Airtight treatment apparatus

Abstract

To provide an airtight treatment apparatus capable of suppressing a loss of a visibility inside an airtight container through an observation window even without heating the observation window.SOLUTION: An airtight treatment apparatus 10 has an airtight container 1 having an observation window through which an internal treatment region S1 can be observed from outside, a cylindrical peripheral wall 21 surrounding the treatment region S1, and an opening 22 passing through the peripheral wall 21, and includes a guide cylinder 2 that is arranged such that the opening 22 faces the observation window, a transparent tube 3 that is coaxially arranged outside the guide tube 2 and can be rotated along an outer peripheral surface of the guide tube 2, and a drive part 4 for rotating the transparent tube 3 along the outer peripheral surface of the guide tube 2.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a sealed processing apparatus. [Background technology]

[0002] A conventional sealed processing apparatus is disclosed in Patent Document 1. The sealed processing apparatus described in Patent Document 1 is a vacuum deposition apparatus, and includes a sealed container in which a vacuum deposition process is performed in an internal processing region, and an observation window provided in a peripheral wall portion of the sealed container.

[0003] In a vacuum deposition apparatus, the state inside the sealed container is visually observed through an observation window, and the temperature of the object to be processed (for example, the substrate temperature of the deposition substrate) is measured by a pyrometer. The vacuum deposition apparatus described in Patent Document 1 is provided with an infrared irradiator that irradiates infrared rays from outside the sealed container to prevent material from adhering to the observation window due to the processing in the processing area (vacuum deposition processing).

[0004] By providing an infrared irradiator, the observation window can be heated to prevent material from adhering to the observation window, thereby preventing the visibility through the observation window from being impaired. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 4-350166 Summary of the Invention [Problem to be solved by the invention]

[0006] However, the vacuum deposition device described in Patent Document 1 heats the observation window, which makes the observation window susceptible to damage or deterioration due to heat, and also poses the risk of a user or the like coming into contact with the observation window.

[0007] An object of the present invention is to provide a sealed processing apparatus capable of suppressing impairment of visibility inside a sealed container through an observation window without heating the observation window. [Means for solving the problem]

[0008] One embodiment of the sealed processing apparatus according to the present invention comprises a sealed container having an observation window through which the internal processing area can be observed from the outside, a guide tube having a cylindrical peripheral wall surrounding the processing area and an opening penetrating the peripheral wall, the opening being arranged so as to face the observation window, a transparent tube arranged concentrically outside the guide tube and rotatable along the outer peripheral surface of the guide tube, and a drive unit which rotates the transparent tube along the outer peripheral surface of the guide tube. Effect of the Invention

[0009] The sealed processing apparatus according to the above aspect of the present invention has an advantage that the visibility of the inside of the sealed container through the observation window can be prevented from being impaired without heating the observation window. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a cross-sectional perspective view of a sealing treatment device according to an embodiment. [Diagram 2] FIG. 2 is a cross-sectional view of the sealing treatment device according to the embodiment. [Diagram 3] FIG. 3 is a perspective view of a state in which a driving unit is separated from a guide tube and a transparent tube according to the embodiment. [Figure 4] FIG. 4 is a cross-sectional perspective view of a sealed processing device according to a modified example. [Diagram 5] FIG. 5 is a cross-sectional view of a sealing treatment device according to a modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] <Embodiment> The sealing treatment device 10 according to this embodiment is a device capable of performing treatments such as vacuum deposition treatment inside. As shown in FIG. 1, the sealing treatment device 10 includes a sealed container 1 having an observation window 16, a cylindrical guide tube 2, and a transparent tube 3 arranged concentrically on the outside of the guide tube 2. As shown in FIG. 2, the guide tube 2 has an opening 22 formed in a cylindrical peripheral wall 21. The opening 22 is arranged to face the observation window 16. The transparent tube 3 is configured to be rotatable along the outer circumferential surface of the guide tube 2. The sealing treatment device 10 further includes a drive unit 4 for rotating the transparent tube 3.

[0012] According to the sealed processing apparatus 10 of this embodiment, even if material adheres to the transparent cylinder 3 through the opening 22 during processing in the processing region S1, the transparent cylinder 3 can be rotated relative to the guide cylinder 2 to make the position of the transparent cylinder 3 corresponding to the opening 22 transparent. As a result, even if the observation window 16 is not heated, it is possible to prevent the visibility of the inside of the sealed container 1 through the observation window 16 from being impaired.

