Electronic device flip chip package with exposed clip

Abstract

To provide a packaged electronic device which promotes desirable thermal and electric performance by simple and low-cost equipment enabling complicated signal routing beyond capability of a lead frame design and avoids an issue of a parasitic inductance by a multilayer substrate.SOLUTION: A packaged electronic package 100 includes: a multilayer substrate 106 having a first side, a first layer 110, and a second layer 120, the first layer having a plurality of first conductive structures 112, 114, and 116 along the first side and the second layer having a second conductive structures 122, 124, and 126; a semiconductor die 101 soldered to a first set of the conductive structures 112 and 114; a conductive clip 108 directly connected to the conductive structure 116 of the first layer 110, a conductive via 136, and a second side 105 of the semiconductor die 101; and a package structure 140 for sealing parts of the semiconductor die 101 and the conductive clip 108.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] Electronic circuits are susceptible to reduced efficiency and operational degradation caused by parasitic inductance, especially at high operating frequencies. High frequency devices also become less efficient as operating temperatures increase. Thermal limitations of conventional device packages with only bottom-side cooling via a printed circuit board (PCB) impede device size reduction and prevent increases in device power density. Also, good electrical performance of switching circuits is improved by grounding the backside of the semiconductor die that contains one or more power circuit switching transistors. Current packaging solutions with wire-bonded dies and lead frames have high parasitic inductance and cannot provide top-side cooling or backside die grounding. Lidded buried die packages have an inverted die or flip chip with a lid on the top side for heat dissipation, but do not provide a top-side ground connection. Other flip-chip approaches do not implement a ground connection to the backside of the die. Further packages with copper layers plated directly on the buried die with redistribution layers (RDLs) are expensive. Summary of the Invention

[0002] A packaged electronic device is described with an inverted die and conductive clip attached to a multi-layer substrate, and a package structure that encapsulates the semiconductor die and a portion of the conductive clip. The described example provides a cost-effective electronic device packaging solution with good die heat dissipation and electrical performance. The described example packaged electronic device includes a multi-layer substrate that includes a first layer having a first conductive structure and a second layer that includes a second conductive structure. The example device also includes a semiconductor die that includes an electronic component. The semiconductor die includes conductive features that are electrically connected to terminals of the electronic component and directly connected to corresponding conductive structures of the first layer. The example device also includes a conductive clip that is directly connected to one of the first conductive structures of the first layer. The conductive clip is directly connected to a side of the semiconductor die. The example device also includes a package structure that encapsulates the semiconductor die and a portion of the conductive clip.

[0003] In an example, the multi-layer substrate includes a third layer or multiple intermediate layers between the first layer and the second layer, with conductive vias that individually connect some of the first conductive structures with some of the second conductive structures. The third layer also includes an insulator structure that separates the vias from one another. In one example, the multi-layer substrate is a laminate structure, in which the insulator structure includes a laminate build-up material. In another example, the multi-layer substrate is a ceramic or insulated metal substrate (IMS), in which case the insulator structure includes a ceramic material. In one example, the package structure includes a molding material that encapsulates the semiconductor die and a portion of the conductive clip. The molding material in one example separates at least some of the first conductive structures from one another in the first layer and separates at least some of the second conductive structures from one another in the second layer. In one example, the conductive clip is soldered to one of the first conductive structures of the first layer, and the conductive clip is soldered or epoxy-bonded to the semiconductor die. In one example, the device also includes a second semiconductor die, with second conductive features directly connected to corresponding ones of the conductive structures in the first layer.

[0004] A method for making an electronic device is described. The method includes soldering a conductive feature on a first side of a semiconductor die to a first set of conductive structures on a first layer of a multi-layer substrate and attaching a conductive clip to the multi-layer substrate and the semiconductor die. In one example, attaching the conductive clip includes soldering a first portion of the conductive clip to an additional conductive structure on the first side of the first layer and attaching a second portion of the conductive clip to a second side of the semiconductor die. In one example, the second portion of the conductive clip is soldered to the second side of the semiconductor die. In another example, the second portion of the conductive clip is epoxy bonded to the second side of the semiconductor die. The method further includes encapsulating the semiconductor die and a portion of the conductive clip in a package structure. In one example, the method also includes soldering a second semiconductor die to the second set of conductive structures before attaching the conductive clip to the multi-layer substrate and the semiconductor die. [Brief description of the drawings]

[0005] [Figure 1] FIG. 2 is a cross-sectional side elevation view of a flip chip packaged electronic device with a multi-layer laminate substrate including a multi-layer laminate structure and an exposed clip.

[0006] [Diagram 2] FIG. 2 is a top elevational view of the packaged electronic device taken along line 2-2 of FIG. 1.

