Probe

Abstract

To provide a probe in which damage due to concentration of stress at an end of a slit formed between arms is suppressed.SOLUTION: A probe 10 includes: a first end 101 and a second end 102 which are axial ends; and a columnar first arm 11 and a columnar second arm 12 which are arranged in parallel in a width direction perpendicular to the axial direction so as to constitute a first slit 13 between them. The first arm 11 and the second arm 12 extend from the first end 101 to the second end 102. The first arm 11 and the second arm 12 are connected with the first end 101 and the second end 102 serving as a connection region. At the first end 101 and the second end 102, a second slit 14 having an opening width in the width direction narrower than that of the first slit 13 is formed in the connection region along the axial direction so as to communicate with the first slit 13. A side surface of the second slit 14 in a cross section along the width direction is formed into a tapered shape that intersects obliquely with the width direction.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a probe for use in testing electrical characteristics of a test object. [Background technology]

[0002] In order to inspect the electrical characteristics of an object to be inspected, such as a semiconductor integrated circuit, without separating it from the wafer, a probe is used that comes into contact with the object to be inspected. In the inspection using the probe, a load may be applied to the probe so that the probe that comes into contact with the object to be inspected undergoes elastic deformation. When the probe is elastically deformed, the elasticity of the probe ensures that the probe and the object to be inspected come into contact with each other. In order to adjust the pressure of the probe that comes into contact with the object to be inspected, a probe structured with multiple columnar arms arranged in parallel has been considered (see Patent Document 1). In a probe structured with arms arranged in parallel, a slit is formed between the arms. The ends of this slit are the connection parts between the arms. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2020-143976 A Summary of the Invention [Problem to be solved by the invention]

[0004] In a probe having a structure in which multiple arms are arranged in parallel, bending of the probe causes stress to concentrate at the ends of the slits formed between the arms. This stress concentration may cause the probe to break.

[0005] An object of the present invention is to provide a probe in which damage caused by stress concentration at the ends of a slit formed between arms is suppressed. [Means for solving the problem]

[0006] According to one aspect of the present invention, a probe is provided that includes a first end and a second end, each of which is an axial end, and a columnar first arm and a second arm arranged in parallel in a width direction perpendicular to the axial direction so as to define a first slit between them. Each of the first arm and the second arm extends from the first end to the second end. The first arm and the second arm are connected to each other with the first end and the second end serving as a connection region. In at least one of the first end and the second end, a second slit whose opening width in the width direction is narrower than the first slit is formed in the connection region along the axial direction so as to communicate with the first slit. A side surface of the second slit in a cross section along the width direction is formed in a tapered shape that crosses obliquely with respect to the width direction. Effect of the Invention

[0007] According to the present invention, it is possible to provide a probe in which damage caused by concentration of stress at the ends of the slits formed between the arms is suppressed. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a schematic diagram showing the configuration of a probe according to an embodiment of the present invention. [Diagram 2] FIG. 2 is a schematic perspective view showing a configuration of an end portion of a probe according to an embodiment of the present invention. [Diagram 3] FIG. 3 is a schematic cross-sectional view taken along the line III-III in FIG. [Figure 4] FIG. 4 is a schematic cross-sectional view taken along the line IV-IV in FIG. [Diagram 5] FIG. 5 is a schematic cross-sectional view taken along the VV direction in FIG. [Figure 6] FIG. 6 is a schematic diagram showing the configuration of an electrical connecting device including a probe according to an embodiment of the present invention. [Figure 7] FIG. 7 is a schematic diagram showing a state in which the first arm and the second arm are in contact with each other at the second slit of the probe according to the embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Next, an embodiment of the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic, and the thickness ratios of each part are different from the actual ones. Of course, the drawings also include parts with different dimensional relationships and ratios. The embodiments shown below are examples of devices and methods for embodying the technical ideas of this invention, and the embodiments of this invention do not specify the materials, shapes, structures, arrangements, and manufacturing methods of the components as described below.

[0010] The probe 10 according to the embodiment shown in Fig. 1 is used to inspect electrical characteristics of an object under inspection. The probe 10 includes a first end 101 and a second end 102, and a columnar first arm 11 and a second arm 12. Each of the first arm 11 and the second arm 12 extends from the first end 101 to the second end 102. The first arm 11 and the second arm 12 are connected to each other with the first end 101 and the second end 102 serving as a connection region.

[0011] In the following, the Y direction in which the probe 10 shown in FIG. 1 extends is referred to as the "axial direction" of the probe 10. The first end 101 and the second end 102 are end portions on both sides of the axial direction of the probe 10. The X direction in which the first arm 11 and the second arm 12 are arranged is referred to as the "width direction" of the probe 10. The width direction is perpendicular to the axial direction. Furthermore, the Z direction perpendicular to both the Y direction and the X direction is referred to as the "thickness direction" of the probe 10.

