Sensor and sensor system

Abstract

To provide a sensor and a sensor system that can improve characteristics.SOLUTION: According to an embodiment, a sensor includes an element part. The element part includes a base body including a first area, a second area, and a third area, a first element fixed to the first area, a second element fixed to the second area, and a third element fixed to the third area. The first element includes a first film part. The first film part includes a first resistance member and a first layer including a first material. The second element includes a second film part. The second film part includes a second resistance member, and the second film part does not include the first layer. Alternatively, the second film part includes a second layer, and a second material of the second layer is different from the first material. The third element includes a third film part. The third film part includes a third resistance member. The third film part does not include the first layer. Alternatively, the third film part includes a third layer, and a third material of the third layer is the same as the second material.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] FIELD OF THE DISCLOSURE Embodiments of the present invention relate to sensors and sensor systems. [Background technology]

[0002] For example, there is a sensor for detecting gas, and it is desirable to improve the characteristics of the sensor. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 7188445 Summary of the Invention [Problem to be solved by the invention]

[0004] SUMMARY OF THE DISCLOSURE Embodiments of the present invention provide sensors and sensor systems that allow for improved performance. [Means for solving the problem]

[0005] According to an embodiment of the present invention, a sensor includes an element portion. The element portion includes a base including a first region, a second region, and a third region, a first element fixed to the first region, a second element fixed to the second region, and a third element fixed to the third region. The first element includes a first fixing portion fixed to the first region and a first film portion supported by the first fixing portion. The first film portion includes a first resistance member and a first layer including a first material. The second element includes a second fixing portion fixed to the second region and a second film portion supported by the second fixing portion. The second film portion includes a second resistance member. The third element includes a third fixing portion fixed to the third region and a third film portion supported by the third fixing portion. The third film portion includes a third resistance member. The second film portion and the third film portion satisfy at least one of a first condition and a second condition. In the first condition, the second film portion and the third film portion do not include the first layer. In the second condition, the second film portion includes a second layer, and a second material of the second layer is different from the first material. In the second condition, the third film portion includes a third layer, and a third material of the third layer is the same as the second material. [Brief description of the drawings]

[0006] [Figure 1] FIG. 1 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Diagram 2] FIG. 2 is a schematic plan view illustrating the sensor according to the first embodiment. [Diagram 3] FIG. 3 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 4] FIG. 4 is a schematic view illustrating the operation of the sensor according to the first embodiment. [Diagram 5] FIG. 5 is a schematic view illustrating the operation of the sensor according to the first embodiment. [Figure 6] FIG. 6 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 7] FIG. 7 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 8]FIG. 8 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 9] FIG. 9 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 10] FIG. 10 is a schematic plan view illustrating the sensor according to the first embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios of each part may be different depending on the drawing. In this specification and each drawing, elements similar to those described above with reference to the previous drawings are given the same reference numerals and detailed descriptions thereof will be omitted as appropriate.

[0008] (First embodiment) FIG. 1 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. 2 and 3 are schematic plan views illustrating the sensor according to the first embodiment. FIG. 1 illustrates cross sections taken along lines A1-A2, A3-A4, and A5-A6 in FIGS.

[0009] As shown in Fig. 1, a sensor 110 according to the embodiment includes an element section 10E. The element section 10E includes a base 40. The base 40 includes a first region 41, a second region 42, and a third region 43. The element section 10E further includes a first element 11A, a second element 12A, and a third element 13A. The first element 11A is fixed to the first region 41. The second element 12A is fixed to the second region 42. The third element 13A is fixed to the third region 43.

[0010] At least two of the first region 41, the second region 42, and the third region 43 may be separated from each other. At least two of the first region 41, the second region 42, and the third region 43 may be continuous with each other. The boundaries between these regions may be clear or unclear. The base 40 may be, for example, a substrate. The base 40 may include, for example, a semiconductor substrate (e.g., a silicon substrate), etc. The base 40 may include an electric circuit. The electric circuit may include a transistor, etc.

[0011] The first element 11A includes a first fixed portion 11F fixed to the first region 41 and a first film portion 11 supported by the first fixed portion 11F. The first film portion 11 includes a first resistance member 11r and a first layer 11L including a first material. For example, a first gap g1 may be provided between the first region 41 and the first film portion 11.

[0012] The second element 12A includes a second fixed portion 12F fixed to the second region 42 and a second membrane portion 12 supported by the second fixed portion 12F. The second membrane portion 12 includes a second resistance member 12r. A second gap g2 may be provided between the second region 42 and the second membrane portion 12.

[0013] The second film portion 12 does not include the first layer 11L. Alternatively, as described below, the second film portion 12 may include a second layer 12L (see FIG. 6). In this case, the second material of the second layer 12L is different from the first material. In the sensor 110, the second film portion 12 does not include the first layer 11L and does not include the second layer 12L.

[0014] The third element 13A includes a third fixed portion 13F fixed to the third region 43 and a third membrane portion 13 supported by the third fixed portion 13F. The third membrane portion 13 includes a third resistance member 13r. A third gap g3 may be provided between the third region 43 and the third membrane portion 13.