[0007] [Diagram 3] FIG. 3 is a cross-sectional top elevational view of the packaged electronic device taken along line 3-3 of FIG. 1.

[0008] [Figure 4] FIG. 4 is a bottom elevational view of the packaged electronic device taken along line 4-4 in FIG. 1.

[0009] [Diagram 5] 1 is a flow chart of a method for manufacturing a packaged electronic device.

[0010] [Figure 6] 6 is a side elevational view of the packaged electronic device of FIGS. 1-4 undergoing manufacture according to the method of FIG. 5. [Figure 7] 6 is a side elevational view of the packaged electronic device of FIGS. 1-4 undergoing manufacture according to the method of FIG. 5. [Figure 8] 6 is a side elevational view of the packaged electronic device of FIGS. 1-4 undergoing manufacture according to the method of FIG. 5. [Figure 9] 6 is a side elevational view of the packaged electronic device of FIGS. 1-4 undergoing manufacture according to the method of FIG. 5. [Figure 10] 6 is a side elevational view of the packaged electronic device of FIGS. 1-4 undergoing manufacture according to the method of FIG. 5. [Figure 11] 6 is a side elevational view of the packaged electronic device of FIGS. 1-4 undergoing manufacture according to the method of FIG. 5. [Figure 12] 6 is a side elevational view of the packaged electronic device of FIGS. 1-4 undergoing manufacture according to the method of FIG. 5.

[0011] [Figure 13] FIG. 2 is a cross-sectional side elevation view of another example flip-chip packaged electronic device with a multilayer ceramic or insulated metal substrate and an exposed clip. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] In the drawings, like reference numerals refer to like elements throughout, and various features are not necessarily drawn to scale. In the following description and claims, the terms "including," "having," "comprising," or variations thereof are intended to be inclusive in a similar manner to the term "comprise," and should be interpreted in the sense of "including, but not limited to." Additionally, the term "couple" is intended to include an indirect or direct electrical or mechanical connection, or a combination thereof. For example, when a first device couples to or is coupled with a second device, the connection may be through a direct electrical connection, or through an indirect electrical connection via one or more intervening devices and connections.

[0013] 1-4 illustrate an example packaged electronic device 100 including a first semiconductor die 101 and a second semiconductor die 102. The example device 100 includes multiple semiconductor dies 101 and 102, but in other examples may include a single semiconductor die or more than one semiconductor die. In the example shown, both semiconductor dies include a lower first surface 103 including conductive features 104 that are flip-chip soldered to a conductive structure of a multi-layer substrate 106. The example conductive features 104 extend outwardly (e.g., downwardly) from the lower first sides 103 of the semiconductor dies 101 and 102. Any suitable conductive features 104 that can be soldered or otherwise directly connected to copper pads or other conductive structures of the multi-layer substrate 106 can be used. In one example, the conductive features 104 of the dies 101 and 102 are solder bumps. In another example, the conductive features 104 are copper pillars.

[0014] In one example, the dies 101 and 102 are fabricated with one or more electronic components (e.g., transistors, resistors, capacitors, diodes, etc.), as further described below in connection with FIG. 7. In one example, the first die 101 includes a power transistor, such as a high electron mobility transistor (HEMT), e.g., a silicon carbide (SiC) transistor or a gallium nitride (GaN) transistor. The example dies 101 and 102 also include one or more metallization layers, which include a top side 103 having copper pillars, solder bumps, or other conductive features 104 extending outwardly therefrom. At least some of the conductive features 104 are electrically connected to terminals of one or more electronic components in the dies 101 and 102 through the one or more metallization layers. In this example, the dies 101 and 102 are inverted or "flipped" to solder the conductive features 104 of the first side 103 face-down onto the conductive structures of the multi-layer substrate 106 using a flip-chip attachment process. The inverted positioning of the dies 101 and 102 leaves the second side 105 of the die facing up (e.g., along the positive Z direction) in FIG. 1 . The flip-chip process attaches the dies 101 and 102 directly to the first (e.g., top) side 107 of the multi-layer substrate 106. The direct electrical connection of the conductive features 104 to the conductive structures of the multi-layer substrate 106 advantageously mitigates or avoids parasitic inductance associated with wire bonding or other interconnection techniques.

