Printing device and conveying jig

Abstract

To automatically replace a substrate support member.SOLUTION: A printing device 20 comprises a carrying rod 25a that carries out and carries in a screen mask M and a substrate support member 70, and a control part 21. The control part controls the carrying rod 25a so that a mask replacement process including a mask carry-out process for carrying out the screen mask M to be carried out and a mask carry-in process for carrying in the screen mask M to be carried in can be executed. The control part controls the carrying rod 25a so that a support member replacement process including a support member carry-out process for carrying out the substrate support member 70 to be carried out and a substrate support member carry-in process for carrying in the substrate support member 70 to be carried in can be executed.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a printing apparatus and a substrate-related operating apparatus. [Background technology]

[0002] Conventionally, among printing devices that perform printing processing of a viscous fluid on a substrate using a screen mask, there are known devices that automatically replace the screen mask. For example, Patent Document 1 describes a printing device that includes a rod that protrudes downward and a slider that slides the screen mask by moving the rod to insert and remove it from the main frame. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 04-107146 Summary of the Invention [Problem to be solved by the invention]

[0004] Incidentally, a substrate-related processing device that performs processing on a substrate, such as printing, may use a substrate support member that supports the substrate during processing. When using a support member suitable for the type of substrate being processed, the substrate support member must be replaced. However, the printing device of Patent Document 1 does not take into consideration the replacement of the substrate support member.

[0005] The present invention has been made to solve the above problems, and has as its main object to perform automatic replacement of a substrate support member. [Means for solving the problem]

[0006] In order to achieve the above-mentioned main object, the present invention adopts the following means.

[0007] The printing device of the present invention comprises: A printing apparatus that performs a printing process of a viscous fluid using a screen mask on a substrate fixed on a substrate support member, a support member transport unit that transports the screen mask and the substrate support member; an exchange control unit capable of executing a mask exchange process including a mask carry-out process for carrying out a screen mask to be carried out by controlling the support member transport unit and a mask carry-in process for carrying in the screen mask to be carried in, and capable of executing a support member exchange process including a support member carry-out process for carrying out the substrate support member to be carried out by controlling the support member transport unit and a support member carry-in process for carrying in the substrate support member to be carried in; It is equipped with the following:

[0008] This printing apparatus includes a support member transport unit that transports the screen mask and the substrate support member in and out. This printing apparatus can use this support member transport unit to execute a support member replacement process that includes transporting the substrate support member in and out. This printing apparatus can therefore perform automatic replacement of the substrate support member. This printing apparatus can also use this support member transport unit to perform a mask replacement process that transports the screen mask in and out. That is, the same support member transport unit can be used to perform both automatic replacement of the substrate support member and automatic replacement of the screen mask. This allows the apparatus configuration to be made more compact than, for example, a printing apparatus that is provided with separate transport units for screen mask replacement and substrate support member replacement.

[0009] The substrate-related operating device of the present invention comprises: A substrate-related operation device that performs a substrate-related operation on a substrate fixed on a substrate support member, a support member transport unit that transports the substrate support member in and out; a substrate fixing section capable of arranging the substrate support member and fixing the substrate by the substrate support member when performing the substrate-related operation; a positioning unit that moves the substrate support member disposed on the substrate fixing unit to perform a horizontal positioning of the substrate support member; an exchange control unit that performs a support member exchange process including a support member unloading process for controlling the support member transport unit to unload the substrate support member to be unloaded, and a support member loading process for controlling the support member transport unit to transport the substrate support member to be loaded to the substrate fixing unit and controlling the positioning unit to position the transported substrate support member; It is equipped with the following:

[0010] In this substrate-related operating apparatus, a support member exchange process including the loading and unloading of the substrate support member can be performed using a support member transport unit that loads and unloads the substrate support member. Therefore, this substrate-related operating apparatus can automatically exchange the substrate support member. Furthermore, in the support member loading process, this substrate-related operating apparatus positions the transported substrate support member using a positioning unit. Therefore, it is possible to suppress misalignment of the substrate support member loaded in the support member loading process within the substrate fixing unit. Note that in the substrate-related operating apparatus of the present invention, various aspects of the printing apparatus of the present invention may be adopted, and various configurations of the printing apparatus of the present invention may be added. [Brief description of the drawings]

[0011] [Figure 1] FIG. 1 is a diagram showing an example of a schematic configuration of a mounting system 10. [Diagram 2] FIG. 2 is an explanatory diagram of a configuration for executing print processing and the like of the printing device 20. [Diagram 3] FIG. 2 is a perspective view of a configuration for executing printing processes and the like of the printing device 20. [Figure 4] FIG. 2 is a block diagram showing the electrical connections of the printing device 20. [Diagram 5] FIG. 4 is a perspective view of a substrate support member 70 and a transport jig 80. [Figure 6] 4 is a flowchart showing an example of a print processing routine. [Figure 7] 4A and 4B are explanatory diagrams showing the state of a replacement process of the screen mask M and the substrate support member 70. [Figure 8] 4A and 4B are explanatory diagrams showing the state of a replacement process of the screen mask M and the substrate support member 70. [Figure 9]4A and 4B are explanatory diagrams showing the state of a replacement process of the screen mask M and the substrate support member 70. [Figure 10] 4 is an explanatory diagram of the transportation, suction, and printing process of the substrate S. FIG. [Figure 11] FIG. 13 is an explanatory diagram showing a state in which a support member carry-in process and a support member carry-out process are performed in parallel. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] Next, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a schematic diagram showing an example of the configuration of a mounting system 10 according to an embodiment of the present invention. FIG. 2 is an explanatory diagram of the mask working section 26, the first substrate fixing section 30, the second substrate fixing section 40, the processing section 50, and the storage section 60, which are components that perform the printing process, mask replacement process, and support member replacement process of the printing device 20. FIG. 3 is a perspective view of the mask working section 26, the first substrate fixing section 30, the second substrate fixing section 40, and the processing section 50, which are components that perform the printing process, etc. of the printing device 20. FIG. 4 is a block diagram showing the electrical connection relationship of the printing device 20. FIG. 5 is a perspective view of the substrate support member 70 and the transport jig 80. The mounting system 10 includes a printing device 20 that prints solder paste as a viscous fluid onto a substrate S, a plurality of mounting devices (not shown) that mount electronic components on the substrate S, and a management computer (PC) 90 that manages information related to the processing in the printing device 20 and the mounting devices. Examples of viscous fluids include, in addition to solder paste, conductive paste, adhesive, and the like. The printing apparatus 20 is configured as a dual lane printing apparatus having two substrate fixing parts for fixing the transported substrate S. Furthermore, the printing apparatus 20 is configured as an apparatus capable of automatically replacing the screen mask M used in the printing process and automatically replacing the substrate support member 70 for supporting and fixing the substrate S using a transport jig 80 when changing the setup to change the printing target to a different type of substrate S. In this embodiment, the left-right direction (X-axis), front-back direction (Y-axis), and up-down direction (Z-axis) are as shown in FIGS. 1 to 3.

