode 3522B. B. The common electrode 3522B is electrically connected to the common electrode 3522A. The electrode 3523 contains the same material as the sensor electrode 3529. The pole 3523 and the sensor electrode 3529 can be formed in the same process.

[0093] FIG. 6B is a plan view showing a schematic structure of wiring, etc., of the input / output panel 3553 shown in FIG. FIG.

[0094] A part of the electric field formed between the sensor electrode 3529 and the common electrode 3522A is indicated by a dashed line 35 The touch sensor of one embodiment of the present invention is shown by 63 (see FIG. 6B). The common electrode 3522B can detect the detection object 3564. This allows the electric field that the object to be detected can easily cross to be irradiated by the sensor electrode 3529 and the common electrode 3530. The sensor electrode 3529 and the common electrode 3522A can be formed between the sensor electrode 3529 and the common electrode 3522A. 522A corresponds to a pair of electrodes of the capacitive sensor unit 3515 (see FIG. 1(B)). .

[0095] For other configurations of the I / O panel 3553, refer to the configuration of the I / O panel 3552. can.

[0096] Configuration example 4. The input / output panel described using the circuit diagram shown in FIG. 1B has a common electrode 3522 and a sensor As an example, the structure of a part of the pixel of the input / output panel 3554 is shown in FIG. The description will be given with reference to a schematic cross-sectional view (see FIG. 7(A)).

[0097] The input / output panel 3554 includes a transistor 3521, a common electrode, a pixel electrode 3523, (See FIG. 7A). The common electrodes are a common electrode 3522A and a common electrode 3522B. B. The common electrode 3522B is electrically connected to the common electrode 3522A. The electrode 3523 contains the same material as the sensor electrode 3529. The pole 3523 and the sensor electrode 3529 can be formed in the same process.

[0098] FIG. 7B is a plan view showing a schematic structure of wiring, etc., of the input / output panel 3554 shown in FIG. FIG.

[0099] A part of the electric field formed between the sensor electrode 3529 and the common electrode 3522A is indicated by a dashed line 35 The touch sensor of one embodiment of the present invention is shown by 63 (see FIG. 7B). The common electrode 3522B is provided with an opening, and the sensor 3522B is provided with an opening. The sensor electrode 3529 has an area overlapping the opening. The sensor electrodes 3529 correspond to a pair of electrodes of the capacitive sensor unit 3515 (FIG. 1( See B).

[0100] For other configurations of the input / output panel 3554, refer to the configuration of the input / output panel 3552. can.

[0101] Configuration example 5. The input / output panel described using the circuit diagram shown in FIG. 1(A) includes a sensor electrode 3527 and a sensor As an example, the structure of a part of the pixel of the input / output panel 3555 is as follows: A schematic cross-sectional view will be used for explanation (see FIG. 8(A)).

[0102] The input / output panel 3555 includes a transistor 3521, a common electrode, a sensor electrode 3527, and , and a pixel electrode 3523 (see FIG. 8(A)). and a common electrode 3522B. The common electrode 3522B is electrically connected to the common electrode 3522A. The common electrode comprises the same material as the sensor electrode 3527. This allows the common electrode and the sensor electrode 3527 to be formed in the same process.

[0103] FIG. 8(B) is a plan view showing a schematic structure of wiring, etc. of the input / output panel 3555 shown in FIG. 8(A). FIG.

[0104] A part of the electric field formed between the sensor electrode 3529 and the sensor electrode 3527 is indicated by a dashed line 35 The touch sensor of one embodiment of the present invention is shown by 63 (see FIG. 8B). The common electrode 3522B can detect the detection object 3564. This allows the sensor electrode 3529 and the sensor to generate an electric field that is easy for the object to cross. The sensor electrode 3529 and the sensor electrode 3527 may be formed between the sensor electrode 3529 and the sensor electrode 3527. 3527 corresponds to a pair of electrodes of the capacitive sensor unit 3515 (see FIG. 1(A)). .

[0105] For other configurations of the I / O panel 3555, refer to the configuration of the I / O panel 3551. can.

[0106] (Embodiment 3) An example of a method for driving a touch panel according to an embodiment of the present invention will be described below.

[0107] FIG. 9A is a block diagram showing the configuration of a mutual capacitance type touch sensor. In the touch sensor, a pulse voltage output circuit 3501 and a current detection circuit 3502 are included. In addition, the wiring 3510 to which the pulse voltage is applied is designated as X1-Xn, and n wirings are used for each of them. The wiring 3511 for detecting a change in current is designated as Y1-Ym, and m wirings are included. In addition, FIG. 9A shows a plurality of wirings 3510 and a plurality of wirings 351 1 are overlapped to form a plurality of capacitances 3503. and the wiring 3511 may have functions interchangeable with each other.

[0108] The pulse voltage output circuit 3501 is a circuit for applying a pulse voltage to the wirings X1-Xn in sequence. When a pulse voltage is applied to the wiring of X1-Xn, a capacitance 3503 is formed. An electric field is generated between the wiring 3510 and the wiring 3511. The electric field generated between these wirings may cause shielding or the like. This generates a change in the mutual capacitance of the capacitor 3503, and is used to detect the proximity of the object to be detected, or can detect contact.

[0109] The current detection circuit 3502 detects the change in mutual capacitance of the capacitor 3503 in the wiring Y1-Ym. The Y1-Ym wiring detects the proximity of the object to be detected, or If there is no contact or proximity of the object to be detected, the detected current value does not change. When the mutual capacitance decreases due to contact, a change in the current value is detected. This can be achieved by using an integrating circuit or the like.

[0110] Next, FIG. 9B shows input and output waves in the mutual capacitance type touch sensor shown in FIG. In FIG. 9B, the number of objects to be detected in each row and column during one frame period is In FIG. 9B, the detection of the object to be detected is performed. The period 3601 when the object is detected (touch) and the period 3602 when the object is detected (touch) are shown in FIG. For the wiring Y1-Ym, the voltage value corresponding to the detected current value is The waveform shown is as follows.

[0111] A pulse voltage is applied to the wires X1-Xn in sequence, and the wires Y1-Y When the object to be detected is not in proximity or in contact, the waveform of X1-Xn changes. The waveform of Y1-Ym changes uniformly according to the change in the voltage of the wiring. At the points where the current flows or comes into contact, the current value decreases, and the corresponding voltage waveform also changes. .

[0112] The wiring 3510 from X1 to Xn in the block diagram shown in FIG. 9A is the same as that shown in the other embodiments. This corresponds to the gate wiring 3517 of the input / output panel. This corresponds to the gate wiring 3517 of any one of the input / output panels 3555. In order to explain the coordinates of the capacitance 3503 shown in 9(A) and the arrangement of each wiring, X1-Xn The wiring 3510 is arranged in rows X1 to Xn, and the wiring 3511 is arranged in rows Y1 to Ym. The pixels are arranged in columns Y1 to Ym.

[0113] The timing chart shown in FIG. 10 is a timing chart showing the current supplied to each of the wirings 3510 in rows X1 to Xn. The signal 3611 is a signal for driving the display element. The signal 3612 is a signal for driving the touch sensor. Since the input / output panel can transmit both signals through the gate wiring 3517, The signals 3611 and 3612 in the same row are connected to the same gate wiring 35 formed in the row. 17. That is, the signal 3611 and the signal 3612 are the same as those in FIG. 1(A) or FIG. 1(B). ) can also be considered as a selection signal input to the gate wiring 3517.

[0114] The timing chart shown in FIG. 10 is a timing chart showing when the common electrode 3522 is separated from the sensor electrode 3527. A method for driving a separate input / output panel, for example, an example of a method for driving the input / output panel 3551 The vertical axis shows the change in the voltage of the gate wiring. The wiring of X1-Xn is corresponds to the common electrode 3522 and corresponds to the sensor electrode 3527 in the touch sensor. In this structure, the touch sensor detects an object to be detected and writes information to the display element. In other words, the video signal is switched on and off during the period when the selection signal is input to the gate wiring. A signal is input to the source wiring to detect an object to be detected that is close to the gate wiring.

[0115] In this case, for a display element of a certain coordinate, a period during which a video signal is written to the display element The period between the period 3621 and the next period 3621 is a display period 3622. The period 3623 during which the detection of the object is performed coincides with the period 3621 as described above. The repeating cycle of 3621 corresponds to one frame period 3624.