[0015] The device 100 also includes a conductive clip 108. The clip 108 can be any suitable conductive material, such as aluminum, copper, etc. The conductive clip 108 is directly connected to one or more conductive structures on the first side 107 of the multi-layer substrate 106. In one example, a lower first portion of the clip 108 is soldered directly to one or more conductive structures on the first side 107 of the multi-layer substrate 106. The conductive clip 108 is also directly connected to the second side 105 of the first semiconductor die 101. In one example, an upper second portion of the conductive clip 108 is soldered directly to a conductive feature on the second side 105 of the first semiconductor die 101. In another example, the second portion of the conductive clip 108 is epoxied to a portion of the second side 105 of the first semiconductor die 101. In one implementation, the conductive clip 108 is soldered to a grounded conductive structure, e.g., a ground connection, on the first side 107 of the multi-layer substrate 106.

[0016] 2-4, FIG. 2 shows a top view of the packaged electronic device 100 taken along line 2-2 of FIG. 1. The conductive clip 108 of FIGS. 1 and 2 extends over and is spaced apart from a portion of the second semiconductor die 102. In this example, the clip 108, whether soldered or epoxied to the second side 105 of the first semiconductor die 101, provides a ground shield to protect the first semiconductor die 101 and / or the second semiconductor die 102 from electromagnetic interference (EMI) during operation of the device 100. In the example of FIG. 1, the conductive clip 108 includes an upper first side 109 that is exposed outside the packaged electronic device 100. The clip 108 also functions to facilitate heat dissipation from the attached first semiconductor die 101. In use, a heat sink (not shown) may be soldered, epoxied, or otherwise attached to the exposed first side 109 of the conductive clip 108 to further facilitate heat dissipation.

[0017] The example multi-layer board 106 of FIG. 1 is a multi-layer laminate board structure. In another implementation (e.g., FIG. 13 described below), the multi-layer board 106 is a ceramic board or an insulated metal board (IMS). As shown in FIG. 1, the multi-layer laminate board 106 includes a first layer 110 on a first (e.g., top) side 107 and a second layer 120 on a bottom. The multi-layer board 106 facilitates signal routing and interconnect locations that are not possible or impractical with a lead frame. The example of FIG. 1 also includes an intermediate third layer 130. The first layer 110 includes a first plurality of conductive structures 112, 114, and 116 that extend through the first layer 110 to the first side 107 of the multi-layer board 106. The conductive structures 112, 114, and 116 are laterally spaced apart from one another (e.g., along the X-direction in FIG. 1). Additionally, the conductive structures 112 , 114 , and 116 are separated from one another by a first insulating structure 118 .

[0018] In the example of FIG. 1, the first conductive structure 112 is soldered to the first conductive feature 104 of the semiconductor die 101. In one example, the first semiconductor die 101 includes a transistor component (e.g., transistor 701 of FIG. 7 described below) and the second semiconductor die 102 includes a transistor driver circuit (not shown). In this example, the first conductive feature 104 of the semiconductor die 101 is electrically connected to a drain terminal of the transistor (labeled as "D" in FIG. 1). The second conductive structure 114 of the first layer 110 is soldered to the second conductive feature 104 of the semiconductor die 101, and the third conductive structure 116 is soldered to a first portion of the conductive clip 108. In the example of FIG. 1, the second conductive feature 104 of the semiconductor die 101 is electrically connected to a source terminal of the transistor (labeled as "S" in FIG. 1). In one example, the driver circuit die 102 connects the source terminal of the transistor die 101 to a circuit ground node or other reference voltage node, and the corresponding ground conductive feature 104 of the second die 102 is soldered to the third conductive structure 116.

[0019] In the illustrated example, a first portion of the conductive clip 108 is soldered directly to the third conductive structure 116 on the first side 107 of the multi-layer substrate 106. In this manner, the conductive clip 108 is electrically connected directly to circuit ground, providing a grounded shield to the dies 101 and 102. Also, in one example, the first semiconductor die 101 includes an upper body contact (not shown in FIG. 1, but illustrated in FIG. 7 below) on the second (e.g., upper) side 105, which is soldered to a second portion of the conductive clip 108. In this implementation, the conductive clip 108 provides a direct soldered electrical ground connection to the body of the semiconductor die 101.

[0020] FIG. 3 is a cross-sectional top view taken along line 3-3 through the first layer 110, and FIG. 4 is a bottom view taken along line 4-4 of FIG. 1 showing features of a second (e.g., bottom) layer 120 of a packaged electronic device. The second layer 120 includes a second plurality of conductive structures 122, 124, 126, and 128. The conductive structures 122, 124, 126, and 128 extend through the second layer 120 of the multi-layer substrate 106. The second plurality of conductive structures includes a fourth conductive structure 122, a fifth conductive structure 124, and a sixth conductive structure 126. The fourth conductive structure 122 is electrically connected to the first conductive structure 112 of the first layer 110 through a third layer 130 of the multi-layer substrate 106. The fifth conductive structure 124 is electrically connected to the third conductive structure 116 through the third layer 130. The illustrated example second layer 120 also includes a sixth conductive structure 126. The sixth conductive structure 126 is electrically connected to the third conductive structure 116 through the third layer 130.

