Functional water supply device

Abstract

To provide a functional water supply device which can suppress reduction in purity of pure water, and can reduce power consumption.SOLUTION: A functional water supply device 2 includes: a sealed tank 8 for shutting off outdoor air and storing functional water sent out by a first pump 4b; a branching part 14 for branching the functional water sent out from the sealed tank 8 into at least a first path 10 and a second path 12; a joining path 16 for joining the first path 10 and the second path 12; a pressure sensor 18 arranged between the sealed tank 8 and the branching part 14; a first opening / closing valve 20 arranged on the first path 10; a second opening / closing valve 22 arranged on the second path 12; temperature adjusting means 24 arranged on the joining path 16 and adjusting a temperature of the functional water; a second pump 26 arranged on the second path 12, and sending out the functional water having passed through the second opening / closing valve 22 to the temperature adjusting means 24; and control means 28.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a functional water supplying device that supplies functional water pumped from a water source by a first pump to a processing device. [Background technology]

[0002] A wafer has a number of devices such as ICs and LSIs formed on its surface, separated by planned dividing lines. The back side of the wafer is ground by a grinding machine to a specified thickness, and the wafer is then divided into individual device chips by a dicing machine. Each of the divided device chips is used in electrical equipment such as mobile phones and personal computers.

[0003] The grinding device is generally composed of a chuck table for holding the wafer, a grinding means having a rotatably mounted grinding wheel with an annular grinding stone for grinding the wafer held on the chuck table, a grinding water supplying means for supplying grinding water (pure water) to the grinding wheel, and a cleaning means for cleaning the wafer, and is capable of grinding the wafer with high precision (see, for example, Patent Document 1).

[0004] The dicing device is generally composed of a chuck table that holds the wafer, cutting means with a rotatably mounted cutting blade that cuts the wafer held on the chuck table, cutting water supply means that supplies cutting water (pure water) to the cutting blade, and cleaning means that cleans the wafer, and can divide the wafer into individual device chips with high precision (see, for example, Patent Document 2).

[0005] Furthermore, functional water, including grinding water, cutting water, cleaning water used in the grinding device and dicing device, and cooling water for adjusting the grinding means and cutting means to a constant temperature, is sent from a functional water facility (water source) to a functional water supplying device by a first pump. This functional water supplying device includes a tank for storing the functional water sent out by the first pump, a temperature adjustment means for adjusting the temperature of the functional water, and a second pump for sending pure water stored in the tank to the temperature adjustment means. The functional water supplying device then supplies the functional water adjusted to a desired temperature to processing devices such as the grinding device and dicing device. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] JP 2009-158768 A [Patent Document 2] JP 2019-145583 A Summary of the Invention [Problem to be solved by the invention]

[0007] The temperature of the functional water supplied from the functional water facility can fluctuate greatly due to various factors, such as the poor performance of the functional water facility (water source), deterioration of the functional water facility, and seasonal factors. This can exceed the allowable capacity of the temperature adjustment means, and in such cases, there is a problem that it becomes difficult to supply functional water at a constant temperature to the processing equipment. Therefore, in conventional functional water supplying devices, the functional water is stored in a tank with an open structure to suppress temperature fluctuations of the functional water, making it possible to control the temperature by the temperature adjustment means.

[0008] However, since pure water is often used as functional water, if the pure water is stored as functional water in a tank with an open structure, the pure water will come into contact with the outside air, which causes a problem of a decrease in purity of the pure water.

[0009] In addition, the configuration uses a first pump and a second pump, which increases the power consumption of the first and second pumps and the heat generated by the first and second pumps heats the functional water, resulting in excessive operation of the temperature adjustment means, resulting in increased power consumption.

[0010] An object of the present invention is to provide a functional water supplying device that can suppress a decrease in the purity of pure water and reduce power consumption. [Means for solving the problem]

[0011] According to the present invention, there is provided the following functional water supplying device that solves the above problems. "A functional water supplying device that supplies functional water pumped from a water source by a first pump to a processing device, a sealed tank for storing the functional water pumped out by the first pump while blocking the outside air; a branching section for branching the functional water sent out from the sealed tank into at least a first path and a second path; a merging route that merges the first route and the second route; a pressure sensor disposed between the sealed tank and the branch portion; a first on-off valve disposed in the first path; a second on-off valve disposed in the second path; a temperature adjusting means arranged in the joining path for adjusting the temperature of the functional water; a second pump disposed in the second path and configured to deliver the functional water that has passed through the second on-off valve to the temperature adjustment means; A control means; A functional water supply device including the above-mentioned is provided.