[0116] The timing chart shown in FIG. 11 is a timing chart showing the state when the common electrode 3522 is connected to one of the liquid crystal elements 3513. A method for driving an input / output panel that also serves as an electrode and a sensor electrode, for example, an input / output panel 3552 An example of the driving method is shown below. The wiring of X1-Xn is common to the display element and the touch sensor. This corresponds to the electrode 3522. In this structure, the touch sensor detects an object to be detected and the display The writing to the display element is performed with a time lag.

[0117] In this case, in the display element of a certain coordinate, crosstalk between the display element and the touch sensor is avoided. In order to achieve this, after the period 3621 during which the video signal is written to the display element has elapsed for all rows, In this case, a period 3625 for writing a black signal is provided. The period between 3625 and 3626 is a display period 3622. After the period 3625 has elapsed for all rows, the touch sensor A period 3623 for detecting the object to be detected is provided for all rows. During the period 3623 during which the touch sensor detects the object to be detected, the touch sensor detects the rise in the gate voltage. The difference in the waveform is evaluated, but this waveform changes depending on the potential of the pixel electrode 3523. In order to reduce the influence on the detection, the source wiring 3519 is connected to a black signal line during the period 3623. In this way, one frame period 3624 is completed. After that, writing of the video signal to the display element starts again.

[0118] By writing the black signal before sensing, the wiring 35 shown in FIG. The potential between the pixel electrode 3523 and the wiring 3511 is more uniformly affected by the potential of the pixel electrode 3523. Instead of the black signal, a signal of a given chromaticity can be used to perform accurate sensing. Alternatively, a predetermined voltage may be applied to the pixel electrode 3523 to write a black signal. is also good.

[0119] If one frame period 3624 is fixed and the display period 3622 is to be extended, the period 362 This is made possible by shortening 3, i.e., by achieving high-speed sensing.

[0120] The timing chart shown in FIG. 12 is a timing chart showing the timing when the common electrode 3522 drives the liquid crystal element 3513. Another method of driving the structure having a function as a sensor electrode, Here is an example.

[0121] In this case, the period 3623 during which the touch sensor detects the object is a group of adjacent rows. The signals for adjacent rows are sent to the wiring 3511 that detects the change in current. However, the total sensing period 362 6 is shorter, enabling high-speed sensing.

[0122] For a group of adjacent rows, take the structure shown in the block diagram of FIG. 9(A) as an example: Xr The contiguous rows from X to Xs, where r is an integer between 1 and s, and s is an integer not less than r and not more than n-1. In this case, s is preferably not less than r+1. When the processing of consecutive rows from X to Xs is completed, the processing of unprocessed rows can then be performed. For example, we can perform the same process on a group of adjacent rows starting from X(s+1). In this way, the processing from X1 to Xn rows is completed. Note that until the above processing is completed, Alternatively, a certain number of rows may be grouped into a set of adjacent rows. You can use a fixed number of lines in a group of adjacent lines, or you can use a non-fixed number of lines in a group of adjacent lines. For example, the common electrode 3522 (see FIG. 4B) in the input / output panel 3552 is In other words, Xr to Xs Consecutive lines can be joined together up to

[0123] The timing chart shown in FIG. 13 is a timing chart showing the timing when the common electrode 3522 drives the liquid crystal element 3513. Another method of driving the structure having a function as a sensor electrode, Here is an example.

[0124] In this case, black signals are written sequentially to the display elements of a group of adjacent rows, and then the above Sensing is performed for a group of adjacent rows at a time, and then the display elements for a group of adjacent rows are These are performed in a period 3627, and the next group of video signals are written in the same manner. Adjacent rows are processed. When one frame period is fixed, the timing shown in Figure 13 The driving method shown in the chart makes the display period 3622 longer than that in FIG. can be done.

[0125] Note that the structure described in this embodiment mode may be used in appropriate combination with structures described in other embodiments. It is possible.

[0126] (Embodiment 4) Regarding the wiring of the touch panel of one embodiment of the present invention, in this embodiment, the number of wirings 3510 is The number of wirings 3511 is doubled and the number of wirings 3511 is halved. explain.

[0127] In the block diagram shown in FIG. 14, the number of capacitors 3503 is The number of capacities 3503 shown is the same as the number of capacities 3503 shown.

[0128] In FIG. 14, the touch sensor includes a pulse voltage output circuit 3501A and a pulse voltage output circuit 3501B. Also, the wiring 3510 to which the pulse voltage is applied is designated as X1A-XnA. , X1B-XnB are shown with 2n wires each. The wiring 3511 is illustrated as Y1-Ym, with m / 2 wirings each.

[0129] For example, a capacitance 3503A connected to the pulse voltage output circuit 3501A and a pulse voltage output The capacitor 3503B connected to the circuit 3501B may be disposed adjacent to each other. can.

[0130] By making such an arrangement selectable, the degree of freedom in pixel layout is increased. For example, When the resistance of the wiring 3511 needs to be reduced, the line width of the wiring 3511 is increased while C The number of pixels in the direction can be maintained.

[0131] Note that the structure described in this embodiment mode may be used in appropriate combination with structures described in other embodiments. It is possible.

[0132] (Embodiment 5) In this embodiment, an embodiment that can be applied to an input / output panel of one embodiment of the present invention will be described. A configuration example different from that of the first embodiment or the second embodiment will be described. Specifically, The input / output panel includes a liquid crystal element or a light emitting element.

[0133] Configuration Example 6. The input / output panel described using the circuit diagram shown in FIG. 1A has a sensor electrode 3527. The sensor electrode 3527 is separated from the common electrode 3522. The structure of a portion of the pixel of the panel 3556 will be described using a schematic cross-sectional view (FIG. 15(A)). )reference).

[0134] The input / output panel 3556 shown in FIG. 15(A) is an IPS (In-Plane-Switch The liquid crystal element operates in a displaying mode.

[0135] The input / output panel 3556 includes a transistor 3521, a common electrode, a pixel electrode 3523, (See FIG. 15(A) and FIG. 15(B)). The common electrode has a comb-like shape. The common electrodes include a common electrode 3522A and a common electrode 3522B. The electrode 3523, the sensor electrode 3527 and the sensor electrode 3529 include the same material. The common electrode, the pixel electrode 3523, the sensor electrode 3527 and the sensor electrode 3529 are It can be formed in one step.

[0136] FIG. 15(B) is a schematic diagram showing the structure of wiring, etc., of the input / output panel 3556 shown in FIG. 15(A). FIG.

[0137] A part of the electric field formed between the sensor electrode 3529 and the sensor electrode 3527 is indicated by a dashed line 35 63 (see FIG. 15B). The touch sensor according to one embodiment of the present invention crosses this electric field. The object to be detected 3564 can be detected. 3527 corresponds to a pair of electrodes of the capacitive sensor unit 3515 (see FIG. 1(A)). .

[0138] For other configurations of the input / output panel 3556, refer to the configuration of the input / output panel 3551. can.

[0139] Configuration Example 7. The input / output panel 3557 shown in FIG. It has a liquid crystal element that operates in a nt) mode.

[0140] The common electrode 3522 faces the pixel electrode 3523 via a layer 3524 containing a liquid crystal material. In addition, a wiring 3526 is provided so as to overlap with the common electrode 3522. The wiring 3526 is, for example, for electrically connecting blocks not shown in FIG. In addition, a liquid crystal display (LCD) may be provided between the common electrode 3522 and the pixel electrode 3523. The layer 3524 includes a material. The sensor electrode 3529 and the pixel electrode 3523 include The sensor electrode 3529 and the pixel electrode 3523 are made of the same material. It can be formed in a process.

[0141] FIG. 16(B) is a schematic diagram showing the structure of wiring, etc., of the input / output panel 3557 shown in FIG. 16(A). FIG.

[0142] A part of the electric field formed between the sensor electrode 3529 and the sensor electrode 3527 is indicated by a dashed line 35 63 (see FIG. 16B). The touch sensor according to one embodiment of the present invention crosses this electric field. The object to be detected 3564 can be detected. 3527 corresponds to a pair of electrodes of the capacitive sensor unit 3515 (see FIG. 1(A)). In addition, a part of the wiring 3526 and a part of the common electrode 3522 overlap with the pixel electrode 3523. In order to avoid complication of the drawing, the wiring 3526 and the common electrode 3522 are shown in FIG. It has been omitted.