[0021] The third layer 130 includes conductive vias 132, 134, and 136 that extend between the first layer 110 and the second layer 120. The vias 132, 134, and 136 can be any suitable conductive material, such as aluminum, copper, etc. The third layer 130 also includes an insulator structure 138 that separates at least a portion of the conductive vias 132, 134, and / or 136 from one another. In the laminated board example of FIGS. 1-4, the insulator structure 138 of the third layer 130 includes a laminated build-up material 138. In the illustrated example, the insulator structures 118, 128, and 138 of the multi-layer board 106 are each composed of a laminated build-up material. In one example, the build-up material begins as a sheet that is pressed or otherwise placed into the gaps between the conductive structures or vias of the individual layers 110, 120, and 130. This approach is called dry film lamination. In one example, the insulator structures 118, 128, and 138, as well as the component build-up material sheets, are or include organic materials.

[0022] The packaged electronic device 100 also includes a packaging structure 140. The packaging structure 140 may be any suitable packaging material for encapsulating all or a portion of the components of the device 100, such as, for example, a molded plastic material, a ceramic material, or the like. The packaging material includes a first (e.g., top) side 141. In the example of FIG. 1, the first side 109 of the conductive clip 108 extends vertically beyond the first side 141 of the packaging material 140 to allow for heat dissipation from the clip 108 and / or to allow for attachment of an external heat sink (not shown) to the device 100. The packaged electronic device 100 also includes a second (e.g., bottom) side 142, with exposed portions of the second plurality of conductive structures 122, 124, and 126 shown in FIG. 1. In use, the exposed conductive structures 122, 124, and 126 on the second side 142 of the packaged electronic device 100 are soldered to a host PCB (not shown) to provide electrical connections from the circuit elements of the host PCB to the circuit formed by the semiconductor dies 101, 102, and the multilayer substrate 106.

[0023] Conductive vias 132, 134, and 136 in the third layer 130 individually connect some of the conductive structures 112, 114, and 116 in the first layer 110 to some of the conductive structures 122, 124, and 126 in the second layer 120. In the example of FIG. 1, the first via 132 electrically connects the transistor drain of the first semiconductor die 101 directly to the fourth conductive structure 122 in the second layer 120 through the first conductive structure 112 in the first layer 110. In this example, the fourth conductive structure 122 provides a drain connection at the bottom side 142 of the packaged electronic device 100 that may be soldered to a PCB (not shown). The second via 134 in the third layer 130 electrically connects a ground node from the third conductive structure 116 to the fifth conductive structure 124 in the second layer 120. Additionally, a third via 136 in the third layer 130 electrically connects a ground node from the third conductive structure 116 to the sixth conductive structure 126. The conductive structures 124 and 126 provide a ground or source connection on a bottom side 142 of the device 100, which may be soldered to a user PCB.

[0024] The cross-sectional side view of the device 100 in FIG. 1 is taken along line 1-1 in FIGS. 2-4 and does not show all the features of the example multi-layer substrate 106. FIG. 3 shows an example top cross-sectional view of a first layer 110 including a first conductive structure 112 (labeled "D"), a portion of which extends to a lateral edge of the first layer 110. An example second conductive structure 114 of the first layer 110 is wider on the left side than on the right side to provide a source connection (labeled "S") between the first semiconductor die 101 and the second semiconductor die 102 (FIG. 1). The first layer 110 also includes a conductive structure 300 (labeled "G") that provides a gate control signal interconnection between the driver circuit die 102 and the gate terminal of a transistor in the first semiconductor die 101. The transistor gate terminals in this example are connected through corresponding conductive features (not shown) of the first semiconductor die 101 soldered to the top surface of the conductive structure 300. The second semiconductor die 102 in this example includes a gate control signal output having a corresponding conductive feature (not shown) soldered to a second end of the conductive structure 300. Through the conductive structure 300, the driver die 102 can provide a gate control signal for operating the transistors of the first semiconductor die 101. FIG. 3 also illustrates a third conductive structure 116 that provides a ground node connection for the conductive clip 108. The first layer 110 also includes a conductive structure 302 to facilitate connection to and routing of signals to and from other circuit elements within the driver die 102.

[0025] 4 illustrates a bottom view of the second layer 120 of the packaged electronic device 100. The second layer 120 includes a fourth conductive structure 122 that provides a drain connection at the bottom side 142 of the packaged electronic device 100. The bottom side of the second layer 120 also includes a fifth conductive structure 124 (e.g., a ground node connection) and a sixth conductive structure 126 (e.g., an additional ground node connection). The example second layer 120 in FIG. 4 also includes an exposed portion of an additional conductive structure 400.

