Device having asymmetric dual end effector robot arm and related method

Abstract

To provide a robot having an asymmetric dual end effector robot arm.SOLUTION: In a substrate processing system, a robot 10 comprises: a first arm that includes an unequal-link link mechanism 20 having an upper arm 31 and a lower arm 32, and a first end effector 22; a second arm that includes an equal-link link mechanism 24 having an upper arm 33 and a lower arm 34, and a second end effector 26; and a driving unit 16 that moves the first arm and the second arm. The first end effector is asymmetric to the second end effector. The first end effector is angled relative to the second end effector such that a support part of a first substrate 14a on the first end effector is not positioned over or under a support part of a second substrate 14b on the second end effector. A device further comprises a controller configured to control the cooperative operation of the first arm with the second arm.SELECTED DRAWING: Figure 1A

Description

[Technical field]

[0001] The exemplary but non-limiting embodiments disclosed herein relate generally to robotic arms, and more particularly to robots having two or more arms in which the end effectors on the arms are offset relative to one another.

[0002] Processes for the manufacture of semiconductor, LED, solar, MEMS, or other devices utilize robotics and other forms of automation to transport substrates and carriers associated with substrates to and from storage, processing, or other locations. Such substrate transport may include moving individual substrates or groups of substrates with a single arm carrying one or more substrates, or with multiple arms, each carrying one or more substrates. For example, much of the manufacturing associated with semiconductor manufacturing is performed in a vacuum environment where footprint and volume are at a premium. Furthermore, much of the automated transport is performed to achieve maximum efficiency of substrate movement within a workspace volume. Thus, there is a desire to provide substrate transport automation that utilizes a minimum footprint and workspace volume for a given range of transport applications with maximized movement efficiency. Abstract

[0003] The following summary is intended to be merely exemplary and is not intended to limit the scope of the claims.

[0004] According to one aspect, an exemplary apparatus includes a first arm with an unequal linkage having a first end effector, a second arm with an equal linkage having a second end effector, and a drive unit connected to the first arm and the second arm and configured to move the first arm and the second arm. The first end effector is asymmetric with respect to the second end effector. The first end effector is angled with respect to the second end effector such that a first substrate support on the first end effector is not above or below a second substrate support on the second end effector.

[0005] According to another aspect, an exemplary substrate transport apparatus for transporting at least two substrates includes a lower arm with two links of unequal length and a lower end effector, an upper arm with two links of equal length and an upper end effector, and a drive unit connected to the lower arm and the upper arm, the drive unit configured to rotate and extend the lower arm and the upper arm, the lower end effector being asymmetric and angled with respect to the upper end effector such that a distal end of the lower end effector is not located below a distal end of the upper end effector and such that the distal end of the lower end effector does not move below the distal end of the upper end effector when the lower arm or the upper arm is moved.

[0006] According to another aspect, an exemplary method of transporting a first substrate and a second substrate includes rotating a first arm including a first linkage having a first end effector about a shaft of a drive unit and extending the first linkage relative to a second arm including a second linkage having a second end effector. The first end effector is configured to transport the first substrate. The second end effector is asymmetric and angled relative to the first end effector. The second end effector is configured to transport a second substrate. In a rest position, the first substrate is not located above or below the second substrate. When the first linkage is extended, the first substrate does not move above or below the second substrate.

[0007] According to another aspect, an exemplary method of assembling a substrate transport apparatus includes connecting an upper link of a first linkage arm to a rotatable shaft of a drive unit, connecting a lower link of the first linkage arm to the upper link of the first linkage arm at a first elbow joint, connecting a first end effector to the lower link of the first linkage arm at a first wrist joint, connecting an upper link of a second linkage arm to the rotatable shaft of the drive unit, connecting a lower link of the second linkage arm to the upper link of the second linkage arm at a second elbow joint, and connecting a second end effector to the lower link of the second linkage arm at a second wrist joint, wherein at least the upper link of the first linkage arm and the lower link of the first linkage arm are of unequal length. The first end effector is angled relative to the second end effector such that a first substrate support at a distal end of the first end effector is not above or below a second substrate support at a distal end of the second end effector.