[0013] For the sake of convenience, the direction parallel to the central axis of the guide tube 2 is defined as the "vertical direction" and the direction perpendicular to the vertical direction is defined as the "radial direction". In addition, within the radial direction, the direction from the inside to the outside is sometimes referred to as the "outward" or "outward direction", and the opposite direction is sometimes referred to as the "inward" or "inward direction". However, the definitions of these directions are merely for the sake of explanation and are not intended to specify the manner of use.

[0014] In this specification, "parallel" refers not only to two straight lines, surfaces, etc. (hereinafter referred to as "straight lines") that do not intersect even when extended, but also to two straight lines, etc. that intersect at an angle of 10° or less. Additionally, "orthogonal" refers to two straight lines, etc. that intersect at an angle of 90°±10°. However, even if two straight lines, etc. do not intersect directly, if they intersect when extended, they are included in the term "orthogonal."

[0015] The sealed processing apparatus 10 may be a vacuum apparatus capable of performing some processing inside, but is preferably a vacuum apparatus capable of performing processing in a vacuum environment. Examples of the vacuum apparatus include a vacuum thin film forming apparatus for forming a film on the surface of an object, a vacuum chemical apparatus for performing a chemical reaction, a vacuum metallurgical apparatus for performing metallurgy, and a vacuum heat treatment apparatus for performing heat treatment such as quenching on metal. Examples of the vacuum thin film forming apparatus include a vacuum deposition apparatus, a plasma CVD apparatus, and a sputtering apparatus. In the following, a vacuum deposition apparatus will be described as an example of the sealed processing apparatus 10.

[0016] As described above, the sealing treatment device 10 according to this embodiment includes the sealed container 1, the guide tube 2, the transparent tube 3, and the drive unit 4, as well as the control device 5. Each element constituting the sealing treatment device 10 will be described in more detail below.

[0017] (Sealed container 1) The sealed container 1 is a container having a processing region S1 therein. The sealed container 1 has an internal space that is sealed. It is preferable that the internal space of the sealed container 1 can be kept at a vacuum. This allows processing to be performed in a vacuum environment when processing is performed in the processing region S1 in the sealed container 1.

[0018] As shown in FIG. 1, the sealed container 1 includes a vacuum port 13 for creating a vacuum inside and a view port 14. The vacuum port 13 and the view port 14 are provided in a side wall 18 of the sealed container 1 and penetrate the side wall 18. A vacuum pump is connected to the vacuum port 13 via a pipe. The view port 14 is closed by a transparent plate 15. The observation window 16 according to this embodiment is composed of an opening surface of the view port 14 and a transparent plate 15 that closes the opening surface. However, the observation window 16 may not be formed in the view port 14 as long as it is an opening that allows the processing region S1 inside the sealed container 1 to be observed from the outside. The observation window 16 may be formed, for example, by fitting the transparent plate 15 into a through hole that penetrates the sealed container 1.

[0019] As shown in FIG. 1, the processing region S1 includes a heating table 11 that accommodates the film forming material X1 and a stage 12 that holds a substrate X2. The heating table 11 has a recess on the upper surface and is formed in a container shape. The heating table 11 can heat the film forming material X1 during the vacuum deposition process. The heating table 11 is disposed in the center of the bottom of the sealed container 1. The stage 12 is disposed at a position opposite to the heating table 11. The stage 12 has a holding mechanism that holds the substrate X2. Examples of the holding mechanism include an electrostatic chuck, a mechanical chuck, and a vacuum chuck. The stage 12 may be configured to rotate around an axis that extends in the vertical direction.

[0020] In this embodiment, the sealed container 1 is composed of a circular bottom plate 17, a cylindrical side wall 18, and a disk-shaped top plate 19, and is formed into a hollow columnar shape as a whole. However, the shape of the sealed container 1 is not particularly limited, and it may be formed into a box shape, a hollow pentagonal shape, a hollow hexagonal shape, or the like. Examples of materials for the sealed container 1 include metal and glass.

