Reticle pod sealing

Abstract

To provide a reticle pod used for a surface reticle, and a surface used for providing sealing in the reticle pod.SOLUTION: An inner pod 1 comprises: a cover 40 including a cover body; a baseplate 10 including a baseplate body; and one or more seal surfaces 44. The one or more seal surfaces are formed on one or both of the baseplate body and the cover body to provide sealing. A method of producing a reticle pod includes forming one or more seal surfaces on at least one of a baseplate body of a baseplate and a cover body of a cover. The one or more seal surfaces are formed to provide sealing between the baseplate and the cover. Each of the one or more seal surfaces includes a wear-resistant outermost coating with a Rockwell C hardness of about 70 or more.SELECTED DRAWING: Figure 1B

Description

[Technical field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims the benefit of and priority to U.S. Provisional Application No. 63 / 017,825, filed April 30, 2020, the disclosure of which is incorporated herein by reference in its entirety for all purposes.

[0002] The present disclosure relates to reticle pods for use with reticles. More specifically, the present disclosure relates to surfaces used to provide sealing to the reticle pods. [Background technology]

[0003] Reticle pods are used to house reticles, such as, for example, photolithography masks used in semiconductor processing. Reticle pods can be used for storage and transport of reticles. Reticle pods can include a metal inner pod that is handled and manipulated by one or more tools during processing. The inner pod includes a base plate and a cover that house the reticle and protect it from contamination or physical damage during transport, storage, and processing. Reticle pods include, for example, extreme ultraviolet (EUV) pods for use with EUV photolithography tools. Reticle pods can include an outer pod with a pod door and a pod dome that houses the inner pod. Summary of the Invention

[0004] The present disclosure relates to reticle pods for use with reticles. More specifically, the present disclosure relates to surfaces used to provide sealing to the reticle pods.

[0005] In one embodiment, the pod includes a cover having a cover body, a base plate having a base plate body, and one or more sealing surfaces. The one or more sealing surfaces are formed on one or both of the base plate body and the cover body to provide sealing between the cover and the base plate. The one or more sealing surfaces each include a wear-resistant outermost coating having a Rockwell C hardness of about 70 or greater.

[0006] In one embodiment, the outermost wear-resistant coating has a Rockwell C hardness of about 80 or greater.

[0007] In one embodiment, the one or more sealing surfaces include a first sealing surface, the base plate including a wear-resistant outermost coating of the first sealing surface, the first sealing surface being formed on the base plate body, the wear-resistant outermost coating of the first sealing surface being positioned to directly contact the cover when the cover is placed on the base plate.

[0008] In one embodiment, the one or more sealing surfaces include a second sealing surface. The cover includes a wear-resistant outermost coating of the second sealing surface, the second sealing surface being formed on the cover body. The wear-resistant outermost coating of the cover is positioned to directly contact the wear-resistant outermost coating of the base plate when the cover is placed on the base plate.

[0009] In one embodiment, the pod includes an outer pod dome and an outer pod door configured to house the base plate and the cover within the outer pod dome when the outer pod door is attached to the outer pod dome. In one embodiment, the pod is an EUV reticle pod.

[0010] In one embodiment, a method of manufacturing a reticle pod includes forming one or more sealing surfaces on at least one of a base plate body of a base plate and a cover body of a cover. The one or more sealing surfaces are formed to provide sealing between the base plate and the cover. Each of the one or more sealing surfaces includes a wear-resistant outermost coating having a Rockwell C hardness of about 70 or greater.

[0011] In one embodiment, forming the one or more sealing surfaces includes forming a wear-resistant outermost coating on the base plate body, the wear-resistant outermost coating positioned in direct contact with the cover when the cover is placed on the base plate.

[0012] In one embodiment, forming the one or more sealing surfaces includes forming a wear-resistant outermost coating on the cover body, the wear-resistant outermost coating positioned in direct contact with the base plate when the cover is placed on the base plate.

