Substrate processing apparatus, substrate processing method, method for manufacturing semiconductor device, program, and controller

Abstract

To provide technology that can improve operational efficiency on a main screen that can display or operate device information used for a substrate processing apparatus.SOLUTION: A substrate processing apparatus has a control unit that enables a display unit that displays a first screen capable of displaying or operating the apparatus information used for a substrate processing apparatus and a second screen capable of displaying related information associated with the apparatus information, to operate the first screen with the second screen on which the related information is displayed on the first screen.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present disclosure relates to a substrate processing apparatus, a substrate processing method, a method for manufacturing a semiconductor device, a program, and a control device. [Background technology]

[0002] For example, Patent Document 1 describes a substrate processing apparatus capable of displaying an operable sub-screen superimposed on a main screen that displays apparatus information used in the substrate processing apparatus. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2013-153216 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, when a user operates a substrate processing apparatus, the user operates the apparatus on an operation screen, and therefore there is a demand for improving the efficiency of operations on the operation screen.

[0005] The present disclosure provides a technique capable of improving the efficiency of operation on a main screen on which apparatus information used in a substrate processing apparatus can be displayed or operated. [Means for solving the problem]

[0006] According to one aspect of the present disclosure, a technology is provided that includes a display unit that displays a first screen capable of displaying or manipulating equipment information used in a substrate processing apparatus, and a second screen capable of displaying related information related to the equipment information, and a control unit that enables the first screen to be operated while the second screen displaying the related information is displayed on the first screen. Effect of the Invention

[0007] According to the present disclosure, it is possible to improve the efficiency of operation on a main screen on which apparatus information used in a substrate processing apparatus can be displayed or operated. [Brief description of the drawings]

[0008] [Figure 1] 1 is a perspective view illustrating an example of a substrate processing apparatus according to an embodiment of the present invention. [Diagram 2] 2 is a schematic configuration diagram of a processing furnace in the substrate processing apparatus shown in FIG. [Diagram 3] 2 is a block diagram showing an example of a configuration of a control device included in the substrate processing apparatus according to the embodiment. FIG. [Figure 4] 2 is a block diagram showing an example of a functional configuration of the substrate processing apparatus according to the embodiment; FIG. [Diagram 5] 4 is a front view showing a schematic example of a first screen displayed on a display unit. FIG. [Figure 6] FIG. 11 is a front view showing an example of a state in which a plurality of second screens are displayed on a first screen. [Figure 7] FIG. 2 is an enlarged view of an example of a second screen displayed on a first screen. [Figure 8A] FIG. 13 is an enlarged view of another example of the second screen displayed on the first screen. [Figure 8B] FIG. 13 is an enlarged view of another example of the second screen displayed on the first screen. [Figure 9] FIG. 13 is a front view showing another example of a state in which a plurality of second screens are displayed on the first screen. [Figure 10] 10 is a flowchart showing an example of the flow of a screen display process according to the embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, one embodiment of the present disclosure will be described mainly with reference to Figs. 1 to 10. The drawings used in the following description are all schematic, and the dimensional relationship of each element, the ratio of each element, and the like shown in the drawings do not necessarily match the actual ones. Furthermore, the dimensional relationship of each element, the ratio of each element, and the like between multiple drawings do not necessarily match. Furthermore, the present disclosure is not limited to the following embodiment in any way, and can be implemented with appropriate modifications within the scope of the present disclosure.

[0010] First, an overview of a substrate processing apparatus according to this embodiment will be described with reference to FIGS.

[0011] FIG. 1 is a perspective view that diagrammatically illustrates an example of a substrate processing apparatus 2 according to the present embodiment.

[0012] 1, a substrate processing apparatus 2 according to this embodiment includes a cassette 100 that stores a plurality of substrates 200 made of silicon or the like, and a housing 101. A cassette stage 105, which is a substrate container transfer platform, is installed inside the housing 101 at a cassette loading / unloading port (not shown). The cassette 100 is loaded onto the cassette stage 105 by an in-process transport device (not shown), and is unloaded from the cassette stage 105.

[0013] A cassette shelf 109, which is a substrate container placement shelf, is installed in the approximate center in the front-rear direction within the housing 101, and the cassette shelf 109 is configured to store a plurality of cassettes 100 in a plurality of rows and a plurality of stages. The cassette shelf 109 is provided with a transfer shelf 123 on which the cassettes 100 are stored. A spare cassette shelf 110 is also provided above the cassette stage 105, and is configured to store the cassettes 100 in a spare manner. Between the cassette stage 105 and the cassette shelf 109, a cassette elevator 115 and a cassette transfer machine 114, which are substrate container lifting mechanisms capable of lifting and lowering while holding the cassettes 100, are provided, and the cassette elevator 115 and the cassette transfer machine 114 are configured to transport the cassettes 100 between the cassette stage 105, the cassette shelf 109, and the spare cassette shelf 110 by continuous operations of the cassette elevator 115 and the cassette transfer machine 114.

[0014] Behind the cassette shelf 109, there are a substrate transfer machine 112 capable of rotating or translating the substrate 200 in a horizontal direction, and a transfer elevator 113 for raising and lowering the substrate transfer machine 112. The transfer elevator 113 is installed at the right end of the housing 101. By continuous operation of the transfer elevator 113 and the substrate transfer machine 112, the tweezers 111, which are substrate holders of the substrate transfer machine 112, serve as a placement section for the substrate 200, and the substrate 200 is charged and discharged from the boat 217, which is a substrate holding section.