[0013] 1 to 4, the printing device 20 is a device that uses a squeegee 25 to push solder on a screen mask M into pattern holes 11, 12 formed in the screen mask M, thereby applying (printing) solder paste onto a substrate S below through the pattern holes. The printing device 20 includes a control unit 21, a print processing unit 22, a mask working unit 26, a first substrate fixing unit 30, a second substrate fixing unit 40, a processing unit 50, and a storage unit 60. The printing device 20 also includes an operation panel on which a display screen is displayed and on which an operator can perform various input operations, and a communication unit that communicates with devices connected to a LAN.

[0014] The control unit 21 is configured as a microprocessor centered around a CPU, and includes a ROM for storing processing programs, a RAM used as a working area, and a HDD for storing various data.

[0015] The print processing unit 22 is disposed on the upper stage of the printing device 20, and is a unit that prints a viscous fluid onto the substrate S using a screen mask M. As shown in FIG. 4, the print processing unit 22 includes a print head 23, a head moving unit 24, a squeegee 25, and a transport rod 25a. The printing device 20 includes a print head 23 that pressurizes and supplies solder paste onto the screen mask M. The head moving unit 24 moves the print head 23 in a predetermined printing direction (front-rear direction), and includes a guide formed in the front-rear direction, a slider that moves along the guide, and a motor that drives the slider. The head moving unit 24 also includes a mechanism that moves the print head 23 up and down. The squeegee 25 is disposed on the print head 23 so as to be able to move up and down. The squeegee 25 is a plate-shaped member that is long in a predetermined direction (X direction in FIG. 1), and is formed to have a length longer than the pattern holes 11 and 12. The transport rod 25a is disposed on the print head 23 so as to be able to move up and down by a motor not shown. This transport rod 25a is moved back and forth by the head moving unit 24 while projecting downward from the squeegee 25, thereby pushing the screen mask M and the transport jig 80 back and forth to transport them.

[0016] The mask working section 26 is disposed between the print processing section 22 and the first and second substrate fixing sections 30 and 40, and is a unit that fixes and holds the screen mask M. The screen mask M is, for example, a thin metal plate on which a desired wiring pattern is formed, and is fixed to a frame (mask fixing section 27) with a predetermined tension. The screen mask M has pattern holes 11 and 12 that form wiring patterns on the substrates S of the first and second lanes (first and second substrate fixing sections 30 and 40) of the print processing, respectively. An identification section (for example, a mark) for position recognition is formed on the lower surface of the screen mask M. The mask working section 26 includes a mask fixing section 27, a position adjustment section 28 (see FIG. 4), and a transport rail 29 (see FIG. 4). The mask fixing section 27 positions the screen mask M in a state where it is fitted into the frame, and supports and fixes it in a horizontal position. The position adjustment unit 28 adjusts the position of the mask fixing unit 27 in the XY directions so that the pattern holes 11, 12 are disposed at appropriate positions with respect to the substrate S fixed to the first substrate fixing unit 30 or the second substrate fixing unit 40. The transport rails 29 are a pair of left and right rails extending in the front-rear direction, and guide the screen mask M and transport jig 80 pressed by the transport rod 25a so that they move along the front-rear direction.

[0017] The first substrate fixing section 30 is disposed below the mask working section 26, and is a unit that carries in the substrate S, positions and supports the carried-in substrate S, and brings the substrate S into contact with and away from the screen mask M on which a predetermined wiring pattern is formed. The first substrate fixing section 30 constitutes the first lane of the printing process. The first substrate fixing section 30 includes a substrate transport conveyor 31, a substrate guide 32, a substrate guide moving section 33 (see FIG. 4), a support base lifting section 35, a fixing section lifting section 36, a support base 37, a Y-axis pressing section 38, and a Z-axis clamp section 39. As shown in FIG. 2, the substrate transport conveyor 31 includes a conveyor belt provided on each of a pair of side frames 30b, and a belt rotation device that drives the conveyor belt to rotate. Although not shown, the printing device 20 also has an inlet conveyor and an outlet conveyor provided on the upstream and downstream sides (left and right sides in FIG. 1) of the board transport path of the board transport conveyor 31. The board guide 32 is a plate-like member provided on the upper surface of each of the pair of side frames 30b. The board guide moving unit 33 is a mechanism for moving the pair of side frames 30b in the front-rear direction to move them closer to or away from each other. This causes the board guide 32 to move in the front-rear direction, and the board S is sandwiched and fixed in a state where the upper surface of the board S and the upper surface of the board guide 32 are flush with each other. The support table lifting unit 35 is a mechanism for lifting and lowering the support table 37 relative to the main body 30a of the first board fixing unit 30, and includes a support column that guides and supports the support table 37 in the vertical direction, and a drive motor that moves the support column up and down. The support table 37 is a member on which the board support member 70 can be arranged. The board support member 70 is replaced depending on the board S.

[0018] The substrate support member 70 is disposed on the support stand 37, and is connected to a pressure reducing device (not shown) by piping, and is a member that supports and fixes the substrate S from the lower surface side by negative pressure. As shown in Fig. 5, the substrate support member 70 includes a main body 70a, a pair of cylindrical protrusions 71, 71 arranged so as to protrude from the left and right sides of the main body 70a, a pair of protrusions 72, 72 arranged forward of the protrusions 71, a plurality of suction ports 73 opening on the upper surface of the main body 70a, and a clamped portion 74 having an inclined upper surface and protruding rearward of the main body 70a. In addition, an identification portion 75 (e.g., a mark) for position recognition and a barcode 76 for identifying the type of the substrate support member 70 are formed on the upper surface of the main body 70a.