[0143] For other configurations of the I / O panel 3557, refer to the configuration of the I / O panel 3551. can.

[0144] In addition, the liquid crystal element is TN (T It can be operated in wisted nematic mode.

[0145] Configuration Example 8. The touch panel which is one embodiment of the present invention may include a light-emitting element.

[0146] FIG. 17A is a cross-sectional view showing a schematic structure of a part of a pixel of the input / output panel 3558. The input / output panel 3558 has a light-emitting element. The light-emitting element includes a pixel electrode 3523, an electrode 3572 and a layer 3573 containing a light-emitting material. is provided between the pixel electrode 3523 and the electrode 3572.

[0147] A conductive material that transmits visible light is used for the electrode 3572. This allows light to be taken from the light-emitting element. Or the extracted light can be seen. For example, visible light A conductive material that transmits light can be used for the cathode or anode. A conductive material that transmits visible light is used for the electrode 3572, and the electrode 3572 is used as a cathode (FIG. 17(A) )reference).

[0148] A conductive material that reflects visible light can be used for the pixel electrode 3523. Aluminum, titanium, chromium, nickel, copper, yttrium, zirconium, molybdenum A single layer of metals such as silver, tantalum, or tungsten, or an alloy containing these as the main component. A structure or a laminated structure can be used for the pixel electrode 3523.

[0149] A conductive material that transmits visible light can be used for the electrode 3572. Indium, indium tin oxide, indium zinc oxide, zinc oxide, gallium doped A conductive oxide such as zinc oxide can be used for the electrode 3572. The conductive film will be described separately below.

[0150] The pixel electrode 3523 contains the same material as the sensor electrode 3529. The element electrode 3523 and the sensor electrode 3529 can be formed in the same process. The pixel electrode 3523 is not connected to the sensor electrode 3529. , and has an area that does not overlap with the sensor electrode 3529. For example, it is formed using a shadow mask. The opening is provided with a hole.

[0151] The input / output panel 3558 includes an insulating layer 3576 and a resin layer 3577. 6 reduces the diffusion of water from the resin layer 3577 to the layer 3573 containing the luminescent material.

[0152] The input / output panel 3558 includes a pixel electrode 3523. The pixel electrode 3523 is a transistor. The transistor 3530 is electrically connected to either the source electrode or the drain electrode of the transistor 3530. The other of the source electrode or the drain electrode of the transistor 3530 is electrically connected to a power supply line 3531. The transistor 3530 has a function of controlling a light-emitting element. The transistor 3530 is a driving transistor. The gate electrode is the source electrode or the drain electrode of the switching transistor 3521. The gate electrode of the switching transistor 3521 is electrically connected to the gate The pixel electrode 3523 and the sensor electrode 3529 are electrically connected to the light emitting wiring 3517. It is used as an electrode and detects changes in capacitance, allowing for capacitive detection.

[0153] In order to separate the layers 3573 containing the light-emitting material between the pixels, the pixel electrodes 3523 A partition 3578 is formed between the layer 3573 containing a light-emitting material and the partition 3578. The insulating film is formed by using an inorganic insulating film or an organic insulating film. Silicon nitride film or silicon oxynitride film formed by the SOG method, A silicon film or a silicon oxynitride film can be used. A acrylic resin film or the like can be used.

[0154] Here, when forming the partition wall 3578, the taper can be easily formed by using a wet etching method. If the side wall of the partition wall 3578 is not sufficiently gentle, it may cause a step. Caution is required as the resulting degradation of the EL layer can become a significant problem.

[0155] A partition wall 3578 is also formed in the contact region 3518. The unevenness of the pixel electrode caused by the unevenness of 3518 is filled with the partition wall 3578, This prevents deterioration of the EL layer caused by this.

[0156] A part of the electric field formed between the sensor electrode 3529 and the sensor electrode 3527 is indicated by a dashed line 35 63 (see FIG. 17A). The touch sensor according to one embodiment of the present invention crosses this electric field. The object to be detected 3564 can be detected. 3527 corresponds to a pair of electrodes of the capacitive sensor unit 3515 (see FIG. 1(A)). The driving methods shown in Figures 11, 12, and 13 can be used for an input / output panel.

[0157] The sensor electrode 3527 includes the same material as the electrode 3572. This allows the sensor The electrodes 3527 and 3572 can be formed in the same process. The electrode 3527 can be formed separately from the electrode 3572. By using the sensor electrode 3527 as a common electrode, the sensor electrode 3527 and the sensor electrode 3529 are connected to each other as a capacitance part. The electrode pair may be a single pair.

[0158] Configuration Example 9. The input / output panel 3559 shown in FIG. 18A is a similar panel to the input / output panel 3551 shown in FIG. The sensor electrode 3527 is formed on a substrate 3543. , sandwiched between a sensor electrode 3527 and a layer 3524 containing liquid crystal material.

[0159] By arranging the sensor electrode 3527 in this manner, the sensor electrode 3529 and the sensor electrode Between 3527, electric field lines that the detected object 3564 can easily cross can be formed. As a result, the sensitivity of the capacitive sensor can be improved.

[0160] Configuration Example 10. A conductive film that transmits visible light is formed on the common electrode 352 of the input / output panel 3557 shown in FIG. 2 or the electrode 3572 of the input / output panel 3558 shown in FIG. 17(A). For example, the reflectance for light having a wavelength in the range of 400 nm or more and less than 800 nm is preferably 1% or more. Preferably, the transmittance is 5% or more and less than 100%, and the transmittance is 1% or more, preferably 10% or more and less than 100%. A conductive film having a conductivity of less than 0.00% can be used for the common electrode 3522 or the electrode 3572. do.

[0161] Specifically, a silver (Ag)-containing film having a thickness of 1 nm to 30 nm, preferably 1 nm to 15 nm, is used. A conductive material containing aluminum (Al) or the like is used as the common electrode 3522. Or it can be used for electrode 3572.

[0162] Or a material containing an element selected from indium, tin, zinc, gallium, or silicon. can be used for the common electrode 3522 or the electrode 3572. Specifically, In oxide Zn oxide, In-Sn oxide (also called ITO), In-Sn-Si oxide (IT SO), In-Zn oxide, In-Ga-Zn oxide, etc. are used as the common electrode 3522. or electrode 3572.

[0163] Alternatively, a film containing graphene or graphite may be provided between the common electrode 3522 or the electrode 357. Specifically, a film containing graphene oxide is formed, and the graphene oxide can be used as a A graphene-containing film formed by reducing a graphene-containing film can be used. The reduction can be performed by applying heat or using a reducing agent.

[0164] In addition, a metal oxide such as In-Ga-Zn oxide is used as the common electrode 3522 or the electrode In addition, a nitride insulating film such as a silicon nitride film can be used for the above. A laminated film having a metal oxide upper layer can be used for the common electrode 3522 or the electrode 3572. It is possible to thermally diffuse nitrogen or hydrogen from the nitride insulating film into the metal oxide. This can increase the carrier density. It can be made into an oxide conductor (OC).

[0165] Or, the thickness is 30 nm to 500 nm or 100 nm to 400 nm. The common electrode 3522 or the electrode 3572 may be made of an oxide conductor (OC). .

[0166] In addition, a conductive film that transmits visible light is formed on the pixel electrode 3523, the sensor electrode 3527, and the sensor electrode 3529, the electrode 3572, or a combination thereof. The display area is formed so as to overlap with any of the electrodes using a conductive film that transmits visible light. As a result, the display light of the display element is reflected by the pixel electrode 3523, the sensor electrode 3524, and the 527, the sensor electrode 3529, and / or the electrode 3572. Alternatively, the user may select the pixel electrode 3523, the sensor electrode 3527, the sensor electrode 3529, Indications may be visible through any or more of the poles 3572.

[0167] Configuration Example 11. The input / output panel 3560 shown in FIG. 18(B) has a transmissive or semi-transmissive liquid crystal element. The input / output panel 3560 includes a backlight BL, which is the same as that of the first embodiment, for example. In this respect, it is different from the input / output panel 3551 described with reference to FIG. The electrode 3522, the pixel electrode 3523A, and the pixel electrode 3523B are all transparent to visible light. do.

[0168] The backlight BL emits light L in the direction of an arrow 3581. Light can be applied to the layer 3524 containing the material. For example, a direct light source or a side light source can be used. A light type light source can be used for the backlight BL.

