Laser processing machine

Abstract

To provide a galvanomirror capable of vibrating at high frequencies while reducing heat evolution.SOLUTION: An incident plane S11 has a reflective coating that reflects a laser beam. A widest part 32WP is located closer to a second end face 322 than the center of a length from a first end face 321 to the second end face 322. A first side end face 323 and a second side end face 324 have a widthwise spacing that increases from each other as they move from the first end face 321 toward the widest part 32WP. A third side end face 325 and a fourth side end face 326 have a widthwise spacing that increases from each other as they move from the second end face 322 toward the widest part 32WP. The thickest part 327 is located at the center in the width direction. The first side part 328 and the second side part 329 have a plate thickness that becomes thinner from the thickest part 327 toward both ends in the width direction. A galvanomirror 32S is formed of a glass material that allows the laser beam which have entered into the inside to pass therethrough.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a galvanometer mirror and a laser processing machine. [Background technology]

[0002] Patent Documents 1 to 3 describe laser processing machines that process a workpiece by vibrating a laser beam emitted from a processing head using a galvanometer mirror of a galvanometer scanner unit. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 5388948 [Patent Document 2] Patent No. 6272587 [Patent Document 3] Patent No. 6748150 Summary of the Invention [Problem to be solved by the invention]

[0004] In order to make the laser beam oscillate at a high frequency, the galvanometer mirror is generally made of silicon (Si) or silicon carbide (SiC), which can increase its rigidity. The surface of the galvanometer mirror is coated with a reflective coating to reflect the incident laser beam. In recent years, the laser beam emitted by a laser oscillator has become higher in power. Even if the reflectivity of the laser beam due to the reflective coating is, for example, 99.9%, the light absorption rate of silicon or silicon carbide is almost 100%, so the galvanometer mirror will generate heat due to the high-power laser beam that is not reflected by the reflective coating and passes through it. If the galvanometer mirror is made larger, the heat generation of the galvanometer mirror can be reduced.

[0005] On the other hand, there is a demand for the vibration frequency of the galvanometer mirror to be high, at 1 kHz or more. Increasing the size of the galvanometer mirror increases the inertia, making it difficult to vibrate the galvanometer mirror at the required high frequency. Therefore, there is a demand for a galvanometer mirror that can suppress heat generation and vibrate at a high frequency, and a laser processing machine equipped with a galvanometer scanner unit having such a galvanometer mirror. [Means for solving the problem]

[0006] A first aspect of one or more embodiments includes a laser beam incidence plane that is coated with a reflective coating that reflects a laser beam in a predetermined wavelength band, a first end face that is located on an end side that is connected to a tip end of a shaft of a galvanometer motor and that is connected to the incidence plane, a second end face that is located on the opposite side of the first end face along the direction of the axis and that is connected to the incidence plane, a widest part that is located on the second end face side rather than the center of the length from the first end face to the second end face and that has the widest width in a direction perpendicular to the axis, and both ends in the width direction of the first end face and both ends in the width direction of the widest part are connected, and the distance between them in the width direction increases from the first end face toward the widest part. the first and second side end faces each connecting both ends in the width direction of the second end face and both ends in the width direction of the widest portion, the distance between them in the width direction increasing from the second end face to the widest portion, a thickest portion located in the center in the width direction and having the greatest thickness, and first and second side portions located on both sides of the thickest portion in the width direction and having a thickness decreasing from the thickest portion to both ends in the width direction, the galvanometer mirror being formed of a glass material that transmits a laser beam that is incident on the incident plane and is not reflected by the reflective coating but penetrates the reflective coating to enter inside.