[0015] A processing furnace 202 is provided above the rear of the housing 101. The lower end of the processing furnace 202 is configured to be opened and closed by a furnace port shutter 116, which is a furnace port opening and closing mechanism. A boat elevator 121, which is a substrate holder lifting mechanism as a lifting mechanism for lifting a boat 217 up and down to the processing furnace 202, is provided below the processing furnace 202, and a seal cap 219 as a lid is horizontally installed on a lifting member 122 as a connector connected to a lifting platform of the boat elevator 121, and the seal cap 219 is configured to support the boat 217 vertically and close the lower end of the processing furnace 202. The boat 217, which is a substrate holder, includes a plurality of boat pillars 221 and is configured to horizontally hold a plurality of substrates 200 (for example, 50 to 150 substrates) aligned vertically with their centers aligned.

[0016] As shown in FIG. 1, above cassette shelf 109, clean unit 118 composed of a supply fan and a dust filter is provided to supply clean air, which is an atmosphere obtained by purifying the outside air flowing in from duct 124, and is configured to circulate the clean air inside housing 101.

[0017] Next, the operation of the substrate processing apparatus 2 according to this embodiment will be described. As shown in Fig. 1, the cassette 100 is loaded through a cassette loading / unloading port, and is automatically transported and handed over to a designated shelf position of the cassette shelf 109 or the spare cassette shelf 110. After being temporarily stored, the cassette 100 is transferred from the cassette shelf 109 or the spare cassette shelf 110 to a transfer shelf 123 or is directly transported to the transfer shelf 123.

[0018] When the cassette 100 is transferred to the transfer shelf 123, the substrate 200 is picked up from the cassette 100 by the tweezers 111 of the substrate transfer machine 112 through a substrate loading / unloading opening, and is charged into the boat 217. After delivering the substrate 200 to the boat 217, the substrate transfer machine 112 returns to the cassette 100 and loads the next substrate 200 into the boat 217.

[0019] When a pre-specified number of substrates 200 are loaded into the boat 217, the lower end of the processing furnace 202, which has been closed by the furnace port shutter 116, is opened by the furnace port shutter 116. Next, the boat 217 holding the group of substrates 200 is loaded into the processing furnace 202 as the seal cap 219 is raised by the boat elevator 121.

[0020] After loading, any processing is performed on the substrate 200 in the processing furnace 202. After the processing, the substrate 200 and the cassette 100 are removed to the outside of the housing 101 by reversing the above-mentioned procedure.

[0021] FIG. 2 is a schematic configuration diagram of the processing furnace 202 in the substrate processing apparatus 2 shown in FIG.

[0022] The processing furnace 202 includes a reaction tube 203. The reaction tube 203 is made of a heat-resistant nonmetallic material such as quartz (SiO2) or silicon carbide (SiC), and has a cylindrical shape with a closed upper end and an open lower end.

[0023] A processing chamber 201 is formed inside the reaction tube 203. A boat 217 serving as a substrate holder is inserted from below into the processing chamber 201, and the substrates 200 held in a horizontal position by the boat 217 are accommodated in a vertically aligned state in multiple stages. The boat 217 accommodated in the processing chamber 201 is configured to be rotatable with a plurality of substrates 200 mounted thereon by rotating a rotation shaft 44 by a rotation mechanism 43 while maintaining the airtightness of the processing chamber 201.

[0024] A manifold 45 is disposed concentrically with the reaction tube 203 below the reaction tube 203. The manifold 45 is made of a metal material such as stainless steel, and has a cylindrical shape with an open upper end and lower end. The manifold 45 supports the reaction tube 203 vertically from the lower end side. That is, the reaction tube 203 forming the processing chamber 201 stands vertically via the manifold 45 to form the processing furnace 202. The lower end of the manifold 45 is configured to be airtightly sealed by a seal cap 219 when the boat elevator 121 rises. A sealing member 219a such as an O-ring that airtightly seals the processing chamber 201 is provided between the lower end of the manifold 45 and the seal cap 219.

[0025] In addition, a gas inlet pipe 47 for introducing a source gas, a purge gas, etc. into the processing chamber 201, and an exhaust pipe 48 for exhausting gas from the processing chamber 201 are connected to the manifold 45. The pressure in the processing chamber 201 is controlled by adjusting the APC valve 35 based on the detection result of a pressure sensor (not shown).

[0026] A heater unit 207 serving as a heating mechanism is disposed around the outer periphery of the reaction tube 203 and concentrically with the reaction tube 203. The heater unit 207 is configured to heat the process chamber 201 so that the process chamber 201 has a uniform or predetermined temperature distribution throughout the process chamber 201.

[0027] 1, the substrate processing apparatus 2 includes a control device 10 that is a main controller, and the control device 10 controls the substrate processing apparatus 2. The control device 10 may be built into the substrate processing apparatus 2, or may be provided accessible outside the substrate processing apparatus 2. The control device 10 controls the operations of the components constituting the substrate processing apparatus 2 and the processing furnace 202.

[0028] Next, the configuration of a control system of the substrate processing apparatus 2 according to this embodiment will be described with reference to FIG.

[0029] FIG. 3 is a block diagram showing an example of the configuration of the control device 10 included in the substrate processing apparatus 2 according to this embodiment.

[0030] As shown in FIG. 3, the substrate processing apparatus 2 includes a control device 10 which is a main controller, an external communication unit 21, an external memory unit 22, an operation unit 23, a display unit 24, a process control unit 25, and a transport control unit 26.

[0031] The control device 10 also includes a control unit 11, a storage unit 14, and an I / O (also called an I / O port) 15. The control unit 11 includes a CPU (Central Processing Unit) 12 and a RAM (Random Access Memory) 13.

[0032] The control device 10 is connected to an operation unit 23, and is also connected to a process control unit 25 and a transport control unit 26 via an I / O 15. The control device 10 is electrically connected to each of the process control unit 25 and the transport control unit 26 via the I / O 15, and is therefore configured to be capable of transmitting and receiving each data, downloading and uploading each file, and the like.