[0169] The input / output panel 3560 has a functional film 3582. For example, a polarizing plate is attached to the functional film 3582. Although not shown, for example, a liquid crystal material may be inserted between the functional film 3582. Another functional film may be used to sandwich the layer containing the metal oxide.

[0170] A transmissive liquid crystal element having a conductive film capable of transmitting visible light is described in this specification. It can be used for input / output panels that display a wide range of colors. By using a backlight that supplies light in sequence, it is possible to eliminate the need to form a colored film on the liquid crystal element. When all colors of light are supplied simultaneously, white light can be displayed. become.

[0171] For example, reflective liquid crystal elements and polarizers can be used in the input / output panel 3560. Specifically, a polarizing plate can be used on the display surface side of a reflective liquid crystal element.

[0172] In addition, the light diffusion plate can be used on the display surface side of any of the input and output panels. The visibility can be improved.

[0173] The input / output panel described in the first to fourth embodiments or this embodiment From the above configuration, you can select and combine two or more as appropriate. For example, The liquid crystal element operates in the VA mode or the liquid crystal element operates in the VA mode. Alternatively, a display element using another display method may be used.

[0174] This embodiment may be implemented in appropriate combination with other embodiments described in this specification. can be done.

[0175] (Embodiment 6) In this embodiment, an example of a method for driving a touch panel according to one embodiment of the present invention will be described with reference to the drawings. and explain.

[0176] [Example of sensor detection method] In FIG. 9(A), a passive matrix touch sensor is used, in which only capacitance is provided at the intersection of wiring. The structure of the touch sensor using the active matrix with transistors and capacitors has been shown. An active matrix touch sensor is also possible. 1 shows an example of a sensor circuit included in the sensor.

[0177] The sensor circuit includes a capacitor 1503, a transistor 1511, a transistor 1512, and a transistor A signal G2 is applied to the gate of the transistor 1513. A voltage VRES is applied to one of the source and drain, and the other is applied to one electrode and and the gate of the transistor 1511. The transistor 1511 has a source Or one of the drains is electrically connected to one of the source and drain of the transistor 1512. The transistor 1512 has a gate to which a signal G1 is applied, and the other to which a voltage VSS is applied. The other of the source and drain is electrically connected to the signal line ML. A voltage VSS is applied to the electrodes.

[0178] Next, the operation of the sensor circuit will be described. First, the transistor 1513 is turned on as the signal G2. When a potential is applied to turn on the transistor 1511, the gate of the transistor 1511 is connected. A potential corresponding to the voltage VRES is applied to the node n. Then, the transistor By applying a potential that turns off the transistor 1513, the potential of the node n is maintained.

[0179] Next, the mutual capacitance of the capacitor 1503 changes due to the proximity or contact of a detection object such as a finger. Accordingly, the potential of the node n changes from VRES.

[0180] The read operation applies a potential to the signal G1 to turn on the transistor 1512. The current flowing through the transistor 1511 in response to the potential of the node n, that is, the current flowing through the signal line ML By detecting this current, the proximity or contact of the object to be detected can be detected. This can be done.

[0181] The transistors 1511, 1512, and 1513 are channel It is preferable to use a transistor in which an oxide semiconductor is used for a semiconductor layer in which a hole is formed. In particular, an oxide semiconductor is used for a semiconductor layer forming a channel of the transistor 1513. This makes it possible to hold the potential of node n for a long period of time, and VR The frequency of the operation of resupplying ES (refresh operation) can be reduced.

[0182] [Example of a display device driving method] FIG. 25(A) is a block diagram showing an example of a configuration of a display device. The gate driving circuit GD, the source driving circuit SD, and the pixel pix are shown in FIG. Gate lines x_1 to x_m (m is a natural number) electrically connected to the gate drive circuit GD are ), source lines y_1 to y_n (n is a natural number) electrically connected to the source driver circuit SD Correspondingly, the pixels pix are given the codes (1,1) to (n,m).

[0183] Next, FIG. 25(B) shows the gate lines and source lines in the display device shown in FIG. 25(A). FIG. 25B is a timing chart of the signal to be applied to the device for each frame period. The diagram shows two cases: when the data signal is rewritten and when the data signal is not rewritten. In FIG. 25(B), periods such as blanking periods are not taken into consideration.

[0184] When the data signal is rewritten every frame period, the gate lines x_1 to x_m are In the horizontal scanning period 1H during which the scanning signal is at H level, A data signal D is applied to the column source lines y_1 to y_n.

[0185] When the data signal is not rewritten every frame period, the gate lines x_1 to x_m are In the horizontal scanning period 1H, the scanning signal to the source lines y_1 to y_n of each column is stopped. Stop providing data signals.

[0186] In particular, a driving method that does not rewrite data signals every frame period uses transistors that the pixels have. This is effective when an oxide semiconductor is used as a stanium oxide in a semiconductor layer in which a channel is formed. A transistor using an oxide semiconductor is a transistor using a semiconductor such as silicon. Therefore, it is possible to reduce the off-current by a factor of 1. It is possible to hold the data signal written in the previous period without rewriting the data signal. For example, the pixel gradation can be maintained for 1 second or more, preferably 5 seconds or more. .

[0187] In addition, polycrystalline silicon is used as a semiconductor layer in which a channel is formed as a transistor included in a pixel. When applying this method, it is necessary to increase the size of the storage capacitance of the pixel in advance. The larger the storage capacitance, the longer the gradation of the pixel can be maintained. The size of the storage capacitor depends on the leakage current of the transistor and display element electrically connected to the storage capacitor. For example, the storage capacitance per pixel should be set to 5 fF or more and 5 pF or less. Preferably, the capacitance is between 10 fF and 5 pF, and more preferably between 20 fF and 1 pF. The data signal is not rewritten every frame period. Instead, the data signal written in the previous period is For example, the pixel count can be held for a period of several frames or several tens of frames. It is possible to maintain the gradation.

[0188] [Example of a display device and a touch sensor driving method] 26(A) to (D) show an example of the touch sensor described in FIG. 9(A) and (B), When the display devices described in FIG. 25(A) and (B) are driven for 1 second, FIG. 26(A) is a diagram for explaining the operation of the display device during the following frame period. The frame period of the touch sensor is 16.7 ms (frame frequency: 60 Hz), The frame period is 16.7 ms (frame frequency: 60 Hz).

[0189] In the touch panel of the present embodiment, the display device and the touch sensor operate independently of each other. Therefore, the touch detection period can be performed in parallel with the display period. As shown in the figure, the frame period of both the display device and the touch sensor is set to 16.7 ms (frame The frame frequency of the touch sensor and the display device can be set to 60Hz. For example, as shown in FIG. 26B, one frame period of the display device is The frame period of the touch sensor is set to 8.3 ms (frame frequency: 120 Hz). It can also be set to 16.7 ms (frame frequency: 60 Hz). One frame period of the display device may be set to 33.3 ms (frame frequency: 30 Hz).

[0190] The display device is also configured to be switchable in frame frequency, so that the frame rate can be changed when displaying moving images. Increase the frame rate (for example, 60Hz or higher or 120Hz or higher) when displaying still images. To do this, reduce the frame frequency (for example, 60Hz or less, 30Hz or less, or 1Hz or less). This reduces the power consumption of the display device. The frame frequency can be switched between standby and when a touch is detected. It is okay to do so.

[0191] The touch panel in the present embodiment rewrites data signals in the display device. By holding the data signal rewritten in the previous period without changing the display device, Therefore, as shown in FIG. 26(C), Then, set the frame period of the display device to 1 sec. (frame frequency: 1 Hz) and tap The frame period of the sensor can be set to 16.7 ms (frame frequency: 60 Hz). Cut.

[0192] In addition, when the touch panel according to the present embodiment is driven as shown in FIG. Therefore, as shown in FIG. 26(D), When the sensor detects the proximity or contact of the object to be detected, the data on the display device is You can also rewrite the signals.

[0193] Here, if a data signal of the display device is rewritten during the sensing period of the touch sensor, When the display device is driven, noise is transmitted to the touch sensor, which reduces the sensitivity of the touch sensor. Therefore, especially in the case of a display device, the rewriting period of a data signal may be decreased. It is preferable to drive the touch sensor so that the period between the touch sensor and the sensing period is shifted.