[0021] (Guide tube 2) The guide tube 2 guides the rotation of the transparent tube 3. The guide tube 2 has a cylindrical peripheral wall 21 that surrounds the processing region S1. As shown in FIG. 2, an opening 22 is formed in the peripheral wall 21, and the opening 22 is disposed at a position facing the observation window 16.

[0022] The peripheral wall 21 is preferably formed in a cylindrical shape. The peripheral wall 21 preferably covers all parts of the transparent cylinder 3 from the inside except for the part corresponding to the opening 22. This makes it possible to prevent the deposition material X1 from adhering to parts other than the part corresponding to the opening 22 when processing is performed in the processing region S1. However, it is sufficient that the peripheral wall 21 can cover the transparent cylinder 3 from the inside over at least the entire circumferential length at the height position of the opening 22, and it is not necessary for the peripheral wall 21 to cover the part below the lower end of the opening 22 or the part above the upper end of the opening 22.

[0023] The opening 22 radially penetrates the peripheral wall 21. A user can observe the state inside the processing region S1 through the observation window 16, the transparent cylinder 3, and the opening 22, and can measure the surface temperature of the substrate X2 using a radiation thermometer 6 or the like.

[0024] The opening 22 is preferably larger than the observation window 16. The opening 22 is formed in a rectangular shape as shown in Fig. 3. However, the opening 22 may be, for example, a notch shape whose upper end is open to the upper end or lower end of the peripheral wall 21, a circular shape, an elliptical shape, a polygonal shape, or the like.

[0025] Examples of materials for the guide tube 2 include metal, glass, hard synthetic resin, FRP, and carbon. The guide tube 2 may be transparent or opaque. In this specification, "transparent" means that the transmittance for the peak wavelength of visible light is 20% or more, and "opaque" means that the transmittance for the peak wavelength of visible light is less than 20%.

[0026] (Transparent tube 3) As shown in FIG. 3, the transparent tube 3 includes a transparent tube main body 31 and a magnet portion 32 fixed to the transparent tube main body 31. The transparent tube main body 31 is formed in a tube shape, and preferably in a cylindrical shape. The transparent tube main body 31 is arranged concentrically on the outside of the guide tube 2. The transparent tube main body 31 is rotatable along the outer circumferential surface of the guide tube 2. The rotation axis of the transparent tube main body 31 coincides with the central axis of the guide tube 2. Here, "coincide" means to substantially coincide, and for example, when the rotation axis of the transparent tube main body 31 and the central axis of the guide tube 2 are shifted by about the thickness of the transparent tube 3, it falls into the category of "coincide".

[0027] As long as the transparent tube main body 31 can rotate smoothly relative to the guide tube 2, the inner peripheral surface of the transparent tube main body 31 and the outer peripheral surface of the guide tube 2 may be in contact with each other or may be separated by a small gap. In this specification, the state of being in contact or separated by a small gap may be referred to as being "close to each other." The inner peripheral surface of the transparent tube main body 31 and the outer peripheral surface of the guide tube 2 being close to each other can reduce rattling during rotation of the transparent tube main body 31. A sliding plate may be interposed between the transparent tube main body 31 and the guide tube 2.

[0028] The transparent cylindrical body 31 is made of a transparent material such as glass, acrylic resin, etc. The transparent cylindrical body 31 preferably has rigidity, but may have flexibility.

[0029] The magnet unit 32 rotates the transparent tube main body 31 by being moved by the drive unit 4. In the magnet unit 32, the N poles 321 and the S poles 322 are alternately arranged in the circumferential direction. In the magnet unit 32, the N poles 321 and the S poles 322 are continuously arranged without any gaps, but the N poles 321 and the S poles 322 may be spaced apart. In this embodiment, the magnet unit 32 is composed of a sheet-shaped permanent magnet in which the N poles 321 and the S poles 322 are alternately arranged.

[0030] The magnet part 32 is preferably fixed to the outer peripheral surface of the transparent tube main body 31. This can prevent the gap between the transparent tube main body 31 and the guide tube 2 from becoming too large. The magnet part 32 is arranged along the lower edge of the transparent tube main body 31. However, the magnet part 32 may be arranged above the lower edge of the transparent tube main body 31, or along the upper edge. The transparent tube main body 31 and the magnet part 32 are fixed, for example, by adhesion, bonding, screwing, embedding, etc.