[0033] The control device 10 is connected to an external host computer (not shown) via an external communication unit 21. Therefore, even if the substrate processing apparatus 2 is installed in a clean room, the host computer can be placed in an office or the like outside the clean room. In addition, an external storage unit 22 is connected to the control device 10 as an attachment unit into which a USB (Universal Serial Bus) memory or the like, which is an example of a recording medium, is inserted and removed.

[0034] The operation unit 23 has a display unit 24 as an integral part, or is connected to the display unit 24 via a video cable or the like. The display unit 24 is, for example, a liquid crystal display panel. The display unit 24 is configured to display various operation screens for operating the substrate processing apparatus 2. The operation screen has a screen for checking the state of the substrate process system controlled by the process control unit 25 and the substrate transport system controlled by the transport control unit 26, and the display unit 24 can also be provided with various operation buttons as an input unit for inputting operation instructions to the substrate process system and the substrate transport system. The operation unit 23 displays information generated in the substrate processing apparatus 2 on the display unit 24 via the operation screen. The operation unit 23 also outputs information displayed on the display unit 24 to a device such as a USB memory inserted in the external storage unit 22. The operation unit 23 accepts input data (input instructions) from the operation screen displayed on the display unit 24 and transmits the input data to the control device 10. Furthermore, the operation unit 23 is adapted to receive instructions (control instructions) for executing any substrate processing recipe (also referred to as a process recipe) among the recipes expanded in the RAM 13 or the multiple recipes stored in the memory unit 14, and transmit the instructions to the control device 10. The operation unit 23 and the display unit 24 may be configured as a touch panel. Here, the operation unit 23 and the display unit 24 are provided separately from the control device 10, but may also be configured to be included integrally in the control device 10.

[0035] Although not shown here, the process control unit 25 includes a temperature control unit, a gas flow control unit, and a pressure control unit. Each of these temperature control units, gas flow control units, and pressure control units constitutes a sub-controller, and is electrically connected to the process control unit 25, making it possible to transmit and receive each data, and to download and upload each file. The process control unit 25 and each sub-controller (the temperature control unit, gas flow control unit, and pressure control unit) may be configured separately or integrally.

[0036] The transport control unit 26 includes a mechanism control unit (not shown). The mechanism control unit is configured to control each of the drive system, the rotation system, and the lifting system of the substrate processing apparatus 2. The transport control unit 26 is configured to control the transport operation of each transport mechanism included in the substrate processing apparatus 2.

[0037] The processing of the substrate 200 is performed, for example, according to a recipe that defines processing conditions for the substrate 200. The recipe is stored in the storage unit 14, and the control unit 11 acquires the stored recipe during substrate processing and controls the processing of the substrate according to the processing conditions defined in the recipe. The recipe may be stored not only in the storage unit 14 but also in the external storage unit 22. Examples of the external storage unit 22 include a USB memory, a CD (Compact Disc), a DVD (Digital Versatile Disc), and an external hard disk. The recipe may also be acquired from an external device via the external communication unit 21.

[0038] The control device 10, the process control unit 25, and the transport control unit 26 according to the present embodiment can be realized by using a normal computer system, not a dedicated system. For example, each controller that executes a predetermined process can be configured by installing a program for executing the above-mentioned process from a recording medium (CD-ROM, USB, etc.) that stores the program on a general-purpose computer.

[0039] The means for supplying these programs is arbitrary. As described above, the programs can be supplied via a predetermined recording medium, or, for example, they can be supplied via a communication line, a communication network, a communication system, or the like.

[0040] The control device 10 is configured as a computer including a CPU 12, a RAM 13, a storage unit 14, and an I / O 15. The storage unit 14 stores recipe files such as recipes in which processing conditions and processing procedures are defined, control program files for executing these recipe files, parameter files (setting value files) for setting processing conditions and processing procedures, error processing program files and error processing parameter files, as well as various screen files including an input screen for inputting process parameters, various icon files, and the like (all not shown). The control device 10 is connected to a network such as the Internet, a LAN (Local Area Network), or a WAN (Wide Area Network) by using an external communication unit 21, and is capable of communicating with external devices via the network.

[0041] Furthermore, for example, a hard disk drive (HDD), a solid state drive (SSD), a flash memory, etc. are used as the storage unit 14. The storage unit 14 stores a screen display processing program for executing the screen display processing according to this embodiment.

[0042] The screen display processing program may be pre-installed in, for example, the substrate processing apparatus 2. The screen display processing program may be realized by recording it in a non-volatile recording medium or distributing it via a network and appropriately installing it in the substrate processing apparatus 2. Note that examples of non-volatile recording media include CD-ROMs (Compact Disc Read Only Memory), magneto-optical disks, HDDs, DVD-ROMs (Digital Versatile Disc Read Only Memory), flash memories, memory cards, USBs, and the like.

[0043] The CPU 12 of the substrate processing apparatus 2 according to this embodiment writes a screen display processing program stored in the storage unit 14 into the RAM 13 and executes it, thereby functioning as a display processing unit 12A shown in FIG.

[0044] FIG. 4 is a block diagram showing an example of a functional configuration of the substrate processing apparatus 2 according to this embodiment.

[0045] As shown in Fig. 4, the display unit 24 includes a UI (user interface) unit 24A and a screen unit 24B. The UI unit 24A acquires at least a part of the information displayed on the screen unit 24B as image data and transfers it to the screen unit 24B. The UI unit 24A also accepts input from a user and performs processing. The screen unit 24B presents the image data transferred from the UI unit 24A to the operator.

[0046] The display unit 24 can display a first screen and a second screen. The first screen is a main screen (also called a parent screen), and the second screen is a sub-screen (also called a child screen). The first screen is a screen capable of displaying or operating apparatus information used in the substrate processing apparatus 2, and is, for example, a screen capable of operating buttons in the screen and editing recipes, parameters, and the like. The apparatus information displayed on the first screen is, for example, information including information indicating the state of the substrate processing apparatus 2, recipes and parameters to be edited, and the like. On the other hand, the second screen is a screen capable of displaying related information related to the apparatus information on the first screen, and is, for example, a screen displaying an image capturing at least a part of the first screen, a pre-stored image, a text message, a video, and the like. The related information displayed on the second screen is, for example, information including apparatus information written in a captured image, a text message, and the like.