[0007] A second aspect of one or more of the embodiments provides a laser processing machine comprising: a collimation lens that converts a diverging laser beam into collimated light; a galvanometer scanner unit that receives the laser beam emitted from the collimation lens and vibrates the laser beam to be irradiated onto a workpiece to be processed; and a processing head having a focusing lens that focuses the laser beam emitted from the galvanometer scanner unit and irradiates the workpiece, wherein the galvanometer scanner unit has a first galvanometer mirror that reflects the incident laser beam, a first galvanometer motor that drives to rotate the first galvanometer mirror, a second galvanometer mirror that receives the laser beam reflected by the first galvanometer mirror and reflects the incident laser beam, and a second galvanometer motor that drives to rotate the second galvanometer mirror, and the galvanometer mirror of the first aspect is used as the first and second galvanometer mirrors. Effect of the Invention

[0008] According to the galvanometer mirror and laser processing machine according to one or more embodiments, heat generation in the galvanometer mirror can be suppressed, and the galvanometer mirror can be vibrated at a high frequency. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a diagram illustrating a laser processing machine according to one or more embodiments. [Diagram 2] FIG. 2 is a perspective view showing a galvano scanner unit included in the laser processing machine according to one or more embodiments. [Diagram 3] FIG. 3 is a perspective view of the galvanometer mirror according to the first embodiment as viewed from behind. [Figure 4] FIG. 4 is a front view of the galvanometer mirror according to the first embodiment. [Diagram 5] FIG. 5 is a rear view of the galvanometer mirror according to the first embodiment. [Figure 6A]FIG. 6A is a plan view showing the chamfering of four corners to form a galvano mirror according to the first embodiment from a rectangular sapphire glass plate. [Figure 6B] FIG. 6B is a side view showing partial thickness chamfering for forming a galvano mirror according to the first embodiment from a rectangular sapphire glass plate. [Figure 7] FIG. 7 is a perspective view showing a mounting structure of the galvanometer mirror to the shaft of the galvanometer motor according to the first embodiment. [Figure 8] FIG. 8 is a perspective view of the galvanometer mirror according to the second embodiment as viewed from behind. [Figure 9] FIG. 9 is a front view of the galvanometer mirror according to the second embodiment. [Figure 10] FIG. 10 is a rear view of the galvanometer mirror according to the second embodiment. [Figure 11] FIG. 11 is a side view showing partial chamfering of the thickness for forming a galvanometer mirror according to the second embodiment from a rectangular parallelepiped synthetic quartz plate. [Figure 12] FIG. 12 is a perspective view of a modification of the galvanometer mirror according to the second embodiment, as viewed from behind. [Figure 13] FIG. 13 is a front view of a modified example of the galvanometer mirror according to the second embodiment. [Figure 14] FIG. 14 is a rear view of a modified example of the galvanometer mirror according to the second embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, a galvanometer mirror and a laser processing machine according to one or more embodiments will be described with reference to the accompanying drawings. First, an example of the overall configuration of a laser processing machine according to one or more embodiments will be described. In FIG. 1, a laser processing machine 100 includes a laser oscillator 10, a process fiber 12, a laser processing unit 20, an NC device 50, and an assist gas supply device 80.

[0011] The laser oscillator 10 generates and emits a laser beam, and the process fiber 12 transmits the laser beam emitted from the laser oscillator 10 to the laser processing unit 20. Typically, the laser oscillator 10 is a fiber laser oscillator that emits a laser beam with a wavelength of 1060 nm to 1080 nm. The laser oscillator 10 is not limited to a fiber laser oscillator. The NC device 50 is an example of a control device that controls each part of the laser processing machine 100.

[0012] The laser processing unit 20 has a processing table 21 on which the sheet metal W, which is the workpiece to be processed, is placed, a gate-shaped X-axis carriage 22, a Y-axis carriage 23, a collimator unit 30 fixed to the Y-axis carriage 23, and a processing head 35. The X-axis carriage 22 is configured to be movable in the X-axis direction on the processing table 21. The Y-axis carriage 23 is configured to be movable in the Y-axis direction perpendicular to the X-axis on the X-axis carriage 22. The X-axis carriage 22 and the Y-axis carriage 23 function as a moving mechanism that moves the processing head 35 along the surface of the sheet metal W in the X-axis direction, the Y-axis direction, or any composite direction of the X-axis direction and the Y-axis direction.