[0194] In FIG. 27A, rewriting of a data signal of a display device and sensing of a touch sensor are performed. FIG. 27B shows an example in which the data signals of the display device are rewritten alternately. This shows an example in which the touch sensor is sensed once for every two operations. Not limited to this, the touch sensor is sensed once every three or more rewrite operations. This may also be configured.

[0195] In addition, a transistor applied to a pixel of a display device has an oxide film in a semiconductor layer in which a channel is formed. When a nitride semiconductor is used, the off-current can be significantly reduced, making it possible to write data signals. Specifically, the frequency of data signal rewriting can be sufficiently reduced. After the data signal is written, a sufficiently long pause can be provided before the data signal is rewritten. The pause period can be, for example, 0.5 seconds or more, 1 second or more, or 5 seconds or more. The upper limit of the pause period depends on the capacitance connected to the transistor and the leakage current of the display element, etc. For example, the time limit may be 1 minute or less, 10 minutes or less, 1 hour or less, or 1 day or less. It is possible.

[0196] FIG. 27C shows an example in which the data signal of the display device is rewritten once every 5 seconds. In FIG. 27C, the display device rewrites the data signal and then writes the next data signal. Before the rewrite operation, there is a pause period during which the operation is stopped. The touch sensor operates at a frame frequency of iHz (i is equal to or greater than the frame frequency of the display device, here 0. As shown in FIG. 27(C), the touch sensor can be driven at a frequency of 100 Hz or higher. Sensing should be performed during rest periods, not during periods when the display device's data signals are being rewritten. This is preferable because it is possible to improve the sensitivity of the touch sensor. As shown in the figure, when the data signal of the display device is rewritten and the touch sensor is sensed at the same time, , the driving signal can be simplified.

[0197] In addition, during a pause period when the data signal of the display device is not rewritten, the signal to the drive circuit is It is possible to stop the supply of only the power supply potential, or to stop the supply of the power supply potential in addition to the power supply potential. Power consumption can be reduced.

[0198] The touch panel of one embodiment of the present invention has a display device and a touch sensor mounted on two flexible substrates. This allows the display device and the touch sensor to be placed very close to each other. At this time, noise generated when the display device is driven is easily transmitted to the touch sensor, causing the touch sensor to malfunction. However, by applying the driving method exemplified in this embodiment, This makes it possible to realize a touch panel that is both thin and has high detection sensitivity.

[0199] (Embodiment 7) In this embodiment, the transistor 3521 included in the input / output panel of one embodiment of the present invention is taken as an example. One configuration of a transistor having this function will be described.

[0200] The transistor 3521 has two gate electrodes, whether it is a bottom gate type or a top gate type. It may also be of a type having such a structure.

[0201] FIG. 21A illustrates a bottom-gate transistor 151. The transistor 151 has the following features: A conductive film 106 on a substrate 102, an insulating film 104 on the conductive film 106, and a gold film on the insulating film 104. A metal oxide film 108, conductive films 120a and 120b on the metal oxide film 108, and a metal oxide The insulating film 118 on the film 108 and the conductive films 120a and 120b, and the insulating film 12 on the insulating film 118 2. and

[0202] In the transistor 151, the conductive film 106 functions as a gate electrode. The conductive film 120a functions as a source electrode, and the conductive film 120b functions as a drain electrode. It has functions.

[0203] The conductive film 114 is formed over the insulating film 122 and serves as a gate electrode of the transistor 151. When electrically connecting with the conductive film 106, as shown in FIG. 21(B), An opening can be provided in 118 and the insulating film 122 to allow connection.

[0204] FIG. 21C illustrates a top-gate transistor 152. The transistor 152 has the following features: An insulating film 104 on a substrate 102, a metal oxide film 108 on the insulating film 104, and a metal oxide film 108, an insulating film 110, a conductive film 112 on the insulating film 110, an insulating film 104, a metal oxide The insulating film 116 is disposed on the conductive film 112. It has a veneer 118.

[0205] The metal oxide film 108 is in a region where the conductive film 112 does not overlap and where the insulating film 116 is in contact with the metal oxide film 108. The region 108n is a region in which the metal oxide film 108 described above is The region 108n is in contact with the insulating film 116, which is made of nitrogen. Therefore, the nitrogen or hydrogen in the insulating film 116 is added to the region 108n. When added, the carrier density increases and the material becomes n-type.

[0206] The transistor 152 is provided on the insulating film 118 on the insulating film 116 and on the insulating films 116 and 118. a conductive film 120a electrically connected to the region 108n through the opening 141a; Through an opening 141b provided in the insulating films 116 and 118, the region 108n is electrically connected. and a conductive film 120b connected to the conductive film 120.

[0207] In the transistor 152, the conductive film 112 functions as a gate electrode. The conductive film 120a functions as a source electrode, and the conductive film 120b functions as a drain electrode. It has functions.

[0208] The conductive film 114 is formed over the insulating film 122 and serves as a gate electrode of the transistor 152. When electrically connecting with the conductive film 112, as shown in FIG. 21(D), An opening can be provided in 118 and the insulating film 122 to allow connection.

[0209] In the transistor 3521 shown in FIG. 1(A) and FIG. 1(B), a gate electrode 351 6 is a conductive film 106 in the transistor 151 and a conductive film 107 in the transistor 152 A membrane 112 may be used.

[0210] The above describes a transistor having one gate electrode. The following describes two transistors 150. This is a combination of the configuration of transistor 151 and transistor 152.

[0211] FIG. 22A is a top view of a transistor 150, and FIG. 22B is a top view of a transistor 150 shown in FIG. 22(C) is a cross-sectional view taken along dashed line Y1-Y2 in FIG. 22(A). FIG.

[0212] The transistor 150 shown in FIGS. 22A, 22B, and 22C includes a conductive film 106 on a substrate 102 and , an insulating film 104 on the conductive film 106, a metal oxide film 108 on the insulating film 104, An insulating film 110 on the metal film 108, a conductive film 112 on the insulating film 110, an insulating film 104, a metal The insulating film 116 is formed over the oxide film 108 and the conductive film 112 .

[0213] The metal oxide film 108 has the same structure as that shown in the other embodiments. The transistor 150 shown in A, B, and C includes a conductive film 106 and an opening 143. Yes.

[0214] The opening 143 is provided in the insulating films 104 and 110. The conductive film 106 is also provided with the opening 143. 43. Thus, the conductive film 106 and the conductive film 112 are electrically connected to each other. The same potential is applied to the conductive film 106 and the conductive film 12. Alternatively, the opening 143 may not be provided, and the conductive film 112 may be provided with a different potential. For example, the conductive film 106 may be formed of a light-shielding material. This can suppress light from below being irradiated onto the metal oxide film 108.

[0215] In addition, in the case of forming the transistor 150, the conductive film 106 is a first gate electrode (bottom The conductive film 112 functions as a second gate electrode (also referred to as a top gate electrode). The insulating film 104 functions as a first gate insulating film. The insulating film 110 functions as a second gate insulating film.

[0216] The conductive film 106 is made of the same material as the conductive films 112, 120a, and 120b described above. In particular, the conductive film 106 can be formed of a material containing copper to reduce resistance. For example, the conductive film 106 may be a titanium nitride film. A laminated structure in which a copper film is provided on a tungsten film or a copper film is provided on a conductive film 120a, 120b, b is a laminated structure in which a copper film is provided on a titanium nitride film, a tantalum nitride film, or a tungsten film; In this case, it is preferable to use transistor 150 as a pixel transistor and a driver transistor of the display device. By using the conductive film 106 and the conductive film 120 in either one or both of the driving transistors, a, and the parasitic capacitance occurring between the conductive film 106 and the conductive film 120b Therefore, the conductive film 106, the conductive film 120a, and the conductive film 12 0b as the first gate electrode, source electrode, and drain electrode of the transistor 150; In addition to being used as a power supply line, a signal supply line, or a connection line for a display device, It can also be used for lines, etc.

[0217] In this manner, the transistor 150 shown in FIGS. 22(A), 22(B), and 22(C) has a metal oxide film 10 The transistor 150 has a structure in which conductive films functioning as gate electrodes are provided above and below the transistor 8. As shown, a semiconductor device according to one embodiment of the present invention may be provided with a plurality of gate electrodes.

[0218] A conductive film 114 is formed on the insulating film 122 and serves as a gate electrode of a transistor 150. When electrically connecting the conductive film 112 or the conductive film 106, As shown in 21(D), openings can be provided in the insulating films to allow connection.