[0026] The exemplary packaged electronic device 100 advantageously combines a multi-layer substrate 106 with one or more flip-chip soldered dies 101 and 102, and a conductive clip 108 that overcomes various thermal and electrical shortcomings of previous packaging configurations. Various features of the exemplary device 100 can be used in conjunction with GaN, SiC, or other HEMT transistor circuits for improved high frequency operation, combined with benefits associated with high power density and low cost. In some implementations, the device 100 facilitates packaging of a flip-chip GaN die 101 and driver circuitry 102 without the parasitic inductance previously associated with bond wires.

[0027] The described device 100 also provides an exposed conductive clip 108 attached to the backside of the die 101 for improved heat dissipation through top side cooling, along with a grounded clip attachment to the backside 105 of the first die 101 for good electrical performance. This represents a significant improvement over other solutions that do not implement a ground connection to the backside of the die in a flip chip package. The device 100 also provides a significant cost advantage over embedded die packaging solutions with redistribution layer features. The use of a multi-layer substrate 106 also advantageously facilitates complex interconnect routing capabilities compared to lead frame technology. In addition, the exemplary multi-layer stack structure 106 facilitates low electrical parasitics for further improvement in high frequency circuit applications. The exemplary device 100 also provides good heat dissipation in combination with a grounded backside connection that was not possible using a lidded CCC package. As discussed further below in connection with FIG. 13, the multilayer substrate 106 may be implemented using a variety of different configurations, including a multilayer laminate substrate (e.g., FIGS. 1-4), a ceramic substrate, or an insulated metal substrate (e.g., IMS, FIG. 13).

[0028] 5-12, FIG. 5 illustrates an example method 500 for fabricating a packaged electronic device. In one example, method 500 may be used to fabricate the example packaged electronic device 100 of FIGS. 1-4 described above. Method 500 may be used to fabricate other packaged electronic devices, such as the example device described below in connection with FIG. 13. Method 500 is described below in connection with fabricating the example device 100, and FIGS. 6-12 illustrate packaged electronic devices 100 undergoing fabrication according to method 500.

[0029] The example method 500 includes wafer fabrication at 502 and forming solder bumps or copper pillars on the top of the wafer at 504. Figure 6 shows an example in which the process 604 is performed to fabricate a wafer 600 that includes a plurality of perspective die areas, each of the die areas having one or more corresponding solder bump or copper pillar conductive features 104 extending outwardly from a first side 601 of the wafer 600. The example wafer 600 also includes a backside 602.

[0030] The method 500 also includes die separation or singulation at 506 in Figure 5. The die 600 in Figure 6 may be separated into multiple semiconductor dies (e.g., the first die 101 in Figure 1) using any suitable sawing, laser cutting, etching, or other separation process (not shown). Figure 7 shows a portion of an example first die 100 separated from the wafer 600 of Figure 6 and undergoing a process 700 to form conductive features 104 (e.g., copper pillars or solder bumps) on a first side 103 of the separated die 101.

[0031] The example first die 101 in FIG. 7 includes a transistor component 701 formed on and / or in a semiconductor substrate 702 (e.g., silicon, gallium nitride, silicon carbide, silicon-on-insulator (SOI), etc.). Although the example first die 101 includes a single transistor component 701, other implementations include integrated circuits having multiple electronic components formed within the die 101. The processed die 101 in this example includes multiple conductive features 104 that are individually electrically connected to corresponding terminals (source “S”, drain “D”, gate “G”, and backgate contacts) of the transistor component 701. The conductive features 104 are aluminum, copper, a solder material, or other conductive material suitable for subsequent soldering to corresponding ones of the conductive structures 112, 114 of the first layer 110 of the multilayer substrate 106 (e.g., FIG. 1).

[0032] The example die 101 also includes an insulating structure 703 disposed on an upper surface or an upper selected portion of the substrate 702. The insulating structure 703 may be a shallow trench isolation (STI) feature or a field oxide (FOX) structure in some examples. The example die 101 also includes a multi-layer metallization structure disposed above the substrate 702. The metallization structure includes a first dielectric structure layer 704 formed on the substrate 702, as well as multi-level upper metallization structures 706, 710. In one example, the first dielectric structure layer 704 is a pre-metal dielectric (PMD) layer disposed above the transistor 701 and the upper surface of the substrate 702. In one example, the first dielectric structure layer 704 includes silicon dioxide (SiO2) deposited on the transistor 701, the substrate 702, and the insulating structure 703.