[0047] The display processing unit 12A enables the display unit 24 to operate the first screen while displaying the second screen on which the related information is displayed on the first screen. In other words, while displaying the second screen on which the related information is displayed superimposed on the first screen, the display processing unit 12A enables operations on the first screen, such as pressing a button, operating a scroll bar, and editing such as inputting or correcting data. The display processing unit 12A enables processing such as loading, saving, and changing the file name of an image file stored in the storage unit 14. The display processing unit 12A enables processing such as adding and deleting text, images, etc. to image data such as a captured image. This makes it possible to operate the first screen while comparing the device information on the first screen and the related information on the second screen on the same screen, for example, on the same display screen.

[0048] FIG. 5 is a front view that diagrammatically illustrates an example of a first screen 240 displayed on the display unit 24. As shown in FIG.

[0049] 5 includes a navigation panel 241, a title panel 242, and an apparatus information display area 244. The first screen 240 is a screen for displaying apparatus information used in the substrate processing apparatus 2, and has a hierarchical structure.

[0050] A plurality of buttons for specifying the first screen 240 to be displayed are arranged on the navigation panel 241. The navigation panel 241 is an area to which a plurality of buttons are fixed. The plurality of buttons arranged on the navigation panel 241 are, for example, a "Job" button, a "System" button, a "Transfer" button, a "Maintenance" button, a "Setup" button, and an "Alarm" button. When any of the plurality of buttons arranged on the navigation panel 241 is pressed, a transition to the screen of the corresponding device information 245 is made.

[0051] Specifically, when the "Job" button is selected, the screen transitions to a screen that displays equipment information related to the job. When the "System" button is selected, the screen transitions to a screen that displays equipment information related to the system. When the "Transfer" button is selected, the screen transitions to a screen that displays equipment information related to substrate transfer. When the "Maintenance" button is selected, the screen transitions to a screen that displays equipment information related to maintenance. When the "Setup" button is selected, the screen transitions to a screen that displays equipment information related to setup. When the "Alarm" button is selected, the screen transitions to a screen that displays equipment information related to alarms. The example in Figure 5 shows the state in which the "Alarm" button has been selected and the corresponding equipment information is displayed.

[0052] The title panel 242 is an area for displaying information related to the entire system. The title panel 242 has a fixed button arrangement area 243. For example, an Sc (screen shot) button 243A is arranged in the button arrangement area 243. The Sc button 243A is a button for instructing a screenshot, and is an example of an instruction section. A screenshot is, for example, a function for storing the device information as image data, and a function for copying at least a partial area of ​​the first screen. An image acquired by this "screen shot" may be displayed, for example, superimposed on the main screen as a sub-screen. In addition to the Sc button 243A, the button arrangement area 243 includes an Me button for instructing display of a message, a Ta button for instructing execution of a task, a Pr button for switching between English and Japanese, and the like.

[0053] The device information display area 244 is an area at the same level as the level at which the buttons of the navigation panel 241 are arranged, and displays device information 245 to be edited. In other words, the navigation panel 241 and the device information display area 244 are displayed in the first level area, and the device information 245 is displayed in the second level area.

[0054] 5, the "Alarm" button on the navigation panel 241 is selected, and therefore device information 245 corresponding to the "Alarm" button is displayed. The device information 245 includes various items such as "Current Alarm", "Alarm History", "Alarm Monitor", etc. These "Current Alarm", "Alarm History", "Alarm Monitor", etc. can be switched and displayed using tags.

[0055] In the example of FIG. 5, the "Current Alarm" tag is selected, and therefore device information 245 corresponding to the "Current Alarm" tag is displayed in the third hierarchical area. The device information 245 includes various items such as "File list", "Line status", ... etc. These "File list", "Line status", ... can be switched and displayed according to tags. Here, the "File list" tag is selected, and a file list 247 to be edited is displayed. Then, the file "A42" in the displayed file list 247 is selected, and alarm information 248 corresponding to "A42" is displayed.

[0056] The second screen 300 displays related information related to the device information of the first screen 240. The display processing unit 12A enables the first screen 240 to be operated while the second screen 300 on which the related information is displayed is displayed on the first screen 240. Specifically, while the second screen 300 is displayed on the first screen 240, it enables the operation of various buttons arranged on the navigation panel 241 and the title panel 242, and the editing of various information on the first screen 240.

[0057] Sc button 243A may be configured to instruct the creation of a copy image (i.e., a capture image) that is an image of first screen 240. In this case, the related information displayed on second screen 300 is a copy image of first screen 240 created in accordance with the instruction from Sc button 243A. This makes it possible to create a capture image of first screen 240 by a simple method. Note that the capture image obtained from first screen 240 may be obtained by specifying the range of first screen 240 as a whole, or may be obtained by specifying the range of a part of first screen 240 as a part.

[0058] The storage unit 14 may also store a copy image of the first screen 240 as related information. When storing related information in the storage unit 14, it is desirable to store the related information in association with pre-specified information of the first screen 240. The pre-specified information of the first screen 240 is, for example, information such as an item name of the navigation panel 241 and a hierarchical name below the item name. As an example, when "Maintenance" is selected in the navigation panel 241 and "monitor" is selected from "monitor", "editor", and "log" which are hierarchical names below the item, "Maintenance" and "monitor" are associated as pre-specified information of the first screen 240. In addition to the item name and hierarchical name, the captured image may be associated with the date and time when it was created. This makes it easier to select related information when reading out the related information later. In particular, by associating the date and time, the history of alarms, etc. can be tracked on the time axis, which further improves the efficiency of operating the image.