[0012] Preferably, when the control means determines that the pressure sensor value is a sufficient pressure value to supply functional water to the processing device, it opens the first on-off valve, closes the second on-off valve, and deactivates the second pump to operate the first path to supply functional water to the processing device. It is desirable that a flow rate control valve for controlling the flow rate of functional water supplied to the processing device is disposed in the junction path to supply an appropriate amount of functional water to the processing device. When the control means determines that the pressure sensor value is not a sufficient pressure value to supply functional water to the processing device, it opens the second on-off valve, closes the first on-off valve, and operates the second pump to supply functional water to the processing device via the second path. Effect of the Invention

[0013] The functional water supplying device of the present invention comprises: a sealed tank for storing the functional water pumped out by the first pump while blocking the outside air; a branching section for branching the functional water sent out from the sealed tank into at least a first path and a second path; a merging route that merges the first route and the second route; a pressure sensor disposed between the sealed tank and the branch portion; a first on-off valve disposed in the first path; a second on-off valve disposed in the second path; a temperature adjusting means arranged in the joining path for adjusting the temperature of the functional water; a second pump disposed in the second path and configured to deliver the functional water that has passed through the second on-off valve to the temperature adjustment means; A control means; Since the pure water contains the component (A), it is possible to suppress a decrease in the purity of the pure water and reduce power consumption. [Brief description of the drawings]

[0014] [Figure 1] FIG. 2 is a circuit diagram of a functional water supplying device according to the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0015] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the functional water supplying device according to the present invention will be described with reference to the drawings.

[0016] The functional water supplying device 2 shown in Fig. 1 is a device that supplies functional water pumped out from a tank 4a of a water source 4 by a first pump 4b to a processing device 6. A plurality of functional water supplying devices 2 are connected to the tank 4a of the water source 4. A plurality of processing devices 6 are also connected to each of the plurality of functional water supplying devices 2. In other words, the functional water from the water source 4 is sent to the plurality of functional water supplying devices 2 by the first pump 4b, and is further sent from each of the plurality of functional water supplying devices 2 to the plurality of processing devices 6.

[0017] The first pump 4b of the water source 4 may have a capacity capable of supplying functional water to about 70% of all the processing devices 6 connected to the tank 4a of the water source 4. The reason for this is that it is rare for all the processing devices 6 connected to the water source 4 to operate at the same time, and it is often the case that about 70% of the processing devices 6 operate while the remaining 30% of the processing devices 6 are in a dormant state. In other words, a pump capable of supplying functional water to all the processing devices 6 is over-specified as the first pump 4b, and operating such a pump would result in a waste of electricity. Therefore, the first pump 4b may have a capacity capable of supplying functional water to about 70% of the processing devices 6.

[0018] The functional water supplying device 2 includes a sealed tank 8 that stores the functional water pumped out by the first pump 4b while blocking outside air, a branching section 14 that branches the functional water pumped out from the sealed tank 8 into at least a first path 10 and a second path 12, and a merging path 16 that merges the first path 10 and the second path 12. Since the functional water stored in the sealed tank 8 is not exposed to outside air, impurities are prevented from being mixed into the functional water. Therefore, when pure water is used as the functional water, the functional water supplying device 2 can suppress a decrease in the purity of the pure water.

[0019] A pressure sensor 18 is disposed between the sealed tank 8 and the branching portion 14. A first on-off valve 20 is disposed in the first path 10, and a second on-off valve 22 is disposed in the second path 12. The first and second on-off valves 20, 22 are opened and closed by an appropriate actuator (not shown) such as a motor.

[0020] A temperature adjustment means 24 for adjusting the temperature of the functional water is disposed in the junction path 16. The temperature adjustment means 24 adjusts the temperature of the functional water to a predetermined temperature by cooling or heating the functional water through heat exchange between the functional water passing through the temperature adjustment means 24 and the refrigerant circulating through the temperature adjustment means 24. The temperature adjustment means 24 may be configured to include, for example, a compressor for compressing the refrigerant, a condenser for condensing the refrigerant compressed by the compressor, and an evaporator for vaporizing the refrigerant condensed by the condenser.

[0021] In addition to the second on-off valve 22, a second pump 26 is disposed in the second path 12, which sends out the functional water that has passed through the second on-off valve 22 to the temperature adjustment means 24. An inverter 26b is provided in a motor 26a that drives the second pump 26. The inverter 26b changes the frequency of the power supplied to the motor 26a within a predetermined range. This changes the rotation speed of the motor 26a and the rotation speed of the second pump 26 within a predetermined range.

[0022] The functional water supplying device 2 is equipped with a control means 28 that controls the operation of the functional water supplying device 2. The control means 28 opens and closes the first and second on-off valves 20, 22 by sending signals to the actuators of the first and second on-off valves 20, 22. The control means 28 also sends a signal to the inverter 26b to control the operation of the second pump 26. The control means 28 also sends a signal to the temperature adjustment means 24 to adjust the temperature of the functional water. Such a control means 28 may be composed of a computer having a processor and a memory.