[0019] The fixing part lifting part 36 is a mechanism for lifting and lowering the entire first substrate fixing part 30 relative to the device main body, and includes a support column that guides and supports the main body of the first substrate fixing part 30 in the vertical direction, and a drive motor that moves the support column up and down. The Y-axis pressing part 38 (see FIG. 2) is a mechanism used for positioning the substrate support member 70, and is disposed on the support stand 37. The Y-axis pressing part 38 includes a block-shaped main body that is movable in the front-rear direction and presses the substrate support member 70 backward to move it, and a drive mechanism such as a cylinder (not shown) that moves the main body forward and backward. The Y-axis pressing part 38 also serves as a mechanism for supplying negative pressure to the substrate support member 70, and a suction port connected to a pressure reducing device (not shown) by a pipe is disposed behind the main body. When the main body of the Y-axis pressing part 38 is pressed against the substrate support member 70, a path from the pressure reducing device to the suction port 73 is connected, and negative pressure is supplied to the suction port 73. The Z-axis clamp unit 39 is a mechanism used to fix the substrate support member 70, and is disposed on the rear side frame 30b. The Z-axis clamp unit 39 includes a block-shaped main body that can move in the vertical direction, and a drive mechanism such as a cylinder that moves the main body up and down. When the main body of the Z-axis clamp unit 39 moves downward, it clamps the clamped portion 74 of the substrate support member 70 together with the support base 37 to fix the substrate support member 70. In addition, a support plate 39a is disposed in front of the Z-axis clamp unit 39 along the up-down and left-right directions. When the side frame 30b moves forward and backward by the substrate guide moving unit 33, the Z-axis clamp unit 39 and the support plate 39a also move forward and backward, thereby allowing the fixing position of the substrate support member 70 in the forward and backward directions to be changed.

[0020] The second substrate fixing section 40 is a unit that is provided next to the first substrate fixing section 30 and transports and fixes the substrate S in the same manner as the first substrate fixing section 30. The second substrate fixing section 40 constitutes the second lane of the printing process. The second substrate fixing section 40 has a main body 40a and a side frame 40b, and is equipped with a substrate transport conveyor 41, a substrate guide 42, a substrate guide moving section 43, a support base lifting section 45, a fixing section lifting section 46, a support base 47, a Y-axis pressing section 48, and a Z-axis clamp section 49. In addition, a substrate support member 70 can be disposed on the support base 47. The second substrate fixing section 40 has a basic configuration similar to that of the first substrate fixing section 30, so a description thereof will be omitted. The printing device 20 is configured to include two substrate transport devices, the first substrate fixing section 30 and the second substrate fixing section 40, and one mask working section 26.

[0021] The processing unit 50 is a unit that performs imaging processing to image identification parts (e.g., marks, notches, unevenness, characters, etc.) for position recognition formed on the substrate S. The processing unit 50 includes a carriage 51, a processing unit movement unit 52, and a position information acquisition unit 55. The processing unit 50 also includes a substrate stopper 56 for stopping the substrate S transported to the right by the substrate transport conveyors 31, 41 at a predetermined position in the left-right direction. The carriage 51 includes the position information acquisition unit 55 and the substrate stopper 56, and moves in the XY directions by the processing unit movement unit 52. The processing unit movement unit 52 includes an X-axis slider 53 and a Y-axis slider 54. The Y-axis slider 54 is a plate-shaped member whose longitudinal direction is the X-axis direction, and moves by a movement motor along a support rail 58 formed in the Y-axis direction (front-back direction) of the device. The X-axis slider 53 includes the carriage 51, and moves by a movement motor along a guide formed on the Y-axis slider 54 in the X-axis direction. The processing section 50 moves to any one of the area (also called the first area) of the first substrate fixing section 30 which is the first lane, the area (also called the second area) of the second substrate fixing section 40 which is the second lane, and the retreat area (see Figs. 1 to 3) outside of these. The position information acquisition section 55 is a unit capable of imaging the identification section formed on the substrate S, the identification section formed on the lower surface of the screen mask M, and the identification section 75 of the substrate support member 70, and acquires position information of these by imaging. The position information acquisition section 55 has its lower surface side and its upper surface side as imaging areas. The substrate stopper 56 is, for example, a rod-shaped member, and is disposed on the carriage 51 so as to be movable up and down by a motor (not shown). The substrate stopper 56 is in a state of protruding downward from the support rail 58 above the first and second substrate fixing sections 30 and 40, and comes into contact with the substrate S transported above the substrate support member 70 by the substrate transport conveyors 31 and 41, thereby stopping the substrate S.

[0022] The storage unit 60 is disposed at the rear of the main body of the printing device 20, and is a mechanism for storing members to be replaced (members to be carried in and members to be carried out) during automatic replacement of the screen mask M or the substrate support member 70. The storage unit 60 includes a storage box with an opening at the front and a conveyor lifting unit 62 for raising and lowering the storage box. In the storage box, a pair of transport conveyors 61 for transporting objects placed therein in the front-rear direction are disposed vertically in multiple stages (four stages in this embodiment). In three of the four stages of the transport conveyors 61, a screen mask M to be carried into the mask working unit 26, a transport jig 80 to which a substrate support member 70 to be carried into the first and second substrate fixing units 30, 40 is attached, and a transport jig 80 for attaching a substrate support member 70 to be carried out from the first and second substrate fixing units 30, 40 are stored in advance by an operator. The remaining one stage of the transport conveyor 61 is left empty so that it can store the screen mask M to be carried out from the mask working section 26. In this storage section 60, the conveyor lifting section 62 brings the upper surface of one of the transport conveyors 61 to the same height as the upper surface of the transport rail 29, and by operating the transport conveyor 61 in this state, a member placed on the transport conveyor 61 can be carried into or out of the mask working section 26.