[0219] As shown in FIG. 22(B) and (C), the metal oxide film 108 is used as a first gate electrode. and a conductive film 112 that functions as a second gate electrode. They are positioned opposite each other and are sandwiched between two conductive films that function as gate electrodes.

[0220] The length of the conductive film 112 in the channel width direction is The metal oxide film 108 is longer than the length of the insulating film 110 in the entire channel width direction. The conductive film 112 and the conductive film 106 are covered with the insulating film 104. 1 and the insulating film 110 is connected through an opening 143. One of the side surfaces of the channel width direction of the gate electrode 08 faces the conductive film 112 with the insulating film 110 interposed therebetween. is.

[0221] In other words, the conductive film 106 and the conductive film 112 are formed in the openings provided in the insulating films 104 and 110. A region that is connected at the portion 143 and is located outside the side end of the metal oxide film 108 has.

[0222] With such a structure, the metal oxide film 108 included in the transistor 150 can be A conductive film 106 functioning as a first gate electrode and a conductive film 107 functioning as a second gate electrode It can be electrically surrounded by the electric field of the membrane 112. Like the transistor 150, A metal in which a channel region is formed by the electric field of the first gate electrode and the second gate electrode. The device structure of the transistor that electrically surrounds the oxide film 108 is called the Surrounded This can be called the S-channel structure.

[0223] Since the transistor 150 has an S-channel structure, the conductive film 106 or the conductive An electric field is effectively applied to the metal oxide film 108 to induce a channel through the film 112. This improves the current driving capability of the transistor 150 and provides high on-current characteristics. In addition, since the on-current can be increased, In addition, the transistor 150 can be miniaturized. Since the conductive film 108 is surrounded by the conductive film 106 and the conductive film 112, The mechanical strength of the transistor 150 can be increased.

[0224] In the channel width direction of the transistor 150, the opening 14 of the metal oxide film 108 An opening different from opening 143 may be formed on the side where no opening 3 is formed.

[0225] As shown in the transistor 150, a transistor is provided with a semiconductor film sandwiched therebetween. In the case where a pair of gate electrodes are connected to each other, a signal A is input to one gate electrode and a signal B is input to the other gate electrode. A fixed potential Vb may be applied to the electrodes. A signal A may be applied to one gate electrode and a signal B may be applied to the other gate electrode. A signal B may be applied to the gate electrode. A fixed potential Va is applied to one of the gate electrodes. The other gate electrode may be applied with a fixed potential Vb.

[0226] The signal A is, for example, a signal for controlling the conductive state or the non-conductive state. It is a digital signal that takes on two types of potential: potential V1 or potential V2 (V1>V2). For example, the potential V1 may be a high power supply potential, and the potential V2 may be a low power supply potential. The signal A may be an analog signal.

[0227] The fixed potential Vb is, for example, a potential for controlling the threshold voltage VthA of a transistor. The fixed potential Vb may be the potential V1 or the potential V2. In this case, the fixed potential This is preferable because it is not necessary to provide a separate potential generating circuit for generating Vb. The fixed potential Vb may be different from the potential V1 or the potential V2. In some cases, the threshold voltage VthA can be increased. As a result, the gate-source voltage V By reducing the drain current when gs is 0V, the leakage current of the circuit having the transistor is reduced. For example, the fixed potential Vb may be lower than the low power supply potential. In some cases, the threshold voltage VthA can be lowered by increasing the fixed potential Vb. As a result, the drain current is improved when the gate-source voltage Vgs is at a high power supply potential, and the transistor For example, the fixed potential Vb can be reduced to a low potential. It may be higher than the source potential.

[0228] The signal B is, for example, a signal for controlling the conductive state or the non-conductive state. It is a digital signal that takes on two types of potential: potential V3 or potential V4 (V3>V4). For example, the potential V3 may be a high power supply potential, and the potential V4 may be a low power supply potential. Signal B may be an analog signal.

[0229] If signal A and signal B are both digital signals, signal B has the same digital value as signal A. In this case, the on-current of the transistor is improved, and the transistor is enabled. In this case, the operation speed of the circuit that performs the signal A may be improved. The potential V2 may be different from the potentials V3 and V4 in the signal B. For example, The gate insulating film corresponding to the gate to which signal B is input corresponds to the gate to which signal A is input. When the gate insulating film is thicker than the gate insulating film, the potential amplitude of signal B (V3-V4) is set to the potential amplitude of signal A ( V1-V2) to prevent the transistor from turning on or off. The effect of signal A on the conduction state is equal to the effect of signal B on the conduction state. It may be possible.

[0230] If signal A and signal B are both digital signals, signal B will have a different digital value than signal A. In this case, the transistors can be controlled by signals A and B separately. For example, a transistor can be made n-channel, which may allow for higher performance. If the channel type, signal A is at potential V1 and signal B is at potential V3 only. When the signal is in a conductive state or when signal A is at potential V2 and signal B is at potential V4, If only one transistor is in a non-conducting state, then a single transistor can function as a NAND circuit, a NOR circuit, etc. In addition, the signal B is a signal for controlling the threshold voltage VthA. For example, the signal B may be a period during which the circuit having the transistor is in operation and The signal B may be a signal whose potential is different from that during the period when the circuit is not operating. In this case, signal B is as large as signal A. In some cases, the potential may not be switched very frequently.

[0231] If signal A and signal B are both analog signals, signal B is an analog input with the same potential as signal A. Signal A is an analog signal that multiplies the potential of signal A by a constant, or the potential of signal A is increased by a constant. In this case, the on-current of the transistor increases. This can improve the operating speed of a circuit that has transistors. In this case, the transistors are controlled by signals A and B. can be performed separately, resulting in higher functionality.

[0232] Signal A may be a digital signal and signal B an analog signal. Alternatively, signal A may be an analog signal and signal B a digital signal.

[0233] When a fixed potential is applied to both gate electrodes of a transistor, the transistor acts as a resistor element. In some cases, a transistor can function as an equivalent element. In the case of a transistor type, the fixed potential Va or the fixed potential Vb can be increased (or decreased). In some cases, the effective resistance of the resistor can be lowered (higher). By making Vb high (low), the gain obtained by a transistor with only one gate is In some cases, an effective resistance lower (higher) than that expected may be obtained.

[0234] In addition, an insulating film may be further formed on the transistor 150. The transistor 150 shown in FIG. 1C has an insulating film on the conductive films 120a and 120b and the insulating film 118. It has a veneer 122.

[0235] The insulating film 122 has a function of planarizing unevenness due to transistors and the like. The material 122 may be an insulating material and may be made of an inorganic or organic material. Inorganic materials include silicon oxide film, silicon oxynitride film, silicon nitride oxide film, silicon nitride film, etc. Examples of the organic material include silicon film, aluminum oxide film, and aluminum nitride film. Examples of the material include a photosensitive resin material such as an acrylic resin or a polyimide resin.

[0236] Note that this embodiment mode can be appropriately combined with other embodiment modes described in this specification. .

[0237] (Embodiment 8) In this embodiment, a configuration of an information processing device according to one embodiment of the present invention will be described with reference to FIGS. The following explanation will be given with reference to the above.

[0238] 19 and 20 are diagrams illustrating the configuration of an information processing device according to an embodiment of the present invention. 9(A) is a block diagram of an information processing device, and FIG. 19(B) to FIG. 19(E) are diagrams showing the information processing device. 20(A) to 20(E) are perspective views for explaining the configuration of an information processing device. FIG.

[0239] <Information processing device> The information processing device 5200B described in this embodiment includes a calculation device 5210 and an input / output device 5211. 220 (see FIG. 19(A)).

[0240] The arithmetic unit 5210 has a function of receiving operation information, and generates image information based on the operation information. It has the function of supplying

[0241] The input / output device 5220 includes a display unit 5230, an input unit 5240, a detection unit 5250, and a communication unit 52 90, having a function for supplying operation information and a function for receiving image information. The device 5220 has a function of providing detection information, a function of providing communication information, and a function of providing communication information. The device has a function to be supplied with

[0242] The input unit 5240 has a function of supplying operation information. For example, the input unit 5240 is an information processing The control device 5200B supplies operation information based on the operation of the user of the control device 5200B.

[0243] Specifically, keyboards, hardware buttons, pointing devices, and touch sensors , a voice input device, a gaze input device, etc. can be used for the input unit 5240.