[0059] Further, the storage unit 14 may store a plurality of pieces of related information. The display processing unit 12A reads out the related information from the storage unit 14 and displays the read out related information on the second screen 300. This allows the plurality of pieces of related information to be read out and referred to at a desired timing. The related information may be an image showing at least a partial area of ​​the first screen 240. For example, as shown in FIG. 6, a plurality of second screens 300A, 300B showing at least a partial area of ​​the first screen 240 may be displayed on the first screen 240.

[0060] FIG. 6 is a front view showing an example of a state in which a plurality of second screens 300A, 300B are displayed on the first screen 240. The first screen 240 shown in FIG. 6 is a screen displayed when the "Transfer" button on the navigation panel 241 is selected. For example, when a plurality of second screens 300A, 300B are displayed on the first screen 240 including the device information 245 shown in FIG. 5, and the "Transfer" button on the navigation panel 241 is selected, the screen transitions to the screen of the device information 245 shown in FIG. 6. In other words, even if the first screen 240 is operated and the screen of the device information 245 transitions, the plurality of second screens 300A, 300B remain displayed on the first screen 240.

[0061] In FIG. 6, the upper side, i.e., second screen 300A on the title panel 242 side, is an image displaying alarm information corresponding to "A11" in the file list 247 shown in FIG. 5, and the lower side, i.e., second screen 300B on the navigation panel 241 side, is an image displaying alarm information corresponding to "A42" in the file list 247 shown in FIG. 5.

[0062] By treating all areas of first screen 240 as related information, it becomes possible to record all information on first screen 240 and refer to it on any screen. Also, by treating a part of the area of ​​first screen 240 as related information, it becomes possible to immediately identify the part to be checked when reading it out from storage unit 14 at a later date.

[0063] Furthermore, the related information displayed on the second screen 300 may be information that has been stored in advance by a previous operation. Examples of information that has been stored in advance by a previous operation include initial setting data stored in a factory before shipping to a customer, data of an experiment performed by a customer after delivery to the customer, and the like.

[0064] FIG. 7 is an enlarged view of an example of second screen 300 displayed on first screen 240. As shown in FIG.

[0065] As shown in FIG. 7, at least one of the second screen 300 and the related information may be made capable of being displayed in an enlarged or reduced size.

[0066] As an example, the second screen 300 shown in FIG. 7 displays the captured image P1 of the first screen 240 as related information. The second screen 300 is provided with a minimize button 301 for minimizing the second screen 300, a reduce button 302 for reducing the captured image P1, an enlarge button 303 for enlarging the captured image P1, a Text button 304 for adding text information to the captured image P1, a Read button 305 for reading new image data from the storage unit 14 and displaying it, a Save button 306 for saving the captured image P1, a Close button 307 for closing the second screen 300, and a scroll bar 308 for scrolling the captured image P1. The reduce button 302 and the enlarge button 303 allow the captured image P1 to be enlarged or reduced. This makes it easy to compare an item to be confirmed on the first screen 240 with the information on the second screen 300. In addition, for example, the second screen 300 can be enlarged or reduced by dragging the frame around the second screen 300.

[0067] Also, the second screen 300 may be movable on the first screen 240. That is, it is possible to move the second screen 300 closer to the item to be checked on the first screen 240. As a method of moving, for example, a method of dragging the second screen 300 is used. This makes it easy to compare the item to be checked on the first screen 240 with the information on the second screen 300.

[0068] Here, the related information displayed on the second screen 300 is, for example, information indicating the contents of an alarm related to the substrate processing apparatus 2, or information explaining the items displayed on the first screen 240, as shown in Fig. 6 above. For example, while information indicating the contents of an alarm is displayed on the second screen 300, the first screen 240 can be operated to move to a display screen relating to the alarm. Note that the information explaining the items displayed on the first screen 240 is, for example, information indicating help information for the item, explanations of terms, or explanations of operations.

[0069] Furthermore, the related information displayed on the second screen 300 may be information indicating the contents of a plurality of alarms related to the substrate processing apparatus 2, or information explaining a plurality of items displayed on the first screen 240. In this case, the first screen 240 can be operated in a state in which a plurality of second screens 300 displaying information indicating the contents of the alarms, or a plurality of second screens 300 displaying information explaining the items displayed on the first screen 240, are displayed on the first screen 240. For example, when the cause of each alarm is related to a plurality of factors, the first screen 240 can be operated to transition to a display screen relating to the alarms, while information indicating the contents of the alarms is displayed on the plurality of second screens 300.

[0070] In addition, the information indicating the contents of the alarm may be, for example, troubleshooting-related information set for each alarm or for each item of information explaining the alarm. This allows the user to move to various display screens while comparing multiple pieces of troubleshooting-related information, thereby enabling efficient troubleshooting.

[0071] Furthermore, the first screen 240 may be configured to display recipe information (main recipe information or sub-recipe information) that defines the processing conditions for the substrate 200. The related information displayed on the second screen 300 may be at least one piece of information related to the recipe information. In this case, the first screen 240 is made operable while one or more second screens 300 displaying information related to the recipe information are displayed on the first screen 240. This allows the recipe information on the first screen 240 to be confirmed while information related to the recipe information is displayed on the second screen 300, thereby enabling efficient confirmation and editing of the recipe information.

[0072] Furthermore, the related information displayed on the second screen 300 may be sub-recipe information or main recipe information that is linked to the recipe information (main recipe information or sub-recipe information) on the first screen 240. This allows the main recipe information to be confirmed and edited on the first screen 240 while the sub-recipe information is displayed on the second screen 300. Alternatively, the sub-recipe information can be confirmed and edited on the first screen 240 while the main recipe information is displayed on the second screen 300.