[0023] The transport jig 80 is a member for enabling the substrate support member 70 to be transported using the transport conveyor 61 or the transport rod 25a. As shown in FIG. 5, the transport jig 80 has first to fourth protrusion holders 81 to 84 arranged in this order from the rear to the front inside the frame body 85. The first to fourth protrusion holders 81 to 84 are arranged in pairs in the left and right directions, and are arranged at the ends of arms extending downward from the frame body 85. As shown in FIG. 2, the transport jig 80 can attach one substrate support member 70 by the first and second protrusion holders 81 and 82, and can attach one substrate support member 70 by the third and fourth protrusion holders 83 and 84. Recesses slightly larger than the outer diameters of the protrusions 71 and 72 of the substrate support member 70 are formed on the upper surfaces of the first to fourth protrusion holders 81 to 84. By placing the protrusions 71 and 72 in the recesses, the transport jig 80 can transport the substrate support member 70 while fixing its position in the front-rear direction. There are a variety of substrate support members 70 according to the type of substrate S to be supported, but the outer diameters of the protrusions 71 and 72 are the same for all of them. The second protrusion holding portion 82 and the fourth protrusion holding portion 84 can adjust their positions in the front-rear direction, which allows the attachment of a variety of substrate support members 70 with different sizes (distance between the protrusions 71 and 72). The transport jig 80 has a width in the left-right direction that is approximately the same as that of the mask fixing portion 27 of the screen mask M. This allows the transport jig 80 to be transported along the same transport rail 29 as the screen mask M. In addition, since the same storage portion 60 can be used for the transport jig 80 and the screen mask M, it is preferable that the transport jig 80 and the screen mask M have similar lengths in the front-rear direction. In addition, there may be multiple types of transport jig 80 with different frame bodies 85 and sizes of protruding holding portions, and a barcode 86 for identifying the type of transport jig 80 is attached to the upper surface of the frame body 85.

[0024] Next, a process will be described in which the printing device 20 performs a printing process on the substrate S while automatically replacing the screen mask M and the substrate support member 70. Fig. 6 is a flow chart showing an example of a printing process routine executed by the CPU of the control unit 21. Figs. 7 to 9 are explanatory diagrams showing the process of replacing the screen mask M and the substrate support member 70. Fig. 10 is an explanatory diagram of the transportation, suction, and printing process of the substrate S.

[0025] The print processing routine is stored in the HDD of the control unit 21, and is executed after the operator instructs the printing device 20 to perform the print processing. When the print processing routine is executed, the CPU of the control unit 21 first determines whether or not replacement processing of the screen mask M present in the mask working unit 26 and the substrate support member 70 present in the first and second substrate fixing units 30 and 40, i.e., whether or not a change of setup is required (step S100). The control unit 21 determines whether or not a change of setup is required depending on whether or not the screen mask M and the substrate support member 70 required for the print processing are different between the previous time and the current time, based on information regarding the print processing acquired from the management PC 90, for example. When a change of setup is required, it is assumed that the screen mask M to be carried in, the transport jig 80 to which the substrate support member 70 to be carried in is attached, and the transport jig 80 for attaching the substrate support member 70 to be carried out are stored in the storage unit 60 in advance by the operator, as shown in FIG. 2. If necessary, the worker reads barcode 76 or barcode 86 with a barcode reader to verify that the correct member is stored in storage section 60. The worker also adjusts in advance the front-to-rear positions of second protrusion holding portion 82 and fourth protrusion holding portion 84 of transport jig 80 for mounting substrate support member 70 to be removed.

[0026] When a changeover is required in step S100, the control unit 21 performs a mask carry-out process for carrying out the screen mask M to be carried out from the mask working unit 26 (step S110). The control unit 21 moves the transport rod 25a to transport the screen mask M to be carried out that is present in the mask working unit 26 backward while sliding it on the transport rail 29 as shown in FIG. 7(a). The control unit 21 also controls the conveyor lifting unit 62 and the transport conveyor 61 to place the screen mask M to be carried out on an empty transport conveyor 61. Note that, since the screen mask M needs to be carried out once from within the mask working unit 26 in order to carry out the replacement process of the substrate support member 70, the control unit 21 performs the carry-out process of the screen mask M even if the screen mask M is not a replacement target.

[0027] Next, the control unit 21 performs a support member unloading process to unload the substrate support member 70 to be unloaded from the first and second substrate fixing units 30 and 40 (step S120). The control unit 21 first controls the conveyor lifting unit 62 and the transport conveyor 61 to load the empty transport jig 80 onto the transport rail 29, and then moves the transport rod 25a forward to transport the transport jig 80 above the first and second substrate fixing units 30 and 40 (FIG. 7(b)). At this time, the control unit 21 positions the first to fourth protrusion holding units 81 to 84 so as to be shifted in the front-rear direction (for example, rearward) from directly above the protrusions 71 and 72 of the substrate support member 70. Next, the control unit 21 releases the substrate support member 70 from the support bases 37 and 47. Specifically, the control unit 21 moves the Y-axis pressing units 38, 48 forward and moves the Z-axis clamp units 39, 49 upward, while moving the pair of side frames 30b, 40b away from each other using the board guide moving units 33, 43 (FIG. 7(c)). Next, the control unit 21 raises the board support member 70 on the support units 37, 47 using the support table lifting units 35, 45 and the fixed unit lifting units 36, 46, respectively (FIG. 8(a)). As a result, the protrusions 71, 72 of the board support member 70 rise above the first to fourth protrusion holding units 81-84. Next, the control unit 21 moves the transport jig 80 forward using the transport rod 25a, so that the first and second protrusion holding parts 81, 82 are positioned directly below the protrusions 71, 72 of the substrate support member 70 on the support stand 37, and the third and fourth protrusion holding parts 83, 84 are positioned directly below the protrusions 71, 72 of the substrate support member 70 on the support stand 47 (FIG. 8(b)). Then, the control unit 21 lowers the support stands 37, 47. As a result, the two substrate support members 70 are attached to the transport jig 80 with the protrusions 71, 72 held on the first to fourth protrusion holding parts 81-84 (FIG. 8(c)). Thereafter, the control unit 21 lowers the entire first and second substrate fixing units 30, 40 using the fixing unit lifting units 36, 46, and moves the transport jig 80 to which the two substrate support members 70 to be removed are attached rearward using the transport rod 25a (FIG. 9). Then, the control unit 21 places the transport jig 80 to which the substrate support members 70 are attached onto an empty transport conveyor 61.As described above, the control unit 21 performs the support member unloading process of the substrate support member 70 by combining the forward and backward transport of the transport jig 80 with the raising and lowering of the support stages 37, 47.