[0008] According to another aspect, an exemplary apparatus includes at least one processor and at least one non-transitory memory including computer program code. The at least one memory and the computer program code are configured to cause the apparatus, by the at least one processor, to at least rotate a first arm including a first linkage having a first end effector about a shaft of a drive unit and extend the first linkage relative to a second arm including a second linkage having a second end effector. The first end effector is configured to carry a first substrate. The second end effector is asymmetric and angled relative to the first end effector. The second end effector is configured to carry a second substrate. In a rest position, the first substrate is not located above or below the second substrate. When the first linkage is extended, the first substrate does not move above or below the second substrate. [Brief description of the drawings]

[0009] The foregoing aspects and other features are explained in the following description taken in conjunction with the accompanying drawings.

[0010] [Figure 1A] FIG. 1 is a perspective view of a robot for moving a substrate, the robot having equal-linkage and unequal-linkage linkage arms, where the end effectors on the arms are arranged in a stacked configuration.

[0011] [Figure 1B] FIG. 1B is a side view of the robot of FIG. 1A.

[0012] [Figure 1C] 1 illustrates an example of substrate movement in a substrate processing system including features as described herein. [Figure 1D] 1 illustrates an example of substrate movement in a substrate processing system including features as described herein.

[0013] [Figure 2A] FIG. 1C is a perspective view of the robotic substrate transport apparatus of FIGS. 1A and 1B showing the stacked end effectors in a rest position.

[0014] [Figure 2B] 2B is a perspective view of the robotic substrate transport apparatus of FIG. 2A showing one end effector moving relative to the other end effector. FIG. [Figure 2C] 2B is a perspective view of the robotic substrate transport apparatus of FIG. 2A showing one end effector moving relative to the other end effector. FIG.

[0015] [Diagram 3] FIG. 2 is a perspective view of a substrate transport apparatus without end effectors stacked.

[0016] [Figure 4] FIG. 4 is a top view of the substrate transport apparatus of FIG.

[0017] [Figure 5A] 4 is a perspective view of the substrate transport apparatus of FIG. 3 in a rest position.

[0018] [Figure 5B] FIG. 5B is a perspective view of the device of FIG. 5A showing extension of the linkage of the unequal links of the device. [Figure 5C] FIG. 5B is a perspective view of the device of FIG. 5A showing extension of the linkage of the unequal links of the device.

[0019] [Figure 6A] 4 is a perspective view of the substrate transport apparatus of FIG. 3 in a rest position.

[0020] [Figure 6B] FIG. 6B is a perspective view of the device of FIG. 6A showing extension of the linkage of the equal links of the device. [Figure 6C] FIG. 6B is a perspective view of the device of FIG. 6A showing extension of the linkage of the equal links of the device.

[0021] [Figure 7] It is a schematic diagram of a conveying device having an asymmetric dual arm, using a non-circular pulley, and in a retracted position.

[0022] [Figure 8A] It is a schematic diagram of the extension of a non-oblique end effector of the conveying device from the retracted position to the extended position. [Figure 8B] It is a schematic diagram of the extension of a non-oblique end effector of the conveying device from the retracted position to the extended position. [Figure 8C] It is a schematic diagram of the extension of a non-oblique end effector of the conveying device from the retracted position to the extended position.

[0023] [Figure 9A] It is a schematic diagram of the extension of the oblique end effector of the conveying device of FIGS. 8A - 8C from the retracted position to the extended position. [Figure 9B] It is a schematic diagram of the extension of the oblique end effector of the conveying device of FIGS. 8A - 8C from the retracted position to the extended position. [Figure 9C] It is a schematic diagram of the extension of the oblique end effector of the conveying device of FIGS. 8A - 8C from the retracted position to the extended position. Detailed Description of the Embodiment

[0024] 1A and 1B, an apparatus for substrate transport may include a robot, generally designated by reference numeral 10. The robot 10 includes a substrate transport apparatus 12 (hereinafter "transport apparatus 12") configured to transport substrates 14a, 14b between, for example, a substrate processing chamber and a load lock. The robot 10 also includes a drive unit 16 (which may include, for example, one or more motors or any other suitable drive means) configured to drive the arm and multiple effectors of the transport apparatus 12, thereby transporting the substrates. As an example, a robot with multiple end effectors is described in U.S. Patent Application Serial No. 15 / 897,374, filed February 15, 2018, entitled "Material-Handling Robot With Multiple End-Effectors," which is incorporated herein by reference in its entirety.