[0031] (Drive unit 4) The driving unit 4 rotates the transparent cylinder 3 along the outer circumferential surface of the guide cylinder 2. The driving unit 4 according to this embodiment includes a frame 41 and a plurality of electromagnets 42, as shown in FIG.

[0032] The frame 41 is fixed to the bottom plate 17 of the sealed container 1. The frame 41 is composed of a horizontal piece 411 and a vertical piece 412 protruding upward from a radially middle portion of the horizontal piece 411. The horizontal piece 411 is formed in an annular shape. The radially outer end face of the horizontal piece 411 faces the inner circumferential surface of the guide tube 2. Here, it is preferable that the horizontal piece 411 is fitted inside the guide tube 2. In this way, the guide tube 2 may be fixed to the sealed container 1. The vertical piece 412 is formed in a cylindrical shape having a central axis in the up-down direction. The central axis of the vertical piece 412 preferably coincides with the central axis of the guide tube 2. A plurality of wiring outlet holes 413 are formed in the vertical piece 412. A cable connected to the electromagnet 42 is passed through each wiring outlet hole 413. The material of the frame 41 is preferably a non-magnetic material.

[0033] The electromagnet 42 generates an alternating magnetic field to rotate the transparent cylinder 3. The electromagnet 42 is arranged along the outer circumferential surface of the vertical piece 412, and in this embodiment, is arranged inside the transparent cylinder 3 and the guide cylinder 2. The multiple electromagnets 42 are arranged so that the central angles of adjacent electromagnets 42 are all equal, and in this embodiment, the central angles of adjacent electromagnets 42 are set to 45°. It is preferable that the radially outer end face of the electromagnet 42 does not protrude from the outer end face of the horizontal piece 411.

[0034] The alternating magnetic field generated by the electromagnet 42 causes the magnet portion 32 of the transparent cylinder 3 to move in one circumferential direction and rotate around the central axis of the guide cylinder 2 as the rotation axis. This allows the transparent cylinder 3 to rotate along the outer circumferential surface of the guide cylinder 2. The operation of the drive portion 4 is preferably controlled by a control device 5. Moreover, it is preferable that power is supplied to the electromagnet 42 from outside the sealed container 1, for example, via a vacuum feed-through.

[0035] (Control device 5) The control device 5 controls the drive unit 4. In this embodiment, the control device 5 controls the electromagnet 42 to generate an alternating magnetic field. The control device 5 is a computer having a processor as a main component. The processor executes various functions according to programs stored in the storage. Examples of the processor include a CPU (Central Processing Unit), an MPU (Micro Processing Unit), a GPU (Graphics Processing Unit), and a microprocessor.

[0036] The control device 5 may control the drive unit 4 to rotate or stop the transparent cylinder 3 by an electric signal from the operation unit. An example of the operation unit is a switch that generates an electric signal in response to an operation. Thereby, for example, when a user visually checks the inside of the sealed container 1 through the observation window 16, if the user feels that the film forming material X1 has adhered to the observation window 16 and visibility has decreased, the user can operate the operation unit at his / her discretion to rotate the transparent cylinder 3.

[0037] The control device 5 may control the drive unit 4 to rotate or stop the transparent tube 3 using a detection result from a sensor that detects the transmittance at a position corresponding to the opening 22 in the transparent tube 3. An example of the sensor is an infrared sensor included in the radiation thermometer 6. In this case, the radiation thermometer 6 is communicably connected to the control device 5, and an electric signal from the radiation thermometer 6 is input to the control device 5. The deposition of the film forming material X1 at a position corresponding to the opening 22 in the transparent tube 3 may be detected when the amount of infrared light received by the infrared sensor becomes equal to or lower than a certain level. When the control device 5 detects that the film forming material X1 has been deposited at a position corresponding to the opening 22 in the transparent tube 3, it stops the transparent tube 3 after rotating it a certain distance.

[0038] Another example of the sensor may be a camera (CCD, CMOS, etc.) that captures an image of a position corresponding to the opening 22 in the transparent cylinder 3. From the image data acquired by the camera, the area of ​​the film-forming material X1 attached to the transparent cylinder 3 within the captured area may be extracted by image analysis, and the transparency may be detected based on the proportion of the film-forming material X1 to the captured area.