[0028] After the support member unloading process in step S120, the control unit 21 performs a support member loading process to load the substrate support member 70 to be loaded into the first and second substrate fixing units 30 and 40 (step S130). This process can be performed in the reverse order to the support member unloading process described above. That is, the control unit 21 first transports the transport jig 80 to which the two substrate support members 70 to be loaded are attached forward (FIG. 9), transports the substrate support members 70 to above the support stages 37 and 47 (FIG. 8(c)), and raises the support stages 37 and 47 to lift the protrusions 71 and 72 off the first to fourth protrusion holders 81 to 84 (FIG. 8(b)). Next, the control unit 21 moves the transport jig 80 backward (FIG. 8(a)), and then lowers the support stages 37 and 47 (FIG. 7(c)). Next, the control unit 21 moves the transport jig 80 backward to carry it out, and positions and fixes the substrate support member 70 on the support base 37, 47 (FIG. 7(b)). Specifically, the control unit 21 first moves the pair of side frames 30b, 40b closer to each other in the front-rear direction by the substrate guide moving units 33, 43, and moves the support plates 39a, 49a to a predetermined position. The positions in the front-rear direction to which the support plates 39a, 49a are moved are determined in advance according to the type of substrate S to be printed and the type of substrate support member 70, and are obtained, for example, from the management PC 90. Next, the control unit 21 moves the Y-axis pressing units 38, 48 backward to move the substrate support member 70 on the support base 37, 47 backward until it abuts against the support plates 39a, 49a, respectively. In this way, by moving the support plates 39a, 49a and the Y-axis pressing parts 38, 48 back and forth, the substrate support member 70 can be positioned at an appropriate position even if the position of the substrate support member 70 removed from the transport jig 80 is shifted forward or backward. When the substrate support member 70 is brought into contact with the support plates 39a, 49a, the control part 21 moves the Z-axis clamp parts 39, 49 downward to press the clamped part 74, thereby fixing the position of the substrate support member 70 on the support bases 37, 47. As described above, the control part 21 performs the support member loading process of the substrate support member 70 by combining the forward and backward transport of the transport jig 80 and the raising and lowering of the support bases 37, 47. The control part 21 also performs the positioning of the substrate support member 70 in the forward and backward directions.

[0029] After the support member carry-out process in step S130, the control unit 21 performs a mask carry-in process to carry the screen mask M to be carried in to the mask working unit 26 (step S140). The control unit 21 performs this process in the reverse order to the mask carry-out process. That is, the control unit 21 first controls the conveyor lift unit 62 and the transport conveyor 61 to transport the screen mask M to be carried in onto the transport rail 29, and then moves the screen mask M forward with the transport rod 25a to carry it into the mask working unit 26. Note that if the screen mask M is not a replacement target, the screen mask M carried out in the mask carry-out process is carried in.

[0030] When the replacement process of the screen mask M and the substrate support member 70 is completed by carrying out the processes of steps S110 to S140, the control unit 21 acquires position information in the left-right direction of the substrate support member 70 that has been carried in (step S150), and determines a correction value for the stop position of the substrate S based on the acquired position information (step S160). The control unit 21 moves the carriage 51 above the support stand 37 as shown in FIG. 10(a), and causes the position information acquisition unit 55 to capture an image of the identification unit 75 on the upper surface of the substrate support member 70. Then, the control unit 21 obtains a positional deviation in the left-right direction (the conveying direction of the substrate S) of the substrate support member 70 on the support stand 37 based on the position of the identification unit 75 in the image acquired from the position information acquisition unit 55, and derives a correction value for the stop position during the conveyance of the substrate S and stores it in the RAM or the like. Here, if the substrate support member 70 is deviated in the conveying direction of the substrate S on the support stand 37, a problem may occur in the suction and fixation of the substrate S depending on the stop position of the substrate S. When the position of the substrate support member 70 is shifted in the left-right direction, the control unit 21 corrects the stop position of the substrate S by that amount so as not to change the positional relationship between the substrate support member 70 and the substrate S. The control unit 21 similarly obtains position information and derives a correction value for the substrate support member 70 on the support stand 47.

[0031] After step S160, or if no changeover is required in step S100, the control unit 21 drives the substrate transport conveyor 31 to transport the substrate S to the first substrate fixing unit 30 (first lane), and adsorbs the substrate S to the substrate support member 70 (step S170). When transporting the substrate S to the first substrate fixing unit 30, the control unit 21 moves the carriage 51 back and forth and left and right, and lowers the substrate stopper 56, so that the substrate S transported to the right is stopped at a predetermined stop position on the substrate support member 70 (FIG. 10(b)). At this time, if there is a correction value derived in step S160, the control unit 21 moves the substrate stopper 56 to a position taking into account the correction value. In addition, the control unit 21 raises the support table 37, brings the upper surface of the substrate support member 70 into contact with the lower surface of the stopped substrate S, and adsorbs and fixes the substrate S by negative pressure from the pressure reducing device.

[0032] Next, the control unit 21 performs imaging processing of the identification parts of the substrate S and the screen mask M using the position information acquisition unit 55 (step S180), and adjusts the positions of the substrate S and the pattern holes 11 of the screen mask M based on the obtained image so that they are in appropriate positions (step S190). Then, the control unit 21 starts printing at the first substrate fixing unit 30 (step S200, FIG. 10(c)). The control unit 21 raises the first substrate fixing unit 30 to abut against the upper surface of the substrate S and the lower surface of the screen mask M. Then, the control unit 21 moves the print head 23 onto the screen mask M on the first lane side, pressurizes and ejects solder paste from the print head 23, and moves the squeegee 25 back and forth to print the solder paste on the substrate S.

[0033] After the printing process in the first substrate fixing part 30, the control part 21 judges whether the production process is completed based on whether there is a substrate S to be printed next (step S210). When the production process is not completed, the second substrate fixing part 40 is used to transport the substrate S, adjust the position of the screen mask M, perform the printing process, and the like (steps S220 to S250). This process is similar to the process in the first substrate fixing part 30 described above (steps S170 to S200), and therefore a detailed description is omitted. After step S250, the control part 21 judges whether the production is completed (step S260), and when it is not completed, executes the process proceeding to step S100. That is, while changing the setup as necessary, the printing process is sequentially executed on the substrate S fixed to the first and second substrate fixing parts 30 and 40. When the production process is completed in step S210 or S260, the control part 21 ends this routine.

[0034] Here, the correspondence between the components of this embodiment and the components of the present invention will be clarified. The transport rod 25a of this embodiment corresponds to the support member transport section of the present invention, and the control section 21 corresponds to the exchange control section. The first and second substrate fixing sections 30 and 40 correspond to the substrate fixing section, the Y-axis pressing sections 38 and 48, the substrate guide moving sections 33 and 43, and the support plates 39a and 49a correspond to the positioning section, the substrate transport conveyors 31 and 41 correspond to the substrate transport section, the position information acquiring section 55 corresponds to the position information acquiring section, the control section 21 and the substrate stopper 56 correspond to the correction section, the support bases 37 and 47 correspond to the support bases, the support base lifting sections 35 and 45 and the fixing section lifting sections 36 and 46 correspond to the support member lifting section, and the transport jig 80 corresponds to the transport jig.