[0025] The transport device 12 comprises a plurality of arms, each of which is extendable and rotatable via a drive unit 16. In an exemplary embodiment, the plurality of arms comprises at least one unequal linkage 20 drivable by a non-circular pulley. The unequal linkage 20 has an upper arm 31 and a lower arm 32, the upper arm 31 being connected to the drive unit 16 at a shoulder and the lower arm 32 being connected to the upper arm 31 at an elbow. A first end effector 22 is connected to the lower arm 32 at a wrist. The first end effector 22 has legs and a substrate support at a distal end of the legs for supporting the lower substrate 14a. The plurality of arms also comprises at least one equal linkage 24, the upper arm 33 being connected to the drive unit at a shoulder and the lower arm 34 being connected to the upper arm 33 at an elbow. A second end effector 26 is connected to the lower arm 34 at a wrist. The second end effector 26 has legs and a substrate support at a distal end of the legs for supporting the upper substrate 14b.

[0026] The first end effector 22 and the second end effector 26 are asymmetric. As shown, the legs of the first end effector 22 are bent or otherwise angled or curved, while the legs of the second end effector 26 are straight. However, in some exemplary embodiments, both the legs of the first end effector 22 and the legs of the second end effector 26 may be bent. The legs of each end effector 22, 26 connect the substrate support to the wrist joint of the end effector with a corresponding link mechanism 20, 24. Here, the legs have a first portion connected to the wrist joint and a second portion connected to the substrate support. In the first end effector 22 with bent legs, the first and second portions are connected to each other at an angle of about 90 degrees to about 120 degrees. As an example, a robot having arms with bent or otherwise angled end effector legs is described in U.S. Pat. No. 9,149,936, entitled "Robot Having Arm With Unequal Link Lengths," issued Oct. 6, 2015, the entirety of which is incorporated herein by reference.

[0027] 1B, the unequal link linkage 20 is positioned at a distance D or greater from the floor 28. The configuration of the transport apparatus 12 provides a maximum radial reach from a given stored diameter. By way of example, a robot having arms with unequal link lengths is described in U.S. Pat. No. 9,149,936, issued Oct. 6, 2015, entitled "Robot Having Arm With Unequal Link Lengths," which is incorporated herein by reference in its entirety.

[0028] 1C and 1D, an exemplary substrate processing system or semiconductor wafer processing system is generally designated 1000 and hereinafter referred to as "system 1000". System 1000 may, for example, comprise one or more radial stations 1012 and one or more offset stations 1014. A robot 10 may be provided to move one or more substrates S between stations 1012, 1014 or between other modules / stations (not shown) connected to an environmental chamber 1013. The environmental chamber 1013 may, for example, provide a vacuum environment, through a bottom wall of which the robot 10 extends at least partially within an environment defined by the chamber 1013. The robot 10 and stations 1012, 1014 are connected to at least one controller 1015 comprising at least one processor 1017 and at least one memory 1019 including software 1021 for controlling the operation of the system 1000. System 1000 may, for example, provide the following wafer handling operations: (a) picking / placing 1016 a single wafer or substrate S from / to a single radial station 1012, as shown in Figure 1C, and (b) simultaneously picking / placing 1018 a pair of wafers or substrates S from / to a pair of stacked radial stations 1012, as shown in Figure 1D. Other operations involving the offset station 1014 are also possible.

[0029] 2A-2C, the initial position of the transport device 12 is a configuration in which a portion of the second end effector 26 is positioned over a portion of the first end effector 22 (FIG. 2A) such that the upper substrate 14b is positioned over the lower substrate 14a in a stacked configuration. When the first end effector 22 supporting the lower substrate 14a extends (FIG. 2B), the wrist 30 on the unequal linkage 20 (lower arm) passes the shoulder 40 on the equal linkage 24 (upper arm). A similar movement occurs during retraction of the same end effector. When the first end effector 22 supporting the lower substrate 14a is fully extended (FIG. 2C) without movement of the equal linkage 24, the length of the equal linkage 24 movement allows for retraction and maximum movement of the wrist.