[0013] The present disclosure may be more fully understood from consideration of the following description of various exemplary embodiments in conjunction with the accompanying drawings, in which: [Brief description of the drawings]

[0014] [Figure 1A] 1 is a cross-sectional view of one embodiment of an inner pod of a reticle pod. [Figure 1B] 1B is a cross-sectional view of the inner pod of FIG. 1A when open, according to one embodiment. [Diagram 2] FIG. 2 is a top view of one embodiment of a base plate in a reticle pod. [Diagram 3] FIG. 2 is a bottom view of one embodiment of a cover for a reticle pod. [Figure 4] 13A is a cross-sectional view of one embodiment of contacting sealing surfaces of a base plate and a cover for a reticle pod. FIG. [Diagram 5] FIG. 2 is a perspective view of one embodiment of a reticle pod. [Figure 6] FIG. 2 is a block diagram of a method for manufacturing a reticle pod. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0015] While the present disclosure is amenable to various modifications and alternative forms, details of which have been shown by way of example in the drawings and will be described in detail. It should be understood, however, that the intention is not to limit aspects of the disclosure to the specific exemplary embodiments described. On the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the disclosure.

[0016] The present disclosure is directed to reticle pods used in reticles and surfaces used to provide sealing within the reticle pods.

[0017] 1A and 1B show cross-sectional views of one embodiment of an inner pod 1 of a reticle pod. FIG. 1A shows the inner pod 1 when closed. FIG. 1B shows the inner pod 1 when open. The inner pod 1 has an interior space with a reticle receiving portion 3 for receiving a reticle 5. The pod 1 can include a reticle support 7A and a reticle contact 7B in the reticle receiving portion 3 for supporting and restraining the reticle 5 within the inner pod 1.

[0018] The inner pod 1 includes a base plate 10 and a cover 40. The base plate 10 and the cover 40 are configured to be joined together. As shown in FIG. 1A, the interior space of the inner pod 1 is enclosed (e.g., closed) by placing the cover 40 on the base plate 10. The cover 40 directly contacts the base plate 10. In particular, the bottom 42 of the cover 40 contacts the top 12 of the base plate 10. The inner pod 1 can be closed (e.g., in a direction D) by moving the cover 40 away from the base plate 10. 1For example, an external tool (e.g., an automated arm, etc.) opens the inner pod 1 to access the reticle receiving portion 3 and remove the reticle 5.

[0019] The base plate 10 and the cover 40 include one or more sealing surfaces configured to provide sealing between the base plate 10 and the cover 40. For example, the sealing is configured to reduce or prevent an external container (e.g., air, dust, etc.) from entering the pod 1 by passing between the base plate 10 and the cover 40. The base plate 10 can include one or more sealing surfaces that directly contact the cover 40 when the cover 40 is placed on the base plate 10. The cover 40 includes one or more sealing surfaces configured to directly contact the base plate 10 when the cover 40 is placed on the base plate 10. For example, the base plate 10 can include a first sealing surface (e.g., sealing surface 14) configured to directly contact the cover 40, and the cover 40 can include a second sealing surface (e.g., sealing surface 44) configured to directly contact the base plate 10.

[0020] Figure 2 is a top view of one embodiment of a base plate 10 for a reticle pod. Figure 2 shows the top portion 12 of the base plate 10. A cover 40 is configured to rest on the top portion 12 of the base plate 10. The base plate 10 can also include a reticle support 7A.

[0021] The base plate 10 includes a sealing surface 14 and a base plate body 16. The sealing surface 14 is formed on the base plate body 16. The configuration of the sealing surface 14 and the base plate body 16 will be described in more detail below. The base plate 10 of FIG. 2 includes a single continuous sealing surface 14. The sealing surface 14 extends along the entire circumference of the base plate 10. However, the base plate 10 may include multiple sealing surfaces in one embodiment. For example, separate sealing surfaces 14 may be provided in locations where a greater amount of wear may occur between the base plate 10 and the cover 40. In one embodiment, the sealing surface 14 of the base plate 10 may extend only along a portion of the circumference of the base plate 10.

[0022] 2, the one or more sealing surfaces 14 are positioned to cover less than 75% of the base plate 10. In one embodiment, the one or more sealing surfaces 14 are positioned to cover less than 50% of the base plate 10.