[0015] The third film portion 13 does not include the first layer 11L. Alternatively, as described below, the third film portion 13 may include a third layer 13L (see FIG. 6). In this case, the third material of the third layer 13L is the same as the second material. In the sensor 110, the third film portion 13 does not include the first layer 11L and does not include the third layer 13L.

[0016] For example, the second film portion 12 and the third film portion 13 may satisfy at least one of a first condition and a second condition. In the first condition, the second film portion 12 and the third film portion 13 do not include the first layer 11L. In the second condition, the second film portion 12 includes a second layer 12L, and the second material of the second layer 12L is different from the first material. In the second condition, the third film portion 13 includes a third layer 13L, and the third material of the third layer 13L is the same as the second material.

[0017] For example, the first material of the first layer 11L includes at least one selected from the group consisting of Pt and Pd. These materials function as, for example, a catalyst. The first layer 11L is a metal film. This metal film may include other elements (metals) in addition to at least one selected from the group consisting of Pt and Pd.

[0018] In one example, the temperature of the first film portion 11 and the temperature of the second film portion 12 increase. The increase in temperature may be based on, for example, irradiation of electromagnetic waves such as laser light, or Joule heat. The method of increasing the temperature is arbitrary. The temperature of the third film portion 13 does not have to be increased intentionally. In an embodiment, the temperature may increase by supplying power to the resistance member.

[0019] In one example, the temperature of the first film portion 11 including the first layer 11L changes according to the state of the detection target (e.g., gas concentration) present around the element portion 10E. The temperature of the first resistance member 11r changes according to the state of the detection target. Meanwhile, the temperature of the second film portion 12 not including the first layer 11L is different from the temperature of the first film portion 11. By comparing the signal obtained from the first resistance member 11r with the signal obtained from the second resistance member 12r, the state of the detection target that can react with the first layer 11L can be detected. For example, the concentration of a gas that can react with the first layer 11L can be detected.

[0020] On the other hand, by comparing the signal obtained from the second resistor 12r with the signal obtained from the third resistor 13r, the influence of unintended temperature fluctuations is suppressed. According to the embodiment, the detection target can be detected with high accuracy. According to the embodiment, a sensor capable of improving characteristics can be provided.

[0021] 1, the sensor 110 may further include a detection unit 70. For example, the detection unit 70 includes a first differential circuit 71 and a second differential circuit 72. In a first operation, the first differential circuit 71 can output a first difference signal Sd1 corresponding to a first difference between a first signal S1 obtained from the first resistance member 11r and a second signal S2 obtained from the second resistance member 12r.

[0022] In the second operation, the second differential circuit 72 is capable of outputting a second difference signal Sd2 corresponding to a second difference between the second signal S2 obtained from the second resistance element 12r and the third signal S3 obtained from the third resistance element 13r.

[0023] The first difference signal Sd1 can change depending on the concentration of a first gas present around the element portion 10E. The first gas includes at least one selected from the group consisting of ammonia, methane, and hydrogen. The first gas corresponds to the detection target.

[0024] The second difference signal Sd2 is variable according to the concentration of a second gas present around the element portion 10 E. The second gas includes at least one selected from the group consisting of carbon dioxide, ammonia, methane, and hydrogen.

[0025] The first and second operations correspond to the detection operation of the detection object. In the detection operation, the detection unit 70 increases the temperature of the film portion.

[0026] For example, as shown in Fig. 1, the first film portion 11 may further include a first conductive member 11c. The second film portion 12 may further include a second conductive member 12c. These conductive members function as heaters. For example, the temperature of the film portion increases due to Joule heat.

[0027] As shown in FIG. 2, in the first operation, the detection unit 70 supplies a first power PV1 to the first conductive member 11c. In the first operation, the detection unit 70 supplies a second power PV2 to the second conductive member 12c. These powers increase the temperature of the first film portion 11 and the temperature of the second film portion 12. In the first film portion 11, the first layer 11L whose temperature has increased reacts with the detection target. For example, the reaction increases the temperature of the first film portion 11. For example, when the above-mentioned first gas (at least one selected from the group consisting of ammonia, methane, and hydrogen) is present as the detection target gas, the temperature of the first film portion 11 changes depending on the concentration of the first gas.

[0028] For example, the temperature of the first resistance member 11r when the concentration of the first gas is high is higher than the temperature of the first resistance member 11r when the concentration of the first gas is low. The first element 11A functions as, for example, a combustion type gas sensor (for example, a catalytic combustion type gas sensor).

[0029] Meanwhile, in the first operation, the detection unit 70 supplies the second power PV2 to the second conductive member 12c. The temperature of the second film portion 12 rises. The temperature of the second film portion 12 is affected by heat conduction from the detection target existing around the second film portion 12. For example, when a gas with high thermal conductivity is present, heat is dissipated and the temperature of the second film portion 12 decreases.

[0030] For example, the thermal conductivity of carbon dioxide and argon is lower than that of air. When the second gas contains these gases, the temperature of the second resistance member 12r when the concentration of the second gas is high is higher than the temperature of the second resistance member 12r when the concentration of the second gas is low.

[0031] For example, the thermal conductivity of hydrogen and methane is higher than that of air. When the second gas contains these gases, the temperature of the second resistance member 12r when the concentration of the second gas is high is lower than the temperature of the second resistance member 12r when the concentration of the second gas is low.