[0035] The printing device 20 of the embodiment described above in detail includes a support member transport unit (transport rod 25a) that transports the screen mask M and the substrate support member 70. In addition, in the printing device 20, the support member replacement process (steps S120, S130) including the transport of the substrate support member 70 can be executed using the transport rod 25a, and the substrate support member 70 can be automatically replaced. In addition, the printing device 20 can also perform a mask replacement process (steps S110, S140) for transporting the screen mask M using the transport rod 25a. That is, the same transport rod 25a can be used to perform both the automatic replacement of the substrate support member 70 and the automatic replacement of the screen mask M. Therefore, the device configuration can be made more compact than when the printing device 20 is equipped with a separate transport unit for screen mask replacement and a separate transport unit for substrate support member replacement.

[0036] The printing device 20 is also equipped with first and second substrate fixing units 30 and 40 that can arrange the substrate support member 70 and fix the substrate S by the arranged substrate support member 70 when performing the printing process, and a positioning unit (Y-axis pressing units 38 and 48, substrate guide moving units 33 and 43, and support plates 39a and 49a) that moves the substrate support member 70 arranged on the first and second substrate fixing units 30 and 40 to position the substrate support member in the horizontal direction. In the support member carrying-in process, the control unit 21 controls the transport rod 25a to transport the substrate support member 70 to be carried in to the first and second substrate fixing units 30 and 40, and controls the Y-axis pressing units 38 and 48, the substrate guide moving units 33 and 43, and the support plates 39a and 49a to position the transported substrate support member 70 in the front-rear direction. Therefore, it is possible to suppress misalignment in the front-rear direction within the first and second substrate fixing portions 30, 40 of the substrate support member 70 that has been carried in during the support member carrying-in process.

[0037] Furthermore, the printing device 20 includes the first and second substrate fixing parts 30 and 40, substrate transport conveyors 31 and 41 that transport the substrate S in a predetermined substrate transport direction (left and right direction), and a position information acquisition part 55 that acquires position information on the position of the substrate support member 70 arranged on the first and second substrate fixing parts 30 and 40 in the substrate transport direction. The printing device 20 also includes a correction part (control part 21 and substrate stopper 56) that corrects the stop position on the substrate support member 70 when the substrate transport conveyors 31 and 41 transport the substrate S based on the acquired position information. As a result, even if the position of the substrate support member 70 carried into the first and second substrate fixing parts 30 and 40 in the support member carrying process is shifted in the substrate transport direction, the stop position of the substrate S can be corrected based on the position information. Therefore, it is possible to suppress the occurrence of problems in the fixing of the substrate S by the substrate support member 70.

[0038] Furthermore, the printing device 20 has support tables 37, 47 on which the substrate support member 70 can be arranged, and includes first and second substrate fixing units 30, 40 that fix the substrate S with the substrate support member 70 arranged when performing the printing process, and support table lifting units 35, 45 and fixing unit lifting units 36, 46 that lift and lower the substrate support member 70 arranged on the support tables 37, 47 by lifting and lowering the support tables 37, 47. The transport rod 25a transports and removes a transport jig 80 to which the substrate support member 70 can be attached, and the control unit 21 controls the transport rod 25a, the support table lifting units 35, 45, and the fixing unit lifting units 36, 46 in the support member carrying-out process to transport the transport jig 80 to above the first and second substrate fixing units 30, 40, raise the substrate support member 70 to be carried out that is arranged on the support tables 37, 38, and attach it to the transport jig 80, and then carries out the transport jig 80 after the attachment. Furthermore, in the support member loading process, the control unit 21 controls the transport rod 25a, the support table lifting units 35, 45, and the fixing unit lifting units 36, 46 to transport the transport jig 80 to which the substrate support member 70 to be loaded is attached, to above the first and second substrate fixing units 30, 40, raise the support tables 37, 47 to remove the substrate support member 70 to be loaded from the transport jig 80 and place it on the support tables 37, 47, and then carry out the removed transport jig 80. In this way, even if the shape or size of the substrate support member 70 is not suitable for transport by the transport rod 25a, for example, the substrate support member 70 can be transported using the transport jig 80 to perform the support member replacement process. In the printing device 20 of this embodiment, the transport rod 25a transports both the screen mask M and the substrate support member 70, but because the width of the substrate support member 70 in the left-right direction is smaller than that of the screen mask M, the substrate support member 70 cannot be directly transported by the transport rod 25a by sliding it on the transport rails 29. In this way, when the screen mask M and the substrate support member 70 have different shapes and sizes, it is very meaningful to use the transport jig 80.

[0039] The printing device 20 has a first substrate fixing part 30 and a second substrate fixing part 40 as a substrate fixing part, and has a first support member lifting part (support platform lifting part 35 and fixed part lifting part 36) that lifts and lowers the support platform 37 and a second support member lifting part (support platform lifting part 45 and fixed part lifting part 46) that lifts and lowers the support platform 47 as a support member lifting part. The transport rod 25a transports and removes a transport jig 80 to which a plurality of substrate support members 70 can be attached. In the support member unloading process, the control unit 21 controls the transport rod 25a, the support platform lifting parts 35, 45, and the fixed part lifting parts 36, 46 to carry in the transport jig 80, lift each of the substrate support members 70 to be unloaded that are arranged on the support platforms 37, 47, and attach them to the transport jig 80, and then carries out the transport jig 80 after attachment. Furthermore, in the support member carrying-in process, the control unit 21 controls the transport rod 25a, the support table lifting units 35, 45, and the fixed unit lifting units 36, 46 to carry in the transport jig 80 to which the substrate support members 70 to be carried in and placed on the support tables 37, 47 are attached, the support tables 37, 47 are raised to remove the substrate support members 70 to be carried in from the transport jig 80 and place them on the support tables 37, 47, respectively, and then carries out the removed transport jig 80. As a result, the control unit 21 performs the replacement of the substrate support members 70 to be placed on the support table 37 and the replacement of the substrate support members 70 to be placed on the support table 47 in parallel. In this way, the substrate support member 70 to be removed and placed on the support table 37, 47 can be removed together with the transport jig 80 in a single movement, and the substrate support member 70 to be brought in and placed on the support table 37, 47 can be brought in together with the transport jig 80 in a single movement, thereby shortening the time required for the support member replacement process.