[0013] Instead of moving the processing head 35 along the surface of the metal sheet W, the processing head 35 may be configured to be fixed in position and the metal sheet W may be moved. The laser processing machine 100 may be provided with a movement mechanism that moves the processing head 35 relative to the surface of the metal sheet W.

[0014] A nozzle 36 having a circular opening 36a at its tip and emitting a laser beam from the opening 36a is attached to the processing head 35. The laser beam emitted from the opening 36a of the nozzle 36 is irradiated onto the metal sheet W. An assist gas supply device 80 supplies nitrogen, oxygen, or the like as an assist gas to the processing head 35. When the metal sheet W is processed, the assist gas is sprayed onto the metal sheet W from the opening 36a.

[0015] 2, the collimator unit 30 includes a collimation lens 301, a galvanometer scanner unit 302, and a bend mirror 303. The collimation lens 301 converts the divergent laser beam emitted from the process fiber 12 into parallel light (collimated light). The galvanometer scanner unit 302 includes a galvanometer motor 33a (first galvanometer motor) and a galvanometer motor 33b (second galvanometer motor) that drive the galvanometer mirror 32a (first galvanometer mirror) and the galvanometer mirror 32b (second galvanometer mirror) to rotate them within a predetermined angle range, respectively.

[0016] The collimated laser beam emitted from the collimation lens 301 is incident on the galvanometer mirror 32a, which reflects the incident laser beam. The laser beam reflected by the galvanometer mirror 32a is incident on the galvanometer mirror 32b, which reflects the incident laser beam. The laser beam reflected by the galvanometer mirror 32b is incident on the bend mirror 303. The bend mirror 303 reflects the laser beam emitted from the galvanometer scanner unit 302 downward in the Z-axis direction, which is perpendicular to the X-axis and Y-axis.

[0017] 2, the galvanometer motors 33a and 33b are fixed to a support member (not shown), and the positions of the galvanometer mirrors 32a and 32b are set in the space of the collimator unit 30. The galvanometer mirrors 32a and 32b may be collectively referred to as galvanometer mirror 32, and the galvanometer motors 33a and 33b may be collectively referred to as galvanometer motor 33.

[0018] The processing head 35 is provided with a focusing lens 304 that focuses the laser beam reflected by the bend mirror 303 and irradiates the metal sheet W with the laser beam.

[0019] The laser processing machine 100 is centered so that the laser beam emitted from the opening 36a of the nozzle 36 is located at the center of the opening 36a. In a standard state, the laser beam is emitted from the center of the opening 36a. The galvanometer scanner unit 302 functions as a beam vibration mechanism that vibrates the laser beam, which travels through the processing head 35 and is emitted from the opening 36a, within the opening 36a. The NC device 50 controls the galvanometer motor 33a to rotate the galvanometer mirror 32a, and controls the galvanometer motor 33b to rotate the galvanometer mirror 32b.

[0020] The galvano scanner unit 302 can displace the laser beam irradiated to the metal sheet W in the X-axis direction, the Y-axis direction, or any composite direction of the X-axis direction and the Y-axis direction under the control of the NC device 50. This allows the galvano scanner unit 302 to vibrate the laser beam in a direction parallel to the traveling direction of the processing head 35 (laser beam), in a direction perpendicular to the traveling direction, or so that the beam spot draws a circle.

[0021] Next, the configuration of the galvanometer mirror 32 according to one or more embodiments will be described in detail. The galvanometer mirror 32 according to the first embodiment is formed using sapphire glass as the glass material. The galvanometer mirror 32 according to the first embodiment will be referred to as galvanometer mirror 32S. The galvanometer mirror 32 according to the second embodiment is formed using synthetic quartz as the glass material. The galvanometer mirror 32 according to the second embodiment will be referred to as galvanometer mirror 32Q (or 32Q'). Any of the galvanometer mirrors 32S, 32Q, and 32Q' is used as the galvanometer mirrors 32a and 32b in FIG. 2. The galvanometer mirrors 32S, 32Q, and 32Q' will be described in detail in order.