[0033] The metallization structure includes tungsten plugs or contacts 705 extending from various terminals of the transistor 701 through the PMD layer 704, as well as overlying dielectric layers 706 and 710, referred to herein as interlayer or interlevel dielectric (ILD) layers. Different numbers of layers may be used in different implementations. In one example, the first ILD layer 706 and the final ILD layer 710 are formed of silicon dioxide (SiO2) or other suitable dielectric material. In some implementations, the individual layers of the multilayer upper metallization structure are formed in two stages, including an intermetal dielectric (IMD, not shown) sublayer and an ILD sublayer overlying the IMD sublayer. The individual IMD and ILD sublayers may be formed of any suitable dielectric material or materials, such as, for example, a SiO2-based dielectric material.

[0034] The first ILD layer 706 and the upper ILD layer 710 include conductive metallization interconnect structures 708 and 712, such as aluminum, formed on the top surfaces of the underlying layers, and vias 709, such as tungsten, to provide electrical connections from the metallization features 708, 712 of the individual layers to the overlying metallization layers. The substrate 702, electronic component 701, first dielectric structure layer 704, and upper metallization structures 706, 710 form a die 101 having an upper side or surface 103. The top metallization layer 710 includes an exemplary conductive feature 714, such as a top aluminum via. The conductive feature 714 includes a side or surface on the upper side 103 of the die 101 on top of the top metallization layer 710. Any number of conductive features 714 may be provided. One or more of the conductive features 714 are electrically coupled to the transistor 701 through the metallization structures of the die 101.

[0035] The upper ILD dielectric layer 710 in one example may include one or more passivation layers 716 (e.g., a protective overcoat (PO) and / or passivation layer), such as silicon nitride (SiN), silicon oxynitride (SiO x N y), or silicon dioxide (SiO2). In one example, the one or more passivation layers 716 include one or more openings that expose a portion of the conductive feature 714 to allow electrical connection of the feature 714 to a corresponding contact or conductive feature 104. The conductive feature 104 extends outwardly (e.g., upwardly along the negative "Z" direction in FIG. 7) from a first (e.g., upper) side 103 of the metallization structure. The conductive feature 104 in one example includes a conductive seed layer, such as copper, that extends outwardly from the upper side 103 of the metallization structure. In one example, the conductive feature 104 includes a conductive pillar. In another example, the conductive feature 104 is a solder bump. The example die 101 in FIG. 7 also includes a bottom conductive feature 718 (not shown in FIG. 1) formed on the second side 105 of the die 101.

[0036] The method 500 continues at 508 of FIG. 5 with creating or providing a multi-layer substrate (e.g., FIG. 1106 above). In one example, the multi-layer substrate 106 is a laminate substrate (e.g., FIGS. 1-4). In another example, the multi-layer substrate is created at 508 as a ceramic substrate or an insulated metal substrate (e.g., FIG. 13 below). FIG. 8 illustrates an example in which a lamination process 800 is performed to create the multi-layer laminate substrate 106 shown and described above in connection with FIGS. 1-4.

[0037] The method 500 continues at 510 of Fig. 5 with mounting one or more die on the multi-layer substrate. Fig. 9 shows an example in which a flip chip die attach soldering process 900 is performed in which conductive features 104 on a first side 103 of a semiconductor die 101 are soldered to a first set of conductive structures 112, 114, and 116 of a first layer 110 of an example multi-layer laminate substrate 106. In this example, the first and second dies 101 and 102 are placed simultaneously or individually inverted onto a first side 107 of the multi-layer laminate substrate 106, and the device 100 is heated to reflow the solder material of the solder bumps 104 to form solder joints with the conductive structures 112, 114, and 116.

[0038] At 512 in FIG. 5, the method further includes attaching the conductive clip to the multi-layer substrate and the semiconductor die. FIG. 10 shows an example in which an attachment process 1000 is performed that solders a first portion of the lower side of the conductive clip 108 to the third conductive structure 116. In one example, the attachment process 1000 also solders a second portion of the upper side of the conductive clip 108 to the second side 105 of the first semiconductor die 101 (e.g., to the bottom conductive feature 718 in FIG. 7). In this example, the solder attachment of the conductive clip 108 to the second side 105 of the first semiconductor die 101 provides an electrical body connection to a ground node at the conductive structure 116 via the conductive clip 108. In another example, the clip attachment process 1000 epoxies the second portion of the conductive clip to the second side 105 of the first semiconductor die 101. In either example, the clip acts as a grounded shield to protect the circuit elements of the first and second semiconductor dies 101 and 102. Additionally, attaching clip 108 to second side 105 of first semiconductor die 101 provides a thermal path for dissipating heat from die 101. As previously mentioned, a heat sink can be attached to top side 109 of conductive clip 108 by an end user to further facilitate heat dissipation.