[0012] As shown in FIG. 1, the first arm 11 and the second arm 12 are arranged in parallel in the width direction so as to define the first slit 13 between them. In addition, at the first end 101 and the second end 102, a second slit 14 having a narrower distance in the width direction (hereinafter also referred to as "opening width") than the first slit 13 is formed in the connection region along the axial direction. The first slit 13 and the second slit 14 are in communication with each other. The first slit 13 and the second slit 14 penetrate the probe 10 in the thickness direction. In the probe 10, the second slit 14 is formed at both the first end 101 and the second end 102.

[0013] 2 shows an enlarged perspective view of the connection region indicated by region A in FIG. 1. As shown in FIG. 2, the opening width of the first slit 13 (hereinafter also referred to as "first opening width W1") is wider than the opening width of the second slit (hereinafter also referred to as "second opening width W2"). ​​The second slit 14 is disposed in the intermediate region between the first arm 11 and the second arm 12 when viewed from the thickness direction. In other words, the second slit 14 communicates with the first slit 13 in regions spaced apart from the connection position of the connection region with the first arm 11 and the connection position of the connection region with the second arm 12.

[0014] 3, a side surface of the second slit 14 in a cross section along the width direction (hereinafter referred to as "second side surface D2") is formed in a tapered shape that intersects obliquely with the width direction and the thickness direction. The angle between the second side surface D2 of the second slit 14 and the width direction is referred to as "second side surface angle α2."

[0015] 4, a side surface of the end of the second slit 14 in a cross section along the axial direction (hereinafter referred to as "second end surface T2") is formed in a tapered shape that intersects obliquely with the axial direction and thickness direction. The angle between the second end surface T2 of the second slit 14 and the axial direction is referred to as "second end surface angle β2."

[0016] Also, as shown in FIG. 3, the angle between the side of the first slit 13 (referred to as "first side D1") in a cross section along the width direction and the width direction is defined as the "first side angle α1." As shown in FIG. 3, the first side angle α1 is greater than the second side angle α2. In other words, the first side D1 is formed closer to perpendicular to the width direction than the second side D2. For example, the first side D1 may be perpendicular to the width direction. In other words, the first side D1 may be parallel to the thickness direction.

[0017] As shown in FIG. 5, the angle between the side surface of the end of the first slit 13 (referred to as "first end surface T1") in a cross section along the axial direction and the axial direction is defined as "first end surface angle β1." As shown in FIGS. 4 and 5, the first end surface angle β1 is greater than the second end surface angle β2. In other words, the first end surface T1 is formed closer to being perpendicular to the axial direction than the second end surface T2. For example, the first end surface T1 may be perpendicular to the axial direction. In other words, the first end surface T1 may be parallel to the thickness direction.

[0018] The probe 10 may be formed by patterning a substrate, which is the material of the probe 10, into a predetermined shape by etching. For example, the probe 10 may be manufactured by a wet etching method using an etching mask, in which the first arm 11, the second arm 12, and the connection region are integrated. A plurality of probes 10 can be simultaneously cut out from one substrate by the wet etching method, in which the substrate is etched with an etching solution. The first slit 13 may also be formed by this wet etching method. That is, the first slit 13 may be formed at the same time as the probe 10 is cut out from the substrate.

[0019] Incidentally, when the first slit 13 is formed by etching with an etching solution, the amount of etching solution may differ between the upper and lower surfaces of the substrate. As a result, the etching rate may differ between the upper and lower surfaces of the substrate, and the side surfaces (first side surface D1 and first end surface T1) of the first slit 13 may be formed in a tapered shape that is not perpendicular to the width direction and the axial direction but is inclined obliquely. However, by forming the first slit 13 by a wet etching method, the first side surface D1 and first end surface T1 of the first slit 13 are formed almost perpendicular to the width direction and the axial direction.

[0020] The first opening width W1 may be, for example, about 10 μm to several tens of μm. Meanwhile, the second opening width W2 may be about several μm. Since the second opening width W2 is thus narrow, it is difficult to form the second slit 14 by a wet etching method. Therefore, the second slit 14 is formed, for example, by irradiating the connection region of the probe 10 with a laser (hereinafter, also referred to as "laser processing"). The axial length of the second slit 14 is, for example, about several tens to several hundreds of μm.