[0030] 3, a substrate transport apparatus for substrate processing having at least one end effector that is angled or bent such that substrate supports on the end effectors are offset from or angled relative to one another in a rest position is shown generally at 112, hereafter referred to as "transport apparatus 112". In an exemplary embodiment, the transport apparatus 112 comprises a lower arm with an unequal link mechanism 120 and a first end effector 122, and an upper arm with an equal link mechanism 124 and a second end effector 126. The arms are extendable and rotatable, for example, by a drive unit 116 (one or more motors). The first end effector 122 is asymmetric relative to the second end effector 126, but the first end effector 122 is also angled, bent, or curved relative to the second end effector 126 such that the substrate supports are offset from one another in the rest position or are angled (not stacked) relative to one another. As described above, the legs of each end effector 122, 126 connect the substrate supports to a wrist joint. Here, the legs have a first portion connected to the wrist joint and a second portion connected to the substrate supports. When the end effectors are angled or curved, the first and second portions of the legs are connected to one another at an angle of about 90 degrees to about 120 degrees. As shown herein, the first end effector 122 is angled relative to the second end effector 126 such that while in an initial rest position, the upper substrate 114b supported on the substrate support of the upper arm equal link mechanism 124 does not lie above the lower substrate 114a supported on the substrate support of the unequal link mechanism 120. Also, during movement of either or both of the lower arm defined by the unequal link mechanism 120 and the upper arm defined by the equal link mechanism 124, the upper substrate 114b does not move above the lower substrate 114a. The transport device 112 or the robot-embedded transport device 112 may be connected to at least one controller, similar to the robot 10, including at least one processor and at least one memory including software for controlling the operation of the system.

[0031] 4, the linkage rotates about the shaft of the drive unit 116 to move the wafer (substrate 114b) on the second end effector 126 away from the wafer (substrate 114a) on the first end effector 122. A portion of the equal-link linkage 124 is articulated to move the elbow of the equal-link linkage 124 away from the wrist of the unequal-link linkage 120. The linkage of the unequal-link linkage 120 may be stretched or otherwise moved by one or more pulleys 121 disposed at the joints of the unequal-link linkage 120, such as the connection of the wrist, elbow, and / or shoulder of the unequal-link linkage 120 to the drive unit 116, where the pulleys are circular or non-circular. In some exemplary embodiments, the linkage of the equal-link linkage 124 may be moved by pulleys 25, which may be circular or non-circular as well.

[0032] Referring to FIG. 5A, in a static position, the configuration of the asymmetric end effectors 122, 126 having offset or angled substrate supports ensures that the wafer (substrate 114b) carried on the second end effector 126 is not above the wafer (substrate 114a) on the first end effector 122.

[0033] 5B, when the unequal linkage 120 is rotated by the drive unit 116, the unequal linkage 120 is extended and the first end effector 122 moves away from the second end effector 126. As shown in FIG.

[0034] 5C, as the unequal linkage 120 is further extended, the first end effector 122 moves further away from the second end effector 126. As shown in FIG.

[0035] Referring to FIG. 6A, in a rest position, an asymmetric end effector configuration having an offset or angled substrate support ensures that the wafer (substrate 114b) being carried on the second end effector 126 is not above the wafer (substrate 114a) on the first end effector 122 (see also FIG. 5A).

[0036] 6B, when the equal-link linkage 124 is rotated by the drive unit 116, the equal-link linkage 124 is extended and the second end effector 126 moves away from the first end effector 122.

[0037] 6C, as the equal-link linkage 124 is extended further, the second end effector 126 moves farther away from the first end effector 122.

[0038] 7, the unequal linkages 120 and the equal linkages 124 may be actuated by circular or non-circular pulleys. The end effectors 122, 126 are rotated from a radial orientation to provide additional spacing between each end effector 122, 126 and at least between the elbows of each linkage 120, 124.