[0244] The display unit 5230 has a display panel and a function for displaying image information. A display panel described in the above embodiment can be used as the display portion 5230.

[0245] The detection unit 5250 has a function of supplying detection information. For example, It has the function of detecting the surrounding environment and providing the detection information.

[0246] Specifically, it detects illuminance sensors, imaging devices, attitude detection devices, pressure sensors, human presence sensors, etc. It can be used in part 5250.

[0247] The communication unit 5290 has a function of receiving communication information and a function of supplying communication information. It has the function of connecting to other electronic devices or communication networks via wired or wired communication. has functions such as wireless intranet communication, telephone communication, and short-range wireless communication.

[0248] <Configuration example 1 of information processing device> For example, an outer shape along a cylindrical pillar or the like can be applied to the display unit 5230 (see FIG. 19). (See (B)). It also has a function to change the display method according to the illuminance of the usage environment. It has a function to detect the presence of people and change the display content. It can be installed on a pillar, or it can display advertisements or information, etc. It can be used for digital signage, etc.

[0249] <Configuration example 2 of information processing device> For example, it has a function to generate image information based on the trajectory of a pointer used by a user ( See Figure 19(C). Specifically, the diagonal length is 20 inches or more, preferably 40 inches. A display panel of 55 inches or more, more preferably 15 inches or more, can be used. Multiple display panels can be arranged to form one display area. This allows the use of multiple screens, for example, as an electronic whiteboard, It can be used for bulletin boards, electronic signs, etc.

[0250] <Configuration example 3 of information processing device> For example, it has a function to change the display method according to the illuminance of the usage environment (see FIG. 19(D)). ) This can, for example, reduce the power consumption of a smartwatch. For example, the image can be scanned so that it can be used suitably even in an environment with strong external light, such as outdoors on a sunny day. It can be displayed on the smart watch.

[0251] <Configuration example 4 of information processing device> The display unit 5230 has, for example, a curved surface that curves gently along the side surface of the housing (see FIG. 19( Alternatively, the display unit 5230 may include a display panel, and the display panel may include, for example, a front This allows you to display the image on the front and side of your mobile phone. Image information can be displayed on the sides and top instead.

[0252] <Configuration example 5 of information processing device> For example, it has a function to change the display method according to the illuminance of the usage environment (see FIG. 20(A)). ) This can reduce the power consumption of smartphones. The image can be captured on a smartphone so that it can be used effectively even in bright outdoor environments. It can be displayed on the

[0253] <Configuration example 6 of information processing device> For example, it has a function to change the display method according to the illuminance of the usage environment (see FIG. 20(B)). This allows the unit to be used effectively even when exposed to strong outdoor light on a sunny day. The video can then be displayed on a television system.

[0254] <Configuration example 7 of information processing device> For example, it has a function to change the display method according to the illuminance of the usage environment (see FIG. 20(C)). This allows the device to be used effectively even in environments with strong external light, such as outdoors on a clear day. Thus, the image can be displayed on the tablet computer.

[0255] <Configuration example 8 of information processing device> For example, it has a function to change the display method according to the illuminance of the usage environment (see FIG. 20(D)). This allows for optimal viewing even in environments with strong external light, such as outdoors on a clear day. Thus, the subject can be displayed on the digital camera.

[0256] <Configuration example 9 of information processing device> For example, it has a function to change the display method according to the illuminance of the usage environment (see FIG. 20(E)). This allows the device to be used effectively even in environments with strong external light, such as outdoors on a clear day. Thus, the image can be displayed on a personal computer.

[0257] Note that this embodiment mode can be appropriately combined with other embodiment modes described in this specification. .

[0258] (Embodiment 9) In this embodiment, a structure of an electronic device according to one embodiment of the present invention will be described with reference to FIGS. Reveal.

[0259] <Electronic equipment> FIG. 23 shows a foldable electronic device 920. The electronic device 920 shown in FIG. The display unit 921 includes a housing 921a, a housing 921b, a display unit 922, a hinge 923, and the like. 22 is incorporated in housing 921a and housing 921b.

[0260] The housings 921a and 921b are rotatably connected to each other via a hinge 923. 920 shows a state in which the housings 921a and 921b are closed, and a state in which they are open as shown in FIG. This makes it easy to carry and easy to use. The large display area provides excellent visibility.

[0261] In addition, the hinge 923 is configured such that when the housings 921a and 921b are opened, the angle between them is It is preferable to have a locking mechanism to prevent the angle from exceeding a predetermined angle. For example, the angle at which the door is locked (will not open any further) must be greater than 90 degrees and less than 180 degrees. Typically, the angle is 90 degrees, 120 degrees, 135 degrees, 150 degrees, or 175 degrees. This can improve convenience, safety, and reliability. .

[0262] The electronic device 920 is made up of a housing 921a and a housing 921b connected by a hinge 923. A flexible display unit 922 is provided.

[0263] When the housing 921a and the housing 921b of the electronic device 920 are opened, the display unit 922 It is held in a curved shape. For example, the radius of curvature is preferably 1 mm to 50 mm. Preferably, the display unit 922 is held in a state where the distance is between 5 mm and 30 mm. A part of the display unit 922 is a continuous pixel array extending from the housing 921a to the housing 921b. are arranged, and a curved surface can be displayed.

[0264] The hinge 923 has the above-mentioned locking mechanism, so that the display unit 922 is prevented from being subjected to excessive force. Therefore, the display unit 922 can be prevented from being damaged. Electronic devices can be realized.

[0265] The display unit 922 functions as a touch panel and can be operated by a finger, a stylus, etc. can.

[0266] A wireless communication module is provided in either the housing 921a or the housing 921b, and an interface -Internet, LAN (Local Area Network), Wi-Fi (registered trademark) It is possible to transmit and receive data via a computer network such as a.

[0267] The display unit 922 is preferably configured with one flexible display. This allows for continuous, uninterrupted display between the housings 921a and 921b. Each of the housings 921a and 921b may be provided with a display. The configuration may be such that

[0268] This embodiment may be appropriately combined with at least a part of other embodiments described in this specification. It can be implemented together.

[0269] For example, in the present specification, when it is explicitly stated that X and Y are connected, In this case, X and Y are electrically connected, and X and Y are functionally connected. The case where X and Y are directly connected is also considered to be disclosed in the present specification. Therefore, the present invention is not limited to a specific connection relationship, for example, a connection relationship shown in a drawing or a sentence. Any connections other than those shown in the drawings or text shall be deemed to be included in the drawings or text. do.

[0270] Here, X and Y are objects (e.g., devices, elements, circuits, wiring, electrodes, terminals, conductive films, layers, etc.). , etc.).

[0271] An example of a direct connection between X and Y is a circuit that allows electrical connection between X and Y. The elements to be considered (e.g., switches, transistors, capacitance elements, inductors, resistance elements, When a resistor (such as an electrode, display element, light-emitting element, or load) is not connected between X and Y, The elements that allow electrical connection between X and Y (e.g., switches, transistors, capacitors, etc.) elements, inductors, resistors, diodes, display elements, light-emitting elements, loads, etc.) , X and Y are connected.

[0272] An example of a case where X and Y are electrically connected is The elements to be considered (e.g., switches, transistors, capacitance elements, inductors, resistance elements, One or more elements (such as an electrode, a display element, a light-emitting element, or a load) can be connected between X and Y. It is possible. The switch has a function that allows it to be turned on and off. A switch can be in a conductive state (on state) or a non-conductive state (off state) and can either pass current or not. The switch has the function of controlling whether or not current flows. When X and Y are electrically connected, This includes the case where Y is directly connected.

[0273] An example of a case where X and Y are functionally connected is a case where a functional connection between X and Y is possible. Circuits that perform the above functions (for example, logic circuits (inverters, NAND circuits, NOR circuits, etc.), signal conversion conversion circuits (DA conversion circuits, AD conversion circuits, gamma correction circuits, etc.), potential level conversion circuits ( power supply circuits (voltage boost circuits, voltage drop circuits, etc.), level shifter circuits that change the potential level of signals, etc.) , voltage sources, current sources, switching circuits, amplifier circuits (which can increase the signal amplitude or current amount, etc.) circuits, operational amplifiers, differential amplifier circuits, source follower circuits, buffer circuits, etc.), signal generation One or more devices (such as a memory circuit, a control circuit, etc.) can be connected between X and Y. For example, even if another circuit is inserted between X and Y, the signal output from X If X is transmitted to Y, then X and Y are considered to be functionally connected. When X and Y are functionally connected, there are cases where X and Y are directly connected and cases where X and Y are functionally connected. and the case where they are electrically connected to each other.