[0022] First Embodiment 3 to 5 are respectively a perspective view, a front view, and a rear view of the galvanometer mirror 32S as seen from the rear. Sapphire glass is formed by artificially crystallizing high-purity aluminum oxide to a large size. The galvanometer mirror 32S is shaped as shown in Figs. 3 to 5 by chamfering multiple faces of a rectangular sapphire glass plate, as described later.

[0023] 3 to 5, a laser beam is incident on the incident plane S11. The incident plane S11 is provided with a reflective coating made of a dielectric multilayer film that reflects a laser beam in a predetermined wavelength band. The incident plane S11 has a reflectance of 99.5% or more for a laser beam with a wavelength of 1040 nm to 1150 nm. Therefore, the incident plane S11 reflects 99.5% or more of the incident laser beam.

[0024] As described later, the lower end of the galvanometer mirror 32S in Fig. 3 is an end that is connected to the tip of a shaft 331 (see Fig. 7) of the galvanometer motor 33. A first end face 321 located on the lower end side is connected to the incident plane S11. A second end face 322 located on the opposite side to the first end face 321 along the direction of the shaft 331 is also connected to the incident plane S11. The direction connecting the first end face 321 and the second end face 322 is defined as the length direction.

[0025] As shown in FIG. 4, the length from the first end face 321 to the second end face 322 is L32. The widest part 32WP is the part that is widest in the width direction perpendicular to the length direction. The width of the widest part 32WP is W32. The length L32 and the width W32 have a relationship of L32>W32. As an example, the length L32 is about 33 mm, and the width W32 is about 22 mm. The widest part 32WP is located on the second end face 322 side of the center of the length L32 of the galvanometer mirror 32S. The entire range of the widest part 32WP in the length direction is located on the second end face 322 side of the center of the length L32.

[0026] 3 to 5, the first side end face 323 and the second side end face 324 respectively connect both ends in the width direction of the first end face 321 and both ends in the width direction of the widest part 32WP. The first side end face 323 and the second side end face 324 are spaced apart in the width direction from the first end face 321 toward the widest part 32WP. The third side end face 325 and the fourth side end face 326 respectively connect both ends in the width direction of the second end face 322 and both ends in the width direction of the widest part 32WP. The third side end face 325 and the fourth side end face 326 are spaced apart in the width direction from the second end face 322 toward the widest part 32WP.

[0027] The galvanometer mirror 32S has a thickest portion 327 at its center in the width direction. As an example, the thickness of the thickest portion 327 is 3 mm. In the galvanometer mirror 32S, the thickest portion 327 is formed over the entire range from the first end face 321 to the second end face 322. The surface of the thickest portion 327 is a flat surface S12. The first side portion 328 and the second side portion 329 are provided on both sides of the thickest portion 327 in the width direction. The first side portion 328 and the second side portion 329 have a thinner thickness from the thickest portion 327 toward both ends in the width direction. The surfaces of the first side portion 328 and the second side portion 329 are flat surfaces S13 and S14, respectively.

[0028] The galvanometer mirror 32S having the above-mentioned shape can be formed by chamfering the four hatched corners C1 to C4 of a rectangular sapphire glass plate 320S, as shown in FIG. 6A, and by chamfering the hatched regions T1 and T2 of the sapphire glass plate 320S in the thickness direction, as shown in FIG. 6B.

[0029] Of the laser beams incident on the incident plane S11, a small portion that is not reflected by the reflective coating passes through the reflective coating and enters the inside of the galvanometer mirror 32S. Since the light absorption rate of sapphire glass, which is the glass material forming the galvanometer mirror 32S, is less than 1%, the galvanometer mirror 32S transmits more than 99% of the laser beam that has entered the inside. Therefore, the galvanometer mirror 32S hardly generates heat due to the laser beam that passes through without being reflected by the reflective coating. Therefore, since heat generation is suppressed even if the beam diameter of the collimated light emitted from the collimation lens 301 is narrowed, there is no need to enlarge the galvanometer mirror 32S, and it can be made as small as possible.