[0039] 8A to 8C, in the initial stage of extension of the equal-link link mechanism 124 (FIG. 8A, contracted position), the substrate 114b is not positioned above the substrate 114a.

[0040] 8B, in the link-on-link position, the orientation of the end effectors 122, 126 changes as the end effector 126 moves along line 127. More specifically, when the wrist of the equal-link linkage 124 is positioned directly over the point where the equal-link linkage 124 is connected to the drive unit 116 (shoulder), the orientation of the end effectors 122, 126 changes as the center of the substrate 114b moves along line 127.

[0041] At the end stage, when the end effector 126 (and therefore the substrate 114b) is in the extended position as shown in FIG. 8C, the orientation of the end effectors 122, 126 remains constant and the center of the substrate 114b continues to move along a straight line 127.

[0042] 9A-9C, in the initial stage of extension of unequal link mechanism 120 (FIG. 9A, retracted position), substrate 114b is again not positioned above substrate 114a. In the link-on-link position, as shown in FIG. 9B, the orientation of end effectors 122, 126 changes as the center of substrate 114a moves along a straight line. In the final stage, with substrate 114a in the extended position, as shown in FIG. 9C, the orientation of end effectors 122, 126 remains constant and the center of substrate 114a continues to move along a straight line.

[0043] In any embodiment, the upper arms (e.g., upper arm 31 and upper arm 33) of the robotic arms described herein may be attached directly to a first shaft of the drive unit. The lower arms (e.g., lower arm 32 and lower arm 34) may be connected to the corresponding upper arms via a rotating elbow joint and driven by a second shaft of the drive unit, arranged coaxially with the first shaft, using a belt mechanism. This belt mechanism may include a shoulder pulley, which may be attached to a third shaft of the drive unit, an elbow pulley, which may be attached to the upper arm, and a band, belt, or cable (or any other suitable means) that may transmit motion between the two pulleys. The belt mechanism may feature a fixed or variable transmission ratio. As an example, a variable transmission ratio may be selected such that the orientation of the upper arm with the end effector changes in a predetermined manner depending on the relative positions of the upper arm and the drive shaft of the drive unit. However, any other suitable mechanism may be used.

[0044] In an exemplary embodiment, an apparatus includes a first arm with an unequal linkage having a first end effector, a second arm with an equal linkage having a second end effector, and a drive unit connected to the first arm and the second arm, the drive unit configured to move the first arm and the second arm. The first end effector is asymmetric with respect to the second end effector. The first end effector is angled with respect to the second end effector such that a first substrate support on the first end effector is not above or below a second substrate support on the second end effector.

[0045] When moving the first arm or the second arm, one of the first substrate support on the first end effector or the second substrate support on the second end effector may not move above or below the other of the first substrate support on the first end effector or the second substrate support on the second end effector. One or both of the equal-link linkage and the unequal-link linkage may be moved by at least one non-circular pulley. The first arm and the second arm may be configured such that upon extension movement of the first arm, the first end effector moves away from the second end effector. The first arm and the second arm may be configured such that upon extension movement of the second arm, the second end effector moves away from the first end effector. In a link-on-link position of the equal-link linkage, the orientation of the first end effector and the second end effector may change as the second end effector moves along a straight line. When the second end effector is in an extended position, the orientation of the first end effector and the second end effector may be constant and the second end effector may continue to move along the straight line. In a link-on-link position of the unequal-link linkage, the orientation of the first end effector and the second end effector may change as the first end effector moves along a straight line. When the first end effector is in an extended position, the orientation of the first end effector and the second end effector may be constant and the first end effector may continue to move along the straight line.

[0046] In another exemplary embodiment, a substrate transport apparatus for transporting at least two substrates comprises a lower arm with two links of unequal length and a lower end effector, an upper arm with two links of equal length and an upper end effector, and a drive unit connected to the lower arm and the upper arm, the drive unit configured to rotate and extend the lower arm and the upper arm, the lower end effector being asymmetric and angled with respect to the upper end effector such that a distal end of the lower end effector is not located under a distal end of the upper end effector and such that the distal end of the lower end effector does not move under the distal end of the upper end effector when the lower arm or the upper arm is moved.