[0039] In this manner, by using a sensor to detect the transparency at a position corresponding to the opening 22 in the transparent cylinder 3, it is possible to prevent the visibility of the inside of the sealed container 1 through the observation window 16 from being impaired.

[0040] Furthermore, the control device 5 may control the drive unit 4 to constantly rotate the transparent cylinder 3 during the film formation process in the processing region S1. In this case, the transparent cylinder 3 may be rotated at a constant angular velocity, or may be rotated intermittently at regular intervals.

[0041] The control device 5 and the driving unit 4 are preferably connected wirelessly. This makes it easier to maintain the airtight state in the airtight container 1. The control device 5 and the sensor (for example, the infrared sensor of the radiation thermometer 6) may be connected wirelessly or by wire.

[0042] <Modification> The above embodiment is merely one of various embodiments of the present invention. The embodiment can be modified in various ways depending on the design, etc., as long as the object of the present invention can be achieved. Modifications of the embodiment are listed below. The modifications described below can be applied in appropriate combination.

[0043] In the above embodiment, the sealed container 1 is formed in a cylindrical shape, but as shown in Fig. 4, the sealed container 1 may be formed in a box shape. In the above embodiment, the processing area S1 is designed to be as large as possible by bringing the peripheral wall 21 of the transparent cylinder 3 as close as possible to the side wall 18 of the sealed container 1, but as shown in Fig. 4, the transparent cylinder 3 may be separated from the side wall 18 of the sealed container 1. It is preferable that a part of the opening 22 of the guide cylinder 2 is located on a virtual straight line connecting the lowermost edge of the observation window 16 and the center of the substrate X2. This allows the radiation thermometer 6 to measure the surface temperature of the substrate X2 through the observation window 16.

[0044] In the above embodiment, the electromagnet 42 of the driving unit 4 is disposed inside the transparent tube 3, but as shown in FIG. 4, the electromagnet 42 of the driving unit 4 may be disposed outside the transparent tube 3. As shown in FIG. 5, the transparent tube 3 is disposed on the horizontal piece 411 and inside the vertical piece 412. The transparent tube 3 is magnetically attached to the electromagnet 42 via the vertical piece 412. In this case, the guide tube 2 is preferably made of a magnetic shielding material. In this way, since the transparent tube 3, the guide tube 2, and the vertical piece 412 are interposed between the electromagnet 42 and the processing region S1, the influence of the magnetic field generated by the electromagnet 42 on the processing region S1 can be reduced.

[0045] (Other variations) In the above embodiment, the transparent tube 3 is cylindrical, but for example, when the transparent tube 3 is flexible, the guide tube 2 and the transparent tube 3 do not have to be formed into a cylindrical shape in a plan view. The flexible transparent tube 3 can deform according to the shape of the guide tube 2 while rotating. In this case, the guide tube 2 may be a perfect circle, an ellipse, a rounded triangle, a rounded rectangle, a rounded pentagon, etc. in a plan view.

[0046] In the above embodiment, the drive unit 4 employs a structure in which the magnet unit 32 is driven by the electromagnet 42, but may alternatively use, for example, a motor, a solenoid, or the like to drive the transparent cylinder 3. The drive unit 4 may also be a drive mechanism in which a user manually rotates a handle to rotate the transparent cylinder 3. In the case where, for example, a shaft or the like penetrates the bottom plate 17 of the sealed container 1, it is preferable to keep the inside of the sealed container 1 sealed using a mechanical seal or the like.

[0047] In the above embodiment, the driving unit 4 rotates the transparent cylinder 3 in only one direction, but the transparent cylinder 3 may be rotated alternately in one direction and the opposite direction. In this case, it is preferable to increase the rotation angle stepwise between the first rotation in one direction and the second rotation in one direction.