[0021] By forming the second slit 14 by laser processing, the second side surface D2 of the second slit 14 is formed in a tapered shape that intersects obliquely with respect to the width direction, and the second end surface T2 is formed in a tapered shape that intersects obliquely with respect to the axial direction. The second side surface angle α2 and the second end surface angle β2 may be substantially the same. The second side surface D2 and the second end surface T2 of the second slit 14 may be continuously formed by laser processing in the same process.

[0022] As described above, by forming the first slit 13 by wet etching and the second slit 14 by laser processing, the second side surface angle α2 is smaller than the first side surface angle α1 in a cross section along the width direction of the probe 10. Similarly, the second end face angle β2 is smaller than the first end face angle β1 in a cross section along the axial direction of the probe 10.

[0023] In the probe 10 shown in Fig. 1, a tip member 15 is disposed at the first end 101 and the second end 102. The tip member 15 extends from the connection region in a direction opposite to the direction in which the first arm 11 and the second arm 12 extend. In other words, the tip member 15 protrudes from the tips of the first end 101 and the second end 102. The tip member 15 is made of a material having a higher hardness than the first end 101 and the second end 102.

[0024] As described below, when an object to be inspected is inspected using the probe 10, the tip member 15 of the first end 101 comes into contact with the object to be inspected. By disposing the tip member 15, which has a harder hardness than the first end 101, at the tip of the first end 101, it is possible to suppress wear of the first end 101. The first end 101, the second end 102, the first arm 11, and the second arm 12 may be made of materials such as nickel (Ni) and nickel alloys. The tip member 15 may be made of materials such as rhodium (Rh) and rhodium alloys.

[0025] 6, an electrical connecting device 1 including a probe 10 will be described below. The electrical connecting device 1 is used to inspect the characteristics of an inspection object 2. The inspection object 2 is, for example, a semiconductor integrated circuit formed on a semiconductor substrate.

[0026] The electrical connecting device 1 includes a probe head 200 that holds the probes 10 with the first ends 101 facing the test object 2, and a wiring board 300. The number of probes 10 held by the probe head 200 can be set arbitrarily depending on the number of terminals of the test object 2, the number of test objects 2 to be simultaneously tested, etc.

[0027] The tip member 15 disposed at the second end 102 of the probe 10 is electrically connected to a land 310 disposed on a wiring board 300. The land 310 is made of a conductive material such as metal, and is electrically connected to an inspection device such as a tester (not shown). An electrical signal is transmitted between the inspection device and the inspection target 2 via the electrical connection device 1. The wiring board 300 is, for example, a printed circuit board (PCB) or an interposer (IP) board.

[0028] The probe head 200 has a plurality of guide plates each having a through hole (hereinafter also referred to as a "guide hole") through which the probe 10 penetrates. The probe head 200 shown in FIG. 6 has a bottom guide plate 210, a top guide plate 220, and a middle guide plate 230 arranged between the bottom guide plate 210 and the top guide plate 220. The bottom guide plate 210 faces the inspection target 2. The top guide plate 220 faces the wiring board 300. The middle guide plate 230 is arranged at a position close to the bottom guide plate 210. By arranging a spacer 240 between the outer edge region of the bottom guide plate 210 and the outer edge region of the top guide plate 220, a hollow region 250 is formed between the top guide plate 220 and the middle guide plate 230 inside the probe head 200. The material of the probe head 200 is, for example, ceramic.

[0029] When viewed from the surface normal direction of the main surface of the guide plate, the position of the guide hole of the top guide plate 220 through which the same probe 10 penetrates is offset in a direction parallel to the main surface from the positions of the guide holes of the bottom guide plate 210 and the middle guide plate 230. Such an arrangement of guide holes is also called an "offset arrangement." Due to the offset arrangement, the probe 10 is curved by elastic deformation in the hollow region 250. Therefore, the probe 10 buckles when it comes into contact with the inspection object 2, and the probe 10 comes into contact with the inspection object 2 with a predetermined pressure.

[0030] The electrical connecting device 1 shown in Fig. 6 is a vertically operating probe card, in which the electrical connecting device 1 and the test object 2 move relative to each other, and the tip member 15 disposed at the first end 101 of the probe 10 comes into contact with the test object 2. Fig. 6 shows a state in which the probe 10 is not in contact with the test object 2.

[0031] When the probe 10 is brought into contact with the test object 2 and a load is applied to the probe 10, the probe 10 comes into contact with the test object 2 in a curved state. With the probe 10 having the first arm 11 and the second arm 12 arranged in parallel in the width direction, the pressure of the probe 10 brought into contact with the test object 2 can be adjusted to a predetermined magnitude. For example, the pressure of the probe 10 brought into contact with the test object 2 may be adjusted by setting the interval between the first arm 11 and the second arm 12 in the width direction, the length of the first slit 13 in the axial direction, and the like.