[0032] By evaluating the second signal S2 obtained from the second resistor 12r, the temperature of the second resistor 12r can be detected, and thus the concentration of the second gas can be detected.

[0033] No power needs to be supplied to the third film portion 13. The temperature of the third film portion 13 does not change substantially. By detecting the difference between the third signal S3 obtained from the third resistance member 13r included in the third film portion 13 and the second signal S2, for example, the influence of changes in the ambient temperature can be suppressed. The detection target can be detected with higher accuracy.

[0034] In the embodiment, the second element 12A functions as a thermal conduction type gas sensor, and the third element 13A functions as a reference sensor.

[0035] As shown in FIG. 1, the third film portion 13 may further include a third conductive member 13c. In the second operation described above, the detection unit 70 does not supply power to the third conductive member 13c. By providing the third conductive member 13c to which no power is supplied, the difference between the heat capacity of the third film portion 13 and the heat capacity of the second film portion 12 can be reduced. The difference can be substantially eliminated. This allows the third element 13A to function more effectively as a reference sensor.

[0036] For example, in the first reference example, a combustion type gas sensor and a first reference sensor for the combustion type gas sensor are provided. In this first reference example, a thermal conduction type gas sensor and a second reference sensor for the thermal conduction type gas sensor are provided. In this first reference example, four sensors are provided, making it difficult to miniaturize the sensors. In contrast, in the embodiment, three sensors are used. This makes it easy to miniaturize the sensors.

[0037] As shown in Fig. 1, a first direction D1 from the first region 41 to the first film portion 11 is defined as the Z-axis direction. As shown in Fig. 2 and Fig. 3, a direction perpendicular to the Z-axis direction is defined as the X-axis direction. A direction perpendicular to the Z-axis direction and the X-axis direction is defined as the Y-axis direction.

[0038] The first region 41, the second region 42, and the third region 43 extend along the XY plane. The first film portion 11, the second film portion 12, and the third film portion 13 extend along the XY plane. The planar shapes of these film portions are arbitrary.

[0039] 1, the first resistance member 11r is provided between the first region 41 and the first layer 11L in the first direction D1. The first layer 11L is likely to come into contact with the detection target gas. Higher sensitivity is easily obtained.

[0040] At least a portion of the first layer 11L may overlap the first resistance member 11r in the first direction D1. The temperature change caused by the action of the first layer 11L is efficiently transmitted to the first resistance member 11r.

[0041] 1, the first film portion 11 may include a first insulating member 11i. The first insulating member 11i is provided around the first resistive member 11r and the first conductive member 11c. The first layer 11L may be provided on the first insulating member 11i.

[0042] The second film portion 12 may include a second insulating member 12i. The second insulating member 12i is provided around the second resistance member 12r and the second conductive member 12c. The third film portion 13 may include a third insulating member 13i. The third insulating member 13i is provided around the third resistance member 13r and the third conductive member 13c. The first insulating member 11i, the second insulating member 12i, and the third insulating member 13i may include, for example, at least one selected from the group consisting of silicon and aluminum, and at least one selected from the group consisting of nitrogen and oxygen. These insulating members may include, for example, SiN.

[0043] 1, the first membrane portion 11 may include a first connecting portion 11C. One end of the first connecting portion 11C is connected to the first fixing portion 11F. The other end of the first connecting portion 11C is connected to the first membrane portion 11. The first membrane portion 11 may be supported by the first fixing portion 11F via the first connecting portion 11C.

[0044] The second membrane portion 12 may include a second connecting portion 12C. One end of the second connecting portion 12C is connected to the second fixing portion 12F. The other end of the second connecting portion 12C is connected to the second membrane portion 12. The second membrane portion 12 may be supported by the second fixing portion 12F via the second connecting portion 12C.

[0045] The third membrane portion 13 may include a third connecting portion 13C. One end of the third connecting portion 13C is connected to the third fixing portion 13F. The other end of the third connecting portion 13C is connected to the third membrane portion 13. The third membrane portion 13 may be supported by the third fixing portion 13F via the third connecting portion 13C.

[0046] 1, the first membrane portion 11 may include a first other fixed portion 11FA and a first other connecting portion 11CA. The first other fixed portion 11FA is fixed to the first region 41. One end of the first other connecting portion 11CA is connected to the first other fixed portion 11FA. The other end of the first other connecting portion 11CA is connected to the first membrane portion 11.

[0047] 1, the second membrane portion 12 may include a second other fixing portion 12FA and a second other connecting portion 12CA. The second other fixing portion 12FA is fixed to the second region 42. One end of the second other connecting portion 12CA is connected to the second other fixing portion 12FA. The other end of the second other connecting portion 12CA is connected to the second membrane portion 12.

[0048] 1, the third membrane portion 13 may include a third other fixed portion 13FA and a third other connection portion 13CA. The third other fixed portion 13FA is fixed to the third region 43. One end of the third other connection portion 13CA is connected to the third other fixed portion 13FA. The other end of the third other connection portion 13CA is connected to the third membrane portion 13.

[0049] 2 and 3, the first membrane portion 11 may be further supported by a first support portion 10p and a second support portion 10q. The second membrane portion 12 may be further supported by a second support portion 10q and a third support portion 10r. The third membrane portion 13 may be further supported by a third support portion 10r and a fourth support portion 10s.