[0030] The flat surfaces S12 to S14 are preferably coated with an anti-reflection coating made of a dielectric multilayer film. The flat surfaces S12 to S14 on which the anti-reflection coating is applied have a transmittance of 98% or more for a laser beam having a wavelength of 1040 nm to 1150 nm.

[0031] 7, a fixing part 332 for fixing an end part of the galvanometer mirror 32S on the first end face 321 side is provided at the tip part of the shaft 331 of the galvanometer motor 33. The end part of the galvanometer mirror 32S on the first end face 321 side is inserted between a pair of protruding walls of the fixing part 332 and is fixed to the fixing part 332 by being bonded with an adhesive. In this way, the galvanometer mirror 32S is connected to the shaft 331 of the galvanometer motor 33, and the galvanometer mirror 32S rotates integrally with the shaft 331 due to the rotation of the shaft 331.

[0032] According to the galvanometer mirror 32S of the first embodiment, the inertia can be significantly reduced compared to the inertia of the rectangular parallelepiped sapphire glass plate 320S by chamfering the four corners C1 to C4 and the thickness direction of the regions T1 and T2. According to the galvanometer mirror 32S of the first embodiment, the heat generation can be suppressed, so the galvanometer mirror 32S can be made smaller, and the inertia can be reduced along with the miniaturization. Therefore, if the galvanometer mirror 32S of the first embodiment is used as the galvanometer mirror 32, the laser processing machine 100 can vibrate the galvanometer mirror 32 at a high frequency. The high frequency is, for example, 1 kHz or more.

[0033] Incidentally, when the galvanometer mirror 32S is rotated by the galvanometer motor 33 within a predetermined angle range, if the galvanometer mirror 32S is deformed by the vibration of the galvanometer mirror 32S, the beam profile of the laser beam emitted from the galvanometer mirror 32S deteriorates. If the beam profile of the laser beam deteriorates, the luminance of the laser beam on the surface of the sheet metal W decreases. The luminance of the laser beam on the surface of the sheet metal W is set to 100% when the laser beam emitted from the galvanometer mirror 32S is irradiated onto the sheet metal W in a state in which the galvanometer motor 33 does not drive the galvanometer mirror 32S. It is preferable that the thickness of the thickest part 327 is set to a thickness such that at least 98% of the luminance is obtained when the laser beam emitted from the galvanometer mirror 32S is irradiated onto the sheet metal W in a state in which the galvanometer motor 33 drives the galvanometer mirror 32S and the galvanometer mirror 32S is deformed.

[0034] Galvanometer mirror 32S has a shape in which four corners C1 to C4 and regions T1 and T2 in the thickness direction are chamfered, and is therefore more easily deformed than rectangular sapphire glass plate 320S. If the thickness of thickest part 327 is set to a thickness that can obtain a laser beam brightness of 98% or more as described above, deformation of galvanometer mirror 32S does not substantially pose a problem.

[0035] <Second embodiment> 8 to 10 are respectively a perspective view, a front view, and a rear view of the galvanometer mirror 32Q as seen from the rear. The galvanometer mirror 32Q is shaped as shown in Figs. 8 to 10 by chamfering a plurality of faces of a rectangular parallelepiped synthetic quartz plate, as described later. In the second embodiment, parts that are substantially the same as those in the first embodiment are given the same reference numerals, and their description may be omitted.

[0036] 8 to 10, a laser beam is incident on the incident plane S21. The incident plane S21 is provided with a reflective coating made of a dielectric multilayer film that reflects a laser beam in a predetermined wavelength band. The incident plane S21 has a reflectance of 99.5% or more for a laser beam with a wavelength of 1040 nm to 1150 nm. Therefore, the incident plane S21 reflects 99.5% or more of the incident laser beam. The first end face 321 and the second end face 322 are connected to the incident plane S21.