[0047] The substrate transport apparatus may further comprise pulleys disposed at the joints of the links of the lower arm and the joints of the links of the upper arm, the pulleys of each arm being operatively connected to the drive unit and other pulleys of the same arm such that operation of the drive unit results in movement of the lower arm and / or the upper arm. At least one of the pulleys may be a non-circular pulley. The lower arm and the upper arm may each be configured such that, upon extension of the lower arm, the lower end effector moves away from the upper end effector, and, upon extension of the upper arm, the upper end effector moves away from the lower end effector. At a position where there is a link on the link of the upper arm, the orientation of the upper end effector and the lower end effector may change as the lower end effector moves along a straight line, and at a position where there is a link on the link of the lower arm, the orientation of the lower end effector and the upper end effector may change as the upper end effector moves along a straight line.

[0048] In another exemplary embodiment, a method of transporting a first substrate and a second substrate includes rotating a first arm comprising a first linkage having a first end effector about a shaft of a drive unit and extending the first linkage relative to a second arm comprising a second linkage having a second end effector. The first end effector is configured to support and transport the first substrate. The second end effector is asymmetric and angled relative to the first end effector. The second end effector is configured to support and transport the second substrate. In a rest position, the first substrate is not located above or below the second substrate. When the first linkage is extended, the first substrate does not move above or below the second substrate.

[0049] The first linkage may be extended using at least one non-circular pulley. The first arm and the second arm may be configured such that when the first linkage is extended, the first end effector moves away from the second end effector. In a link-on-link position of the first linkage, the orientation of the first end effector and the second end effector may change as the first end effector moves along a straight line. When the first end effector is moving to an extended position, the orientation of the first end effector and the second end effector may be constant and the first end effector may continue to move along the straight line.

[0050] In another exemplary embodiment, a method of assembling a substrate transport apparatus includes connecting an upper link of a first linkage arm to a rotatable shaft of a drive unit, connecting a lower link of the first linkage arm to the upper link of the first linkage arm at a first elbow joint, connecting a first end effector to the lower link of the first linkage arm at a first wrist joint, connecting an upper link of a second linkage arm to the rotatable shaft of the drive unit, connecting a lower link of the second linkage arm to the upper link of the second linkage arm at a second elbow joint, and connecting a second end effector to the lower link of the second linkage arm at a second wrist joint, wherein at least the upper link of the first linkage arm and the lower link of the first linkage arm are of unequal length. The first end effector is angled relative to the second end effector such that a first substrate support at a distal end of the first end effector is not above or below a second substrate support at a distal end of the second end effector.

[0051] In another exemplary embodiment, an apparatus includes at least one processor and at least one non-transitory memory including computer program code. The at least one memory and the computer program code are configured to cause the apparatus, by the at least one processor, to at least rotate a first arm including a first linkage having a first end effector about a shaft of a drive unit and extend the first linkage relative to a second arm including a second linkage having a second end effector. The first end effector is configured to support and transport a first substrate. The second end effector is asymmetric and angled relative to the first end effector. The second end effector is configured to support and transport a second substrate. In a rest position, the first substrate is not located above or below the second substrate. When the first linkage is extended, the first substrate does not move above or below the second substrate.

[0052] It should be understood that the foregoing description is merely illustrative. Various alternatives and modifications may be devised by those skilled in the art. For example, the features recited in the various dependent claims may be combined with each other in any suitable combination(s). In addition, features from different embodiments described above may be selectively combined into new embodiments. Thus, the foregoing description is intended to embrace all such alternatives, modifications, and variations.