[0040] It goes without saying that the present invention is not limited to the above-described embodiment, and can be embodied in various forms within the technical scope of the present invention.

[0041] For example, in the above-described embodiment, the control unit 21 uses the transport jig 80 capable of mounting two substrate support members 70 to replace the substrate support member 70 arranged on the support stand 37 and the substrate support member 70 arranged on the support stand 47 in parallel, but is not limited thereto. For example, only one of the substrate support members 70 on the support stands 37, 47 may be replaced. In this case, the control unit 21 may perform the support member carry-in process and the support member carry-out process in parallel. FIG. 11 is an explanatory diagram showing a state in which the support member carry-in process and the support member carry-out process are performed in parallel. Here, a case in which the substrate support member 70 of the second substrate fixing unit 40 is replaced will be described. The control unit 21 first transports the transport jig 80 to which the substrate support member 70 to be carried in is mounted to above the second substrate fixing unit 40 (FIG. 11(a)). Next, the control unit 21 lifts the substrate support member 70 to be removed, which is placed on the support table 47, and attaches it to the transport jig 80 (Figure 11(b)). Next, the control unit 21 transports the attached transport jig 80 further forward to transport the substrate support member 70 to be brought in above the support table 47, and lifts the support table 47 to remove the substrate support member 70 to be brought in from the transport jig 80 and place it on the support table 47 (Figure 11(c)). The control unit 21 then transports the removed transport jig 80 (the transport jig 80 to which the substrate support member 70 to be removed is attached) to the rear. In this way, the substrate support member 70 can be removed and brought in by transporting the transport jig 80 in and out once. Therefore, the time required for the support member replacement process can be shortened.

[0042] In the above-mentioned embodiment, the printing device 20 can carry in and out both the screen mask M and the substrate support member 70 using the transport rod 25a, but this is not limited to this. If the printing device 20 is provided with a support member transport unit that carries in and out the substrate support member 70, at least the substrate support member replacement process can be performed. Even in this case, the substrate support member 70 arranged on the first and second substrate fixing parts 30 and 40 is moved to perform the horizontal positioning of the substrate support member, thereby obtaining the effect of suppressing the positional deviation of the substrate support member 70 in the front-rear direction within the first and second substrate fixing parts 30 and 40. Note that, although the printing device 20 that replaces the substrate support member 70 has been described in the above-mentioned embodiment, the present invention is not limited to a printing device as long as it performs a substrate support member replacement process. The present invention is applicable to a substrate-related operation device that performs a substrate-related operation on a substrate fixed on a substrate support member. An example of a substrate-related operation device other than a printing device is a mounting device that performs a mounting process on a substrate. Furthermore, in the above-described embodiment, the printing device 20 includes the transport rod 25a as the support member transport section, but the printing device 20 may include any support member transport section as long as it can transport the substrate support member 70 in and out. For example, the support member transport section may be a support member transport conveyor including a conveyor belt and a belt rotation device that drives the conveyor belt to rotate.

[0043] In the above-described embodiment, the substrate support member 70 is transported using the transport jig 80. However, if the substrate support member 70 can be transported using, for example, the transport rail 29 and the transport rod 25a, the transport jig 80 does not have to be used.

[0044] In the above embodiment, the Y-axis pressing portion 38, the board guide moving portion 33, and the support plate 39a are used to position the board support member 70 in the front-rear direction, but this is not limited as long as the positioning in the horizontal direction is performed. For example, in addition to or instead of the positioning in the front-rear direction, the positioning in the left-right direction may also be performed.

[0045] In the above-described embodiment, the protrusions 71, 72 of the substrate support member 70 are cylindrical, but this is not limited as long as they can be attached to and detached from the transport jig 80. For example, the protrusions may be rectangular prism-shaped, plate-shaped, or may be one member formed by adjoining two cylinders. In addition, the number of protrusions is two on each side, but this is not limited thereto, and there may be one, three or more protrusions on each side.

[0046] In the above-described embodiment, the first to fourth protrusion holders 81 to 84 hold the protrusions 71 and 72 by the recesses, but this is not limited as long as the protrusions 71 and 72 can be attached to and detached from the transport jig 80. For example, the transport jig 80 may include a pair of plate-like members protruding inward from the frame body 85, and the substrate support member 70 may be attached to the transport jig 80 by placing the protrusions 71 and 72 on the upper surface of the plate-like members. In addition, when removing the substrate support member 70 from the transport jig 80, the lifting of the substrate support member 70 and the transport of the transport jig 80 are combined, but this is not limited. For example, the transport jig 80 may include a plate-like member moving mechanism including a button that can be pressed downward, a lever that rotates around an axis in accordance with the up and down movement of the button to convert the up and down movement into left and right movement, and a plate-like member that moves left and right in accordance with the rotation of the lever. In this case, the substrate support member 70 may be placed on the plate members of a pair of front and rear plate member moving mechanisms and transported, and the buttons of the pair of plate member moving mechanisms may be pressed, for example, by the transport rod 25a or the like to move the pair of plate members apart to the left and right, thereby removing the substrate support member 70 from the transport jig 80. If such a mechanism is employed, there is no need to transport the transport jig 80 back and forth when removing the substrate support member 70 from the transport jig 80.

[0047] In the above-described embodiment, the printing device 20 includes the storage unit 60, but the printing device 20 does not necessarily have to include the storage unit 60. In addition, the printing device 20 is a dual-lane printing device having the first and second substrate fixing units 30, 40, but is not limited to this. For example, the printing device 20 may be a single-lane printing device having one substrate fixing unit.