[0023] Figure 3 is a bottom view of one embodiment of a cover 40 for an inner pod. Figure 3 shows a bottom portion 42 of the cover 40. The bottom portion 42 of the cover 40 is configured to contact the top portion 12 of the base plate 10 when the cover 40 is placed on the base plate 40. The cover 40 may also include a reticle receiving portion 3 and reticle contacts 7B that contact a top surface of a reticle within the inner pod.

[0024] The cover 40 includes a sealing surface 44 and a cover body 46. The sealing surface 44 is formed on the cover body 46. The configuration of the sealing surface 44 and the cover body 46 will be described in more detail below. The cover 40 of FIG. 3 includes a single continuous sealing surface 44. However, the cover 40 may include multiple sealing surfaces in one embodiment. For example, each of the sealing surfaces 44 extends only along a portion of the circumference of the base plate 40. For example, separate sealing surfaces 44 may be provided in locations where a greater amount of wear occurs between the base plate 10 and the cover 40.

[0025] The sealing surface 44 extends along the entire circumference of the cover 40. Thus, when the cover 40 is placed on the base plate 10, the sealing surface 44 is disposed to extend along the entire circumference of the base plate 10. In some embodiments, the one or more sealing surfaces 14 of the base plate 10 and the one or more sealing surfaces 44 of the cover 40 may be disposed to extend along the entire circumference of the base plate 10 in combination. For example, the sealing surface 14 of the base plate 10 may not extend along the entire circumference of the base plate 10, and the sealing surface 44 of the cover 40 extends along a portion of the outer circumference of the base plate 10 without the sealing surface 14. Considered in combination, the sealing surface 14 of the base plate 10 and the sealing surface 44 of the cover 40 can extend along the entire circumference of the base plate 10.

[0026] The sealing surface 44 is provided to cover less than 75% of the cover 40. In one embodiment, the sealing surface 44 covers less than 50% of the cover 40. The sealing surfaces 14, 44 of the inner pod 1 are formed to cover less than 75% of the base plate 10 and the cover 40. In one embodiment, the sealing surfaces 14, 44 are formed to cover less than 50% of the base plate 10 and the cover 40.

[0027] 4 is a cross-sectional view through the sealing surfaces 14, 44 of the base plate 10 and the cover 40. For example, the cross-section of FIG. 4 is taken along dashed line A in FIG. 1 and dashed line A in Fig. 3 2 4 illustrates the structure and interaction of the sealing surfaces 14, 44 when the cover 40 is placed on the base plate 10 (eg, as shown in FIG. 1B).

[0028] Sealing surface 14 is formed on base plate body 16 and sealing surface 44 is formed on cover body 46. Base plate body 16 and cover body 46 are each formed of a metal. Base plate body 16 and cover body 46 may be formed of the same metal. In one embodiment, base plate body 16 comprises aluminum and sealing surface 14 is formed on the aluminum of base plate body 16. In one embodiment, cover body 46 comprises aluminum and sealing surface 44 is formed on the aluminum of cover body 46.

[0029] Each sealing face 14, 44 includes a wear-resistant outermost coating 14A, 44A. Each wear-resistant outermost coating 14A, 44A extends along the entire length of that sealing face 14, 14. For example, the wear-resistant outermost coating 14A extends along the entire periphery of the base plate 12, similar to that described above for sealing face 14 and shown in FIG.

[0030] 4, along each sealing surface 14 of the base plate 10, a wear-resistant outermost coating 14A provides the outer surface 18 of the base plate 10. Along each sealing surface 44 of the cover 40, a wear-resistant outermost coating 44A provides the outer surface 48 of the cover 40. Thus, when the cover 40 is placed on the base plate 10, it only contacts the base plate 10 via one or more of the wear-resistant outermost surfaces 14A, 44A.

[0031] Each of the wear-resistant outermost coatings 14A, 44A has a Rockwell C hardness of about 70 or greater. Rockwell C hardness is measured and determined in accordance with ASTM E18-20. In one embodiment, the wear-resistant outermost coatings 14A, 44A have a Rockwell C hardness of about 80 or greater. For example, the wear-resistant coatings 14A and / or 44A may be, but are not limited to, titanium nitride, chromium nitride, diamond-like carbon, and diamond-nickel composites. In one embodiment, the wear-resistant coatings 14A and / or 44A are diamond-nickel composites. In another embodiment, the wear-resistant coatings 14A and / or 44A are diamond-like carbon. In yet another embodiment, the wear-resistant coatings 14A and / or 44A are titanium nitride or chromium nitride. Wear-resistant coatings incorporating cobalt or cobalt composites having a Rockwell C hardness of about 70 or greater are also contemplated.