[0053] This paragraph describes the invention described in the claims first attached to the application for the original application of this application (Patent Application No. 2021-554561). [1] a first arm including a link mechanism with an unequal link having a first end effector; a second arm including an equal-link linkage having a second end effector; a drive unit connected to the first arm and the second arm, the drive unit configured to move the first arm and the second arm; An apparatus comprising: the first end effector is asymmetric with respect to the second end effector; the first end effector is angled relative to the second end effector such that a first substrate support on the first end effector is not above or below a second substrate support on the second end effector; Device. [2] The apparatus of [1], wherein when moving the first arm or the second arm, one of the first substrate support on the first end effector or the second substrate support on the second end effector does not move above or below the other of the first substrate support on the first end effector or the second substrate support on the second end effector. [3] The apparatus of [1], wherein one or both of the equal-link linkages and the unequal-link linkages are moved by at least one non-circular pulley. [4] The apparatus of [1], wherein the first arm and the second arm are configured such that upon extension movement of the first arm, the first end effector moves away from the second end effector. [5] The apparatus of [1], wherein the first arm and the second arm are configured such that upon extension movement of the second arm, the second end effector moves away from the first end effector. [6] The apparatus of [1], wherein at a link-on-link position of the equal-link linkage, the orientation of the first end effector and the second end effector changes as the second end effector moves along a straight line. [7] [6] The apparatus of claim 6, wherein when the second end effector is in an extended position, the orientation of the first end effector and the second end effector is constant and the second end effector continues to move along the straight line. [8] The apparatus of [1], wherein at a link-on-link position of the unequal link linkage, the orientation of the first end effector and the second end effector changes as the first end effector moves along a straight line. [9] [8] The apparatus of claim 8, wherein when the first end effector is in an extended position, the orientation of the first end effector and the second end effector is constant and the first end effector continues to move along the straight line.

[10] 1. A substrate transport apparatus for transporting at least two substrates, comprising: a lower arm having two links of unequal length and a lower end effector; an upper arm having two links of equal length and an upper end effector; a drive unit connected to the lower arm and the upper arm, the drive unit configured to rotate and extend the lower arm and the upper arm; Equipped with the lower end effector is asymmetric and angled relative to the upper end effector such that the distal end of the lower end effector is not positioned below the distal end of the upper end effector and does not move below the distal end of the upper end effector when the lower arm or the upper arm is moved; Substrate transport device.

[11] A substrate transport apparatus as described in

[10] , further comprising pulleys disposed at joints of the links of the lower arm and the upper arm, the pulleys of each arm being operably connected to the drive unit and to other pulleys of the same arm such that operation of the drive unit results in movement of the lower arm and / or movement of the upper arm.

[12] The substrate transport apparatus according to

[11] , wherein at least one of the pulleys is a non-circular pulley.

[13] The substrate transport device of

[10] , wherein the lower arm and the upper arm are each configured such that, when the lower arm extends, the lower end effector moves away from the upper end effector, and when the upper arm extends, the upper end effector moves away from the lower end effector.

[14] at a link-on-link position of the upper arm, the orientation of the upper end effector and the lower end effector changes as the lower end effector moves along a straight line; The substrate transport apparatus of

[10] , wherein at a position where a link is on a link of the lower arm, the orientation of the lower end effector and the upper end effector changes as the upper end effector moves along a straight line.

[15] 1. A method of transporting a first substrate and a second substrate, comprising the steps of: rotating a first arm including a first linkage having a first end effector about a shaft of a drive unit; extending the first linkage relative to a second arm including a second linkage having a second end effector; Including, the first end effector is configured to transport the first substrate; the second end effector is asymmetric and angled relative to the first end effector; the second end effector is configured to transport the second substrate; In a rest position, the first substrate is not positioned above or below the second substrate; When the first link mechanism is extended, the first substrate does not move above or below the second substrate. method.

[16] The method according to

[15] , wherein the first link mechanism is extended using at least one non-circular pulley.

[17] The method of claim 15, wherein the first arm and the second arm are configured such that when the first link mechanism is extended, the first end effector moves away from the second end effector.

[18]

[15] The method according to claim 1, wherein at a link-on-link position of the first link mechanism, the orientation of the first end effector and the second end effector changes as the first end effector moves along a straight line.

[19]

[18] The method according to

[18] , wherein when the first end effector is moving to an extended position, the orientation of the first end effector and the second end effector is constant and the first end effector continues to move along the straight line.