[0073] Furthermore, the first screen 240 may be configured to display parameter information of the substrate processing apparatus 2. Then, the second screen 300 may be configured to display comparative parameter information to be compared with the parameter information. The parameter information of the first screen 240 is information obtained in real time from the substrate processing apparatus 2, and the comparative parameter information of the second screen 300 is information stored in advance for comparison. This allows the parameter information of the first screen 240 and the comparative parameter information of the second screen 300 to be compared, so that the state of the apparatus can be easily grasped.

[0074] Furthermore, the display processing unit 12A may set a plurality of authorities for the device information, and may set the authority to view or operate the device information for each authority. The authorities here are set, for example, for the customer's supervisor, the customer's staff, the equipment manufacturer's staff, and the like. For example, by setting the information to be viewable only by the customer's supervisor and the customer's staff, but not by the equipment manufacturer's staff, the equipment manufacturer's staff will not be able to view parameter information that is known only to the customer. By allowing the device information to be viewed or operated for each authority in this way, appropriate information management for each authority is possible.

[0075] 8A and 8B are enlarged views of another example of second screen 300 displayed on first screen 240. FIG.

[0076] The display processing unit 12A may be able to add new information to the related information displayed on the second screen 300. The addition of new information can be performed, for example, by pressing the Text button 304. The new information here is, for example, text information or information that draws attention. Specifically, as shown in FIG. 8A and FIG. 8B, an encircling line 310 is added as an example of information that draws attention, or a note 311 is added as an example of text information. The information that draws attention may be other than the encircling line 310, and may be, for example, a circle, an underline, a check mark, marking, or the like. By adding the encircling line 310 and the note 311 to the capture image P1 as the related information in this way, the previous state can be easily understood the next time the capture image P1 is read out.

[0077] Also, the related information displayed on second screen 300 may be something other than an image, and may be text information. Since second screen 300 can be used as a text message for the user (worker), work efficiency can be improved.

[0078] Fig. 9 is a front view showing another example of a state in which a plurality of second screens 300A, 300B are displayed on first screen 240. First screen 240 shown in Fig. 9 is a screen displayed when the "Alarm" button on navigation panel 241 is selected, and further, the "Monitor Data" tag is selected.

[0079] In FIG. 9, the first screen 240 displays the monitor data list 250. The monitor data list 250 includes an information button 251. When the information button 251 is pressed, the second screen 300A is displayed on the first screen 240. The second screen 300A includes a movement button 320, which is an example of a button that receives a touch operation by the user and instructs the user to move the second screen 300A. The movement button 320 is provided on the top, bottom, left, and right of the second screen 300A, and allows the user to move the second screen 300A up, down, left, and right. The movement button 320 accepts a touch operation even when the user is wearing gloves, allowing the user to move the second screen 300A.

[0080] The second screen 300B displays related information of the monitor data list 250. The related information displayed on the second screen 300B is monitor data showing the operating status of the substrate processing apparatus 2. In this case, the first screen 240 can be edited while viewing the monitor data. The second screen 300B, like the second screen 300A, includes a movement button 320, which is an example of a button that receives a touch operation by the user and instructs the user to move the second screen 300B. The movement button 320 is provided on the top, bottom, left, and right of the second screen 300B, and allows the user to move the second screen 300B up, down, left, and right. The movement button 320 accepts a touch operation even when the user is wearing gloves, allowing the user to move the second screen 300B.

[0081] In the monitor data list 250 of the first screen 240, monitor data names, which are names of monitor data indicating the operating status of the substrate processing apparatus 2, and multiple items related to the monitor data names are displayed. "aa01" to "aa11" in the monitor data list 250 are examples of monitor data names. In the second screen 300B, the monitor data names and some of the multiple items are displayed. In the monitor data list 250 of the first screen 240, all data may not be displayed due to the screen size. In the example of FIG. 9, the monitor data list 250 of the first screen 240 has monitor data, for example, from "aa01" to "aa40", but only "aa01" to "aa11" can be displayed. In contrast, in the second screen 300B, all monitor data names from "aa01" to "aa40" are displayed, but some items (here, the item "Data") from the multiple items in the monitor data list 250 are selected and displayed. This allows some of the monitor data names and items that cannot be displayed on first screen 240 to be displayed on second screen 300B for editing.

[0082] Also, the second screen 300B may be configured to display only a list of monitor data names. That is, in this case, the multiple items included in the monitor data list 250 are not displayed on the second screen 300B. This allows the list of monitor data names that cannot be displayed on the first screen 240 to be displayed on the second screen 300B and edited. Also, the items to be displayed on the second screen 300B may be appropriately selected by the user. In this way, only information that matches the user's purpose can be displayed, making it possible to easily grasp the desired information.

[0083] Next, the operation of the substrate processing apparatus 2 according to this embodiment will be described with reference to FIG.

[0084] FIG. 10 is a flowchart showing an example of the flow of the screen display process according to this embodiment.

[0085] In step S101 in FIG. 10, the CPU 12 displays the first screen 240 shown in FIG. 5 above on the display unit 24, as an example, and waits for an input from the user.

[0086] In step S102, CPU 12 determines whether or not a screen transition button (for example, various buttons arranged on navigation panel 241) has been pressed for first screen 240. If it is determined that the screen transition button has been pressed (if the determination is positive), the process proceeds to step S103, and if it is determined that the screen transition button has not been pressed (if the determination is negative), the process proceeds to step S104.

[0087] In step S103, the CPU 12 transitions to a screen corresponding to the screen transition button pressed in step S102, and returns to step S101 to repeat the process.

[0088] On the other hand, in step S104, the CPU 12 judges whether or not the screenshot button (for example, the Sc button 243A) has been pressed. If it is judged that the screenshot button has not been pressed (if the judgment is negative), the process returns to step S101 and repeats the process. If it is judged that the screenshot button has been pressed (if the judgment is positive), the process proceeds to step S105.