[0050] As shown in FIGS. 2 and 3, the first connection portion 11C, the second connection portion 12C, the third connection portion 13C, the first other connection portion 11CA, the second other connection portion 12CA, and the third other connection portion 13CA may have a meandering structure.

[0051] 2 illustrates the planar shapes of the first layer 11L, the first conductive member 11c, the second conductive member 12c, and the third conductive member 13c. The planar shapes of the first conductive member 11c, the second conductive member 12c, and the third conductive member 13c may be meandering.

[0052] 3 illustrates the planar shapes of the first resistance member 11r, the second resistance member 12r, and the third resistance member 13r. The planar shapes of the first resistance member 11r, the second resistance member 12r, and the third resistance member 13r may be meandering.

[0053] 3, in the detection operation, a detection current may be supplied from a first current source PS1 to a first resistance member 11r. In the detection operation, a detection current may be supplied from a second current source PS2 to a second resistance member 12r. In the detection operation, a detection current may be supplied from a third current source PS3 to a third resistance member 13r. These current sources may be included in the detection unit 70. The voltages at these resistance members may change in response to changes in the resistances of these resistance members.

[0054] FIG. 4 is a schematic view illustrating the operation of the sensor according to the first embodiment. 4 illustrates a first power PV1 supplied to the first conductive member 11c and a second power PV2 supplied to the second conductive member 12c. In FIG. 4, the horizontal axis represents time tm. As already described, these currents may be supplied by the detection unit 70.

[0055] 4, the detection unit 70 may supply a first power PV1 in pulses to the first conductive member 11c, and may supply a second power PV2 in pulses to the second conductive member 12c.

[0056] 4, the detection unit 70 acquires a signal from the first resistance member 11r in a first detection period ST1. The detection unit 70 may perform AD conversion on the signal in the first detection period ST1. The detection unit 70 acquires a signal from the second resistance member 12r in a second detection period ST2. The detection unit 70 may perform AD (Analog to Digital) conversion on the signal in the second detection period ST2.

[0057] The detection unit 70 may detect a difference between a first signal S1 obtained from the first resistance member 11r and a second signal S2 obtained from the second resistance member 12r during a first detection period ST1. During the first detection period ST1, the value of the difference may be AD converted.

[0058] The detection unit 70 may detect a difference between the second signal S2 obtained from the second resistance member 12r and the third signal S3 obtained from the third resistance member 13r during the second detection period ST2. During the second detection period ST2, the value of the difference may be AD converted.

[0059] 4, the first power PV1 can be supplied synchronously with the second power PV2. The first sensing period ST1 can be synchronous with the pulses of the first power PV1. The second sensing period ST2 can be synchronous with the pulses of the second power PV2.

[0060] As shown in Fig. 4, multiple pulses may be provided. The detection operation may be performed repeatedly. The detection unit 70 may perform multiple first operations. The detection unit 70 may perform multiple second operations. The multiple second operations may be performed in synchronization with the multiple first operations.

[0061] FIG. 5 is a schematic view illustrating the operation of the sensor according to the first embodiment. FIG. 5 illustrates the first power PV1 and the second power PV2. In FIG. 5, the horizontal axis is time tm. As shown in FIG. 5, as already described, these currents may be supplied by the detection unit 70. The detection unit 70 may perform a plurality of first operations. In this case, the detection unit 70 may change the first power PV1 in the plurality of first operations. For example, the pulse height of the first power PV1 in one of the plurality of first operations is different from the pulse height of the first power PV1 in another one of the plurality of first operations. By changing the first power PV1 in the plurality of first operations, for example, it is possible to easily separate a plurality of detection target gases. For example, it becomes easy to separate and detect a substance that burns at a low temperature and a substance that burns at a high temperature.

[0062] For example, the detection unit 70 may change the second power PV2 in synchronization with the change of the first power PV1. The detection unit 70 may perform a plurality of second operations. In this case, the detection unit 70 may change the second power PV2 in the plurality of second operations. For example, a pulse height of the second power PV2 in one of the plurality of second operations is different from a pulse height of the second power PV2 in another one of the plurality of second operations.

[0063] FIG. 6 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. 6, in the sensor 111 according to the embodiment, the configurations of the second film portion 12 and the third film portion 13 are different from those of the sensor 110. Except for this, the configuration of the sensor 111 may be similar to the configuration of the sensor 110.

[0064] In the sensor 111, the second film portion 12 includes a second layer 12L. The third film portion 13 includes a third layer 13L. As already described, the second material of the second layer 12L is different from the first material. The third material of the third layer 13L is the same as the second material. For example, the second material includes Au.

[0065] The second material is different from the first material, and thus the combustion of the detection target is different. As a result, the first element 11A functions as a combustion gas sensor, and the second element 12A functions as a thermal conduction gas sensor. The combustion of the first material with respect to the detection target is higher than the combustion of the second material with respect to the detection target. The types of detection targets can be effectively separated.

[0066] 6, the second resistor 12r may be provided between the second region 42 and the second layer 12L. The third resistor 13r may be provided between the third region 43 and the third layer 13L. The second layer 12L and the third layer 13L may be provided on a surface of the membrane portion.