[0032] The outermost wear-resistant coatings 14A, 44A have a thickness T that is less than the thickness of the base plate body 16 or cover body 46 on which they are formed. 1 , T 2 In one embodiment, the wear-resistant outermost coating 14A, 44A has a thickness of about 0.1 to about 100 micrometers. In one embodiment, the wear-resistant outermost coating 14A, 44A has a thickness of about 0.1 to about 60 micrometers. In one embodiment, the wear-resistant outermost coating 14A, 44A has a thickness of about 0.1 to about 40 micrometers. Depending on the application, the sealing surface 14 of the base plate 10 can have a wear-resistant outermost coating 14A that can be the same or different from the wear-resistant outermost coating 44A provided on the sealing surface 44 of the cover.

[0033] As shown in FIG. 4, an inner layer 20 is provided between the outermost wear-resistant coating 14A and the base plate body 16. The inner layer 20 is formed on the base plate body 16, and the outermost wear-resistant coating 14A is on the laminated inner layer 20 and the base plate body 16. For example, the inner layer 20 may be, but is not limited to, nickel. In one embodiment, the base plate 10 may not include the inner layer 20. For example, the outermost wear-resistant coating 14A may be formed directly on the material of the base plate body 16. In another embodiment, multiple inner layers 20 may be provided between the outermost wear-resistant coating 14A and the base plate body 16. For example, the base plate body 16 may include an inner layer 20 that improves one or more properties of the base plate 10 (e.g., reduced reactivity, increased strength, etc.) and / or one or more properties of the outermost wear-resistant coating 14A (e.g., increased strength, increased adhesion of the outermost wear-resistant coating, etc.). In one embodiment, the cover 40 can include an inner layer 50 in a manner similar to that described above.

[0034] In Figs. 1A-4, both the base plate 10 and the cover 40 are provided with at least one sealing surface 14, 44 having a wear-resistant outermost coating 14A, 44A. The sealing surface 14 of the base plate 10 directly contacts the sealing surface 44 of the cover 40. More specifically, the wear-resistant outermost coating 14A of the base plate 10 directly contacts the wear-resistant outermost coating 44A of the cover 40. In other embodiments, the sealing surface and its wear-resistant outermost coating may not be in contact with the wear-resistant outermost coating of the opposing sealing surface. The sealing surface 14, 44 and its wear-resistant outermost coating 14A, 44A may be in direct contact with a material other than the wear-resistant outermost coating. For example, the sealing surface 14, 44 and its wear-resistant outermost coating 14A, 44A may be in direct contact with the metal of the opposing base plate body 16 or cover body 46, or with a coating (e.g., layer 20, layer 50, etc.) on said opposing base plate body 16 or cover body.

[0035] However, it should be understood that in some embodiments, only one of the base plate 10 and the cover 40 may have a sealing surface. For example, the cover 40 may be provided with one or more sealing surfaces 44 while the base plate 10 does not include a sealing surface, or vice versa. In such a configuration, the wear-resistant outermost coating 44A of the cover 40 contacts a different material of the base plate 10 (e.g., the metal of the base plate body 16, layer 20, etc.).

[0036] 5 is a perspective view of a reticle pod 200, according to one embodiment. Reticle pod 200 includes an inner pod 210 and an outer pod 220. For example, reticle pod 200 may be, but is not limited to, a reticle pod for extreme ultraviolet ("EUV") processing of photolithography masks.