[0089] In step S105, the CPU 12 converts at least a part of the device information displayed on the first screen 240 shown in FIG. 5 described above, for example, into image data.

[0090] In step S106, CPU 12 displays the image data converted in step S105 on second screens 300A and 300B, and also displays second screens 300A and 300B on first screen 240, as shown in FIG.

[0091] In step S107, the CPU 12 waits for an input from the user on the second screen 300 shown in FIG. 7 above, for example.

[0092] In step S108, the CPU 12 judges whether or not a zoom-in / zoom-out button (e.g., zoom-out button 302, zoom-in button 303) has been pressed for the capture image P1 of the second screen 300, as shown in Fig. 7 above, for example. If it is judged that the zoom-in / zoom-out button has been pressed (if the judgment is positive), the process proceeds to step S109, and if it is judged that the zoom-in / zoom-out button has not been pressed (if the judgment is negative), the process proceeds to step S110.

[0093] In step S109, the CPU 12 enlarges or reduces the captured image P1, and the process returns to step S107 to repeat the process.

[0094] On the other hand, in step S110, CPU 12 judges whether or not a text addition button (for example, Text button 304) has been pressed for capture image P1 on second screen 300. If it is judged that the text addition button has been pressed (if the judgment is positive), the process proceeds to step S111, and if it is judged that the text addition button has not been pressed (if the judgment is negative), the process proceeds to step S112.

[0095] In step S111, the CPU 12 adds text (for example, a note 311) to the captured image P1 as shown in, for example, FIGS. 8A and 8B, and returns to step S107 to repeat the process.

[0096] On the other hand, in step S112, the CPU 12 judges whether or not a second screen movement button (e.g., movement button 320) has been pressed for the second screen 300A or the second screen 300B, as shown in the above-mentioned Fig. 9. If it is judged that the second screen movement button has been pressed (if the judgment is positive), the process proceeds to step S113, and if it is judged that the second screen movement button has not been pressed (if the judgment is negative), the process proceeds to step S114.

[0097] In step S113, CPU 12 moves second screen 300A or second screen 300B in accordance with the user's touch operation, and returns to step S107 to repeat the process.

[0098] On the other hand, in step S114, the CPU 12 judges whether or not an instruction to enlarge or reduce has been given for the second screen 300A or the second screen 300B, as shown in Fig. 9. If it is judged that an instruction to enlarge or reduce has been given (if the judgment is positive), the process proceeds to step S115, and if it is judged that an instruction to enlarge or reduce has not been given (if the judgment is negative), the process proceeds to step S116.

[0099] In step S115, the CPU 12 enlarges or reduces the second screen 300A or the second screen 300B, and returns to step S107 to repeat the process.

[0100] On the other hand, in step S116, the CPU 12 determines whether or not a read button (e.g., the Read button 305) for instructing to read new image data from the storage unit 14 has been pressed, as shown in FIG. 7 above. It determines whether or not the read button has been instructed. If it is determined that the read button has been pressed (in the case of a positive determination), the process proceeds to step S117, and if it is determined that the read button has not been pressed (in the case of a negative determination), the process proceeds to step S118.

[0101] In step S117, CPU 12 reads new image data from storage unit 14 in accordance with the user's operation, displays it on second screen 300, and returns to step S107 to repeat the process.

[0102] On the other hand, in step S118, the CPU 12 judges whether or not a save button (e.g., Save button 306) has been pressed for the capture image P1 of the second screen 300, as shown in Fig. 7 above, for example. If it is judged that the save button has been pressed (if the judgment is positive), the process proceeds to step S119, and if it is judged that the save button has not been pressed (if the judgment is negative), the process proceeds to step S120.

[0103] In step S119, the CPU 12 stores the captured image P1 of the second screen 300 in the storage unit 14, and then the process proceeds to step S121.

[0104] On the other hand, in step S120, the CPU 12 judges whether or not a close button (for example, the close button 307) has been pressed on the second screen 300, as shown in, for example, the above-mentioned Fig. 7. If it is judged that the close button has been pressed (if the judgment is positive), the process proceeds to step S121, and if it is judged that the close button has not been pressed (if the judgment is negative), the process returns to step S107 and repeats the process.

[0105] In step S121, the CPU 12 closes the second screen 300 and ends this screen display process.

[0106] Next, a description will be given of a method for processing substrates using the substrate processing apparatus 2. These processes are controlled by the control unit 11 according to a preset recipe. When the boat 217 on which a plurality of substrates 200 are loaded is loaded into the processing chamber 201, the interior of the processing chamber 201 is adjusted to a predetermined pressure and temperature, and a predetermined gas is supplied into the processing chamber 201 through the gas introduction pipe 47.

[0107] The gas introduced from the gas introduction pipe 47 processes each substrate 200. For example, a film is formed on the substrate 200. After a predetermined time has elapsed, the gas supply from the gas introduction pipe 47 is stopped, and the substrate processing is completed. After the substrate 200 has been processed, the boat 217 is unloaded from the processing chamber 201.

[0108] In this embodiment, the substrate processing method may include a step of operating the first screen 240 while displaying the second screen 300 on which related information is displayed on the first screen 240 of the display unit 24, and a step of loading the substrate 200 into the substrate processing apparatus 2 on which the first screen 240 has been operated.

[0109] Furthermore, the method may be a method for manufacturing a semiconductor device that includes a process for processing the substrate 200 in the processing chamber 201 of the substrate processing apparatus 2.

[0110] Thus, according to this embodiment, the main screen (first screen) can be operated while the sub-screen (second screen) on which the related information is displayed is displayed on the main screen. This allows the editing of device information on the main screen while viewing the related information on the sub-screen, thereby improving the efficiency of operation on the main screen.

[0111] The substrate processing apparatus and the control device according to the embodiment have been described above. The embodiment may be in the form of a program for causing a computer to execute the functions of the substrate processing apparatus and the control device. The embodiment may be in the form of a non-transitory recording medium that stores the program and is readable by the computer.