[0048] In the above-described embodiment, the substrate support member 70 is a member that supports and fixes the substrate S from the lower surface side by negative pressure, but any member that fixes the substrate may be used. For example, the substrate support member may have a plurality of protrusions (backup pins) standing on the upper surface, and the substrate support member may support and fix the substrate S from below by using these protrusions. [Industrial Applicability]

[0049] The present invention can be used in a substrate-related operation apparatus that performs substrate-related operations on a substrate, such as a mounting apparatus that mounts components on a substrate and a printing apparatus related to a mounting apparatus. [Explanation of symbols]

[0050] 10 Mounting system, 11, 12 Pattern hole, 20 Printing device, 21 Control unit, 22 Print processing unit, 23 Print head, 24 Head moving unit, 25 Squeegee, 25a Transport rod, 26 Mask working unit, 27 Mask fixing unit, 28 Position adjustment unit, 29 Transport rail, 30 First board fixing unit, 30a Main body, 30b Side frame, 31 Board transport conveyor, 32 Board guide, 33 Board guide moving unit, 35 Support table lifting unit, 36 Fixing unit lifting unit, 37 Support table, 38 Y-axis pressing unit, 39 Z-axis clamp unit, 39a Support plate, 40 Second board fixing unit, 40a Main body, 40b Side frame, 41 Board transport conveyor, 42 Board guide, 43 Board guide moving unit, 45 Support table lifting unit, 46 Fixing unit lifting unit, 47 Support table, 48 Y-axis pressing portion, 49 Z-axis clamping portion, 49a support plate, 50 processing portion, 51 carriage, 52 processing portion moving portion, 53 X-axis slider, 54 Y-axis slider, 55 position information acquisition portion, 56 board stopper, 58 support rail, 60 storage portion, 61 transport conveyor, 62 conveyor lifting portion, 70 board support member, 70a main body portion, 71, 72 protrusion portion, 73 suction hole, 74 clamped portion, 75 identification portion, 76 bar code, 80 transport jig, 81-84 first to fourth protrusion holding portions, 85 frame, 86 bar code, 90 management PC, M, M2 screen mask, S board.

Claims

1. A printing apparatus that performs a printing process of a viscous fluid using a screen mask on a substrate fixed on a substrate support member, a support member transport unit that transports the screen mask and the substrate support member; an exchange control unit capable of executing a mask exchange process including a mask carry-out process for carrying out a screen mask to be carried out by controlling the support member transport unit and a mask carry-in process for carrying in the screen mask to be carried in, and capable of executing a support member exchange process including a support member carry-out process for carrying out the substrate support member to be carried out by controlling the support member transport unit and a support member carry-in process for carrying in the substrate support member to be carried in; A printing device comprising:

2. 2. The printing device according to claim 1, a substrate fixing section capable of arranging the substrate support member and fixing the substrate by the arranged substrate support member when performing the printing process; a positioning unit that moves the substrate support member disposed on the substrate fixing unit to perform a horizontal positioning of the substrate support member; Equipped with the exchange control unit, in the support member carry-in process, controls the support member transport unit to transport the substrate support member to be carried in to the substrate fixing unit, and controls the positioning unit to perform the positioning of the transported substrate support member. Printing device.

3. 3. The printing device according to claim 1, a substrate fixing section capable of arranging the substrate support member and fixing the substrate by the arranged substrate support member when performing the printing process; a substrate transport unit that transports the substrate in a predetermined substrate transport direction; a position information acquiring unit that acquires position information regarding a position of the substrate support member disposed on the substrate fixing unit in the substrate transport direction; a correction unit that corrects a stop position on the substrate support member when the substrate transport unit transports the substrate based on the acquired position information; and A printing device comprising:

4. The printing device according to any one of claims 1 to 3, a substrate fixing section having a support table on which the substrate support member can be placed, the substrate being fixed by the substrate support member when the printing process is performed; a support member lifting unit that lifts and lowers the support table to lift and lower a substrate support member disposed on the support table; Equipped with the support member transport unit transports in and out a transport jig to which the substrate support member can be attached; The exchange control unit, in the support member unloading process, controls the support member transport unit and the support member lifting unit to transport the transport jig and transport it above the substrate fixing unit, elevate the substrate support member to be unloaded that is placed on the support table and attach it to the transport jig, and perform a process of unloading the transport jig after attachment; and, in the support member loading process, controls the support member transport unit and the support member lifting unit to transport the transport jig to which the substrate support member to be loaded is attached, to above the substrate fixing unit, elevate the support table to remove the substrate support member to be loaded from the transport jig and place it on the support table, and perform a process of unloading the transport jig. Printing device.

5. the transport jig is capable of mounting a plurality of the substrate support members; The exchange control unit, in the support member exchange process, controls the support member transport unit and the support member lifting unit to transport the transport jig to which the substrate support member to be brought in is attached to above the substrate fixing unit, raise the substrate support member to be removed that is placed on the support table and attach it to the transport jig, transport the transport jig after attachment to transport the substrate support member to be brought in above the support table, raise the support table to remove the substrate support member to be brought in from the transport jig and place it on the support table, and carry out the transport jig after removal, thereby performing the support member carry-out process and the support member carry-in process in parallel. The printing device according to claim 4.

6. the substrate fixing unit includes a first substrate fixing unit having a first support stage on which the substrate support member can be arranged and fixing the substrate by the arranged substrate support member when performing the printing process, and a second substrate fixing unit having a second support stage on which the substrate support member can be arranged and fixing the substrate by the arranged substrate support member when performing the printing process, the support member lifting section includes a first support member lifting section that lifts and lowers the first support stage to lift and lower the substrate support member disposed on the first support stage, and a second support member lifting section that lifts and lowers the second support stage to lift and lower the substrate support member disposed on the second support stage, the support member transport unit transports in and out a transport jig capable of mounting a plurality of the substrate support members; the exchange control unit controls the support member transport unit and the first and second support member lifting units in the support member carry-out process to carry in the transport jig, raise each of the substrate support members to be carried out that are arranged on the first and second support stages to attach them to the transport jig, and carry out the transport jig after the attachment; and controls the support member transport unit and the first and second support member lifting units in the support member carry-in process to carry in the transport jig to which the substrate support members to be carried in that are arranged on the first and second support stages, respectively, are attached, raise the first and second support stages to remove each of the substrate support members to be carried in from the transport jig and place them on the first and second support stages, respectively, and carry out the transport jig after the removal, thereby performing replacement of the substrate support member arranged on the first support stage and replacement of the substrate support member arranged on the second support stage in parallel.

6. The printing device according to claim 4 or 5.

7. A substrate-related operation device that performs a substrate-related operation on a substrate fixed on a substrate support member, a support member transport unit that transports the substrate support member in and out; a substrate fixing section capable of arranging the substrate support member and fixing the substrate by the substrate support member when performing the substrate-related operation; a positioning unit that moves the substrate support member disposed on the substrate fixing unit to perform a horizontal positioning of the substrate support member; an exchange control unit that performs a support member exchange process including a support member unloading process for controlling the support member transport unit to unload the substrate support member to be unloaded, and a support member loading process for controlling the support member transport unit to transport the substrate support member to be loaded to the substrate fixing unit and controlling the positioning unit to position the transported substrate support member; A substrate-related operating device comprising:

Images