[0037] 9, the length from the first end face 321 to the second end face 322 is L32, and the width of the widest part 32WP is W32. As with the galvanometer mirror 32S, the length L32 and the width W32 have a relationship of L32>W32. As an example, the length L32 is about 33 mm, and the width W32 is about 22 mm. The widest part 32WP is located closer to the second end face 322 than the center of the length L32 of the galvanometer mirror 32Q.

[0038] 8 to 10, the first side end face 323 and the second side end face 324 respectively connect both ends in the width direction of the first end face 321 and both ends in the width direction of the widest part 32WP. The first side end face 323 and the second side end face 324 are spaced apart in the width direction from the first end face 321 toward the widest part 32WP. The third side end face 325 and the fourth side end face 326 respectively connect both ends in the width direction of the second end face 322 and both ends in the width direction of the widest part 32WP. The third side end face 325 and the fourth side end face 326 are spaced apart in the width direction from the second end face 322 toward the widest part 32WP.

[0039] The galvanometer mirror 32Q has a thickest portion 327 at its center in the width direction. As an example, the thickness of the thickest portion 327 is about 4.4 mm. In the galvanometer mirror 32Q, the thickest portion 327 is not formed over the entire range from the first end face 321 to the second end face 322, but is formed over the range from the first end face 321 to the widest portion 32WP within the range from the first end face 321 to the second end face 322. The end of the thickest portion 327 on the second end face 322 side is located at a predetermined position in the length direction of the widest portion 32WP. The surface of the thickest portion 327 is a flat surface S22.

[0040] The first side portion 328 and the second side portion 329 are provided on both sides in the width direction of the thickest portion 327. The thicknesses of the first side portion 328 and the second side portion 329 become thinner from the thickest portion 327 toward both ends in the width direction. The surfaces of the first side portion 328 and the second side portion 329 are planes S23 and S24, respectively.

[0041] Galvano mirror 32Q has inclined tip 330 formed on the second end face 322 side. Inclined tip 330, the thickness decreases from the end of thickest part 327 on the second end face 322 side toward second end face 322. The surface of inclined tip 330 forms plane S25.

[0042] The galvanometer mirror 32Q having the above-mentioned shape can be formed by chamfering the rectangular parallelepiped synthetic quartz plate 320Q shown in Fig. 11 in the same manner as the sapphire glass plate 320S shown in Fig. 6A and Fig. 6B, and further chamfering the hatched region T3 in the thickness direction. That is, the galvanometer mirror 32Q can be formed by chamfering the four corners C1 to C4 and the regions T1 to T3 in the thickness direction of the rectangular parallelepiped synthetic quartz plate 320Q.

[0043] Of the laser beams incident on the incident plane S21, a small portion that is not reflected by the reflective coating passes through the reflective coating and enters the inside of the galvanometer mirror 32Q. Since the optical absorption rate of synthetic quartz, which is the glass material forming the galvanometer mirror 32Q, is nearly 0%, the galvanometer mirror 32Q transmits nearly 100% of the laser beam that enters the inside. Therefore, the galvanometer mirror 32Q generates almost no heat due to the laser beam that passes through without being reflected by the reflective coating. Therefore, there is no need to enlarge the galvanometer mirror 32Q, and a minimum size is sufficient.

[0044] The flat surfaces S22 to S25 are preferably coated with an anti-reflection coating made of a dielectric multilayer film. The flat surfaces S22 to S25 on which the anti-reflection coating is applied have a transmittance of 98% or more for a laser beam having a wavelength of 1040 nm to 1150 nm.

[0045] The attachment structure of galvanometer mirror 32Q to shaft 331 of galvanometer motor 33 is the same as the attachment structure of galvanometer mirror 32S to shaft 331 of galvanometer motor 33 shown in Fig. 7. Galvanometer mirror 32Q is fixed to fixed portion 332 by inserting an end portion on the first end face 321 side between a pair of protruding walls of fixed portion 332 and adhering with an adhesive. Galvanometer mirror 32Q is connected to shaft 331 of galvanometer motor 33, and galvanometer mirror 32Q rotates integrally with shaft 331 as shaft 331 rotates.