[0039] At 514 of Figure 5, the method 500 further includes encapsulating the semiconductor dies 101 and 102 and a portion of the conductive clip 108 in a package structure. Figure 11 shows an example in which a molding process 1100 is performed to encapsulate the upper structure of the device 100 in a plastic molding material 140. In this example, the molding process 1100 first provides the molded package structure 140 with an upper or top surface 141 that is above the top side 109 of the conductive clip 108.

[0040] At 516 of Figure 5, the example method 500 further includes exposing a portion of the clip 108. Figure 12 shows an example in which a material removal process 1200 is performed that removes a portion of the top surface of the molded package structure 140 to expose an upper portion of the top side 109 of the conductive clip 108.

[0041] In another possible example, a ceramic package structure (not shown) may be used to encapsulate all or a portion of the semiconductor dies 101, 102 and at least a portion of the conductive clip 108.

[0042] 13 illustrates another example packaging electronic device 1300 including a flip chip package having a multi-layer ceramic or insulated metal substrate 1306 and an exposed clip. The device 1300 includes first and second semiconductor dies 101, 102 and a conductive clip 108 as described above. In this example, the multi-layer substrate 1306 includes a first side 107, a second side 142, a first layer 1310, a second layer 1320, and a third layer 1330. The first layer 1310 includes a first plurality of conductive structures 1312, 1314, and 1316 that extend through the first layer 1310 to the first side 107, and the second layer 1320 includes a second plurality of conductive structures 1322, 1324, and 1326 that extend through the second layer 1320 to the second side 142. The third layer 1330 includes conductive vias 1332, 1334, and 1336 that extend through the third layer 1330 between the first layer 1310 and the second layer 1320, respectively. The third layer 1300 also includes an insulator structure 1338 that separates the vias 1332, 1334, and 1336 from one another. The insulator structure 1338 in this example includes a ceramic material 1338.

[0043] The conductive structures 1312, 1314, and 1316 of the first layer 1300 in one example are fabricated as a Direct Bonded Copper (DBC) substrate, the ceramic insulator structure 1338 of the third layer 1300 is a dielectric material, and the vias 1332, 1334, and 1336 provide electrical interconnections between the first layer 1310 and the second layer 1320. In this example, the package structure 140 further includes a molding material that encapsulates the semiconductor die 101 and the upper portion of the conductive clip 108. The molding material 140 in this example also separates at least some of the first plurality of conductive structures 1312, 1314, and / or 1316 from one another in the first layer 1310. The molding material 140 of FIG. 13 also separates at least a portion of the second plurality of conductive structures 1322 , 1324 , and 1326 in the bottom second layer 1320 of the packaged electronic device 1300 .

[0044] The described packaging solution promotes good thermal and electrical performance with a simple, low-cost implementation that allows for complex signal routing beyond the capabilities of leadframe designs. Exposed clips promote heat dissipation to ambient or attached heat sinks and allow connection to ground or other reference voltages. Multilayer substrates avoid the parasitic inductance issues of wirebond packages without the added cost and complexity of embedded die packaging. Multilayer substrates also allow for more complex routing than leadframes. Example applications include power circuits with HEMT devices (e.g., GaN or SiC transistors, etc.) that may accommodate multiple dies in a single packaging device.

[0045] Modifications may be made to the exemplary embodiments described, and other embodiments are possible, within the scope of the invention.

Claims

1. 1. A packaged electronic device comprising: a multi-layer substrate comprising a first side, a second side, a first layer having a first plurality of conductive structures extending through the first layer to the first side, and a second layer having a second plurality of conductive structures extending through the second layer to the second side; a semiconductor die including an electronic component and a plurality of conductive features electrically connected to terminals of the electronic component, the conductive features extending outwardly from a first side of the semiconductor die, the conductive features directly connected to corresponding ones of the first plurality of conductive structures of the first layer; a conductive clip directly connected to one of the first plurality of conductive structures of the first layer and directly connected to a second side of the semiconductor die; and a package structure encapsulating the semiconductor die and a portion of the conductive clip; 1. A packaged electronic device comprising:

2. 10. The packaged electronic device of claim 1, The first plurality of conductive structures: a first conductive structure soldered to a first conductive feature of the semiconductor die; a second conductive structure soldered to a second conductive feature of the semiconductor die; and a third conductive structure soldered to the first portion of the conductive clip; Including, the second plurality of conductive structures comprising: a fourth conductive structure electrically connected to the first conductive structure within the multilayer substrate; and a fifth conductive structure electrically connected to the third conductive structure within the multilayer substrate; 1. A packaged electronic device comprising:

3. 3. The packaged electronic device of claim 2, the electronic components of the semiconductor die are transistors; the first conductive feature of the semiconductor die is electrically connected to a drain terminal of the transistor; a packaged electronic device, wherein the second conductive feature of the semiconductor die is electrically connected to a source terminal of the transistor.