[0023] In the functional water supplying device 2 of this embodiment, a flow rate regulating valve 30 for regulating the flow rate of functional water supplied to the processing device 6 is disposed in the junction path 16. An appropriate amount of functional water is supplied to the processing device 6 by this flow rate regulating valve 30. The operation of the flow rate regulating valve 30 is controlled by the control means 28, so that the flow rate supplied from the flow rate regulating valve 30 to the processing device 6 is adjusted to an appropriate amount.

[0024] Next, the operation of the functional water supplying device 2 will be described.

[0025] As described above, functional water is supplied from the tank 4a of the water source 4 by the first pump 4b to the sealed tank 8 of the functional water supplying device 2. The pressure of the functional water supplied to the sealed tank 8 is measured by the pressure sensor 18, and the measured pressure value is sent from the pressure sensor 18 to the control means 28.

[0026] When the control means 28 determines that the value of the pressure sensor 18 is a sufficient pressure value to supply functional water to the processing equipment 6, it opens the first on-off valve 20, closes the second on-off valve 22, and deactivates the second pump 26 to cause the first path 10 to function and supply functional water to the processing equipment 6.

[0027] When the number of operating processing devices 6 is equal to or less than a predetermined number (for example, about 70% of the number of processing devices 6), the operation of only the first pump 4b can ensure the pressure required to supply functional water to each processing device 6. Therefore, in such a case, the control means 28 makes the second pump 26 inoperative to reduce power consumption.

[0028] On the other hand, when the control means 28 determines that the value of the pressure sensor 18 is not a sufficient pressure value to supply functional water to the processing equipment 6, it opens the second on-off valve 22, closes the first on-off valve 20, and operates the second pump 26 to supply functional water to the processing equipment 6 via the second path 12.

[0029] When the number of operating processing devices 6 exceeds a predetermined number due to the specifications of the workpieces, processing conditions, etc., the operation of the first pump 4b alone may not be enough to ensure the pressure required to supply functional water to the processing devices 6. In such a case, the control means 28 operates the second pump 26 to ensure the pressure required to supply functional water to the processing devices 6.

[0030] In this way, the control means 28 judges whether to operate the second pump 26 based on the detection result of the pressure sensor 18. That is, the control means 28 operates the second pump 26 only when the pressure required to supply functional water to the processing device 6 cannot be ensured by operating only the first pump 4b. Therefore, power consumption can be reduced compared to the conventional configuration (a configuration in which the first and second pumps are operated constantly).

[0031] It is preferable to adjust the rotation speed of the second pump 26 according to the value of the pressure sensor 18. This ensures the minimum pressure required to supply the functional water to the processing device 6, thereby suppressing an increase in power consumption.

[0032] As described above, in the functional water supplying device 2 of the illustrated embodiment, it is possible to prevent a decrease in the purity of the pure water and to reduce power consumption. [Explanation of symbols]

[0033] 2: Functional water supply device 4: Water source 4a: Tank 4b: First pump 6: Processing equipment 8: Sealed tank 10: First Route 12: The second route 14: Branching section 16: Merging route 18: Pressure sensor 20: First shutoff valve 22: Second on-off valve 24: Temperature adjustment means 26: Second pump 26a:Motor 26b: Inverter 28: Control means 30: Flow control valve

Claims

1. A functional water supplying device that supplies functional water pumped from a water source by a first pump to a processing device, a sealed tank for storing the functional water pumped out by the first pump while blocking the outside air; a branching section for branching the functional water sent out from the sealed tank into at least a first path and a second path; a merging route that merges the first route and the second route; a pressure sensor disposed between the sealed tank and the branch portion; a first on-off valve disposed in the first path; a second on-off valve disposed in the second path; a temperature adjusting means arranged in the joining path for adjusting the temperature of the functional water; a second pump disposed in the second path and configured to deliver the functional water that has passed through the second on-off valve to the temperature adjustment means; A control means; A functional water supply device comprising:

2. The control means A functional water supply device as described in claim 1, wherein when it is determined that the pressure sensor value is sufficient to supply functional water to the processing equipment, the first on-off valve is opened, the second on-off valve is closed, and the second pump is deactivated to cause the first path to function and supply functional water to the processing equipment.

3. 3. The functional water supplying apparatus according to claim 2, wherein a flow rate regulating valve for regulating the flow rate of the functional water supplied to the processing device is disposed in the joining path, so that an appropriate amount of the functional water is supplied to the processing device.

4. The control means A functional water supply device as described in claim 1, wherein when it is determined that the pressure sensor value is not a sufficient pressure value to supply functional water to the processing equipment, the second on-off valve is opened, the first on-off valve is closed, and the second pump is operated to supply functional water to the processing equipment through the second path.

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