[0037] The inner pod 210 includes a cover 212 and a base plate 214. The cover 212 and the base plate 214 are configured to be bonded together. When bonded together, the cover 212 and the base plate 214 define an interior space sized and shaped to accommodate a reticle 230 for use. For example, the reticle 230 may be, but is not limited to, a photolithography mask used for extreme ultraviolet (EUV) processing. In some embodiments, at least one of the cover 212 and the base plate 214 includes one or more sealing surfaces 216 similar to those described above for the base plate 10 and the cover 40 of FIGS. 1A-3. In some embodiments, the cover 212 and the base plate 214 each include at least one of the sealing surfaces 216 (obscured in FIG. 5 for the cover 212). Each of the sealing surfaces 216 includes a wear-resistant outermost coating. The wear-resistant outermost coating may be, for example, the wear-resistant outermost coating 14A described above for FIG. 4. The cover 212 can be, for example, the cover 40 described above and shown in Figures 1A, 1B, and 3. The base plate 214 can be, for example, the base plate 10 described above and shown in Figures 1A, 1B, and 2.

[0038] The outer pod 220 includes an outer pod dome 222 and an outer pod door 224. The outer pod 220 is configured to house the inner pod 210 within an interior space defined by the outer pod dome 222 and the outer pod door 224. The outer pod dome 222 can be secured to the outer pod door 224 to enclose the interior space and house the inner pod 210, for example, during transport and handling of the reticle pod 200. The outer pod dome 222 and the outer pod door 224 can each include or be made entirely of one or more polymeric materials.

[0039] 6 is a block diagram of a method 300 for manufacturing a reticle pod. For example, the method 300 may form the reticle pod 300 described above and illustrated in FIG. 5, or may form one or both of the base plate 10 and cover 40 for a reticle pod described above and illustrated in FIGS. 1A-4. In one embodiment, the reticle pod is an EUV reticle pod. The method 300 begins at 310.

[0040] At 310, a base plate (e.g., base plate 10, base plate 214) and a cover (e.g., cover 40, cover 212) for a reticle pod are provided. In one embodiment, 310 can include forming one or both of the base plate and the cover. The method 300 then proceeds to 320.

[0041] At 320, one or more sealing surfaces (e.g., sealing surface 14, sealing surface 44, sealing surface 216) are formed on at least one of the base plate body (e.g., base plate body 16) of the base plate and the cover body (e.g., cover body 46) of the cover. The one or more sealing surfaces are configured to provide sealing between the base plate and the cover. Each of the one or more sealing surfaces includes a wear-resistant outermost coating (e.g., wear-resistant outermost coating 14A, wear-resistant outermost coating 44A) having a Rockwell C hardness of about 70 or greater. Non-limiting examples of methods by which the wear-resistant outermost coating may be formed include physical vapor deposition, sputter deposition, chemical vapor deposition, and plasma-enhanced chemical vapor deposition.

[0042] In one embodiment, forming one or more sealing surfaces 320 includes forming a sealing surface on a base plate body 322. Forming a sealing surface on a base plate body 322 includes forming a wear-resistant outermost coating on the base plate body (e.g., wear-resistant outermost coating 14A). The wear-resistant outermost coating is disposed on the base plate body such that it directly contacts the cover when the cover is placed on the base plate.

[0043] In one embodiment, forming one or more sealing surfaces 320 includes forming at least one sealing surface on the cover body 324. Forming a sealing surface on the cover body 324 includes forming a wear-resistant outermost coating on the cover body (e.g., wear-resistant outermost coating 44A). The wear-resistant outermost coating is disposed on the cover body such that it directly contacts the base plate when the cover is placed on the base plate.

[0044] In some embodiments, forming the one or more sealing surfaces 320 includes both forming a sealing surface on the base plate body 322 and forming a sealing surface on the cover body 324. In other embodiments, forming the one or more sealing surfaces 220 can include only one of forming a sealing surface on the base plate body 322 or forming a sealing surface on the cover body 324.

[0045] Optionally, after their formation, the outermost wear-resistant coatings can be polished to a desired surface roughness or smoothness to increase the contact surface area and minimize surface defects in the wear-resistant coating.

[0046] It should be understood that the method 300 in various embodiments can be modified to achieve features equivalent to those described above with respect to the base plate 10 and cover 40 of Figures 1A-4. For example, the method 300 in one embodiment may form one or more sealing surfaces 320 to extend along the entire perimeter of the base plate.

[0047] Aspects: Any of the embodiments 1 to 12 can be combined with any of the embodiments 13 to 20.

[0048] Aspect 1. A pod comprising a cover including a cover body, a base plate including a base plate body, and one or more sealing surfaces formed on one or both of the base plate body and the cover body and providing sealing between the cover and the base plate, each of the one or more sealing surfaces including a wear-resistant outermost coating having a Rockwell C hardness of about 70 or greater.