4. 3. The packaged electronic device of claim 2, The packaged electronic device, wherein the second plurality of conductive structures further includes a sixth conductive structure electrically connected to the third conductive structure within the multilayer substrate.

5. 3. The packaged electronic device of claim 2, The multilayer substrate further includes a third layer disposed between the first layer and the second layer, the third layer comprising: conductive vias extending between the first layer and the second layer for individually connecting portions of the first plurality of conductive structures with portions of the second plurality of conductive structures; and an insulator structure separating at least some of the conductive vias from one another; 1. A packaged electronic device comprising:

6. 6. The packaged electronic device of claim 5, The packaged electronic device, wherein the dielectric structure of the third layer comprises a laminate build-up material.

7. 6. The packaged electronic device of claim 5, The packaged electronic device, wherein the insulator structure of the third layer comprises a ceramic material.

8. 8. The packaged electronic device of claim 7, the package structure includes a molding material that encapsulates the semiconductor die and a portion of the conductive clip; the molding material of the package structure separates at least a portion of the first plurality of conductive structures from one another in the first layer; A packaged electronic device, wherein the molding material of the package structure separates at least a portion of the second plurality of conductive structures in the second layer.

9. 6. The packaged electronic device of claim 5, the conductive clip is soldered to one of the first plurality of conductive structures of the first layer, and the conductive clip is soldered to the second side of the semiconductor die.

10. 3. The packaged electronic device of claim 2, The multilayer substrate further includes a third layer disposed between the first layer and the second layer, the third layer comprising: a conductive via extending between the first layer and the second layer; an insulator structure separating at least some of the conductive vias from one another; 1. A packaged electronic device comprising:

11. 11. The packaged electronic device of claim 10, The packaged electronic device, wherein the dielectric structure of the third layer comprises a laminate build-up material.

12. 11. The packaged electronic device of claim 10, The packaged electronic device, wherein the insulator structure of the third layer comprises a ceramic material.

13. 13. The packaged electronic device of claim 12, the package structure includes a molding material that encapsulates the semiconductor die and a portion of the conductive clip; the molding material of the package structure separates at least a portion of the first plurality of conductive structures from one another in the first layer; A packaged electronic device, wherein the molding material of the package structure separates at least a portion of the second plurality of conductive structures in the second layer.

14. 10. The packaged electronic device of claim 1, the conductive clip is soldered to one of the first plurality of conductive structures of the first layer, and the conductive clip is soldered to the second side of the semiconductor die.

15. 10. The packaged electronic device of claim 1, 1. A packaged electronic device, further comprising: a second semiconductor die, the second semiconductor die including a second plurality of conductive features directly connected to corresponding ones of the first plurality of conductive structures of the first layer.

16. 1. An electronic device comprising: A multilayer substrate, a first layer including a first plurality of conductive structures; a second layer including a second plurality of conductive structures; a third layer disposed between the first layer and the second layer, the third layer including conductive vias extending between the first layer and the second layer for individually connecting some of the first plurality of conductive structures with some of the second plurality of conductive structures and an insulator structure separating at least some of the conductive vias from one another; The multilayer substrate, a semiconductor die including an electronic component and a plurality of conductive features electrically connected to terminals of the electronic component, the conductive features being soldered to corresponding ones of the first plurality of conductive structures of the first layer; and a conductive clip soldered directly to one of the first plurality of conductive structures of the first layer and connected directly to the semiconductor die; 2. An electronic device comprising:

17. 17. The electronic device of claim 16, the dielectric structure of the third layer comprises a laminate build-up material.

18. 17. The electronic device of claim 16, the insulator structure of the third layer comprises a ceramic material.

19. 1. A method of making an electronic device, comprising: soldering conductive features on a first side of the semiconductor die to a first set of conductive structures on a first layer of the multi-layer substrate; Attaching a conductive clip to the multi-layer substrate and to the semiconductor die, soldering a first portion of a conductive clip to a further conductive structure on the first side of the first layer; attaching a second portion of the conductive clip to a second side of the semiconductor die; attaching the conductive clip; and encapsulating the semiconductor die and a portion of the conductive clip within a package structure; A method comprising:

20. 20. The method of claim 19, further comprising: The method further comprising soldering a second semiconductor die to the second set of conductive structures prior to attaching the conductive clip to the multilayer substrate and the semiconductor die.

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