[0046] According to the galvanometer mirror 32Q of the second embodiment, the inertia can be significantly reduced compared to the inertia of the rectangular parallelepiped synthetic quartz plate 320Q by chamfering the four corners C1 to C4 and the thickness direction of the regions T1 to T3. According to the galvanometer mirror 32Q of the second embodiment, the heat generation can be suppressed, so the galvanometer mirror 32Q can be made smaller, and the inertia can be reduced along with the miniaturization. Therefore, if the galvanometer mirror 32Q of the second embodiment is used as the galvanometer mirror 32 in the laser processing machine 100, the galvanometer mirror 32 can be vibrated at a high frequency. The high frequency is, for example, 1 kHz or more.

[0047] In the galvanometer mirror 32Q according to the second embodiment, the luminance of the laser beam on the surface of the metal sheet W is also set to 100% when the laser beam emitted from the galvanometer mirror 32Q is irradiated onto the metal sheet W while the galvanometer motor 33 is not driving the galvanometer mirror 32Q. It is preferable that the thickness of the thickest part 327 is set to such a thickness that a luminance of at least 98% is obtained when the laser beam emitted from the galvanometer mirror 32Q is irradiated onto the metal sheet W while the galvanometer motor 33 drives the galvanometer mirror 32Q and the galvanometer mirror 32Q is deformed.

[0048] The reason why the galvanometer mirror 32Q, whose glass material is synthetic quartz, has the inclined tip 330, which is chamfered in the thickness direction in the region T3, is as follows. When the galvanometer mirror 32 is vibrated, the galvanometer mirror 32Q, whose glass material is synthetic quartz, is more likely to deform than the galvanometer mirror 32S, whose glass material is sapphire glass. Therefore, there are cases where the thickness of the thickest part 327 of the galvanometer mirror 32Q needs to be made thicker than that of the galvanometer mirror 32S. When the thickness of the thickest part 327 of the galvanometer mirror 32Q is made thicker than that of the thickest part 327 of the galvanometer mirror 32S, it is preferable to provide the inclined tip 330 in order to reduce the inertia.

[0049] <Modification of the second embodiment> Figures 12 to 14 show a galvanometer mirror 32Q' which is a modified example of the galvanometer mirror 32Q according to the second embodiment. Figures 12 to 14 are a perspective view, a front view, and a rear view, respectively, of the galvanometer mirror 32Q' as seen from behind. In the galvanometer mirror 32Q', parts that are substantially the same as those in the galvanometer mirror 32Q are denoted by the same reference numerals, and descriptions thereof may be omitted.

[0050] As shown in FIG. 12 and FIG. 14, in the galvano mirror 32Q', the thickest part located at the center in the width direction is a trapezoidal thickest part 327'. The surface of the thickest part 327' is a trapezoidal flat surface S22'. As the rectangular thickest part 327 and flat surface S22 in the galvano mirror 32Q are changed to the trapezoidal thickest part 327' and flat surface S22', the first side part 328 and the second side part 329 are respectively a first side part 328' and a second side part 329', and the inclined tip part 330 is an inclined tip part 330'. The surfaces of the first side part 328' and the second side part 329' are respectively flat surfaces S23' and S24', and the surface of the inclined tip part 330' is a flat surface S25'.

[0051] The galvanometer mirror 32Q' having the above-mentioned shape can be formed by chamfering the four corners of the rectangular parallelepiped synthetic quartz plate 320Q in the same manner as the galvanometer mirror 32Q, and by chamfering a portion of the thickness to form a first side portion 328', a second side portion 329', and an inclined tip portion 330'. The attachment structure of the galvanometer mirror 32Q' to the shaft 331 of the galvanometer motor 33 is the same as the attachment structure of the galvanometer mirror 32Q to the shaft 331 of the galvanometer motor 33.

[0052] According to galvanometer mirror 32Q', when length L32, width W32, and thickness of thickest portion 327' are the same as length L32, width W32, and thickness of thickest portion 327 in galvanometer mirror 32Q, the inertia can be made smaller than that in galvanometer mirror 32Q.