[0049] Aspect 2. The pod of aspect 1, wherein the Rockwell C hardness of the outermost wear-resistant coating is about 80 or greater.

[0050] Aspect 3. The pod of aspect 1 or 2, wherein the wear-resistant outermost coating is one of titanium nitride, chromium nitride, and diamond-like carbon.

[0051] Aspect 4. The pod of any one of aspects 1 to 3, wherein the wear-resistant outermost coating has a thickness of about 0.1 to about 100 micrometers.

[0052] Aspect 5. The pod of any one of aspects 1-4, wherein the one or more sealing surfaces cover less than 75% of the base plate and less than 75% of the cover.

[0053] Aspect 6. A pod described in any one of aspects 1 to 4, wherein the one or more sealing surfaces include a first sealing surface formed on the base plate body, the base plate including a wear-resistant outermost coating of the first sealing surface, and the wear-resistant outermost coating of the first sealing surface positioned to directly contact the cover when the cover is placed on the base plate.

[0054] Aspect 7. The pod of aspect 6, wherein the base plate body comprises aluminum and the wear-resistant outermost coating is formed on the aluminum.

[0055] Aspect 8. A pod as described in Aspect 6 or 7, wherein the one or more sealing surfaces include a second sealing surface formed on the cover body, the cover including a wear-resistant outermost coating on the second sealing surface, and the wear-resistant outermost coating of the cover positioned so as to directly contact the wear-resistant outermost coating of the base plate when the cover is placed on the base plate.

[0056] Aspect 9. A pod described in any one of aspects 1 to 8, wherein the cover, when placed on the base plate, contacts the base plate only via the one or more wear-resistant outermost surfaces of the one or more sealing surfaces.

[0057] Aspect 10. A pod described in any one of aspects 1 to 9, wherein the one or more wear-resistant outer surfaces of the one or more sealing surfaces extend along the entire circumference of the base plate.

[0058] Aspect 11. The pod described in any one of aspects 1 to 9, wherein the pod is an EUV reticle pod.

[0059] Aspect 12. A pod described in any one of aspects 1 to 11, further comprising an outer pod dome and an outer pod door, the outer pod dome and the outer pod door configured to house the base plate and the cover within the outer pod dome when the outer pod door is attached to the outer pod dome.

[0060] Aspect 13. A method for manufacturing a reticle pod, comprising forming one or more sealing surfaces on at least one of a base plate body of a base plate and a cover body of a cover to provide sealing between the base plate and the cover, wherein each of the one or more sealing surfaces comprises a wear-resistant outermost coating having a Rockwell C hardness of about 70 or greater.

[0061] Aspect 14. The method of aspect 13, wherein the Rockwell C hardness of the outermost wear-resistant coating is about 80 or greater.

[0062] Aspect 15. The method of aspect 13 or 14, wherein the wear-resistant outermost coating is one of titanium nitride, chromium nitride, and diamond-like carbon.

[0063] Aspect 16. The method of any one of aspects 13 to 15, wherein the wear-resistant outermost coating has a thickness of about 0.1 to about 100 micrometers.

[0064] Aspect 17. A method according to any one of aspects 13 to 16, wherein forming the one or more sealing surfaces on the at least one of the base plate body and the cover body includes forming the one or more sealing surfaces to cover less than 75% of the at least one of the base plate and less than 75% of the cover.

[0065] Aspect 18. The method of any one of aspects 13 to 17, wherein the one or more sealing surfaces include a first sealing surface, and forming the one or more sealing surfaces includes forming a wear-resistant outermost coating of the first sealing surface on the base plate body, and the wear-resistant outermost coating of the first sealing surface is positioned so as to directly contact the cover when the cover is placed on the base plate.

[0066] Aspect 19. The method of any one of aspects 13 to 18, wherein the base plate body comprises aluminum, and forming the one or more sealing surfaces comprises forming the wear-resistant outermost coating of the first sealing surface on the aluminum of the base plate.

[0067] Aspect 20. The method of any one of aspects 13 to 19, wherein forming the one or more sealing surfaces includes forming the one or more wear-resistant outer surfaces of the one or more sealing surfaces to extend along an entire circumference of the base plate.