[0048] <Summary> As described above, the sealed processing apparatus 10 of the first embodiment comprises a sealed container 1 having an observation window 16 through which the internal processing area S1 can be observed from the outside, a guide tube 2 having a cylindrical peripheral wall 21 surrounding the processing area S1 and an opening 22 penetrating the peripheral wall 21, the guide tube 2 arranged so that the opening 22 faces the observation window 16, a transparent tube 3 arranged concentrically on the outside of the guide tube 2 and rotatable along the outer peripheral surface of the guide tube 2, and a drive unit 4 that rotates the transparent tube 3 along the outer peripheral surface of the guide tube 2. According to this embodiment, even if a material (e.g., film forming material X1) adheres to the transparent cylinder 3 through the opening 22 during processing in the processing region S1, the position of the transparent cylinder 3 corresponding to the opening 22 can be made transparent by rotating the transparent cylinder 3 with respect to the guide cylinder 2. As a result, even if the observation window 16 is not heated, it is possible to prevent the visibility of the inside of the sealed container 1 through the observation window 16 from being impaired.

[0049] The sealing treatment device 10 according to the second embodiment further includes a sensor capable of detecting the transparency at a position corresponding to the opening 22 in the transparent cylinder 3 in the first embodiment, and a control device 5 for controlling the driving unit 4. The control device 5 controls the driving unit 4 using the detection result of the sensor. According to this embodiment, when material adheres to the transparent tube 3, the transparent tube 3 can be automatically rotated using the detection results of the sensor, thereby further preventing the visibility inside the sealed container 1 through the observation window 16 from being impaired.

[0050] In the sealed processing apparatus 10 according to the third embodiment, in the second embodiment, a control device 5 is further provided which controls the drive unit 4, and the control device 5 controls the drive unit 4 so as to constantly rotate the transparent cylinder 3 while processing is being performed in the processing area S1. According to this embodiment, the material is adhered to the transparent tube 3 uniformly, so that the transparency of the position of the transparent tube 3 corresponding to the opening 22 is less likely to decrease, and visibility inside the sealed container 1 through the observation window 16 is less likely to be impaired.

[0051] In the sealing treatment device 10 according to the fourth aspect, in any one of the first to third aspects, the transparent tube 3 has a magnet section 32 in which N poles 321 and S poles 322 are arranged alternately in the circumferential direction, and the drive section 4 has an electromagnet 42 that rotates the transparent tube 3 by moving the magnet section 32. According to this embodiment, by supplying power to the electromagnet 42 using, for example, a vacuum feedthrough, it is possible to rotate the transparent cylinder 3 while maintaining the sealed state inside the sealed container 1. As a result, it is possible to reduce the number of times the observation window 16 needs to be cleaned, which involves opening to the atmosphere, and it is possible to observe the inside of the sealed container 1 through the observation window 16 for a long period of time while maintaining the sealed state of the sealed container 1, thereby improving work efficiency.

[0052] In the sealing treatment device 10 according to the fifth embodiment, the electromagnet 42 is disposed outside the transparent cylinder 3 in the fourth embodiment. According to this embodiment, the influence of the magnetic field generated by the electromagnet 42 on the processing region S1 can be reduced. [Explanation of symbols]

[0053] 10. Sealed processing equipment 1. Airtight container S1 Processing area 16 Observation window 2 Guide tube 21 Peripheral wall 22 Opening 3 Transparent tube 32 Magnet section 321 N pole 322 S pole 4 Drive unit 42 Electromagnet 5. Control device 6 Radiation thermometer (sensor)

Claims

1. a sealed container having an observation window through which an internal processing region can be observed from the outside; a guide tube having a cylindrical wall surrounding the processing region and an opening penetrating the wall, the opening being disposed so as to face the observation window; a transparent cylinder arranged concentrically outside the guide cylinder and rotatable along an outer circumferential surface of the guide cylinder; A drive unit that rotates the transparent cylinder along an outer circumferential surface of the guide cylinder; Equipped with Sealed processing equipment.

2. a sensor capable of detecting the transparency at a position corresponding to the opening in the transparent tube; A control device for controlling the drive unit; Further comprising: The control device controls the drive unit using the detection result of the sensor. The sealed processing apparatus according to claim 1 .

3. A control device for controlling the drive unit is further provided. The control device controls the drive unit to rotate the transparent cylinder at all times while the processing is being performed in the processing area. The sealed processing apparatus according to claim 2 .

4. The transparent cylinder has a magnet portion in which N poles and S poles are alternately arranged in a circumferential direction, The driving unit has an electromagnet that rotates the transparent cylinder by moving the magnet unit. The sealed processing apparatus according to any one of claims 1 to 3.

5. The electromagnet is disposed outside the transparent cylinder. The sealed processing apparatus according to claim 4.

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