[0053] The present invention is not limited to one or more of the above-described embodiments, and various modifications are possible without departing from the scope of the present invention. In the galvano mirror 32S whose glass material is sapphire glass, the inclined tip 330 that is chamfered in the thickness direction of the region T3 is not provided, but the inclined tip 330 may be provided to further reduce the inertia. In addition, in the galvano mirror 32Q or 32Q' whose glass material is synthetic quartz, the inclined tip 330 or 330' may not be provided. [Explanation of symbols]

[0054] 10 Laser Oscillator 12 Process Fiber 20 Laser Processing Unit 21 Processing table 22 X-axis carriage 23 Y-axis carriage 30 Collimator unit 35 Processing head 32a, 32b, 32Q, 32Q', 32S Galvanometer Mirror 32WP widest part 33a, 33b Galvano motor 36 Nozzles 36a aperture 50 NC device 80 Assist gas supply device 100 Laser processing machine 301 Collimation Lens 302 Galvano Scanner Unit 303 Bend Mirror 304 Focusing Lens 321 First end face 322 Second End Face 323 First side end surface 324 Second side end face 325 Third side end face 326 Fourth side end face 327,327' Thickest part 328,328' First side 329,329' Second side 330,330' Beveled tip S11,S21 Incident plane S12~S14,S22~S25,S22'~S25' plane W Sheet metal (work material)

Claims

1. a laser beam incidence plane having a reflective coating for reflecting a laser beam of a predetermined wavelength band; a first end surface located on an end side connected to a tip end of a shaft of a galvanometer motor and connected to the incident plane; a second end surface located on the opposite side of the first end surface along the axis direction and connected to the incidence plane; a widest portion that is located closer to the second end face than the center of the length from the first end face to the second end face and has a maximum width in a direction perpendicular to the axis; first and second side end faces that connect both ends in a width direction of the first end face to both ends in the width direction of the widest portion, and a distance between the first and second side end faces in the width direction increases from the first end face toward the widest portion; third and fourth side end surfaces that connect both ends of the second end surface in the width direction to both ends of the widest portion in the width direction, and the distance between them in the width direction increases from the second end surface toward the widest portion; A thickest part having the thickest plate thickness and located in the center part in the width direction; First and second side portions located on both sides of the thickest portion in the width direction, the thickness of which decreases from the thickest portion toward both ends in the width direction; Equipped with The reflector is made of a glass material that transmits the laser beam that is incident on the incident plane and is not reflected by the reflective coating but penetrates the reflective coating and enters the interior. Galvanometer mirror.

2. 2. The galvanometer mirror according to claim 1, wherein the thickest portion is formed over the entire range from the first end face to the second end face.

3. The thickest portion is formed in a range from the first end surface to the widest portion within a range from the first end surface to the second end surface, The plate thickness of the plate member is further reduced from an end of the thickest plate portion on the second end face side toward the second end face.

2. The galvanometer mirror according to claim 1.

4. 3. The galvanometer mirror according to claim 2, wherein the glass material is sapphire glass.

5. 4. The galvanometer mirror according to claim 3, wherein said glass material is synthetic quartz.

6. a collimation lens for converting a diverging laser beam into a collimated beam; a galvano scanner unit into which the laser beam emitted from the collimation lens is incident and which vibrates the laser beam to be irradiated onto a workpiece to be processed; a processing head having a focusing lens for focusing the laser beam emitted from the galvano scanner unit and irradiating the laser beam onto the workpiece; Equipped with The galvano scanner unit includes: a first galvanometer mirror that reflects an incident laser beam; a first galvanometer motor that drives the first galvanometer mirror to rotate; a second galvanometer mirror on which the laser beam reflected by the first galvanometer mirror is incident and which reflects the incident laser beam; a second galvanometer motor that drives the second galvanometer mirror to rotate; having The first and second galvanometer mirrors are each a galvanometer mirror as defined in any one of claims 1 to 5. Laser processing machine.

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