[0067] FIG. 7 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. 7, in sensor 120 according to the embodiment, the configuration of element unit 10E is different from the configuration of element unit 10E in sensor 110. Except for this, the configuration of sensor 120 may be similar to the configuration of sensor 110 or the configuration of sensor 111.

[0068] In the sensor 120, the element section 10E includes a first series resistance member 11s, a second series resistance member 12s, and a third series resistance member 13s. The first series resistance member 11s is electrically connected in series with the first resistance member 11r. The second series resistance member 12s is electrically connected in series with the second resistance member 12r. The third series resistance member 13s is electrically connected in series with the third resistance member 13r.

[0069] The first circuit CR1 including the first resistor 11r and the first series resistor 11s is electrically connected in parallel to the second circuit CR2 including the second resistor 12r and the second series resistor 12s. The third circuit CR3 including the third resistor 13r and the third series resistor 13s is electrically connected in parallel to the second circuit CR2.

[0070] The first resistance element 11r, the first series resistance element 11s, the second resistance element 12r, and the second series resistance element 12s form one bridge circuit. The second resistance element 12r, the second series resistance element 12s, the third resistance element 13r, and the third series resistance element 13s form one bridge circuit. By detecting signals obtained from these bridge circuits, the detection target can be detected with high accuracy.

[0071] As shown in FIG. 7, the sensor 120 may further include a detection unit 70. The detection unit 70 may include a first differential circuit 71 and a second differential circuit 72. The element unit 10E may include a first connection point CP1, a second connection point CP2, and a third connection point CP3. The first connection point CP1 is an electrical connection point between the first resistance member 11r and the first series resistance member 11s. The second connection point CP2 is an electrical connection point between the second resistance member 12r and the second series resistance member 12s. The third connection point CP3 is an electrical connection point between the third resistance member 13r and the third series resistance member 13s.

[0072] In the first operation, the detection unit 70 can apply a first detection voltage SV1 to the first circuit CR1 and the second circuit CR2. In the second operation, the detection unit 70 can apply a second detection voltage SV2 to the second circuit CR2 and the third circuit CR3. In the first operation, the first differential circuit 71 of the detection unit 70 can output a first difference signal Sd1 according to a first difference between a first signal S1 obtained from the first connection point CP1 and a second signal S2 obtained from the second connection point CP2. In the second operation, the second differential circuit 72 can output a second difference signal Sd2 according to a second difference between a second signal S2 obtained from the second connection point CP2 and a third signal S3 obtained from the third connection point CP3. Detection using a bridge circuit allows for more accurate detection.

[0073] An example of the first series resistance element 11s, the second series resistance element 12s, and the third series resistance element 13s will be described below. FIG. 8 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. 9 and 10 are schematic plan views illustrating the sensor according to the first embodiment. FIG. 8 illustrates cross sections taken along lines B1-B2, B3-B4, and B5-B6 in FIGS.

[0074] 8, for example, the base 40 may further include a fourth region 44, a fifth region 45, and a sixth region 46. The element portion 10E further includes a fourth element 14A, a fifth element 15A, and a sixth element 16A. The fourth element 14A is fixed to the fourth region 44. The fifth element 15A is fixed to the fifth region 45. The sixth element 16A is fixed to the sixth region 46. These regions may be continuous or discontinuous with each other.

[0075] The fourth element 14A includes a fourth fixed portion 14F fixed to the fourth region 44 and a fourth membrane portion 14 supported by the fourth fixed portion 14F. The fourth membrane portion 14 includes a first series resistance member 11s. For example, a fourth gap g4 may be provided between the fourth region 44 and the fourth membrane portion 14.

[0076] The fifth element 15A includes a fifth fixed portion 15F fixed to the fifth region 45 and a fifth membrane portion 15 supported by the fifth fixed portion 15F. The fifth membrane portion 15 includes the second series resistance member 12s. A fifth gap g5 may be provided between the fifth region 45 and the fifth membrane portion 15.

[0077] The sixth element 16A includes a sixth fixed portion 16F fixed to the sixth region 46 and a sixth membrane portion 16 supported by the sixth fixed portion 16F. The sixth membrane portion 16 includes a third series resistance member 13s. A sixth gap g6 may be provided between the sixth region 46 and the sixth membrane portion 16.

[0078] The fourth film portion 14, the fifth film portion 15, and the sixth film portion 16 as described above have heat capacities close to those of the first film portion 11, the second film portion 12, and the third film portion 13. This enables detection with higher accuracy.

[0079] For example, the fourth membrane portion 14 may further include a fourth conductive member 14c, the fifth membrane portion 15 may further include a fifth conductive member 15c, and the sixth membrane portion 16 may further include a sixth conductive member 16c.

[0080] 8, the fourth film portion 14 may include a fourth insulating member 14i. The fourth insulating member 14i is provided around the first series resistance member 11s and the fourth conductive member 14c. The fifth film portion 15 may include a fifth insulating member 15i. The fifth insulating member 15i is provided around the second series resistance member 12s and the fifth conductive member 15c. The sixth film portion 16 may include a sixth insulating member 16i. The sixth insulating member 16i is provided around the third series resistance member 13s and the sixth conductive member 16c.