[0032] When the probe 10 is bent, stress is concentrated at the end of the first slit 13 formed between the first arm 11 and the second arm 12. In other words, stress is concentrated in the connection region where the first arm 11 and the second arm 12 are connected to each other.

[0033] However, according to the probe 10 in which the second slit 14 is formed in the connection region, the stress in the connection region is dispersed. Therefore, in the probe 10, the concentration of stress at the end of the first slit 13 can be alleviated.

[0034] When the probe 10 is bent, the first arm 11 and the second arm 12 may come into contact with each other at the second slit 14. However, the side surface of the first arm 11 and the side surface of the second arm 12 facing each other at the second slit 14 are tapered. Therefore, when viewed from the axial direction, the side surface of the first arm 11 and the side surface of the second arm 12 come into contact with each other at a point. When the first arm 11 and the second arm 12 come into contact with each other at the second slit 14, as shown in FIG. 7, the part of the side surface of the first arm 11 closest to the second arm 12 and the part of the side surface of the second arm 12 closest to the first arm 11 are shifted in the thickness direction. Therefore, according to the probe 10, the pressure applied to the first arm 11 and the second arm 12 can be reduced more than when the side surface of the first arm 11 and the side surface of the second arm 12 come into contact with each other at a surface. As a result, damage to the probe 10 can be suppressed.

[0035] As described above, in the probe 10 according to the embodiment, the second slit 14 is formed in the connection region, which is the end of the first slit 13. By forming the second slit 14 communicating with the first slit 13 in the connection region, it is possible to reduce the concentration of stress in the connection region when the probe 10 is curved. Therefore, damage to the probe 10 caused by the concentration of stress at the end of the first slit 13 can be suppressed.

[0036] (Other embodiments) Although the present invention has been described above by way of the embodiment, the description and drawings forming part of this disclosure should not be understood as limiting the present invention. Various alternative embodiments, examples and operating techniques will become apparent to those skilled in the art from this disclosure.

[0037] For example, in the above, an example in which the second slit 14 is formed in both the first end 101 and the second end 102 has been shown. However, when the probe 10 is bent, a greater stress is applied to the first end 101 that contacts the test object 2 than to the second end 102 that connects to the land 310. For this reason, the second slit 14 may be formed only in the first end 101. In addition, although the case in which the tip member 15 is arranged in both the first end 101 and the second end 102 has been described, the tip member 15 may be arranged only in one end. For example, the tip member 15 may be arranged only in the first end 101, and the connection region of the second end 102 may be brought into contact with the land 310. Alternatively, the tip member 15 may not be arranged in either the first end 101 or the second end 102.

[0038] Thus, it goes without saying that the present invention includes various embodiments that are not described above. [Explanation of symbols]

[0039] 10…Probe 11…First arm 12…Second arm 13...First slit 14...Second slit 15...Tip member 101…1st end 102…Second end

Claims

1. A probe for use in inspecting electrical characteristics of an object to be inspected, comprising: a first end and a second end, each of which is an axial end; a column-shaped first arm and a column-shaped second arm arranged in parallel in a width direction perpendicular to the axial direction so as to define a first slit therebetween, the first arm and the second arm each extending from the first end to the second end; Equipped with the first arm and the second arm are connected to each other with the first end and the second end serving as a connection region; At least one of the first end portion and the second end portion has a second slit whose opening width in the width direction is narrower than that of the first slit, the second slit being formed in the connection region along the axial direction so as to communicate with the first slit; A side surface of the second slit in a cross section along the width direction is formed into a tapered shape that obliquely intersects with the width direction. probe.

2. The probe according to claim 1 , wherein a side surface of the second slit in a cross section along the axial direction is formed into a tapered shape that intersects obliquely with respect to the axial direction.

3. The probe according to claim 1 or 2, wherein in a cross section along the width direction of the first slit, an angle formed between a side surface of the first slit and the width direction is larger than an angle formed between a side surface of the second slit and the width direction.

4. The probe according to claim 1 or 2, wherein in a cross section of the first slit along the axial direction, an angle between a side of the first slit and the axial direction is larger than an angle between a side of the second slit and the axial direction.

5. The probe according to claim 1 or 2, wherein the second slit is formed in both the first end and the second end.

6. The probe according to claim 1 or 2, wherein the second slit is in communication with the first slit in a region spaced apart from each of a connection position of the connection region with the first arm and a connection position of the connection region with the second arm.

7. a tip member is disposed at the first end, the tip member being made of a material having a harder hardness than the first end and extending from the connection region in a direction opposite to the direction in which the first arm and the second arm extend; The second slit is formed at the first end. The probe according to claim 1 or 2.

Images