[0274] In addition, if it is explicitly stated that X and Y are electrically connected, are electrically connected (i.e., there is another element or circuit between X and Y) When X and Y are functionally connected (i.e., when X and Y are connected), (When there is a functional connection between X and Y via another circuit in between) and when X and Y are directly connected (i.e., when X and Y are connected without any other element or circuit between them) is deemed to be disclosed in the present specification. If it is explicitly stated that it is connected, The same contents are deemed to be disclosed in the present specification and the like.

[0275] For example, the source (or the first terminal, etc.) of the transistor is connected via Z1 (or The drain (or second terminal, etc.) of the transistor is electrically connected to Z 2 (or not), it may be electrically connected to Y, or the source of the transistor (or the first terminal, etc.) is directly connected to a part of Z1, and another part of Z1 is directly connected to X. The drain (or second terminal, etc.) of the transistor is directly connected to a part of Z2. and another part of Z2 is directly connected to Y, It is possible to do so.

[0276] For example, "X and Y and the source (or first terminal, etc.) and drain (or second terminal, etc.) of a transistor The terminals of the transistor (or the first terminal, etc.) are electrically connected to each other, and X, the source of the transistor (or the first terminal, etc.) 1 terminal, etc.), the drain (or second terminal, etc.) of the transistor, and Y. "The source (or the third) of the transistor is connected to the The drain (or second terminal, etc.) of the transistor is electrically connected to X. The transistor source (or first terminal, etc.) is electrically connected to Y, and the transistor source (or first terminal, etc.) is electrically connected to X. The drain (or second terminal, etc.) of the transistor, Y, is electrically connected in this order. " Alternatively, "X is the source (or first terminal, etc.) of a transistor. The transistor is electrically connected to Y via a drain (or a second terminal, etc.) and a transistor is electrically connected to X via a drain (or a second terminal, etc.). The source (or first terminal, etc.) of a resistor, the drain (or second terminal, etc.) of a transistor ), Y is provided in this connection order. By using a simple expression method and specifying the order of connections in the circuit configuration, Distinguish between the source (or first terminal, etc.) and the drain (or second terminal, etc.) of a transistor. The technical scope can be determined based on the above.

[0277] Or, as another way of expressing it, for example, "the source (or first terminal, etc.) of a transistor is electrically connected to X through at least a first connection path, and the first connection path is , the second connection path does not have a second connection path, and the second connection path is a transistor The source (or first terminal, etc.) of the transistor and the drain (or second terminal, etc.) of the transistor The first connection path is a path via Z1, and the second connection path is a path between the transistor The drain (or second terminal, etc.) of the capacitor is electrically connected to Y through at least a third connection path. The third connection path does not include the second connection path, and the third connection path The connection path is the path through Z2. The source (or the first terminal, etc.) of the resistor is connected to the resistor via Z1 by at least the first connection path. and X is electrically connected to the first connection path, and the first connection path does not have a second connection path; The second connection path includes a connection path through a transistor, and the second connection path includes a drain of the transistor. (or the second terminal, etc.) is connected to Y via Z2 by at least a third connection path. The third connection path does not have the second connection path. Alternatively, the source (or the first terminal, etc.) of the transistor may be at least The first electrical path is electrically connected to X through Z1, and the first electrical path is The primary path does not have a second electrical path, and the second electrical path is a From the source (or first terminal, etc.) to the drain (or second terminal, etc.) of the transistor The drain (or second terminal, etc.) of the transistor is connected to at least a third The third electrical path is electrically connected to Y through Z2. , the fourth electrical path is not included, and the fourth electrical path is a drain of the transistor (or second terminal, etc.) to the source (or first terminal, etc.) of the transistor. Using the same expression as these examples, the circuit configuration By defining the connection path in Distinguish between the first terminal (or the second terminal, etc.) and the drain (or the second terminal, etc.) to determine the technical scope. can be done.

[0278] Note that these expression methods are merely examples, and the present invention is not limited to these expression methods. , Y, Z1, and Z2 are objects (e.g., devices, elements, circuits, wiring, electrodes, terminals, conductive films, layer, etc.).

[0279] In addition, the circuit diagram shows independent components as if they are electrically connected to each other. Even if the components are the same, one component may have the functions of multiple components. For example, when a part of the wiring also functions as an electrode, one conductive film has the function of the wiring and The electrode functions as both components. The term "electrochemically connected" refers to a case where one conductive film has the functions of multiple components. This also falls within the scope of the above. [Explanation of symbols]

[0280] 104 Insulating film 110 Insulating film 116 Insulating film 118 Insulating film 122 Insulating film 150 Transistors 151 Transistor 152 Transistor 922 Display section 1503 capacity 1511 Transistor 1512 Transistor 1513 Transistor 3503 capacity 3503A capacity 3503B capacity 3510 Wiring 3511 Wiring 3513 Liquid crystal elements 3514 Capacity section 3515 Capacitive Sensor Unit 3516 Gate electrode 3517 Gate wiring 3518 Contact Area 3519 Source Wiring 3521 Transistor 3522 Common electrode 3522A Common Electrode 3522B Common electrode 3523 Pixel electrode 3523A Pixel electrode 3523B Pixel electrode 3524 Layer containing liquid crystal material 3525 Color Filter 3526 Wiring 3527 Sensor Electrode 3529 Sensor Electrode 3530 Transistor 3531 Power line 3551 I / O Panel 3552 I / O Panel 3553 I / O Panel 3554 I / O Panel 3555 I / O Panel 3556 I / O Panel 3557 I / O Panel 3558 I / O Panel 3559 I / O Panel 3560 I / O Panel 3561 Orientation film 3562 Orientation film 3572 Electrode 3573 Layer containing luminescent material 3578 Bulkhead 3581 Arrow 5230 Display section

Claims

1. A first insulating layer; a semiconductor layer having a region located above the first insulating layer and having a channel formation region of a transistor; a first conductive layer having a region in contact with a top surface of the semiconductor layer and functioning as one of a source electrode and a drain electrode of the transistor; a second insulating layer having a region overlying the first conductive layer; a second conductive layer having a region located above the second insulating layer and having a region that functions as a common electrode; a third insulating layer having a region overlying the second conductive layer; a third conductive layer having a region in contact with an upper surface of the third insulating layer and a region functioning as a pixel electrode; a fourth conductive layer having a region in contact with an upper surface of the third insulating layer and having the same material as the third conductive layer; a fifth conductive layer having a region located below the second insulating layer and functioning as a touch sensor wiring; the fourth conductive layer has a region in contact with the fifth conductive layer, the fourth conductive layer has a region overlapping with the second conductive layer in a region where the fifth conductive layer and the second conductive layer overlap, the fourth conductive layer has a region overlapping with a sixth conductive layer having a region electrically connected to the semiconductor layer and functioning as a source wiring; the fifth conductive layer has a region extending in a first direction; In a plan view, a channel length direction of the transistor is a direction along the first direction.

2. A first insulating layer; a semiconductor layer having a region located above the first insulating layer and having a channel formation region of a transistor; a first conductive layer having a region in contact with a top surface of the semiconductor layer and functioning as one of a source electrode and a drain electrode of the transistor; a second insulating layer having a region overlying the first conductive layer; a second conductive layer having a region located above the second insulating layer and having a region that functions as a common electrode; a third insulating layer having a region overlying the second conductive layer; a third conductive layer having a region in contact with an upper surface of the third insulating layer and a region functioning as a pixel electrode; a fourth conductive layer having a region in contact with an upper surface of the third insulating layer and having the same material as the third conductive layer; a fifth conductive layer having a region located below the second insulating layer and functioning as a touch sensor wiring; the second conductive layer has a region overlapping the semiconductor layer, the third conductive layer has a region overlapping the semiconductor layer, the fourth conductive layer has a region in contact with the fifth conductive layer, the fourth conductive layer has a region overlapping with the second conductive layer in a region where the fifth conductive layer and the second conductive layer overlap, the fourth conductive layer has a region overlapping with a sixth conductive layer having a region electrically connected to the semiconductor layer and functioning as a source wiring; the fifth conductive layer has a region extending in a first direction; In a plan view, a channel length direction of the transistor is a direction along the first direction.

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