[0081] The fourth membrane portion 14 may include a fourth connecting portion 14C. One end of the fourth connecting portion 14C is connected to the fourth fixing portion 14F. The other end of the fourth connecting portion 14C is connected to the fourth membrane portion 14. The fifth membrane portion 15 may include a fifth connecting portion 15C. One end of the fifth connecting portion 15C is connected to the fifth fixing portion 15F. The other end of the fifth connecting portion 15C is connected to the fifth membrane portion 15. The sixth membrane portion 16 may include a sixth connecting portion 16C. One end of the sixth connecting portion 16C is connected to the sixth fixing portion 16F. The other end of the sixth connecting portion 16C is connected to the sixth membrane portion 16.

[0082] 8, the fourth membrane portion 14 may include a fourth other fixed portion 14FA and a fourth other connection portion 14CA. The fourth other fixed portion 14FA is fixed to the fourth region 44. One end of the fourth other connection portion 14CA is connected to the fourth other fixed portion 14FA. The other end of the fourth other connection portion 14CA is connected to the fourth membrane portion 14.

[0083] 8, the fifth membrane portion 15 may include a fifth other fixed portion 15FA and a fifth other connection portion 15CA. The fifth other fixed portion 15FA is fixed to the fifth region 45. One end of the fifth other connection portion 15CA is connected to the fifth other fixed portion 15FA. The other end of the fifth other connection portion 15CA is connected to the fifth membrane portion 15.

[0084] 8, the sixth membrane portion 16 may include a sixth other fixed portion 16FA and a sixth other connection portion 16CA. The sixth other fixed portion 16FA is fixed to the sixth region 46. One end of the sixth other connection portion 16CA is connected to the sixth other fixed portion 16FA. The other end of the sixth other connection portion 16CA is connected to the sixth membrane portion 16.

[0085] 9 and 10, the fourth membrane portion 14 may be further supported by a fifth support portion 10t and a sixth support portion 10u. The fifth membrane portion 15 may be further supported by a sixth support portion 10u and a seventh support portion 10v. The sixth membrane portion 16 may be further supported by a seventh support portion 10v and an eighth support portion 10w.

[0086] As shown in FIGS. 9 and 10, the fourth connection portion 14C, the fifth connection portion 15C, the sixth connection portion 16C, the fourth other connection portion 14CA, the fifth other connection portion 15CA, and the sixth other connection portion 16CA may have a meandering structure.

[0087] The first series resistance element 11s, the second series resistance element 12s, and the third series resistance element 13s illustrated in Figures 8 to 10 may be connected to the first resistance element 11r, the second resistance element 12r, and the third resistance element 13r, as illustrated in Figure 7.

[0088] Except for the fourth element 14A, the fifth element 15A, and the sixth element 16A, the configuration of the sensor 120 may be similar to the configuration of the sensor 110 and the sensor 111. For example, in the sensor 120, the first film portion 11 may further include a first conductive member 11c (see FIG. 1). In the sensor 120, the second film portion 12 may further include a second conductive member 12c (see FIG. 1). In the first operation, the detection portion 70 may supply a first power PV1 to the first conductive member 11c and a second power PV2 to the second conductive member 12c. In the sensor 120, power may not be supplied to the third conductive member 13c.

[0089] The second embodiment relates to a sensor system 210 (see FIG. 1 or FIG. 7). The sensor system 210 includes the above-mentioned sensor (for example, the sensor 110, the sensor 111, or the sensor 120) and a communication unit 75. The communication unit 75 can transmit a signal St1 corresponding to the first difference signal Sd1 and the second difference signal Sd2. The signal St1 may be supplied to an external device by any method, for example, wirelessly or wired. For example, the detection result may be acquired at a remote location. For example, control based on the detection result may be performed at a remote location.

[0090] The embodiments may include the following technical solutions. (Technical proposal 1) a substrate including a first region, a second region, and a third region; a first element fixed to the first region; a second element fixed to the second region; a third element fixed to the third region; An element portion including The first element is A first fixed portion fixed to the first region; A first membrane portion supported by the first fixed portion; Including, the first film portion includes a first resistance member and a first layer including a first material; The second element is A second fixed portion fixed to the second region; A second membrane portion supported by the second fixing portion; Including, the second membrane portion includes a second resistance member, The third element is a third fixed portion fixed to the third region; A third membrane portion supported by the third fixed portion; Including, the third membrane portion includes a third resistance member, The second film portion and the third film portion satisfy at least one of a first condition and a second condition, In the first condition, the second film portion and the third film portion do not include the first layer, In the second condition, the second film portion includes a second layer, and a second material of the second layer is different from the first material; In the second condition, the third film portion includes a third layer, and a third material of the third layer is the same as the second material.

[0091] (Technical proposal 2) The sensor described in Technical Proposal 1, wherein the first material includes at least one selected from the group consisting of Pt and Pd.

[0092] (Technical proposal 3) the second film portion includes the second layer, the third film portion includes the third layer, The sensor according to Technical Proposal 2, wherein the second material includes Au.