[0068] The examples disclosed in this application should be considered in all respects as illustrative and not restrictive. The scope of the disclosure is indicated by the appended claims, rather than the foregoing description, and all changes that come within the meaning and range of equivalence of the claims are intended to be embraced therein.

Claims

1. A cover including a cover body; a base plate including a base plate body; one or more sealing surfaces formed on one or both of the base plate body and the cover body to provide sealing between the cover and the base plate, the one or more sealing surfaces each including a wear-resistant outermost coating having a Rockwell C hardness of about 70 or greater; A pod equipped with

2. The pod of claim 1 , wherein the Rockwell C hardness of the outermost wear-resistant coating is about 80 or greater.

3. The pod of claim 1 , wherein the outermost wear-resistant coating is one of titanium nitride, chromium nitride, diamond-like carbon, or a diamond-nickel composite.

4. 2. The pod of claim 1, wherein a first sealing surface having a first wear-resistant outermost coating is formed on the base plate body and a second sealing surface having a second wear-resistant outermost coating is formed on the cover body, the first wear-resistant outermost coating being the same as the second wear-resistant outermost coating.

5. 2. The pod of claim 1, wherein a first sealing surface having a first wear-resistant outermost coating is formed on the base plate body and a second sealing surface having a second wear-resistant outermost coating is formed on the cover body, the first wear-resistant outermost coating being different from the second wear-resistant outermost coating.

6. 2. The pod of claim 1, wherein the one or more sealing surfaces include a first sealing surface formed on the base plate body, the base plate including a wear-resistant outermost coating of the first sealing surface, the wear-resistant outermost coating of the first sealing surface positioned to directly contact the cover when the cover is placed on the base plate.

7. The pod of claim 6 , wherein the base plate body comprises aluminum and the wear-resistant outermost coating is formed on the aluminum.

8. 7. The pod of claim 6, wherein the one or more sealing surfaces include a second sealing surface formed on the cover body, the cover including a wear-resistant outermost coating on the second sealing surface, the wear-resistant outermost coating of the cover positioned to directly contact the wear-resistant outermost coating of the base plate when the cover is placed on the base plate.

9. The pod of claim 1 , wherein the cover, when placed on the base plate, contacts the base plate only via the one or more wear-resistant outermost surfaces of the one or more sealing surfaces.

10. The pod of claim 1 , wherein the one or more wear-resistant outer surfaces of the one or more sealing surfaces extend along an entire periphery of the base plate.

11. 1. A method of manufacturing a reticle pod, comprising: forming one or more sealing surfaces on at least one of a base plate body of a base plate and a cover body of a cover to provide sealing between the base plate and the cover, each of the one or more sealing surfaces including a wear-resistant outermost coating having a Rockwell C hardness of about 70 or greater; A method comprising:

12. 12. The method of claim 11, wherein the Rockwell C hardness of the outermost wear-resistant coating is about 80 or greater.

13. The method of claim 11, wherein the outermost wear-resistant coating is one of titanium nitride, chromium nitride, diamond-like carbon, or a diamond-nickel composite.

14. The method of claim 11, wherein the outermost wear-resistant coating has a thickness of about 0.1 to about 100 micrometers.

15. 12. The method of claim 11, wherein forming the one or more sealing surfaces on the at least one of the base plate body and the cover body includes forming the one or more sealing surfaces to cover less than 75% of the at least one of the base plate and less than 75% of the cover.

16. the one or more sealing surfaces includes a first sealing surface; forming the one or more sealing surfaces includes forming a wear-resistant outermost coating of the first sealing surface on the base plate body, the wear-resistant outermost coating of the first sealing surface positioned to directly contact the cover when the cover is placed on the base plate. The method of claim 11.

17. the base plate body comprises aluminum; forming the one or more sealing surfaces includes forming the wear resistant outermost coating of the first sealing surface on the aluminum of the base plate.

17. The method of claim 16.

18. The method of claim 11 , wherein forming the one or more sealing surfaces comprises forming the one or more wear-resistant outer surfaces of the one or more sealing surfaces to extend around an entire circumference of the base plate.

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