[20] 1. A method of assembling a substrate transport apparatus, comprising: Connecting an upper link of a first linkage arm to a rotatable shaft of a drive unit; connecting a lower link of the first link mechanism arm to the upper link of the first link mechanism arm at a first elbow joint; connecting a first end effector to the lower link of the first linkage arm at a first wrist joint; connecting an upper link of a second linkage arm to the rotatable shaft of the drive unit; connecting a lower link of the second linkage arm to the upper link of the second linkage arm at a second elbow joint; connecting a second end effector to the lower link of the second linkage arm at a second wrist joint; Including, at least the upper link of the first linkage arm and the lower link of the first linkage arm are of unequal length; the first end effector is angled relative to the second end effector such that a first substrate support at a distal end of the first end effector is not above or below a second substrate support at a distal end of the second end effector; method. [twenty one] At least one processor; at least one non-transitory memory containing computer program code; An apparatus comprising: The at least one memory and the computer program code are configured to cause the at least one processor to execute at least one of the following: rotating a first arm including a first linkage having a first end effector about a shaft of a drive unit; extending the first linkage relative to a second arm including a second linkage having a second end effector; configured to execute the first end effector is configured to transport a first substrate; the second end effector is asymmetric and angled relative to the first end effector; the second end effector is configured to transport a second substrate; In a rest position, the first substrate is not positioned above or below the second substrate; When the first link mechanism is extended, the first substrate does not move above or below the second substrate. Device.

Claims

1. An apparatus comprising: At least one wall defining a chamber; at least two substrate processing stations disposed within the chamber within the at least one wall; a robot extending at least partially through the at least one wall of the chamber; The robot comprises: a first arm including a linkage having two links of unequal length and a first end effector; a second arm including a linkage having two links of equal length and a second end effector; a drive unit coupled to the first arm and the second arm and configured to move the first arm and the second arm; Equipped with the first end effector is asymmetric with respect to the second end effector; the first end effector is angled relative to the second end effector such that a first substrate support of the first end effector is not above or below a second substrate support of the second end effector; The apparatus further comprises at least one controller coupled to the robot and the at least two substrate processing stations, the at least one controller having at least one processor and at least one memory including software configured to control coordinated movement of at least the first arm relative to the second arm.

2. The apparatus of claim 1 , wherein the chamber defines a vacuum environment.

3. The apparatus of claim 1 , wherein an entrance to a first one of the at least two substrate processing stations is oriented orthogonally to an entrance to a second one of the at least two substrate processing stations.

4. 2. The apparatus of claim 1 , wherein when the first arm or the second arm moves, one of the first substrate support or the second substrate support does not move above or below the other of the first substrate support or the second substrate support.

5. 2. The apparatus of claim 1, wherein one or both of the linkage having two equal length links and the linkage having two unequal length links are actuated by at least one non-circular pulley.

6. The device of claim 1 , wherein the first arm and the second arm are configured such that upon an extension movement of the first arm, the first end effector moves away from the second end effector.

7. The device of claim 1 , wherein the first arm and the second arm are configured such that upon an extension movement of the second arm, the second end effector moves away from the first end effector.

8. 2. The apparatus of claim 1, wherein when the linkage has two equal length links, one above the other, an orientation of the first end effector and the second end effector changes as the second end effector moves along a straight line.

9. 2. The apparatus of claim 1, wherein when the linkage has two unequal length links, one above the other, an orientation of the first end effector and the second end effector changes as the first end effector moves along a straight line.

10. 1. A method for transferring at least one substrate between a first station and a second station, comprising: providing a chamber defined by at least one wall, an interior of the chamber defining the first station and the second station; The method further includes providing a robot extending at least partially within the chamber, the robot comprising: a first arm including a linkage having two links of unequal length and a first end effector; a second arm including a linkage having two links of equal length and a second end effector; a drive unit coupled to the first arm and the second arm and configured to move the first arm and the second arm; Equipped with the first end effector is asymmetric with respect to the second end effector; the first end effector is angled relative to the second end effector such that a first substrate support of the first end effector is not above or below a second substrate support of the second end effector; The method further includes rotating one or more of the first arm and the second arm about a shaft of the drive unit in a coordinated motion to cause the first end effector or the second end effector to pick up the at least one substrate from the first station and place it at the second station.

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