[0093] (Technical proposal 4) A detection unit is further provided, the detection unit includes a first differential circuit and a second differential circuit; the first differential circuit is capable of outputting a first difference signal corresponding to a first difference between a first signal obtained from the first resistance element and a second signal obtained from the second resistance element in a first operation; The sensor described in any one of Technical Solutions 1 to 3, wherein the second differential circuit is capable of outputting a second difference signal corresponding to a second difference between the second signal obtained from the second resistance element and a third signal obtained from the third resistance element in a second operation.

[0094] (Technical proposal 5) the first difference signal is variable depending on a concentration of a first gas present around the element portion; The sensor according to technical solution 4, wherein the first gas includes at least one selected from the group consisting of ammonia, methane, and hydrogen.

[0095] (Technical proposal 6) the second difference signal is variable depending on a concentration of a second gas present around the element portion; The sensor according to technical solution 5, wherein the second gas includes at least one selected from the group consisting of carbon dioxide, ammonia, methane and hydrogen.

[0096] (Technical proposal 7) The first film portion further includes a first conductive member, The second film portion further includes a second conductive member, The sensor according to any one of Technical Solutions 4 to 6, wherein the detection unit supplies a first power to the first conductive member and a second power to the second conductive member in the first operation.

[0097] (Technical proposal 8) The detection unit supplies the first power in a pulsed manner to the first conductive member, The sensor described in Technical Proposal 7, wherein the detection unit supplies the second power to the second conductive member in a pulsed manner.

[0098] (Technical proposal 9) The detection unit performs a plurality of the first operations; The sensor described in Technical Proposal 8, wherein the detection unit changes the first power in the multiple first operations.

[0099] (Technical proposal 10) The detection unit performs a plurality of the first operations; The sensor described in technical proposal 8, wherein a pulse height of the first power in one of the plurality of first operations is different from a pulse height of the first power in another of the plurality of first operations.

[0100] (Technical proposal 11) the third film portion further includes a third conductive member, The sensor according to any one of Technical Solutions 7 to 10, wherein the detection section does not supply power to the third conductive member in the second operation.

[0101] (Technical proposal 12) the first element is a combustion type gas sensor, the second element is a thermal conduction type gas sensor, The sensor according to any one of Technical Solutions 1 to 11, wherein the third element is a reference sensor.

[0102] (Technical proposal 13) a first gap is provided between the first region and the first film portion; a second gap is provided between the second region and the second membrane portion; The sensor according to any one of Technical Solutions 1 to 12, wherein a third gap is provided between the third region and the third membrane portion.

[0103] (Technical proposal 14) The sensor according to any one of Technical Solutions 1 to 13, wherein at least a portion of the first layer overlaps with the first resistance member in a first direction from the first region to the first membrane portion.

[0104] (Technical proposal 15) The sensor according to any one of Technical Solutions 1 to 14, wherein the first resistance member is provided between the first region and the first layer.

[0105] (Technical proposal 16) the second resistance member is provided between the second region and the second layer, The sensor described in technical proposal 3, wherein the third resistance member is arranged between the third region and the third layer.

[0106] (Technical proposal 17) The element portion is a first series resistance element electrically connected in series with the first resistance element; a second series resistance element electrically connected in series with the second resistance element; a third series resistance element electrically connected in series with the third resistance element; Further comprising: a first circuit including the first resistance element and the first series resistance element is electrically connected in parallel with a second circuit including the second resistance element and the second series resistance element; The sensor according to any one of Technical Solutions 1 to 3, wherein a third circuit including the third resistance element and the third series resistance element is electrically connected in parallel with the second circuit.

[0107] (Technical proposal 18) A detection unit is further provided, The element portion is a first connection point between the first resistance member and the first series resistance member; a second connection point between the second resistance member and the second series resistance member; a third connection point between the third resistance member and the third series resistance member; Including, the detection unit is capable of applying a first detection voltage to the first circuit and the second circuit in a first operation; the detection unit is capable of applying a second detection voltage to the second circuit and the third circuit in a second operation; the detection unit includes a first differential circuit and a second differential circuit; the first differential circuit is capable of outputting a first difference signal corresponding to a first difference between a first signal obtained from the first connection point and a second signal obtained from the second connection point in the first operation; The sensor described in Technical Proposal 17, wherein the second differential circuit is capable of outputting a second difference signal corresponding to a second difference between the second signal obtained from the second connection point and a third signal obtained from the third connection point in the second operation.

[0108] (Technical proposal 19) The first film portion further includes a first conductive member, The second film portion further includes a second conductive member, The sensor described in Technical Proposal 18, wherein the detection unit supplies a first power to the first conductive member and a second power to the second conductive member in the first operation.

[0109] (Technical proposal 20) A sensor according to technical proposal 4 or 18; a communication unit capable of transmitting signals corresponding to the first difference signal and the second difference signal; A sensor system comprising:

[0110] According to the embodiment, a sensor and a sensor system capable of improving characteristics can be provided.

[0111] The above describes the embodiments of the present invention with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of each element included in the sensor and sensor system, such as the region, element portion, fixing member, connecting member, film portion, resistance member, conductive member, and control portion, are included in the scope of the present invention as long as a person skilled in the art can implement the present invention in a similar manner and obtain similar effects by appropriately selecting them from the known range.

[0112] Any combination of two or more elements of each embodiment, within the scope of technical feasibility, is also included within the scope of the present invention as long as it includes the gist of the present invention.