[0112] Furthermore, the configurations of the substrate processing apparatus and control apparatus described in the above embodiment are merely examples, and may be modified according to circumstances without departing from the spirit of the invention.

[0113] Furthermore, the processing flow of the program described in the above embodiment is also one example, and unnecessary steps may be deleted, new steps may be added, or the processing order may be rearranged, without departing from the spirit of the invention.

[0114] In the above embodiment, the processing according to the embodiment is realized by a software configuration using a computer by executing a program, but the present invention is not limited to this. The embodiment may be realized by, for example, a hardware configuration or a combination of a hardware configuration and a software configuration.

[0115] In the above embodiment, an example was described in which a predetermined process is performed on a surface of a substrate using a batch-type substrate processing apparatus that processes multiple substrates at a time. The present disclosure is not limited to the above embodiment, and can be suitably applied to, for example, a case in which a predetermined process is performed on a surface of a substrate using a single-wafer type substrate processing apparatus that processes one or several substrates at a time. In the above embodiment, an example was described in which a predetermined process is performed on a surface of a substrate using a substrate processing apparatus having a hot-wall type processing furnace. The present disclosure is not limited to the above embodiment, and can be suitably applied to, for example, a case in which a predetermined process is performed on a surface of a substrate using a substrate processing apparatus having a cold-wall type processing furnace.

[0116] When these substrate processing apparatuses are used, the processes can be performed under the same processing procedures and conditions as in the above embodiment, and the same effects as in the above embodiment can be obtained. [Explanation of symbols]

[0117] 2. Substrate Processing Equipment 11 Control section 24 Display 240 1st screen 300,300A,300B 2nd screen

Claims

1. a control unit for controlling a display unit to display a first screen capable of displaying or manipulating apparatus information used in the substrate processing apparatus and a second screen capable of displaying related information related to the apparatus information, the control unit controlling the first screen to be operable while displaying the second screen on which the related information is displayed on the first screen; A substrate processing apparatus comprising:

2. An instruction unit for instructing the creation of a copy image which is an image of the first screen, the related information is the copy image of the first screen created in accordance with an instruction by the instruction unit; The substrate processing apparatus according to claim 1 .

3. Further comprising a storage unit that stores a plurality of pieces of related information; The control unit reads out the related information from the storage unit and enables control to display the read out related information on the second screen. The substrate processing apparatus according to claim 1 .

4. the related information is an image showing at least a part of an area of ​​the first screen, The substrate processing apparatus according to claim 1 .

5. The control unit is configured to enlarge or reduce at least one of the second screen and the related information for display. The substrate processing apparatus according to claim 1 .

6. The control unit makes the second screen movable on the first screen. The substrate processing apparatus according to claim 4 .

7. the second screen includes a button for receiving a touch operation by a user and instructing a movement of the second screen; The substrate processing apparatus according to claim 1 .

8. The related information is information indicating the contents of an alarm related to the substrate processing apparatus or information explaining an item displayed on the first screen. The substrate processing apparatus according to claim 1 .

9. the related information is information indicating contents of a plurality of alarms related to the substrate processing apparatus, or information explaining a plurality of items displayed on the first screen, The control unit makes the first screen operable in a state in which a plurality of the second screens displaying information indicating the contents of the alarm or a plurality of the second screens displaying information explaining the items displayed on the first screen are displayed on the first screen. The substrate processing apparatus according to claim 1 .

10. The information indicating the contents of the alarm is information related to troubleshooting set for each of the alarms or for each of the information explaining the items. The substrate processing apparatus according to claim 8 .

11. The first screen displays recipe information that defines processing conditions for the substrate, The related information is sub-recipe information or main recipe information linked to the recipe information. The substrate processing apparatus according to claim 1 .

12. The first screen displays parameter information of the substrate processing apparatus, The second screen can display comparative parameter information to be compared with the parameter information. The substrate processing apparatus according to claim 1 .

13. the control unit sets a plurality of authorities for the device information, and makes it possible to set a viewing or operation authority for the device information for each of the set authorities. The substrate processing apparatus according to claim 1 .

14. The control unit enables new information to be added to the related information displayed on the second screen. The substrate processing apparatus according to claim 1 .

15. The new information is text information or information that draws attention. The substrate processing apparatus of claim 14 .

16. The related information displayed on the second screen is text information. The substrate processing apparatus according to claim 1 .

17. The related information is monitor data indicating an operating status of the substrate processing apparatus. The substrate processing apparatus according to claim 1 .

18. The first screen displays a monitor data name, which is a name of monitor data indicating an operating status of the substrate processing apparatus, and a plurality of items related to the monitor data name, The second screen displays the monitor data name and some of the multiple items. The substrate processing apparatus according to claim 1 .

19. The first screen displays a monitor data name, which is a name of monitor data indicating an operating status of the substrate processing apparatus, and a plurality of items related to the monitor data name, A list of the monitor data names is displayed on the second screen. The substrate processing apparatus according to claim 1 .

20. a step of manipulating a first screen of a display unit capable of displaying or manipulating apparatus information used in the substrate processing apparatus and a second screen of a display unit capable of displaying related information related to the apparatus information, while displaying the second screen on which the related information is displayed on the first screen; A substrate processing method comprising:

21. A step of processing a substrate in a processing chamber of a substrate processing apparatus that executes the substrate processing method according to claim 20; A method for manufacturing a semiconductor device comprising the steps of:

22. 21. A program for causing a substrate processing apparatus to execute each step of the substrate processing method according to claim 20.

23. a control unit for controlling a display unit to display a first screen capable of displaying or manipulating apparatus information used in the substrate processing apparatus and a second screen capable of displaying related information related to the apparatus information, the control unit controlling the first screen to be operable while displaying the second screen on which the related information is displayed on the first screen; A control device comprising:

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