[0113] In addition, all sensors and sensor systems that can be implemented by a person skilled in the art by making appropriate design modifications based on the sensors and sensor systems described above as embodiments of the present invention also fall within the scope of the present invention as long as they include the gist of the present invention.

[0114] In addition, within the scope of the concept of the present invention, a person skilled in the art may conceive of various modifications and alterations, and it will be understood that these modifications and alterations also fall within the scope of the present invention.

[0115] Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included in the scope and spirit of the invention, and are included in the scope of the invention and its equivalents described in the claims. [Explanation of symbols]

[0116] 10E: element portion, 10p-10w: first to eighth support portions, 11-16: first to sixth film portions, 11A-16A: first to sixth elements, 11C-16C: first to sixth connection portions, 11CA-16CA: first to sixth other connection portions, 11F-16F: first to sixth fixed portions, 11FA-16FA: first to sixth other fixed portions, 11L-13L: first to third layers, 11c-16c: first to sixth conductive members, 11i-16i: first to sixth insulating members, 11r-13r: first to third resistance members, 11s-13s: first to third series resistance members, 40: base, 41-46: first to sixth regions, 70: detection portion, 71, 72: first and second differential circuits; 75: communication unit; 110, 111, 120: sensors; 210: sensor system; CP1 to CP3: first to third connection points; CR1 to CR3: first to third circuits; D1: first direction; PS1 to PS3: first to third current sources; PV1, PV2: first and second powers; S1 to S3: first to third signals; ST1, ST2: first and second detection periods; SV1, SV2: first and second detection voltages; Sd1, Sd2: first and second difference signals; St1: signal; g1 to g6: first to sixth gaps

Claims

1. a substrate including a first region, a second region, and a third region; a first element fixed to the first region; a second element fixed to the second region; a third element fixed to the third region; An element portion including The first element is A first fixed portion fixed to the first region; A first membrane portion supported by the first fixed portion; Including, the first film portion includes a first resistance member and a first layer including a first material; The second element is a second fixed portion fixed to the second region; A second membrane portion supported by the second fixing portion; Including, the second membrane portion includes a second resistance member, The third element is a third fixed portion fixed to the third region; A third membrane portion supported by the third fixed portion; Including, the third membrane portion includes a third resistance member, the second film portion and the third film portion satisfy at least one of a first condition and a second condition, In the first condition, the second film portion and the third film portion do not include the first layer, In the second condition, the second film portion includes a second layer, and a second material of the second layer is different from the first material; In the second condition, the third film portion includes a third layer, and a third material of the third layer is the same as the second material.

2. The sensor of claim 1 , wherein the first material comprises at least one selected from the group consisting of Pt and Pd.

3. A detection unit is further provided, the detection unit includes a first differential circuit and a second differential circuit; the first differential circuit is capable of outputting a first difference signal corresponding to a first difference between a first signal obtained from the first resistance element and a second signal obtained from the second resistance element in a first operation; 2. The sensor according to claim 1, wherein the second differential circuit is capable of outputting, in a second operation, a second difference signal corresponding to a second difference between the second signal obtained from the second resistive element and a third signal obtained from the third resistive element.

4. the first difference signal is variable depending on a concentration of a first gas present around the element portion; 4. The sensor of claim 3, wherein the first gas comprises at least one selected from the group consisting of ammonia, methane, and hydrogen.

5. The first film portion further includes a first conductive member, The second film portion further includes a second conductive member, The sensor according to claim 3 , wherein the detection unit supplies a first power to the first conductive member and a second power to the second conductive member in the first operation.

6. The detection unit supplies the first power in a pulsed manner to the first conductive member, The sensor according to claim 5 , wherein the detection unit supplies the second electric power to the second conductive member in a pulsed manner.

7. The detection unit performs a plurality of the first operations; The sensor according to claim 6 , wherein the detection unit changes the first power in the plurality of first operations.

8. The element portion is a first series resistance element electrically connected in series with the first resistance element; a second series resistance element electrically connected in series with the second resistance element; a third series resistance element electrically connected in series with the third resistance element; Further comprising: a first circuit including the first resistance element and the first series resistance element is electrically connected in parallel with a second circuit including the second resistance element and the second series resistance element; The sensor of claim 1 , wherein a third circuit including the third resistive element and the third series resistive element is electrically connected in parallel with the second circuit.

9. A detection unit is further provided, The element portion is a first connection point between the first resistance member and the first series resistance member; a second connection point between the second resistor member and the second series resistor member; a third connection point between the third resistance member and the third series resistance member; Including, the detection unit is capable of applying a first detection voltage to the first circuit and the second circuit in a first operation; the detection unit is capable of applying a second detection voltage to the second circuit and the third circuit in a second operation; the detection unit includes a first differential circuit and a second differential circuit; the first differential circuit is capable of outputting a first difference signal corresponding to a first difference between a first signal obtained from the first connection point and a second signal obtained from the second connection point in the first operation; 9. The sensor according to claim 8, wherein the second differential circuit is capable of outputting a second difference signal corresponding to a second difference between the second signal obtained from the second connection point and a third signal obtained from the third connection point in the second operation.

10. A sensor according to claim 3; a communication unit capable of transmitting a signal corresponding to the first difference signal and the second difference signal; A sensor system comprising:

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